CN104501739A - Multimode interference confocal microscope system - Google Patents
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- CN104501739A CN104501739A CN201410778274.3A CN201410778274A CN104501739A CN 104501739 A CN104501739 A CN 104501739A CN 201410778274 A CN201410778274 A CN 201410778274A CN 104501739 A CN104501739 A CN 104501739A
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Abstract
The invention provides a multimode interference confocal microscope system, which is characterized by comprising three light sources, a color-separation light combiner, a collimated light uniformer, a total-reflection prism, a spatial light modulator, a controller, a beam splitting prism, an objective lens, a cylinder lens, an imaging detector and a phase shifter, wherein the three light sources are composed of a red light source, a green light source and a blue light source; the color-separation light combiner is used for combining light, emitted by the light sources, into one beam; the collimated light uniformer is used for refracting the light, emitted by the color-separation light combiner, into collimated and uniform light; the total-reflection prism is used for enabling the light to be emitted in a predetermined direction; the spatial light modulator is used for performing the specific illumination light field modulation on the light; the controller is used for respectively controlling all the light sources and the spatial light modulator; the beam splitting prism is used for enabling the light to be emitted in the vertical direction; the objective leans is used for irradiating the light on the surface of a to-be-detected object and collecting the reflective light on the surface of the to-be-detected object; the cylinder lens is used for enabling the light to converge in the focal point of the cylinder lens through refraction; the imaging detector is used for forming a surface image of the to-be-detected object from the light converged by the cylinder lens; the phase shifter is connected with the objective lens, and is used for moving the position of the objective lens, wherein the objective lens is any one of a Mirau interference objective lens and a bright-field microobjective lens.
Description
Technical field
The present invention relates to precision three-dimensional survey field, be specifically related to one and can realize multi-mode switching, there is the adaptive interference confocal microscopic system of good measurement.
Background technology
Along with the development of Micrometer-Nanometer Processing Technology is progressively abundant and meticulous, microcircuit, micro optical element, micromechanics and other various microstructure constantly occur, make the demand measuring Microstructures Topography urgent all the more.The complex three-dimensional structure that micro-structure surface is made up of microscopic structural units, its measurement generally all needs by direct or indirectly micro-amplification, and require higher lateral resolution and longitudinal frame.Meanwhile, different from measurement smooth surface, measure roughness or flaw that micro-structure surface not only wants measured surface, also want the profile of measured surface, form variations and position deviation.
Interfering microscopy to be the product that Through Optical Interference Spectra combines with microscopic system, by increasing micro-amplification vision system on interferometer, improve the lateral resolution of interferogram, the 3 d surface topography enabling to realize microstructure is measured.Along with the development of computer technology, modern control technology and image processing techniques, microscopy is interfered to occur that measuring accuracy reaches monochromatic light phase-shifting interferometry (PSI) and the white light vertical scanning interferometric method (VSI) of Nano grade.Compared with other surface topography measuring method, microscopy is interfered to have quick, non-contacting advantage, and body structure surface topography measurement under vacuum, pressure, heating environment can have been coordinated with environment loading system, be thus widely applied on the body structure surface topography measurement of microelectronics, MEMS (micro electro mechanical system) and Micro-Opto-Electro-Mechanical Systems.
Monochromatic light phase-shifting interferometry (PSI) is a kind of Method for Phase Difference Measurement of interfering based on monochromatic light, is extracted the elevation information of sample surfaces by the interferometric phase Ф of Measurement and analysis interferogram.PSI method generally uses micro positioner such as piezoelectric ceramics (PZT) etc., produces the movement of interferogram phase place Ф, utilizes the light intensity value of the phase shifting interference of more than three width to ask for the height value of sample surfaces.Monochromatic light interference fringe also exists periodically, if the height of adjacent two points is more than 1/4 wavelength, namely interferometric phase value is more than π, and so some interferogram light intensity values just may correspond to different retardation values.Therefore, PSI method can not exceed the ledge structure of this monochromatic light 1/4 wavelength by measuring height.
