CN112268522A - Method for measuring shape error of helical curved surface based on double-optical-path synchronous phase shift interference - Google Patents
Method for measuring shape error of helical curved surface based on double-optical-path synchronous phase shift interference Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses a method for measuring the shape error of a helical curved surface based on double-optical-path synchronous phase shift interference, which is characterized in that a front optical wedge and a rear optical wedge are arranged along a measuring optical path; and a structural optical sensor is arranged along the scanning measurement optical path, and a measured object is placed between the front optical wedge and the rear optical wedge. The structured light sensor is introduced into an interference measurement device, and projected structured light is combined with interference measurement data through relative motion with the surface of a measured object in the measurement process, so that full-field measurement can be ensured when a large spiral angle complex spiral curved surface is measured. The measuring method of the invention introduces the spatial phase shift technology into the interference measuring device, and can obtain a plurality of phase shift interferograms through single measurement shooting, thereby simplifying the steps of the operation process and improving the anti-interference capability of the device.
Description
Technical Field
The invention belongs to the field of optical measurement, and relates to a method for measuring shape error of a helical curved surface based on double-optical-path synchronous phase shift interference.
Background
With the rapid development of the photoelectronic technology and the demand of people in production and life for the measurement precision, the measurement speed and no damage to the measured helicoid, the measurement of the surface shape error of a complex surface part by using the non-contact measurement method of laser interference has become an important research direction. The method embodies the measured physical information as phase information of an interference fringe image, and calculates the surface shape error of the complex helical curved surface by processing the interference fringe image.
The literature search finds that the existing measuring methods for the shape error of the precise spiral curved surface are divided into two types, the first type is a contact type measuring method, such as a three-coordinate measuring machine or a gear measuring center. This type of measurement is based on the measurement feeler sweeping the point on the side surface, and the physical information to be measured is back-calculated by coordinate measurement. However, the method has low measurement efficiency, can scratch the measured helicoid, and can be influenced by factors such as measuring head radius errors and sampling errors. The second type is a non-contact measurement method based on laser interferometry, which can realize high-precision and high-efficiency measurement. Such as laser phase-shifting interferometry, as used in Design of laser interferometric system for measurement of gear flash, published by Optik of Wanjie. The method utilizes PZT to adjust the phase of a reflector to obtain a series of measured helicoid interference fringe images after phase shifting, and the shape error of the gear tooth surface can be calculated after phase extraction and unpacking. Although this method can achieve high-precision measurement of errors in the shape of a gear tooth surface, measurement information is not complete because measurement light is blocked by adjacent surfaces in helical gears with a large helix angle, worm gears, and the like, and full-field measurement cannot be achieved. In addition, the method is based on the step-by-step phase shifting of the piezoelectric ceramics, and is very easy to be interfered by the external environment to cause the reduction of the precision, thereby limiting the practical application effect of the method.
Disclosure of Invention
The invention aims to provide a method for measuring the shape error of a helical curved surface based on double-optical-path synchronous phase shift interference, which solves the problems of low precision and incapability of realizing full-field measurement in the prior art.
The technical scheme adopted by the invention is that a method for measuring the shape error of the helical curved surface based on double-optical-path synchronous phase shift interference is characterized by comprising the following steps:
a measuring device used for a measuring method of a helical curved surface shape error based on double-optical-path synchronous phase shift interference comprises a laser, the laser emits an interference measuring optical path, a polarization beam splitter prism is arranged along the interference measuring optical path and divides the interference measuring optical path into a measuring optical path and a reference optical path which are mutually vertical, a light intensity regulator a, a beam expander a, a front light wedge and a rear light wedge are arranged along the measuring optical path, a measured object is arranged between the front light wedge and the rear light wedge, a reflector a, a light intensity regulator b, a beam expander b, a reflector b and a semi-reflecting semi-transparent mirror are arranged along the reference optical path, the interference measuring optical path and the reference optical path are converged to the semi-reflecting semi-transparent mirror to form an imaging common optical path, a two-dimensional grating, a lens a, a diaphragm, a lens b, a phase delay array, a polaroid and a CCD camera are sequentially arranged along the optical path of the imaging common optical, the computer electric connection has the structure light sensor, and structure light sensor launches line structure light and shines and reflects back the structure light sensor on being surveyed the helicoid, and the light path of structure light is the scanning and measures the light path, and the structure light sensor is provided with motion control mechanism.
