CN106403836A - Deformation and slope synchronous measurement device and method based on digital speckle interferometry - Google Patents
Deformation and slope synchronous measurement device and method based on digital speckle interferometry Download PDFInfo
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- CN106403836A CN106403836A CN201611149902.7A CN201611149902A CN106403836A CN 106403836 A CN106403836 A CN 106403836A CN 201611149902 A CN201611149902 A CN 201611149902A CN 106403836 A CN106403836 A CN 106403836A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
- G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A10/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE at coastal zones; at river basins
- Y02A10/23—Dune restoration or creation; Cliff stabilisation
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Abstract
The invention discloses a deformation and slope synchronous measurement device and method based on digital speckle interferometry. Light from a laser is divided into a first beam of light and a second beam of light by a beam splitter prism. The first beam of light is reflected onto an imaging target surface of a monochrome CCD camera by another beam splitter prism, thereby forming a reference optical path. The second beam of light is reflected to a surface of a measured object via a plane mirror, thereby forming a laser speckle field. The monochrome CCD camera receives the laser speckle field at the same time from two directions which are symmetric to an optical axis, so that two object optical paths are formed. By switching the on/off state of the reference optical path and the object optical path, a digital speckle interference optical path and a shear digital speckle interference optical path for synchronous measurement are formed, a speckle interference fringe phase and a shear speckle interference fringe phase are extracted, and the surface deformation and slope of the measured object are measured. The invention realizes synchronous and independent measurement of deformation and slope information of the measured object, without repeated loading and later separation. The phase shift technology is adopted, thereby improving the measurement accuracy. The dual speckle interference optical paths with adjustable measurement sensitivity and object-light sharing are constructed, so the whole structure of the system is simple and compact.
Description
Technical field
The present invention relates to field of optical measuring technologies is and in particular to a kind of digital speckle interference measuring method.
Background technology
Digital speckle interference technology and shearing digital speckle interference technology be two kinds complete based on laser speckle interferometry technology
Field, noncontact, in high precision, highly sensitive optical measuring technique.The former is widely used in the deformation measurement of body surface, vibration
Analysis, pattern test and defects detection etc., and the latter can direct measurement deformation of body slope, be mainly used in industrial non-destructive inspection
Survey field.Integrate digital speckle interference technology and shearing digital speckle interference technology carries out the same of deformation of body and its slope information
Pacing quantity research, shows for the internal flaw Non-Destructive Testing solving the problems, such as to have relatively large deformation and relatively small slope object
Obtain more convenient, this is also that the Non-Destructive Testing realizing dissimilar defect in engineering structure provides multiple choices.
Measuring method is largely divided into three classes simultaneously to be currently based on the deformation of body of digital speckle interference technology and its slope：The
One class is multiple aperture shearing digital speckle interference technology, and this technology need to make special multiple aperture mould for different test objects
Plate, light path system is complex, and the deformation obtaining and its slope information intercouple, not independent；Equations of The Second Kind is Michael
Inferior formula shears digital speckle interference technology, and the carrier frequency deformation information that this technology obtains and slope information intercouple, not independent, needs
Suitable frequency window is set in a frequency domain and is carried out later stage separation.Though this technology is suitable for the dynamic of deformation and its slope information
State measures, but certainty of measurement is not high；3rd class is digital speckle interference technology and combining of shearing digital speckle interference technology, should
Though technology can independently obtain deformation and its slope information, do not enable the synchro measure of deformation and its slope information.
In sum, prior art does not all enable to deform and its synchronous, independence of slope information and high-acruracy survey, because
And seriously hinder development and the application of digital speckle interference e measurement technology.
Content of the invention
Goal of the invention：Present invention aims to the deficiencies in the prior art, one kind is provided to be based on digital speckle interference
Deformation and slope synchronous measuring apparatus and measuring method, be capable of the same of testee surface deformation and its slope information
Step, independence and high-acruracy survey, make that measurement apparatus structure is simple, measuring method is convenient.
