CN117870573A - White light interference three-dimensional morphology resolving method, device, equipment and storage medium - Google Patents
White light interference three-dimensional morphology resolving method, device, equipment and storage medium Download PDFInfo
- Publication number
- CN117870573A CN117870573A CN202410277235.9A CN202410277235A CN117870573A CN 117870573 A CN117870573 A CN 117870573A CN 202410277235 A CN202410277235 A CN 202410277235A CN 117870573 A CN117870573 A CN 117870573A
- Authority
- CN
- China
- Prior art keywords
- white light
- interference
- time sequence
- preset
- zero
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000003860 storage Methods 0.000 title claims abstract description 14
- 238000012545 processing Methods 0.000 claims abstract description 32
- 238000009826 distribution Methods 0.000 claims abstract description 31
- 238000001914 filtration Methods 0.000 claims abstract description 22
- 230000010363 phase shift Effects 0.000 claims abstract description 14
- 238000005305 interferometry Methods 0.000 claims description 27
- 238000012876 topography Methods 0.000 claims description 23
- 238000011156 evaluation Methods 0.000 claims description 19
- 238000012216 screening Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000004364 calculation method Methods 0.000 claims description 6
- 238000005070 sampling Methods 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000011157 data evaluation Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004401 flow injection analysis Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention relates to a white light interference three-dimensional morphology resolving method, a device, equipment and a storage medium, belonging to the technical field of surface morphology measurement, wherein the method comprises the following steps: carrying out white light interference treatment on a sample to be detected in a preset scanning period to obtain a plurality of white light interference fringe images; acquiring a time sequence interference signal of a target pixel point from the white light interference fringe image; performing moving average filtering processing on the time sequence interference signals; positioning a zero-order fringe position index and a light intensity value according to the filtered time sequence interference signal; calculating the phase distribution of a tested sample based on a preset phase shift formula and the light intensity value; and calculating the height information of the measured sample according to the calibrated space offset, the zero-order stripe position index and the phase distribution. According to the invention, the moving average filtering processing is carried out on the time sequence interference signals, so that impurity interference in the time sequence interference signals is removed, and the accuracy of zero-order fringe position positioning and three-dimensional morphology resolving is improved.
Description
Technical Field
The invention relates to the technical field of surface topography measurement, in particular to a white light interference three-dimensional topography resolving method, device and equipment and a storage medium.
Background
White light interferometry is an important technology for microscopic surface measurement and is widely applied to the fields of microelectronics, material biology, precision machining and the like. The measurement strategy of white light interferometry is vertical scanning interferometry and phase shift interferometry, vertical scanning uses the high-precision piezoelectric displacement device to scan, its resolution is closely connected with scanning step length; the phase-shifting interference can effectively improve the precision of vertical scanning to the nanometer level.
The accuracy of three-dimensional morphology calculation is always an important parameter for evaluating the reliability of a measurement method. The existing white light interference three-dimensional morphology resolving method can be divided into a direct resolving method, a weighted average method and an envelope fitting method, and the methods can obtain a near ideal resolving method when processing perfect signals.
However, in the production and practical measurement environments, the time sequence sampling signals have the influences of offset, signal contrast reduction, vibration noise, instrument noise, envelope curve broadening and the like, envelope errors and overlarge intensity deviation are easy to occur in the conventional method, irregular noise points and morphology resolving failure are generated, and the zero-order stripe position positioning and the three-dimensional morphology characterization are not facilitated.
Disclosure of Invention
In view of the foregoing, it is necessary to provide a method, apparatus, device and storage medium for resolving white light interference three-dimensional morphology, which are used for solving the problems in the prior art that the influence of sampling signal deviation, contrast reduction, vibration noise, instrument noise, envelope curve broadening and the like easily causes envelope errors and overlarge intensity deviation, irregular noise points and morphology resolving failure are generated, and zero-level stripe position positioning and three-dimensional morphology characterization are influenced.
In order to solve the above problems, the present invention provides a method for resolving white light interference three-dimensional morphology, comprising:
carrying out white light interference treatment on a sample to be detected in a preset scanning period to obtain a plurality of white light interference fringe images;
acquiring a time sequence interference signal of a target pixel point from a white light interference fringe image;
performing moving average filtering processing on the timing interference signals;
positioning a zero-order fringe position index and a light intensity value according to the filtered time sequence interference signal;
calculating the phase distribution of a measured sample based on a preset phase shift formula and a light intensity value;
and calculating the height information of the measured sample according to the calibrated space offset, the zero-order stripe position index and the phase distribution.