The invention is also characterized in that:
and (3) the interference fringe images of the measured helicoid in the step (1) respectively correspond to the phase shift angles of 0, pi/2, pi and 3 pi/2.
in the formula:
n is the total step number of phase shift, the step 3 adopts spatial four-step phase shift, and N is 4;
i is the ith phase shift;
Ii(x, y) is the light intensity at the time of the ith phase shift (x, y);
δithe phase modulation quantity at the ith phase shifting is obtained;
the two-dimensional phase street wrapping mathematical model of the interference fringe image of the measured helicoid can be expressed as:
in the formula: the continuous phase value after unpacking; k is the number of packages.
The formula of the height difference h in step 3 is:
in the formula: λ is the laser wavelength for measurement; alpha is the incident angle of the light on the measured object.
The surface height information y in the step 4 is calculated by using a trigonometry method, and the calculation equation is as follows:
in the formula:
y is the height of the laser irradiation point relative to the reference plane;
x is the displacement between the irradiation point and the image point of the reference point on the imaging surface of the structured light sensor;
a is the imaging object distance of the reference point;
b is the imaging image distance of the irradiation point;
alpha is the incident angle of laser irradiation;
beta is the included angle between the reflected light and the imaging surface of the structured light sensor.
The invention has the beneficial effects that:
1. the invention can obtain the interferogram of multiple phase shifts by single shooting, reduces the shooting times, simplifies the operation process and increases the anti-interference capability of the device.
2. The invention can carry out full-field measurement on the complex helical curved surface, has higher precision compared with the measurement of the traditional contact method, and has larger measurement range compared with other interference methods.
Drawings
FIG. 1 is a schematic structural diagram of a measuring apparatus used in a method for measuring shape error of a helical curved surface based on dual-optical-path synchronous phase-shift interference according to the present invention;
FIG. 2 is a measured helicoid interference fringe image of the method for measuring the shape error of a helicoid based on dual-optical-path synchronous phase-shift interference;
FIG. 3 is a graph showing the result of the method for measuring the error of the helical surface shape based on the dual-optical-path synchronous phase-shift interference according to the present invention reverting the measurement result to the actual measured helical surface;
FIG. 4 is a non-interference image of the object to be measured based on the method for measuring the shape error of the helical curved surface by dual-optical-path synchronous phase-shift interference according to the present invention;
FIG. 5 is a schematic diagram of the regional reliability of a method for measuring the shape error of a helical curved surface based on dual-optical-path synchronous phase-shift interference;
FIG. 6 is a diagram of the result of interferometry of the shape error of a helical curved surface based on dual-optical-path synchronous phase-shift interferometry;
FIG. 7 is a graph of the scanning measurement result of a measurement method of helical surface shape error based on dual-optical-path synchronous phase-shift interference;
fig. 8 is an interference measurement simulation diagram of a method for measuring a helical curved surface shape error based on dual-optical-path synchronous phase shift interference.
