CN112882184B - Double-beam real-time center alignment and stabilization device and method - Google Patents
Double-beam real-time center alignment and stabilization device and method Download PDFInfo
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- CN112882184B CN112882184B CN202110061579.2A CN202110061579A CN112882184B CN 112882184 B CN112882184 B CN 112882184B CN 202110061579 A CN202110061579 A CN 202110061579A CN 112882184 B CN112882184 B CN 112882184B
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- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- G—PHYSICS
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- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
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Abstract
The invention discloses a device and a method for aligning and stabilizing double light beams in real time. The invention can combine two laser beams with different wavelengths, ensures the strict alignment of the centers of light spots, stabilizes the emitted combined light beams, keeps the centers of the two beams in a stable and combined state all the time in long-time work, and realizes the stable control of the combined light beams with miniaturization, high precision and high speed. The device can be used for adjusting to obtain stable beam combination light, and can be widely applied to systems such as super-resolution microscopic imaging, high-precision laser direct-writing photoetching and the like.
Description
Technical Field
The invention belongs to the field of ultra-precise optical imaging and inscribing, and particularly relates to a device and a method for double-beam real-time center alignment and stabilization.
Background
With the continuous development of the technology, the application of the multi-beam system in the field of ultra-precise optical imaging and inscription is increasingly important. In the field of super-resolution imaging, in order to break through diffraction limit and obtain image information with higher resolution, a multi-beam system is adopted in several important super-resolution imaging technologies such as stimulated radiation loss microscopy (STED), reversible saturated fluorescence transition (RESOLFT), multicolor fluorescence microscopy and the like. In these systems, several light beams with different wavelengths are focused on the same area on the sample, and the centers of the focused points of the different light beams need to be strictly aligned in the imaging process, and the spatial alignment of the multiple light beams is crucial to obtain the best resolution.
For the field of ultrahigh-precision laser writing, the appearance of the double-beam super-resolution laser direct-writing nano-processing technology greatly breaks through the diffraction limit (about 200 nm), obtains the optimal processing precision less than 10nm, and provides a new development direction for the three-dimensional nano-structure processing technology and the application thereof. The technology similar to STED is adopted, a hollow light spot and a solid light spot act on the photoresist at the same time, and the de-crosslinking effect of the hollow light spot is utilized to greatly compress the writing size. The alignment precision and stability of the two light spots directly affect the writing result, and are one of the key factors for popularizing the technology and applying the technology.
The optical system is easily affected by factors such as external mechanical jitter, temperature change, light source jitter and the like, so that the focus light spot drifts, and often drifts by tens of nanometers within tens of minutes. Particularly, for an ultra-precise optical system, when the precision of the ultra-precise optical system needs to be less than 10nm, the micro interference not only causes jitter influence on a single light beam, but also changes the relative distance between light spots, which all cause serious errors on the result. In addition, when the imaging system works for a long time, internal devices are also stressed and changed, so that the light beam is slowly drifted, and in order to obtain a good imaging effect, the internal devices also need to be corrected again before the system is started every time.
The conventional method adopted at present is a passive anti-drift method, namely, an optical platform and a temperature control system are utilized to weaken the influence of environmental factors on the drift of light spots, however, under the development trend of higher precision, the improvement of the anti-drift capability of the system is a necessary premise for the industrial application in the field of ultra-precise optical imaging and inscription. At present, active anti-drift methods exist, namely, beam drift is corrected in real time through detection of a pair of position detectors (or four-quadrant detectors) and control of a pair of two-dimensional fast control reflectors, but the active anti-drift methods are all applied to a single-beam stabilization system and cannot effectively solve the problems of real-time center alignment and stabilization in a double-beam system.
Disclosure of Invention
The present invention is directed to overcoming the disadvantages of the prior art and providing a dual beam real time center alignment and stabilization apparatus and method.
The purpose of the invention is realized by the following technical scheme: the utility model provides a device that real-time center of two beams aimed at and is stable, including first right angle reflecting prism, second right angle reflecting prism, first angle adjustment mirror holder, the dichroscope, first beam splitter, first convex lens, first photoelectric sensing device, the second convex lens, first adjustable reflector, first concave lens, second photoelectric sensing device, the adjustable aperture of second, third right angle reflecting prism, fourth right angle reflecting prism, the mirror holder is adjusted to the second angle, the second beam splitter, the third convex lens, the third photoelectric sensing device, fourth convex lens, the adjustable reflector of second, second concave lens and fourth photoelectric sensing device.
The first incident beam is reflected by the first right-angle reflecting prism and then enters the second right-angle reflecting prism, is reflected upwards to the first angle adjusting mirror bracket, and then is divided into a first reflected beam and a first transmitted beam by the dichroic mirror.
The second incident beam is reflected by the third right-angle reflecting prism, then is incident on the fourth right-angle reflecting prism, is reflected upwards to the second angle adjusting mirror bracket, and then is divided into a second reflected beam and a second transmitted beam by the second beam splitter; the second reflected light beam is divided into a third reflected light beam and a third transmitted light beam through the dichroic mirror.
