CN104296660A - Microcosmic smooth free-form surface sample measurement device and method based on structured light method - Google Patents

Abstract

The invention relates to a microcosmic smooth free-form surface sample measurement device and method based on a structured light method and belongs to the field of optical micro-imaging. The device comprises a laser light source, a collimating lens, a sinusoidal grating, a lens, a first tube lens, a dichroscope, an objective lens, a sample, an optical filter, a second tube lens, a refrigerating CCD and an objective table. Parallel light emitted by the laser through the collimating lens passes through the one-dimensional sinusoidal grating so that modulated fringes can be obtained, the fringes reach the smooth free-form surface sample with the coated surface through the dichroscope, the tube lenses and the objective lens; signals emitted from the surface of the sample pass through the optical filter and are collected by the refrigerating CCD; for each measured plane, the sinusoidal grating is transversely moved three times, after one plane is detected, the objective table moves in the axial direction, and the CCD is made to take photos and perform acquisition for the next time; finally, two-dimensional data obtained in each axial position are subjected to demodulation operation. When microcosmic smooth free-form surfaces are measured with the device and method, the surface topography of samples with large included angles between the normals and the axial direction can be measured.

Description

The smooth free form surface sample measuring device of microcosmic of structure based light method and method

Technical field

The smooth free form surface sample measuring device of microcosmic of structure based light method and method belong to optical microphotograph imaging field.

Background technology

For smooth free form surface surface sample, with normal and the large region of axial angle, because illumination cannot be collected because of mirror-reflection completely to the light of sample surfaces, or almost cannot be collected, so its surface topography cannot high-acruracy survey, even cannot measure.At present, the high-acruracy survey that a kind of optical measurement aspect realizes such sample is badly in need of.Regrettably technology is not had to realize this goal at present.

Summary of the invention

In order to solve the problem, the invention discloses a kind of smooth free form surface sample measuring device of microcosmic and method of structure based light method, solving free form surface sample surface morphology high-acruracy survey problem.

The object of the present invention is achieved like this:

The smooth free form surface sample measuring device of microcosmic of structure based light method, comprising:

Lighting device and imaging device;

Described lighting device is followed successively by according to light transmition direction: the LASER Light Source matched with sample surfaces plated film fluorescent material wavelength, collimating mirror, sinusoidal grating, lens, the first pipe mirror, dichroic mirror, object lens, sample and objective table;

Described imaging device is followed successively by according to light transmition direction: object lens, dichroic mirror, optical filter, the second pipe mirror and refrigeration CCD;

Lighting device and imaging device share object lens and dichroic mirror;

Sinusoidal grating, sample and refrigeration CCD conjugation between two.

The smooth free form surface sample measuring device of microcosmic of above-mentioned structure based light method, described plated film fluorescent material thickness is less than 1 μm, and excitation wavelength range is 200-1200nm, and luminous power is less than 1W, and plated film material has soluble in water or organic solvent.

The smooth free form surface sample measuring device of microcosmic of above-mentioned structure based light method, the scope in sinusoidal grating cycle is 50 μm-70 μm.

The smooth free form surface sample measuring device of microcosmic of above-mentioned structure based light method, dichroic mirror is greater than 50% to LASER Light Source outgoing light reflectance, is greater than 50% to the transmissivity of fluorescent material radiant light, is less than 50% to the transmissivity of LASER Light Source emergent light.

The smooth free form surface sample measuring device of microcosmic of above-mentioned structure based light method, the transmissivity of optical filter to LASER Light Source emergent light be less than ten thousand/, be greater than 50% to the transmissivity of fluorescent material radiant light, optical density (OD) is at more than OD4.