In the figure, 1, a He-Ne laser, 2, a polarization beam splitter prism, 3, reflectors a, 4, a light intensity regulator b, 5, a light intensity regulator a, 6, a beam expander b, 7, a beam expander a, 8, a front light wedge, 9, a rear light wedge, 10, a reflector b, 11, a semi-reflecting and semi-transmitting mirror, 12, a two-dimensional grating, 13, lenses a, 14, a diaphragm, 15, lenses b, 16, a phase delay array, 17, a polarizer, 18, a CCD camera, 19, a computer, 20, a structured light sensor and 21 are motion control mechanisms.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Example 1
A method for measuring the shape error of a helical curved surface based on non-double-optical-path synchronous phase shift interference specifically comprises the following steps:
and 5, because the measuring device is used for double-light-path measurement, wherein the interference measurement light path is not a common path, and after shielding the reference light path in the scanning measurement light path and the interference measurement light path, obtaining an object non-interference image on the surface of the measured object, as shown in fig. 4. The light intensity distribution of the theoretically smooth object non-interference image should be uniform, the gray scale should be a natural transition state, and actually the micro-topography is not flat due to processing and use, so that the gray scale presents a condition of jumping distribution. The characteristic is used for selecting a proper threshold value to carry out binarization on the object non-interference image to determine a phase unreliable area in interference measurement, as shown in fig. 5, a black pixel point in a white foreground in the object non-interference image is the phase unreliable area. And eliminating results belonging to unreliable areas in the measurement results of the interference measurement light path, replacing the measurement results of the interference measurement light path as shown in figure 6 with the measurement results of the scanning measurement light path as shown in figure 7, and thus realizing the fusion of the measurement data of the double light paths.
A measuring device used in a method for measuring a helical curved surface shape error based on double-optical-path synchronous phase shift interference is structurally shown in figure 1 and comprises a laser 1, wherein the laser 1 emits an interference measuring optical path, a polarization beam splitter 2 is arranged along the interference measuring optical path, the polarization beam splitter 2 divides the interference measuring optical path into a measuring optical path and a reference optical path which are perpendicular to each other, a light intensity regulator a5, a beam expander a7, a front optical wedge 8 and a rear optical wedge 9 are arranged along the measuring optical path, a measured object is arranged between the front optical wedge 8 and the rear optical wedge 9, a reflecting mirror a3, a light intensity regulator b4, a beam expander b6, a reflecting mirror b10 and a semi-reflecting and semi-transparent mirror 11 are arranged along the reference optical path, the interference measuring optical path and the reference optical path are converged to form an imaging common optical path of the semi-reflecting and semi-transparent mirror 11, and a two-dimensional grating 12, a lens a13, a diaphragm 14, the device comprises a phase delay array 16, a polaroid 17 and a CCD camera 18, wherein the CCD camera 18 is electrically connected with a computer 19, the computer 19 is electrically connected with a structured light sensor 20, the structured light sensor 20 emits structured light under the drive of a motion control mechanism 21, the structured light irradiates the measured helicoid and then is reflected back to the structured light sensor 20, the light path of the structured light is a scanning measurement light path, and the structured light sensor is provided with a motion control mechanism 21.
And (3) the interference fringe images of the measured helicoid in the step (1) respectively correspond to the phase shift angles of 0, pi/2, pi and 3 pi/2.
in the formula:
n is the total step number of phase shift, the step 3 adopts spatial four-step phase shift, and N is 4;
i is the ith phase shift;
Ii(x, y) is the light intensity at the time of the ith phase shift (x, y);
δithe phase modulation quantity at the ith phase shifting is obtained;
the two-dimensional phase street wrapping mathematical model of the interference fringe image of the measured helicoid can be expressed as:
in the formula: the continuous phase value after unpacking; k is the number of packages.
The formula of the height difference h in step 3 is:
in the formula: λ is the laser wavelength for measurement; alpha is the incident angle of the light on the measured object.
The surface height information y in the step 4 is calculated by using a trigonometry method, and the calculation equation is as follows:
in the formula:
y is the height of the laser irradiation point relative to the reference plane;
x is the displacement between the irradiation point and the reference point on the image point of the imaging surface of the structured light sensor 20;
a is the imaging object distance of the reference point;
b is the imaging image distance of the irradiation point;
alpha is the incident angle of laser irradiation;
beta is the angle between the reflected light and the imaging plane of the structured light sensor 20.
