CN102735380A - Multi-function electronic speckle interferometer - Google Patents
Multi-function electronic speckle interferometer Download PDFInfo
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- CN102735380A CN102735380A CN2012101702426A CN201210170242A CN102735380A CN 102735380 A CN102735380 A CN 102735380A CN 2012101702426 A CN2012101702426 A CN 2012101702426A CN 201210170242 A CN201210170242 A CN 201210170242A CN 102735380 A CN102735380 A CN 102735380A
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Abstract
The invention relates to a multi-function electronic speckle interferometer. A light source, a support frame, an interference beam splitter prism and a template to be measured are sequentially arranged on a base from front to back, wherein a light source beam splitter mirror and a light source deflection triangular prism are sequentially arranged on the support frame in the front and back direction; a state switching board is arranged between the light source beam splitter mirror and the light source deflection triangular prism; the state switching board is mounted on the base, and can move leftwards or rightwards along the surface of the base; a flat reflecting mirror fixed on the surface of the base is arranged below the light source beam splitter mirror; the left side of the interference beam splitter prism is provided with an image collection module fixed on the surface of the base, and the right side is provided with a state selecting board; and the state selecting board is mounted on the base, and can move forwards or backwards along the surface of the base. The invention can be widely used in the on-line measurement of stress, strain or displacement field (such as the simultaneous on-line measurement of strain value and displacement field of a tire), enlarges the measurement range, reduces the spatial structure of the measuring instrument, shortens the measurement time, has considerable economic benefits after a large amount of industrial application.
Description
Technical field
The present invention relates to a kind of electronic speckle interferometer.Particularly relate to a kind of multifunction electronic speckle interferometer that can in a cover system, obtain the full-field distribution figure of testee stress and displacement simultaneously.
Background technology
ESPI technology ESPI is a development in recent years optical measuring technique more fast; It produces the principle of speckle interference striped owing to the miniature deformation of external force or self initiation based on testee; Can directly measure the displacement that under the various load in the external world, produces of testee; Thereby carry out the loading analysis of testee, stress deformation or the like.It has simple to operate, noncontact, and precision is high, has advantages such as measurement of full field.Maturation along with this technology; Develop into electronic speckle shear interference technology by development in that ESPI is technical; ESSPI (Electronic Speckle Shearing Pattern Interferometry) electronic speckle shear interference art not only has the advantage of general speckle interference art; And can directly measure the derivative of object plane the inside displacement; Be strain, thus the error of in stress analysis, having avoided numerical differentiation to bring, and the ESSPI technology can also be regulated through the adjustment shearing displacement and measured sensitivity in addition.
Two kinds of technology all have own distinctive measurement measured, and ESPI is mainly used in the subtle change of the displacement under stress or the vibration, like the amplitude under stress deformation or the vibration.And ESSPI is mainly used in the load of measurement external force or the size of stress application.The patent that at present domestic ESPI or electronic cutting speckle are interfered mainly contains following several kinds.
1. can only Measuring Object deformation or the system of amplitude: the system of measuring deformation or pattern aspect is the method (patent No.: 200710112994.6) of utilizing ESPI carrier-frequency modulation Measuring Object pattern of Shandong Normal University for example.This patent system produces the interference carrier fringe on testee surface and the peripheral gap of testee reference planes, gathers this interference fringe through ccd video camera, and utilizes this width of cloth carrier fringe figure to demodulate the pattern information of body surface.The multifunction three-dimensional displacement of Tsing-Hua University and the pattern laser interferometry system (patent No.: 200910088896.2) can realize the measurement of three-dimensional appearance and displacement.This system can realize the high-acruracy survey of three different directions displacement fields, and displacement measurement sensitivity can reach the order of magnitude of wavelength, and holographic and two kinds of displacement measurement patterns of ESPI are arranged, and can realize topography measurement simultaneously.Measure amplitude aspect Xi'an Communications University and successively develop three generations's electronic speckle vialog, the first generation is to adopt the method for artificial interpretation Bezier fringe order to estimate object vibration.The second generation adopts the method for phase shift demodulation, but quantitative test object amplitude.Three generations's vialog can be measured the distribution of amplitudes of object under vibration.