In one possible implementation manner, performing white light interference processing on a sample to be tested in a preset scanning period to obtain a plurality of white light interference fringe images, including:
setting a preset step length according to the equivalent wavelength of the interferometer, and performing interference sampling processing on a sample to be detected in a preset scanning period to obtain a white light interference time sequence image sequence;
the time sequence image sequence with the same preset scanning period comprises white light interference fringe images and interference fringe-free images.
In one possible implementation, acquiring a timing interference signal of a target pixel from a white light interference fringe image includes:
performing differential processing on the white light interference fringe image according to a preset differential order to extract a plurality of time sequence interference signals of a plurality of pixel points;
and determining the time sequence interference signal of the target pixel point from the plurality of time sequence interference signals by using a preset evaluation threshold value.
In one possible implementation manner, evaluating and screening out the timing interference signal of the target pixel point meeting the requirement with a preset evaluation threshold value includes:
determining a plurality of preset data points according to the maximum value of the time sequence interference signals;
determining a pixel point energy evaluation value according to the sum of preset data points and the sum of time sequence interference signals;
and screening according to the pixel energy evaluation value and a preset evaluation threshold value to obtain a time sequence interference signal of the target pixel.
In one possible implementation, the moving average filtering of the time-lapse interference signal includes:
performing moving average filtering processing on the time-series interference signals through a preset moving average model;
and performing Hilbert transform on the filtered time sequence interference signals to remove noise interference.
In one possible implementation, the preset phase shift formula is:
；
wherein,φfor the phase distribution of the sample under test,I m representing the light intensity value at the position of the zero-order fringe of the time sequence interference signal of the measuring pixel point,I m+j is arranged in front of and behind the zero-order stripe position of the same pixel pointjThe light intensity value of the frame image.
In one possible implementation, calculating the height information of the measured sample according to the calibrated spatial offset, the zero-order stripe position index and the phase distribution includes:
establishing a morphology conversion formula according to the calibrated spatial offset, the zero-order stripe position index and the phase distribution;
and calculating the height information of the tested sample based on the morphology conversion formula.
The invention also provides a white light interference three-dimensional morphology solving device, which comprises:
the interference module is used for carrying out white light interference treatment on a sample to be detected in a preset scanning period to obtain a plurality of white light interference fringe images;
the signal acquisition module is used for acquiring time sequence interference signals of the target pixel points from the white light interference fringe images;
the filtering module is used for carrying out moving average filtering processing on the time sequence interference signals;
the positioning module is used for positioning the zero-order fringe position index and the light intensity value according to the filtered time sequence interference signal;
the phase calculation module is used for calculating the phase distribution of the tested sample based on a preset phase shift formula and a light intensity value;
and the height calculation module is used for calculating the height information of the measured sample according to the calibrated spatial offset, the zero-order stripe position index and the phase distribution.
In a third aspect, the present invention also provides a white light interferometry three-dimensional topography resolving apparatus, comprising a memory and a processor, wherein,
a memory for storing a program;
and the processor is coupled with the memory and used for executing the program stored in the memory so as to realize the steps in the white light interference three-dimensional morphology resolving method in any implementation mode.
In a fourth aspect, the present invention further provides a computer readable storage medium, configured to store a computer readable program or instructions, where the program or instructions, when executed by a processor, implement the steps in the white light interferometry three-dimensional morphology resolution method according to any of the above implementations.
The beneficial effects of the invention are as follows: according to the white light interference three-dimensional morphology resolving method, device, equipment and storage medium, the influence of a background signal is eliminated by carrying out moving average filtering processing on a time sequence interference signal, noise impurity interference in the time sequence interference signal is removed, a zero-order fringe position index is located according to the filtered time sequence interference signal, the phase distribution of a measured sample is calculated based on a preset phase shifting formula, scanning error compensation is carried out on the interference signal by using a calibrated space offset, and the accuracy of zero-order fringe position location and three-dimensional morphology resolving is improved.