The microcosmic smooth free form surface sample measuring method of the structure based light method that the microcosmic smooth free form surface sample measuring device of above-mentioned structure based light method realizes, comprises the following steps:

The first step, by sample surfaces plated film, described plated film fluorescent material thickness is less than 1 μm, and excitation wavelength range is 200-1200nm, and luminous power is less than 1W, makes variable k equal 0, arranges axial total measurement range b;

Second step, makes objective table moveable part move a small step-length a along optical axis, makes variable r equal 1;

3rd step, gathers with refrigeration CCD the image I that size is p × q _ir;

4th step, moved for 1/3 cycle by sinusoidal grating along the direction perpendicular to optical axis;

5th step, makes variable r add 1, judges whether r is less than 4, if "Yes", enters second step, if "No", enter next step;

6th step, calculates $I_{\mathrm{ip}}=\frac{\sqrt{2}}{3}[{(I_{i2}-I_{i1})}^2+{(I_{i3}-I_{i1})}^2+{(I_{i3}-I_{i2})}^2{]}^{1/2};$

7th step, adds 1 by k, judges whether k × a is more than or equal to b, if "No", repetition second step, to the 6th step, if "Yes", enters next step, makes N=k, so obtains N layer data I1 _p,i _2pi _np;

8th step, obtains I by all axial locations _1p, I _2pi _npbe arranged in three-dimensional matrice, the row and column of the row and column correspondence image of order matrix, the number of plies of the number of pages correspondence image of matrix;

9th step, by capable for the m of gained three-dimensional matrice, all page datas of n row extract, and obtain the row vector of a 1 × N, record the number of plies c corresponding to peak point of this row vector;

Tenth step, the corresponding number of plies c utilizing p × q pixel to obtain and step-length a, tries to achieve all p × q some counter sample surface topography.

The microcosmic smooth free form surface sample measuring method of above-mentioned structure based light method, also comprises the 11 step, washes the fluorescent film of sample surfaces.

Beneficial effect:

Because the present invention compares with existing micrometering technology, first at sample surfaces plated film fluorescent material, make its stimulated radiation luminous, then on this basis, disclose a kind of microcosmic smooth free form surface sample measuring method, this technological improvement, makes the present invention can measure normal and the large sample surface morphology of axial angle.

Accompanying drawing explanation

Fig. 1 is the structural representation of the smooth free form surface sample measuring device of microcosmic that the present invention is based on method of structured light.

In figure: 1 LASER Light Source, 2 collimating mirrors, 3 sinusoidal gratings, 4 lens, 5 first pipe mirrors, 6 dichroic mirrors, 7 object lens, 8 samples, 9 optical filters, 10 second pipe mirrors, 11 refrigeration CCD, 12 objective tables.

Embodiment

Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.

Specific embodiment one

The present embodiment is device embodiment.

The smooth free form surface sample measuring device of microcosmic of the structure based light method of the present embodiment, structural representation as shown in Figure 1.This device comprises:

Lighting device and imaging device;

Described lighting device is followed successively by according to light transmition direction: the LASER Light Source 1 matched with sample surfaces plated film fluorescent material wavelength, collimating mirror 2, sinusoidal grating 3, lens 4, first pipe mirror 5, dichroic mirror 6, object lens 7, sample 8 and objective table 12;

Described imaging device is followed successively by according to light transmition direction: object lens 7, dichroic mirror 6, optical filter 9, second pipe mirror 10 and refrigeration CCD11;

Lighting device and imaging device share object lens 7 and dichroic mirror 6;

Sinusoidal grating 3, sample 8 and refrigeration CCD11 conjugation between two.

The smooth free form surface sample measuring device of microcosmic of above-mentioned structure based light method, described plated film fluorescent material thickness is less than 1 μm, and excitation wavelength range is 200-1200nm, and luminous power is less than 1W, and plated film material has soluble in water or organic solvent.Wherein, excitation wavelength is within the scope of 200-1200nm, and luminous power is less than the damage that 1W can avoid sample surfaces fluorescent film effectively.Confirm through experiment, excitation wavelength is when being less than 200nm, and fluorescent film is significantly increased by the probability bleached, and excitation wavelength is when being greater than 1200nm, and the probability of fluorescent film cancellation significantly increases.Luminous power is when being greater than 1W, and the probability of fluorescent film cancellation significantly increases.Plated film material has characteristic that is soluble in water or organic solvent, and film can be washed, and recovers the original pattern of sample, simultaneously coating process not lesioned sample surface.

