CN109580547A - The segmentation four-step phase-shifting method of domain optical coherence chromatography removal complex conjugate mirror image - Google Patents
The segmentation four-step phase-shifting method of domain optical coherence chromatography removal complex conjugate mirror image Download PDFInfo
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Abstract
The present invention relates to a kind of segmentation four-step phase-shifting methods that domain optical coherence chromatographs removal complex conjugate mirror image.One imaging system is provided;Wideband light source is segmented into the combination of multiple narrow band width light sources, the start-stop wavelength and spectral region of each narrow band width light source is calculated, calculates the central wavelength of each narrow band width light source;The phase shift displacement of phase shifter when calculating each four step phase shift of narrow band width light source;Mounting and adjusting imaging system, acquisition obtain two-dimentional interference spectrum striped;Light intensity and phase in each section of wave-length coverage are calculated with four step phase shifts to narrow band width light source each after segmentation, the two-dimentional interference spectrum signal of segment reconstruction plural form, after carry out Fast Fourier Transform (FFT), it extracts each row pixel Strength Changes frequency and is multiplied by after Wavelength calibration and chromatograph structure chart to get to the high sample to be tested of removal complex conjugate mirror image and image rejection ratio Zi building system distance resolution determined by spectrometer.The influence of polychrome error can be effectively reduced in the present invention, greatlys improve complex conjugate mirror image inhibitory effect, greatlys improve the imaging performance of domain optical coherence chromatography removal complex conjugate mirror image.
Description
Technical field
The present invention relates to a kind of segmentation four-step phase-shifting methods that domain optical coherence chromatographs removal complex conjugate mirror image.
Background technique
Domain optical coherence tomography is that one kind is contactless, not damaged, precision is high and high-resolution novel chromatography
Imaging method, optical coherence tomography is using low-coherent light interference as principle, using Michelson interferometer as technological core, passes through measurement
The reflection of object under test or rear orientation light obtain object structures information or surface profile information.Traditional method is to acquisition
Interference spectrum directly carry out Fast Fourier Transform (FFT), but this processing that Fast Fourier Transform (FFT) is directly carried out to real number signal
Method will appear test sample real image can be overlapped mutually about the symmetrical mirror image of zero optical path difference, usual mirror image and real image, lead
Image is caused to obscure, traditional method is to will test sample to be placed in positive light path or negative light path position, separates mirror image and real image, but this is just
Waste the imaging depth and imaging capability of system half.Four currently used step phase-shifting methods be by control voltage output from
And drive piezoelectric ceramics to carry out phase shift, by phase shift obtain relative to light source center wavelength have -135 °, -45 °, 45 °,
The interference information of 135 ° of phase difference replaces the phase-shift phase at each wavelength during signal reconstruction with this four phase-shift phases,
However, since light source is wideband light source, it includes wavelength components and be divided into usually hundreds of nanometers, with central wavelength phase shift
When there is error, as polychrome error to other wavelength components, the presence of polychrome error makes four traditional step phase-shifting methods
It goes conjugation mirror image ability limited, can have conjugation mirror image remnants, be conjugated image rejection ratio by polychrome caused by light source bandwidth
Error is affected.The invention proposes the combinations that light source is segmented into multiple narrow band width light sources, using four step phase shift of two-section
Remove optical coherence tomography complex conjugate mirror image, four segmentation four step phase shifts removal optical coherence tomography complex conjugate mirror images,
Eight segmentation four step phase shifts removal optical coherence tomography complex conjugate mirror images, 16 four step phase shifts of segmentation remove optical coherence tomography
Complex conjugate mirror image etc. can be effectively reduced the influence of polychrome error, greatly improve complex conjugate mirror image inhibitory effect.
Summary of the invention
The purpose of the present invention is to provide the segmentation four-step phase-shiftings that a kind of domain optical coherence chromatographs removal complex conjugate mirror image
Method can be effectively reduced the influence of polychrome error, complex conjugate mirror image inhibitory effect be greatlyd improve, by Optical coherence tomography
Investigation depth double.