2 can only Measuring Object receives stress or the system of dependent variable of external force under loading: contacting to earth like the speckle-shearing interferometric method drawings of Korea Tyre Co., Ltd, (patent No.: 200610109861.9), this device utilizes the laser speckle shearing interference method to carry out measurement of full field to the tread surface pressure distribution for the device of shape.This system has cancelled the reference planes in the ESPI system, utilizes the shear plane mirror to produce two interference images that stagger each other, and utilizes size reduction mode and combination has solved whole audience tread surface and gets pressure-plotting with phase shifting method.
At present, what mention in present patent system or the document all is to utilize electronic speckle Displacement Measurement field or utilize speckle-shearing interferometry commercial measurement strain field, therefore promptly can not measure the deformational displacement field, can also measure the system of strain field simultaneously.
Summary of the invention
Technical matters to be solved by this invention is, a kind of Strain Distribution and displacement or deformation distribution that realizes simultaneously that in a system testee is stressed is provided, and makes the more various and accurate multifunction electronic speckle interferometer of on-line measurement data in the industry.
The technical scheme that the present invention adopted is: a kind of multifunction electronic speckle interferometer; Comprise base, be disposed with light source, bracing frame, interference beam splitter prism and tested model on the described base from front to back, on the described bracing frame before and after successively be provided with light source beam splitter and light source deflection triangular prism; Be provided with the state switch boards between described light source beam splitter and the light source deflection triangular prism; Described state switch boards is installed on the base, and along the susceptor surface move left and right, the below of described light source beam splitter is provided with the plane mirror that is fixed on susceptor surface; The left side of described interference beam splitter prism is provided with the image capture module that is fixed on susceptor surface; The right side is provided with the state option board, and described state option board is installed on the base, and moves forward and backward along susceptor surface.
Described bracing frame includes left side back up pad and the right side back up pad that is separately fixed on the base; And be connected front support rod and the back support rod between left side back up pad and the right side back up pad; Described front support rod is provided with the light source beam splitter, and described back support rod is provided with light source deflection triangular prism.
Described state switch boards includes first light hole, first baffle plate, second light hole and the second baffle that matts distributes, and wherein, described first light hole and first baffle plate are positioned at the left side; Be used for gating upper strata light path; Close lower floor's light path, second light hole and second baffle are positioned at the right side, are used for gating lower floor light path obstruction upper strata light path; First light hole and second baffle are positioned at the top; First baffle plate and second light hole are positioned at the below, and the side that described first baffle plate is positioned at described this side of light source deflection triangular prism is provided with the shearing catoptron.
Described first light hole and first baffle plate are used for the ESSPI system, and described second light hole and second baffle are used for the ESPI system.
Described state option board is to be arranged side by side by phase shift plane mirror and reference planes.
Multifunction electronic speckle interferometer of the present invention.Both can obtain testee through one-shot measurement and receive the stress full-field distribution under the load, can obtain distortion or the displacement full-field distribution of measured object under this load again.This provides a kind of method of novel multifunctional detection for industrial detection or in analyzing, the space of having simplified instrument has increased the accuracy of measuring.Two types of measurement results can be provided in one-shot measurement, can be widely used in stress in the industry, strain; Or among the on-line measurement of displacement field; On-line measurement in the time of like the strain value of tire and displacement field has enlarged measurement range, has reduced the space structure of surveying instrument; Shorten Measuring Time simultaneously, had considerable economic after in industry, widely applying.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present invention;
Fig. 2 is a state switch boards structural representation of the present invention, wherein:
Figure (a) is a front view, and figure (b) is a rear view;
Fig. 3 is the structural representation of multifunction electronic speckle interferometer of the present invention when being in the ESSPI system, wherein:
Figure (a) is a front view, and figure (b) is the vertical view of interference system among the figure (a);
Fig. 4 is the structural representation of multifunction electronic speckle interferometer of the present invention when being in the ESPI system, wherein:
Figure (a) is a front view, and figure (b) is the vertical view of interference system among the figure (a).
