CN105136059A - Three-dimensional measuring system capable of reducing light reflection on surface of measured object - Google Patents
Three-dimensional measuring system capable of reducing light reflection on surface of measured object Download PDFInfo
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- CN105136059A CN105136059A CN201510275597.5A CN201510275597A CN105136059A CN 105136059 A CN105136059 A CN 105136059A CN 201510275597 A CN201510275597 A CN 201510275597A CN 105136059 A CN105136059 A CN 105136059A
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Abstract
The invention relates to a tree-dimensional measuring system capable of reducing light reflection on the surface of a measured object. The system comprises an image analysis and control system, a projector, and a camera. The image analysis and control system is used to make the projector produce structured light. The projector is used to project the structured light from a first direction to the surface of a measured object so as to form a deformed structured light pattern on the surface of the measured object. The image analysis and control system is further used to acquire the deformed structured light pattern from a second direction through the camera and analyze the deformed structured light pattern in order to acquire depth information of the surface of the measured object. The system is characterized in that the projector includes a first circular polarizer; structured light passes through the first circular polarizer to form circularly-polarized structured light which is projected to the surface of a measured object; a second circular polarizer is mounted at the front end of the lens of the camera; the second circular polarizer is used to eliminate the non-circularly-polarized light portion in the light entering the camera; and the first circular polarizer and the second circular polarizer are left-handed circular polarizers or right-handed circular polarizers.
Description
Technical field
The present invention relates to body surface three-dimensional field of measuring technique, particularly relate to a kind of three-dimension measuring system reducing measured object surface reflection.
Background technology
In three-dimensional measurement occasion, be all a difficult problem to the measurement of light or high reflecting surface.Along with the development of microfabrication and encapsulation technology, in Surface testing and quality control, industrial needs more and more carries out micron order measurement to three-dimensional information, particularly before and after surface mount, carry out three-dimensional micrometering amount before and after integrated antenna package etc.The three-dimensional micrometering amount of micron order is the enhancing to two-dimensional measurement.But, no matter say precision or from economy, still lack micron order three-dimensional measurement.In fact, bright or high reflective object defines challenge to measuring process.
In optical measurement process, structured light projection is on body surface, and reflected light is obtained by imaging equipment, and the depth information in photographed object region can obtain by trigonometric calculations.But measure light or reflective object, present optical measurement is difficult to achieve the goal.Light object can reflect most of light and enter in camera, and camera sensor is operated in hypersaturated state.Like this, information just cannot accurately be calculated, and the existing structural light measurement elevation information method based on brightness just dying.For addressing this problem, usually treating measured surface in advance and spraying the thin opaque paint of one deck.But because painting process may produce the uneven situation of spraying, in high-precision measurement occasion, even if painting thickness only has 1-2 micron, this way also can introduce obviously impact to measurement result.And in most occasion, be do not allow at measured object surface lacquer, on-line checkingi occasion is more impossible.This makes three-dimensional measurement inapplicable when measured object reflective for height, but because the pin, pad, integrated circuit gold thread etc. of electron device are metals, a large amount of high reflective measured object but needs three-dimensional measurement.
Summary of the invention
Technical matters to be solved by this invention is, proposes a kind of three-dimension measuring system reducing measured object surface reflection, to reduce the reflective of high reflective measured object surface in measuring process.The present invention is achieved in that
Reduce a three-dimension measuring system for measured object surface reflection, comprise graphical analysis and control system, projector and camera;
Described graphical analysis and control system produce structured light for controlling described projector;
Described projector is used for from first direction described project structured light is surperficial to measured object, forms distressed structure light pattern on measured object surface;
Described graphical analysis and control system also for gathering described distressed structure light pattern by described camera from second direction, and are analyzed described distressed structure light pattern, to obtain the depth information on measured object surface; Described projector comprises the first circuit polarizer; Described structured light is projected onto measured object surface after forming circularly polarized structured light by described first circuit polarizer;
The camera lens front end of described camera is provided with the second circuit polarizer; Described second circuit polarizer is for eliminating the not rounded polarized light component in the light entering described camera;
Described first circuit polarizer and the second circuit polarizer are all Left-hand circular polarization device or right-hand circular polarization device.
Further, described first circuit polarizer comprises First Line polaroid and quarter-wave plate;
Described structured light is successively by forming circularly polarized structured light after described First Line polaroid and quarter-wave plate.
Further, described first direction becomes 30 degree of angles with described second direction.
Further, described structured light is phase-shifted digital striped light or Moire fringe light.
Further, described projector is LCOS projector or DLP projector.
Further, described LCOS projector comprises LED light source, optical lens group, the second linear polarizer, LCOS, condenser;
Described LED light source produces white light;
Described white light is by forming surface light source after described optical lens group;
Described area source is by projecting on described LCOS after described second linear polarizer;
Described LCOS reflects described area source under the control of described graphical analysis and control system, forms described structured light;
Described structured light forms circularly polarized structured light by described first circuit polarizer;
Described circularly polarized structured light is by being projected onto measured object surface after described condenser optically focused.