Drawings
FIG. 1 is a schematic flow chart of a method for resolving white light interferometry three-dimensional features according to an embodiment of the present invention;
FIG. 2 is a schematic image diagram of an embodiment of a time-series interference image sequence according to the present invention;
FIG. 3 is a schematic diagram of an embodiment of an original signal and a differential signal according to the present invention;
FIG. 4 is a flowchart illustrating an embodiment of screening out a timing interference signal of a target pixel point meeting requirements according to the present invention;
FIG. 5 is a schematic representation of a transformed three-dimensional topography according to one embodiment of the present invention;
FIG. 6 is a schematic cross-sectional view of an embodiment of a converted three-dimensional topographical centroid cross-section provided by the present invention;
FIG. 7 is a schematic diagram of a white light interferometry three-dimensional morphology resolution apparatus according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a white light interference three-dimensional morphology resolving device according to an embodiment of the present invention.
Detailed Description
Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form a part hereof, and together with the description serve to explain the principles of the invention, and are not intended to limit the scope of the invention.
Referring to fig. 1, fig. 1 is a flow chart of an embodiment of a white light interference three-dimensional morphology resolving method provided by the present invention, and a specific embodiment of the present invention discloses a white light interference three-dimensional morphology resolving method, which includes:
s101, carrying out white light interference treatment on a sample to be detected in a preset scanning period to obtain a plurality of white light interference fringe images;
s102, acquiring a time sequence interference signal of a target pixel point from a white light interference fringe image;
s103, performing moving average filtering processing on the timing interference signals;
s104, positioning a zero-order fringe position index and a light intensity value according to the filtered time sequence interference signal;
s105, calculating the phase distribution of the tested sample based on a preset phase shift formula and a light intensity value;
s106, calculating the height information of the measured sample according to the calibrated space offset, the zero-order stripe position index and the phase distribution.
In the above embodiment, the interferometer is used to perform interference processing on the sample to be tested, and before the interference processing is performed, the standard silicon wafer is used to perform vertical calibration on the interferometer, so as to obtain the spatial offset delta of the interferometerh. It can be understood that the prior art for vertically calibrating an interferometer by using a standard silicon wafer has been described in detail, and the present invention is not described in detail.
And acquiring a time sequence interference image sequence of the sample to be detected through an interferometer, wherein the time sequence interference image sequence is all images in a preset scanning period and comprises a plurality of white light interference fringe images and interference fringe-free images.
Compared with the prior art, the white light interference three-dimensional morphology resolving method provided by the embodiment eliminates the influence of a background signal by carrying out moving average filtering processing on a time sequence interference signal, removes noise impurity interference in the time sequence interference signal, locates a zero-order fringe position index according to the filtered time sequence interference signal, calculates the phase distribution of a measured sample based on a preset phase shifting formula, carries out scanning error compensation on the interference signal by using a calibrated space offset, and improves the accuracy of zero-order fringe position location and three-dimensional morphology resolving.
In some embodiments of the present invention, performing white light interference processing on a sample to be tested in a preset scanning period to obtain a plurality of white light interference fringe images, including:
setting a preset step length according to the equivalent wavelength of the interferometer, and performing interference sampling processing on a sample to be detected in a preset scanning period to obtain a white light interference time sequence image sequence;
the time sequence image sequence with the same preset scanning period comprises white light interference fringe images and interference fringe-free images.
In the above embodiment, the voltage-stabilizing step driver is used to collect the sample to be measured in given steps, and the distance of each step driving is set to be lambda/8, where lambda is the equivalent wavelength of the white light interferometer. It should be noted that the preset step length may be set according to actual needs, which is not further limited by the present invention.
Referring to fig. 2, fig. 2 is an image schematic diagram of an embodiment of a time-series interference image sequence provided by the present invention, where the time-series interference image sequence should include all characteristic surface interference fringe ranges of a measured sample, and as shown in fig. 2, two characteristics are a step and an inclined plane, and the lower surface of the step and the inclined plane have clear fringes.
In some embodiments of the present invention, acquiring a timing interference signal of a target pixel from a white light interference fringe image includes:
performing differential processing on the white light interference fringe image according to a preset differential order to extract a plurality of time sequence interference signals of a plurality of pixel points;
and determining the time sequence interference signal of the target pixel point from the plurality of time sequence interference signals by using a preset evaluation threshold value.