Among the figure,
Embodiment
Below in conjunction with embodiment and accompanying drawing multifunction electronic speckle interferometer of the present invention is made detailed description.
In order to be implemented in Strain Distribution and displacement or the deformation distribution that realizes simultaneously in the system that testee is stressed; Make the on-line measurement data in the industry more various and accurate; The present invention provides a kind of multifunction electronic speckle interferometer based on light source gating model on basis on traditional ESPI and the ESSPI light path.The present invention can be switched two kinds of different measuring methods through the state switch boards; Be electronic cutting speckle interferometer measuration system (ESSPI) and ESPI measuring system (ESPI), can in a cover system, obtain the full-field distribution figure of testee stress and displacement simultaneously.
As shown in Figure 1; Multifunction electronic speckle interferometer of the present invention; Comprise base 13, be disposed with light source 1, bracing frame 12 on the described base 13 from front to back, interfere beam splitter prism 8 and tested model 11, on the described bracing frame 12 before and after successively be provided with light source beam splitter 2 and light source deflection triangular prism 7; Be provided with state switch boards 4 between described light source beam splitter 2 and the light source deflection triangular prism 7; Described state switch boards 4 is installed on the base 13, and along base 13 surperficial move left and right, the below of described light source beam splitter 2 is provided with the plane mirror 3 that is fixed on base 13 surfaces; The left side of described interference beam splitter prism 8 is provided with the image capture module 6 that is fixed on base 13 surfaces; The right side is provided with internal state switch boards 14, and described internal state switch boards 14 is installed on the base 13, and moves forward and backward along base 13 surfaces.
Described bracing frame 12 includes the left side back up pad 121 and right side back up pad 122 that is separately fixed on the base 13; And be connected the front support rod 123 and back support rod 124 between left side back up pad 121 and the right side back up pad 122; Described front support rod 123 is provided with light source beam splitter 2, and described back support rod 124 is provided with light source deflection triangular prism 7.
As shown in Figure 2, first light hole 41 that described state switch boards 4 includes that matts distributes, first baffle plate 42, second light hole 43 and second baffle 44, wherein; Described first light hole 41 and first baffle plate 42 are positioned at the left side, are used for gating upper strata light path, close lower floor's light path; Second light hole 43 is positioned at the right side with second baffle 44; Be used for gating lower floor light path obstruction upper strata light path, first light hole 41 is positioned at the top with second baffle 44, and first baffle plate 42 and second light hole 43 are positioned at the below; And the side that described first baffle plate 42 is positioned at described light source deflection triangular prism 7 these sides is provided with shearing catoptron 5.Effect through state switch boards 4; Can produce the two independent incident light source of ESSPI system and ESPI system respectively; Wherein, described first light hole 41 and first baffle plate 42 are used for the ESSPI system, and described second light hole 43 is used for the ESPI system with second baffle 44.
Described internal state switch boards 14 is to be arranged side by side by phase shift plane mirror 9 and reference planes 10.
Multifunction electronic speckle interferometer of the present invention is a kind of light source module with the alternative output of two-way incident.This module is by light source 1, light source beam splitter 2, and plane mirror 3 constitutes with state switch boards 4.Its principle is following: at first, light source 1 can be divided into two-beam through dividing light source beam splitter 2, wherein one tunnel along continuous straight runs output on the upper strata, and another Shu Guangjing plane mirror 3 is exported at lower floor's along continuous straight runs, two-way light does not disturb mutually.This has just constituted the light source of two-way incident.4 of state switch boards are used for which light of gating to be gone into to inject among the optical system of back.