To achieve the above object, the technical scheme is that a kind of domain optical coherence chromatography removal complex conjugate mirror image
Segmentation four-step phase-shifting method, include the following steps:
Step S1, provide an imaging system, including tungsten halogen lamp light source module, convex lens, Michelson's interferometer module,
Two-dimensional spectrometer module, phase shifter module also provide a computer for being equipped with image processing software module;
Step S2, the wideband light source that tungsten halogen lamp light source module emits is segmented into the combination of multiple narrow band width light sources, it will
Light source light spectrum wave band homogenous segmentations calculate the start-stop wavelength and spectral region of each narrow band width light source, calculate each narrow bandwidth of light
The central wavelength in source;
It step S3, is reference with the central wavelength of each narrow band width light source, by four steps to each narrow band width light source after segmentation
Phase-shifting method phase shift, the phase shift displacement of phase shifter when calculating each four step phase shift of narrow band width light source;
Step S4, the point light source planoconvex lens collimation of mounting and adjusting imaging system, the transmitting of tungsten halogen lamp light source module is flat
Collimated light beam is focused to focal line by row light beam, the first cylindrical lens through Michelson's interferometer module, and after it is dry through Michelson
The spectroscope beam splitting of interferometer module is the equal two-beam line of intensity, a branch of that reference light is used as to converge at Michelson's interferometer mould
The reference mirror of block, another Shu Zuowei detection light converge at the sample to be tested surface being mounted on sample to be tested mounting rack, two-beam
It is overlapped and interferes after reflexing to spectroscope, and the outgoing of the second cylindrical lens through Michelson's interferometer module;Then, through
The interfering beam of two cylindrical lens outgoing presses wavelength after the light splitting of space by two-dimentional light through the reflective gratings of two-dimensional spectrometer module
The third cylindrical lens of spectrometer module pool interference spectrum, obtain two dimension by the area array CCD camera acquisition of two-dimensional spectrometer module
Interference spectrum striped;
Step S5, phase shifter module is controlled, so that after the reference mirror of Michelson's interferometer module is by the segmentation of step S2, S3
Determining phase shift displacement, which is realized, determines step pitch displacement;
Step S6, collected interference fringe image is transferred to computer by two-dimensional spectrometer module, to each narrow after segmentation
Bandwidth light source calculates light intensity and phase in each section of wave-length coverage, the two-dimentional interference light of segment reconstruction plural form with four step phase shifts
Spectrum signal carries out the processing of stripe signal using image processing software module;
Step S7, image processing software module first adds Hanning to the every row pixel light intensity of collected a series of images
Window function carries out Fast Fourier Transform (FFT) afterwards, extracts each row pixel Strength Changes frequency;
Step S8, each row pixel Strength Changes frequency is multiplied by after Wavelength calibration and builds certainly by image processing software module
System distance resolution determined by spectrometer be obtain removal complex conjugate mirror image and image rejection ratio it is high sample to be tested chromatography
Structure chart.
In an embodiment of the present invention, in the step S4, DC terms in the interference spectrum signal of area array CCD camera acquisition
Signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2It is not influenced by optical path difference, interference spectrum signal can indicate are as follows:
Wherein, k is wave number, and y is the vertical position coordinate for detecting test point on focal line, and φ (k, y) is reference light and sample
Light phase angle;
Further, interference spectrum signal can be written as:
Wherein, I0(k, y) is DC terms signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2The sum of, A (k, y) is two dimension
Interference spectrum different wave length light intensity,For two-dimentional interference spectrum different wave length phase.
