CN110243573B - Optical device for measurement and measurement method thereof - Google Patents
Optical device for measurement and measurement method thereof Download PDFInfo
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- CN110243573B CN110243573B CN201810188477.5A CN201810188477A CN110243573B CN 110243573 B CN110243573 B CN 110243573B CN 201810188477 A CN201810188477 A CN 201810188477A CN 110243573 B CN110243573 B CN 110243573B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
Abstract
An optical device for measurement, comprising: the reflection type backlight module comprises an incident surface, a first reflection surface, a second reflection surface, a third reflection surface and a fourth reflection surface. The incident surface is arranged on a transmission path of a light beam, the first reflecting surface is arranged on the transmission path of the light beam, and the second reflecting surface, the third reflecting surface and the fourth reflecting surface are arranged on the transmission path of the light beam. Wherein, the transmission path of the light beam is as follows: (1) After reaching the object to be measured through the first reflecting surface, the light is reflected and penetrates through the incident surface, and is transmitted to the second reflecting surface, the third reflecting surface and the fourth reflecting surface in sequence to reach an observation surface; or (2) the light beam penetrates through the incident surface to reach the object to be measured and then is reflected to the first reflecting surface, the first reflecting surface reflects the light beam, and the light beam is transmitted to the second reflecting surface, the third reflecting surface and the fourth reflecting surface in sequence and then reaches the observation surface.
Description
Technical Field
The present invention relates to an optical device for measurement and a measurement method thereof, and more particularly, to an optical device for measuring a projection device and a measurement method thereof.
Background
A projection device is a device that projects an image onto a projection screen for presentation to a user for viewing. When a conventional projection device is manufactured, errors of components and/or mechanical structures often cause distortion and/or errors of a projected image. For example, elements such as a lens mount for mounting a projection lens, a display element for generating an image inside the projection device, and/or a lens or a prism for transmitting an image, if the elements themselves have errors in manufacturing specifications or errors occur in assembling the elements, the imaging quality of the final projection device will be affected.
The errors of the existing projection device to these devices depend on the manufacturers for manufacturing the devices to increase the manufacturing precision, so as to reduce the influence on the imaging quality. However, under the circumstances that the resolution of the projection apparatus is increasing, the production precision of manufacturers for manufacturing components is often not satisfactory, so how to build an effective measurement apparatus to accurately and effectively calibrate the projection apparatus is a focus of attention of those skilled in the art.
Disclosure of Invention
An aspect of the present invention is to provide an optical apparatus for measurement, which can measure a deviation value of an object to be measured and correct or adjust the object to be measured according to the deviation value.
Other aspects and advantages of the present invention will become apparent from the following detailed description of the disclosed embodiments.
An embodiment of the invention provides an optical apparatus for measurement, including an incident surface, a first reflecting surface, a second reflecting surface, a third reflecting surface, and a fourth reflecting surface. The incident surface is arranged on a transmission path of a light beam, the first reflecting surface is arranged on the transmission path of the light beam, and the second reflecting surface, the third reflecting surface and the fourth reflecting surface are arranged on the transmission path of the light beam. Wherein, the transmission path of the light beam is as follows: (1) After reaching the object to be measured through the first reflecting surface, the light is reflected and penetrates through the incident surface, and is transmitted to the second reflecting surface, the third reflecting surface and the fourth reflecting surface in sequence to reach an observation surface; or (2) the light beam penetrates through the incident surface to reach the object to be measured and then is reflected to the first reflecting surface, the first reflecting surface reflects the light beam, and the light beam is transmitted to the second reflecting surface, the third reflecting surface and the fourth reflecting surface in sequence and then reaches the observation surface.