In the above embodiment, referring to fig. 3, fig. 3 is an image schematic diagram of an embodiment of an original signal and a differential signal provided by the present invention, the acquired time-series interference sequence is processed by differentiating the image according to a preset differential order, and a time-series interference signal of each pixel point is extracted, wherein a differential equation is set as follows:wherein, the method comprises the steps of, wherein,I(i)a first white light interference time sequenceiAs shown in fig. 3, the original signal amplitude is low, the extreme point is not obvious, the data amplitude after difference is large, and the extreme point is clear.
Referring to fig. 4, fig. 4 is a flow chart of an embodiment of screening out a timing interference signal of a target pixel point meeting requirements according to the present invention, in some embodiments of the present invention, evaluating and screening out a timing interference signal of a target pixel point meeting requirements with a preset evaluation threshold value includes:
s401, determining a plurality of preset data points according to the maximum value of the time sequence interference signal;
s402, determining a pixel point energy evaluation value according to a preset data point sum and a time sequence interference signal sum;
s403, screening according to the pixel point energy evaluation value and a preset evaluation threshold value to obtain a time sequence interference signal of the target pixel point.
In the above embodiment, the timing interference signal of each pixel is obtained based on the white light interference timing image sequence, the maximum value of the timing interference signal is determined, the data points preset before and after the maximum value are extracted, the sum of the extracted data points is calculated and divided by the sum of the timing interference signals, and the pixel energy evaluation value is obtained. It will be appreciated that the preset data points may be set according to actual needs, which the present invention is not limited to.
Judging whether the energy evaluation value of the pixel point is larger than a preset effective data evaluation threshold value, and if the energy evaluation value is within the effective data evaluation threshold value, determining the pixel as a correct pixel; and if the energy evaluation value does not belong to the valid data threshold value, determining the pixel as an error pixel and setting zero to obtain a time sequence interference signal of the target pixel point (correct pixel).
In some embodiments of the present invention, performing a moving average filtering process on a time-lapse interference signal includes:
performing moving average filtering processing on the time-series interference signals through a preset moving average model;
and performing Hilbert transform on the filtered time sequence interference signals to remove noise interference.
In the above embodiment, the moving average filtering processing is performed on the time sequence interference signal of each target pixel point through a preset moving average model, where the preset moving average model is:whereinnFor a set filter period, the filter is preferably,n=9。
the preset Hilbert transform formula is as followsWherein, the method comprises the steps of, wherein,I(i)for each pixel timing interference signal, +.>Is the standard deviation of the timing interference signal.
The envelope curve of the time sequence interference signal of each pixel point is obtained through the preset Hilbert transformation, the background and noise interference of the time sequence interference signal are removed, and the expression is as follows:whereinFIAs the complex envelope of the time-series interference signal,H[I(i)]is the hilbert transform of the signal and also represents the signal pre-envelope.
It will be appreciated that the Hilbert transform is essentially an AM/ASK amplitude modulation, the envelope of the carrier carrying the transmitted information, i.e. the envelope of the signal is equivalent toAbsolute values of the hilbert transform, i.e.:。
in some embodiments of the present invention, the predetermined phase shift formula is:
；
wherein,φfor the phase distribution of the sample under test,I m representing the light intensity value at the position of the zero-order fringe of the time sequence interference signal of the measuring pixel point,I m+j is arranged in front of and behind the zero-order stripe position of the same pixel pointjThe light intensity value of the frame image.
In the above embodiment, the phase distribution of the measured sample is calculated by a preset phase shift formula, and the phase distribution is used as a preferred embodiment in the present inventionjTake a value of 3, i.eI m+j Is the light intensity value of the 3 frames of images before and after the zero-level stripe position of the same pixel point.
In some embodiments of the present invention, calculating height information of a sample under test from a calibrated spatial offset, a zero-order fringe position index, and a phase distribution includes:
establishing a morphology conversion formula according to the calibrated spatial offset, the zero-order stripe position index and the phase distribution;
and calculating the height information of the tested sample based on the morphology conversion formula.
In the above embodiment, the index is based on the zero point positionz m Phase distributionφAnd the space offset deltahThe morphology transformation formula is established as follows:wherein delta ish 0 For the scanning step-by-step,λis the center wavelength of the white light source,his the height of the topography.
