CN107631687B - Point source dystopy expands simultaneous phase-shifting fizeau interferometer and its measurement method - Google Patents
Point source dystopy expands simultaneous phase-shifting fizeau interferometer and its measurement method Download PDFInfo
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Abstract
The invention discloses a kind of point source dystopys to expand simultaneous phase-shifting fizeau interferometer and its measurement method.The interferometer includes pointolite array, striking rope type main interferometer and spectroscopic imaging component.Method are as follows: the identical spherical wave of four beams that pointolite array generates respectively enters main interferometer, by adjusting pointolite array on main interferometer collimator objective focal plane at a distance from optical axis, so that four collimation wavefront being emitted through main interferometer are incident on the difference of the angle on reference mirror, to introduce different phase-shift phases in interference of the plane of reference from test surfaces, the phase shifting interference of four width imaging clearlies is then obtained simultaneously on a CCD by spectroscopic imaging component.The present invention has the characteristics that at low cost, shock resistance is good, easily operated, can be used for the fields such as the real-time high-precision detection of optical element.
Description
Technical field
The invention belongs to optical interferometry Instrument technology field, especially a kind of point source dystopy expands the striking Suo Gan of simultaneous phase-shifting
Interferometer and its measurement method.
Background technique
Striking rope type interferometer is widely used in field of optical measurements, and total light channel structure makes interferometer internal optics system
The aberration of system can be offset in the measurement results, to realize the high-precision detection of optical element.But this interferometer is in data
In collection process, environmental disturbances can destroy phase shift accuracy, cause measurement error, and when serious, measurement can not even be carried out.How
Fizeau interferometer is applied to the dynamic measurement under non-steady environment, is current research hotspot.
There are mainly two types of structure types for current striking rope type synchronous phase shift interferometer.One is 4D company Millerd in 2004
The tilt reference mirror structure (US7,057,738B2) of equal propositions, another kind be Kuchel in 1989 etc. propose (US4,872,
755), improved short-coherence light source optical path difference mating structure (the Bradley T.Kimbrough.Path such as Kimbrough in 2006
Matchedvibration insensitive Fizeau interferometer.Ph.D dissertation,
University of Arizona, 2006).In former structure the plane of reference inclination so that test light and reference light total light
Road characteristic loses the striking maximum advantage of rope type interferometer by partial destruction so as to cause phase measurement error.Latter configuration
The orthogonal light wave of two beam polarization states is generated by preposition accessory part and illuminates main interferometer simultaneously, forms 6 groups of interference fringes altogether.Make
With the broadband illumination light source of short time coherence length, when prebox can be made to match with interferometer temporal coherence, the plane of reference with
Test surfaces interfere the tested intetference-fit strengthening to be formed to reach maximum, while remaining 5 groups additional stripeds completely disappear, thus real
Now coaxial striking rope simultaneous phase-shifting interferometry.However due to restoring position phase as a solving unit using four adjacent pixels,
Spatial resolution has loss.Additionally due to the limitation of micro- polarization arrays manufacture craft, further increases the resolution ratio of interferometer
Bottleneck will be encountered.Furthermore for aperture interferometer system, due to factors such as glass material manufacture and mechanical supports, stress is double
The optical homogeneity error that refraction generates cannot be completely eliminated, and Polarization aberration will cause that interference pattern contrast is fuzzy and wavefront is surveyed
Measure error.
Summary of the invention
The purpose of the present invention is to provide a kind of precision, and high, at low cost, convenient and practical, Miniaturizable point source dystopy expands
Simultaneous phase-shifting fizeau interferometer and its measurement method.
