CN110298834B - Correction method of pixel-level edge effect and terminal equipment - Google Patents

Correction method of pixel-level edge effect and terminal equipment Download PDF

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CN110298834B
CN110298834B CN201910584994.9A CN201910584994A CN110298834B CN 110298834 B CN110298834 B CN 110298834B CN 201910584994 A CN201910584994 A CN 201910584994A CN 110298834 B CN110298834 B CN 110298834B
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CN110298834A (en
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梁法国
郑世棋
翟玉卫
韩伟
邹学锋
乔玉娥
李灏
丁晨
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CETC 13 Research Institute
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/006Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
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    • G06T2207/30164Workpiece; Machine component

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Abstract

The invention is suitable for the technical field of temperature detection of microelectronic devices, and provides a correction method of pixel-level edge effect and terminal equipment, wherein the method comprises the following steps: acquiring a plurality of images of a tested piece made of different materials; when the readings of the pixel points at the same positions on the preset line segments on different images are different, the nanometer displacement table on the heat reflection imaging temperature measuring device is controlled to move in the direction opposite to the moving direction of the pixel points until the readings of the pixel points at the same positions on the preset line segments on the different images are the same, so that the edge effect caused by the pixel level position change in the X, Y two directions can be corrected in an image processing mode, the high-temperature error and the low-temperature error caused by the position change of the measured piece are corrected, and the heat reflection temperature measuring accuracy can be improved.

Description

Correction method of pixel-level edge effect and terminal equipment
Technical Field
The invention belongs to the technical field of temperature detection of microelectronic devices, and particularly relates to a correction method of pixel-level edge effect and terminal equipment.
Background
When visible light irradiates on the surface of a certain material, the reflectivity of the material to the visible light changes along with the change of the temperature of the material. The change of the reflectivity of the material to visible light is in linear relation with the change of the temperature of the surface of the material, such as a formula
Figure BDA0002114261630000011
Wherein the content of the first and second substances,the delta R is the reflectivity variation; raverageIs the mean value of the reflectivity; delta T is the temperature variation of the material to be detected, and the unit is K; cTRCalibration coefficient for heat reflectivity, in K-1. As can be seen, CTREven if the same reflectance change amount Δ R is measured at different times, the calculated Δ T is necessarily different.
In general, a scientific research grade CCD camera is used as a detector of a heat reflection imaging temperature measuring device, and the CCD camera is an array detector consisting of a plurality of imaging units. For the heat reflection imaging temperature measuring device of the array detector, the corresponding material of the imaging unit and C are caused by thermal expansion, vibration and the likeTRThe abnormal result of the interface of different materials on the surface of the tested piece caused by the change, thermal expansion or vibration is generally called as the edge effect, however, the prior art does not provide a method for correcting the edge effect, which results in a great influence on the temperature measurement result of the tested piece.
Disclosure of Invention
In view of this, embodiments of the present invention provide a method for correcting a pixel level edge effect and a terminal device, so as to solve the problem in the prior art that the accuracy of a temperature measurement result of a measured object is low.
A first aspect of an embodiment of the present invention provides a method for correcting a pixel-level edge effect, including:
acquiring a plurality of images of a detected piece made of different materials; the multiple images are images of the measured piece shot by a detector on the heat reflection imaging temperature measuring device when fixed light intensity is applied to the measured piece;
and when the readings of the pixel points at the same positions on the preset line segments on different images are different, controlling a nanometer displacement platform on the heat reflection imaging temperature measuring device to move in the direction opposite to the moving direction of the pixel points until the readings of the pixel points at the same positions on the preset line segments on the different images are the same.
In one embodiment, the acquiring a plurality of images of a test piece made of different materials includes:
acquiring a first image of a measured piece made of different materials, and taking the first image as a reference image;
and continuously acquiring a plurality of subsequent images of the tested piece, and taking the subsequent images as comparison images.
In an embodiment, the preset line segment is a preset straight line segment, and the preset straight line segment intersects with a boundary line of different materials on the image.
In an embodiment, after the acquiring a plurality of images of the object composed of different materials, the method further includes:
extracting each pixel point on the preset straight line segment on the reference image; and extracting each pixel point on the preset straight line segment on the comparison image.