In an embodiment of the present invention, the step S6, is implemented as follows:
Controlling phase shifter module by step S5 is segmented the reference mirror of Michelson's interferometer module by step S2, S3
Determining phase shift displacement, which is realized, afterwards determines step pitch displacement, and the optical path difference of reference mirror and sample to be tested can be allowed to change to obtain phase
Difference obtains the interference spectrum I of four groups of out of phase differences1(k,y)、I2(k,y)、I3(k)、I4(k, y), thus segmentation solves two
Tie up interference spectrum different wave length light intensity and phase;
Light intensity expression are as follows:
Wherein, I0(k, y) is DC terms signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2The sum of, A (k, y) is two dimension
Interference spectrum different wave length light intensity,For two-dimentional interference spectrum different wave length phase, φ (k, y) is two-dimentional interference light spectral shift
The phase difference of phase;
It solves above formula and obtains two-dimentional interference spectrum different wave length light intensity and phase:
Thus segment reconstruction goes out the two-dimentional interference spectrum signal of plural form.
In an embodiment of the present invention, in the step S2, the wideband light source that tungsten halogen lamp light source module is emitted is segmented
Combined segmented mode for multiple narrow band width light sources includes two-section, four segmentations, eight segmentations, 16 segmentations.
Compared to the prior art, the invention has the following advantages: polychrome error can be effectively reduced in the method for the present invention
It influences, greatlys improve complex conjugate mirror image inhibitory effect, the investigation depth of Optical coherence tomography is doubled.
Detailed description of the invention
Fig. 1 is the device two-dimensional structure schematic diagram of embodiment.
Fig. 2 is the device three dimensional structure diagram of embodiment.
Fig. 3 is traditional domain optical coherence tomography process schematic.
Phase-shifting Errors figure corresponding to each wavelength when Fig. 4 is unsegmented.
Irnaging procedures figure is detected using four step phase-moving methods when Fig. 5 is unsegmented.
Phase-shifting Errors figure corresponding to each wavelength when Fig. 6 is two-section.
Fig. 7 is four step phase-moving method of two-section detection Irnaging procedures figure.
Phase-shifting Errors figure corresponding to each wavelength when Fig. 8 is four segmentation.
Fig. 9 is four segmentations, four step phase-moving method detection Irnaging procedures figure.
Phase-shifting Errors figure corresponding to each wavelength when Figure 10 is eight segmentation.
Figure 11 is eight segmentations, four step phase-moving method detection Irnaging procedures figure.
Figure 12 Phase-shifting Errors figure corresponding to each wavelength when being 16 segmentation.
Figure 13 is 16 segmentation four step phase-moving methods detection Irnaging procedures figures.
Figure 14 is four step phase shift of unsegmented, four step phase shift of two-section, four four step phase shifts of segmentation, eight segmentation four step phase shifts, ten
Six four step phase shift complex conjugate image rejection ratio comparison diagrams of segmentation.
In figure: 1- tungsten halogen lamp light source, 2- convex lens, 3,9,12- cylindrical lens, 4- spectroscope, 5- reference mirror, 6- phase shifter
(piezoelectric ceramics), 7- sample to be tested, 8- sample to be tested mounting rack, 10- reflecting mirror, 11- reflective gratings, 13- area array CCD phase
Machine.
Specific embodiment
With reference to the accompanying drawing, technical solution of the present invention is specifically described.