The technical solution for realizing the aim of the invention is as follows: a kind of point source dystopy expands simultaneous phase-shifting fizeau interferometer, wraps
Include: pointolite array, main interferometer and spectroscopic imaging component, the identical spherical wave of four beams that pointolite array generates respectively enter
Then main interferometer obtains four width phase shifting interferences simultaneously by spectroscopic imaging component on a CCD, in which:
The pointolite array is for generating four divergent spherical waves that complex amplitude is identical but spatial position is different；
The main interferometer is striking rope type interferometer, the survey for being reflected back the reference light and test surfaces that are reflected back from the plane of reference
It tries light and forms interference field；
The spectroscopic imaging component (13) is used for the interference for generating four light sources through the plane of reference and test surfaces reflection respectively
Field separates on CCD target surface, and CCD target surface and test surfaces are conjugated.
Further, the pointolite array includes point light source, the first collimator objective, chessboard light of sequentially common optical axis setting
Grid, the first convergence object lens and aperture diaphragm, the aperture diaphragm filter out the four beam diffraction light of (± 1, ± 1) grade of chessboard grating, and
And other level diffraction lights are filtered out, resulting four beams diffraction light complex amplitude is identical, and is located at four vertex of square,
The center of the square is not on the optical axis of main interferometer, side length d, that is, adjacent divergent spherical wave transversion malposition of the square
Distance:
D=2 λ f2/Λ
Wherein, λ is lambda1-wavelength, f2For the focal length for assembling object lens, Λ is the screen periods of chessboard grating.
Further, the main interferometer includes the second collimator objective, the spectro-film, steam of sequentially common optical axis setting
Mirror, third collimator objective, the plane of reference and test surfaces respectively enter trunk by the identical spherical wave of four beams that pointolite array generates
Interferometer, the four bundles light into main interferometer are first collimated by collimator objective, are then expanded via diverging object lens with third collimator objective,
Last sequence is by reference to face and test surfaces, wherein every beam light is referenced face respectively and test surfaces reflect to form reference light and test
Light, reference light and test light are reflected into spectroscopic imaging component along backtracking and by spectro-film；
The diverging object lens and third collimator objective constitute a beam-expanding system, by changing the beam-expanding system enlargement ratio
Realize the optical zoom of interference pattern.
Further, the spectroscopic imaging component include sequentially common optical axis setting second assemble object lens, lens array, at
As object lens, CCD, the position of the second convergence object lens meets following formula:
f4+f6-ls> 0
Wherein, f4With f6It respectively dissipates object lens and second and assembles the focal length of object lens, lsIt can polymers for diverging object lens and second
Light path between mirror；Lens array is located at the second focal plane for assembling object lens；
Through the plane of reference and the reflected four groups of reference lights of test surfaces and test light after second assembles object lens convergence, respectively
By the object space principal point of lens each in lens array, image-forming objective lens will be quasi- by four groups of reference lights of lens array and test light
Directly at directional light, which forms four separated hot spots on the target surface of CCD.
Further, the focal length of the second convergence object lens meets following formula:
f6=f3dI/d
Wherein, f3For the focal length of the second collimator objective, dIFor the diameter of lens each in lens array.
Further, the lens array is 2 × 2 negative lens arrays, the focal length f of each negative lens7Meet f7=-dF#,
Wherein d is the transversion malposition distance of adjacent divergent spherical wave, F#For the F number of the light beam after second assembles object lens.
Further, the front focal plane of the image-forming objective lens is overlapped with the image space interarea of lens array, the focal length of image-forming objective lens
f8Meet f8≤LF#/ 2, wherein L is the width of CCD target surface.