An embodiment of the invention provides an optical method for measurement, comprising: (1) Projecting a light beam to a first reflecting surface, reflecting the light beam to an object to be measured by the first reflecting surface, reflecting the light beam to penetrate through the incident surface, sequentially transmitting the light beam to a second reflecting surface, a third reflecting surface and a fourth reflecting surface, and then reaching an observation surface; or (2) a light beam is projected to the incident surface, penetrates through the incident surface to reach the object to be measured and then is reflected to the first reflecting surface, and the first reflecting surface reflects the light beam and sequentially transmits the light beam to the second reflecting surface, the third reflecting surface and the fourth reflecting surface to reach the observation surface.
The optical device for measurement and the measurement method thereof of the embodiment of the invention can measure the deviation value of the object to be measured, correct or adjust the object to be measured according to the deviation value, judge the correction direction in real time during production, reduce the measurement time, reduce the assembly time, increase the assembly precision and improve the yield.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are specifically described below with reference to the accompanying drawings.
Drawings
FIG. 1A is a schematic diagram of an embodiment of an optical device for measurement according to the present invention.
FIG. 1B is a schematic diagram of an embodiment of an optical device for measurement according to the present invention.
FIG. 1C is a schematic diagram of a calibration method of an optical apparatus for measurement according to an embodiment of the present invention.
FIG. 1D is a diagram of another calibration method for an optical apparatus for measurement according to an embodiment of the present invention.
Fig. 2 is a schematic view of another embodiment of the optical device for measurement of the present invention.
Fig. 3 is a schematic view of another embodiment of the optical device for measurement of the present invention.
FIG. 4 is a flow chart of an optical method for measurement according to an embodiment of the invention.
FIG. 5 is a flow chart of an optical method for measurement according to another embodiment of the present invention.
Detailed Description
These and other aspects, features and advantages of the present invention will become apparent from the following detailed description of a preferred embodiment, which is to be read in connection with the accompanying drawings. Directional terms as referred to in the following examples, for example: up, down, left, right, front or rear, etc., are directions with reference to the drawings only. Accordingly, the directional terminology is used for purposes of illustration and is in no way limiting.
Referring to fig. 1A, fig. 1A is a schematic diagram of an optical apparatus for measurement according to an embodiment of the present invention. The optical device 100 for measurement includes an incident surface 151, a first reflecting surface 153, a third reflecting surface 1711, and a fourth reflecting surface 1731, all disposed on a transmission path of the light beam L11. In the present embodiment, the light beam L11 penetrates the incident surface 151 to reach the object to be measured 13, and is reflected by the object to be measured 13 to the first reflecting surface 153, and the first reflecting surface 153 reflects the light beam L11, and sequentially transmits to the third reflecting surface 1711 and the fourth reflecting surface 1731 to reach the observation surface 191. Accordingly, the optical device 100 can measure a deviation value of the object 13 to be measured caused by the transmission of the light beam L11 by disposing the object 13 to be measured on the transmission path of the light beam L11 and projecting the light beam L11 to the position of the observation surface 191, and can correct the object 13 to be measured according to the deviation value. The specific operational details will be described in detail below.
The object to be measured 13 may be, for example, a projector, and the optical device 100 may be used to correct an error generated during manufacturing of the object to be measured 13, so that the object to be measured 13 can eliminate an influence caused by a device manufacturing error after correcting or adjusting an offset value caused by the transmission of the light beam L11 by the object to be measured 13. In the present embodiment, the optical device 100 includes a third reflective surface 1711 and a fourth reflective surface 1731 as an example. In other embodiments of the invention, however, the optical device may also include a second reflective surface (as shown in fig. 3). The second reflective surface can be disposed, for example, before the light beam L11 enters the third reflective surface 1711, so as to deflect the light beam, for example, to reduce the volume of the optical apparatus 100. In the embodiment shown in fig. 1, the second reflecting surface may be included in the third reflecting surface 1711, for example, and the present invention is not limited to the arrangement of the second reflecting surface.