Referring to fig. 5, fig. 5 is a schematic diagram of a three-dimensional shape after conversion according to an embodiment of the present invention, the converted shape of the embodiment is shown in fig. 5, a clearly smooth three-dimensional shape of a surface can be seen, referring to fig. 6, fig. 6 is a schematic diagram of a cross section of a center of gravity of the converted three-dimensional shape according to an embodiment of the present invention, the cross section of the center of gravity corresponding to the shape of the embodiment is shown in fig. 6, and the height (height) of the corresponding shape is 12.014 μm, which is different from a standard value by 10nm, so as to reach an acceptable range.
In order to better implement the white light interference three-dimensional morphology resolving method according to the embodiment of the present invention, referring to fig. 7, fig. 7 is a schematic structural diagram of an embodiment of the white light interference three-dimensional morphology resolving device provided by the present invention, where the white light interference three-dimensional morphology resolving device 700 includes:
the interference module 701 is configured to perform white light interference processing on a sample to be tested in a preset scanning period to obtain a plurality of white light interference fringe images;
a signal acquisition module 702, configured to acquire a timing interference signal of a target pixel point from the white light interference fringe image;
a filtering module 703, configured to perform a moving average filtering process on the timing interference signal;
a positioning module 704, configured to position the zero-order fringe position index and the light intensity value according to the filtered time-sequence interference signal;
the phase calculation module 705 is configured to calculate a phase distribution of the measured sample based on a preset phase shift formula and a light intensity value;
the height calculating module 706 is configured to calculate height information of the measured sample according to the calibrated spatial offset, the zero-order stripe position index and the phase distribution.
What needs to be explained here is: the device 700 provided in the foregoing embodiments may implement the technical solutions described in the foregoing method embodiments, and the specific implementation principles of the foregoing modules or units may be referred to the corresponding content in the foregoing method embodiments, which is not repeated herein.
Referring to fig. 8, fig. 8 is a schematic structural diagram of a white light interference three-dimensional morphology resolving device according to an embodiment of the present invention. Based on the white light interference three-dimensional morphology resolving method, the invention also correspondingly provides white light interference three-dimensional morphology resolving equipment which can be computing equipment such as a mobile terminal, a desktop computer, a notebook computer, a palm computer, a server and the like. The white light interferometry three-dimensional topography resolving device 800 includes a processor 801, a memory 802, and a display 803. Fig. 8 shows only some of the components of the white light interferometric three-dimensional topography resolving device, but it should be understood that not all of the illustrated components need be implemented and that more or fewer components may alternatively be implemented.
The memory 802 may be an internal storage unit of the white light interferometric three-dimensional topography resolving device 800 in some embodiments, such as a hard disk or a memory of the white light interferometric three-dimensional topography resolving device 800. The memory 802 may also be an external storage device of the white light interferometry three-dimensional topography calculating device 800 in other embodiments, for example, a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) Card, a Flash Card (Flash Card) or the like provided on the white light interferometry three-dimensional topography calculating device 800. Further, the memory 802 may also include both internal and external memory devices as well as internal memory cells of the white light interferometry three-dimensional topography resolving device 800. The memory 802 is used for storing application software and various data installed in the white light interferometry three-dimensional morphology resolving device 800, for example, program codes for installing the white light interferometry three-dimensional morphology resolving device 800, etc. The memory 802 may also be used to temporarily store data that has been output or is to be output. In one embodiment, the memory 802 stores a white light interferometry three-dimensional topography resolving program 804, where the white light interferometry three-dimensional topography resolving program 804 is executable by the processor 801 to implement the white light interferometry three-dimensional topography resolving method of embodiments of the present application.
The processor 801 may be a central processing unit (Central Processing Unit, CPU), microprocessor or other data processing chip in some embodiments for executing program code or processing data stored in the memory 802, such as performing white light interferometry three-dimensional topography resolution methods, etc.
The display 803 may be an LED display, a liquid crystal display, a touch-sensitive liquid crystal display, an OLED (Organic Light-Emitting Diode) touch, or the like in some embodiments. The display 803 is used to display information at the white light interferometry three-dimensional topography resolving device 800 and to display a visual user interface. The components 801-803 of the white light interferometry three-dimensional topography resolving device 800 communicate with each other over a system bus.