The first reflected light beam and the third transmitted light beam emitted by the dichroic mirror are combined and then are divided into a first combined light beam and a second combined light beam through a first beam splitter; the first beam combination light is incident on the first photoelectric sensing device through the first convex lens, and the second beam combination light is incident on the second photoelectric sensing device through the second convex lens, the first adjustable reflecting mirror and the first concave lens in sequence.
The second transmitted light beam emitted by the second beam splitter is divided into third detection light and fourth detection light by the third beam splitter; the third detection light is incident on the third photoelectric sensing device through the third convex lens, and the fourth detection light is incident on the fourth photoelectric sensing device through the fourth convex lens, the second adjustable reflecting mirror and the second concave lens in sequence.
Further, the first angle adjusting lens frame and the first photoelectric sensing device form an object-image relation relative to the first convex lens; the second angle adjusting mirror frame and the first photoelectric sensing device form an object image relation relative to the first convex lens; the second angle adjusting mirror frame and the third photoelectric sensing device form an object image relation relative to the third convex lens. The second convex lens and the first concave lens form a telephoto system, and the equivalent focal planes of the second convex lens and the first concave lens and the detection plane of the second photoelectric sensing device are located at the same position. The fourth convex lens and the second concave lens form a telephoto type system, and the equivalent focal planes of the fourth convex lens and the second concave lens and the detection plane of the fourth photoelectric sensing device are located at the same position.
Further, the distance relationship between the first angle adjusting mirror frame, the dichroic mirror, the first convex lens, the first photoelectric sensor, the second angle adjusting mirror frame and the second beam splitter satisfies the following formula:
wherein f is 1 Adjust the frame for the focal length of the first convex lens and a for the first angleThe distance between the dichroic mirror and the dichroic mirror, b is the distance between the dichroic mirror and the first convex lens, c is the distance between the first convex lens and the first photoelectric sensor, d is the distance between the second angle adjusting mirror bracket and the second beam splitter, and e is the distance between the dichroic mirror and the second beam splitter.
The distance relation among the first concave lens, the second angle adjusting mirror frame, the third beam splitter, the third convex lens and the third photoelectric sensing device meets the following formula:
wherein i is the distance between the second angle adjusting mirror frame and the third beam splitter, j is the distance between the third beam splitter and the third convex lens, k is the distance between the third convex lens and the third photoelectric sensing device, and f 4 Is the focal length of the third convex lens.
Further, the distance g between the first concave lens and the second photoelectric sensing device satisfies the following formula:
wherein, F 1 Is the equivalent focal length of the combined lens group of the second convex lens and the first concave lens, f is the distance between the second convex lens and the first adjustable reflector, h is the distance between the first adjustable reflector and the first concave lens, f 2 Is the focal length of the second convex lens 13; f. of 3 Is the focal length of the first concave lens.
The distance p between the second concave lens and the fourth photoelectric sensing device satisfies the following formula:
wherein, F 2 Is the equivalent focal length of the combined lens group of the fourth convex lens and the second concave lens, m is the distance between the fourth convex lens and the second adjustable reflector, n is the distance between the second adjustable reflector and the second concave lens, f 5 Is the focal length of the fourth convex lens 28; f. of 6 Is the focal length of the second concave lens 30.
Further, the first incident light beam and the second incident light beam are incident from the adjustable aperture. The first incident light beam and the second incident light beam are ensured to be vertically incident through the rotating reflector.
Furthermore, the transmittance of the dichroic mirror to the first incident light beam is more than or equal to 90% and the reflectivity is more than or equal to 5%; the reflectivity of the dichroic mirror to the second incident beam is larger than or equal to 90% and the transmittance of the dichroic mirror to the second incident beam is larger than or equal to 5%. The reflectivity of the second beam splitter to the second incident beam is larger than or equal to 90% and the transmittance of the second beam splitter is larger than or equal to 5%. The transmittance of the optical filter to the first incident light beam is more than 99%, and the transmittance to the second incident light beam is less than 0.1%. The inverse transmission ratio of the first beam splitter to the third beam splitter to the first incident beam and the second incident beam is 1.
Furthermore, the device also comprises a first nanometer displacement platform, a second nanometer displacement platform, a third nanometer displacement platform and a fourth nanometer displacement platform. The first right-angle reflecting prism is fixed on the first nanometer displacement table and can perform nanometer movement along the x direction of the incident vertical plane of the light beam. And the second right-angle reflecting prism is fixed on the second nanometer displacement table and can perform nanometer movement along the y direction of the incident vertical plane of the light beam. And the third right-angle reflecting prism is fixed on the third nano displacement table and can perform nano movement along the x direction of the incident vertical plane of the light beam. And the fourth right-angle reflecting prism is fixed on the fourth nano displacement table and can perform nano movement along the y direction of the incident vertical plane of the light beam.
