Disclosure of Invention
The invention provides a debugging method of a two-dimensional rotary table turning optical component, aiming at the technical problems of large occupied space, large debugging workload and low debugging precision of the existing debugging method of the two-dimensional rotary table turning optical component in a state that a rotary table is in a side-lying state.
In order to achieve the purpose, the invention adopts the technical scheme that:
a debugging method of a two-dimensional turntable folded optical component is characterized by comprising the following steps:
step 1, building a debugging system
1.1) fastening a tool seat 5 on an assembly and adjustment platform, and connecting a rotary table azimuth shaft 1 of a two-dimensional rotary table to be adjusted with the tool seat 5 through an azimuth flange;
1.2) installing a pitching shaft calibration tool 4 on a pitching flange of a turntable pitching shaft 2 of a two-dimensional turntable to be debugged; the pitching axis calibration tool 4 comprises a flange connecting frame 41 coaxially fixed on the end face of a pitching flange of the turntable pitching axis 2 of the two-dimensional turntable to be debugged, an optical reticle lens frame 42 coaxially sleeved inside the flange connecting frame 41, an optical reticle 43 coaxially arranged on the optical reticle lens frame 42, an inclined adjusting knob 44 used for adjusting the optical reticle 43 to rotate along the Y axis or the Z axis, and a translation adjusting knob 45 used for adjusting the optical reticle 43 to move along the Y axis or the Z axis; a cross-shaped wire is carved in the center of the optical reticle 43;
step 2, optical calibration of pitch axis
2.1) erecting an autocollimator 7 in a collimation light path of an optical reticle 43;
2.2) focusing the autocollimator 7 to infinity, and observing the shaking condition of the autocollimator 7 of the autocollimator image when the optical reticle 43 rotates along with the turntable pitching shaft 2; the inclination angle of the optical reticle 43 is adjusted by adjusting the inclination adjusting knob 44, so that the shaking amount of the autocollimator 7 of the autocollimator image is minimized;
2.3) focusing the autocollimator 7 to a limited remote distance, observing the circle drawing amount of the cross hair image at the center of the optical reticle 43 in the autocollimator 7 when the turntable pitching shaft 2 rotates for one circle, and adjusting the radial movement of the optical reticle 43 by adjusting the translation adjusting knob 45 to ensure that the circle drawing amount of the cross hair image in the autocollimator 7 reaches the minimum;
2.4) repeating the step 2.2), ensuring that the shaking amount of the autocollimator image in the autocollimator 7 is minimum, and completing the optical calibration of the pitch axis;
step 3, debugging of the folded optical component
3.1) placing a light path folding axis prism 6 at the center of the tool seat 5, and erecting an autocollimator 7 in a collimation light path of the light path folding axis prism 6;
3.2) focusing the autocollimator 7 to infinity, and autocollimating with the front surface of the optical path folding axis prism 6; the turntable folding axis mirror 3 is installed to make the parallel light A emitted by the autocollimator 70After twice reflection by the optical path folding axis prism 6 and the turntable folding axis mirror 3, the reflected image enters the optical reticle 43, and the image returned by the optical reticle 43 is reflected twice by the turntable folding axis mirror 3 and the optical path folding axis prism 6 to form an autocollimation image A in the view field of the autocollimator 71;
3.3) rotating the azimuth axis 1 of the rotary table by 180 degrees from 0 degree, recording the maximum shaking amount delta H and delta V of the autocollimator 7 internal autocollimator self-alignment image, adjusting the space attitude compensation delta H and delta V of the rotary table folding axis mirror 3, and enabling the autocollimator 7 self-alignment image A1The shaking amount reaches the minimum;
3.4) focusing the autocollimator 7 to a limited distance, so that the collimated light A emitted by the autocollimator 70After twice reflection of the optical path folding axis prism 6 and the rotary table folding axis mirror 3, the cross hair image at the center of the optical reticle 43 is reflected twice by the rotary table folding axis mirror 3 and the optical path folding axis prism 6 to form a cross hair image in the autocollimator 7;
3.5) rotating the azimuth axis 1 of the rotary table from 0 degree to 180 degrees, recording the cross hair image position of the autocollimator 7 when the azimuth axis 1 of the rotary table is at 0 degree and the cross hair image position of the autocollimator 7 when the azimuth axis 1 of the rotary table is at 180 degrees, and obtaining the offset D of the two positionsHAnd DVAdjusting the position of the rotary table folding axis mirror 3 to eliminate the offset DV;
3.6) repeating steps 3.2) and 3.3) so that the autocollimator 7 is self-aligned in image A1And the shaking amount reaches the minimum, and the debugging of the catadioptric optical assembly is completed.