Further, the camera lens of described camera is telecentric lens.
Further, described graphical analysis and control system comprise computer system.
Further, described second circuit polarizer is a circular polarizing disk.
Further, described projector is connected with described camera, also for by while described project structured light to measured object surface, triggers described camera synchronization expose described measured object surface by synchronizing signal, to gather described distressed structure light pattern.
Compared with prior art, the present invention, by employing first circuit polarizer and the second circuit polarizer, significantly can reduce the too much reflective of measured object surface, make the sensor entering camera be in linear condition all the time, do not produce supersaturation.Like this, even if measured object surface has high reflective, the height value of the measured object surface each point calculated by the image of collected by camera is also accurately.The present invention can be widely used in the three-dimensional measurement with high reflective measured object.
Accompanying drawing explanation
Fig. 1: the present invention can reduce the reflective three-dimension measuring system principle of work schematic diagram of tested object height;
Fig. 2: the described principle of work schematic diagram reducing projector in the reflective three-dimension measuring system of tested object height;
Fig. 3: when adopting of the present invention, the measured object surface image captured by camera;
Fig. 4: when not adopting of the present invention, the measured object surface image captured by camera.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.
As shown in Figure 1, a kind of three-dimension measuring system reducing measured object surface reflection of the present invention, comprises graphical analysis and control system 3, projector 1 and camera 2.Described graphical analysis and control system 3 control described projector 1 and produce structured light 5, and described structured light 5 is projected measured object 4 surface from first direction by described projector 1.After structured light 5 projects measured object 4 surface, due to being uneven of measured object 4 surface, structured light 5 by measured object 4 surface modulation, will form distressed structure light pattern on measured object 4 surface.Described graphical analysis and control system 3 gather this distressed structure light pattern by described camera 2 from second direction, and analyze this distressed structure light pattern, thus obtain the depth information on measured object 4 surface.
The present invention totally adopts inclined-plane to project, and the optical texture of front shooting, first direction and second direction can become 30 degree of angles.As measured object 4 is lain against on a surface level, then camera 2 is arranged on through this measured object 4 geometric center and takes measured object 4 perpendicular on the straight line of this surface level, and projector 1 is then arranged on through this measured object 4 geometric center and becomes on the straight line at 30 degree of angles with this straight line.
Graphical analysis and control system 3 can adopt computer system, determine that projector 1 generates the structured light 5 of which kind of form by computer system, and the structured light information that will generate sends to projector 1, and control projector 1 generating structure light 5, as phase-shifted digital striped light or Moire fringe light.Distressed structure light pattern to be analyzed thus the depth information obtaining measured object 4 surface belongs to the routine techniques in three-dimensional measurement and 3 Dimension Image Technique field, do not repeat them here.Graphical analysis and control system 3 can adopt cloud data structure to analyze distressed structure light pattern, to calculate the elevation information of the surperficial each point of measured object 4.
Projector 1 comprises the first circuit polarizer.The structured light 5 that projector 1 produces, by the first circuit polarizer, forms circularly polarized structured light 5, is then projected onto measured object 4 surface.Projector 1 can be LCOS104 projector 1 or DLP projector 1.Figure 2 shows that the concrete structure figure of a LCOS104 projector 1, the first circuit polarizer wherein comprises First Line polaroid 105 and quarter-wave plate 106, and structured light 5 is successively by forming circularly polarized structured light 5 after First Line polaroid 105 and quarter-wave plate 106.This LCOS104 projector 1 also comprises LED light source 101, optical lens group 102, second linear polarizer 103, LCOS104, condenser 107 etc.Described LED light source 101 is for generation of white light.Because LED light source 101 is generally pointolite, its white light produced is generally divergence form, and the white light produced by increasing an optical lens group 102 pairs of LED light sources 101 carries out shaping, makes white light by forming surface light source after this optical lens group 102.The area source formed, by after polaroid, produces the area source of polarization, and is projected onto on LCOS104.LCOS104 can reflect this plane of polarization light source under the control of described graphical analysis and control system 3, forms structured light 5.According to aforementioned, the structured light 5 needing to produce is determined by graphical analysis and control system 3, LCOS104 can receive structured light 5 information that will generate with graphical analysis and control system 3, and control switch and the luminous intensity of its inner each pixel reflector according to this structured light 5 information, to form this structured light 5.This structured light 5 forms circularly polarized structured light 5 by the first circuit polarizer, and the circularly polarized structured light 5 of formation is by being projected onto measured object 4 surface after condenser 107 optically focused.First circuit polarizer of this LCOS104 projector 1 comprises First Line polaroid 105 and quarter-wave plate 106, and structured light 5 is successively by forming circularly polarized structured light 5 after First Line polaroid 105 and quarter-wave plate 106.
