JPH03111731A - Optical system for eccentricity measuring device of lens system - Google Patents

Optical system for eccentricity measuring device of lens system

Info

Publication number
JPH03111731A
JPH03111731A JP24995189A JP24995189A JPH03111731A JP H03111731 A JPH03111731 A JP H03111731A JP 24995189 A JP24995189 A JP 24995189A JP 24995189 A JP24995189 A JP 24995189A JP H03111731 A JPH03111731 A JP H03111731A
Authority
JP
Japan
Prior art keywords
image
reflected
luminous flux
lens
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24995189A
Other languages
Japanese (ja)
Other versions
JPH0739982B2 (en
Inventor
Tomohiro Yonezawa
Toshiro Kikuchi
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP1249951A priority Critical patent/JPH0739982B2/en
Publication of JPH03111731A publication Critical patent/JPH03111731A/en
Publication of JPH0739982B2 publication Critical patent/JPH0739982B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to measure the eccentricity of the surface to be measured of a lens system under measurement by using a reference-axis setting optical system, and reflecting luminous flux for setting the reference axis with a mirror.
CONSTITUTION: The focal distances of measuring collimator lenses 4 and 5 are determined by the focal distance and the measuring range of a measuring collimator lens 6. The image of the luminous flux is formed in a lens system 13 to be measured by adjusting the lenses 5 and 6. The luminous flux is reflected from a surface to be measured, and the image is formed on an image forming plane 7. Part of the luminous flux is refracted in the direction of an optical axis B'. The luminous flux becomes the parallel light by the adjustment of reference-axis setting collimator lenses 10 and 11. The light is reflected from a mirror 12. The reflected light reaches the image forming plane 7 through a beam splitter 8. The reflected image returned from the reference setting optical system is rotated on the image forming plane 7 by rotating an image rotator 9. The coordinates of the center of rotation are obtained and compared with the position of the image reflected from the surface to be measured on the image forming plane 7 by the lenses 4, 5 and 6 on the optical axis B'. Then the amount of eccentricity is obtained based on the difference between both coordinates.
COPYRIGHT: (C)1991,JPO&Japio
JP1249951A 1989-09-26 1989-09-26 Optical system for measuring eccentricity of lens system Expired - Fee Related JPH0739982B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1249951A JPH0739982B2 (en) 1989-09-26 1989-09-26 Optical system for measuring eccentricity of lens system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1249951A JPH0739982B2 (en) 1989-09-26 1989-09-26 Optical system for measuring eccentricity of lens system

Publications (2)

Publication Number Publication Date
JPH03111731A true JPH03111731A (en) 1991-05-13
JPH0739982B2 JPH0739982B2 (en) 1995-05-01

Family

ID=17200609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1249951A Expired - Fee Related JPH0739982B2 (en) 1989-09-26 1989-09-26 Optical system for measuring eccentricity of lens system

Country Status (1)

Country Link
JP (1) JPH0739982B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7511803B2 (en) 2004-05-28 2009-03-31 Canon Kabushiki Kaisha Method for displaying result of measurement of eccentricity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7511803B2 (en) 2004-05-28 2009-03-31 Canon Kabushiki Kaisha Method for displaying result of measurement of eccentricity

Also Published As

Publication number Publication date
JPH0739982B2 (en) 1995-05-01

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