CN105137609A - Lamination imaging technology based on pre-lighting imaging - Google Patents
Lamination imaging technology based on pre-lighting imaging Download PDFInfo
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- CN105137609A CN105137609A CN201510651865.9A CN201510651865A CN105137609A CN 105137609 A CN105137609 A CN 105137609A CN 201510651865 A CN201510651865 A CN 201510651865A CN 105137609 A CN105137609 A CN 105137609A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B41/00—Special techniques not covered by groups G03B31/00 - G03B39/00; Apparatus therefor
Abstract
The invention discloses lamination imaging technology for carrying out lamination reconstruction constraint through pre-lighting imaging. The lamination imaging technology is characterized by, obtaining a formed image of a periphery image of a sample to be tested through pre-lighting as a known condition for lamination recovery; then, obtaining diffraction images of the sample to be tested and the periphery image through lamination scanning, and simultaneously substituting the diffraction images and pre-lighting images into a lamination iterative algorithm based on the pre-lighting imaging designed in the invention for processing; and finally, carrying out reconstruction to obtain a complex amplitude image of the sample to be tested. Constraint is carried out on lamination recovery through the pre-lighting imaging mode, so that recovery quality of the sample to be tested on the aspect of complex amplitude, especially on the aspect of phase, can be improved greatly, and experiment operation is simple; and compared with the conventional lamination imaging technology, the lamination imaging technology in the invention can obtain a better recovery result without extra cost. Meanwhile, the technology has obvious improvement on resistance to noise and aperture position offset.
Description
Technical field
The present invention relates to a kind of lamination imaging technique based on pre-illuminating imager, belong to lamination technical field of imaging.Be specifically related to a kind of by illumination acquisition testing sample and around image imaging in advance, extract the known conditions that around sample, image recovers as lamination, the scanning of recycling lamination obtains the diffraction image of the testing sample of image around band, and the two is brought into jointly in the lamination iterative algorithm based on pre-illuminating imager, final recovery obtains the method for sample complex amplitude image.
Background technology
Lamination diffraction imaging is a kind of imaging technique not needing lens, by the diffraction pattern information of overlapping collection redundancy, can recover the complex amplitude information of sample well, have important application in fields such as X ray, visible domain, electron microscopics.
Scanning coherent diffraction imaging method based on lamination imaging (Ptychography) principle is proposed in 20 century 70s first by Hoppe, see (ActaCrystallogr:A25,495,1969).The Basic practice of lamination imaging technique is the relative position changing sample or probe, incident plane wave is made to be irradiated to the different parts of sample, and ensure that adjacent twice illuminated portion has the overlapping of certain area, the relation of constraint is mutually there is between such diffraction pattern, by the common solution of all diffraction patterns, the final complex amplitude information rebuilding sample.Lamination imaging technique, compared to conventional diffractive imaging technique, has experimental provision relatively simple, recovers the advantages such as fast convergence rate.Simultaneously, lamination imaging technique eliminates the ambiguity between correct solution and complex conjugate, and lens aberration can be overcome to a certain extent the interference of precision and numerical aperture are recovered to the restriction of sample size, see (PhysLett.4795:85,2004) to imaging.
But traditional lamination imaging technique, still has the following disadvantages except above-mentioned advantageous characteristic:
1. in practical operation, between the position of illuminating bundle and theoretical position, there is certain deviation, affect Recovery image quality.
2. experiment is comparatively large by the interference of random noise and system noise, and Recovery image effect still has very large room for promotion.
3. the restriction of Experimental Establishment condition is larger.Reconstructed image quality is better, and Experimental Establishment demand is more accurate.
Summary of the invention
The present invention solves above-mentioned deficiency of the prior art by providing a kind of method of illuminating imager in advance.The present invention proposes a kind of lamination imaging technique based on pre-illuminating imager, compared to traditional lamination imaging technique, can obtain more accurate recovery effects, simultaneously noise resisting ability, and anti-aperture excursion capability all has remarkable lifting.
The present invention realizes by following technical measures:
1. first irradiate testing sample and peripheral part acquisition imaging thereof with laser by imaging len.Wherein, testing sample peripheral part imaging is called pre-illumination image, pre-illumination image information is known.
2. ensure testing sample invariant position, make laser be undertaken expanding and collimate acquisition incident plane wave by spatial filter and collimation lens successively.Then utilize aperture diaphragm as probe, plane wave is radiated in testing sample plane by probe.
3., along the two-dimentional machinery translation stage of x-axis and y-axis direction moving belt probe, lamination scanning testing sample and around pre-field of illumination successively, utilize imageing sensor to receive and record the diffracted intensity image of each scanning position.