Further, test surfaces are conjugated in the target surface and main interferometer of the CCD, the target surface and image-forming objective lens image space of CCD
The distance between interarea l is l=f8+f8 2/dF#。
A kind of measurement method expanding simultaneous phase-shifting fizeau interferometer based on point source dystopy described in claim 1, including with
Lower step:
Step 1, pointolite array generates four divergent spherical waves that complex amplitude is identical but spatial position is different, this four hairs
Scattered spherical wave is located at four vertex of square, and the center of the square is not on the optical axis of main interferometer, by measured piece
It is placed in main interferometer as test surfaces, adjustment test surfaces keep it parallel with the plane of reference, so that obtaining four width phase shifts on CCD simultaneously
Interference pattern；
Step 2, enable Δ x, Δ y be respectively between the square center and main interferometer optical axis distance horizontal, vertical
Projected length on direction, and meet Δ x=(4m+1) λ f3 2f5 2/8lDf4 2, Δ y=(2n+1) λ f3 2f5 2/4lDf4 2Or Δ
X=(2m+1) λ f3 2f5 2/4lDf4 2, Δ y=(4n+1) λ f3 2f5 2/8lDf4 2, four width of phase-shift phase pi/2 incremented by successively can be obtained
Interference pattern；Wherein, (m, n) is integer, and λ is lambda1-wavelength, f3、f4And f5For be respectively the second collimator objective, diverging object lens and
The focal length of third collimator objective, D are the distance between the plane of reference and test surfaces, the target surface and image-forming objective lens image space interarea that l is CCD
The distance between；
Step 3, four width interference patterns are extracted from a frame ccd image, by Phase-shifting algorithm to four width interference patterns at
Reason, recovers the face shape or wave aberration of test surfaces；
Step 4, continuous acquisition multiframe ccd image extracts averaged after wave aberration respectively, obtains final test surfaces
Face shape or wave aberration.
Further, four width phase shifting interferences, the phase-shift phase δ (r) of every width interference pattern are obtained on CCD described in step 1 simultaneously
Meet:
Wherein,For divergent spherical wave to the dislocation distance between main interferometer optical axis.
Compared with prior art, the present invention its remarkable advantage is: (1) coaxial striking rope simultaneous phase-shifting interference can be achieved and survey
Amount, only can be realized phase shift with a common point light source, cost is relatively low；(2) pointolite array spacing and imaging lens array are straight
Diameter is variable, can effectively inhibit systematic error, improves detection resolution and precision；(3) it can be realized by replacing beam-expanding system
Optical zoom；(4) other polarizers are not necessarily to, it is compact-sized；Test process is simple, easy to adjust, and the requirement to environment is lower,
Test is set to be easier to realize.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that point source dystopy of the present invention expands simultaneous phase-shifting fizeau interferometer.
Fig. 2 is that there are lateral shifts, and collimated light to be caused to generate inclined light path schematic diagram for point light source.
Fig. 3 is the schematic diagram that oblique light is incident on introducing phase shift between interference optical field.
Fig. 4 is the relative position schematic diagram of four point light sources Yu collimator objective focus.
In figure: 1, pointolite array；2, point light source；3, the first collimator objective；4, chessboard grating；5, first object lens are assembled；
6, aperture diaphragm；7, the second collimator objective；8, spectro-film；9, object lens are dissipated；10, third collimator objective；11, reference mirror；12, it surveys
It shows on trial；13, spectroscopic imaging component；14, second object lens are assembled；15, lens array；16, image-forming objective lens；17,CCD.
Specific embodiment
In conjunction with Fig. 1, point source dystopy of the present invention expands simultaneous phase-shifting fizeau interferometer, comprising: pointolite array 1, main interference
Instrument and spectroscopic imaging component 13, the identical spherical wave of four beams that pointolite array 1 generates respectively enter main interferometer, then pass through
Spectroscopic imaging component 13 obtains four width phase shifting interferences simultaneously on a CCD17, in which:
(1) pointolite array 1 is for generating four divergent spherical waves that complex amplitude is identical but spatial position is different；
The pointolite array 1 includes point light source 2, the first collimator objective 3, the chessboard grating 4, the of sequentially common optical axis setting
Polymers mirror 5 and aperture diaphragm 6 for a moment, the aperture diaphragm 6 filter out the four beam diffraction light of (± 1, ± 1) grade of chessboard grating 4, and
Other level diffraction lights are filtered out, resulting four beams diffraction light complex amplitude is identical, and is located at four vertex of square, should
The center of square not on the optical axis of main interferometer, side length d, that is, adjacent divergent spherical wave transversion malposition of the square away from
From
D=2 λ f2/Λ
Wherein, λ is lambda1-wavelength, f2The focal length for assembling object lens 5 for first, Λ are the screen periods of chessboard grating 4.