Technical scheme：The invention provides a kind of deformation based on digital speckle interference and slope synchronous measuring apparatus, bag
Include generating laser, the first Amici prism, the second Amici prism, monochromatic CCD camera, level crossing, side be all-trans right angle prism,
Lens, piezoelectric ceramics phase-shifter and computer；
The laser of described laser transmitter projects is divided into reflected light and transmitted light through the first Amici prism, corresponds to reference respectively
Light path and object light road, wherein, transmitted light reflexes to testee surface through level crossing, has been arranged symmetrically two facial planes along optical axis
Mirror, the line midpoint of two sides level crossing is provided with side and is all-trans right angle prism, and the back side of wherein one face level crossing is provided with piezoelectricity
Ceramic phase-shifter and are all-trans between right angle prism and are provided with optical switch in wherein one face level crossing and side, testee surface dissipates
It is all-trans right angle prism, lens and the in the side that the object light penetrated is passed sequentially through along along optical axis direction arrangement by the reflection of two sides level crossing
Two Amici prisms enter into monochromatic CCD camera imaging target surface；Additionally, the reflected light that laser is divided into through the first Amici prism is through optics
Switch and the second Amici prism also project in monochromatic CCD camera imaging target surface；
Described monochromatic CCD camera is connected with computer by image pick-up card, and described piezoelectric ceramics phase-shifter passes through direct current
Voltage-stabilized power supply is connected with computer.
Further, the distance between two sides level crossing being arranged symmetrically along optical axis is adjustable, by changing the angle that object light receives
Degree, thus adjust the measurement sensitivity of system.
Further, described computer controls piezoelectric ceramics phase-shifter drives level crossing translation slight distance to produce phase shift, light
The change of path difference leads to the change of phase place, can improve body surface deformation and its certainty of measurement of slope.
A kind of deformation based on digital speckle interference and slope method for synchronously measuring, comprise the following steps：
(1) before testee load deflection, two optical switches are opened, monochromatic CCD camera gathers digital speckle interference figure
As reference picture；
(2) after testee load deflection, monochromatic CCD camera collection deformation after digital speckle interference image, and with reference
Image is subtracted each other in real time, is coupled digital speckle interference fringe pattern in real time；
(3) open the optical switch in reference path, and close optical switch in an object light road so that whole system
Become digital speckle pattern interferometry system, realize the measurement of full field of testee surface surface deformation；Open the light in an object light road
Learn switch, and close the optical switch in reference path so that whole system becomes shearing digital speckle pattern interferometry system, realize quilt
Survey the measurement of full field of body surface surface deformation slope；
(4) pass through optical switch and switch between digital speckle interference light path and shearing digital speckle interference light path, and profit
Computerized control piezoelectric ceramics phase-shifter synchronous acquisition several digital speckle interference bar graph of phase-shift phase and the shearing such as there is
Digital speckle interference bar graph；
(5) utilize phase-shifting technique to demodulate deformation and the slope information wrapped phase figure of testee, and line phase is entered to it
Unpacking is processed, and obtains the phase diagram of two width continuous distributed；
(6) deformation and the slope information of testee is calculated respectively using the phase diagram of two width continuous distributed.
Further, testee areal deformation and its slope are expressed as：
In formula, λ is the wavelength of laser used, and θ is the angle receiving object light and optical axis, ΔxFor testee in the x-direction
Object plane shearing displacement, δwThe phase distribution of corresponding testee surface surface deformation, δxCorresponding testee surface surface deformation slope
Phase distribution.
Beneficial effect：The setting of speckle interference light path of the present invention achieves digital speckle interference light path and shearing digital speckle
The object light of optical interference circuit shares, and reduces the complexity of measuring system；The same of deformation of body and its slope information can be realized
Walk disposable measurement, need not repeat to load, also can achieve that deformation of body and its independence of slope information measure it is not necessary to the later stage divides
From process；Using phase-shifting technique, improve the certainty of measurement of deformation of body and its slope information；Observed using twocouese, realize surveying
Amount sensitivity is adjustable, makes overall system architecture simple, compact.
Brief description
Fig. 1 is the structural representation of measurement apparatus of the present invention；
Fig. 2 a is the speckle interference fringe pattern of corresponding surface deformation in embodiment；
Fig. 2 b is the speckle-shearing interferometry bar graph of corresponding slope in embodiment；
Fig. 2 c is the continuous phase distribution map of corresponding surface deformation in embodiment；
Fig. 2 d is the continuous phase distribution map of corresponding slope in embodiment.