White light vertical scanning interferometric method (VSI) is a kind of vertical scanning measuring method based on white light interference, extracts sample surfaces elevation information by Measurement and analysis interferogram zero optical path difference position.Because white light is wideband light source, therefore white light interference figure is the superposition of the different wave length interference of light.Because white light coherence distance is short, interferogram some characteristic parameter such as light intensity, contrast when zero optical path difference position can reach maximal value, therefore VSI method is by accurate traverse measurement plane M, scanning measured surface obtains the interferogram of a series of differing heights value, then the vertical zero optical path difference position that white light interference Processing Algorithm extracts measured surface each point is applied, and then the three-dimensional appearance of reduction measured surface.Compared with PSI method, VSI method overcomes bench height and measures limited shortcoming, but its measuring accuracy is lower than PSI method at present.
Confocal microscope technology is the sectioning image by obtaining sample surfaces differing heights place, then calculates the position of each width sectioning image light intensity peak, obtains the three-dimensional surface shape of measured object.In confocal microscope system, pointolite, measured object surface and detector before aperture three between be mutual conjugation.Make confocal microscope by the whole imaging of point on whole measured object surface, then the image of whole plane can be obtained through image co-registration process by scanning mechanism; Or structured light can be used to reach surface imaging, and the imaging of ratio of precision point is slightly poor, but speed is a lot of soon.Three-dimensional confocal image not only has the lateral resolution higher than simple microscope, and more outstanding advantage is that it has the resolution characteristic of the axial details of very strong object, is especially relatively applicable to the measurement on rough samples surface.
But due to the diversity on testee surface, the algorithm of the required application of sample of different surface roughness level or bench height is different, and any one algorithm can not adapt to any situation instantly.So need the three-dimensional micrometering system that can there is multiple metering system, like this, no matter how the characteristic of measured object can apply applicable algorithm obtain surface topography simultaneously.
Summary of the invention
The present invention be directed to that the problems referred to above carry out, object is to provide a kind of multimodal interference confocal microscopic system, can need to switch the surface of measurement pattern to measured object be applicable to measure according to the measurement of measured object.
The present invention for achieving the above object, have employed following technical scheme:
The invention provides a kind of multimodal interference confocal microscopic system, it is characterized in that, comprising: three light sources, are respectively red-light source, green-light source and blue light source; Color separation splicer, the light sent by light source is combined as a branch of, is made up of the reflective mirror of an anti-green glow of saturating ruddiness mutually arranged in a crossed manner and the reflective mirror of an anti-blue light of saturating ruddiness; Collimation light uniforming device, the anaclasis sent by color separation splicer is the uniform light of collimation; Total reflection prism, makes light penetrate towards predetermined direction by reflecting and reflecting; Spatial light modulator, receive the light that sends of total reflection prism and specifically to throw light on light field modulation to light, the light through the modulation of illumination light field penetrates through after total reflection prism; Controller, controls the unlatching of each light source respectively, and controls the modulation of spatial light modulator selection specific illumination light field; Amici prism, receives the light through penetrating after total reflection prism, and light is penetrated towards vertical direction; Object lens, receive the light from Amici prism injection and this light are radiated at measured object surface, collecting the reflected light on measured object surface, reflected light is oppositely penetrated, through Amici prism; Cylinder mirror, receives the light through Amici prism, and makes light converge at the focus of a mirror by refraction; Imaging detector, is positioned at the focus place of a mirror, and the light converged by cylinder mirror forms the surface image of measured object; And phase shifter, be connected with object lens, for the position of mobile object lens, wherein, object lens are any one in Mirau interference objective and light field microcobjective,
When using monochromatic light mode of operation, controller controls an arbitrary light source luminescent in red-light source, green-light source and blue light source, other two light sources are not luminous, with Time Controller, spatial light modulator are set to full-gear as catoptron, and object lens are Mirau interference objectives;
When using white light scanning to interfere mode of operation, it is simultaneously luminous that controller controls three light sources, and after color separation splicer, export white light, spatial light modulator is set to full-gear as catoptron simultaneously, object lens are Mirau interference objectives;
When using monochromatic light confocal measurement mode of operation, controller controls any one light source luminescent in red-light source, green-light source and blue light source, other two light sources are not luminous, the pixel status simultaneously controlling spatial light modulator is any one in the square wave at black and white interval and sine streak, make the light injecting spatial light modulator be modulated into structured light, object lens are light field microcobjectives.