(2) main interferometer is striking rope type interferometer, is reflected back the reference light and test surfaces that are reflected back from the plane of reference
Test light formed interference field；
The main interferometer includes the second collimator objective 7, spectro-film 8 of sequentially common optical axis setting, diverging object lens 9, third
Collimator objective 10, the plane of reference 11 and test surfaces 12, the identical spherical wave of four beams generated by pointolite array 1 respectively enter trunk
Interferometer, the four bundles light into main interferometer is first collimated by the first collimator objective 7, then via diverging object lens 9 and collimator objective 10
It expands, last sequence is by reference to face 11 and test surfaces 12, wherein every beam light is referenced 12 reflection of face 11 and test surfaces respectively
At reference light and test light, reference light and test light are reflected into spectroscopic imaging component 13 along backtracking and by spectro-film 8.
The diverging object lens 9 constitute a beam-expanding system with third collimator objective 10, and enlargement ratio change may be implemented
The optical zoom of interference pattern.
(3) the spectroscopic imaging component 13 is used for the interference for generating four light sources through the plane of reference and test surfaces reflection respectively
Field separates on CCD target surface, and CCD target surface and test surfaces are conjugated.
The spectroscopic imaging component 13 includes the second convergence object lens 14, the lens array 15, imaging of sequentially common optical axis setting
Object lens 16, CCD17, the described second position for assembling object lens 14 meet
f4+f6-ls> 0
Wherein, f4With f6It respectively dissipates object lens 9 and second and assembles the focal length of object lens 14, lsFor diverging object lens 9 and the second meeting
Light path between polymers mirror 14；Lens array 15 is located at the second focal plane for assembling object lens 14；
Through the plane of reference and the reflected four groups of reference lights of test surfaces and test light after second assembles the convergence of object lens 14, point
Not Jing Guo in lens array 15 each lens object space principal point, image-forming objective lens 16 by by four groups of reference lights of lens array 15 with
Test light is collimated into directional light, which forms four separated hot spots on the target surface of CCD17.
Second focal length for assembling object lens 14 meets
f6=f3dI/d
Wherein, f3For the focal length of the second collimator objective 7, dIFor the diameter of each lens in lens array 15.
Lens array 15 is 2 × 2 negative lens arrays, the focal length f of each negative lens7Meet f7=-dF#, wherein d is adjacent
The transversion malposition distance of divergent spherical wave, F#For the F number of the light beam after second assembles object lens 14.
The front focal plane of image-forming objective lens 16 is overlapped with the image space interarea of lens array 15, the focal length f of image-forming objective lens 168Meet f8
≤LF#/ 2, wherein L is the width of CCD17 target surface.
Test surfaces 12 are conjugated in the target surface and main interferometer of CCD17, the target surface of CCD17 and 16 image space interarea of image-forming objective lens it
Between distance l be l=f8+f8 2/dF#。
The present invention is based on the measurement methods that point source dystopy expands simultaneous phase-shifting fizeau interferometer, comprising the following steps:
Step 1, pointolite array generates four divergent spherical waves that complex amplitude is identical but spatial position is different, this four hairs
Scattered spherical wave is located at four vertex of square, and the center of the square is not on the optical axis of main interferometer, by measured piece
It is placed in main interferometer as test surfaces, adjustment test surfaces keep it parallel with the plane of reference, so that obtaining four width phase shifts on CCD simultaneously
Interference pattern；Four width phase shifting interferences are obtained on the CCD simultaneously, the phase-shift phase δ (r) of every width interference pattern meets:
Wherein,For divergent spherical wave to the dislocation distance between main interferometer optical axis.