Further, in order to ensure the debugging precision of the system, in step 1.2), the optical reticle 43 is a plane reflective glass, and the flatness is better than 0.02 λ.
Further, for convenience of operation, in step 1.2), the tilt adjusting knob 44 is disposed on an end surface of the optical reticle frame 42; the translation adjusting knob 45 is disposed outside the flange connection frame 41.
Further, in step 3.2), the formation of the autocollimator image a in the field of view of the autocollimator 7 is described1This is achieved by rotating the turret axicon 3 about the X-axis or Y-axis.
Further, in step 3.3), the adjusting of the spatial attitude compensation Δ H and Δ V of the turntable folding axis mirror 3 specifically includes: compensating delta H by adjusting the rotation of the turntable folding axis mirror 3 around the X axis; and the delta V is compensated by adjusting the rotation of the turntable folding axis mirror 3 around the Y axis.
Further, in step 3.5), the offset D is eliminated by adjusting the position of the turntable folding axis mirror 3VThe method specifically comprises the following steps: adjusting the turntable folding axis mirror 3 to translate along the X axis or the Z axis DV/2 to eliminate offset DV。
The invention has the beneficial effects that:
1) the invention utilizes the rotating auto-collimation light path to guide and complete the high-precision center-penetrating work of the folding-axis mirror assembly to the rotary table azimuth axis and the rotary table pitch axis, compared with the conventional debugging method that two axis systems need to be calibrated by an optical method under the lateral lying state of the rotary table, the method is used for debugging under the actual using posture of the rotary table, only one axis system needs to be calibrated by the optical method, the debugging efficiency is improved, and finally, the center-penetrating precision of the folding-axis mirror assembly to the two axes can be improved by more than 2 times.
2) The debugging method can accurately debug the space attitude of the folding axis mirror assembly linked with the two-dimensional rotary table, so that the pitching of the optical axis cannot be changed along with the rotation of the azimuth axis of the rotary table when the two-dimensional rotary table assembly containing the folding optical path is assembled in the optical system.
3) In the calibration process of the two-dimensional turntable pitching axis system, the invention adjusts the optical reticle to minimize the cross-hair image shaking amount and circle drawing amount in the autocollimator by adjusting the inclination adjusting knob and the translation adjusting knob, thereby realizing the accurate calibration of the two-dimensional turntable pitching axis system.
4) In the debugging system adopted by the invention, the optical reticle is plane reflection glass with the surface type superior to 0.02 lambda, so that the calibration precision of the pitching axis of the turntable is ensured.
5) The invention adopts the method that the autocollimator emits parallel light, and the autocollimator forms an autocollimation light path through the light path folding axis prism, the turntable folding axis mirror to be debugged and the optical reticle, so as to debug the space installation posture of the turntable folding axis mirror, the debugging process is simple, and the precision index can reach: the angle error is less than or equal to 2', and the punching precision is less than or equal to 0.01 mm.
Detailed Description
In order to more clearly explain the technical solution of the present invention, the following detailed description of the present invention is made with reference to the accompanying drawings and specific examples.
The method only needs to calibrate the pitching shaft 2 of the rotary table by using the pitching shaft calibration tool 4, fixes the whole rotary table in a built auto-collimation light path in a using state, observes the shaking conditions of the auto-collimation image and the through image when rotating along with the azimuth shaft 1 of the rotary table through the auto-collimator 7 in the light path, and guides the high-precision debugging of the posture of the rotary table folding axis mirror 3 through the shaking size and direction of the auto-collimation image and the through image.
The specific debugging steps of the two-dimensional turntable folded optical component are as follows:
1. pitch axis optical calibration
The method comprises the following steps: as shown in figure 1, a two-dimensional rotary table is connected with a tool seat 5 through an azimuth flange and fastened on an adjusting platform, so that an azimuth shaft 1 of the rotary table is fixed and does not rotate, and a pitching shaft calibration tool 4 is arranged on a pitching flange of a pitching shaft 2 of the rotary table. The pitching axis calibration tool 4 comprises a flange connection frame 41, an optical reticle frame 42 and an optical reticle 43. The flange connecting frame 41 is coaxially fixed on the end face of the pitching flange of the turntable pitching shaft 2, the optical reticle lens frame 42 is coaxially sleeved inside the flange connecting frame 41, and the optical reticle 43 is coaxially arranged on the optical reticle lens frame 42. The optical reticle 43 is a piece of flat reflective glass with a surface type better than 0.02 lambda and with a cross-hair carved in the center. An inclination adjusting knob 44 is arranged on the end face of the optical reticle mirror frame 42, a translation adjusting knob 45 is arranged on the outer side of the flange connecting frame 41, and the inclination and radial movement of the optical reticle assembly can be adjusted, namely the inclination adjusting knob 44 can adjust the optical reticle 43 to rotate along the Y axis or the Z axis, and the translation adjusting knob 45 can adjust the optical reticle 43 to move along the Y axis or the Z axis.
