CN113091634B - Rapid microscopic morphology measuring method suitable for white light scanning interference - Google Patents

Rapid microscopic morphology measuring method suitable for white light scanning interference Download PDF

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CN113091634B
CN113091634B CN202110223278.5A CN202110223278A CN113091634B CN 113091634 B CN113091634 B CN 113091634B CN 202110223278 A CN202110223278 A CN 202110223278A CN 113091634 B CN113091634 B CN 113091634B
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叶强强
王青
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Nanjing University of Science and Technology
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    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract

The invention discloses a method for rapidly measuring micro-morphology suitable for white light scanning interference, which is characterized in that the algorithm controls piezoelectric ceramics to perform time sequence vertical scanning within a certain scanning length according to micro-step distance through an upper computer software program, 1 interference image is collected and stored to a computer every moving step, and self-adaptive median filtering processing is performed on the stored time sequence interference image. And finding out the position of the maximum light intensity value of each pixel point in the time sequence interference pattern by adopting a hyper-symmetric search method, recording the frame number of the interference pattern at the position, and preliminarily calculating the height information of the morphology according to a correlation formula. And extracting phase information of the interference fringes by using a seven-step phase shift algorithm, combining the result of the primary calculation, and unwrapping according to a related formula to accurately recover the micro-morphology of the detected sample. The invention solves the problems that noise singularity interference and adjacent pixel point phase change cannot exceed 2 pi in a phase shift algorithm, effectively reduces the influence caused by scanning errors, and has the characteristics of high measurement precision, simple algorithm, strong applicability and the like.

Description

Rapid micro-morphology measuring method suitable for white light scanning interference
Technical Field
The invention relates to the technical field of precise optical measurement engineering, in particular to a method for rapidly measuring micro-morphology suitable for white light scanning interference.
Background
With the gradual improvement of the processing technology, the use of precise elements is increasingly wide, and the method has irreplaceable effects in the fields of aerospace, vehicle-mounted systems, imaging illumination and the like, can quantitatively evaluate the quality of the elements by measuring the morphological characteristics of the elements, and evaluates whether the functions of the elements in the system are influenced, and has important significance for monitoring the quality of the elements. The development of micro-electronics, micro-structures and MEMS devices has higher and higher requirements on the surface quality and surface morphology of an object, so that the precision requirement on the detection of micro-nano structures is higher and higher, and the research on various three-dimensional morphology recovery algorithms is particularly important.
In the surface topography measurement process, a plurality of interference fringes obtained are usually processed by a white light phase shift interference algorithm, a phase value is obtained by a corresponding phase shift algorithm, and then the three-dimensional topography of the side surface is obtained. The seven-step phase shifting method assumes that the coherent signal of the fringe is linearly changed in the seven-step phase shifting range, so that the error caused by the modulation degree can be reduced. However, the phase obtained by using the phase shift algorithm is wrapped in the tangent of the trigonometric function, which causes phase uncertainty, so that the depth variation of the surface topography is required to be not more than λ/2, and a complex phase unwrapping algorithm is required to perform a phase unwrapping operation on the obtained phase.
With the appearance of micro-nano structures such as various micro-optical elements, the problems of measurement of discontinuous surfaces and expansion of depth measurement range need to be solved, and spatial frequency domain algorithms, multi-wavelength measurement methods, white light scanning interferometry and the like appear. The white light scanning interference method adopts white light as a light source, the coherence length of the white light source is very short, generally only about a few micrometers to dozens of micrometers, so that two beams of white light can interfere only when the optical path difference is very small, and the light intensity reaches the maximum value when the optical path difference is zero. The measurement of absolute position can be realized by finding the position of the maximum value of light intensity, and the position of zero-order interference fringes is irrelevant to the wavelength of a light source, so that the measurement problem of a discontinuous surface is effectively solved by a white light scanning interferometry, but the acquired image samples are more, the efficiency is lower, and the error is larger.