The present invention provides a kind of segmentation four-step phase-shifting methods that domain optical coherence chromatographs removal complex conjugate mirror image, including
Following steps:
Step S1, provide an imaging system, including tungsten halogen lamp light source module, convex lens, Michelson's interferometer module,
Two-dimensional spectrometer module, phase shifter module also provide a computer for being equipped with image processing software module, as shown in Figure 1, 2;
Step S2, the wideband light source that tungsten halogen lamp light source module emits is segmented into the combination of multiple narrow band width light sources, is pressed
Two-section, four segmentations, eight segmentations, 16 segmentations etc. divide segmented mode, by light source light spectrum wave band homogenous segmentations, calculate each narrow bandwidth
The start-stop wavelength and spectral region of light source, calculate the central wavelength of each narrow band width light source;
It step S3, is reference with the central wavelength of each narrow band width light source, by four steps to each narrow band width light source after segmentation
Phase-shifting method phase shift difference is 90 ° (other phase shift differences can also, it is poor not need specific 90 ° of phase shifts), calculates each narrow band width light source four
The phase shift displacement of phase shifter when walking phase shift;
Step S4, the point light source planoconvex lens collimation of mounting and adjusting imaging system, the transmitting of tungsten halogen lamp light source module is flat
Collimated light beam is focused to focal line by row light beam, the first cylindrical lens through Michelson's interferometer module, and after it is dry through Michelson
The spectroscope beam splitting of interferometer module is the equal two-beam line of intensity, a branch of that reference light is used as to converge at Michelson's interferometer mould
The reference mirror of block, another Shu Zuowei detection light converge at the sample to be tested surface being mounted on sample to be tested mounting rack, two-beam
It is overlapped and interferes after reflexing to spectroscope, and the outgoing of the second cylindrical lens through Michelson's interferometer module;Then, through
The interfering beam of two cylindrical lens outgoing presses wavelength after the light splitting of space by two-dimentional light through the reflective gratings of two-dimensional spectrometer module
The third cylindrical lens of spectrometer module pool interference spectrum, obtain two dimension by the area array CCD camera acquisition of two-dimensional spectrometer module
Interference spectrum striped;
Step S5, phase shifter module is controlled, so that after the reference mirror of Michelson's interferometer module is by the segmentation of step S2, S3
Determining phase shift displacement, which is realized, determines step pitch displacement;
Step S6, collected interference fringe image is transferred to computer by two-dimensional spectrometer module, to each narrow after segmentation
Bandwidth light source calculates light intensity and phase in each section of wave-length coverage, the two-dimentional interference light of segment reconstruction plural form with four step phase shifts
Spectrum signal carries out the processing of stripe signal using image processing software module;
Step S7, image processing software module first adds Hanning to the every row pixel light intensity of collected a series of images
Window function carries out Fast Fourier Transform (FFT) afterwards, extracts each row pixel Strength Changes frequency;
Step S8, each row pixel Strength Changes frequency is multiplied by after Wavelength calibration and builds certainly by image processing software module
System distance resolution determined by spectrometer be obtain removal complex conjugate mirror image and image rejection ratio it is high sample to be tested chromatography
Structure chart.
In the step S4, DC terms signal in the interference spectrum signal of area array CCD camera acquisition | Ir(k,y)|2And it is mutually dry
Relate to item | Is(k,y)|2It is not influenced by optical path difference, interference spectrum signal can indicate are as follows:
Wherein, k is wave number, and y is the vertical position coordinate for detecting test point on focal line, and φ (k, y) is reference light and sample
Light phase angle;
Further, interference spectrum signal can be written as:
Wherein, I0(k, y) is DC terms signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2The sum of, A (k, y) is two dimension
Interference spectrum different wave length light intensity,For two-dimentional interference spectrum different wave length phase.
The step S6, is implemented as follows:
Controlling phase shifter module by step S5 is segmented the reference mirror of Michelson's interferometer module by step S2, S3
Determining phase shift displacement, which is realized, afterwards determines step pitch displacement, and the optical path difference of reference mirror and sample to be tested can be allowed to change to obtain phase
Difference obtains the interference spectrum I of four groups of out of phase differences1(k,y)、I2(k,y)、I3(k)、I4(k, y), thus segmentation solves two
Tie up interference spectrum different wave length light intensity and phase;
Light intensity expression are as follows:
Wherein, I0(k, y) is DC terms signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2The sum of, A (k, y) is two dimension
Interference spectrum different wave length light intensity,For two-dimentional interference spectrum different wave length phase, φ (k, y) is two-dimentional interference light spectral shift
The phase difference of phase;
It solves above formula and obtains two-dimentional interference spectrum different wave length light intensity and phase:
Thus segment reconstruction goes out the two-dimentional interference spectrum signal of plural form.
The following are the present invention, and example is embodied.