Step two: the autocollimator 7 is mounted at position 1 in fig. 1, i.e. the autocollimator 7 is located in the collimated light path of the optical reticle 43. Focusing the autocollimator 7 to infinity, observing the self-alignment image shaking condition of the optical reticle 43 when rotating along with the turntable pitch axis 2, and calibrating the inclination adjusting knob 44 of the tool 4 through the pitch axis to minimize the shaking amount of the self-alignment image in the autocollimator 7.
Step three: focusing the autocollimator 7 to a limited distance so as to see a clear cross hair image, observing the circle drawing amount of the cross hair at the center of the optical reticle 43 when the turntable pitching shaft 2 rotates for one circle, and calibrating the translation adjusting knob 45 of the tool 4 through the pitching shaft so as to minimize the circle drawing amount of the cross hair in the autocollimator 7.
Step four: and repeating the second step to ensure that the shaking amount of the autocollimator 7 of the autocollimator image is minimum. And completing optical axis calibration of the turntable pitching shaft 2.
2. Auto-collimation refraction light path building and turntable folding axis mirror debugging
The method comprises the following steps: an optical path folding axis prism 6 is placed in the center of the tool seat 5, and an autocollimator 7 is placed at the right end of the optical path folding axis prism 6, as shown in the position 2 of fig. 1, namely the autocollimator 7 is located in the collimation optical path of the optical path folding axis prism 6.
Step two: the autocollimator 7 is focused to infinity and autocollimator with the front surface of the optical path folding axis prism 6. The turntable axicon 3 is mounted to form a self-collimating optical path, A, as shown in FIG. 20Is parallel light emitted from the autocollimator 7, A1Is the image returned by the optical reticle 43 through the turret pitch axis 2. Finding the autocollimator image A in the field of view of the autocollimator 7 by rotating or tilting the turret-mirror 31。
Step three: the turret pitch axis 2 is fixed and the turret azimuth axis 1 is rotated from 0 to 180 as shown in figure 1, and the maximum amount of shaking (Δ H, Δ V) of the autocollimator 7 internal autocollimator image is observed and recorded. And the delta H rotates the turntable folding axis mirror 3 around the X axis, and the delta V rotates the turntable folding axis mirror 3 around the Y axis, so that the shaking amount of the self-alignment image in the range from 0 degree to 180 degrees on the azimuth axis 1 of the turntable is finally minimized.
Step four: the autocollimator 7 is aligned with the self-alignment image of the pitching axis optical reticle 43, the autocollimator 7 is focused to a limited distance to see a clear cross-hair image, and the cross-hair image on the pitching axis calibration tool 4 is observed when the azimuth axis 1 of the turntable rotates from 0 degree to 180 degrees. If the cross hair images do not coincide under two angle states of the turntable azimuth axis 1, the cross hair images exist (D)H,DV),DHRepresenting two axesThe special plane along the Y axis can not be compensated by a folding axis mirror, and is generally ensured by shafting processing within a design range; dVRepresenting the existence of the center-through error of the two shafting, and can be translated along the X axis or the Z axis by the turntable folding mirror 3VThe amount of/2 to eliminate.
Step five: and (4) after the through-center image (the cross hair image) is adjusted, repeating the step three to minimize the shaking amount of the self-alignment image.
By utilizing the auto-collimation light path in the embodiment of the invention, the spatial posture of the folding axis mirror assembly linked with the two-dimensional rotary table can be accurately debugged through the operation steps, so that the pitching of the optical axis cannot be changed along with the rotation of the azimuth axis of the rotary table when the two-dimensional rotary table assembly containing the folding light path is assembled in the optical system. The precision index of the debugging method can reach: the angle error is less than or equal to 2', and the punching precision is less than or equal to 0.01 mm.
The above description is only for the purpose of describing the preferred embodiments of the present invention and is not intended to limit the technical solutions of the present invention, and any known modifications made by those skilled in the art based on the main technical concepts of the present invention are within the technical scope of the present invention.