CN109343162A - Laser direct-writing device and its laser direct writing method based on super lens - Google Patents
Laser direct-writing device and its laser direct writing method based on super lens Download PDFInfo
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- CN109343162A CN109343162A CN201811445709.7A CN201811445709A CN109343162A CN 109343162 A CN109343162 A CN 109343162A CN 201811445709 A CN201811445709 A CN 201811445709A CN 109343162 A CN109343162 A CN 109343162A
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- Prior art keywords
- laser direct
- darman raster
- laser
- writing
- parameter
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
Abstract
The present invention relates to a kind of laser direct-writing device and its laser direct writing method based on super lens.Super lens are placed on direct write substrate, the super-resolution imaging for making full use of super lens allows the distance in the lower surface of super lens and its near field range to form high-resolution image, reduces the spot size of focusing, to improve inscription density, the inscription of high dencity grating can be realized.Using Darman raster, can an a plurality of grating grid of direct write, improve the direct write degree of parallelism of laser direct-writing.The present apparatus is suitable for inscribing high density, high-precision large scale diffraction optical element.
Description
Technical field
The present invention relates to laser writing technology, especially a kind of laser direct-writing device and its laser direct-writing based on super lens
Method.
Background technique
Large scale diffraction grating has more and more applications in high power laser light, Chirped Pulse Compression technology, is light
Core key optics device in system and scientific instrument such as large-scale astronomical telescope, inertial confinement fusion Laser Ignition System
Part.Preparation large scale, high-precision, meet the applications such as high power laser light diffraction optics component become now it is urgently to be solved
Problem.Microelectronic processing technique has been achieved for huge progress in the preparation field of diffraction optical element.Laser writing technology
As a kind of emerging technology in microelectronic processing technique, develop receive more and more attention, laser writing technology hair
Exhibition reaches its maturity.Laser writing technology is a kind of inexpensive maskless lithography skill that large area and arbitrary graphic pattern distribution may be implemented
Art.Compared to conventional photographic technology, electron beam lithography, laser writing technology has higher flexibility, price relatively low
A little.And for laser writing technology has a mask lithography technology with respect to other, it is not necessary to which expensive mask plate reduces costs
And loss.
The further development of laser direct-writing device is influenced by inscription speed and precision and constraint.It uses in the prior art
Darman raster improves the degree of parallelism of direct write.But the diffraction limit of conventional lenses and direct write precision are still to be improved.
Summary of the invention
The primary purpose of the present invention is that providing a kind of laser direct-writing device and its laser direct writing method based on super lens.
Based on above-mentioned purpose, the present invention is at least provided the following technical solutions:
Laser direct-writing device based on super lens comprising,
Mobile platform,
Darman raster laser direct-writing optical path and self-focusing optical path, wherein
The Darman raster laser direct-writing optical path includes blue laser light source, and the light beam of blue laser light source output successively passes through
It crosses after Darman raster and extender lens group, grating substrate surface to be inscribed is focused on through super lens；
The self-focusing optical path includes the red laser that wavelength is 640nm, the light beam warp of the red laser output
After polarization splitting prism, grating substrate surface to be inscribed is focused on, by the light beam after the grating substrate reflection wait inscribe
After polarization splitting prism, set of cylindrical lenses, it is transmitted to 4 quadrant detector.
Further, be provided between the blue laser light source and the Darman raster the first collimator and extender mirror and
First aperture, the light beam is by being successively transferred through the first extender lens group, second small after the Darman raster
Hole diaphragm, reflecting mirror, the second extender lens group, two form and aspect mirrors, are transmitted to the super lens after microcobjective later.
Further, further include control system, the control system respectively with high-accuracy turntable, 4 quadrant detector, pressure
Electroceramics and mobile platform connection, the Darman raster is placed on the high-accuracy turntable, the piezoelectric ceramics with it is micro-
Object lens connection, controls the focusing of the microcobjective.
Further, the control system includes Darman raster position adjusting type modules, position of platform adjustment module, self-focusing
Module and light source control module.
Further, the Darman raster position adjusting type modules are used to control the rotation of the high-accuracy turntable, described flat
The precision that platform position adjusting type modules control mobile platform is mobile, and the self-focusing module is used to control pair of the microcobjective
Coke, the light source control module are used to control the power of the light source.