Fig. 3 is traditional domain optical coherence tomography process schematic, and traditional method is the interference light to acquisition
Spectrum directly carries out Fast Fourier Transform (FFT), but this processing method for directly carrying out Fast Fourier Transform (FFT) to real number signal can go out
Existing test sample real image can be overlapped mutually about the symmetrical mirror image of zero optical path difference, usual mirror image and real image, cause image mixed
Confuse, and there are DC influence and ambient noises.
It is 742.75nm -1141.71nm, central wavelength 942.23nm, difference to wave-length coverage when Fig. 4 is unsegmented
Phase-shifting Errors corresponding to each wavelength when 0 ° of phase shift, 90 °, 180 °, -90 °, -180 °, wavelength bandwidth is bigger as seen from the figure, more inclined
From central wavelength, corresponding to Phase-shifting Errors it is bigger.
Used when Fig. 5 is unsegmented four step phase-moving methods (wave-length coverage for 742.75nm -1141.71nm, central wavelength
For 942.23nm light source) detection Irnaging procedures figure, it is 25.6dB that complex conjugate mirror image, which inhibits signal strength, can by imaging effect
Know, there are mirror image remnants for imaging.
When Fig. 6 is two-section, 1 wave-length coverage of section is 742.75nm -942.231nm, central wavelength 842.23nm, section 2
Wave-length coverage be 942.23nm -1141.71nm, central wavelength 1041.97nm, respectively 0 ° of phase shift, 90 °, 180 °, -90 °, -
Phase-shifting Errors corresponding to each wavelength at 180 °, after being segmented as seen from the figure, Phase-shifting Errors corresponding to each wavelength are gradually reduced.
Fig. 7 is that (1 wave-length coverage of section is 742.75nm -942.231nm to four step phase-moving method of two-section, and central wavelength is
842.23nm, 2 wave-length coverage of section are 942.23nm -1141.71nm, central wavelength 1041.97nm) detection Irnaging procedures figure,
It is 31.59dB that its complex conjugate mirror image, which inhibits signal strength, effectively eliminates mirror image.
When Fig. 8 is four segmentation, 1 wave-length coverage of section is 742.75nm -842.49nm, central wavelength 792.62nm, section 2
Wave-length coverage is 842.49nm -942.49nm, and central wavelength 892.49nm, 3 wave-length coverage of section is 942.49nm -
1041.97nm, central wavelength 992.23nm, 4 wave-length coverage of section are 1041.97nm -1141.71nm, and central wavelength is
1091.84nm, Phase-shifting Errors corresponding to each wavelength when 0 ° of phase shift, 90 °, 180 °, -90 °, -180 °, are segmented as seen from the figure respectively
Afterwards, Phase-shifting Errors corresponding to each wavelength are gradually reduced.
Fig. 9 is that (1 wave-length coverage of section is 742.75nm -842.49nm to four segmentations, four step phase-moving method, and central wavelength is
792.62nm, 2 wave-length coverage of section are 842.49nm -942.49nm, central wavelength 892.49nm, and 3 wave-length coverage of section is
942.49nm -1041.97nm, central wavelength 992.23nm, 4 wave-length coverage of section are 1041.97nm -1141.71nm, center
Wavelength is 1091.84nm) detection Irnaging procedures figure, it is 37.73dB that complex conjugate mirror image, which inhibits signal strength, effectively eliminates mirror
Picture.