When needs are measured dependent variable or stress, can state switch boards 4 be transferred to the state of upper strata light path gating, shown in Fig. 3 (a).Visible from Fig. 3 (a) front elevation, state switch boards 4 is with the light path gating on upper strata, and through the deflecting action entering interference system 15 of light source deflection triangular prism, interference system 15 is shown in Fig. 3 (b).And the light path of lower floor is closed by force.In interference system 15 inside; Constituted internal state switch boards 14 as shown in Figure 3 by phase shift plane mirror 9 and reference planes 10; This internal state switch boards 14 can realize moving forward and backward; Need move this internal state switch boards 14 in order to constitute the ESSPI system, phase shift plane mirror 9 moved to the dead ahead of interfering beam splitter prism 8.And state switch boards 4 positive lower lefts have a plane mirror 5 to be used for adjusting the shearing displacement of shear interference system 15.Concrete index path is shown in accompanying drawing 3 (a); Fig. 3 (b) is the vertical view of interference system among Fig. 3 (a); The deflection from the upper strata and the incident light source that comes are through the scattering of tested model; Reflex to and interfere beam splitter prism 8, under the effect of interfering beam splitter prism 8, be divided into two-beam, two-beam is again through converging the generation speckle-shearing interferometry after phase shift plane mirror 9 and the reflection of shearing catoptron 5 on the practising physiognomy of image capture module 6.In order to adjust shearing displacement, can the deflection angle of the shearing catoptron 5 of state switch boards 4 lower lefts be carried out small adjustment.The light path that can have been accomplished the ESSPI system by setting shown in Figure 3 constitutes, and can carry out the measurement of full field of ess-strain value through this system.
And when needing the Displacement Measurement field, can state switch boards 4 be adjusted to the state of lower floor's light path gating, shown in Fig. 4 (a), Fig. 4 (b) is the vertical view of interference system among Fig. 4 (a).Visible by Fig. 4 (a), light path is because among the effect of state switch boards 4 went into to inject interference system 16 from lower floor, interference system 16 was shown in Fig. 4 (b).In order to constitute the ESPI system, need and to constitute internal state switch boards 14 translation reference planes backward 10 dead aheads by phase shift plane mirror 9 and reference planes 10 at beam splitter prism.Shown in accompanying drawing 4 (b) figure; The light beam of going into to shine from the front is beamed into two-way light through the effect of interfering beam splitter prism 8; Two-way light is reflected into by photometry through tested model 11 respectively; Through the reference light that is reflected into of reference planes 10, two-way light through interfering beam splitter prism 8 to converge, forms speckle interference again on the image planes of interfering beam splitter prism 8 images of positions acquisition modules 6.Can carry out the measurement of physical quantitys such as displacement field through this system.
Multifunction electronic speckle interferometer of the present invention can be selected in the present embodiment like this, and it is 532nm that light source 1 can be selected wavelength, and power is the green laser of 60mw.In the time of stress that needs Measuring Object or Strain Distribution, can mobile status switch boards 4 to low order end.Tested model is fixed to the position of tested model 11 in the accompanying drawing 1, and boundary condition can select fixing or four limits, lower end to fix.Phase shift plane mirror 9 is aimed at interference beam splitter prism 8, and phase shift plane mirror 9 back can connect the piezoelectric ceramics micro-displacement apparatus and be used to produce phase shift algorithm.The shearing catoptron 5 in state switch boards 4 lower left corners is fixed on state switch boards 4 plates through 4 screws, through the shearing displacement in the degree of tightness scalable cutting system of adjusting 4 screws.Adjust suitable shearing displacement, utilize by high resolving power ccd video camera at a high speed, like MTV-23F1; With the high precision image capture card; Like the image capture module 6 that OK-M10B constitutes, gather a sub-picture, wait for that tested model 11 receives to gather an other sub-picture again after the stress deformation; Utilize the bar graph of size reduction mode acquisition speckle-shearing interferometry, can calculate the stress distribution of the tested model whole audience again through Phase Shifting System.And when needing to measure the displacement field of measured object, need mobile status switch boards 4 to high order end, and equally tested model is fixed to the position of tested model 11 in the accompanying drawing 1, select suitable boundary conditions.Reference planes 10 are aimed at the accurate beam splitter prism 8 of interfering; Reference planes 10 back connect piezoelectric ceramics mechanism; Gather a sub-picture this moment earlier; Gather an other sub-picture again after waiting for tested model distortion, utilize the bar graph of size reduction mode electron gain speckle interference, can calculate the Displacements Distribution of the tested model whole audience again through Phase Shifting System.In measurement, can change the position of state switch boards 4 flexibly, thus on-line measurement when accomplishing a plurality of physical quantity.