Chinese patent CN102425988A discloses "a phase extraction method for phase-shift interference fringe pattern", which is a method that superposes and averages numerators and denominators in arctangent formulas in multiple sets of measurements, reduces errors by utilizing the mutual cancellation of error phase distribution in opposite phases, and can significantly improve the phase measurement accuracy. But this method fails to solve the problem of phase jump.
Chinese patent CN106767496A discloses a 3D morphology recovery method combining phase shift interference and vertical scanning interference, which is to collect all interference images in the process of combining phase shift interference and vertical scanning interference, firstly calculate the zero optical path difference of each pixel point by an extremum method, then record the corresponding frame number, calculate the phase information of each pixel point by a five-step method according to the frame number information, and finally combine the two to obtain a three-dimensional morphology. The extreme method in the patent is sensitive to external environment interference, light intensity signals are not preprocessed in the measuring process, and the five-step method assumes that the modulation degree is constant, and in practice, white light interference signals are limited by coherence length, and the modulation degree is attenuated along with the increase of optical path difference, so that measuring errors can be caused.
Chinese patent CN108759709A discloses a "white light interference three-dimensional reconstruction method suitable for surface topography detection", which also needs to collect all interference images first in the process of combining intensity information and phase information, then uses gaussian function to perform envelope curve fitting on the interference signal of each pixel point, determines zero optical path difference and corresponding frame number, then uses carrre algorithm to calculate the phase information of each pixel point according to the frame number information, and finally combines the intensity information and the phase information to obtain three-dimensional topography. The envelope curve fitting method in the patent is approximate calculation, when the envelope peak value is deviated due to the change of an interference signal of a measured point and is not symmetrical left and right with a zero-level fringe position, the error of the algorithm is large, a large amount of data operation is needed, and the three-dimensional shape of the measured surface can not be obtained when the scanning of a measuring system is finished.
Disclosure of Invention
The invention aims to provide a method for rapidly measuring the micro-morphology suitable for white light scanning interferometry, which integrates the advantages of the white light scanning interferometry and the white light phase-shift interferometry, overcomes the measurement error caused by noise, realizes the high-precision rapid measurement of the three-dimensional morphology, and has the resolution reaching the sub-nanometer level.
The technical solution for realizing the purpose of the invention is as follows: a method for rapidly measuring micro-morphology suitable for white light scanning interference comprises the following steps:
step 1, in the process of interference image acquisition, micro-step time sequence vertical scanning is carried out in a designated total stroke, and in each moving step, a CCD acquires and stores 1 time sequence interference image into a computer, and the step 2 is carried out.
Step 2, carrying out self-adaptive median filtering processing on the stored time sequence interference graph, setting a basic filtering window to be 3 multiplied by 3 when filtering is started, wherein the measured point is at the center of the filtering window, finding out a median value in the neighborhood during filtering, judging whether the median value is a noise signal, if the median value is the noise signal, increasing the size of the filtering window, and if the window size is increased and is larger than the set maximum value of the window, changing the position of the measured point in the window, setting the size of the window to be the minimum, and judging again; if the median is not a noise signal, judging whether the center point of the current window is noise, if not, directly outputting the value of the point, namely, keeping the value of the point unchanged; if the central point value is a noise signal, the median value is assigned to the value of the measured point to eliminate the noise, and the step 3 is carried out.
Step 3, judging the position of the maximum light intensity value of each pixel point in the time sequence interference pattern by adopting a hyper-symmetric search method, namely the zero optical path difference position corresponding to the pixel point, recording the frame number N of the interference pattern where the position is located, and calculating the initial relative height h of the morphology according to a correlation formula 0 And (5) turning to the step 4.
Step 4, selecting seven data points near the peak value of the interference signal, and extracting phase information by using a seven-step phase shift algorithm
Figure BDA0002955659540000031
Combined preliminary relative height h 0 And accurately obtaining the relative height H of the appearance according to a correlation formula, thereby recovering the three-dimensional microscopic appearance of the detected sample.