Furthermore, the second convex lens and the first concave lens form a telephoto type system, and the equivalent focal planes of the second convex lens and the first concave lens and the detection plane of the second photoelectric sensing device are located at the same position. The fourth convex lens and the second concave lens form a telephoto type system, and the equivalent focal planes of the fourth convex lens and the second concave lens and the detection plane of the fourth photoelectric sensing device are located at the same position.
Further, the first photoelectric sensing device, the second photoelectric sensing device, the third photoelectric sensing device and the fourth photoelectric sensing device are position detectors or four-quadrant detectors.
A method of dual beam real time center alignment and stabilization, comprising the steps of:
s1, a light filter is placed between a dichroic mirror and a first beam splitter, at the moment, a first photoelectric sensing device detects light beam position information of a first incident light beam, a second photoelectric sensing device detects angle information of the first incident light beam, and a mirror frame is adjusted by adjusting a first right-angle reflecting prism, a second right-angle reflecting prism and a first angle, so that the centers of light beams incident to the first photoelectric sensing device and the second photoelectric sensing device are located at the center of a detection surface.
S2, the optical filter is removed, the first photoelectric sensing device and the second photoelectric sensing device detect the position and angle information of the combined beam, and the position and angle of the center of the combined beam detected by the first photoelectric sensing device and the second photoelectric sensing device return to the center of the detection surface again by adjusting the third right-angle reflecting prism, the fourth right-angle reflecting prism and the second angle adjusting mirror frame. And then the third photoelectric sensing device and the fourth photoelectric sensing device record the position and angle information of the second incident beam at the moment, and the position is taken as a stable target position.
S3, placing the optical filter back between the dichroic mirror and the first beam splitter; the first photoelectric sensing device and the second photoelectric sensing device only detect the position and angle information of the first incident beam, the positions of the first right-angle reflecting prism and the second right-angle reflecting prism and the angle deflection of the first angle adjusting mirror frame are adjusted, and the position and angle of the first incident beam are corrected; the third photoelectric sensing device and the fourth photoelectric sensing device only detect the position and angle information of the second incident light beam, the positions of the third right-angle reflecting prism and the fourth right-angle reflecting prism and the angle deflection of the second angle adjusting mirror bracket are adjusted, and the position and angle of the second incident light beam are corrected.
Further, in step S2, since the light beam is shifted in position after passing through the dichroic mirror, in order to ensure that the beam centers of the first incident light beam and the second incident light beam are exactly coincident, the alignment position of the incident light beams needs to be corrected. When the central positions of the two emergent light beams coincide, the central positions of the first incident light beam and the second incident light beam detected by the first photoelectric sensing device have deviation in the x direction, and the third right-angle reflecting prism needs to be adjusted to enable the second incident light beam to adjust the distance with the length of t along the emergent direction:
wherein n is 1 And n 2 The refractive indexes of the dichroic mirror for the first incident light beam and the second incident light beam respectively, and s is the film thickness of the dichroic mirror.
The invention has the beneficial effects that: the invention can combine two laser beams with different wavelengths, ensures the strict alignment of the centers of light spots, stabilizes the emitted combined light beams, keeps the centers of the two beams in a stable and combined state all the time in long-time work, and realizes the stable control of the combined light beams with miniaturization, high precision and high speed. The device can be used for adjusting to obtain stable beam combination light, and can be widely applied to systems such as super-resolution microscopic imaging, high-precision laser direct-writing photoetching and the like.
Drawings
FIG. 1 is a schematic view of a dual beam real-time center alignment and stabilization apparatus of the present invention;
FIG. 2 is a schematic diagram of the right angle reflecting prism assembly of the present invention for adjusting incident light beam;
FIG. 3 is a distance relationship diagram of the first angle adjusting mirror holder, the second beam splitter, the dichroic mirror, the first convex lens and the first photoelectric sensor according to the present invention;
FIG. 4 is a schematic diagram of the distance relationship between the second convex lens, the first adjustable mirror, the first concave lens and the second photo-electric sensing device according to the present invention;
FIG. 5 is a distance relationship diagram of a second angle adjustment mirror holder, a third beam splitter, a third convex lens, and a third photoelectric sensor in accordance with the present invention;
FIG. 6 is a schematic diagram of the relationship between the distance between a fourth convex lens, a second adjustable mirror, a second concave lens and a fourth photo-electric sensor device according to the present invention;
FIG. 7 is a schematic diagram of the combination of two light beams with different wavelengths after passing through a dichroic mirror according to the present invention;
in the figure, 1-a first adjustable aperture, 2-a first rotating mirror, 3-a first right angle reflecting prism, 4-a first nano displacement stage, 5-a second right angle reflecting prism, 6-a second nano displacement stage, 7-a first angle adjusting mirror holder, 8-a dichroic mirror, 9-an optical filter, 10-a first beam splitter, 11-a first convex lens, 12-a first photo-sensitive device, 13-a second convex lens, 14-a first adjustable mirror, 15-a first concave lens, 16-a second photo-sensitive device, 17-a second adjustable aperture, 18-a second rotating mirror, 19-a third right angle reflecting prism, 20-a third nano displacement stage, 21-a fourth right angle prism reflecting mirror, 22-a fourth nano displacement stage, 23-a second angle adjusting mirror holder, 24-a second beam splitter, 25-a third beam splitter, 26-a third convex lens, 27-a third photo-sensitive device, 28-a fourth convex lens, 29-a second adjustable mirror, 30-a second concave lens, 31-a fourth photo-sensitive device, and a fourth photo-controller.