Claims (5)
1. multifunction electronic speckle interferometer; Comprise base (13); It is characterized in that; Be disposed with light source (1), bracing frame (12) on the described base (13) from front to back, interfere beam splitter prism (8) and tested model (11); Before and after described bracing frame (12) is gone up successively be provided with light source beam splitter (2) and light source deflection triangular prism (7), be provided with state switch boards (4) between described light source beam splitter (2) and the light source deflection triangular prism (7), described state switch boards (4) is installed on the base (13); And along the surperficial move left and right of base (13); The below of described light source beam splitter (2) is provided with the plane mirror (3) that is fixed on base (13) surface, and the left side of described interference beam splitter prism (8) is provided with the image capture module (6) that is fixed on base (13) surface, and the right side is provided with state option board (14); Described state option board (14) is installed on the base (13), and moves forward and backward along base (13) surface.
2. multifunction electronic speckle interferometer according to claim 1; It is characterized in that; Described bracing frame (12) includes left side back up pad (121) and the right side back up pad (122) that is separately fixed on the base (13); And be connected front support rod (123) and the back support rod (124) between left side back up pad (121) and the right side back up pad (122); Described front support rod (123) is provided with light source beam splitter (2), and described back support rod (124) is provided with light source deflection triangular prism (7).
3. multifunction electronic speckle interferometer according to claim 1 is characterized in that, described state switch boards (4) includes first light hole (41), first baffle plate (42), second light hole (43) and the second baffle (44) that matts distributes; Wherein, Described first light hole (41) and first baffle plate (42) are positioned at the left side, are used for gating upper strata light path, close lower floor's light path; Second light hole (43) and second baffle (44) are positioned at the right side; Be used for gating lower floor light path obstruction upper strata light path, first light hole (41) and second baffle (44) are positioned at the top, and first baffle plate (42) and second light hole (43) are positioned at the below; And the side that described first baffle plate (42) is positioned at this side of described light source deflection triangular prism (7) is provided with shearing catoptron (5).
4. multifunction electronic speckle interferometer according to claim 3 is characterized in that, described first light hole (41) and first baffle plate (42) are used for the ESSPI system, and described second light hole (43) and second baffle (44) are used for the ESPI system.