When Figure 10 is eight segmentation, 1 wave-length coverage of section be 742.75nm -792.62nm, central wavelength 7767.685nm,
2 wave-length coverages of section are 792.62nm -842.49nm, and central wavelength 817.555nm, 3 wave-length coverage of section is 842.49nm -
892.49nm, central wavelength 867.49nm, 4 wave-length coverage of section are 892.49nm -942.49nm, and central wavelength is
917.49nm, 5 wave-length coverage of section are 942.49nm -992.23nm, central wavelength 967.36nm, and 6 wave-length coverage of section is
992.23nm -1041.97nm, central wavelength 1017.1nm, 7 wave-length coverage of section are 1041.97nm -1091.84nm, center
Wavelength is 1066.905nm, and 8 wave-length coverage of section is 1091.84nm -1141.71nm, central wavelength 1116.775nm, difference
Phase-shifting Errors corresponding to each wavelength when 0 ° of phase shift, 90 °, 180 °, -90 °, -180 °, after being segmented as seen from the figure, each wavelength institute is right
The Phase-shifting Errors answered are gradually reduced.
Figure 11 is that (1 wave-length coverage of section is 742.75nm -792.62nm to eight segmentations, four step phase-moving method, and central wavelength is
7767.685nm, 2 wave-length coverage of section are 792.62nm -842.49nm, central wavelength 817.555nm, and 3 wave-length coverage of section is
842.49nm -892.49nm, central wavelength 867.49nm, 4 wave-length coverage of section are 892.49nm -942.49nm, middle cardiac wave
A length of 917.49nm, 5 wave-length coverage of section are 942.49nm -992.23nm, central wavelength 967.36nm, and 6 wave-length coverage of section is
992.23nm -1041.97nm, central wavelength 1017.1nm, 7 wave-length coverage of section are 1041.97nm -1091.84nm, center
Wavelength is 1066.905nm, and 8 wave-length coverage of section is 1091.84nm -1141.71nm, central wavelength 1116.775nm) detection
Irnaging procedures figure, it is 45.13dB that complex conjugate mirror image, which inhibits signal strength, effectively eliminates mirror image.
When Figure 12 is 16 segmentation, 1 wave-length coverage of section is 742.75nm -767.685nm, and central wavelength is
755.2175nm, 2 wave-length coverage of section are 767.685nm -792.62nm, central wavelength 780.1525nm, 3 wave-length coverage of section
For 792.62nm -817.555nm, central wavelength 805.0875nm, 4 wave-length coverage of section is 817.555nm -842.49nm,
Central wavelength is 830.0225nm, and 5 wave-length coverage of section is 842.49nm -867.49nm, central wavelength 9854.99nm, section 6
Wave-length coverage is 867.49nm -892.49nm, and central wavelength 879.99nm, 7 wave-length coverage of section is 892.49nm -
917.49nm, central wavelength 904.99nm, 8 wave-length coverage of section are 917.49nm -942.49nm, and central wavelength is
929.99nm, 9 wave-length coverage of section are 942.49nm -967.365nm, central wavelength 954.925nm, and 10 wave-length coverage of section is
967.365nm -992.23nm, central wavelength 979.795nm, 11 wave-length coverage of section are 992.23nm -1017.1nm, center
Wavelength is 1004.665nm, and 12 wave-length coverage of section is 1017.1nm -1041.97nm, central wavelength 1029.535nm, section 13
Wave-length coverage is 1041.97nm -1066.905nm, central wavelength 1054.4375nm, and 14 wave-length coverage of section is
1066.905nm -1091.84nm, central wavelength 1079.3725nm, 15 wave-length coverage of section are 1091.84nm -
1116.775nm, central wavelength 1104.3075nm, 16 wave-length coverage of section are 1116.775nm -1141.71nm, central wavelength
For 1129.2425nm, Phase-shifting Errors corresponding to each wavelength when 0 ° of phase shift, 90 °, 180 °, -90 °, -180 ° are distinguished, as seen from the figure
After segmentation, Phase-shifting Errors corresponding to each wavelength are gradually reduced.