The optical device 100 may further include a detection light source 11, a beam splitter 15, and a detector 19. The detection light source 11 is adapted to provide a light beam L11, the detection light source 11 being for example a laser light source, the light beam L11 being for example a laser. The beam splitter 15 is disposed on the transmission path of the light beam L11, the beam splitter 15 includes an incident surface 151 and a first reflecting surface 153, the beam splitter 15 may be implemented by, for example, a mirror or a prism half-plated with a reflective material to allow a part of the light beam to pass through and reflect a part of the light beam, and the beam splitter 15 may also be a half-transmissive half-mirror or a total internal reflection prism (TIR), but the invention is not limited thereto. The light beam L11 is projected to the object to be measured 13 via the beam splitter 15. In the present embodiment, the object to be measured 13 includes a lens mount 131, a prism 133, and a reflective element 137. The lens holder 131 is disposed on a transmission path of the light beam L11, and the lens holder 131 includes a light hole 1311, and the light hole 1311 is penetrated by the light beam L11 projected by the beam splitter 15. The prism 133 includes a prism reflection surface 1331, and the light beam L11 enters the prism 133 after penetrating through the lens holder 131, the prism reflection surface 1331 of the prism 133 reflects the incident light beam L11 to the reflective element 137, and the prism 133 is, for example, a total internal reflection prism (TIR) or a reverse total internal reflection prism (RTIR). The detector 19 is provided on the observation surface 191. The reflective element 137 reflects the incident light beam L11, and transmits the light beam L11 to the beam splitter 15 through the prism 133 and the lens mount 131 in sequence. The beam splitter 15 projects the light beam L11 to the detector 19 via the third and fourth reflective surfaces 1711 and 1731.
Referring to fig. 1B, fig. 1B is a schematic diagram of an optical device for measurement according to an embodiment of the present invention, wherein fig. 1B is a schematic diagram showing the optical device 100 when the position of the detection light source 11 is corrected or the position of the reference point P1 is obtained. The optical device 100 further includes a correction lens 14, and in this embodiment, the lens holder 131 further includes a connection ring (not shown), and the light hole 1311 is located in the connection ring. The adapter ring of the lens holder 131 is suitable for being connected with a lens (not shown) by a contact surface (not shown), wherein the lens holder 131 is connected with the lens by the adapter ring, the adapter ring comprises the light hole 1311, and the contact surface at the position where the adapter ring is connected with the lens is a common technique in the optical field, and the detailed structure thereof is not described herein. The correction lens 14 is adapted to be disposed on the lens holder 131 through a fixed reference surface (not shown), and a correction reflection surface 141 of the correction lens 14 is parallel to the contact surface of the lens holder 131, wherein the correction lens 14 is selectively disposed on the lens holder 131 or removed from the lens holder 131 as required. When the correction mirror 14 is disposed on the lens mount 131, the correction reflecting surface 141 of the correction mirror 14 may reflect the light beam L11 projected by the beam splitter 15 to become the light beam L12, and cause the reflected light beam L12 to be projected to the detection light source 11 via the beam splitter 15. By the arrangement of the correction lens 14, the user can adjust the position of the detection light source 11 to ensure that the light beam L11 emitted by the detection light source 11 is transmitted to the same position of the detection light source 11 after being reflected by the correction reflection surface 141 parallel to the contact surface of the lens mount 131, so as to perform the subsequent measurement operation.
Specifically, the optical device 100 further includes a mirror assembly 17, and the mirror assembly 17 includes a first mirror 171 and a second mirror 173. The first reflecting mirror 171 includes a third reflecting surface 1711, and the second reflecting mirror 173 includes a fourth reflecting surface 1731, the third reflecting surface 1711 and facing the fourth reflecting surface 1731. The reflective element 137 transmits the light beam L11 to the beam splitter 15 through the prism 133 and the lens mount 131 in sequence, and then the beam splitter 15 projects the light beam L11 to the third reflective surface 1711 of the first reflective mirror 171. The third reflective surface 1711 reflects the light beam L11 to the fourth reflective surface 1731, and the light beam L11 is reflected by the third reflective surface 1711 and the fourth reflective surface 1731 for multiple times and then projected to the detector 19. In the embodiment, the third reflective surface 1711 and the fourth reflective surface 1731 are parallel to each other as an example, but in other embodiments of the invention, the third reflective surface 1711 and the fourth reflective surface 1731 may also be non-parallel. The first mirror 171 and the second mirror 173 are disposed to greatly reduce the volume of the optical device 100.