Compared with the prior art, the invention has the remarkable advantages that:
(1) the invention fully utilizes the hyper-symmetric search method to quickly determine the corresponding scanning position when the light intensity value of all the pixel points reaches the maximum, thereby greatly shortening the time consumption of the algorithm.
(2) The method makes full use of the white light phase shift interference method, has simple principle and strong anti-interference capability, combines interference light intensity information and phase information, gives consideration to the characteristics of high precision and high efficiency, solves the phase and the height by using a one-time seven-step phase shift method at the position of a coherent peak, reduces the total operation time of an algorithm, and achieves the purpose of quickly recovering the three-dimensional micro morphology with high precision.
(3) The invention can well eliminate the noise interference by carrying out the self-adaptive median filtering on the acquired interference signal, and can make up for the defect that the hyper-symmetric search method is easy to be interfered by noise, thereby improving the measurement precision of the phase and the surface height.
(4) The method fully utilizes the characteristics of high calculation speed, simplicity and feasibility of the hyper-symmetric search method, combines the characteristics of high precision and high efficiency of the phase shift interference method, overcomes the defects of the two methods, solves the problem that the phase obtained by the traditional phase shift algorithm needs to be subjected to a complex unwrapping process, and is equivalent to performing 2 pi correction on the phase obtained by the phase shift algorithm. The method has the advantages of high measurement precision, simple algorithm and strong practicability.
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FIG. 1 is a flow chart of a method for rapidly measuring micro-topography suitable for white light scanning interferometry according to the present invention.
FIG. 2 is a schematic diagram of a corresponding optical path structure of a rapid micro-topography measurement method suitable for white light scanning interference.
FIG. 3 is an interference fringe pattern collected by the piezoelectric ceramic micro-step vertical scanning white light interference device.
FIG. 4 is a recovery result diagram of a rapid measurement method for micro-topography suitable for white light scanning interferometry, wherein (a) is a two-dimensional topography diagram and (b) is a three-dimensional topography diagram.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Referring to fig. 1, a method for rapidly measuring a micro-topography suitable for white light scanning interference includes the following steps:
step 1, in the process of acquiring interference images of a detected sample, micro-step time sequence vertical scanning is carried out in a designated total stroke, and 1 time sequence interference image is acquired and stored into a computer by a CCD (charge coupled device) in each moving step, which specifically comprises the following steps:
in the process of interference image acquisition, the scanning step length of the piezoelectric ceramics is set to be lambda/8, lambda is the central wavelength of white light, the interference microscope objective is driven at equal intervals in a specified total stroke to carry out time sequence vertical scanning, and a CCD records an interference image every time when scanning is carried out, wherein the white light interference fringe intensity expression I (x, y) is as follows:
Figure BDA0002955659540000041
in the formula I 0 Representing the intensity of the background lightThe flow component, M is the degree of coherent modulation, representing the variation of the light intensity amplitude,
Figure BDA0002955659540000042
is the phase difference.
Step 2, carrying out self-adaptive median filtering processing on the stored time sequence interference graph, setting a basic filtering window to be 3 multiplied by 3 when filtering is started, wherein the measured point is at the center of the filtering window, finding out a median value in the neighborhood during filtering, judging whether the median value is a noise signal, if the median value is the noise signal, increasing the size of the filtering window, and if the window size is increased and is larger than the set maximum value of the window, changing the position of the measured point in the window, setting the size of the window to be the minimum, and judging again; if the median is not a noise signal, judging whether the center point of the current window is noise, if not, directly outputting the value of the point, namely, keeping the value of the point unchanged; if the center point value is a noise signal, a median value is assigned to the value of the measured point to eliminate the noise.