Figure 13 is that (1 wave-length coverage of section is 742.75nm -767.685nm, central wavelength to 16 four step phase-moving methods of segmentation
For 755.2175nm, 2 wave-length coverage of section is 767.685nm -792.62nm, central wavelength 780.1525nm, 3 wavelength model of section
It encloses for 792.62nm -817.555nm, central wavelength 805.0875nm, 4 wave-length coverage of section is 817.555nm -
842.49nm, central wavelength 830.0225nm, 5 wave-length coverage of section are 842.49nm -867.49nm, and central wavelength is
9854.99nm, 6 wave-length coverage of section are 867.49nm -892.49nm, central wavelength 879.99nm, and 7 wave-length coverage of section is
892.49nm -917.49nm, central wavelength 904.99nm, 8 wave-length coverage of section are 917.49nm -942.49nm, middle cardiac wave
A length of 929.99nm, 9 wave-length coverage of section are 942.49nm -967.365nm, central wavelength 954.925nm, 10 wavelength model of section
It encloses for 967.365nm -992.23nm, central wavelength 979.795nm, 11 wave-length coverage of section is 992.23nm -1017.1nm,
Central wavelength is 1004.665nm, and 12 wave-length coverage of section is 1017.1nm -1041.97nm, central wavelength 1029.535nm,
13 wave-length coverages of section are 1041.97nm -1066.905nm, central wavelength 1054.4375nm, and 14 wave-length coverage of section is
1066.905nm -1091.84nm, central wavelength 1079.3725nm, 15 wave-length coverage of section are 1091.84nm -
1116.775nm central wavelength 1104.3075nm, 16 wave-length coverage of section is 1116.775nm -1141.71nm, central wavelength
Irnaging procedures figure is detected for 1129.2425nm), it is 53.12dB that complex conjugate mirror image, which inhibits signal strength, effectively eliminates mirror
Picture.
Figure 14 is four step phase shift of unsegmented, four step phase shift of two-section, four four step phase shifts of segmentation, eight segmentation four step phase shifts, ten
Six four step phase shift complex conjugate image rejection ratio comparison diagrams of segmentation, four step phase shift complex conjugate mirror image of unsegmented inhibition signal strength are
25.6dB, it is 31.59dB, four four step phase shift complex conjugate mirror images of segmentation that four step phase shift complex conjugate mirror image of two-section, which inhibits signal strength,
Inhibition signal strength is 37.73dB, and it is 45.13dB, 16 segmentations that eight four step phase shift complex conjugate mirror images of segmentation, which inhibit signal strength,
It is 53.12dB that four step phase shift complex conjugate mirror images, which inhibit signal strength,.With the increase of segments, the influence of polychrome error is gradually dropped
Low, complex conjugate mirror image inhibitory effect gradually increases, 16 segmentation four step phase shifts when complex conjugate image signal be buried in noise substantially
In signal.
The above are preferred embodiments of the present invention, all any changes made according to the technical solution of the present invention, and generated function is made
When with range without departing from technical solution of the present invention, all belong to the scope of protection of the present invention.
Claims (4)
1. a kind of segmentation four-step phase-shifting method of domain optical coherence chromatography removal complex conjugate mirror image, which is characterized in that including such as
Lower step:
Step S1, an imaging system, including tungsten halogen lamp light source module, convex lens, Michelson's interferometer module, two dimension are provided
Spectrometer module, phase shifter module also provide a computer for being equipped with image processing software module;
Step S2, the wideband light source that tungsten halogen lamp light source module emits is segmented into the combination of multiple narrow band width light sources, by light source
Spectral band homogenous segmentations calculate the start-stop wavelength and spectral region of each narrow band width light source, calculate each narrow band width light source
Central wavelength;
It step S3, is reference with the central wavelength of each narrow band width light source, by four step phase shifts to each narrow band width light source after segmentation
Method phase shift, the phase shift displacement of phase shifter when calculating each four step phase shift of narrow band width light source;
Step S4, the point light source planoconvex lens collimation of mounting and adjusting imaging system, the transmitting of tungsten halogen lamp light source module is directional light
Collimated light beam is focused to focal line by beam, the first cylindrical lens through Michelson's interferometer module, and after through Michelson's interferometer
The spectroscope beam splitting of module is the equal two-beam line of intensity, a branch of as reference light to converge at Michelson's interferometer module