Detailed Description
The present invention is further illustrated by the following examples and figures, but should not be construed as being limited thereby.
The invention discloses a device for aligning and stabilizing a real-time center of a double light beam, which is shown in figure 1 and comprises: the device comprises a first adjustable small hole 1, a first rotating reflector 2, a first right-angle reflecting prism 3, a first nanometer displacement table 4, a second right-angle reflecting prism 5, a second nanometer displacement table 6, a first angle adjusting mirror frame 7, a dichroic mirror 8, an optical filter 9, a first beam splitter 10, a first convex lens 11, a first photoelectric sensing device 12, a second convex lens 13, a first adjustable reflector 14, a first concave lens 15, a second photoelectric sensing device 16, a second adjustable small hole 17, a second rotating reflector 18, a third right-angle reflecting prism 19, a third nanometer displacement table 20, a fourth right-angle reflecting prism 21, a fourth nanometer displacement table 22, a second angle adjusting mirror frame 23, a second beam splitter 24, a third beam splitter 25, a third convex lens 26, a third photoelectric sensing device 27, a fourth convex lens 28, a second adjustable reflector 29, a second concave lens 30, a fourth photoelectric sensing device 31 and a controller 32. The controller 32 is configured to control the first nano-displacement stage 4, the second nano-displacement stage 6, the first angle adjustment frame 7, the third nano-displacement stage 20, the fourth nano-displacement stage 22, and the second angle adjustment frame 23, and collect information fed back by the first photo-sensing device 12, the second photo-sensing device 16, the third photo-sensing device 27, and the fourth photo-sensing device 31. The photoelectric sensing devices adopted in this embodiment are all position detectors or four-quadrant detectors.
The method for performing real-time center alignment and stabilization on the double light beams by using the device shown in fig. 1 specifically comprises the following steps:
two laser beams with a wavelength of 532nm (first incident beam) and 780nm (second incident beam) are respectively incident into the device from the first adjustable aperture 1 and the second adjustable aperture 17.
(1) Before the device starts to work
Firstly, a first incident light beam passes through the center of a first adjustable small hole 1, a first rotating reflector 2 is rotated to the position of the reflector to reflect the first incident light beam, the returned light beam is superposed with the first incident light beam by adjusting a front light path system, and then the first rotating reflector 2 is adjusted to the position without the reflector. For the second incident beam, the same operation is taken with the second adjustable aperture 17 and the second rotating mirror 18 to make the second incident beam normally incident.
Then, the first incident beam is reflected by the first rectangular reflecting prism 3, then incident on the second rectangular reflecting prism 5, and then reflected upward to the first angle adjusting mirror holder 7. As shown in fig. 2, the first right-angle reflecting prism 3 is fixed on the first nano displacement table 4, can perform nano displacement along the incident direction of the light beam, and is in the x direction relative to the emergent light plane; the second right-angle reflecting prism 5 is fixed on the second nanometer displacement table 6, can perform nanometer displacement along the incident direction of the light beam, and is in the y direction relative to the emergent light plane. The angle adjusting mirror frames in the embodiment all adopt two-dimensional fast control mirrors of a model FSM-300 of the United states Newport company, mainly comprise mirrors and corresponding control systems, can realize two-dimensional angular deflection, the deflection angle range is +/-26.2 mrad (+/-1.5 degrees), and the resolution ratio is less than 1urad.
For the second incident beam, the same operation is taken by using the third rectangular reflecting prism 19, the third nano-displacement stage 20, the fourth rectangular reflecting prism 21, the fourth nano-displacement stage 22 and the second angle adjusting mirror holder 23: the second incident beam is reflected by the third right-angle reflecting prism 19, then is incident on the fourth right-angle reflecting prism 21, and is then reflected upwards to the second angle adjusting mirror bracket 23; the third right-angle reflecting prism 19 is fixed on the third nanometer displacement table 20, can perform nanometer movement along the incident direction of the light beam, and is in the x direction relative to the emergent light plane; the fourth rectangular reflecting prism 21 is fixed on the fourth nano-displacement stage 22, and can perform nano-displacement along the incident direction of the light beam, and is in the y direction relative to the emergent plane. The second incident beam is then incident on the second beam splitter 24 from the second angle adjustment mirror bracket 23, and is split into a second reflected beam and a second transmitted beam; in the present embodiment, the second beam splitter 24 with a transmittance inverse ratio of 1;
the first incident light beam is incident on the dichroic mirror 8 from the first angle adjustment mirror holder 7 and is split into a first reflected light beam and a first transmitted light beam. The second reflected light beam is emitted from the second beam splitter 24 and then split into a third reflected light beam and a third transmitted light beam by the dichroic mirror 8. The first transmitted beam and the third reflected beam are combined into outgoing light. In the present embodiment, a dichroic mirror 8 is used, which has an inverse transmittance ratio of 9 for the first incident light beam and an inverse transmittance ratio of 1 for the second incident light beam.