Median filtering is a non-linear image smoothing method that removes noise while preserving some edges that are step or ramp without blurring them. The traditional median filtering has inherent disadvantages, for example, when noise similar to impulse is processed, the size of a filtering window can seriously affect the filtering performance; for some locations where noise is significant, the smaller filter window may not achieve the denoising effect, while the larger filter window may destroy the original contour of the surface roughness or even affect the contour of the surface waviness. In order to overcome the limitation of a median filter on a filtering window, a median filtering algorithm capable of automatically adjusting the filtering window is adopted, the size of the filtering window can be automatically adjusted by the filter according to the local characteristics of an image, the details of an interference image can be protected, and the influence of noise on post-stage data processing can be reduced.
Step 3, judging the position of the maximum light intensity value of each pixel point in the time sequence interference pattern by adopting a hyper-symmetric search method, namely the position of zero optical path difference corresponding to the pixel point, and recording the interference pattern of the positionThe initial relative height h of the morphology is calculated according to a correlation formula 0 The method comprises the following steps:
according to the white light interference characteristics, the white light interference signal in an ideal state takes the zero-order fringe position as the center of the fringe, the left fringe sequence and the right fringe sequence are symmetrically distributed, the signal symmetry point position is the position searched by the super-symmetric search method, the position of the coherent peak of the interference fringe is basically superposed with the signal symmetry point position, and the position of the coherent peak is found so as to determine the position of the zero optical path difference. The light intensity value of a certain pixel point is extracted to find the frame number N of the interference image corresponding to the light intensity peak value, and the appearance can be recovered. Solving the position h when the light intensity value is maximum by a hyper-symmetric search method 0 The expression is as follows:
Figure BDA0002955659540000051
where I is the position of the scanning sample, I i And (3) carrying out differential square on the signal light intensity at the scanning position i and the signal light intensity at the adjacent position so as to eliminate the influence caused by the direct current signal, wherein n is the scanning step number. The method has the advantages of high calculation speed and convenience in operation.
Step 4, selecting seven data points near the peak position of the interference signal, and extracting phase information by using a seven-step phase shift algorithm
Figure BDA0002955659540000052
Combined preliminary relative height h 0 Accurately obtaining the relative height H of the morphology so as to recover the three-dimensional microscopic morphology of the detected sample, which comprises the following steps:
selecting the light intensity value I (x, y) of seven data points near the peak of the interference signal N-3 ，I(x,y) N -2，I(x,y) N -1，I(x,y) N ，I(x,y) N+1 ，I(x,y) N+2 ，I(x,y) N+3 Extracting phase information using a seven-step phase-shift algorithm
Figure BDA0002955659540000053
Combining the results of the preliminary calculation according to the correlation formulaAccurately obtaining the relative height H of the morphology so as to recover the three-dimensional microscopic morphology of the detected sample, wherein the expression of the phase and the morphology height is as follows:
Figure BDA0002955659540000054
example 1
With reference to fig. 1 to 4, a method for rapidly measuring a microscopic morphology suitable for white light scanning interference is provided, in an experimental process, an optical system is provided with an interference objective system with a magnification of 20 ×, a light source uses a white light LED with a central wavelength of 532nm, a filter is adopted to select short coherent light with a bandwidth of 10nm, morphology detection is performed on a mobile phone toughened film sample, and 32 interference images are collected within a range of 2.13 μm of a scanning total length according to a lambda/8 step length for calculation. The invention provides a method for rapidly measuring the micro-morphology suitable for white light scanning interference, which comprises the following steps:
step 1, combining the schematic diagram of the optical path structure shown in fig. 2, connecting a light source with an illumination system, adjusting the spatial positions of the illumination system and a first spectroscope to enable the emergent light of the illumination system to be received and reflected by the first spectroscope, adjusting the position of an objective system to enable the light reflected by the first spectroscope to pass through an objective lens, adjusting the positions of a reference surface and a second spectroscope to enable a part of light transmitted by the objective lens to be reflected by the second spectroscope and the reference surface to form reference light, enabling the other part of light to be transmitted by the second spectroscope, forming test light by the reflection of a measured object and the transmission of the second spectroscope, enabling the reference light and the test light to form interference light signals, enabling the interference light signals to pass through the objective lens and the first spectroscope and then to be incident on the target surface of a CCD through a tube mirror to complete the reception of an interference image, and simultaneously controlling and controlling a scanning system in the system to designate the total stroke to be 2.13 μm, and (3) time sequence vertical scanning with the step length of lambda/8, recording an interference image by the CCD in the same way every time of scanning, and acquiring 32 interference images in total for calculation.