Specific embodiment
Below technical solution of the present invention is described in detail, but protection scope of the present invention is not limited to described enforcement
Example.
Embodiment：A kind of deformation based on digital speckle interference and slope synchronous measuring apparatus, as shown in figure 1, include swashing
Optical transmitting set 1, the first Amici prism 2, the first optical switch 3, monochromatic CCD camera 4, the second Amici prism 5, imaging len 6, side
Be all-trans right-angle prism 7, the second optical switch 8, the first level crossing 9, the second level crossing 10, the 3rd level crossing 11, fourth plane in face
Mirror 12 and testee 13.
Generating laser 1 sends laser in the horizontal direction, through the first Amici prism 2 positioned at generating laser 1 left side
After be divided into reflected light and transmitted light, therefore form reference path and object light road.
What object light road was the transmitted light that separates through the 3rd level crossing 11 and fourth plane mirror 12 reflexes to testee 13
Surface, wherein, the 3rd level crossing 11 is arranged on the left of Amici prism, and fourth plane mirror 12 is located at the upper of the 3rd level crossing 11
Side, two sides level crossing is parallel to each other.Transmitted light projects along parallel optical axis direction through the first Amici prism 2, with two sides level crossing
Incidence angle all be in 45 ° so that through reflection transmitted light can be along optical axis direction vertical irradiation on testee 13 surface.
First level crossing 9 and the second level crossing 10 are arranged symmetrically along optical axis, and on the line midpoint of two sides level crossing, be all-trans directly in setting side
Angle prism 7, testee 13, side are all-trans right angle prism 7, imaging len 6, the second Amici prism 5 and monochromatic CCD camera
4 are sequentially placed along optical axis direction.After transmission light irradiation testee 13, the object light of testee 13 surface scattering is through first
Level crossing 9 and the reflection of the second level crossing 10, are all-trans after right angle prism 7 receives by side and are imaged on list through imaging len 6
In color CCD camera 4 imaging target surface.One of back side in first level crossing 9 and the second level crossing 10 is provided with piezoelectric ceramics phase
Move device, meanwhile, are all-trans between right angle prism 7 and are provided with the second optical switch 8 in one of level crossing and side.
Reference path is the reflected light that the first Amici prism 2 separates, and projects along vertical optical axis direction, is opened by the first optics
Close 3, just past the second Amici prism 5 being arranged between imaging len 6 and monochromatic CCD camera 4, project monochromatic CCD phase
As reference light in machine 4 imaging target surface.
Tilt any one side in the first level crossing 9 and the second level crossing 10 so that observe from two symmetry directions two
Bundle object light forms the image of two dislocation in monochromatic CCD camera 4 imaging target surface；Monochromatic CCD camera 4 pass through image pick-up card with
Computer connects, and piezoelectric ceramics phase-shifter is connected with computer by D.C. regulated power supply；Open the first light in reference path
Learn switch 3, and close the second optical switch 8 in an object light road so that whole system becomes digital speckle pattern interferometry system, real
The measurement of full field of existing testee 13 surface surface deformation；Open the second optical switch 8 in an object light road, and close reference
The first optical switch 3 in light path, so that whole system becomes shearing digital speckle pattern interferometry system, realizes testee 13 surface
The measurement of full field of deformation slope.