The effect of invention and effect
According to multimodal interference confocal microscopic system involved in the present invention, because it is luminous to control single light source by controller, and to control spatial light modulator be full-gear, as catoptron, and adopt Mirau interference objective as object lens, detector can be made to receive interference light, obtain the interference image of measured object under monochromatic light exposure, three light sources are controlled simultaneously luminous by controller, by exporting white light after color separation splicer, and to control spatial light modulator be full-gear, as catoptron, and adopt Mirau interference objective as object lens, detector can be made to receive interference light, obtain measured object interference image under white light illumination, single source is controlled luminous by controller, and control square wave that spatial light modulator is black and white interval or sine streak and phase-shift phase needed for producing, and adopt light field microcobjective as object lens, obtain the slice map of measured object at object lens focal plane place, then phase shifter is adopted to control the position of focal plane of light field microcobjective, the surface topography of measured object is obtained by the slice map at measured object differing heights place, therefore this multimodal interference confocal microscopic system can switch between multiple measurement pattern, characteristic sum according to measured object surface measures needs, select applicable measurement pattern and algorithm, thus there is good measurement adaptability.
Accompanying drawing explanation
Fig. 1 is the structural representation of multimodal interference confocal microscopic system in embodiment.
Embodiment
Below in conjunction with accompanying drawing, multimodal interference confocal microscopic system involved in the present invention is elaborated.
Fig. 1 is the structural representation of multimodal interference confocal microscopic system in embodiment.
As shown in Figure 1, multimodal interference confocal microscopic system 10 comprises light source 11, light source 12, light source 13, color separation splicer 14, collimation light uniforming device 15, total reflection prism 16, spatial light modulator 17, controller 18, Amici prism 19, object lens 20, cylinder mirror 21, imaging detector 22 and phase shifter 23.
Light source 11, light source 12 and light source 13 are red-light source 11, green-light source 12 and blue light source 13 respectively, can send monochromatic light respectively.
Color separation splicer 14 by the reflective mirror of an anti-green glow of saturating ruddiness and the reflective mirror of an anti-blue light of saturating ruddiness mutually arranged in a crossed manner and formed, what three light sources can be sent photosyntheticly becomes a branch of.
Collimation light uniforming device 15 is the uniform light of collimation for the anaclasis sent by color separation splicer 14.
Total reflection prism 16 makes light penetrate towards predetermined direction by reflecting and reflecting.
Spatial light modulator 17 receives the light that total reflection prism 16 sends, and specifically to throw light on light field modulation to light, the light after modulation passes perpendicularly through injection after total reflection prism 16.
Controller 18 is connected with light source 11, light source 12 and light source 13 and spatial light modulator 17 respectively, for controlling the unlatching of three light sources respectively, and control spatial light modulator 17 specifically throw light on light field modulation.
Amici prism 19 receives the light penetrated from total reflection prism 16 after spatial light modulator 17 is modulated, and this light is penetrated along vertical direction.
Object lens 20 receive the light from Amici prism 19 injection and this light are radiated at measured object 24 (not shown) surface, collect the reflected light on measured object 24 surface, reflected light are oppositely penetrated, through Amici prism 19.Object lens 20 can switch between Mirau interference objective and light field microcobjective.
Cylinder mirror 21 receives the light through Amici prism 19, makes light collection in the focus place of cylinder mirror 21.
Imaging detector 22 is positioned at the focus place of a mirror 21, and the light that receiving basin mirror 21 converges also forms the surface image of measured object 24.
Phase shifter 23 is connected with object lens 20, for controlling the movement of object lens 20.
When using monochromatic light mode of operation, controller 18 controls an arbitrary light source luminescent in red-light source 11, green-light source 12 and blue light source 13, other two light sources are not luminous, with Time Controller 18, spatial light modulator 17 is set to full-gear as catoptron, object lens 20 are Mirau interference objectives 20.The monochromatic light received is divided into two-beam by Mirau interference objective 20, be irradiated to the reference planes (not shown) of Mirau interference objective 20 and the surface of measured object 24 respectively, the light that referenced plane and measured object 24 reflect interferes, then collected by Mirau interference objective 20, through Amici prism 19, tube mirror 21 is detected device 22 after reflecting and receives, and obtains monochromatic interference image.