Further, horizontal leveling platform is provided on mobile platform, the grating substrate is placed in the horizontal leveling platform
On.
Further, the Darman raster laser direct-writing optical path is identical as the focal position of the self-focusing optical path.
Further, the super lens are the metallic film with negative permittivity based on surface plasmons.
Laser direct writing method based on super lens comprising following steps,
According to the parameter of grating to be inscribed, the parameter of optical path to be inscribed, required Darman raster is chosen；
According to the duty ratio of grating to be inscribed, the power of blue light exciting light sources is chosen；
The parameter of Darman raster position adjusting type modules, parameter, the ginseng of self-focusing module of position of platform adjustment module are set
Several and light source control module parameter.
Further, the grating parameter to be inscribed includes the period of grating, size；Darman raster position tune
The parameter of mould preparation block includes the angle of Darman raster rotation, and the parameter of the position of platform adjustment module includes the shifting of mobile platform
Dynamic speed.
Compared with prior art, the present invention at least has the following beneficial effects:
(1) Darman raster is combined in Darman raster laser direct-writing optical path of the invention with super lens, utilizes Dammam light
The characteristics of grid beam splitting, parallel direct-writing is realized, using the super-resolution imaging of super lens, reduces focal spot, make Damman raster splitting beam
The multichannel luminous point of generation is reduced simultaneously, optical diffraction limit is breached, so that in the lower surface certain distance of super lens
High-resolution image is formed on grating substrate to be inscribed in range, the super-resolution near field range is realized, improves inscription
Density, and then realize the inscription of large scale, high dencity grating.
(2) present invention setting self-focusing optical path is identical as the focal position of Darman raster laser direct-writing optical path, by adjusting
The focusing of Darman raster laser direct-writing optical path can be realized in the focal position of self-focusing optical path, easy to operate, avoids to direct write
The adjustment of optical path reduces the interference to direct write optical path.And self-focusing optical path, which is arranged, can guarantee during laser direct-writing,
The blue light focus of direct write optical path remains in photoetching glue surface, guarantees the quality of direct write.
Detailed description of the invention
Fig. 1 is the laser direct-writing device schematic diagram the present invention is based on super lens.
The laser beam and the laser beam based on ordinary lens that Fig. 2 is the laser direct-writing device the present invention is based on super lens
Comparison diagram.
Specific embodiment
Below with reference to embodiment and attached drawing, the invention will be further described, but protection model of the invention should not be limited with this
It encloses.
Laser direct-writing device schematic diagram of the invention is as shown in Figure 1, as seen from the figure, laser direct-writing device packet of the invention
It includes, mobile platform 18, Darman raster laser direct-writing optical path, self-focusing optical path and control system.
Horizontal leveling platform 17 is provided on mobile platform 18, grating substrate to be inscribed is placed on horizontal leveling platform 17.
Darman raster is combined with super lens in above-mentioned Darman raster laser direct-writing optical path, utilizes Damman raster splitting beam
Feature realizes parallel direct-writing, using the super-resolution imaging of super lens, breaches optical diffraction limit, improves inscription density,
And then realize the inscription of large scale, high dencity grating.In this embodiment, Darman raster laser direct-writing optical path includes blue laser
Light source 1, in this embodiment, blue light exciting light sources 1 can be 405nm blue laser, the light that blue laser light source 1 exports
Beam reaches Darman raster 4 after collimator and extender mirror 2, through the first aperture 3, and Darman raster 4 is placed in high-accuracy turntable 5
It is interior, successively pass through the first extender lens group 6 by the light beam of Darman raster 4, second orifice diaphragm 7, reflecting mirror 8, second expand
After microscope group 9, two form and aspect mirrors 13, microcobjective 15 is reached, 16 surface of super lens is focused on after microcobjective 15, it is of the invention
Super lens are the metallic film with negative permittivity based on surface plasmons, and grating substrate to be inscribed is set to
Within the scope of super-resolution apart from super lens lower surface certain distance, by excitating surface plasma, realized near field range
Evanescent waves amplification can reduce incident laser facula to compensate decaying caused by evanescent waves transmission, realize to nano object
Super diffraction limit imaging.Focal spot is reduced, the multichannel luminous point of Damman raster splitting beam generation is made while being reduced, to make it
It is capable of forming high-resolution image, improves and inscribes density, realizes the inscription of large scale, high dencity grating.