In one embodiment, the steps in the white light interferometry three-dimensional topography solution method as described above are implemented when the processor 801 executes the white light interferometry three-dimensional topography solution program 804 in the memory 802.
The present embodiment also provides a computer-readable storage medium having stored thereon a white light interferometry three-dimensional topography resolving program which when executed by a processor performs the steps of:
carrying out white light interference treatment on a sample to be detected in a preset scanning period to obtain a plurality of white light interference fringe images;
acquiring a time sequence interference signal of a target pixel point from a white light interference fringe image;
performing moving average filtering processing on the timing interference signals;
positioning a zero-order fringe position index and a light intensity value according to the filtered time sequence interference signal;
calculating the phase distribution of a measured sample based on a preset phase shift formula and a light intensity value;
and calculating the height information of the measured sample according to the calibrated space offset, the zero-order stripe position index and the phase distribution.
In summary, the method, the device, the equipment and the storage medium for resolving white light interference three-dimensional morphology provided by the embodiment remove the influence of a background signal by performing moving average filtering processing on a time sequence interference signal, remove noise impurity interference in the time sequence interference signal, position a zero-order fringe position index according to the filtered time sequence interference signal, calculate the phase distribution of a measured sample based on a preset phase shift formula, and perform scanning error compensation on the interference signal by using a calibrated spatial offset to improve the accuracy of positioning the zero-order fringe position and resolving the three-dimensional morphology.
Those skilled in the art will appreciate that all or part of the flow of the methods of the embodiments described above may be accomplished by way of a computer program to instruct associated hardware, where the program may be stored on a computer readable storage medium. Wherein the computer readable storage medium is a magnetic disk, an optical disk, a read-only memory or a random access memory, etc.
The present invention is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention.
Claims (10)
1. The white light interference three-dimensional morphology resolving method is characterized by comprising the following steps of:
carrying out white light interference treatment on a sample to be detected in a preset scanning period to obtain a plurality of white light interference fringe images;
acquiring a time sequence interference signal of a target pixel point from the white light interference fringe image;
performing moving average filtering processing on the time sequence interference signals;
positioning a zero-order fringe position index and a light intensity value according to the filtered time sequence interference signal;
calculating the phase distribution of a tested sample based on a preset phase shift formula and the light intensity value;
and calculating the height information of the measured sample according to the calibrated space offset, the zero-order stripe position index and the phase distribution.
2. The method for resolving white light interference three-dimensional morphology according to claim 1, wherein the performing white light interference processing on the sample to be measured with a preset scanning period to obtain a plurality of white light interference fringe images includes:
setting a preset step length according to the equivalent wavelength of the interferometer, and performing interference sampling processing on the sample to be detected in a preset scanning period to obtain a white light interference time sequence image sequence;
the time sequence image sequence with the same preset scanning period comprises the white light interference fringe image and the interference fringe-free image.
3. The method of claim 1, wherein the obtaining the timing interference signal of the target pixel from the white light interference fringe image comprises:
performing differential processing on the white light interference fringe image according to a preset differential order to extract a plurality of time sequence interference signals of a plurality of pixel points;
and determining the time sequence interference signal of the target pixel point from the plurality of time sequence interference signals by a preset evaluation threshold value.
4. The method for resolving white light interference three-dimensional morphology according to claim 3, wherein the step of evaluating and screening out the time-series interference signals of the target pixel points meeting the requirements by using a preset evaluation threshold value comprises the following steps:
determining a plurality of preset data points according to the maximum value of the time sequence interference signal;
determining a pixel point energy evaluation value according to the sum of preset data points and the sum of time sequence interference signals;
and screening according to the pixel point energy evaluation value and the preset evaluation threshold value to obtain a time sequence interference signal of the target pixel point.
5. The method of claim 1, wherein said performing a moving average filtering process on said time-series interference signal comprises:
performing moving average filtering processing on the time sequence interference signals through a preset moving average model;
and performing Hilbert transform on the filtered time sequence interference signals to remove noise interference.
6. The method for resolving white light interferometry three-dimensional morphology according to claim 1, wherein the predetermined phase shift formula is:
；
wherein,φfor the phase distribution of the sample under test,I m representing the light intensity value at the position of the zero-order fringe of the time sequence interference signal of the measuring pixel point,I m+j is arranged in front of and behind the zero-order stripe position of the same pixel pointjThe light intensity value of the frame image.