Referring to fig. 1A and fig. 1B, when the correcting lens 14 is disposed on the lens holder 131 through a fixed reference surface (not shown), the correcting lens 14 reflects the light beam L11 projected by the beam splitter 15 to become a light beam L13, and the light beam L13 is projected onto a reference point P1 of the detector 19 through the beam splitter 15. The reference point P1 is a position where the light beam L11 provided from the detection light source 11 is transmitted to the observation surface 191 without being affected by the object to be measured 13. Referring to fig. 1A again, when the correcting lens 14 is not disposed on the lens holder 131, since the light beam L11 is affected by the object 13 to be measured, the reflective element 137 reflects the light beam L11 to become the light beam L15, and transmits the light beam L15 to the beam splitter 15 through the prism 133 and the lens holder 131 in sequence. The beam splitter 15 projects the light beam L15 onto a measurement point P2 of the detector 19 via the third and fourth reflective surfaces 1711 and 1731. The measuring point P2 is a position where the light beam L11 provided by the detection light source 11 is transmitted to the observation surface 191 under the influence of the object to be measured 13. The influence of the light beam L11 by the object 13 to be measured may be, for example, an error generated during manufacturing and/or assembling the lens mount 131, the prism 133, or the reflective element 137, which is not limited by the invention.
There is a correction angle θ between the light beam L13 and the light beam L15 affected by the object to be measured 13 (the correction angle θ is the deviation value caused by the object to be measured 13 transferring to the light beam L11). If the distance between the reference point P1 and the measuring point P2 is d1 (not shown in the figure) and the path distance of the light beam L13 from the object to be measured 13 to the reference point P1 is d2 (not shown in the figure), the correction angle θ = tan can be calculated -1 (d1/d2)。
Referring to fig. 1C, fig. 1C is a schematic diagram of a calibration or adjustment method of an optical device for measurement according to an embodiment of the present invention. As shown in fig. 1A, the trajectory of the light beam L13 projected to the reference point P1 is rotated by the correction angle θ in the first rotation direction r1 and then overlaps with the light beam L15 projected to the measurement point P2. In the present embodiment, the lens holder 131 is rotated by the correction angle θ toward the second rotation direction r2 by adjusting the lens holder 131, wherein the first rotation direction r1 is opposite to the second rotation direction r 2. Therefore, after the correction angle θ is calculated according to the description of the embodiment, the lens holder 131 is simply adjusted to rotate the lens holder 131 by the correction angle θ, so that the influence of errors generated during the manufacturing and/or assembling of the lens holder 131, the prism 133, or the reflective element 137 can be eliminated. Whereas, for example, when the object to be measured 13 is a projection device, the adjustment of the lens mount 131 can eliminate the influence of the projection image due to the manufacturing error.
Referring to fig. 1D, fig. 1D is a schematic diagram illustrating another calibration method of an optical device for measurement according to an embodiment of the invention. In the present embodiment, when the correction lens 14 is not disposed on the lens holder 131, the reflective element 137 rotates by the correction angle θ in the second rotation direction r2, wherein the first rotation direction r1 is opposite to the second rotation direction r2, so that the light beam L17 reflected by the reflective element 137 can be transmitted to the reference point P1 of the detector 19 via the prism 133, the lens holder 131, the beam splitter 15, the third reflective surface 1711 and the fourth reflective surface 1731 in sequence. Therefore, after the correction angle θ is calculated according to the description of the embodiment, the reflective element 137 is simply adjusted to rotate the reflective element 137 by the correction angle θ, so as to eliminate the influence caused by the error generated during the manufacturing and/or assembling of the lens holder 131, the prism 133, or the reflective element 137. Whereas, for example, when the object to be measured 13 is a projection device, the adjustment of the reflective element 137 can eliminate the influence of the projected image from the manufacturing error.