Reference mirror, another Shu Zuowei detection light converge at the sample to be tested surface being mounted on sample to be tested mounting rack, and two-beam is through anti-
It is incident upon after spectroscope to be overlapped and interfere, and the outgoing of the second cylindrical lens through Michelson's interferometer module;Then, through the second column
The interfering beam of lens outgoing presses wavelength after the light splitting of space by two-dimensional spectrometer through the reflective gratings of two-dimensional spectrometer module
The third cylindrical lens of module pool interference spectrum, obtain two dimension interference by the area array CCD camera acquisition of two-dimensional spectrometer module
Spectrum striped;
Step S5, phase shifter module is controlled, so that the reference mirror of Michelson's interferometer module is by determining after the segmentation of step S2, S3
Phase shift displacement realize determine step pitch be displaced;
Step S6, collected interference fringe image is transferred to computer by two-dimensional spectrometer module, to narrow bandwidth each after segmentation
Light source calculates light intensity and phase in each section of wave-length coverage, the two-dimentional interference spectrum letter of segment reconstruction plural form with four step phase shifts
Number, the processing of stripe signal is carried out using image processing software module;
Step S7, image processing software module first adds Hanning window letter to the every row pixel light intensity of collected a series of images
Number, carries out Fast Fourier Transform (FFT) afterwards, extracts each row pixel Strength Changes frequency;
Step S8, image processing software module builds spectrum after each row pixel Strength Changes frequency is multiplied by Wavelength calibration certainly
System distance resolution determined by instrument be obtain removal complex conjugate mirror image and image rejection ratio it is high sample to be tested chromatography structure
Figure.
2. the segmentation four-step phase-shifting method of domain optical coherence chromatography removal complex conjugate mirror image according to claim 1,
It is characterized in that, in the step S4, DC terms signal in the interference spectrum signal of area array CCD camera acquisition | Ir(k,y)|2And mutually
Interference term | Is(k,y)|2It is not influenced by optical path difference, interference spectrum signal can indicate are as follows:
Wherein, k is wave number, and y is the vertical position coordinate for detecting test point on focal line, and φ (k, y) is reference light and sample light phase
Parallactic angle;
Further, interference spectrum signal can be written as:
Wherein, I0(k, y) is DC terms signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2The sum of, A (k, y) is two dimension interference
Spectrum different wave length light intensity,For two-dimentional interference spectrum different wave length phase.
3. the segmentation four-step phase-shifting method of domain optical coherence chromatography removal complex conjugate mirror image according to claim 2,
It is characterized in that, the step S6 is implemented as follows:
Controlling phase shifter module by step S5 makes the reference mirror of Michelson's interferometer module by true after the segmentation of step S2, S3
Fixed phase shift displacement, which is realized, determines step pitch displacement, and the optical path difference of reference mirror and sample to be tested can be allowed to change to obtain phase difference,
Obtain the interference spectrum I of four groups of out of phase differences1(k,y)、I2(k,y)、I3(k)、I4(k, y), thus it is dry to solve two dimension for segmentation
Relate to spectrum different wave length light intensity and phase;
Light intensity expression are as follows:
Wherein, I0(k, y) is DC terms signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2The sum of, A (k, y) is two dimension interference
Spectrum different wave length light intensity,For two-dimentional interference spectrum different wave length phase, φ (k, y) is two-dimentional interference spectrum phase shift
Phase difference;
It solves above formula and obtains two-dimentional interference spectrum different wave length light intensity and phase:
Thus segment reconstruction goes out the two-dimentional interference spectrum signal of plural form.
4. the segmentation four-step phase-shifting of domain optical coherence chromatography removal complex conjugate mirror image according to any one of claims 1 to 3
Method, which is characterized in that in the step S2, the wideband light source that tungsten halogen lamp light source module emits is segmented into multiple narrow bandwidths
The combined segmented mode of light source includes two-section, four segmentations, eight segmentations, 16 segmentations.
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