The light intensity numerical value that each pixel obtains on detector 22 can be expressed as following formula:
I(x,y)＝A+Bcos[φ(x,y)+θ] (1)
In formula, A is background light intensity, and B is degree of modulation, and (x, y) is the phase differential of the reflected light of reference planes in interference system and the reflected light on measured object 24 surface, and θ is the phase-shift value that reference planes are carried out under the control of micro positioner.
There are three unknown numbers in visible formula (1), at least want three equations just can solve.The final phase value that N step interferes phase shift algorithm to solve is all relevant with each frame interference light intensity.Be expressed as: φ=f (I
1, I
2..., I
n) (2)
By formula (1) and formula (2), the wrapped phase value of each point of interference image can be obtained, its scope is at [-π, π], then street parcel algorithm is used to try to achieve all pixel continuous print phase values, the relative height on measured object 24 surface that these phase values are just corresponding.
When using white light scanning to interfere mode of operation, it is simultaneously luminous that controller 18 controls red-light source 11, green-light source 12 and blue light source 13, white light is exported after color separation splicer 14, spatial light modulator 17 is set to full-gear as catoptron, object lens 20 are Mirau interference objectives 20 simultaneously.The white light received is divided into two-beam by Mirau interference objective 20, be irradiated to the reference planes (not shown) of Mirau interference objective 20 and the surface of measured object 24 respectively, the light that referenced plane and measured object 24 reflect interferes, then collected by Mirau interference objective 20, through Amici prism 19, tube mirror 21 is detected device 22 after reflecting and receives, and obtains white light interference image.
The light intensity numerical value that each pixel obtains on detector 22 is exactly formula (1) superposition in a wavelength range, is expressed as:
λ in formula
cthe centre wavelength of white light, 2 λ
bbe the wavelength bandwidth of white light, ψ (λ) is incident light energy distribution about wavelength X on detector 22.
Because white light interference coherence distance is short, interferogram light intensity contrast ratio when zero optical path difference position reaches maximum.By the accurate movement of micro positioner in z-axis direction, obtain the interferogram of a series of different z value.Application white light interference algorithm extracts the vertical direction zero optical path difference position of the surperficial each point of measured object 24, and then the surface topography of reduction measured object 24.
When using monochromatic light confocal measurement mode of operation, controller 18 controls any one light source luminescent in red-light source 11, green-light source 12 and blue light source 13, other two light sources are not luminous, the pixel status simultaneously controlling spatial light modulator 17 is square wave or the sine streak at black and white interval, makes the light injecting spatial light modulator 17 be modulated into structured light.Object lens 20 are light field microcobjectives 20.
Light field microcobjective 20, by the surface of structured light to measured object 24, regathers the light of the surface reflection of measured object 24, and this light is through Amici prism 19, and tube mirror 21 is detected device 22 after reflecting and receives, and obtains the surface image of measured object 24.
At sample surfaces, illumination allocation of square is:
S(x
0,y
0)＝1+mcos(νx
0+θ
0) (4)
In formula, m is degree of modulation, θ
0be any space phase, ν is normalization spatial frequency, and ν is relevant with the spatial frequency of actual stripe pattern.Through the modulation of spatial light modulator 17, on detector 22, available formula is:
I(x,y)＝I
0+I
ccosθ
0+I
ssinθ
0(5)
In formula, I
0the optical field imaging in Uniform Illumination situation, I
cand I
sit is the light intensity amplitude that candy strip adds.
The pixel status of spatial light modulator 17 is made to produce one by controller 18
phase-shift phase, detector 22 obtains the second width measured object image after receiving the reflected light on measured object 24 surface, then makes the pixel status of spatial light modulator 17 produce second by controller 18
phase-shift phase, obtain the 3rd width measured object image.Thus obtain
with
time corresponding three width image I
1, I
2and I
3.And then obtain by formula (3), formula (4) and formula (5) Optical Tomography that measured object 24 is positioned at light field microcobjective 20 focal plane:
Then adopt phase shifter 23 pairs of light field microcobjectives 20 to be elevated, longitudinal scanning is carried out to measured object 24, obtains the slice map at measured object differing heights place, thus obtain the three-dimensional surface shape of measured object 24.