In an embodiment, when readings of pixel points at the same position on the preset line segments on different images are different, controlling the nano-displacement stage on the thermal reflection imaging temperature measuring device to move in a direction opposite to a moving direction of the pixel points until the readings of the pixel points at the same position on the preset line segments on the different images are the same includes:
when the first pixel point on the preset straight-line segment on the reference image is different from the pixel point reading of the same position on the preset straight-line segment on the comparison image, controlling a nanometer displacement table on a thermal reflection imaging temperature measuring device to move in the direction opposite to the pixel point moving direction until the first pixel point on the preset straight-line segment on the reference image is the same as the pixel point reading of the same position on the preset straight-line segment on the comparison image;
and the first pixel point is any pixel point on the preset straight line segment.
In an embodiment, when the first pixel point on the preset linear segment on the reference image is different from the reading of the pixel point at the same position on the preset linear segment on the comparison image, controlling the nano-displacement stage on the thermal reflection imaging temperature measurement device to move in the direction opposite to the moving direction of the pixel point until the first pixel point on the preset linear segment on the reference image is the same as the reading of the pixel point at the same position on the preset linear segment on the comparison image includes:
when the reading of a first pixel point on the preset straight line section on the reference image is different from the reading of a pixel point at the same position on the preset straight line section on the comparison image, determining the moving direction and the displacement of the measured piece according to the relative position of the measured piece and the detector;
controlling a nanometer displacement table on the thermal reflection imaging temperature measuring device to move in the opposite direction by the same displacement according to the moving direction and the displacement of the measured piece;
and continuously acquiring a new comparison image of the measured piece after the position of the nanometer displacement table moves, and comparing the new comparison image with the reference image until the reading of the first pixel point on the preset straight line section on the reference image is the same as the reading of the pixel point at the same position on the preset straight line section on the new comparison image, and ending the process.
A second aspect of the embodiments of the present invention provides a device for correcting a pixel-level edge effect, including:
the acquisition module is used for acquiring a plurality of images of the detected piece made of different materials; the multiple images are images of the measured piece shot by a detector on the heat reflection imaging temperature measuring device when fixed light intensity is applied to the measured piece;
and the processing module is used for controlling the nanometer displacement platform on the heat reflection imaging temperature measuring device to move in the direction opposite to the moving direction of the pixel points when the readings of the pixel points at the same positions on the preset line segments on different images are different until the readings of the pixel points at the same positions on the preset line segments on different images are the same.
In one embodiment, the preset line segment is a preset straight line segment, and the preset straight line segment intersects with boundary lines of different materials on the image;
the acquisition module is used for acquiring a first image of a detected piece made of different materials and taking the first image as a reference image; continuously acquiring a plurality of subsequent images of the tested piece, and taking the subsequent images as comparison images;
the device for correcting the pixel level edge effect further comprises: an extraction module;
the extraction module is used for extracting each pixel point on the preset straight line segment on the reference image; and extracting each pixel point on the preset straight line segment on the comparison image.
A third aspect of an embodiment of the present invention provides a terminal device, including: the image processing device comprises a memory, a processor and a computer program stored in the memory and capable of running on the processor, wherein the processor executes the computer program to realize the steps of the correction method of the pixel-level edge effect.
A fourth aspect of an embodiment of the present invention provides a computer-readable storage medium, including: the computer-readable storage medium stores a computer program which, when executed by a processor, implements the steps as described in the method for pixel-level edge effect correction.
According to the embodiment of the invention, a plurality of images of a detected piece made of different materials are obtained; when the readings of the pixel points at the same positions on the preset line segments on different images are different, the nanometer displacement table on the heat reflection imaging temperature measuring device is controlled to move in the direction opposite to the moving direction of the pixel points until the readings of the pixel points at the same positions on the preset line segments on the different images are the same, so that the edge effect caused by the pixel level position change in the X, Y two directions can be corrected in an image processing mode, the high-temperature error and the low-temperature error caused by the position change of the measured piece are corrected, and the heat reflection temperature measuring accuracy can be improved.
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In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
Fig. 1 is a schematic flow chart illustrating an implementation of a method for correcting a pixel-level edge effect according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a thermal reflection imaging temperature measuring device according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a preset line segment according to an embodiment of the present invention;
fig. 4 is a schematic view of reading pixel points of a reference image according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of pixel readings of a contrast image according to an embodiment of the present invention;
FIG. 6 is a diagram illustrating an exemplary apparatus for correcting pixel-level edge effects provided by an embodiment of the present invention;
FIG. 7 is a diagram illustrating an apparatus for correcting pixel-level edge effect according to another embodiment of the present invention;
fig. 8 is a schematic diagram of a terminal device according to an embodiment of the present invention.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular system structures, techniques, etc. in order to provide a thorough understanding of the embodiments of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
In order to explain the technical means of the present invention, the following description will be given by way of specific examples.