Self-focusing optical path, including red laser 19, in this embodiment, red laser 19 can be 640nm feux rouges
Laser, the light beam that red laser 19 exports successively after reflecting mirror 20, polarization splitting prism 12, two form and aspect mirrors 13, arrive
Up to microcobjective 15,16 surface of super lens is focused on after microcobjective 15, is irradiated in and is placed on horizontal leveling platform 17
On grating substrate to be inscribed, returned by the laser beam of grating substrate reflection to be inscribed along former transmission optical path, successively by super
Mirror 16, microcobjective 15, two form and aspect mirrors 13 reach polarization splitting prism 12, pass through column by the light beam of polarization splitting prism 12
It is received after face lens group 11 by 4 quadrant detector 10, wherein microcobjective 15 is connect with piezoelectric ceramics 14.
Control system, including Darman raster position adjusting type modules, position of platform adjustment module, self-focusing module and light source
Control module.Wherein blue light exciting light sources 1, high-accuracy turntable 5,4 quadrant detector 10, piezoelectric ceramics 14, accurate movement are flat
Platform 18 is connect with control system respectively.Darman raster position adjusting type modules are used to control the rotation of high-accuracy turntable, to control
The position of Darman raster, position of platform adjust movement of the module for controlled level leveling platform, and self-focusing module is for controlling it
The focusing of fiber object lens, light source control module are used to control the power of blue laser light source.
It is identical as the focal position of Darman raster laser direct-writing optical path that self-focusing optical path is set, by adjusting self-focusing optical path
Focal position can be realized Darman raster laser direct-writing optical path to focusing, it is easy to operate, avoid the tune to direct write optical path
It is whole, reduce the interference to direct write optical path.It is easy to operate to realize.And be arranged self-focusing optical path can guarantee it is straight in laser
During writing, the blue light focus of direct write optical path is remained in photoetching glue surface, guarantees the quality of direct write.
Corresponding to the laser direct-writing device of the invention based on super lens, the invention also discloses a kind of based on super lens
Laser direct writing method, the laser direct writing method are suitable for above-mentioned laser direct-writing device, this method comprises:
According to grating parameter to be inscribed, optical path parameter to be inscribed, required Darman raster is chosen；According to grating to be inscribed
Duty ratio chooses the power of blue light exciting light sources；Parameter, the position of platform adjustment mould of Darman raster position adjusting type modules are set
Parameter, the parameter of self-focusing module and the parameter of light source control module of block.
Wherein, grating parameter to be inscribed includes the period of grating, size.The ginseng of Darman raster position adjusting type modules
Number includes the angle of Darman raster rotation.The parameter of position of platform adjustment module includes the moving parameter of mobile platform.Mobile ginseng
Number includes the mobile speed of platform, motor pattern.
The present invention utilizes the characteristics of Damman raster splitting beam, in conjunction with the super-resolution imaging of super lens, realizes parallel direct-writing light
Grid, and optical diffraction limit is breached, so that forming height in the substrate surface being located within the scope of the certain distance of super lens lower surface
The image of resolution realizes the inscription of large scale, high dencity grating to improve inscription density.
Fig. 2 is the laser beam of laser direct-writing device of the present invention and the comparison diagram of the laser beam based on ordinary lens.By
This based on super lens and the laser beam comparison diagram based on ordinary lens it is found that by super lens effect, evanescent wave is super
Amplified in mirror, coupled surface plasmons will generate again oscillation and enhancement effect in its lower surface, so that in lower surface
And its distance near field range can form high-resolution image.The halfwidth of laser beam is obtained compared to ordinary lens into one
Walk constriction.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (10)
1. the laser direct-writing device based on super lens comprising,
Mobile platform (18),
Darman raster laser direct-writing optical path and self-focusing optical path, wherein
The Darman raster laser direct-writing optical path includes blue laser light source (1), and the light beam of blue laser light source (1) output is successive
After Darman raster (4) and extender lens group (6), grating substrate surface to be inscribed is focused on through super lens (16)；
The self-focusing optical path includes the red laser (19) that wavelength is 640nm, the light of red laser (19) output
Beam focuses on grating substrate surface to be inscribed after polarization splitting prism (12), by the grating substrate reflection to be inscribed
Light beam afterwards is transmitted to 4 quadrant detector (10) after polarization splitting prism (12), set of cylindrical lenses (11).