The filter 9 used in this embodiment can transmit the first incident light beam and cannot transmit the second incident light beam. Before the device is started, the optical filter 9 is not placed in the light path, so that the first reflected light beam and the third transmitted light beam emitted by the dichroic mirror 8 are incident on the first beam splitter 10 together. The transmittance of the first beam splitter 10 used in the present embodiment is inversely proportional to 1 and can simultaneously act on the wavelength bands of the first incident beam and the second incident beam. The first beam splitter 10 splits the combined beam into a first combined beam and a second combined beam, and the first combined beam is incident on the first photoelectric sensing device 12 through the first convex lens 11. Fig. 3 shows the distance relationship among the first angle adjustment frame 7, the second angle adjustment frame 23, the first convex lens 11, and the first photosensor 12.
The first angle adjustment lens frame 7 and the first photoelectric sensing device 12 form an object image relation with respect to the first convex lens 11, and satisfy an imaging formula:
wherein f is 1 =50mm is the focal length of the first convex lens 11; c =100mm is the distance between the first convex lens 11 and the first photosensor 12; a =50mm is a distance between the first angle adjusting frame 7 and the dichroic mirror 8, and b =50mm is a distance between the dichroic mirror 8 and the first convex lens 11.
The second angle adjustment lens frame 23 and the first photoelectric sensing device 12 form an object image relationship with respect to the first convex lens 11, and satisfy an imaging formula:
where d =20mm is the distance between the second angle adjustment frame 23 and the second beam splitter 24, and e =30mm is the distance between the dichroic mirror 8 and the second beam splitter 24.
The second combined beam light emitted from the first beam splitter 10 is incident on the second photoelectric sensing device 16 through the second convex lens 13, the first adjustable mirror 14 and the first concave lens 15. The distances between the second convex lens 13, the first concave lens 15 and the second photo-sensor device 16 are shown in fig. 4. Equivalent focal length F of combined lens group of second convex lens 13 and first concave lens 15 1 Comprises the following steps:
wherein the second convex lens 13 is selectedLeporibo lens model LBF254-100-A, focal length f 2 =100mm; the first concave lens 15 is a Leporbo type LD2060 lens with a focal length f 3 = -15mm; f =60mm is the distance between the second convex lens 13 and the first adjustable mirror 14, h =28mm is the distance between the first adjustable mirror 14 and the first concave lens 15, and f + h =88mm. The distance g between the first concave lens 15 and the second photoelectric sensing device 16 satisfies that the focal plane of the telephoto type system formed by combining the second convex lens 13 and the first concave lens 15 coincides with the detection plane of the second photoelectric sensing device 16:
the second transmitted light beam with 10% energy of the second incident light beam enters the detection system, for a detection portion of the second incident light beam, the transmittance inverse ratio of the third beam splitter 25 in this embodiment is 1. The distance relationship among the second angle adjustment frame 23, the third convex lens 26, and the third photoelectric sensing device 27 is as shown in fig. 5, and the second angle adjustment frame 23 and the third photoelectric sensing device 27 form an object imaging relationship with respect to the third convex lens 26, which satisfies an imaging formula:
wherein f is 4 =50mm is the focal length of the third convex lens 26, i =70mm is the distance between the second angle adjustment frame 23 and the third beam splitter 25, j =30mm is the distance between the third beam splitter 25 and the third convex lens 26, and k =100mm is the distance between the third convex lens 26 and the third photoelectric sensing device 27.
The fourth detection light is incident on the fourth photoelectric sensing device 31 through the fourth convex lens 28, the second adjustable mirror 29 and the second concave lens 30. The distance relationship among the fourth convex lens 28, the second concave lens 30 and the fourth photo-electric induction device 31 is as followsFIG. 6 shows the equivalent focal length F of the combined lens group of the fourth convex lens 28 and the second concave lens 30 2 Comprises the following steps:
wherein the fourth convex lens 28 is a lens of Sorbon type LBF254-100-A with a focal length f 5 =100mm; the second concave lens 30 is a lens of Sorabo model LD2060 with a focal length f 6 = 15mm; m =60mm is the distance between the fourth convex lens 28 and the second adjustable mirror 29, n =28mm is the distance between the second adjustable mirror 29 and the second concave lens 30, and m + n =88mm. The distance p between the second concave lens 30 and the fourth photoelectric sensing device 31 is such that the focal plane of the telephoto type system formed by combining the fourth convex lens 28 and the second concave lens 30 coincides with the detection plane of the fourth photoelectric sensing device 31:
(2) When the device is opened for operation
(2.1) firstly, the optical filter 9 is placed between the dichroic mirror 8 and the first beam splitter 10, at this time, the first photoelectric sensing device 12 detects the light beam position information of the first incident light beam, the second photoelectric sensing device 16 detects the angle information of the first incident light beam, and the centers of the light beams incident to the first photoelectric sensing device 12 and the second photoelectric sensing device 16 are all located at the center of the detection surface by adjusting the first right-angle reflecting prism 3, the second right-angle reflecting prism 5 and the first angle adjusting mirror bracket 7.