After the system is built, the short coherent light source 1 is turned on, the short coherent light irradiates the first spectroscope 3 through the Kohler lighting system 2, and reflected light generated by the first spectroscope 3 is projected downwards to an interference objective system 7 consisting of an objective 4, a reference surface 5 and a second spectroscope 6. The reflected light generated by the first beam splitter 3 firstly passes through the objective lens 4 and irradiates on the upper surface of the second beam splitter 6, the second beam splitter 6 splits the light beam into reflected light and transmitted light, wherein the reflected light is reflected upwards to reach the reference surface 5, the reference surface reflects the reflected light and irradiates on the upper surface of the second beam splitter 6 again, and then the upper surface of the second beam splitter 6 reflects to form reference light. The transmitted light generated by the second spectroscope 6 is transmitted downwards to irradiate the upper surface of an object 8 to be measured, the reflected light penetrates through the second spectroscope 6 to form test light, interference effect is generated between the reference light and the test light to generate interference light signals, the interference light signals are transmitted upwards to the first spectroscope 3 and transmitted, the transmitted interference light signals are transmitted upwards continuously, transmitted through the tube lens 9 and received by the CCD 10 to complete receiving of an interference image, meanwhile, the control and data processing system 11 in the system controls the scanning system 12 to perform timing sequence vertical scanning with the step length of lambda/8 in the designated total stroke, and the CCD 10 records an interference image in the same mode when the timing sequence vertical scanning with the step length of lambda/8 is performed once.
Step 2, carrying out self-adaptive median filtering processing on the stored time sequence interference graph, setting a basic filtering window to be 3 multiplied by 3 when filtering is started, wherein the measured point is at the center of the filtering window, finding out a median value in the neighborhood during filtering, judging whether the median value is a noise signal, if the median value is the noise signal, increasing the size of the filtering window, and if the window size is increased and is larger than the set maximum value of the window, changing the position of the measured point in the window, setting the size of the window to be the minimum, and judging again; if the median is not a noise signal, judging whether the center point of the current window is noise, if not, directly outputting the value of the point, namely, keeping the value of the point unchanged; if the center point value is a noise signal, a median value is assigned to the value of the measured point to eliminate the noise.
Step 3, judging the position of the maximum light intensity value of each pixel point in the time sequence interference pattern by adopting a hyper-symmetric search method, namely the zero optical path difference position corresponding to the pixel point, recording the frame number N of the interference pattern at the position, and according to the related public relationsFormula for preliminary calculation of relative height h of morphology 0 The expression is as follows:
Figure BDA0002955659540000071
where I is the position of the scanning sample, I i And (3) carrying out differential square on the signal light intensity at the scanning position i and the signal light intensity at the adjacent position so as to eliminate the influence caused by the direct current signal, wherein n is the scanning step number.
Step 4, selecting the light intensity values I (x, y) of seven data points near the peak value of the interference signal N -3，I(x,y) N -2，I(x,y) N -1，I(x,y) N ，I(x,y) N+1 ，I(x,y) N+2 ，I(x,y) N+3 Extracting phase information by using a seven-step phase shift algorithm
Figure BDA0002955659540000072
Combining the results of the primary calculation, and accurately obtaining the relative height H of the morphology according to a correlation formula, thereby recovering the three-dimensional microscopic morphology of the detected sample, wherein the expressions of the phase and the morphology height are as follows:
Figure BDA0002955659540000073
the embodiment realizes the measurement of the sample to be measured with the rough surface through a series of measures. The three-dimensional shape of the sample to be measured is finally obtained, the coincidence degree of the measured value and the actual value shown by the experimental result is high, the consistency of the test results in all fields of view is strong, and the calculation time of the algorithm is obviously shorter than that of the traditional short coherent light three-dimensional shape measurement algorithm, so that the method is good in real-time performance, strong in operability and high in measurement precision.