The smooth free form surface sample measuring device of microcosmic of above-mentioned structure based light method, the scope in sinusoidal grating 3 cycle is 50 μm-70 μm.In typical measuring arrangements, the periodic regime of sinusoidal grating 3 is larger, be 20 μm-100 μm, but, confirm through experiment, after sample surfaces generates fluorescent media film, there is stricter requirement in the cycle of offset of sinusoidal grating 3, when the cycle of sinusoidal grating 3 is only between 50 μm-70 μm, just can obtain higher axial measurement resolution, and in other scope, azimuthal resolution all can reduce.

The smooth free form surface sample measuring device of microcosmic of above-mentioned structure based light method, dichroic mirror 6 pairs of LASER Light Source 1 outgoing light reflectance are greater than 50%, 50% is greater than to the transmissivity of fluorescent material radiant light, 50% is less than to the transmissivity of LASER Light Source 1 emergent light.This parameter designing, not only can make more excitation light to sample surfaces, avoid energy loss, and can collect more natively relatively faint flashlight, increases signal to noise ratio (S/N ratio) simultaneously.

The smooth free form surface sample measuring device of microcosmic of above-mentioned structure based light method, the transmissivity of optical filter 9 pairs of LASER Light Source 1 emergent lights is less than ten thousand/, be greater than 50% to the transmissivity of fluorescent material radiant light, optical density (OD) is at more than OD4.

This parameter designing, not only can make more excitation light to sample surfaces, avoid energy loss, and can collect more natively relatively faint flashlight, increases signal to noise ratio (S/N ratio) simultaneously.

Specific embodiment two

The embodiment of the method for the present embodiment for realizing on device described in specific embodiment one.

The microcosmic smooth free form surface sample measuring method of the structure based light method of the present embodiment, comprises the following steps:

The first step, by sample surfaces plated film, described plated film fluorescent material thickness is less than 1 μm, and excitation wavelength range is 200-1200nm, and luminous power is less than 1W, makes variable k equal 0, arranges axial total measurement range b;

Second step, makes objective table 12 moveable part move a small step-length a along optical axis, makes variable r equal 1;

3rd step, gathers with refrigeration CCD11 the image I that size is p × q _ir;

4th step, moved for 1/3 cycle by sinusoidal grating along the direction perpendicular to optical axis;

5th step, makes variable r add 1, judges whether r is less than 4, if "Yes", enters second step, if "No", enter next step;

6th step, calculates $I_{\mathrm{ip}}=\frac{\sqrt{2}}{3}[{(I_{i2}-I_{i1})}^2+{(I_{i3}-I_{i1})}^2+{(I_{i3}-I_{i2})}^2{]}^{1/2};$

7th step, adds 1 by k, judges whether k × a is more than or equal to b, if "No", repetition second step, to the 6th step, if "Yes", enters next step, makes N=k, so obtains N layer data I _1p, I _2pi _np;

8th step, obtains I by all axial locations _1p, I _2pi _npbe arranged in three-dimensional matrice, the row and column of the row and column correspondence image of order matrix, the number of plies of the number of pages correspondence image of matrix;

9th step, by capable for the m of gained three-dimensional matrice, all page datas of n row extract, and obtain the row vector of a 1 × N, record the number of plies c corresponding to peak point of this row vector;

Tenth step, the corresponding number of plies c utilizing p × q pixel to obtain and step-length a, tries to achieve all p × q some counter sample surface topography.

Specific embodiment three

The present embodiment is embodiment of the method.

The present embodiment is on the basis of specific embodiment two, increases by the 11 step, washes the fluorescent film of sample surfaces.This step, can realize the recovery to sample surface morphology.

The present invention is not limited to above-mentioned preferred forms, and anyone should learn the structure change or method improvement made under enlightenment of the present invention, and every have identical or close technical scheme with the present invention, all falls within protection scope of the present invention.

