CN109163672B - Micro-topography measuring method based on white light interference zero-optical-path-difference position pickup algorithm - Google Patents
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Abstract
本发明提供一种基于白光干涉零光程差位置拾取算法的微观形貌测量方法。一种基于白光干涉零光程差位置拾取算法的微观形貌测量方法,其中,包括如下步骤:S1.获取白光干涉模板曲线;S2.垂直扫描被测物体,采集干涉条纹,获取采样点;S3.用重心法或极值法快速粗定位零光程差点;S4.确定搜索范围,取零光程差点周围一定范围内若干个采样点作为待匹配点;S5.用待匹配点与模板曲线在搜索范围内进行匹配,得到精定位的零光程差点;S6.根据零光程差与形貌高度的相关关系得到精确的物体表面形貌的相对高度,进而重建被测物体的3D形貌。本发明算法简单,速度快,精度高,抗噪能力较强。
The invention provides a micro-topography measurement method based on a white light interference zero optical path difference position picking algorithm. A method for measuring microscopic topography based on a white light interference zero optical path difference position picking algorithm, comprising the following steps: S1. Obtaining a white light interference template curve; S2. Scanning a measured object vertically, collecting interference fringes, and obtaining sampling points; S3 .Use the center of gravity method or the extreme value method to quickly and roughly locate the zero optical path difference point; S4. Determine the search range, and take several sampling points within a certain range around the zero optical path difference point as the points to be matched; S5. Use the point to be matched and the template curve in Match within the search range to obtain the zero optical path difference point for precise positioning; S6. Obtain the relative height of the precise surface topography of the object according to the correlation between the zero optical path difference and the topography height, and then reconstruct the 3D topography of the measured object. The algorithm of the invention is simple, the speed is fast, the precision is high, and the anti-noise ability is strong.
Description
技术领域technical field
本发明涉及精密光学测量工程技术领域,更具体地,涉及一种基于白光干涉零光程差位置拾取算法的微观形貌测量方法。The invention relates to the technical field of precision optical measurement engineering, and more particularly, to a micro-topography measurement method based on a white light interference zero optical path difference position picking algorithm.
背景技术Background technique
物体表面的微观形貌很大程度上影响其质量和使用性能。随着超精密加工技术的不断发展,相应的超精密检测技术显得日渐重要。白光干涉测量技术是其中一种非常重要的非接触式表面微观形貌光学测量技术,它解决了激光干涉仪当被测表面不连续高度跃变超过四分之一波长时的相位模糊问题。白光干涉测量的基本原理为:光源发出的光经过光路一部分到达垂直扫描平台上的被测物体上后发生反射作为测量光,一部分光经过光路到达参考镜后反射作为参考光。两束反射光汇聚并经过分光镜,由CCD相机接收。当垂直扫描平台上下扫描使得测量光和参考光的光程差小于光源相干长度时,两束光发生干涉产生白光干涉条纹。当测量光和参考光的光程差等于零时,即零光程差位置,干涉信号的强度达到最大。零光程差位置反映了物体高度的信息,即定位零光程差位置即可重建物体的3D形貌。因此,通过白光干涉信号处理算法精确定位零光程差位置,是白光干涉测量技术的一个关键步骤。当其他因素相同的情况下,白光干涉信号处理算法直接决定了零光程差位置的定位精度和速度,进而决定了重建物体3D形貌的精度和速度。The microscopic topography of an object's surface greatly affects its quality and performance. With the continuous development of ultra-precision machining technology, the corresponding ultra-precision detection technology becomes increasingly important. White light interferometry is one of the most important non-contact surface micro-topography optical measurement technologies. It solves the phase ambiguity problem of laser interferometers when the measured surface discontinuity height jumps beyond a quarter wavelength. The basic principle of white light interferometry is as follows: the light emitted by the light source reaches the measured object on the vertical scanning platform through a part of the optical path, and then is reflected as the measurement light, and a part of the light passes through the optical path to the reference mirror and is reflected as the reference light. The two beams of reflected light converge and pass through the beam splitter, and are received by the CCD camera. When the vertical scanning platform scans up and down so that the optical path difference between the measurement light and the reference light is less than the coherence length of the light source, the two beams of light interfere to produce white light interference fringes. When the optical path difference between the measurement light and the reference light is equal to zero, that is, the zero optical path difference position, the intensity of the interference signal reaches the maximum. The zero optical path difference position reflects the information of the height of the object, that is, the 3D shape of the object can be reconstructed by locating the zero optical path difference position. Therefore, it is a key step in the white light interferometry technique to precisely locate the zero optical path difference position through the white light interference signal processing algorithm. When other factors are the same, the white light interference signal processing algorithm directly determines the positioning accuracy and speed of the zero optical path difference position, which in turn determines the accuracy and speed of reconstructing the 3D topography of the object.
目前,白光干涉信号处理算法主要有:极值法、重心法、包络曲线拟合法、相移法、空间频域法等。极值法直接利用极大光强值处作为零光程差点,非常简单快速,精度主要由扫描步距决定,同时易受到噪声影响,导致精度较差;重心法计算简单,速度快,但同时也易受噪声的影响,精度不高;白光相移法精度高于极值法和重心法,低于包络曲线拟合法和空间频域法,运算速度适中;包络曲线拟合法有Fourier变换滤波法,Hilbert变换法、小波变换法和直接二次多项式拟合法等方法,总体上来说精度都较高,但运算量较大,耗时长,难以满足在线测量的要求;空间频域法有较高的精度,但需要进行傅里叶变换和最小二乘拟合,运算量较大。At present, the white light interference signal processing algorithms mainly include: extreme value method, center of gravity method, envelope curve fitting method, phase shift method, spatial frequency domain method, etc. The extreme value method directly uses the maximum light intensity value as the zero optical path difference, which is very simple and fast. The accuracy is mainly determined by the scanning step distance, and it is easily affected by noise, resulting in poor accuracy; the center of gravity method is simple to calculate and fast, but at the same time It is also easily affected by noise, and the accuracy is not high; the accuracy of the white light phase shift method is higher than that of the extreme value method and the center of gravity method, but lower than that of the envelope curve fitting method and the spatial frequency domain method, and the operation speed is moderate; the envelope curve fitting method has Fourier transform The filtering method, the Hilbert transform method, the wavelet transform method, and the direct quadratic polynomial fitting method have high accuracy in general, but the computational load is large and the time consuming is long, which is difficult to meet the requirements of online measurement; the spatial frequency domain method has relatively high accuracy. High precision, but requires Fourier transform and least squares fitting, which requires a large amount of computation.
因此,研究能够快速、精确定位零光程差位置的白光干涉信号处理算法重建微观三维形貌,对超精密检测具有重要意义。Therefore, it is of great significance for ultra-precision detection to study the white light interference signal processing algorithm that can quickly and accurately locate the zero optical path difference position to reconstruct the microscopic three-dimensional topography.
发明内容SUMMARY OF THE INVENTION
本发明为克服上述现有技术所述的至少一种缺陷,提供一种基于白光干涉零光程差位置拾取算法的微观形貌测量方法。本发明算法简单,速度快,精度高,抗噪能力较强。In order to overcome at least one of the above-mentioned defects in the prior art, the present invention provides a micro-topography measurement method based on a white light interference zero optical path difference position pick-up algorithm. The algorithm of the invention is simple, the speed is fast, the precision is high, and the anti-noise ability is strong.
为解决上述技术问题,本发明采用的技术方案是:一种基于白光干涉零光程差位置拾取算法的微观形貌测量方法,其中,包括如下步骤:In order to solve the above-mentioned technical problems, the technical solution adopted in the present invention is: a micro-topography measurement method based on a white light interference zero optical path difference position pick-up algorithm, which includes the following steps:
S1.获取白光干涉模板曲线;S1. Obtain the white light interference template curve;
S2.垂直扫描被测物体,采集干涉条纹,获取采样点;S2. Vertically scan the measured object, collect interference fringes, and obtain sampling points;
S3.用重心法或极值法快速粗定位零光程差点;S3. Use the center of gravity method or the extreme value method to quickly and roughly locate the zero optical path difference;
S4.确定搜索范围,取零光程差点周围一定范围内若干个采样点作为待匹配点;S4. Determine the search range, and take several sampling points within a certain range around the zero optical path difference point as the points to be matched;
S5.用待匹配点与模板曲线在搜索范围内进行匹配,得到精定位的零光程差点;S5. Use the point to be matched and the template curve to match within the search range to obtain the zero optical path difference point for precise positioning;
S6.根据零光程差与形貌高度的相关关系得到精确的物体表面形貌的相对高度,进而重建被测物体的3D形貌。S6. Obtain an accurate relative height of the surface topography of the object according to the correlation between the zero optical path difference and the topography height, and then reconstruct the 3D topography of the measured object.
进一步的,所述步骤S1中,采用垂直扫描平台先以一定步长进行垂直扫描,获得密集的采样点,对采样点进行白光干涉曲线拟合,获取白光干涉模板曲线。Further, in the step S1, a vertical scanning platform is used to first perform vertical scanning with a certain step size to obtain dense sampling points, and white light interference curve fitting is performed on the sampling points to obtain a white light interference template curve.
本发明中,也可通过白光干涉理论分析,根据系统参数等多种方法得到白光干涉模板曲线。而且,拟合的白光干涉模板曲线表达式也有多种不同形式。In the present invention, the white light interference template curve can also be obtained through the theoretical analysis of white light interference and according to various methods such as system parameters. Moreover, there are many different forms of the fitted white light interference template curve expression.
本发明中,当白光干涉系统硬件确定情况下,即包括光源和物镜孔径数值确定情况下,白光干涉强度曲线的具体形状是能被确定的或被估计的,因此本发明中拟合的白光干涉模板曲线表达式可为:In the present invention, when the hardware of the white light interference system is determined, that is, the numerical value of the light source and the aperture of the objective lens are determined, the specific shape of the white light interference intensity curve can be determined or estimated. Therefore, the fitted white light interference in the present invention Template curve expressions can be:
式中Ib为背景光强,γ为条纹对比度,经过拟合可确定这两个参数;lc和λ0分别为光源的相干长度和中心波长,由光源确定;z为采样点位置,I(z)为对应光强值,为已知量;h0为零光程差位置,作为唯一变量。where I b is the background light intensity, γ is the fringe contrast, these two parameters can be determined by fitting; lc and λ 0 are the coherence length and center wavelength of the light source, respectively, determined by the light source; z is the sampling point position, I (z) is the corresponding light intensity value, which is a known quantity; h 0 is the position of zero optical path difference, as the only variable.
进一步的,所述步骤S2中,将被测物体置于垂直扫描平台进行等步长扫描,采用CCD采集干涉条纹,CCD每个像素得到一系列的采样点。Further, in the step S2, the object to be measured is placed on a vertical scanning platform for equal-step scanning, and a CCD is used to collect interference fringes, and each pixel of the CCD obtains a series of sampling points.
进一步的,所述步骤S3中,粗定位零光程差点记为N0;所述步骤S4中,根据N0确定匹配搜索范围为N0±Δ,取N0周围一定范围内的m个采样点作为待匹配点,其位置为z,对应的光强值为Iz。Further, in the step S3, the rough positioning zero optical path difference point is denoted as N 0 ; in the step S4, the matching search range is determined as N 0 ±Δ according to N 0 , and m samples within a certain range around N 0 are taken. The point is used as the point to be matched, its position is z, and the corresponding light intensity value is I z .
进一步的,所述步骤S5中,初设模板曲线的变量h0=N0-Δ,代入待匹配点的位置z到白光干涉模板曲线中,可得到模板曲线在z位置的白光干涉强度值I(z)。将I(z)与Iz作差并求绝对值得到残差绝对值,则m对点的残差绝对值之和为:ε=∑|I(z)-Iz|,改变模板曲线变量h0,满足N0-Δ≤h0≤N0+Δ,当残差绝对值之和ε值最小时,对应的h0即为所求的精定位的零光程差位置。Further, in the step S5, the variable h 0 =N 0 -Δ of the template curve is initially set, and the position z of the point to be matched is substituted into the white light interference template curve, and the white light interference intensity value I of the template curve at the z position can be obtained. (z). Difference between I(z) and I z and find the absolute value to get the absolute value of residual, then the sum of the absolute value of residual of m pairs of points is: ε=∑|I(z)-I z |, change the template curve variable h 0 , which satisfies N 0 -Δ≤h 0 ≤N 0 +Δ, when the sum of the absolute values of the residuals is the smallest, the corresponding h 0 is the zero optical path difference position of the precise positioning.
与现有技术相比,本发明的有益效果:Compared with the prior art, the beneficial effects of the present invention:
本发明充分利用了极值法或重心法算法简单快速的特点,提高模板匹配速度,进而使模板匹配法具有高的运算速度。The invention makes full use of the simple and fast algorithm of the extreme value method or the center of gravity method, and improves the template matching speed, so that the template matching method has a high operation speed.
本发明充分利用白光干涉信号曲线形状的可确定性或可估计性,用采样点与模板曲线进行匹配,达到了高精度的三维形貌重建的目的。The invention makes full use of the determinability or estimability of the shape of the white light interference signal curve, matches the sampling point with the template curve, and achieves the purpose of high-precision three-dimensional topography reconstruction.
本发明能在垂直扫描平台以较大步距进行扫描时仍保持较高的精度,因此可加速扫描进程。The present invention can still maintain high precision when the vertical scanning platform scans with a larger step distance, so the scanning process can be accelerated.
本发明通过结合粗定位与精定位两步,算法简单,速度快,精度高,抗噪能力较强。By combining two steps of rough positioning and fine positioning, the invention has simple algorithm, high speed, high precision and strong anti-noise ability.
附图说明Description of drawings
图1是本发明的工作原理流程图。FIG. 1 is a flow chart of the working principle of the present invention.
图2是本发明中预先获取到的白光干涉模板曲线图。FIG. 2 is a graph of a white light interference template obtained in advance in the present invention.
图3是本发明中扫描平台垂直等步长扫描的采样点与重心法或极值法粗定位示意图。FIG. 3 is a schematic diagram of the rough positioning of the sampling point and the center of gravity method or the extreme value method in the vertical equal-step scanning of the scanning platform in the present invention.
图4是本发明中搜索范围与待匹配采样点示意图。FIG. 4 is a schematic diagram of a search range and a sampling point to be matched in the present invention.
图5是本发明中模板曲线与待匹配采样点匹配过程示意图。FIG. 5 is a schematic diagram of the matching process between the template curve and the sampling point to be matched in the present invention.
图6是本发明中模板曲线与待匹配采样点匹配完成示意图。FIG. 6 is a schematic diagram of the completion of the matching between the template curve and the sampling point to be matched in the present invention.
具体实施方式Detailed ways
附图仅用于示例性说明,不能理解为对本专利的限制;为了更好说明本实施例,附图某些部件会有省略、放大或缩小,并不代表实际产品的尺寸;对于本领域技术人员来说,附图中某些公知结构及其说明可能省略是可以理解的。附图中描述位置关系仅用于示例性说明,不能理解为对本专利的限制。The accompanying drawings are for illustrative purposes only, and should not be construed as limitations on this patent; in order to better illustrate the present embodiment, some parts of the accompanying drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art It is understandable to the artisan that certain well-known structures and descriptions thereof may be omitted from the drawings. The positional relationships described in the drawings are only for exemplary illustration, and should not be construed as a limitation on the present patent.
如图1所示,一种基于白光干涉零光程差位置拾取算法的微观形貌测量方法,其中,包括如下步骤:As shown in Figure 1, a micro-topography measurement method based on a white light interference zero optical path difference position picking algorithm, which includes the following steps:
S1.获取白光干涉模板曲线。具体方法如下:采用垂直扫描平台先以一定步长进行垂直扫描,获得密集的采样点,对采样点进行白光干涉曲线拟合,获取白光干涉模板曲线,如图2所示。当白光干涉系统硬件确定情况下,即包括光源和物镜孔径数值确定情况下,白光干涉强度曲线的具体形状是能被确定的或被估计的,因此本实施例中拟合的白光干涉模板曲线表达式可为:S1. Obtain a white light interference template curve. The specific method is as follows: use a vertical scanning platform to perform vertical scanning with a certain step size to obtain dense sampling points, and perform white light interference curve fitting on the sampling points to obtain the white light interference template curve, as shown in Figure 2. When the hardware of the white light interference system is determined, that is, the light source and the aperture of the objective lens are determined, the specific shape of the white light interference intensity curve can be determined or estimated. Therefore, the fitted white light interference template curve in this embodiment expresses The formula can be:
式中Ib为背景光强,γ为条纹对比度,经过拟合可确定这两个参数;lc和λ0分别为光源的相干长度和中心波长,由光源确定;z为采样点位置,I(z)为对应光强值,为已知量;h0为零光程差位置,作为唯一变量。where I b is the background light intensity, γ is the fringe contrast, these two parameters can be determined by fitting; lc and λ 0 are the coherence length and center wavelength of the light source, respectively, determined by the light source; z is the sampling point position, I (z) is the corresponding light intensity value, which is a known quantity; h 0 is the position of zero optical path difference, as the only variable.
本实施例中,也可通过白光干涉理论分析,根据系统参数等多种方法得到白光干涉模板曲线。而且,拟合的白光干涉模板曲线表达式也有多种不同形式。In this embodiment, the white light interference template curve can also be obtained through the theoretical analysis of white light interference and according to various methods such as system parameters. Moreover, there are many different forms of the fitted white light interference template curve expression.
S2.垂直扫描被测物体,采集干涉条纹,获取采样点;具体方法如下:将被测物体置于垂直扫描平台进行等步长扫描,采用CCD采集干涉条纹,CCD每个像素得到一系列的采样点,如图3所示。S2. Vertically scan the measured object, collect interference fringes, and obtain sampling points; the specific method is as follows: place the measured object on a vertical scanning platform for equal-step scanning, use CCD to collect interference fringes, and each pixel of the CCD obtains a series of sampling points point, as shown in Figure 3.
S3.用重心法或极值法快速粗定位零光程差点,粗定位零光程差点记为N0,如图3所示。S3. Use the center of gravity method or the extreme value method to quickly and roughly locate the zero optical path difference point, and the rough positioning zero optical path difference point is recorded as N 0 , as shown in FIG. 3 .
S4.确定搜索范围,取零光程差点周围一定范围内若干个采样点作为待匹配点;具体方法如下:根据N0确定匹配搜索范围为N0±Δ,取N0周围一定范围内的m个采样点作为待匹配点,其位置为z,对应的光强值为Iz,如图4所示。S4. Determine the search range, and take a number of sampling points within a certain range around the zero optical path difference point as the points to be matched; the specific method is as follows: determine the matching search range as N 0 ±Δ according to N 0 , and take m within a certain range around N 0 Each sampling point is used as the point to be matched, its position is z, and the corresponding light intensity value is I z , as shown in FIG. 4 .
S5.用待匹配点与模板曲线在搜索范围内进行匹配,得到精定位的零光程差点;具体方法如下:初设模板曲线的变量h0=N0-Δ,代入待匹配点的位置z到白光干涉模板曲线中,可得到模板曲线在z位置的白光干涉强度值I(z)。将I(z)与Iz作差并求绝对值得到残差绝对值,则m对点的残差绝对值之和为:ε=∑|I(z)-Iz|,改变模板曲线变量h0,满足N0-Δ≤h0≤N0+Δ,使得曲线在搜索范围内移动,如图5所示。当残差绝对值之和ε值最小时,对应的h0即为所求的精定位的零光程差位置,如图6所示。S5. Use the point to be matched and the template curve to match within the search range to obtain the zero optical path difference point of precise positioning; the specific method is as follows: initially set the variable h 0 =N 0 -Δ of the template curve, and substitute the position z of the point to be matched To the white light interference template curve, the white light interference intensity value I(z) at the z position of the template curve can be obtained. Difference between I(z) and I z and find the absolute value to get the absolute value of residual, then the sum of the absolute value of residual of m pairs of points is: ε=∑|I(z)-I z |, change the template curve variable h 0 , satisfies N 0 -Δ≤h 0 ≤N 0 +Δ, so that the curve moves within the search range, as shown in FIG. 5 . When the sum of the absolute values of the residuals is the smallest, the corresponding h 0 is the zero optical path difference position of the precise positioning, as shown in Figure 6.
S6.根据零光程差与形貌高度的相关关系得到精确的物体表面形貌的相对高度,进而重建被测物体的3D形貌。S6. Obtain an accurate relative height of the surface topography of the object according to the correlation between the zero optical path difference and the topography height, and then reconstruct the 3D topography of the measured object.
显然,本发明的上述实施例仅仅是为了清楚地说明本发明所作的举例,而并非是对本发明的实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明权利要求的保护范围之内。Obviously, the above-mentioned embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those of ordinary skill in the art, changes or modifications in other different forms can also be made on the basis of the above description. There is no need and cannot be exhaustive of all implementations here. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.
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