Fig. 1 is a schematic flow chart illustrating an implementation of a method for correcting a pixel level edge effect according to an embodiment of the present invention, which is described in detail below.
Step 101, acquiring a plurality of images of a tested piece made of different materials.
The images are the images of the measured piece shot by a detector on the heat reflection imaging temperature measuring device when fixed light intensity is applied to the measured piece.
Optionally, the measured piece is made of different materials, the obtained multiple images are multiple images corresponding to the measured piece of all the materials, that is, the measured piece on each image is made of multiple materials.
Optionally, as shown in fig. 2, in the thermoreflectance imaging temperature measuring device, the measured object made of different materials is stably placed on the high-precision temperature control assembly supported by the nano displacement table, a fixed light intensity is applied to the measured object, and a CCD camera is used as a detector to shoot images for the measured object.
Optionally, when the test is started, acquiring a first image of a tested piece made of different materials, and taking the first image as a reference image; and then continuously acquiring a plurality of subsequent images of the tested piece, and taking the subsequent images as comparison images.
Optionally, the preset line segment is a preset line segment, the preset line segment intersects boundary lines of different materials on the image, as shown in a schematic diagram of the preset line segment shown in fig. 3, a dotted line represents a boundary line between a material a and a material B forming the detected piece, the material a is represented by an oblique line frame, the material B is represented by a blank frame, and the line segment represents the preset line segment. The left and right sides of the preset line segment are made of different materials, so that the reflectivity of the preset line segment is different, and under the given light intensity, the values of the pixel points corresponding to the different materials on the preset line segment are different inevitably.
After a plurality of images of the tested piece made of different materials are obtained, all pixel points on preset straight-line segments on each comparison image can be sequentially extracted. Optionally, extracting each pixel point on the preset straight line segment on the reference image; and extracting each pixel point on the preset straight-line segment on the comparison image so as to judge whether the relative position of the detected piece and a detector arranged on the heat reflection imaging temperature measuring device changes or not through the reading of the pixel point, thereby determining whether the heat reflection imaging temperature measurement of the detected piece has the edge effect or not. The reading of each pixel point on the preset straight-line segment on the reference image shown in fig. 4 is shown by a histogram, the reading of each pixel point on the preset straight-line segment is shown by a horizontal coordinate, the reading of the detector is shown by a vertical coordinate, optionally, the reading of the detector can be the gray value of the pixel point, and also can be the color index value of the pixel point.
Step 102, when the readings of the pixel points at the same position on the preset line segments on different images are different, controlling a nanometer displacement platform on the thermal reflection imaging temperature measuring device to move in the direction opposite to the moving direction of the pixel points until the readings of the pixel points at the same position on the preset line segments on the different images are the same.
Optionally, step 102 may include: when the first pixel point on the preset straight-line segment on the reference image is different from the pixel point reading of the same position on the preset straight-line segment on the comparison image, controlling a nanometer displacement table on a thermal reflection imaging temperature measuring device to move in the direction opposite to the pixel point moving direction until the first pixel point on the preset straight-line segment on the reference image is the same as the pixel point reading of the same position on the preset straight-line segment on the comparison image; and the first pixel point is any pixel point on the preset straight line segment.
Optionally, step 102 may include: when the reading of a first pixel point on the preset straight line section on the reference image is different from the reading of a pixel point at the same position on the preset straight line section on the comparison image, determining the moving direction and the displacement of the measured piece according to the relative position of the measured piece and the detector; controlling a nanometer displacement table on the thermal reflection imaging temperature measuring device to move in the opposite direction by the same displacement according to the moving direction and the displacement of the measured piece; and continuously acquiring a new comparison image of the measured piece after the position of the nanometer displacement table moves, and comparing the new comparison image with the reference image until the reading of the first pixel point on the preset straight line section on the reference image is the same as the reading of the pixel point at the same position on the preset straight line section on the new comparison image, and ending the process.