4. the pre-illumination information of imaging in extraction step 1, and in this, as benchmark image, processes in the lamination iterative algorithm being simultaneously brought into based on pre-illuminating imager with the diffraction image of sample.Because the information of pre-illumination section is known, can in this, as the constraint of testing sample image reconstruction, the final complex amplitude image obtaining testing sample.
Lamination imaging technique based on pre-illumination disclosed in this invention, is applicable to the imaging of reflection-type object or transmission-type object.
Above-mentioned lamination scanning process, moves a certain distance the different parts making incident plane wave be irradiated to sample by testing sample or probe, and when ensureing adjacent twice translation, illuminated portion has the overlapping of certain area.In addition, when lamination scans, in the overlapping rate of guarantee and should recover while efficiency, the pre-illumination information around as far as possible many collected specimens, and promote the precision of lamination imaging in this, as the constraint condition of Iterative restoration.
The present invention's imaging algorithm used is the iterative reconstruction algorithm of the lamination scanning based on pre-illumination, and its specific implementation process is:
(1) doing initial guess to sample is on computers O (x, y).Using illumination information imaging pre-around sample as known conditions, substitute in initial pictures, initial pictures becomes O
in(x, y).(time initial, i=1 is iterations, and n=1 is first probe).
(2) object is by illuminator probe P
nbe transferred on CCD face after (x, y) illumination:
ψ
in(ξ，η)＝FrT
λ，d[P
n(x，y)·O
in(x，y)](1)
(3) by the light distribution photographed by CCD
be brought in Iterative restoration process as constraint condition:
(4) 2 formulas are returned object plane against diffraction:
Wherein FrT
1for the operational symbol of inverse Fresnel transform.
(5) initial sample conjecture O is then upgraded
in(x, y), more new formula is:
O
in(x，y)＝O
in(x，y)+U[O
in(x，y)-P
n(x，y)·O
in(x，y)](4)
Wherein U is for upgrading coefficient:
Wherein P
n, max(x, y) represents P
nthe maximal value of (x, y) modulus value, δ is noise compressibility factor, and its value is the constant close to 0, is usually set to 0.01.
(6), after completing this renewal rewards theory, substitute into known pre-illumination information and again upgrade.And move to next illuminator probe P
n(x, y) (n=n+1), recurring formula (2)-(5) are a lighting position to the last.
(7) continue to carry out above iterative process, i.e. k=k+1, until the value of k reaches the threshold value of setting, k=100 can export reconstructed results preferably under normal circumstances.
Compared with prior art, the present invention has following advantage:
1. the present invention to adopt around sample become pre-illumination image as benchmark, compared to traditional lamination imaging technique, retrain owing to utilizing pre-illumination gained information around, the recovery effects of amplitude and phase place all there is lifting, especially in phase place, promote Be very effective, and the image detail recovered is abundanter.
2. the present invention utilizes pre-illuminating imager as benchmark, and when there is experiment condition restriction, compared to traditional lamination imaging technique, its noise resisting ability and anti-aperture location excursion capability all have certain lifting.
3. the present invention utilizes pre-illumination gained information to retrain in an experiment, comparing traditional lamination imaging technique, can obtain better experimental result when not needing additional experiments cost, and simple to operate.
Technology implementation process of the present invention and recovery effects can describe in detail in conjunction with the following drawings.
Accompanying drawing explanation
Fig. 1 a be in the present invention transmission-type based on the light channel structure figure of the exemplary embodiment of the lamination formation method of pre-illuminating imager.
Fig. 1 b is the imaging optical path structural drawing of the present invention's testing sample in the lamination imaging experiment of transmission-type based on pre-illuminating imager.
Fig. 2 is that the precision experiment light path of example laboratory of the present invention builds figure.
Amplitude image picture formed by the testing sample that Fig. 3 uses for example laboratory of the present invention.
Fig. 4 a is the lamination scanning schematic diagram in this example laboratory.
Fig. 4 b is the diffraction image that example laboratory middle probe of the present invention obtains at diverse location scanning testing sample.
Fig. 4 c is the diffraction image that in example of the present invention, on f hole site, probe alignment testing sample collects.
Fig. 5 a is the amplitude image picture adopting traditional lamination imaging technique to recover to obtain testing sample.
Fig. 5 b is the phase image adopting traditional lamination imaging technique to recover to obtain testing sample.
Fig. 6 a is the amplitude image picture adopting the lamination imaging technique based on pre-illuminating imager to recover to obtain testing sample.