Step 2, enable Δ x, Δ y be respectively between the square center and main interferometer optical axis distance horizontal, vertical
Projected length on direction, and meet Δ x=(4m+1) λ f3 2f5 2/8lDf4 2, Δ y=(2n+1) λ f3 2f5 2/4lDf4 2Or Δ
X=(2m+1) λ f3 2f5 2/4lDf4 2, Δ y=(4n+1) λ f3 2f5 2/8lDf4 2, four width of phase-shift phase pi/2 incremented by successively can be obtained
Interference pattern；Wherein, (m, n) is integer, and λ is lambda1-wavelength, f3、f4And f5To be respectively the second collimator objective 7, dissipating object lens 9
With the focal length of third collimator objective 10, D is the distance between the plane of reference and test surfaces, the target surface and image-forming objective lens 16 that l is CCD17
The distance between image space interarea；
Step 3, four width interference patterns are extracted from a frame ccd image, by Phase-shifting algorithm to four width interference patterns at
Reason, recovers the face shape or wave aberration of test surfaces；The Phase-shifting algorithm is random Phase-shifting algorithm or four step Phase-shifting algorithms.
Step 4, continuous acquisition multiframe ccd image extracts averaged after wave aberration respectively, obtains final test surfaces
Face shape or wave aberration improve detection accuracy to inhibit systematic error.
Embodiment 1
Point source dystopy of the present invention expands simultaneous phase-shifting fizeau interferometer light channel structure as shown in Figure 1, including,
1) pointolite array 1 is for generating four divergent spherical waves that complex amplitude is identical but spatial position is different.Point light source
Array 1 includes point light source 2, the first collimator objective 3, the convergence object lens 5 of chessboard grating 4, first and aperture diaphragm 6.Point light source 2 passes through
Multiple diffraction times are generated after first collimator objective 3, chessboard grating 4 and the first convergence object lens 5, aperture diaphragm 6 is for filtering out chess
Four light of (± 1, ± 1) grade of disk grating 4, and filter out other level diffraction lights.This four point light sources are located at square
Four vertex, and its constituted square center not on the optical axis of main interferometer.The side length d of square is that is, adjacent
The transversion malposition distance d=2 λ f of divergent spherical wave2/ Λ, wherein λ is lambda1-wavelength, f2The focal length for assembling object lens 5 for first,
Λ is the screen periods of chessboard grating 4.
2) main interferometer, the main interferometer are striking rope type interferometer, make to be reflected back from the plane of reference and test surfaces respectively
Two-beam wave forms interference field, and the main interferometer includes the second collimator objective 7, spectro-film 8, diverging object lens 9, third collimation object
Mirror 10, the plane of reference 11 and test surfaces 12, the four bundles light into main interferometer is first collimated by the second collimator objective 7, then via hair
It dissipates object lens 9 to expand with third collimator objective 10, last sequence is by reference to face 11 and test surfaces 12, wherein every beam light is joined respectively
It examines face 11 and test surfaces 12 reflects to form reference light and test light, reference light and test light are along backtracking and anti-by spectro-film 8
It injects into spectroscopic imaging component 13.