Measuring method concrete operations using above-mentioned measurement apparatus are as follows：
Step one：Before testee 13 load deflection, finely tune the first level crossing 9 and the second level crossing 10, adjust monochromatic
CCD camera 4, opens all of optical switch so that testee 13 imaging clearly in monochromatic CCD camera 4 is overlapping, size is fitted
In, take acquisition window；
Step 2：Tilt the one side in the first level crossing 9 and the second level crossing 10 so that two of testee 13 clear
Imaging misplaces, and now opens generating laser 1, and light beam is radiated on testee 13, optical axis and the first level crossing 9
It is designated as θ, the digital speckle interference before monochromatic CCD camera 4 collection deformation with the angle of the second level crossing 10 symmetric double direction of observation
Image is as reference picture；
Step 3：Testee 13 is loaded so as to be there is surface deformation, digital speckle interference figure after collection deformation
As simultaneously being subtracted each other in real time with reference picture in step 2, deformed and its slope coupling digital speckle interference bar graph
Picture；Open reference path the first optical switch 3, close object light light path the second optical switch 8, obtain the numeral of corresponding surface deformation
Speckle interference fringe pattern, conversely, obtain the shearing digital speckle interference bar graph of corresponding slope；
Step 4：The first level crossing 9 or the second level crossing 10 is driven to produce small translation by piezoelectric ceramics phase-shifter, real
Existing time-phase displacement, the optical switch handover operation of cooperation reference path and object light light path, record several respectively successively and the phase such as there is
The digital speckle interference bar graph of shifting amount and shearing digital speckle interference bar graph；
Step 5：Select suitable phase shift algorithm accurately extract corresponding testee 13 deform and its slope information two width
Phase diagram, and carried out Phase- un- wrapping process, obtain two width continuous distributed phase diagrams further；
Step 6：According to x, y, z direction shown in Fig. 1, testee 13 areal deformation and the deformation phase place that causes of slope
Change is represented by：
In formula, w represents the surface deformation on testee 13 surface, and λ is the wavelength of laser used, θ represent reception object light with
The angle of testee 13 surface normal, ΔxRepresent testee 13 object plane shearing displacement in the x-direction.
According to formula (1), (2), testee 13 areal deformation and its slope can be ultimately expressed as：
According to formula (3), (4), in conjunction with two width continuous distributed phase diagrams, you can obtain testee 13 surface deformation and its tiltedly
Rate component, w and
In the same manner, if two object light roads are rotated 90 ° around optical axis, that is, the first level crossing 9, the second level crossing 10 and side are complete
Anti- right-angle prism 7 rotates 90 ° along optical axis, can obtain testee 13 surface deformation according to above-mentioned steps and its another slope divides
Amount, that is, w and
The present embodiment so that surrounding is clamped, center is subject to load body surface as tested surface, by the inventive method, using ripple
The laser of a length of 632.8nm, object light acceptance angle is 10 °, and object plane shearing displacement is 6mm, the deformation after measurement testee 13 loading
And its slope information w andMeasurement result, as shown in Fig. 2 a～2d, shows that the inventive method can realize testee 13
Surface deformation and its slope information synchro measure.
Claims (5)
1. a kind of deformation based on digital speckle interference and slope synchronous measuring apparatus it is characterised in that：Including generating laser,
First Amici prism, the second Amici prism, monochromatic CCD camera, level crossing, side are all-trans right angle prism, lens, piezoelectric ceramics
Phase-shifter and computer；
The laser of described laser transmitter projects is divided into reflected light and transmitted light through the first Amici prism, corresponds to reference path respectively
With object light road, wherein, transmitted light reflexes to testee surface through level crossing, has been arranged symmetrically two sides level crossing along optical axis, and two
The line midpoint of facial plane mirror is provided with side and is all-trans right angle prism, and the back side of wherein one face level crossing is provided with piezoelectric ceramics phase
Move device and are all-trans between right angle prism and are provided with optical switch in wherein one face level crossing and side, the thing of testee surface scattering
It is all-trans right angle prism, lens and the second light splitting in the side that light is passed sequentially through along along optical axis direction arrangement by the reflection of two sides level crossing
Prism enters into monochromatic CCD camera imaging target surface；Additionally, the reflected light that is divided into through the first Amici prism of laser through optical switch and
Second Amici prism also projects in monochromatic CCD camera imaging target surface；
Described monochromatic CCD camera is connected with computer by image pick-up card, and described piezoelectric ceramics phase-shifter passes through DC voltage-stabilizing
Power supply is connected with computer.
2. the deformation based on digital speckle interference according to claim 1 and slope synchronous measuring apparatus it is characterised in that：
The distance between two sides level crossing being arranged symmetrically along optical axis is adjustable.
3. the deformation based on digital speckle interference according to claim 1 and slope synchronous measuring apparatus it is characterised in that：
Described computer controls piezoelectric ceramics phase-shifter drives level crossing translation to produce phase shift.