In addition, the present invention does not limit the kind of the correction lens 14 as long as the correction lens 14 includes the correction reflecting surface 141 and the correction reflecting surface 141 can reflect the light beam. The reflective element 137 may be, for example, a Digital Micromirror Device (DMD) or a Mirror (Mirror). In other embodiments of the present invention, the detector 19 may further include a lens and a photosensitive element, and the observation surface 191 is located on a photosensitive surface of the photosensitive element. The measurement of the light beam by the photosensitive element can achieve the function of automatic measurement, and in one embodiment, the detector 19 can be a screen or a wall.
FIG. 2 is a schematic view of another embodiment of the optical device for measurement of the present invention. Referring to fig. 2, in the present embodiment, the optical device 200 includes a detection light source 11, a beam splitter 25 and a detector 19. The beam splitter 25 includes an optical surface 251, and the optical surface 251 allows a portion of the light beam to pass through and reflects a portion of the light beam. The optical device 200 of the present embodiment has similar structure and function as the optical device 100 shown in fig. 1A to 1D, and the present embodiment is different from the embodiment shown in fig. 1A to 1D mainly in that: the optical surface 251 of the beam splitter 25 functions as an incident surface and a first reflecting surface. The light beam L21 provided by the detection light source 11 completely or partially reaches the object to be measured 13 through the optical surface 251 (corresponding to the first reflective surface) of the beam splitter 25, and is then reflected by the object to be measured 13 to become the light beam L23, and the light beam L23 completely or partially penetrates through the optical surface 251 (corresponding to the incident surface), and is sequentially transmitted to the third reflective surface 1711 and the fourth reflective surface 1731, and then reaches the observation surface 191. The optical device 200 can be applied more flexibly and diversely by the arrangement of the optical splitter 25.
Fig. 3 is a schematic view of a further embodiment of the optical device for measurement of the present invention. Referring to fig. 3, in the present embodiment, the optical device 300 includes a detection light source 11, a beam splitter 25, a mirror 21, a mirror 23, a mirror 27, a mirror 29, and a detector 19. The optical device 300 of the present embodiment has similar structure and function as the optical device 200 shown in fig. 2, and the difference between the present embodiment and the embodiment shown in fig. 2 is mainly that: the optical device 300 further comprises a mirror 21, a mirror 23, a mirror 27, a mirror 29, the mirror 21 comprising a reflective surface 211, the mirror 23 comprising a reflective surface 231, the mirror 27 comprising a reflective surface 271, the mirror 29 comprising a second reflective surface 291. The light beam provided by the detection light source 11 is reflected by the reflection surface 211 of the reflector 21 and then transmitted to the reflector 23, and the light beam is transmitted to the beam splitter 25 by the reflection surface 231. The light beam reflected by the object to be measured 13 and penetrating through the optical surface 251 is transmitted to the reflecting mirror 27, the reflecting surface 271 transmits the light beam to the second reflecting surface 291 of the reflecting mirror 29, and then the light beam is transmitted to the third reflecting surface 1711 and the fourth reflecting surface 1731 in sequence and reaches the observation surface 191. By arranging the reflector 21, the reflector 23, the reflector 27 and the reflector 29, the volume of the optical device 300 can be reduced, and the application of the optical device 300 can be more flexible and diversified.