The effect of embodiment and effect
According to the multimodal interference confocal microscopic system of the present embodiment, because it is luminous to control single light source by controller, and to control spatial light modulator be full-gear, as catoptron, and adopt Mirau interference objective as object lens, detector can be made to receive interference light, obtain the interference image of measured object under monochromatic light exposure, three light sources are controlled simultaneously luminous by controller, by exporting white light after color separation splicer, and to control spatial light modulator be full-gear, as catoptron, and adopt Mirau interference objective as object lens, detector can be made to receive interference light, obtain measured object interference image under white light illumination, single source is controlled luminous by controller, and control square wave that spatial light modulator is black and white interval or sine streak and phase-shift phase needed for producing, and adopt light field microcobjective as object lens, obtain the slice map of measured object at object lens focal plane place, then phase shifter is adopted to control the position of focal plane of light field microcobjective, the surface topography of measured object is obtained by the slice map at measured object differing heights place, therefore this multimodal interference confocal microscopic system can switch between multiple measurement pattern, characteristic sum according to measured object surface measures needs, select applicable measurement pattern and algorithm, thus there is good measurement adaptability.
Certainly, multimodal interference confocal microscopic system involved in the present invention is not merely defined in the structure described in above embodiment.These are only the present invention conceive under basic explanation, and according to any equivalent transformation that technical scheme of the present invention is done, all should protection scope of the present invention be belonged to.
Claims (1)
1. a multimodal interference confocal microscopic system, is characterized in that, comprising:
Three light sources, are respectively red-light source, green-light source and blue light source;
Color separation splicer, is combined as a branch of by the light that described light source sends, and is made up of the reflective mirror of an anti-green glow of saturating ruddiness mutually arranged in a crossed manner and the reflective mirror of an anti-blue light of saturating ruddiness;
Collimation light uniforming device, the anaclasis sent by described color separation splicer is the uniform light of collimation;
Total reflection prism, makes described light penetrate towards predetermined direction by reflecting and reflecting;
Spatial light modulator, receive light that described total reflection prism sends and specifically to throw light on light field modulation to described light, the light through the modulation of illumination light field penetrates through after described total reflection prism;
Controller, controls the unlatching of light source described in each respectively, and controls the described specific illumination light field modulation of described spatial light modulator selection;
Amici prism, receives the light through penetrating after described total reflection prism, and described light is penetrated towards vertical direction;
Object lens, receive the light that penetrates from described Amici prism and this light are radiated at measured object surface, collecting the reflected light on described measured object surface, described reflected light is oppositely penetrated, through described Amici prism;
Cylinder mirror, receives the light through described Amici prism, and makes described light converge at the focus of described cylinder mirror by refraction;
Imaging detector, is positioned at the described focus place of described cylinder mirror, the light that described cylinder mirror converges is formed the surface image of described measured object; And
Phase shifter, is connected with described object lens, for the position of mobile described object lens,
Wherein, described object lens are any one in Mirau interference objective and light field microcobjective,
When using monochromatic light mode of operation, described controller controls an arbitrary described light source luminescent in described red-light source, described green-light source and described blue light source, other two described light sources are not luminous, described spatial light modulator is set to full-gear as catoptron by described controller simultaneously, and described object lens are Mirau interference objectives;
When using white light scanning to interfere mode of operation, it is simultaneously luminous that described controller controls three described light sources, after described color separation splicer, export white light, described spatial light modulator is set to full-gear as catoptron simultaneously, described object lens are Mirau interference objectives;
When using monochromatic light confocal measurement mode of operation, described controller controls light source luminescent described in any one in described red-light source, described green-light source and described blue light source, other two described light sources are not luminous, the pixel status simultaneously controlling described spatial light modulator is any one in the square wave at black and white interval and sine streak, make the light injecting described spatial light modulator be modulated into structured light, described object lens are light field microcobjectives.
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