4. the deformation based on digital speckle interference according to claim 1 and slope method for synchronously measuring it is characterised in that：
Comprise the following steps：
(1) before testee load deflection, two optical switches are opened, monochromatic CCD camera collection digital speckle interference image is made
For reference picture；
(2) after testee load deflection, digital speckle interference image after monochromatic CCD camera collection deformation, and and reference picture
Subtracted each other in real time, coupled digital speckle interference fringe pattern in real time；
(3) open the optical switch in reference path, and close the optical switch in an object light road so that whole system becomes
Digital speckle pattern interferometry system, realizes the measurement of full field of testee surface surface deformation；The optics opened in an object light road is opened
Close, and close the optical switch in reference path so that whole system becomes shearing digital speckle pattern interferometry system, realize measured object
The measurement of full field of body surface face surface deformation slope；
(4) pass through optical switch and switch between digital speckle interference light path and shearing digital speckle interference light path, and using meter
Calculation machine controls piezoelectric ceramics phase-shifter synchronous acquisition, and several have and wait the digital speckle interference bar graph of phase-shift phase and shearing digital
Speckle interference fringe pattern；
(5) utilize phase-shifting technique to demodulate deformation and the slope information wrapped phase figure of testee, and phase unwrapping is carried out to it
Wrap up in process, obtain the phase diagram of two width continuous distributed；
(6) deformation and the slope information of testee is calculated respectively using the phase diagram of two width continuous distributed.
5. the deformation based on digital speckle interference according to claim 4 and slope method for synchronously measuring it is characterised in that：
Testee areal deformation and its slope are expressed as：
In formula, λ is the wavelength of laser used, and θ is the angle receiving object light and optical axis, ΔxFor testee object plane in the x-direction
Shearing displacement, δwThe phase distribution of corresponding testee surface surface deformation, δxThe phase of corresponding testee surface surface deformation slope
Bit distribution.
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| CN107656288B (en) * | 2017-09-15 | 2020-01-14 | 中国科学院长春光学精密机械与物理研究所 | Novel shearing light beam imaging system and target image acquisition method |
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| CN108106556A (en) * | 2018-02-02 | 2018-06-01 | 上海交通大学 | Based on the curved face object of digital speckle interference from face distortion measurement method and device |
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| CN108955553A (en) * | 2018-07-26 | 2018-12-07 | 苏州科技大学 | Multipoint strain gauging device and method based on laser digital speckle interference positioning |
| CN110657755B (en) * | 2019-09-30 | 2021-06-29 | 上海交通大学 | Speckle interference deformation measurement system calibration method and loading device |
| CN110657755A (en) * | 2019-09-30 | 2020-01-07 | 上海交通大学 | Speckle interference deformation measurement system calibration method and loading device |
| CN111024001A (en) * | 2019-12-13 | 2020-04-17 | 北京信息科技大学 | Roll angle measuring method and device |
| CN111024001B (en) * | 2019-12-13 | 2022-01-07 | 北京信息科技大学 | Roll angle measuring method and device |
| CN110987677A (en) * | 2019-12-25 | 2020-04-10 | 上海交通大学 | Method and device for improving micro-deformation loading precision |
| CN110987677B (en) * | 2019-12-25 | 2021-08-10 | 上海交通大学 | Method and device for improving micro-deformation loading precision |
| CN111336942A (en) * | 2020-04-12 | 2020-06-26 | 北京工业大学 | Shooting method for three-dimensional strain deformation measurement |
| CN111751383A (en) * | 2020-07-17 | 2020-10-09 | 盐城工学院 | Defect depth detection method integrating speckle interference and shearing speckle interference |
| CN111964601A (en) * | 2020-07-31 | 2020-11-20 | 盐城工学院 | Speckle interference multi-parameter measuring system and method based on Taffy optical path |
| CN111964601B (en) * | 2020-07-31 | 2022-02-22 | 盐城工学院 | Speckle interference multi-parameter measuring system and method based on Taffy optical path |
| CN112268522A (en) * | 2020-09-30 | 2021-01-26 | 西安理工大学 | Method for measuring shape error of helical curved surface based on double-optical-path synchronous phase shift interference |
| CN112268522B (en) * | 2020-09-30 | 2022-03-15 | 西安理工大学 | Method for measuring shape error of helical curved surface based on double-optical-path synchronous phase shift interference |
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