FIG. 4 is a flow chart of an optical method for measurement according to an embodiment of the invention. Referring to fig. 4 and fig. 1A, in step S401, a light beam L11 is provided. Next, in step S403, the incident surface 151 is disposed on the transmission path of the light beam L11. In step S405, a first reflection surface 153 is disposed on the transmission path of the light beam L11. Next, in step S407, a third reflective surface 1711 and a fourth reflective surface 1731 are disposed on the transmission path of the light beam L11. In step S409, the light beam L11 penetrates through the incident surface 151 to reach the object 13 to be measured and then is reflected to the first reflecting surface 153, and the first reflecting surface 153 reflects the light beam L11, and then the light beam is transmitted to the third reflecting surface 1711 and the fourth reflecting surface 1731 in sequence and then reaches the observation surface 191. Therefore, by projecting the light beam L11 to the position of the observation surface 191, a deviation value caused by the transmission of the object to be measured 13 to the light beam L11 can be measured, and the object to be measured 13 can be corrected according to the deviation value.
FIG. 5 is a flow chart of an optical method for measurement according to another embodiment of the present invention. Referring to fig. 5 and fig. 2, in step S501, a light beam L21 is provided. Next, in step S503, an incident surface (i.e., the optical surface 251) is disposed on the transmission path of the light beam L21. In step S505, a first reflection surface (i.e., the optical surface 251) is disposed on the transmission path of the light beam L21. Next, in step S507, a third reflective surface 1711 and a fourth reflective surface 1731 are disposed on the transmission path of the light beam L21. In step S509, the first reflective surface reflects the light beam L21 to the object 13 to be measured, and then reflects the light beam to penetrate through the incident surface, and then sequentially transmits the light beam to the third reflective surface 1711 and the fourth reflective surface 1731, and then reaches an observation surface 191. Therefore, by projecting the light beam L21 to the position of the observation surface 191, a deviation value caused by the transmission of the light beam L21 by the object to be measured 13 can be measured, and the object to be measured 13 can be corrected according to the deviation value.
In addition, the optical method for measurement according to the embodiment of the present invention can be obtained from the descriptions of the embodiments of fig. 1 to 3 with sufficient teaching, suggestion and implementation descriptions, and thus, the description thereof is omitted.
In summary, the optical apparatus for measurement according to the embodiments of the present invention can accurately and effectively measure the deviation value of the object to be measured, and can correct the object to be measured according to the deviation value, so as to determine the correction direction in real time during production. Under the condition that the resolution of the projection device is gradually improved, a component manufacturer can be used as a reference for die repairing, so that the measurement time is reduced, the assembly precision of the projection device is improved, and the yield is improved.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (9)
1. An optical device for measurement, comprising:
the incident surface is arranged on a transmission path of a light beam;
the first reflecting surface is arranged on the transmission path of the light beam;
the second reflecting surface is arranged on the downstream of the optical path of the first reflecting surface; and
the reflector group comprises a first reflector and a second reflector, the first reflector comprises a third reflecting surface, the second reflector comprises a fourth reflecting surface, the third reflecting surface faces the fourth reflecting surface, and the reflector group is arranged on the transmission path of the light beam;
a beam splitter disposed on a transmission path of the light beam, the beam splitter including the incident surface and the first reflective surface, the light beam being projected to an object to be measured through the beam splitter, wherein the object to be measured includes a lens mount, a prism and a reflective element, the lens mount being disposed on the transmission path of the light beam, the lens mount including a light-transmitting hole, the light-transmitting hole allowing the light beam projected by the beam splitter to pass through, the prism including a prism reflective surface, the light beam entering the prism after passing through the lens mount, the prism reflective surface of the prism reflecting the incident light beam to the reflective element; wherein, the transmission path of the light beam is as follows: (1) After reaching an object to be measured through the first reflecting surface, the light beam is reflected and penetrates through the incident surface and is sequentially transmitted to the second reflecting surface, the third reflecting surface and the fourth reflecting surface, and the light beam can reach an observation surface after being reflected more than once through the third reflecting surface and the fourth reflecting surface; or (2) the light beam penetrates through the incidence surface to reach the object to be measured and then is reflected to the first reflection surface, the first reflection surface reflects the light beam and sequentially transmits the light beam to the second reflection surface, the third reflection surface and the fourth reflection surface, and the light beam can reach the observation surface after being reflected more than once between the third reflection surface and the fourth reflection surface.