Fig. 6 b is the phase image adopting the lamination imaging technique based on pre-illuminating imager to recover to obtain testing sample.
Wherein, 1, helium-neon laser, 2, spatial filter, 3, collimation lens, 4, aperture diaphragm, 5, two-dimentional machinery translate stage, 6, testing sample, 7, CCD image sensor, 8, computing machine, 9, imaging len, 10, attenuator.
Embodiment
Be described further the present invention below in conjunction with accompanying drawing and example, illustrated example clearly shows the present invention for more complete, and non-invention only can be applied in this example, and the present invention can be applied to multiple form of implementation.
Fig. 1 a is that the present invention is at the light channel structure figure of transmission-type based on the exemplary embodiment of the lamination formation method of pre-illuminating imager.This structure comprises: 1, helium-neon laser, and 2, spatial filter, 3, collimation lens, 4, aperture diaphragm, 5, two-dimentional machinery translate stage, 6, testing sample, 7, CCD image sensor, 8, computing machine.
Fig. 1 b is the imaging optical path structural drawing of the present invention's testing sample in the lamination imaging experiment of transmission-type based on pre-illuminating imager.This structure comprises: 1, helium-neon laser, and 2, spatial filter, 3, collimation lens, 6, testing sample, 7, CCD image sensor, 8, computing machine, 9, imaging len.
The present invention includes following steps: first throw light in advance with helium-neon laser, utilize imaging len to obtain pre-illumination image imaging around testing sample.Wherein, pre-illumination image information is known.Then ensure testing sample invariant position, make laser be undertaken expanding and collimate acquisition incident plane wave by spatial filter and collimation lens successively.Utilize aperture diaphragm as probe subsequently, laser is radiated on testing sample by probe.The mechanical translation platform of moving belt probe, lamination scanning testing sample and around pre-field of illumination successively, utilize imageing sensor to receive and record the diffracted intensity image of each scanning position.Last using the pre-illumination image gathered as benchmark image, be brought into the diffraction image of testing sample simultaneously and process based in the lamination iterative algorithm thrown light in advance.Because the information of pre-illumination section is known, the Iterative restoration of testing sample can be retrained with this, the final complex amplitude image obtaining testing sample.Wherein, aperture diaphragm is d to the distance of testing sample, and testing sample is D to the distance of imageing sensor.Add phase-shift phase with mechanically moving translation stage in experiment, utilize imageing sensor to complete the data acquisition of lamination scanning, utilize computing machine to carry out image record and process.
Fig. 2 is that the precision experiment light path of example laboratory of the present invention builds figure.Wherein, 1 is helium-neon laser, and 2 is spatial filter, and 3 is collimation lens, and 4 is aperture diaphragm, and 5 is two-dimentional machinery translate stage, and 6 is testing sample, and 7 is CCD image sensor, and 10 is attenuator.
The amplitude image picture that the testing sample that Fig. 3 uses for example laboratory of the present invention is.In this example, testing sample selects axis transecting patient tissue sample, and around sample, pre-illumination section is transparent glass sheet.Testing sample and around image imaging are irradiated imaging len by laser and are obtained, and the information of the transparent image around testing sample is Given information.
Fig. 4 a is the lamination scanning schematic diagram in this example laboratory.Have 3 × 3 totally 9 scanning positions in experiment, particular location is P
i(i=1,2 ..., 9).Fig. 4 b is the diffraction image that example laboratory middle probe of the present invention obtains at diverse location scanning testing sample, and the diffraction image that each station acquisition arrives is (a) ~ (i).
In example laboratory, choosing illuminator probe diameter is 6mm, and each displacement of adjacent apertures is 1mm, and overlapping rate is 0.833.Red He-Ne Lasers wavelength X is 632.8nm, distance d between aperture diaphragm and testing sample is 28.84mm, distance D between testing sample and imageing sensor is 91.66mm, the CCD that reception diffraction image uses is collsnapEZ type, single pixel size of imageing sensor is 6.45 μm, and CCD window size is 1392 × 1040 pixels.
For checking is based on the validity of the lamination imaging technique of pre-illuminating imager, respectively lamination scan image in example brought into traditional lamination iterative algorithm and recover to obtain reconstructed results based on the lamination iterative algorithm of pre-illuminating imager, wherein iterations is 20 times.