Claims (4)

1. A micro-topography rapid measurement method suitable for white light scanning interference is characterized by comprising the following steps:
step 1, in the process of acquiring interference images of a detected sample, micro-step time sequence vertical scanning is carried out in a specified total stroke, 1 time sequence interference image is acquired and stored into a computer by a CCD (charge coupled device) every moving step, and the step 2 is carried out;
step 2, carrying out self-adaptive median filtering processing on the stored time sequence interference graph, setting a basic filtering window to be 3 multiplied by 3 when filtering is started, wherein the measured point is at the center of the filtering window, finding out a median value in the neighborhood during filtering, judging whether the median value is a noise signal, if the median value is the noise signal, increasing the size of the filtering window, and if the window size is increased and is larger than the set maximum value of the window, changing the position of the measured point in the window, setting the size of the window to be the minimum, and judging again; if the median is not a noise signal, judging whether the center point of the current window is noise, if not, directly outputting the value of the point, namely, keeping the value of the point unchanged; if the central point value is a noise signal, assigning the median value to the value of the measured point to eliminate the noise, and turning to the step 3;
step 3, finding out the position of the maximum light intensity value of each pixel point in the time sequence interference pattern by adopting a hyper-symmetric search method, namely the zero optical path difference position corresponding to the pixel point, recording the frame number N of the interference pattern where the position is located, and calculating the initial relative height h of the morphology 0 Turning to step 4;
step 4, selecting the preliminary relative height h 0 Seven data points near the corresponding interference signal peak position extract phase information by using a seven-step phase shift algorithm
Figure FDA0003645411890000011
Combined preliminary relative height h 0 And accurately obtaining the relative height H of the appearance, thereby recovering the three-dimensional microscopic appearance of the detected sample.
2. The method for rapidly measuring the micro-topography suitable for white light scanning interferometry according to claim 1, wherein: in the step 1, the scanning step length of the piezoelectric ceramics is set to be lambda/8, lambda is the central wavelength of white light, the interference microscope objective is driven at equal intervals in a specified total stroke to carry out time sequence vertical scanning, interference images are collected and stored by using a CCD, and the white light interference fringe intensity expression I (x, y) is as follows:
Figure FDA0003645411890000012
in the formula I 0 The background light intensity represents the direct current component of the light intensity, M is the coherent modulation degree and represents the variation of the light intensity amplitude,
Figure FDA0003645411890000013
is the phase difference.
3. The method for rapidly measuring the micro-topography suitable for white light scanning interferometry according to claim 1, wherein: in step 3, the position h when the light intensity value is maximum is solved by a hyper-symmetric search method 0 The expression is as follows:
Figure FDA0003645411890000021
where I is the position of the scanning sample, I i And (3) carrying out differential square on the signal light intensity at the scanning position i and the signal light intensity at the adjacent position so as to eliminate the influence caused by the direct current signal, wherein n is the scanning step number.
4. The method for rapidly measuring the micro-topography suitable for white light scanning interferometry according to claim 1, wherein: in step 4, at the preliminary relative height h 0 Sequentially taking out the light intensity values I (x, y) of the front and the rear seven sampling points at the corresponding coherent peak position N-3 ，I(x,y) N-2 ，I(x,y) N-1 ，I(x,y) N ，I(x,y) N+1 ，I(x,y) N+2 ，I(x,y) N+3 I.e. obtaining the phase separately
Figure FDA0003645411890000022
And a height H:
Figure FDA0003645411890000023
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