5. multifunction electronic speckle interferometer according to claim 1 is characterized in that, described state option board (14) is to be arranged side by side by phase shift plane mirror (9) and reference planes (10).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210170242.6A CN102735380B (en) | 2012-05-28 | 2012-05-28 | Multi-function electronic speckle interferometer |
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| CN201210170242.6A CN102735380B (en) | 2012-05-28 | 2012-05-28 | Multi-function electronic speckle interferometer |
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| CN102735380B CN102735380B (en) | 2014-03-26 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103278268A (en) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | Stress testing device and stress concentration testing method based on speckle interference principle |
| CN103278272A (en) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | Soldered joint stress concentration testing device and stress concentration testing method based on laser speckle technology |
| CN103983341A (en) * | 2014-05-20 | 2014-08-13 | 厦门大学 | High-precision laser speckle micro-vibration measurement system and measurement method |
| CN106403836A (en) * | 2016-12-14 | 2017-02-15 | 盐城工学院 | Deformation and slope synchronous measurement device and method based on digital speckle interferometry |
| CN107036534A (en) * | 2016-02-03 | 2017-08-11 | 北京振兴计量测试研究所 | Method and system based on laser speckle measurement Vibration Targets displacement |
| CN108645349A (en) * | 2018-04-19 | 2018-10-12 | 吴思进 | A kind of measurement method and device of Transient deformation |
| CN111536883A (en) * | 2020-06-10 | 2020-08-14 | 中北大学 | Micro-displacement sensor based on combined type grating |
| CN113187990A (en) * | 2021-03-26 | 2021-07-30 | 北京工业大学 | Three-dimensional digital speckle interference synchronous measurement device and method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2726045C1 (en) * | 2019-12-24 | 2020-07-08 | Федеральное государственное унитарное предприятие "ВСЕРОССИЙСКИЙ НАУЧНО-ИССЛЕДОВАТЕЛЬСКИЙ ИНСТИТУТ ОПТИКО-ФИЗИЧЕСКИХ ИЗМЕРЕНИЙ" (ФГУП "ВНИИОФИ") | Shear speckle interferometer (versions) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10304317A1 (en) * | 2003-02-04 | 2004-08-12 | Vössing, Frank | Speckle shear interferometry device for measurement of strain or deformation of objects, including in-plane and out-of-plane measurements uses a commercial digital camera with a screen and special shear objective |
| CN1540281A (en) * | 2003-04-21 | 2004-10-27 | 中国船舶重工集团公司第七一一研究所 | Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser |
| CN1844843A (en) * | 2006-04-28 | 2006-10-11 | 上海大学 | High-resolution real-time non-destructive detection system and method |
| CN101608904A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | Multifunction three-dimensional displacement and pattern laser interferometry system |
-
2012
- 2012-05-28 CN CN201210170242.6A patent/CN102735380B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10304317A1 (en) * | 2003-02-04 | 2004-08-12 | Vössing, Frank | Speckle shear interferometry device for measurement of strain or deformation of objects, including in-plane and out-of-plane measurements uses a commercial digital camera with a screen and special shear objective |
| CN1540281A (en) * | 2003-04-21 | 2004-10-27 | 中国船舶重工集团公司第七一一研究所 | Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser |
| CN1844843A (en) * | 2006-04-28 | 2006-10-11 | 上海大学 | High-resolution real-time non-destructive detection system and method |
| CN101608904A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | Multifunction three-dimensional displacement and pattern laser interferometry system |
Non-Patent Citations (1)
| Title |
|---|
| 任雅萍等: "实时数字散斑干涉仪及其应用", 《半导体光电》 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103278268A (en) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | Stress testing device and stress concentration testing method based on speckle interference principle |
| CN103278272A (en) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | Soldered joint stress concentration testing device and stress concentration testing method based on laser speckle technology |
| CN103983341A (en) * | 2014-05-20 | 2014-08-13 | 厦门大学 | High-precision laser speckle micro-vibration measurement system and measurement method |
| CN107036534A (en) * | 2016-02-03 | 2017-08-11 | 北京振兴计量测试研究所 | Method and system based on laser speckle measurement Vibration Targets displacement |
| CN107036534B (en) * | 2016-02-03 | 2020-09-08 | 北京振兴计量测试研究所 | Method and system for measuring displacement of vibration target based on laser speckle |
| CN106403836A (en) * | 2016-12-14 | 2017-02-15 | 盐城工学院 | Deformation and slope synchronous measurement device and method based on digital speckle interferometry |
| CN108645349A (en) * | 2018-04-19 | 2018-10-12 | 吴思进 | A kind of measurement method and device of Transient deformation |
| CN111536883A (en) * | 2020-06-10 | 2020-08-14 | 中北大学 | Micro-displacement sensor based on combined type grating |
| CN111536883B (en) * | 2020-06-10 | 2021-07-23 | 中北大学 | Micro-displacement sensor based on combined type grating |
| CN113187990A (en) * | 2021-03-26 | 2021-07-30 | 北京工业大学 | Three-dimensional digital speckle interference synchronous measurement device and method |
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| CN102735380B (en) | 2014-03-26 |
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