The light source in the device is a helium-neon laser 1, and in practice, lasers with different wavelengths can be used as the light source; the front optical wedge 8 and the rear optical wedge 9 in the device are of a double-optical-wedge structure, and can be replaced by other optical elements capable of changing the incident light angle, and the scanning light path part can directly use a commercial structured light sensor 20, and can also use a discrete line laser to combine with a CCD to realize line structured light scanning measurement.
As can be seen in fig. 3: the measurement results obtained in example 1, fig. 3: 5-top end; 6-bottom end; 7-light beam incident end; 8-light beam exit end. The result is obtained by data fusion of an interference light path measurement result figure 6 and a scanning measurement light path result figure 7.
The invention relates to a method for measuring shape error of a helical curved surface based on double-optical-path synchronous phase shift interference, which comprises the following working processes: in the embodiment 1, the surface of a measured surface is a precise helical gear surface, laser emitted by a helium-neon laser 1 is divided into two paths of mutually perpendicular light through a polarization beam splitter prism 2, one path of light is used as an interference measurement light path, and the other path of light is used as a reference light path; light of an interference measurement light path sequentially passes through the light intensity regulator a5, the beam expander a7 and the front double-optical wedge 8 and then obliquely irradiates the surface of a measured gear at a certain angle, at the moment, reflected light irradiates the semi-reflecting and semi-transparent mirror 11 through the deflection angle of the rear double-optical wedge 9 and enters an imaging common light path after being reflected. The light of the reference light path is transmitted through the polarization beam splitter prism 2 and then irradiated onto the reflector a3, after being reflected, the light sequentially passes through the second light intensity adjuster b4 and the beam expander b6 and then is irradiated onto the reflector b10, after being reflected, the light is transmitted through the transflective lens 11 and is converged with the measurement light, the light is diffracted and split by the two-dimensional grating 12 and then passes through the first lens a13, the diffracted light of the order of (+/-1 and +/-1) is made to pass through the diaphragm 14, after being converted into parallel light again by the lens b15, the parallel light sequentially passes through the phase delay array 16 and the polaroid 17 which are composed of wave plates, the measurement light and the reference light are interfered and generate phase shifts of 0, pi/2, pi and 3 pi/2 respectively, and at the moment, the corresponding four interference fringe subgraphs are simultaneously collected by the CCD camera 18 and. When the interference measurement optical path works, the structured light sensor 20 in the scanning measurement optical path emits the structured light, and the whole measured helicoid is scanned and measured under the driving of the motion control mechanism 21. And finally, carrying out data fusion on the results of the scanning measurement and the interference measurement to obtain a final shape error measurement result of the gear tooth surface.
The invention relates to a method for measuring the shape error of a helical curved surface based on double-optical-path synchronous phase shift interference, which has the advantages that:
1. the invention introduces the structured light sensor into the interference measurement device, and the projected structured light can ensure full-field measurement when measuring the complex helical curved surface with a large helical angle by combining interference measurement data through relative motion with the surface of a measured object in the measurement process.
2. The invention introduces the spatial phase shift technology into the interference measurement device, and can obtain a plurality of phase shift interferograms through single measurement shooting, thereby simplifying the steps of the operation process and improving the anti-interference capability of the device.
3. The application of structured light measurement in the field of three-dimensional measurement is mature, and according to embodiment 1, structured light scanning measurement is used as supplement of measurement data in the scanning light path of the invention, so that no difficulty exists in technical implementation, and the core lies in how to implement a fusion algorithm of multi-path measurement data. Therefore, the double-optical-path measurement can greatly supplement and expand the limitation of single-interference measurement optical-path measurement, and can realize real full-field measurement.