7. The method according to claim 1, wherein calculating the height information of the sample to be measured from the calibrated spatial offset, the zero-order fringe position index, and the phase distribution comprises:
establishing a morphology conversion formula according to the calibrated spatial offset, the zero-order stripe position index and the phase distribution;
and calculating the height information of the tested sample based on the morphology conversion formula.
8. A white light interferometry three-dimensional morphology solver comprising:
the interference module is used for carrying out white light interference treatment on a sample to be detected in a preset scanning period to obtain a plurality of white light interference fringe images;
the signal acquisition module is used for acquiring time sequence interference signals of the target pixel points from the white light interference fringe images;
the filtering module is used for carrying out moving average filtering processing on the time sequence interference signals;
the positioning module is used for positioning the zero-order fringe position index and the light intensity value according to the filtered time sequence interference signal;
the phase calculation module is used for calculating the phase distribution of the tested sample based on a preset phase shift formula and the light intensity value;
and the height calculation module is used for calculating the height information of the tested sample according to the calibrated space offset, the zero-order stripe position index and the phase distribution.
9. A white light interference three-dimensional morphology resolving device is characterized by comprising a memory and a processor, wherein,
the memory is used for storing programs;
the processor, coupled to the memory, is configured to execute the program stored in the memory to implement the steps in the white light interferometry three-dimensional topography solving method according to any of the preceding claims 1 to 7.
10. A computer readable storage medium storing a computer readable program or instructions which, when executed by a processor, is capable of carrying out the steps of the white light interferometry three-dimensional topography solving method according to any of the preceding claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410277235.9A CN117870573B (en) | 2024-03-12 | 2024-03-12 | White light interference three-dimensional morphology resolving method, device, equipment and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410277235.9A CN117870573B (en) | 2024-03-12 | 2024-03-12 | White light interference three-dimensional morphology resolving method, device, equipment and storage medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117870573A true CN117870573A (en) | 2024-04-12 |
| CN117870573B CN117870573B (en) | 2024-05-28 |
Family
ID=90584921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410277235.9A Active CN117870573B (en) | 2024-03-12 | 2024-03-12 | White light interference three-dimensional morphology resolving method, device, equipment and storage medium |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117870573B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100087829A (en) * | 2009-01-29 | 2010-08-06 | 인하대학교 산학협력단 | Interference fringe signal filtering apparatus and method for image extract performance enhancing of white-light interferometer |
| CN101949692A (en) * | 2010-09-07 | 2011-01-19 | 天津大学 | Microstructure topography test system and method based on white light phase shift interferometry |
| US20110261347A1 (en) * | 2008-12-09 | 2011-10-27 | University Of Helsinki | Method for interferometric detection of surfaces |
| CN110223384A (en) * | 2019-06-27 | 2019-09-10 | 广东工业大学 | A kind of white light interference three-dimensional appearance method for reconstructing, device, system and storage medium |
| CN113091634A (en) * | 2021-03-01 | 2021-07-09 | 南京理工大学 | Rapid micro-morphology measuring method suitable for white light scanning interference |
| CN114088010A (en) * | 2021-11-18 | 2022-02-25 | 中国科学院长春光学精密机械与物理研究所 | Interference three-dimensional morphology resolving method |
| CN115046469A (en) * | 2022-05-20 | 2022-09-13 | 浙江大学 | Interference fringe envelope extraction method for optical fiber white light interference |
| CN116972771A (en) * | 2023-09-25 | 2023-10-31 | 板石智能科技(深圳)有限公司 | White light scanning interference three-dimensional reconstruction method and device, electronic equipment and storage medium |
-
2024
- 2024-03-12 CN CN202410277235.9A patent/CN117870573B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110261347A1 (en) * | 2008-12-09 | 2011-10-27 | University Of Helsinki | Method for interferometric detection of surfaces |