3) spectroscopic imaging component 13 is used to exist the interference field that four light sources are generated through the plane of reference and test surfaces reflection respectively
It is separated on 17 target surface of CCD, and 17 target surface of CCD and test surfaces 12 is conjugated.Spectroscopic imaging component 13 includes sequentially being total to light
The second of axis setting assembles object lens 14, lens array 15, image-forming objective lens 16, CCD17.Wherein the second position for assembling object lens 14 is expired
Sufficient f4+f6-ls> 0, wherein f4With f6It respectively dissipates object lens 9 and second and assembles the focal length of object lens 14, lsFor diverging object lens 9 with
Second assembles the light path between object lens 14；Lens array 15 is located at the second focal plane for assembling object lens 14；Through the plane of reference and test surfaces
Reflected four groups of reference lights and test light are after second assembles the convergence of object lens 14, respectively by each in lens array 15
The object space principal point of mirror, image-forming objective lens 16 will be collimated into directional light by the four groups of reference lights and test light of lens array 15, this is flat
Row light forms four separated hot spots on the target surface of CCD17.The focal length of second convergence object lens 14 meets f6=f3dI/ d, wherein
f3For the focal length of the second collimator objective 7, dIFor the diameter of each lens in lens array 15.Lens array 15 is 2 × 2 negative lenses
Array, each of which lens function as field lens, focal length f7Meet f7=-dF#, wherein d is the cross of adjacent divergent spherical wave
To dislocation distance, F#For the F number of the light beam after second assembles object lens 14.Image-forming objective lens 16 will be for that will pass through the four of lens array 15
Group reference light and test light are collimated into directional light, and four groups of hot spots on CCD17 target surface is made to be separated.Image-forming objective lens
16 front focal plane is overlapped with the image space interarea of lens array 15.The focal length of image-forming objective lens 16 meets f8≤LF#/ 2, wherein L be
The width of CCD17 target surface.The target surface and test surfaces 12 of CCD17 is conjugated, and the distance between 16 image space interarea of image-forming objective lens is approximate
For l=f8+f8 2/dF#。
It is as follows that the point source dystopy expands simultaneous phase-shifting fizeau interferometer principle:
As shown in Fig. 2, when positioned at 7 front focal plane of the second collimator objective point light source and its focus there are a transversion malposition away from
When from r, there are an angle, θ=r/f with optical axis for the light beam after the second collimator objective 73, by diverging object lens 9 and third
The rear angle that expands of collimator objective 10 becomes θ '=- rf4/f3f5, wherein f3、f4And f5To be respectively the second collimator objective 7, dissipating
The focal length of object lens 9 and third collimator objective 10.Draw to be reflected in the face that is referenced 11 with test surfaces 12 in generated interference field
Enter a constant phase-shift phase.As shown in figure 3, according to its phase-shift phase of geometric optics property be δ (r)=k (AD-AB-BC)=-
2Dcos θ ', due to θ ' very little, in the available δ (r) of small angle approximation=2 π D (2-r2f4 2/f3 2f5 2)/λ, wherein D is reference
The distance between face and test surfaces.
For the point source dystopy expands simultaneous phase-shifting fizeau interferometer, pointolite array 1 generates four multiple vibrations
Identical point light source, as shown in figure 4, using the center of four point light sources as coordinate origin, the front focus of the second collimator objective 7
Coordinate be (Δ x, Δ y), without loss of generality, it will be assumed that 0 < Δ x≤Δ y, each point light source corresponds to the phase shift of interference pattern at this time
Difference is from small to large successively between amount and its minimum phase shift amount are as follows: 0,4 π dD Δ xf4 2/λf3 2f5 2、4πdDΔyf4 2/λf3 2f5 2、4π
dD(Δx+Δy)f4 2/λf3 2f5 2, using random Phase-shifting algorithm reconstructed phase.Particularly, when (Δ x, Δ y) meet Δ x=(4m+
1)λf3 2f5 2/8lDf4 2, Δ y=(2n+1) λ f3 2f5 2/4lDf4 2, (m, n) be integer when, the phase-shift phase of every width interference pattern and its most
Difference is followed successively by 0, pi/2, π, 3 pi/2s from small to large between small phase-shift phase, using four step Phase-shifting algorithm reconstructed phases.
The step of simultaneous phase-shifting fizeau interferometer measures is expanded using above-mentioned point source dystopy are as follows:
1) point light source 2 is opened and to its stabilization；
2) measured piece is placed by fizeau interferometer optical path, opens computer and interference pattern data processing software, recalled in real time
Collected interference fringe；
3) adjusting the distance between test surfaces 12 and the plane of reference 11 is about λ f3 2f5 2/8Δxf4 2, so that four width interference patterns it
Between be sequentially generated about pi/2 phase shift amount from small to large；
4) position and the heeling condition for adjusting test surfaces 12, keep visual field intra-striate minimum；
5) center for choosing four width interference patterns, extracts four width interference patterns on a frame ccd image；
6) by random Phase-shifting algorithm or four step Phase-shifting algorithms, four width interference patterns is calculated, test surfaces are recovered
Face shape or wave aberration.