2. The optical device for measurement according to claim 1, further comprising:
a detection light source adapted to provide said light beam; and
and the detector is arranged on the observation surface, the reflective element reflects the incident light beam and transmits the light beam to the optical splitter through the prism and the lens mount in sequence, and the optical splitter projects the light beam to the detector through the second reflecting surface, the third reflecting surface and the fourth reflecting surface.
3. The optical device for measurement according to claim 2, wherein the reflective element transmits the light beam to the beam splitter via the prism and the lens mount in sequence, the beam splitter projects the light beam to the third reflecting surface of the first reflecting mirror, the third reflecting surface reflects the light beam to the fourth reflecting surface, and the light beam can be projected to the observation surface after being reflected multiple times by the third reflecting surface and the fourth reflecting surface.
4. An optical device for measurement, comprising:
a detection light source adapted to provide a light beam;
the beam splitter is arranged on the transmission path of the light beam;
an object to be measured to which the light beam is projected via the beam splitter, the object to be measured including:
the lens mount is arranged on a transmission path of the light beam and comprises a light hole, and the light hole allows the light beam projected by the light splitter to penetrate through;
the prism comprises a prism reflecting surface, and the light beam penetrates through the lens seat and then enters the prism; and
the prism reflecting surface of the prism reflects the incident light beam to the reflective element;
the reflector group comprises a first reflector and a second reflector, the first reflector comprises a third reflecting surface, the second reflector comprises a fourth reflecting surface, the third reflecting surface faces the fourth reflecting surface, and the reflector group is arranged on the transmission path of the light beam; and
the reflective element reflects the incident light beam and transmits the light beam to the light splitter through the prism and the lens mount in sequence, the light splitter transmits the light beam through a second reflecting surface, the third reflecting surface and the fourth reflecting surface, and the light beam can be projected to the observation surface after being reflected more than once through the space between the third reflecting surface and the fourth reflecting surface.
5. The optical device for measurement according to claim 2 or 4, further comprising a correction lens, wherein the lens holder further comprises a connection ring, the light-transmitting hole is located in the connection ring, the connection ring is adapted to be connected with a lens by a contact surface, the correction lens is adapted to be disposed on the lens holder, a correction reflection surface of the correction lens is parallel to the contact surface, and when the correction lens is disposed on the lens holder, the correction reflection surface of the correction lens reflects the light beam projected by the light splitter so that the light beam is projected to the detection light source through the light splitter.
6. The optical device for measurement according to claim 2 or 4, further comprising a correction mirror adapted to be disposed on the lens mount, the correction mirror reflecting the light beam projected by the beam splitter so that the light beam is projected onto a reference point of the observation surface via the beam splitter when the correction mirror is disposed on the lens mount, the reflective element reflecting the light beam and transmitting the light beam to the beam splitter via the prism and the lens mount in sequence, the beam splitter projecting the light beam onto a measurement point of the observation surface, the reference point being at a distance d1 from the measurement point, the path distance of the light beam from the object to be measured to the reference point being d2, and a correction angle θ = tan when the correction mirror is disposed on the lens mount, the reflective element reflecting the light beam and transmitting the light beam to the beam splitter via the prism and the lens mount in sequence, and the beam splitter projecting the light beam onto the measurement point of the observation surface, and the distance θ = tan being equal to the distance d2 -1 (d1/d2)。
7. The optical apparatus as claimed in claim 6, wherein the trajectory of the light beam projected to the reference point is overlapped with the light beam projected to the measurement point after rotating by the correction angle θ in a first rotation direction, and the lens holder is rotated by the correction angle θ in a second rotation direction, wherein the first rotation direction is opposite to the second rotation direction.