| KR20100087829A (en) * | 2009-01-29 | 2010-08-06 | 인하대학교 산학협력단 | Interference fringe signal filtering apparatus and method for image extract performance enhancing of white-light interferometer |
| CN101949692A (en) * | 2010-09-07 | 2011-01-19 | 天津大学 | Microstructure topography test system and method based on white light phase shift interferometry |
| CN110223384A (en) * | 2019-06-27 | 2019-09-10 | 广东工业大学 | A kind of white light interference three-dimensional appearance method for reconstructing, device, system and storage medium |
| CN113091634A (en) * | 2021-03-01 | 2021-07-09 | 南京理工大学 | Rapid micro-morphology measuring method suitable for white light scanning interference |
| CN114088010A (en) * | 2021-11-18 | 2022-02-25 | 中国科学院长春光学精密机械与物理研究所 | Interference three-dimensional morphology resolving method |
| CN115046469A (en) * | 2022-05-20 | 2022-09-13 | 浙江大学 | Interference fringe envelope extraction method for optical fiber white light interference |
| CN116972771A (en) * | 2023-09-25 | 2023-10-31 | 板石智能科技(深圳)有限公司 | White light scanning interference three-dimensional reconstruction method and device, electronic equipment and storage medium |
Non-Patent Citations (4)
| Title |
|---|
| 刘晨;陈磊;王军;韩志刚;师丽丽;: "利用白光扫描干涉测量表面微观形貌", 光电工程, vol. 38, no. 01, 31 January 2011 (2011-01-31) * |
| 姚东: "大视场白光干涉三维形貌测量关键技术研究", 中国博士学位论文全文数据库（信息科技辑）, 30 April 2022 (2022-04-30), pages 138 - 46 * |
| 张树;施玉书;高思田;李琪;李伟;黄鹭;舒慧;皮磊;李适;: "计量型白光干涉显微镜干涉图像处理技术", 计量学报, no. 1, 22 December 2017 (2017-12-22) * |
| 李慧鹏;谭朦曦;朱伟伟;郑晓;李皎;: "基于白光干涉测试技术的改进Carré相移算法", 光子学报, no. 06, 3 March 2016 (2016-03-03) * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117870573B (en) | 2024-05-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2827097B1 (en) | Phase distribution analysis method and device for fringe image using high-dimensional brightness information, and program therefor | |
| CN103399015B (en) | Pathological section scanner and slide glass platform positioning precision measuring method thereof and device | |
| CN106813596B (en) | A kind of self-calibration shadow Moire measuring three-dimensional profile method | |
| WO2005103610A1 (en) | Small displacement measuring method and instrument | |
| CN116972771B (en) | White light scanning interference three-dimensional reconstruction method and device, electronic equipment and storage medium | |
| Yang et al. | A monocular vision-based decoupling measurement method for plane motion orbits | |
| CN114993452B (en) | Structure micro-vibration measurement method and system based on broadband phase motion amplification | |
| CN114782451A (en) | Workpiece defect detection method and device, electronic equipment and readable storage medium | |
| CN111815580B (en) | Image edge recognition method and small module gear module detection method | |
| CN117870573B (en) | White light interference three-dimensional morphology resolving method, device, equipment and storage medium | |
| CN111964586A (en) | White light interference signal processing method based on random noise correction | |
| CN115685164A (en) | Three-dimensional laser imager working parameter testing system and method | |
| CN109781153B (en) | Physical parameter estimation method and device and electronic equipment | |
| CN101694376A (en) | Optical stripe sine evaluating method | |
| CN110298834B (en) | Correction method of pixel-level edge effect and terminal equipment | |
| JP2014203162A (en) | Inclination angle estimation device, mtf measuring apparatus, inclination angle estimation program and mtf measurement program | |
| CN111912356A (en) | Method and device for measuring three-dimensional surface shape of object based on L-K local optical flow | |
| CN114236181B (en) | AFM probe measuring method, device, control equipment and storage medium | |
| CN117870548B (en) | Method, device, equipment and medium for determining white light interference zero optical path difference position | |
| CN116402814B (en) | Vegetation index acquisition and vegetation remote sensing product authenticity verification method and device | |
| US20230358531A1 (en) | Calibration method for deflectometry method, for improving measurement accuracy | |
| CN107316039B (en) | Fork-shaped interference image feature extraction method based on principal component analysis method | |
| CN112665509B (en) | White light interferometry method for self-correcting scanning error | |
| CN114674240A (en) | Deformation measurement method and device, electronic equipment and storage medium | |
| KR20230064511A (en) | Apparatus and method for measuring dip coating shape using image analysis |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |