CN108680108B - Triangle micro-displacement measuring device and method are interfered in line laser phase shift - Google Patents
Triangle micro-displacement measuring device and method are interfered in line laser phase shift Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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Abstract
Triangle micro-displacement measuring device and method are interfered in line laser phase shift, belong to ultra precise measurement technical field.The present invention combines Phase-Shifting Interferometry and laser triangulation technology, to realize large scale and high accuracy microdisplacement measurement.The present invention program is according to phase shift principle of interference and laser triangulation principle, being expanded using shaping becomes line collimated light beam for light source output, four tunnels successively 90 ° of phase shift of linear interference light is obtained by the way that grating beam splitting is synchronous with four-quadrant analyzer group, isochrone laser triangulation system obtains the thick measurement data of displacement using partially diffusing, when line laser triangulation worst error is less than 1/4 interference signal period, precise displacement value can be obtained by certain resolving.Measurement accuracy of the present invention is high, measurement range is big, it can be achieved that line scanning survey, the step height suitable for micro structural component, film thickness and moving component etc. the measurement of displacement/position.
Description
Technical field
The present invention relates to a kind of line laser phase shift interference triangle micro-displacement measuring device and methods, belong to ultra precise measurement neck
Domain relates generally to the non-contact rapid survey application of ultraprecise of the geometric feature sizes of micro structural component.
Background technique
With the continuous development of processing and manufacturing technology, to high-precision with the micro-displacement non-contact sensor of wide range
Demand is continuously improved.In photoetching technique, the various geometric parameter indexs in silicon chip erosion are to influence device quality and yield rate
An important factor for, the measurement and calibrating of line thickness, spacing, step height, film thickness in chip, mask plate etc. and these
The magnitude of geometric dimension is unified and traces to the source to become particularly important in integrated circuit processing manufacture.
Currently, the method that can satisfy a wide range of, high-precision, high frequency sound non-cpntact measurement mainly has optical method and electronics
Scan sonde method.Traditional optical method usually has interference microscopy, Ellipsometric and spectrophotometry, resolving power can reach
Subnano-class, but its measurement range is small, limits its scope of application.Therefore the needs of actual measurement application are all unable to satisfy.
On the other hand, it is needed in surface shape measurement application field, such as in the measurement of big step, three-dimensional relief surface pattern
A wide range of quick scanning survey, and traditional measurement method is mostly based on spot scan measurement, measurement efficiency is low, and measuring speed is slow,
And sweep mechanism is complicated.
To solve the above-mentioned problems, (Zheng Donghui, Chen Lei etc., the delay array phase shift in synchronous phase shift interferometer are special for document
Journal of Sex Research, Acta Optica, 35 (4), 2015) object plane is measured using simultaneous phase-shifting interference technique, this method is using parallel
Light beam illuminates tested object plane, can be Polaroid to the progress of beam lighting section, and measurement efficiency is greatly improved, however the party
For method measurement range generally within λ/2, when use, also needs complicated unpacking algorithm, and the popularization for significantly limiting the technology is answered
With.
Document (Lazo M.Manojlovic andB.Zivanov, Spectrally Resolved White-
Light Interferometric Sensor for Absolute Position Measurement Based on
Hilbert Transform.IEEE SENSORS JOURNAL, VOL.12 (6): 2199-2204,2012) propose white light interference
Instrument opposite shape measures, and this method is to realize positioning using white light interference gauge head, passes through built-in laser interferometer measurement Z axis
Displacement, by step be scanned realize step height measurement.This method can expand measuring range, and measurement accuracy is high, but
Its structure is complicated, and working efficiency is low, also needs accurate piezoelectric ceramics gearshift auxiliary that could complete high resolution in system
Large range measuring, this greatly limits its application ranges.
Summary of the invention
In order to realize wide range ultraprecise micro-displacement rapid survey, the present invention provides a kind of line laser phase shifts to interfere triangle
Measuring device and method can merge laser Phase-Shifting Interferometry with laser triangulation technological perfectionism, and utilize line laser illumination side
Formula effectively improves the measurement efficiency of system.
The purpose of the present invention is realized by the following technical solution:
Triangle micro-displacement measuring device is interfered in line laser phase shift of the invention, including laser (1), shaping beam expanding lens (2),
1/2 wave plate (3), polarization spectroscope (4), the first quarter wave plate (5), the first cylindrical mirror (6), tested object plane (7), the second quarter wave plate
(8), the second cylindrical mirror (9), the plane of reference (10), imaging len (11), the first CCD (12), third quarter wave plate (13), two dimension
Ronchi grating (14), four-quadrant analyzer group (15), third cylindrical mirror (16), the 2nd CCD (17).
Wherein laser (1), shaping beam expanding lens (2), 1/2 wave plate (3) composition polarization linear light source part.
Wherein line laser phase shift interference system is constituted are as follows: light beam is divided into measurement light and reference light by polarization spectroscope (4)；The
One quarter wave plate (5), the first cylindrical mirror (6), tested object plane (7) constitute the measurement light part that phase shift is interfered；Second quarter wave plate
(8), the second cylindrical mirror (9), the plane of reference (10) constitute phase shift interference reference light part；Two-dimentional Ronchi grating (14) is used as phase shift
The light-splitting device of interference, the phase shifting device that third quarter wave plate (13), four-quadrant analyzer group (15) are interfered as phase shift；Third
The light intensity detection part of cylindrical mirror (16), the 2nd CCD (17) as phase shift interference system.
Wherein four-quadrant analyzer group (15) is made of four polarizing films, and light transmission shaft is followed successively by 0 °, 45 °, 90 °, 135 °, can
By 0 °, 90 °, 180 °, 270 ° of four tunnel interference light phase shift.
Wherein line laser cam system is constituted are as follows: imaging len (11), the first CCD (12) constitute line laser range of triangle portion
Point.
Optical path: the linearly polarized laser that laser (1) issues becomes after shaping beam expanding lens (2) and 1/2 wave plate (3)
Measuring system is supplied to for line collimated light beam.Light is divided into reference light and the survey of phase shift interference system after polarization spectroscope (4)
Measure light.The reflected light of reference light and measurement light is converged at third quarter wave plate (13), and light beam is through light splitting, interfere after phase shift, by the
Two CCD (17) detect the light intensity of four tunnel interference lights.Diffusing reflection occurs for the light part for being irradiated to tested object plane (7), by imaging len
(11) it collects and images on the first CCD (12), by the first CCD detection line light-beam position signal.
A further improvement of the present invention lies in that joined the first cylindrical mirror (6) and the second cylindrical mirror in optical interference circuit
(9), it is matched with the slit diaphragm being coated in four-quadrant analyzer group (15), interference pattern is become into linear striped, and make to do
It is parallel with linear light bunch extending direction to relate to stripe direction, convenient for filtering out high level interference fringe by diaphragm, improves interference light intensity
The signal-to-noise ratio of signal, while the light for being irradiated to object plane being made to be focused into Line beam, improve system transverse resolution.
A further improvement of the present invention lies in that beam splitter uses two dimension Ronchi grating in phase shift interference subsystem,
Theoretically without 0 level diffraction light, (± 1, ± 1) level diffraction light is most strong, can effectively improve the efficiency of light energy utilization, while passing through four-quadrant
The linear diaphragm being coated in limit analyzer group (15) can effectively filter out high diffracting grade time light, improve the signal-to-noise ratio of measuring signal.
It is combined a further improvement of the present invention lies in that giving line laser Phase-Shifting Interferometry with line laser triangulation techniques
Condition and microdisplacement measurement method:
The light that laser issues first passes through laser interference system optical path, is divided into four Lu Guang by two-dimentional Ronchi grating, so
After respectively enter four-quadrant analyzer group, then be imaged onto the 2nd CCD (17) through third cylindrical mirror (16) and complete Image Acquisition, obtain
Four road light intensity signal I1, I2, I3, I4, the displacement measurement h of laser interference optical path is then obtained using formula (1)
Wherein λ be optical maser wavelength, φ be object plane phase value, the measuring signal be cyclical signal, λ/2 measurement period T=,
Its interferometry resolving power is several nanometers.
For laser triangulation optical path, the light that laser issues converges at measured object surface by the first cylindrical mirror (6), dissipates
It penetrates the imaged lens of light (11) and is imaged in the first CCD (12), according to aser triangulation principle, should meet
Scheimpflug condition, i.e. incident beam optical axis and the first CCD (12) extension line should intersect on imaging len (11) interarea.
It therefore, can be by the hot spot blur-free imaging on measured object surface in the first CCD using imaging len (11) in laser triangulation optical path
(12) on, when object plane is mobile, picture point moves on the first CCD (12), can get displacement signal using photoelectric conversion circuit.According to
It can get object plane actual displacement Z according to laser triangulation formula:
Wherein d0For object distance, i.e. imaging len (11) interarea distance is arrived in measurement hot spot (object point)；diFor image distance, i.e. picture point arrives
Imaging len (11) interarea distance；I is the luminous point moving distance of the correspondence object point on the first CCD (12), and θ is operating angle,For at
As the angle of optical axis and PSD.
To synthesize laser triangulation optical path and the displacement measurement of laser interference optical path, two transducing signals need to be made full
The certain condition of foot.Illustrate Data Synthesis process on line for a single point to measure.Assuming that when tested object plane is located at location A,
The phase of laser interference sensor measurement is hA, and the measurement result of laser triangulation sensor is ZA；When tested surface is located at B location
When, the phase of laser interference sensor measurement is hB, laser triangulation sensor measurement is ZB.By the displacement of A to B, laser is dry
Relate to sensor measurement SABFor
SAB=kT+hB-hA+ 2 ζ, (3)
Wherein, k is unknown integer, and λ/2 T=are the interferometer measurement period, and ζ is laser interference subsystem measurement error section
Half-breadth, for the error relative to laser triangulation sensor, interferometry precision is much higher than laser triangulation precision, this error
2 ζ can be ignored.
Assuming that the burst error [- ε of laser triangulation subsystemmax, εmax], measurement result S 'ABFor
S′AB=ZB-ZA±2εmax (4)
Wherein, εmaxFor one-shot measurement worst error, error term is to measure accumulated error maximum value twice in formula.
It can be proved that working as εmaxWhen < T/4, the k value of existence anduniquess,
|SAB-S′AB|=| kT+hB-hA-(ZB-ZA) | 2 ε of <max, (5) set up inequality (5).
Therefore, it can be deduced that the conjugation condition of both sensing technologies, only when the measurement error area of laser triangulation subsystem
Between half-breadth εmaxWhen < T/4, laser triangulation is combined with laser interference may be implemented coarse-fine combination measurement.When actual measurement, pass through
Inequality (5) seeks k value, then can obtain step height using formula (3).
A further improvement of the present invention lies in that establishing the seat of line laser interference imaging system Yu laser triangulation imaging system
Mark corresponding relationship.
In order to which that completes line laser phase shift interference subsystem and line laser triangle subsystem merges measurement, need to interfering system
Coordinate correspondence relationship is established between tetra- road interference pattern of Tong Zhong and in laser triangulation system between the first CCD (13).It first will be by
It surveys object plane (7) and replaces with a standard step, as shown in attached drawing 4 (a), make the extending direction of line laser and the extension side of standard step
To vertical, in this way by four tunnel Interference Graphs of the 2nd CCD (17) imaging, as shown in attached drawing 4 (b) and the first CCD (12) at
The Line Chart of picture can get the position corresponding to step variation, can be completed four using the change in location as shown in attached drawing 4 (c)
Road is interfered between Line Chart, and the coordinate correspondence relationship with the Line Chart of the first CCD (12) in laser triangulation.
The present invention have following distinguishing feature and the utility model has the advantages that
1) present invention can effectively improve the measurement efficiency of system using line scanning survey, while keep the light for being irradiated to object plane poly-
Coke improves system transverse resolution at Line beam；
2) wide range, ultra precise measurement can be achieved at the same time in the present invention, gives interference sensing technology and laser triangulation senses
Technology combines the condition for carrying out coarse-fine measurement, which is also applied for realizing coarse-fine combination measurement between other sensors, have
Universality；
3) present invention joined the first cylindrical mirror (6) and the second cylindrical mirror (9) in optical interference circuit, and interference pattern is become
Linear striped is matched with four slit diaphragms being coated in four-quadrant analyzer group (15), and it is dry to retain 0 grade of center by diaphragm
Striped is related to, the signal-to-noise ratio of interference light intensity signal is improved.
4) grating in phase shift interference subsystem of the present invention for light splitting is two dimension Ronchi diffraction grating (14), and
In four-quadrant analyzer group (15) metal-plated membrane constitute four slit diaphragms, make by optical grating diffraction four tunnels (± 1, ±
1) grade diffraction light passes through, and stops other level diffraction lights.
5) present invention makes the sensor have actual zero point, cannot be only used for displacement and survey due to introducing laser triangulation technology
Amount can also be applied to position measurement.
Detailed description of the invention
Fig. 1 is that triangle micro-displacement measuring device figure is interfered in laser phase shift.
Piece number illustrates in figure: including laser (1), shaping beam expanding lens (2), 1/2 wave plate (3), polarization spectroscope (4), the
One quarter wave plate (5), the first cylindrical mirror (6), tested object plane (7), the second quarter wave plate (8), the second cylindrical mirror (9), the plane of reference
(10), imaging len (11), the first CCD (12), third quarter wave plate (13), Ronchi two-dimensional grating (14), four-quadrant analyzer
Group (15), third cylindrical mirror (16), the 2nd CCD (17).
Fig. 2 is two dimension Ronchi two-dimensional grating (14) structure top view.
Fig. 3 is four-quadrant analyzer group (15) structural schematic diagram.
Fig. 4 standard step instrumentation plan
Graph number explanation: (a) Line beam and standard stepped locations relation schematic diagram；(b) standard step measuring signal is
Image on two CCD (17)；(c) standard step measuring signal image on the first CCD (12).
Specific embodiment
As shown in Fig. 1, example of the invention provides a kind of laser interference triangle micro-displacement measuring device and method.
Triangle displacement device and method, including laser (1), shaping beam expanding lens (2), 1/2 are interfered in phase shift of the invention
Wave plate (3), polarization spectroscope (4), the first quarter wave plate (5), the first cylindrical mirror (6), tested object plane (7), the second quarter wave plate
(8), the second cylindrical mirror (9), the plane of reference (10), imaging len (11), the first CCD (12), third quarter wave plate (13), two dimension
Ronchi grating (14), four-quadrant analyzer group (15), third cylindrical mirror (16), the 2nd CCD (17).
Wherein laser (1), shaping beam expanding lens (2), 1/2 wave plate (3) composition polarization linear light source part.
Wherein line laser phase shift interference system is constituted are as follows: light beam is divided into measurement light and reference light by polarization spectroscope (4)；The
One quarter wave plate (5), the first cylindrical mirror (6), tested object plane (7) constitute the measurement light part that phase shift is interfered；Second quarter wave plate
(8), the second cylindrical mirror (9), the plane of reference (10) constitute phase shift interference reference light part；Ronchi two-dimensional grating (14) is used as phase shift
The light-splitting device of interference, the phase shifting device that third quarter wave plate (13), four-quadrant analyzer group (15) are interfered as phase shift；Third
The light intensity detection part of cylindrical mirror (16), the 2nd CCD (17) as phase shift interference system.
Wherein four-quadrant analyzer group (15) is made of four polarizing films, and light transmission shaft is followed successively by 0 °, 45 °, 90 °, 135 °, can
By 0 °, 90 °, 180 °, 270 ° of four tunnel interference light phase shift.
Wherein line laser cam system is constituted are as follows: imaging len (11), the first CCD (12) constitute line laser range of triangle portion
Point.
Optical path: the linearly polarized laser that laser (1) issues becomes after shaping beam expanding lens (2) and 1/2 wave plate (3)
Measuring system is supplied to for line collimated light beam.Light is divided into reference light and the survey of phase shift interference system after polarization spectroscope (4)
Measure light.The reflected light of reference light and measurement light is converged at third quarter wave plate (13), interferes after light beam is divided phase shift, by the
Two CCD (17) detect the light intensity of four tunnel interference lights.Diffusing reflection occurs for the light part for being irradiated to tested object plane (7), by imaging len
(11) it collects and images on the first CCD (12), by the first CCD detection line light-beam position signal.
Laser issues the laser that wavelength is 632.8nm, and phase-shifting interference measuring cycle T is 316.4nm.Laser triangulation is surveyed
Measure system structure parameter θ=41 °, φ=30 °, d0=50mm, d1=75mm.Laser triangulation one-shot measurement error maximum is less than
0.06μm。
Before measurement, needing to establish line laser interference imaging subsystem and the coordinate pair of line laser triangle imaging subsystem should be closed
System, i.e., in phase shift interference system between four imaging areas of the 2nd CCD (17), and with the first CCD in laser triangulation system
(12) between coordinate system, using standard step as measured piece, coordinate mapping relations are demarcated, need to determine one at this
Tie up position corresponding relationship.
Illustrate the synthesis process for measuring every measurement result on line by taking single-point as an example.When measurement, to measured object surface displacement
Or the process of position measurement mainly includes the following steps:
Step 1, when tested object plane sets A in place, utilize the 2nd CCD (17) obtain four road light intensity signals；
Step 2, the phase value h that position A is obtained using formula (1)A, while laser triangulation is obtained using the first CCD (12)
Bigness scale amount shift value Z is calculated using formula (2) in light intensity signalA；
Step 3, when object plane is moved to position B, similarly can get hBAnd ZB, and formula (6) are utilized, obtain initial value k0,
Wherein Round () is bracket function.
Step 4 works as k=k finally by calculating separately0- 1, k0, k0When+1, if meet inequality (5), to obtain position
Move SABPrecise measurements
SAB=kT+hB-hA (7)
This embodiment meets high efficiency, wide range, high-resolution survey requirement；Simplied system structure simultaneously, system collection
It is high at degree, the synchronism of system signal acquisition is effectively increased, outside environmental elements and light source power can be inhibited to a certain degree
The influence of fluctuation, the step height suitable for micro structural component, the measurement of displacement of film thickness and moving component etc..
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention.
Protection scope of the present invention is limited by appended claims, any changing on the basis of the claims in the present invention
Dynamic is all protection scope of the present invention.
Claims (7)
1. triangle micro-displacement measuring device is interfered in line laser phase shift, it is characterised in that: including laser (1), shaping beam expanding lens
(2), 1/2 wave plate (3), polarization spectroscope (4), the first quarter wave plate (5), the first cylindrical mirror (6), tested object plane (7), the 2nd 1/4
Wave plate (8), the second cylindrical mirror (9), the plane of reference (10), imaging len (11), the first CCD (12), third quarter wave plate (13),
Ronchi two-dimensional grating (14), four-quadrant analyzer group (15), third cylindrical mirror (16), the 2nd CCD (17),
Wherein laser (1), shaping beam expanding lens (2), 1/2 wave plate (3) composition polarization linear light source part, laser (1) output line
Polarization laser,
Wherein line laser phase shift interference subsystem is constituted are as follows: light beam is divided into measurement light and reference light by polarization spectroscope (4)；First
Quarter wave plate (5), the first cylindrical mirror (6), tested object plane (7) constitute the measurement light part that phase shift is interfered；Second quarter wave plate (8),
Second cylindrical mirror (9), the plane of reference (10) constitute phase shift and interfere reference light part；Ronchi two-dimensional grating (14) is interfered as phase shift
Light-splitting device, the phase shifting device that third quarter wave plate (13), four-quadrant analyzer group (15) are interfered as phase shift；Third cylinder
The light intensity detection part of mirror (16), the 2nd CCD (17) as phase shift interference system,
Wherein four-quadrant analyzer group (15) is made of four polarizing films, and light transmission shaft is followed successively by 0 °, 45 °, 90 °, 135 °, can be by four
0 ° of phase shift of road interference light difference, 90 °, 180 °, 270 °,
Wherein line laser triangle subsystem is constituted are as follows: imaging len (11), the first CCD (12) constitute line laser range of triangle portion
Point,
Optical path: the linearly polarized laser that laser (1) issues becomes line after shaping beam expanding lens (2) and 1/2 wave plate (3)
Collimated light beam is supplied to measuring system, and light is divided into the reference light and measurement light of phase shift interference system after polarization spectroscope (4),
The reflected light of reference light and measurement light is converged at third quarter wave plate (13), and light beam is interfered after light splitting, phase shift, by the 2nd CCD
(17) light intensity for detecting four tunnel interference lights, the light part for being irradiated to tested object plane (7) occur diffusing reflection, are received by imaging len (11)
Collection images on the first CCD (12), by the first CCD detection line light-beam position signal.
2. triangle micro-displacement measuring device is interfered in line laser phase shift according to claim 1, it is characterised in that: tested object plane
For the surface with certain finish, when laser irradiation is to surface, mirror reflection occurs for a part of light, and a part of light occurs unrestrained anti-
It penetrates.
3. triangle micro-displacement measuring device is interfered in line laser phase shift according to claim 1, it is characterised in that: by dry
It relates to and joined the first cylindrical mirror (6) and the second cylindrical mirror (9) in optical path, interference pattern is become into linear striped, and make to interfere item
Line direction is parallel with linear light bunch extending direction, matches with four slit diaphragms being coated in four-quadrant analyzer group (15),
Retain central interference fringe, improve the signal-to-noise ratio of interference light intensity signal, while the light for being irradiated to object plane being made to be focused into Line beam, mentions
High system transverse resolution.
4. triangle micro-displacement measuring device is interfered in line laser phase shift according to claim 1, it is characterised in that: phase shift interference
Grating in subsystem for light splitting is two dimension Ronchi diffraction grating (14), and is coated in four-quadrant analyzer group (15)
Four slit diaphragms that metal film is constituted, make to pass through by four tunnels (± 1, ± 1) grade diffraction light of optical grating diffraction, stop other grades
Secondary diffraction light.
5. triangle micro-displacement measuring device is interfered in line laser phase shift according to claim 1, it is characterised in that: the 3rd 1/4
Wave plate (14), Ronchi two-dimensional grating (15) position can mutually exchange.
6. triangle microdisplacement measurement is interfered in a kind of line laser phase shift using 5 any claim described device of Claims 1 to 5
Method, it is characterised in that: laser triangulation technology combines the condition for realizing coarse-fine measurement with phase-shifting interference measuring technology are as follows: εmax
< T/4, wherein εmaxFor the measurement worst error of line laser cam system, T is the measurement week of laser phase-shifting interference measuring subsystem
Phase；Work as εmaxWhen < T/4, k existence anduniquess value meets inequality (1)
|SAB-S′AB|=| kT+hB-hA-(ZB-ZA) | 2 ε of <max (1)
It can get the exact value S of laser interference triangulation sensor displacement measurementAB:
SAB=kT+hB-hA(2)
Wherein, when tested object plane is located at location A and B location, laser interference subsystem measurement result is respectively hA, hB: laser three
Angle subsystem measurement result is respectively ZA, ZB, S 'ABFor laser triangulation subsystem displacement measurement.
7. triangle microdisplacement measurement method is interfered in line laser phase shift according to claim 6, it is characterised in that: dry in phase shift
Relate to the coordinate in subsystem between four imaging areas of the 2nd CCD (17), and with the first CCD (12) in laser triangulation subsystem
Between system, using standard step as measured piece, coordinate mapping relations are demarcated.
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