8. The optical device for measurement, according to claim 6, wherein a trajectory of the light beam projected to the reference point is rotated by the correction angle θ in a first rotation direction to overlap with the light beam projected to the measurement point, and the reflective element is rotated by the correction angle θ in a second rotation direction when the correction lens is not disposed on the lens holder, wherein the first rotation direction is opposite to the second rotation direction, so that the light beam reflected by the reflective element is transmitted to the reference point of the observation surface.
9. An optical method for measurement, comprising:
providing a detection light source, wherein the detection light source is suitable for providing a light beam;
arranging a light splitter on a transmission path of the light beam, wherein the light splitter comprises an incidence surface and a first reflecting surface;
arranging a reflector group, wherein the reflector group comprises a first reflector and a second reflector, the first reflector comprises a third reflecting surface, the second reflector comprises a fourth reflecting surface, the third reflecting surface faces the fourth reflecting surface, and the reflector group is arranged on a transmission path of the light beam;
providing an object to be measured, wherein the object to be measured comprises: a lens mount, a prism and a reflective element; and
(1) Projecting the light beam to the first reflective surface,
the first reflecting surface reflects the light beam to the object to be measured, then reflects the light beam to penetrate through the incident surface, and then sequentially transmits the light beam to a second reflecting surface, the third reflecting surface and the fourth reflecting surface, and the light beam can reach an observation surface after being reflected more than once between the third reflecting surface and the fourth reflecting surface; or (2) projecting the light beam to the incident surface, wherein the light beam penetrates through the incident surface to reach the object to be measured and then is reflected to the first reflecting surface, the first reflecting surface reflects the light beam and sequentially transmits the light beam to the second reflecting surface, the third reflecting surface and the fourth reflecting surface, and the light beam can reach the observation surface after being reflected more than once between the third reflecting surface and the fourth reflecting surface; wherein:
the beam splitter projects the light beam to the object to be measured, and the light beam penetrates through a light transmission hole of the lens mount and then enters the prism;
a prism reflecting surface of the prism reflects the incident light beam to the reflective element;
the reflective element reflects the incident light beam and transmits the light beam to the light splitter through the prism and the lens mount in sequence; and
the beam splitter projects the light beam to a detector through the second reflecting surface, the third reflecting surface and the fourth reflecting surface, wherein the detector is arranged on the observation surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810188477.5A CN110243573B (en) | 2018-03-07 | 2018-03-07 | Optical device for measurement and measurement method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810188477.5A CN110243573B (en) | 2018-03-07 | 2018-03-07 | Optical device for measurement and measurement method thereof |
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| Publication Number | Publication Date |
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| CN110243573A CN110243573A (en) | 2019-09-17 |
| CN110243573B true CN110243573B (en) | 2022-12-20 |
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| CN201810188477.5A Active CN110243573B (en) | 2018-03-07 | 2018-03-07 | Optical device for measurement and measurement method thereof |
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| JP3167870B2 (en) * | 1994-12-06 | 2001-05-21 | 株式会社リコー | Apparatus and method for measuring eccentricity of aspherical lens |
| TWI382201B (en) * | 2008-12-03 | 2013-01-11 | Young Optics Inc | Image projection and detection apparatus |
| CN102175189B (en) * | 2011-02-14 | 2012-09-05 | 中国科学院光电技术研究所 | Central error measuring system of dual beam interferometer |
| CN102385170B (en) * | 2011-08-03 | 2013-06-05 | 中国科学院长春光学精密机械与物理研究所 | Optical system for measuring and regulating center deviation of optics lens at high precision |
| EP2579100A3 (en) * | 2011-10-03 | 2017-12-06 | ASML Holding N.V. | Inspection apparatus, lithographic apparatus, and device manufacturing method |
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