Optionally, as shown in fig. 5, the readings of each pixel point on the preset straight line segment on the image are compared. From the left side, the boundary point of the two materials of the measured piece is changed from the 9 th point to the 10 th point, which means that the relative position of the measured piece and the detector is moved to the right, and the displacement is the size l corresponding to the 1 pixel point of the detector, namely the CCD camera, and the edge effect is inevitably caused. Therefore, the nanometer displacement stage on the thermal reflection imaging temperature measuring device is controlled to move in the opposite direction according to the moving direction and the displacement obtained by image processing. Taking fig. 4 and fig. 5 as an example, the displacement of the nano-displacement stage is controlled to move to the left by l, so that the edge effect can be eliminated, and the heat reflection temperature measurement result is more accurate.
According to the correction method of the pixel level edge effect, the edge effect caused by the pixel level position change in the X, Y two directions is corrected in an image processing mode, so that a high-temperature error and a low-temperature error caused by the position change of a detected piece are corrected, and the heat reflection temperature measurement accuracy can be improved.
It should be understood that, the sequence numbers of the steps in the foregoing embodiments do not imply an execution sequence, and the execution sequence of each process should be determined by its function and inherent logic, and should not constitute any limitation to the implementation process of the embodiments of the present invention.
Fig. 6 shows an exemplary diagram of a correction apparatus for pixel level edge effect according to an embodiment of the present invention, which corresponds to the correction method for pixel level edge effect described in the above embodiments. As shown in fig. 6, the apparatus may include: an acquisition module 601 and a processing module 602.
The acquisition module 601 is used for acquiring a plurality of images of a detected piece made of different materials; the multiple images are images of the measured piece shot by a detector on the heat reflection imaging temperature measuring device when fixed light intensity is applied to the measured piece;
the processing module 602 is configured to, when readings of pixel points at the same position on preset line segments on different images are different, control the nano-displacement stage on the thermal reflection imaging temperature measurement device to move in a direction opposite to a moving direction of the pixel points until the readings of the pixel points at the same position on the preset line segments on the different images are the same.
Optionally, the obtaining module 601 may be configured to obtain a first image of a measured piece made of different materials, and use the first image as a reference image; and continuously acquiring a plurality of subsequent images of the tested piece, and taking the subsequent images as comparison images.
Optionally, the preset line segment is a preset straight line segment, and the preset straight line segment intersects with boundary lines of different materials on the image.
Optionally, as shown in fig. 7, after the obtaining module 601 obtains a plurality of images of the measured object made of different materials, the device for correcting the pixel-level edge effect further includes: an extraction module 603;
the extracting module 603 is configured to extract each pixel point on the preset straight line segment on the reference image; and extracting each pixel point on the preset straight line segment on the comparison image.
Optionally, the processing module 602 may be configured to control a nano displacement stage on the thermal reflection imaging temperature measurement device to move in a direction opposite to a moving direction of a pixel point when a first pixel point on the preset linear segment on the reference image is different from a reading of a pixel point at the same position on the preset linear segment on the comparison image, until the first pixel point on the preset linear segment on the reference image is the same as the reading of the pixel point at the same position on the preset linear segment on the comparison image;
and the first pixel point is any pixel point on the preset straight line segment.
Optionally, the processing module 602 may be configured to determine, when a first pixel point on the preset straight line segment on the reference image is different from a pixel point reading at the same position on the preset straight line segment on the comparison image, a moving direction and a moving amount of the detected object according to a relative position of the detected object and the detector; controlling a nanometer displacement table on the thermal reflection imaging temperature measuring device to move in the opposite direction by the same displacement according to the moving direction and the displacement of the measured piece; and continuously acquiring a new comparison image of the measured piece after the position of the nanometer displacement table moves, and comparing the new comparison image with the reference image until the reading of the first pixel point on the preset straight line section on the reference image is the same as the reading of the pixel point at the same position on the preset straight line section on the new comparison image, and ending the process.
The correction device for the pixel-level edge effect obtains a plurality of images of a detected piece made of different materials through the obtaining module; and then when the readings of the pixel points at the same position on the preset line segments on different images are different, the processing module controls the nanometer displacement platform on the heat reflection imaging temperature measuring device to move in the direction opposite to the moving direction of the pixel points until the readings of the pixel points at the same position on the preset line segments on the different images are the same. The edge effect caused by the position change of the pixel level in the two directions of X, Y is corrected in an image processing mode, so that the high-temperature error and the low-temperature error caused by the position change of the measured piece are corrected, and the heat reflection temperature measurement accuracy can be improved.