In conclusion point source dystopy of the present invention expands simultaneous phase-shifting fizeau interferometer, four point light sources and optical axis are utilized
Lateral shift introduces phase shift in reference light and the interference field of test light, restores phase by a frame image, realizes dynamic and surveys
Amount.Since pointolite array spacing and imaging lens array diameter are variable, it can effectively inhibit systematic error, improve detection point
Resolution and precision.Optical zoom can be realized by replacing beam-expanding system.Due to there is no the phase shifting components such as polarizer and PZT
It introduces, it is at low cost, it is compact-sized, it is easy to accomplish miniaturization.In addition, test process is simple, easy to adjust, the requirement to environment
It is lower, make test be easier to realize.
Claims (2)
1. a kind of measurement method for expanding simultaneous phase-shifting fizeau interferometer based on point source dystopy, which is characterized in that the point source is different
It includes pointolite array (1), main interferometer and spectroscopic imaging component (13), point light source battle array that position, which expands simultaneous phase-shifting fizeau interferometer,
The identical spherical wave of four beams that column (1) generate respectively enters main interferometer, then by spectroscopic imaging component (13) in a CCD
(17) four width phase shifting interferences are obtained on simultaneously, in which:
The pointolite array (1) is for generating four divergent spherical waves that complex amplitude is identical but spatial position is different；
The main interferometer is striking rope type interferometer, the test light for being reflected back the reference light and test surfaces that are reflected back from the plane of reference
Form interference field；
The spectroscopic imaging component (13) is used to exist the interference field that four light sources are generated through the plane of reference and test surfaces reflection respectively
It is separated on CCD target surface, and CCD target surface and test surfaces is conjugated；
Method includes the following steps:
Step 1, pointolite array generates four divergent spherical waves that complex amplitude is identical but spatial position is different, this four diverging balls
Surface wave is located at four vertex of square, and the center of the square on the optical axis of main interferometer, measured piece is not placed in
Test surfaces are used as in main interferometer, adjustment test surfaces keep it parallel with the plane of reference, so that obtaining four width phase shift interferences on CCD simultaneously
Figure；
Step 2, enable Δ x, Δ y be respectively between the square center and main interferometer optical axis distance in horizontal, vertical direction
On projected length, and meetOr Δ x=
(2m+1)λf3 2f5 2/4lDf4 2, Δ y=(4n+1) λ f3 2f5 2/8lDf4 2, four width that phase-shift phase pi/2 incremented by successively can be obtained are dry
Relate to figure；Wherein, m, n are integer, and λ is lambda1-wavelength, f3、f4And f5To be respectively the second collimator objective (7), dissipating object lens (9)
With the focal length of third collimator objective (10), D is the distance between the plane of reference and test surfaces, and l is the target surface and imaging object of CCD (17)
The distance between mirror (16) image space interarea；
Step 3, four width interference patterns are extracted from a frame ccd image, and four width interference patterns are handled by Phase-shifting algorithm, it is extensive
It appears again the face shape or wave aberration of test surfaces；
Step 4, continuous acquisition multiframe ccd image extracts averaged after wave aberration respectively, obtains final test surfaces face shape
Or wave aberration.
2. the measurement method that point source dystopy according to claim 1 expands simultaneous phase-shifting fizeau interferometer, which is characterized in that
Four width phase shifting interferences are obtained on CCD described in step 1 simultaneously, the phase-shift phase δ (r) of every width interference pattern meets:
Wherein,For divergent spherical wave to the dislocation distance between main interferometer optical axis.
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| CN105928455A (en) * | 2016-05-20 | 2016-09-07 | 南京理工大学 | Spatial beam splitting coaxial Fizeau type synchronous phase-shift interferometer and measuring method thereof |
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