Fig. 4 c is the diffraction image that in example of the present invention, on f hole site, probe alignment testing sample collects.Because experiment mesoporous diaphragm is for connecing rotund positive odd plots of land that can be cultivated type, all there is diffraction in the marginal position of every bar rib, so to there is deviation in shape on time.In addition in this experiment, testing sample is a wedge, and light beam can be reflected by sample wedge, and distortion appears in the hot spot causing CCD to collect, and also can aim at aperture and have an impact.Therefore inevitably there is certain position skew in this example in implementation process.
Fig. 5 a and Fig. 5 b is respectively the amplitude image picture and the phase image that adopt traditional lamination imaging technique to recover to obtain testing sample.
Comparison diagram 5a and Fig. 6 a can find out, exist aperture skew and system noise and random noise time, it is high that the amplitude image ratio adopting the lamination imaging technique based on pre-illuminating imager to recover to obtain testing sample adopts traditional lamination imaging technique to recover to obtain the Quality of recovery of the amplitude image picture of testing sample, and the stem arteries and veins recovered in the plant tissue adopting the method for the present invention's proposition to recover is more obvious, sample one-piece construction is more clear, and the details recovered is abundanter.
To sum up, in amplitude, adopt the recovery effects based on the lamination imaging technique of pre-illuminating imager will significantly better than the restoration result of traditional lamination imaging, and the offset resistance upper performance of noise immunity and anti-aperture all have lifting.
Fig. 6 a and Fig. 6 b is respectively the amplitude image picture and the phase image that adopt the lamination imaging technique based on pre-illuminating imager to recover to obtain testing sample.
Comparison diagram 5b and Fig. 6 b can find out, when there is aperture skew and system noise and random noise, the phase image adopting the lamination imaging technique based on pre-illuminating imager to recover to obtain testing sample is higher than adopting traditional lamination imaging technique to recover to obtain the Quality of recovery of the phase image of testing sample.In addition the whole structure that the method adopting the present invention to propose recovers is more accurate, and the contrast of black and white part is more obvious, can see plant tissue stem arteries and veins lines clearly, and the details recovered is abundanter.
To sum up, in phase place, adopt the lamination imaging technique based on pre-illuminating imager will significantly better than the restoration result of traditional lamination imaging, and the offset resistance upper performance of noise immunity and anti-aperture all have lifting.
Claims (6)
1. one kind obtains image imaging around testing sample by the mode of throwing light in advance, and in this, as the known conditions that lamination recovers, then lamination is utilized to scan the diffraction image obtaining testing sample and peripheral part thereof, according to the lamination iterative algorithm based on pre-illuminating imager, final recovery obtains the technology of sample complex amplitude image.Its imaging process is mainly:
The first step, irradiates testing sample and peripheral part acquisition imaging thereof with laser by imaging len.Wherein, imaging around testing sample is called pre-illumination image, pre-illumination image information is known.
Second step, ensures testing sample invariant position, makes laser be undertaken expanding and collimate acquisition incident plane wave by spatial filter and collimation lens successively.Then utilize aperture diaphragm as probe, plane wave is radiated in testing sample plane by probe.
3rd step, along the two-dimentional machinery translation stage of x-axis and y-axis direction moving belt probe, lamination scanning testing sample and around pre-field of illumination successively, utilize imageing sensor to receive and record the diffracted intensity image of each scanning position.
4th step, extracts the pre-illumination information in first step imaging, and in this, as benchmark image, processes in the lamination iterative algorithm being simultaneously brought into based on pre-illuminating imager with the diffraction image of sample.Because the information of pre-illumination section is known, can in this, as the constraint of testing sample image reconstruction, the final complex amplitude image obtaining testing sample.
2. as in claim 1 the benchmark image that uses, it is characterized in that, utilize pre-illuminating bundle and imaging len to obtain testing sample and certain area-graph is as imaging around, wherein around sample, image information is known.When using the lamination iterative algorithm designed by the present invention to carry out Postprocessing technique, benchmark image, as supporting condition, retrains the Iterative restoration of testing sample with this.
3. as in claim 1,2 the pre-illuminating bundle that uses, it is characterized in that, the coherent lights such as laser can be selected to irradiate, the incoherent lights such as LED also can be selected to irradiate, and when selecting incoherent light to irradiate, coherent noise and speckle noise can be avoided.
4. as in claim 1 the lamination scanning technique that uses, it is characterized in that, testing sample or probe are moved a certain distance the different parts making incident plane wave be irradiated to sample, and illuminated portion has the overlapping of certain area when ensureing adjacent twice translation, the image section around scanning samples of should trying one's best when each scanning.
5. as in claim 1,4 the lamination recovery technology based on pre-illumination that uses, it is characterized in that, the lamination imaging based on pre-illumination for transmission-type and reflection-type is all applicable, all belongs to protection scope of the present invention.
6. as in claim 1,4,5 the lamination recovery technology based on pre-illumination that uses, it is characterized in that, utilize constraint condition when image imaging is recovered as lamination around testing sample, compare traditional lamination imaging technique, when not needing additional experiments cost, the recovery effects of amplitude and phase place all there is lifting, and more image details can be recovered, this external noise immunity and anti-aperture location is offset resistance is above all significantly increased.
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Cited By (9)
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| CN105629695A (en) * | 2016-01-13 | 2016-06-01 | 河北工程大学 | Phase lamination diffraction based holographic imaging method |
| CN105717070A (en) * | 2016-02-05 | 2016-06-29 | 中国科学院西安光学精密机械研究所 | Incoherent laminated diffraction imaging system and imaging method achieving simultaneous multi-wavelength illumination |
| CN106679586A (en) * | 2016-11-23 | 2017-05-17 | 南京理工大学 | ePIE phase recovery algorithm based on entrance pupil scanning modulation |
| CN107421638A (en) * | 2017-08-25 | 2017-12-01 | 西京学院 | A kind of new optical diffraction analogy method and its device |
| CN107622933A (en) * | 2016-07-13 | 2018-01-23 | Fei 公司 | Method using lamination Imaging to imaging samples |
| CN107655405A (en) * | 2017-08-29 | 2018-02-02 | 南京理工大学 | The method that axial range error between object and CCD is eliminated using self-focusing iterative algorithm |
| CN109785266A (en) * | 2019-01-17 | 2019-05-21 | 哈尔滨工业大学 | Single-shot lamination phase recuperation technique based on spatial light modulator |
| CN110360924A (en) * | 2019-07-22 | 2019-10-22 | 中国科学院大学 | A kind of laminated micro imaging method of double wave and system |
| CN117031768A (en) * | 2023-08-18 | 2023-11-10 | 江苏金视传奇科技有限公司 | Single exposure color lens-free imaging method and system |
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| CN105629695A (en) * | 2016-01-13 | 2016-06-01 | 河北工程大学 | Phase lamination diffraction based holographic imaging method |
| CN105629695B (en) * | 2016-01-13 | 2019-01-18 | 河北工程大学 | A kind of holographic imaging method based on phase stacking diffraction |
| CN105717070B (en) * | 2016-02-05 | 2019-04-02 | 中国科学院西安光学精密机械研究所 | The incoherent lamination diffraction imaging method that multi-wavelength illuminates simultaneously |
| CN105717070A (en) * | 2016-02-05 | 2016-06-29 | 中国科学院西安光学精密机械研究所 | Incoherent laminated diffraction imaging system and imaging method achieving simultaneous multi-wavelength illumination |
| CN107622933A (en) * | 2016-07-13 | 2018-01-23 | Fei 公司 | Method using lamination Imaging to imaging samples |
| CN107622933B (en) * | 2016-07-13 | 2020-05-19 | Fei 公司 | Method of imaging a sample using stack imaging |
| CN106679586A (en) * | 2016-11-23 | 2017-05-17 | 南京理工大学 | ePIE phase recovery algorithm based on entrance pupil scanning modulation |
| CN107421638A (en) * | 2017-08-25 | 2017-12-01 | 西京学院 | A kind of new optical diffraction analogy method and its device |
| CN107421638B (en) * | 2017-08-25 | 2019-09-06 | 西京学院 | A kind of optical diffraction analogy method and its device |
| CN107655405B (en) * | 2017-08-29 | 2020-01-24 | 南京理工大学 | Method for eliminating axial distance error between object and CCD by using self-focusing iterative algorithm |
| CN107655405A (en) * | 2017-08-29 | 2018-02-02 | 南京理工大学 | The method that axial range error between object and CCD is eliminated using self-focusing iterative algorithm |
| CN109785266A (en) * | 2019-01-17 | 2019-05-21 | 哈尔滨工业大学 | Single-shot lamination phase recuperation technique based on spatial light modulator |
| CN110360924A (en) * | 2019-07-22 | 2019-10-22 | 中国科学院大学 | A kind of laminated micro imaging method of double wave and system |
| CN117031768A (en) * | 2023-08-18 | 2023-11-10 | 江苏金视传奇科技有限公司 | Single exposure color lens-free imaging method and system |
| CN117031768B (en) * | 2023-08-18 | 2024-01-30 | 江苏金视传奇科技有限公司 | Single exposure color lens-free imaging method and system |
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Application publication date: 20151209 |
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| WD01 | Invention patent application deemed withdrawn after publication |