Fig. 8 is a schematic diagram of a terminal device according to an embodiment of the present invention. As shown in fig. 8, the terminal apparatus 800 of this embodiment includes: a processor 801, a memory 802 and a computer program 803, such as a pixel level edge effect correction program, stored in the memory 802 and executable on the processor 801. The processor 801 executes the computer program 803 to implement the steps in the embodiment of the pixel-level edge effect correction method, such as the steps 101 to 102 shown in fig. 1, and the processor 801 executes the computer program 803 to implement the functions of the modules in the embodiments of the apparatuses, such as the modules 601 to 602 shown in fig. 6.
Illustratively, the computer program 803 may be partitioned into one or more program modules that are stored in the memory 802 and executed by the processor 801 to implement the present invention. The one or more program modules may be a series of computer program instruction segments capable of performing specific functions for describing the execution process of the computer program 803 in the pixel level edge effect correction apparatus or terminal device 800. For example, the computer program 803 may be divided into an obtaining module 601 and a processing module 602, and specific functions of the modules are shown in fig. 6, which are not described herein again.
The terminal device 800 may be a desktop computer, a notebook, a palm computer, a cloud server, or other computing devices. The terminal device may include, but is not limited to, a processor 801, a memory 802. Those skilled in the art will appreciate that fig. 8 is merely an example of a terminal device 800 and does not constitute a limitation of terminal device 800 and may include more or fewer components than shown, or some components may be combined, or different components, e.g., the terminal device may also include input-output devices, network access devices, buses, etc.
The Processor 801 may be a Central Processing Unit (CPU), other general purpose Processor, a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), an off-the-shelf Programmable Gate Array (FPGA) or other Programmable logic device, discrete Gate or transistor logic, discrete hardware components, etc. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like.
The storage 802 may be an internal storage unit of the terminal device 800, such as a hard disk or a memory of the terminal device 800. The memory 802 may also be an external storage device of the terminal device 800, such as a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) Card, a Flash memory Card (Flash Card), and the like provided on the terminal device 800. Further, the memory 802 may also include both an internal storage unit and an external storage device of the terminal apparatus 800. The memory 802 is used for storing the computer programs and other programs and data required by the terminal device 800. The memory 802 may also be used to temporarily store data that has been output or is to be output.
It will be apparent to those skilled in the art that, for convenience and brevity of description, only the above-mentioned division of the functional units and modules is illustrated, and in practical applications, the above-mentioned function distribution may be performed by different functional units and modules according to needs, that is, the internal structure of the apparatus is divided into different functional units or modules to perform all or part of the above-mentioned functions. Each functional unit and module in the embodiments may be integrated in one processing unit, or each unit may exist alone physically, or two or more units are integrated in one unit, and the integrated unit may be implemented in a form of hardware, or in a form of software functional unit. In addition, specific names of the functional units and modules are only for convenience of distinguishing from each other, and are not used for limiting the protection scope of the present application. The specific working processes of the units and modules in the system may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and reference may be made to the related descriptions of other embodiments for parts that are not described or illustrated in a certain embodiment.
Those of ordinary skill in the art will appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware or combinations of computer software and electronic hardware. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the implementation. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.
In the embodiments provided in the present invention, it should be understood that the disclosed apparatus/terminal device and method may be implemented in other ways. For example, the above-described embodiments of the apparatus/terminal device are merely illustrative, and for example, the division of the modules or units is only one logical division, and there may be other divisions when actually implemented, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The integrated modules/units, if implemented in the form of software functional units and sold or used as separate products, may be stored in a computer readable storage medium. Based on such understanding, all or part of the flow of the method according to the embodiments of the present invention may also be implemented by a computer program, which may be stored in a computer-readable storage medium, and when the computer program is executed by a processor, the steps of the method embodiments may be implemented. . Wherein the computer program comprises computer program code, which may be in the form of source code, object code, an executable file or some intermediate form, etc. The computer-readable medium may include: any entity or device capable of carrying the computer program code, recording medium, usb disk, removable hard disk, magnetic disk, optical disk, computer Memory, Read-Only Memory (ROM), Random Access Memory (RAM), electrical carrier wave signals, telecommunications signals, software distribution medium, and the like. It should be noted that the computer readable medium may contain content that is subject to appropriate increase or decrease as required by legislation and patent practice in jurisdictions, for example, in some jurisdictions, computer readable media does not include electrical carrier signals and telecommunications signals as is required by legislation and patent practice.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present invention, and are intended to be included within the scope of the present invention.