Claims (5)
1. A method for measuring the shape error of a helical curved surface based on double-optical-path synchronous phase shift interference is characterized by comprising the following steps:
step 1, a measured object is placed between a front optical wedge (8) and a rear optical wedge (9) in an interference measurement optical path, the interference measurement optical path is adjusted, and when the adjustment of the interference measurement optical path is proper, a CCD camera (18) shoots to obtain an interference fringe image of a measured helicoid;
step 2, extracting a wrapping phase of the measured helicoid according to the interference fringe image of the measured helicoid obtained in the step 1 and the interference fringe image of the measured helicoid obtained in the step 2 after the incident angle is changed, and unwrapping the phase;
step 3, simulating the measured helicoid interferometric measurement of the measured object according to the light ray tracing principle to obtain a simulated interference pattern of the measured helicoid, registering the measured interferometric measurement data and the simulated interference pattern to calculate the incident angle corresponding to each pixel point, converting the continuous phase after unpacking the phase of the measured helicoid into the height information of the measured helicoid, and deducing the height difference h through the phase difference phi according to a parallel flat plate interferometric model;
step 4, scanning the measured helicoid along the axial direction of the measured object by using the structured light sensor 20 to obtain the surface height information of the measured helicoid, constructing three-dimensional point cloud data of the measured helicoid according to the surface height information, comparing the three-dimensional point cloud data with an ideal tooth surface, and calculating the shape error of the measured helicoid;
step 5, selecting a proper threshold value to binarize a non-interference image of the measured object by utilizing the characteristics to determine a phase unreliable area in interference measurement, wherein black pixel points in a white foreground in the non-interference image are the phase unreliable area, eliminating results belonging to the unreliable area in the measurement result of the interference measurement light path, and replacing the results with the measurement result of a scanning measurement light path to realize the fusion of the measurement data of the double light paths;
the measuring device used in the measuring method of the shape error of the helical curved surface based on the double-light-path synchronous phase shift interference comprises a laser (1), wherein an interference measuring light path is emitted out of the laser (1), a polarization beam splitter (2) is arranged on the interference measuring light path, the polarization beam splitter (2) divides the interference measuring light path into a measuring light path and a reference light path which are perpendicular to each other, a light intensity regulator a (5), a beam expander a (7), a front light wedge (8) and a rear light wedge (9) are arranged on the measurement light path, a measured object is placed between the front light wedge (8) and the rear light wedge (9), a reflector a (3), a light intensity regulator b (4), a beam expander b (6), a reflector b (10) and a semi-reflecting and semi-transmitting mirror (11) are arranged on the reference light path, the interference measuring light path and the reference light path are converged to the semi-reflecting and semi-transmitting mirror (11) to form an, follow the light path of formation of image common light path has set gradually two-dimensional grating (12), lens a (13), diaphragm (14), lens b (15), phase delay array (16), polaroid (17), CCD camera (18) electric connection has computer (19), computer (19) electric connection has structure light sensor (20), and structure light sensor (20) launch line structure light shines and is reflected back to structure light sensor (20) on being surveyed the helicoid, the light path of structure light is for scanning measurement light path, and structure light sensor is provided with motion control mechanism (21).
2. The method for measuring helical curved surface shape error based on dual-optical-path synchronous phase-shift interference according to claim 1, wherein the helical surface interference fringe image to be measured in step 1 corresponds to phase-shift angles 0, pi/2, pi and 3 pi/2, respectively.
3. The method for measuring shape error of helical curved surface based on dual-optical-path synchronous phase-shift interference as claimed in claim 1, wherein the wrapping phase at target pixel point (x, y) on the interference fringe of the measured helical surface in step 2
Can be calculated as follows:
in the formula:
n is the total step number of phase shift, the step 3 adopts spatial four-step phase shift, and N is 4;
i is the ith phase shift;
Ii(x, y) is the light intensity at the time of the ith phase shift (x, y);
δithe phase modulation quantity at the ith phase shifting is obtained;
the two-dimensional phase street wrapping mathematical model of the interference fringe image of the measured helicoid can be expressed as:
in the formula: the continuous phase value after unpacking; k is the number of packages.
4. The method according to claim 1, wherein the height difference h in step 3 is expressed by the following formula:
in the formula: λ is the laser wavelength for measurement; alpha is the incident angle of the light on the measured object.
5. The method for measuring shape error of helical curved surface based on two-optical-path synchronous phase-shift interference according to claim 1, wherein the surface height information y of step 4 is calculated by trigonometry, and the calculation equation is as follows:
in the formula:
y is the height of the laser irradiation point relative to the reference plane;
x is the displacement between the irradiation point and the reference point on the imaging surface of the structured light sensor (20);
a is the imaging object distance of the reference point;
b is the imaging image distance of the irradiation point;
alpha is the incident angle of laser irradiation;
beta is the included angle between the reflected light and the imaging surface of the structured light sensor (20).
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|---|---|---|---|---|
| CN113329553A (en) * | 2021-06-11 | 2021-08-31 | 北京环境特性研究所 | Detection method and detection device for plasma density distribution |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6388754B1 (en) * | 1998-12-21 | 2002-05-14 | Fuji Xerox Co., Ltd. | Shape measuring system and method |
| CN106091978A (en) * | 2016-06-01 | 2016-11-09 | 西安工程大学 | The joining method of interference fringe image in inclined in type measurements by laser interferometry |
| CN106403836A (en) * | 2016-12-14 | 2017-02-15 | 盐城工学院 | Deformation and slope synchronous measurement device and method based on digital speckle interferometry |
| CN107514979A (en) * | 2017-07-20 | 2017-12-26 | 重庆大学 | A kind of gear Integrated Measurement System and its method based on structure light |
| CN109186476A (en) * | 2018-10-26 | 2019-01-11 | 广东工业大学 | A kind of color structured light method for three-dimensional measurement, device, equipment and storage medium |
| CN109780992A (en) * | 2018-12-28 | 2019-05-21 | 西安交通大学 | Interferometer measuration system error calibrating method based on the processing of optical flat stripe pattern |
| CN111189408A (en) * | 2020-01-08 | 2020-05-22 | 西安工业大学 | Three-dimensional measuring device and measuring method for tooth surface of projection Moire gear |
-
2020
- 2020-09-30 CN CN202011069823.1A patent/CN112268522B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6388754B1 (en) * | 1998-12-21 | 2002-05-14 | Fuji Xerox Co., Ltd. | Shape measuring system and method |
| CN106091978A (en) * | 2016-06-01 | 2016-11-09 | 西安工程大学 | The joining method of interference fringe image in inclined in type measurements by laser interferometry |
| CN106403836A (en) * | 2016-12-14 | 2017-02-15 | 盐城工学院 | Deformation and slope synchronous measurement device and method based on digital speckle interferometry |
| CN107514979A (en) * | 2017-07-20 | 2017-12-26 | 重庆大学 | A kind of gear Integrated Measurement System and its method based on structure light |
| CN109186476A (en) * | 2018-10-26 | 2019-01-11 | 广东工业大学 | A kind of color structured light method for three-dimensional measurement, device, equipment and storage medium |
| CN109780992A (en) * | 2018-12-28 | 2019-05-21 | 西安交通大学 | Interferometer measuration system error calibrating method based on the processing of optical flat stripe pattern |
| CN111189408A (en) * | 2020-01-08 | 2020-05-22 | 西安工业大学 | Three-dimensional measuring device and measuring method for tooth surface of projection Moire gear |
Non-Patent Citations (3)
| Title |
|---|
| 方素平 等: "Design of laser interferometric system for measurement of gear tooth flank", 《OPTIK》 * |
| 方素平 等: "复杂光学系统中的干涉条纹图像的精确仿真方法", 《机械工程学报》 * |
| 王磊杰 等: "用于齿轮齿面形状误差测量的光学系统设计与仿真", 《东莞理工学院学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113329553A (en) * | 2021-06-11 | 2021-08-31 | 北京环境特性研究所 | Detection method and detection device for plasma density distribution |
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