Claims (7)

1. the smooth free form surface sample measuring device of the microcosmic of structure based light method, is characterized in that, comprising:

Lighting device and imaging device;

Described lighting device is followed successively by according to light transmition direction: the LASER Light Source (1) matched with sample surfaces plated film fluorescent material wavelength, collimating mirror (2), sinusoidal grating (3), lens (4), the first pipe mirror (5), dichroic mirror (6), object lens (7), sample (8) and objective table (12);

Described imaging device is followed successively by according to light transmition direction: object lens (7), dichroic mirror (6), optical filter (9), the second pipe mirror (10) and refrigeration CCD (11);

Lighting device and imaging device share object lens (7) and dichroic mirror (6);

Sinusoidal grating (3), sample (8) and refrigeration CCD (11) conjugation between two.

2. the smooth free form surface sample measuring device of microcosmic of structure based light method according to claim 1, it is characterized in that, described plated film fluorescent material thickness is less than 1 μm, and excitation wavelength range is 200-1200nm, luminous power is less than 1W, the water-soluble or organic solvent of plated film material.

3. the smooth free form surface sample measuring device of microcosmic of structure based light method according to claim 1, is characterized in that, the scope in sinusoidal grating (3) cycle is 50 μm-70 μm.

4. the smooth free form surface sample measuring device of microcosmic of structure based light method according to claim 1, it is characterized in that, dichroic mirror (6) is greater than 50% to LASER Light Source (1) outgoing light reflectance, 50% is greater than to the transmissivity of fluorescent material radiant light, 50% is less than to the transmissivity of LASER Light Source (1) emergent light.

5. the smooth free form surface sample measuring device of microcosmic of structure based light method according to claim 1, it is characterized in that, the transmissivity of optical filter (9) to LASER Light Source (1) emergent light be less than ten thousand/, be greater than 50% to the transmissivity of fluorescent material radiant light, optical density (OD) is at more than OD4.

6. the microcosmic smooth free form surface sample measuring method of the structure based light method realized on the microcosmic smooth free form surface sample measuring device of structure based light method according to claim 1, is characterized in that, comprise the following steps:

The first step, by sample surfaces plated film, described plated film fluorescent material thickness is less than 1 μm, and excitation wavelength range is 200-1200nm, and luminous power is less than 1W, makes variable k equal 0, arranges axial total measurement range b;

Second step, makes objective table (12) moveable part move a small step-length a along optical axis, makes variable r equal 1;

3rd step, gathers by refrigeration CCD (11) the image I that size is p × q _ir;

4th step, moved for 1/3 cycle by sinusoidal grating along the direction perpendicular to optical axis;

5th step, makes variable r add 1, judges whether r is less than 4, if "Yes", enters second step, if "No", enter next step;

6th step, calculates $I_{\mathrm{ip}}=\frac{\sqrt{2}}{3}{[{(I_{i2}-I_{i1})}^2+{(I_{i3}-I_{i1})}^2+{(I_{i3}-I_{i2})}^2]}^{1/2};$

7th step, adds 1 by k, judges whether k × a is more than or equal to b, if "No", repetition second step, to the 6th step, if "Yes", enters next step, makes N=k, so obtains N layer data I _1p, I _2pi _np;

8th step, obtains I by all axial locations _1p, I _2pi _npbe arranged in three-dimensional matrice, the row and column of the row and column correspondence image of order matrix, the number of plies of the number of pages correspondence image of matrix;

9th step, by capable for the m of gained three-dimensional matrice, all page datas of n row extract, and obtain the row vector of a 1 × N, record the number of plies c corresponding to peak point of this row vector;

Tenth step, the corresponding number of plies c utilizing p × q pixel to obtain and step-length a, tries to achieve all p × q some counter sample surface topography.

7. the microcosmic smooth free form surface sample measuring method of structure based light method according to claim 6, is characterized in that, also comprise the 11 step, wash the fluorescent film of sample surfaces.