Claims (6)

1. A method for correcting pixel level edge effect, comprising:
acquiring a plurality of images of a test piece composed of different materials, comprising: acquiring a first image of a measured piece made of different materials, and taking the first image as a reference image; continuously acquiring a plurality of subsequent images of the tested piece, and taking the subsequent images as comparison images; the multiple images are images of the measured piece shot by a detector on the heat reflection imaging temperature measuring device when fixed light intensity is applied to the measured piece;
when the readings of pixel points at the same positions on preset line segments on different images are different, controlling a nanometer displacement table on a heat reflection imaging temperature measuring device to move in the direction opposite to the moving direction of the pixel points until the readings of the pixel points at the same positions on the preset line segments on the different images are the same, wherein the preset line segments are preset straight line segments, and the preset straight line segments are intersected with boundary lines of different materials on the images; the method comprises the following steps:
when the reading of a first pixel point on the preset straight line section on the reference image is different from the reading of a pixel point at the same position on the preset straight line section on the comparison image, determining the moving direction and the displacement of the measured piece according to the relative position of the measured piece and the detector;
controlling a nanometer displacement table on the thermal reflection imaging temperature measuring device to move in the opposite direction by the same displacement according to the moving direction and the displacement of the measured piece;
and continuously acquiring a new comparison image of the measured piece after the position of the nanometer displacement table moves, and comparing the new comparison image with the reference image until the reading of the first pixel point on the preset straight line section on the reference image is the same as the reading of the pixel point at the same position on the preset straight line section on the new comparison image, and ending the process.
2. The method for correcting pixel level edge effect according to claim 1, further comprising, after acquiring a plurality of images of a test piece made of different materials:
extracting each pixel point on the preset straight line segment on the reference image; and extracting each pixel point on the preset straight line segment on the comparison image.
3. An apparatus for correcting pixel-level edge effects, comprising:
the acquisition module is used for acquiring a plurality of images of the detected piece made of different materials; the multiple images are images of the measured piece shot by a detector on the heat reflection imaging temperature measuring device when fixed light intensity is applied to the measured piece; the acquisition module is used for acquiring a first image of a detected piece made of different materials and taking the first image as a reference image; continuously acquiring a plurality of subsequent images of the tested piece, and taking the subsequent images as comparison images;
the processing module is used for controlling the nanometer displacement table on the thermal reflection imaging temperature measuring device to move in the direction opposite to the moving direction of the pixel points when the readings of the pixel points at the same positions on the preset line segments on different images are different until the readings of the pixel points at the same positions on the preset line segments on the different images are the same, the preset line segments are preset straight line segments, and the preset straight line segments are intersected with boundary lines of different materials on the images; the processing module is used for determining the moving direction and the displacement of the measured piece according to the relative position of the measured piece and the detector when the reading of a first pixel point on the preset straight line section on the reference image is different from the reading of a pixel point at the same position on the preset straight line section on the comparison image;
controlling a nanometer displacement table on the thermal reflection imaging temperature measuring device to move in the opposite direction by the same displacement according to the moving direction and the displacement of the measured piece;
and continuously acquiring a new comparison image of the measured piece after the position of the nanometer displacement table moves, and comparing the new comparison image with the reference image until the reading of the first pixel point on the preset straight line section on the reference image is the same as the reading of the pixel point at the same position on the preset straight line section on the new comparison image, and ending the process.
4. The pixel-level edge effect correction apparatus according to claim 3,
the device for correcting the pixel level edge effect further comprises: an extraction module;
the extraction module is used for extracting each pixel point on the preset straight line segment on the reference image; and extracting each pixel point on the preset straight line segment on the comparison image.
5. A terminal device comprising a memory, a processor and a computer program stored in the memory and executable on the processor, characterized in that the processor implements the steps of the method according to any of claims 1 to 2 when executing the computer program.
6. A computer-readable storage medium, in which a computer program is stored which, when being executed by a processor, carries out the steps of the method according to any one of claims 1 to 2.
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