(2.2) the optical filter 9 is then removed by using the electrical means, and the information of the position and angle of the combined beam is detected by the first photoelectric sensing device 12 and the second photoelectric sensing device 16, and the position and angle of the center of the combined beam detected by the first photoelectric sensing device 12 and the second photoelectric sensing device 16 are returned to the center of the detection surface again by adjusting the third right-angle reflecting prism 19, the fourth right-angle reflecting prism 21 and the second angle adjusting mirror frame 23.
In order to ensure that the centers of the outgoing beams of the first and second incoming beams exactly coincide, the alignment position of the incoming beams needs to be corrected, because the beams are shifted in position after passing through the dichroic mirror 8, as shown in fig. 7. When the center positions of the two outgoing light beams coincide, the center positions of the two light beams detected by the first photoelectric sensing device 12 have a deviation in the x direction, so after the above operation, the third right-angle reflecting prism 19 needs to be adjusted to adjust the light beams to a distance of length t along the outgoing direction, where t can be calculated from the geometrical relationship in fig. 7 by using the following formula:
wherein n is 1 And n 2 The refractive indices of the dichroic mirror 8 for the first incident light beam and the second incident light beam, respectively, and s is the film thickness of the dichroic mirror 8. Then the third photo-electric sensing device 27 and the fourth photo-electric sensing device 31 record the position and angle information of the second incident beam at this time, and the position is taken as a stable target position.
(2.3) when the optical filter 9 returns to the optical path, the first photoelectric sensing device 12 and the second photoelectric sensing device 16 only detect the position and angle information of the first incident light beam, and the controller 32 controls the first nanometer displacement table 4, the second nanometer displacement table 6 and the first angle adjusting mirror bracket 7 for correcting the position and angle of the first incident light beam; the third photo-sensor device 27 and the fourth photo-sensor device 31 only detect the position and angle information of the second incident beam, and the controller 32 controls the third nano-displacement stage 20, the fourth nano-displacement stage 22 and the second angle adjustment frame 23 for correcting the position and angle of the second incident beam.
Through the operation, the centers of the two beams of light with different wavelengths are strictly aligned after passing through the device, the position and angle drift of the light beams are corrected, and the position stability is smaller than 1urad and the angle stability is smaller than 1urad.
Claims (10)
1. A device for real-time center alignment and stabilization of double light beams is characterized by comprising a first right-angle reflecting prism (3), a second right-angle reflecting prism (5), a first angle adjusting mirror frame (7), a dichroic mirror (8), a light filter (9), a first beam splitter (10), a first convex lens (11), a first photoelectric sensing device (12), a second convex lens (13), a first adjustable reflecting mirror (14), a first concave lens (15), a second photoelectric sensing device (16), a second adjustable small hole (17), a third right-angle reflecting prism (19), a fourth right-angle reflecting prism (21), a second angle adjusting mirror frame (23), a second beam splitter (24), a third beam splitter (25), a third convex lens (26), a third photoelectric sensing device (27), a fourth convex lens (28), a second adjustable reflecting mirror (29), a second concave lens (30) and a fourth photoelectric sensing device (31);
the first incident beam is reflected by the first right-angle reflecting prism (3), then enters the second right-angle reflecting prism (5), is reflected upwards to the first angle adjusting mirror bracket (7), and then is divided into a first reflected beam and a first transmitted beam by the dichroic mirror (8);
the second incident beam is reflected by the third right-angle reflecting prism (19), then enters the fourth right-angle reflecting prism (21), is reflected upwards to the second angle adjusting mirror bracket (23), and is then divided into a second reflected beam and a second transmitted beam by the second beam splitter (24); the second reflected light beam is divided into a third reflected light beam and a third transmitted light beam through a dichroic mirror (8);
after a first reflected light beam and a third transmitted light beam emitted by the dichroic mirror (8) are combined, the first reflected light beam and the third transmitted light beam are divided into a first combined light beam and a second combined light beam through a first beam splitter (10); the first combined beam light is incident on a first photoelectric sensing device (12) through a first convex lens (11), and the second combined beam light is incident on a second photoelectric sensing device (16) through a second convex lens (13), a first adjustable reflecting mirror (14) and a first concave lens (15) in sequence;
the second transmitted light beam emitted by the second beam splitter (24) is divided into third detection light and fourth detection light through a third beam splitter (25); third detection light is incident on a third photoelectric sensing device (27) through a third convex lens (26), and fourth detection light is incident on a fourth photoelectric sensing device (31) through a fourth convex lens (28), a second adjustable reflecting mirror (29) and a second concave lens (30) in sequence;
then, a light filter (9) is placed between a dichroic mirror (8) and a first beam splitter (10), at the moment, a first photoelectric sensing device (12) detects the light beam position information of a first incident light beam, a second photoelectric sensing device (16) detects the angle information of the first incident light beam, and the centers of light beams incident to the first photoelectric sensing device (12) and the second photoelectric sensing device (16) are all located at the center of a detection surface by adjusting a first right-angle reflecting prism (3), a second right-angle reflecting prism (5) and a first angle adjusting mirror frame (7);
then, the optical filter (9) is moved away by using an electric power device, the first photoelectric sensing device (12) and the second photoelectric sensing device (16) detect the position and angle information of the combined beam, and the position and angle of the center of the combined beam detected by the first photoelectric sensing device (12) and the second photoelectric sensing device (16) are returned to the center of the detection surface again by adjusting the third right-angle reflecting prism (19), the fourth right-angle reflecting prism (21) and the second angle adjusting mirror bracket (23);
when the optical filter (9) returns to the light path, the first photoelectric sensing device (12) and the second photoelectric sensing device (16) only detect the position and angle information of the first incident beam, and the controller (32) controls the first nanometer displacement table (4), the second nanometer displacement table (6) and the first angle adjusting mirror frame (7) to correct the position and angle of the first incident beam; the third photoelectric sensing device (27) and the fourth photoelectric sensing device (31) only detect the position and angle information of the second incident beam, and the controller (32) controls the third nanometer displacement table (20), the fourth nanometer displacement table (22) and the second angle adjusting mirror frame (23) to correct the position and angle of the second incident beam.
2. A dual beam real-time center alignment and stabilization apparatus as claimed in claim 1, wherein the first angle adjustment frame (7) is in object imaging relationship with the first photo-electric sensing device (12) relative to the first convex lens (11); the second angle adjusting mirror frame (23) and the first photoelectric sensing device (12) form an object image relation relative to the first convex lens (11); the second angle adjusting lens frame (23) and the third photoelectric sensing device (27) form an object-imaging relation relative to the third convex lens (26); the second convex lens (13) and the first concave lens (15) form a telephoto system, and the equivalent focal planes of the second convex lens and the first concave lens are located at the same position as the detection plane of the second photoelectric sensing device (16); the fourth convex lens (28) and the second concave lens (30) form a telephoto type system, and the equivalent focal planes of the fourth convex lens and the second concave lens are located at the same position as the detection plane of the fourth photoelectric sensing device (31).
3. The dual-beam real-time center alignment and stabilization device according to claim 2, wherein the distance relationship between the first angle adjustment frame (7), the dichroic mirror (8), the first convex lens (11), the first photoelectric sensor (12), the second angle adjustment frame (23) and the second beam splitter (24) satisfies the following formula:
wherein, f 1 The focal length of a first convex lens (11), a is the distance between a first angle adjusting lens frame (7) and a dichroic mirror (8), b is the distance between the dichroic mirror (8) and the first convex lens (11), c is the distance between the first convex lens (11) and a first photoelectric sensor (12), d is the distance between a second angle adjusting lens frame (23) and a second beam splitter (24), and e is the distance between the dichroic mirror (8) and the second beam splitter (24);
the distance relation among the first concave lens (15), the second angle adjusting lens frame (23), the third beam splitter (25), the third convex lens (26) and the third photoelectric sensing device (27) meets the following formula:
wherein i is the distance between the second angle adjusting mirror frame (23) and the third beam splitter (25), j is the distance between the third beam splitter (25) and the third convex lens (26), k is the distance between the third convex lens (26) and the third photoelectric sensing device (27), and f 4 Is the focal length of the third convex lens (26).
4. A dual-beam real-time center alignment and stabilization apparatus as claimed in claim 3, wherein the distance g between the first concave lens (15) and the second photo-sensitive device (16) satisfies the following equation:
wherein, F 1 Is the equivalent focal length of the combined lens group of the second convex lens (13) and the first concave lens (15), f is the distance between the second convex lens (13) and the first adjustable reflector (14), h is the distance between the first adjustable reflector (14) and the first concave lens (15), f is the equivalent focal length of the combined lens group of the second convex lens (13) and the first concave lens (15) 2 Is the focal length of the second convex lens 13; f. of 3 Is the focal length of the first concave lens (15);
the distance p between the second concave lens (30) and the fourth photoelectric sensing device (31) satisfies the following formula:
wherein, F 2 Is the equivalent focal length of the combined lens group of the fourth convex lens (28) and the second concave lens (30), m is the distance between the fourth convex lens (28) and the second adjustable reflector (29), n is the distance between the second adjustable reflector (29) and the second concave lens (30), f 5 Is the focal length of the fourth convex lens 28; f. of 6 Is the focal length of the second concave lens 30.
5. The dual beam real time center alignment and stabilization device of claim 1, wherein the first incident beam and the second incident beam are incident from an adjustable aperture; the first incident light beam and the second incident light beam are ensured to be vertically incident through the rotating reflector.
6. The dual beam real-time center alignment and stabilization device of claim 1, wherein the dichroic mirror (8) has a transmittance of 90% or more and a reflectance of 5% or more for the first incident beam; the reflectivity of the dichroic mirror (8) to the second incident beam is larger than or equal to 90% and the transmittance is larger than or equal to 5%; the reflectivity of the second beam splitter (24) to the second incident beam is larger than or equal to 90% and the transmittance is larger than or equal to 5%; the transmittance of the optical filter (9) to the first incident beam is more than 99%, and the transmittance to the second incident beam is less than 0.1%; the inverse transmission ratio of the first beam splitter (10) and the third beam splitter (25) to the first incident beam and the second incident beam is 1.
7. The dual-beam real-time center-alignment and stabilization device of claim 1, further comprising a first nano-displacement stage (4), a second nano-displacement stage (6), a third nano-displacement stage (20), a fourth nano-displacement stage (22); the first right-angle reflecting prism (3) is fixed on the first nanometer displacement table (4) and can perform nanometer movement along the x direction of a light beam incidence vertical plane; the second right-angle reflecting prism (5) is fixed on the second nanometer displacement table (6) and can perform nanometer movement along the y direction of a light beam incidence vertical plane; the third right-angle reflecting prism (19) is fixed on a third nano displacement table (20) and can perform nano movement along the x direction of a light beam incidence vertical plane; the fourth right-angle reflecting prism (21) is fixed on a fourth nano displacement table (22) and can perform nano movement along the y direction of a light beam incidence vertical plane.
8. A dual beam real-time center alignment and stabilization apparatus as claimed in claim 1, wherein said first (12), second (16), third (27) and fourth (31) photo-sensing devices are position detectors or four quadrant detectors.
9. A method of dual beam real time center alignment and stabilization, comprising the steps of:
s1, a light filter (9) is placed between a dichroic mirror (8) and a first beam splitter (10), at the moment, a first photoelectric sensing device (12) detects light beam position information of a first incident light beam, a second photoelectric sensing device (16) detects angle information of the first incident light beam, and the centers of light beams incident to the first photoelectric sensing device (12) and the second photoelectric sensing device (16) are all located at the center of a detection surface by adjusting a first right-angle reflecting prism (3), a second right-angle reflecting prism (5) and a first angle adjusting mirror frame (7);
s2, removing the optical filter (9), wherein the first photoelectric sensing device (12) and the second photoelectric sensing device (16) detect the position and angle information of the combined beam, and the position and the angle of the center of the combined beam detected by the first photoelectric sensing device (12) and the second photoelectric sensing device (16) return to the center of the detection surface again by adjusting the third right-angle reflecting prism (19), the fourth right-angle reflecting prism (21) and the second angle adjusting mirror bracket (23); then, a third photoelectric sensing device (27) and a fourth photoelectric sensing device (31) record the position and angle information of the second incident beam at the moment, and the position is taken as a stable target position;
s3, placing the optical filter (9) between the dichroic mirror (8) and the first beam splitter (10) again; the first photoelectric sensing device (12) and the second photoelectric sensing device (16) only detect the position and angle information of the first incident light beam, the positions of the first right-angle reflecting prism (3) and the second right-angle reflecting prism (5) and the angle deflection of the first angle adjusting mirror bracket (7) are adjusted, and the position and angle of the first incident light beam are corrected; the third photoelectric sensing device (27) and the fourth photoelectric sensing device (31) only detect the position and angle information of the second incident light beam, the positions of the third right-angle reflecting prism (19) and the fourth right-angle reflecting prism (21) and the angle deflection of the second angle adjusting mirror bracket (23) are adjusted, and the position and angle of the second incident light beam are corrected.
10. The method for real-time dual-beam center alignment and stabilization as claimed in claim 9, wherein in step S2, since the light beam is shifted in position after passing through the dichroic mirror (8), the alignment position of the incident light beam is corrected to ensure the light beam centers of the first incident light beam and the second incident light beam are exactly coincident; when the central positions of the two emergent lights coincide, the central positions of the first incident light beam and the second incident light beam detected by the first photoelectric sensing device (12) have deviation in the x direction, and a third right-angle reflecting prism (19) needs to be adjusted to enable the second incident light beam to adjust the distance with the length of t along the emergent direction:
wherein n is 1 And n 2 The refractive indexes of the dichroic mirror (8) for the first incident light beam and the second incident light beam are respectively, and s is the film thickness of the dichroic mirror (8).
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