The camera lens front end of camera 2 is provided with the second circuit polarizer.Second circuit polarizer can eliminate the not rounded polarized light component in the light entering camera 2.Second circuit polarizer can be a circular polarizing disk or other may structure.It is noted that the first circuit polarizer needs identical with the second circuit polarizer type, be all Left-hand circular polarization device or right-hand circular polarization device.The camera lens of camera 2 is telecentric lens 201.Described projector 1 also can be connected with described camera 2, while described structured light 5 is projected measured object 4 surface, triggers described camera 2 synchronously expose described measured object 4 surface, to gather described distressed structure light pattern by synchronizing signal.
By adopting the first circuit polarizer and the second circuit polarizer, significantly can reduce the too much reflective of measured object 4 surface, making the sensor entering camera 2 be in linear condition all the time, not producing supersaturation.Like this, even if measured object 4 surface has high reflective, the height value of the surperficial each point of measured object 4 that the image gathered by camera 2 is calculated also is accurately.Fig. 3 and Fig. 4 is respectively measured object 4 surface image when adopting the present invention and do not adopt of the present invention captured by camera 2.Significantly can find out that from Fig. 3 and Fig. 4 measured object 4 surface reflection that camera 2 when not adopting of the present invention is taken is serious, and reflective being effectively suppressed on measured object 4 surface that camera 2 is taken when adopting of the present invention.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a three-dimension measuring system for measured object surface reflection be can reduce, graphical analysis and control system, projector and camera comprised;
Described graphical analysis and control system produce structured light for controlling described projector;
Described projector is used for from first direction described project structured light is surperficial to measured object, forms distressed structure light pattern on measured object surface;
Described graphical analysis and control system also for gathering described distressed structure light pattern by described camera from second direction, and are analyzed described distressed structure light pattern, to obtain the depth information on measured object surface; It is characterized in that, described projector comprises the first circuit polarizer; Described structured light is projected onto measured object surface after forming circularly polarized structured light by described first circuit polarizer;
The camera lens front end of described camera is provided with the second circuit polarizer; Described second circuit polarizer is for eliminating the not rounded polarized light component in the light entering described camera;
Described first circuit polarizer and the second circuit polarizer are all Left-hand circular polarization device or right-hand circular polarization device.
2. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 1, it is characterized in that, described first circuit polarizer comprises First Line polaroid and quarter-wave plate;
Described structured light is successively by forming circularly polarized structured light after described First Line polaroid and quarter-wave plate.
3. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 1, it is characterized in that, described first direction becomes 30 degree of angles with described second direction.
4. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 1, it is characterized in that, described structured light is phase-shifted digital striped light or Moire fringe light.
5. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 1, it is characterized in that, described projector is LCOS projector or DLP projector.
6. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 5, it is characterized in that, described LCOS projector comprises LED light source, optical lens group, the second linear polarizer, LCOS, condenser;
Described LED light source produces white light;
Described white light is by forming surface light source after described optical lens group;
Described area source is by projecting on described LCOS after described second linear polarizer;
Described LCOS reflects described area source under the control of described graphical analysis and control system, forms described structured light;
Described structured light forms circularly polarized structured light by described first circuit polarizer;
Described circularly polarized structured light is by being projected onto measured object surface after described condenser optically focused.
7. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 1, it is characterized in that, the camera lens of described camera is telecentric lens.
8. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 1, it is characterized in that, described graphical analysis and control system comprise computer system.
9. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 1, it is characterized in that, described second circuit polarizer is a circular polarizing disk.
10. can reduce the three-dimension measuring system of measured object surface reflection as claimed in claim 1, it is characterized in that, described projector is connected with described camera, also for by while described project structured light to measured object surface, trigger described camera synchronization by synchronizing signal to expose described measured object surface, to gather described distressed structure light pattern.
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| CN108519064A (en) * | 2018-04-20 | 2018-09-11 | 天津工业大学 | A kind of reflective suppressing method applied to multi-frequency three-dimensional measurement |
| CN110672624A (en) * | 2019-10-22 | 2020-01-10 | 北京领邦智能装备股份公司 | Workpiece side imaging system, defect detection system and workpiece side imaging method |
| CN110720897A (en) * | 2018-07-16 | 2020-01-24 | 大立光电股份有限公司 | Optical pulse wave image measuring instrument and pulse wave measuring method |
| CN113237436A (en) * | 2021-04-07 | 2021-08-10 | 上海大学 | Device and method for measuring shape of polarized light space phase shift non-Lambertian metal object |
| CN114485415A (en) * | 2021-12-27 | 2022-05-13 | 中国水产科学研究院黄海水产研究所 | Benthic fish growth phenotype efficient measurement method and device |
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| CN113237436B (en) * | 2021-04-07 | 2022-08-02 | 上海大学 | Device and method for measuring shape of polarized light space phase shift non-Lambertian metal object |
| CN114485415A (en) * | 2021-12-27 | 2022-05-13 | 中国水产科学研究院黄海水产研究所 | Benthic fish growth phenotype efficient measurement method and device |
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Application publication date: 20151209 |