2. the laser direct-writing device according to claim 1, which is characterized in that the blue laser light source (1) with it is described
It is provided with the first collimator and extender mirror (2) and the first aperture (3) between Darman raster (4), the light beam is described in the process
The first extender lens group (6), second orifice diaphragm (7), reflecting mirror (8), the second expansion are successively transferred through after Darman raster (4)
Beam lens group (9), two form and aspect mirrors (13), are transmitted to after microcobjective (15) super lens (16) later.
3. laser direct-writing device according to claim 1 or 2, which is characterized in that it further include control system, the control system
System is connect with high-accuracy turntable (5), 4 quadrant detector (10), piezoelectric ceramics (14) and mobile platform (18) respectively, described
Darman raster (4) is placed on the high-accuracy turntable (5), and the piezoelectric ceramics (14) connect with microcobjective (15), control
The focusing of the microcobjective (15).
4. the laser direct-writing device according to claim 3, which is characterized in that the control system includes Darman raster position
Adjust module, position of platform adjustment module, self-focusing module and light source control module.
5. the laser direct-writing device according to claim 4, which is characterized in that the Darman raster position adjusting type modules are used for
The rotation of the high-accuracy turntable (5) is controlled, the precision of position of platform adjustment module control mobile platform (18) is mobile, institute
It states self-focusing module and is used to control the function of the light source for controlling the focusing of the microcobjective, the light source control module
Rate.
6. the laser direct-writing device according to claim 1, which is characterized in that mobile platform is provided with horizontal leveling on (18)
Platform (17), the grating substrate are placed on horizontal leveling platform (17).
7. laser direct-writing device according to claim 1 or 2, which is characterized in that the Darman raster laser direct-writing optical path
It is identical as the focal position of the self-focusing optical path.
8. the laser direct-writing device according to claim 7, which is characterized in that the super lens are to be swashed based on surface plasma
The metallic film with negative permittivity of member.
9. the laser direct writing method based on super lens comprising following steps,
According to the parameter of grating to be inscribed, the parameter of optical path to be inscribed, required Darman raster is chosen；
According to the duty ratio of grating to be inscribed, the power of blue light exciting light sources is chosen；
Be arranged the parameter, the position of platform adjustment parameter of module, the parameter of self-focusing module of Darman raster position adjusting type modules with
And the parameter of light source control module.
10. the laser direct writing method according to claim 9, which is characterized in that the grating parameter to be inscribed includes grating
Period, size；The parameter of the Darman raster position adjusting type modules includes the angle of Darman raster rotation, the platform
The parameter of position adjusting type modules includes the movement speed of mobile platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811445709.7A CN109343162A (en) | 2018-11-29 | 2018-11-29 | Laser direct-writing device and its laser direct writing method based on super lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811445709.7A CN109343162A (en) | 2018-11-29 | 2018-11-29 | Laser direct-writing device and its laser direct writing method based on super lens |
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| CN109343162A true CN109343162A (en) | 2019-02-15 |
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| CN201811445709.7A Pending CN109343162A (en) | 2018-11-29 | 2018-11-29 | Laser direct-writing device and its laser direct writing method based on super lens |
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Cited By (3)
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| CN110727042A (en) * | 2019-09-30 | 2020-01-24 | 江苏大学 | Device and method for preparing grating by ultrafast laser direct writing |
| CN111185678A (en) * | 2020-02-07 | 2020-05-22 | 吉林大学 | Method for preparing hollow structure on surface and inside of transparent material |
| CN112987511A (en) * | 2021-03-09 | 2021-06-18 | 暨南大学 | Laser parallel direct writing device and method based on super lens array |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110727042A (en) * | 2019-09-30 | 2020-01-24 | 江苏大学 | Device and method for preparing grating by ultrafast laser direct writing |
| CN111185678A (en) * | 2020-02-07 | 2020-05-22 | 吉林大学 | Method for preparing hollow structure on surface and inside of transparent material |
| CN111185678B (en) * | 2020-02-07 | 2021-07-27 | 吉林大学 | Method for preparing hollow structure on surface and inside of transparent material |
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Application publication date: 20190215 |