CN105928455B - The coaxial striking rope type synchronous phase shift interferometer of space light splitting and its measurement method - Google Patents
The coaxial striking rope type synchronous phase shift interferometer of space light splitting and its measurement method Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02025—Interference between three or more discrete surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0234—Measurement of the fringe pattern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/028—Types
- G01J2009/0292—Fizeau; Wedge
Abstract
The invention discloses a kind of spaces to be divided coaxial striking rope type synchronous phase shift interferometer and its measurement method, belongs to optical interference measurer field.The interferometer includes point light source and its spectrum groupware, striking rope type main interferometer and spectroscopic imaging component.Method is：The spherical wave that point light source is sent out enters main interferometer after spectrum groupware is divided into four beams, one point light source is copied into identical four using spectrum groupware, by adjusting four point light sources on main interferometer collimator objective focal plane at a distance from optical axis, different phase-shift phases are introduced in interference of the plane of reference from test surfaces, then obtain the phase shifting interference of four width imaging clearlies simultaneously on a CCD by spectroscopic imaging component.The present invention has the characteristics that at low cost, shock resistance is good, easily operated, can be used for the fields such as the real-time high-precision detection of optical element.
Description
Technical field
The invention belongs to optical interferometry Instrument technology field, especially a kind of coaxial striking rope type simultaneous phase-shifting of space light splitting
Interferometer and its measurement method.
Background technology
Striking rope type interferometer is using the Common-path method for being tested light beam and reference beam, in addition to the plane of reference, interferometer optics
The aberration of system itself is essentially identical to the influence for being tested light beam and reference beam, and the overwhelming majority can cancel out each other, thus striking rope
Type interferometer only to the required precision of the plane of reference height, and to the processing of system wave aberration and other elements, assembly precision require compared with
It is low.Compared with the non-interference with common path instrument such as safe graceful Green's type, the design and difficulty of processing of striking rope type interferometer are substantially reduced, therefore
The first choice detected as heavy caliber, large-numerical aperture optical component surface shape.
There are mainly two types of structure types for current striking rope type synchronous phase shift interferometer.One is 4D companies Millerd in 2004
The tilt reference mirror structure (US7,057,738B2) of equal propositions, another kind be Kuchel in 1989 etc. propose (US4,872,
755), improved short-coherence light source optical path difference mating structure (the Bradley T.Kimbrough.Path such as Kimbrough in 2006
Matchedvibration insensitive Fizeau interferometer.Ph.D dissertation,
University of Arizona, 2006).The inclination of the plane of reference makes the total light of test light and reference light in former structure
Road characteristic loses the striking maximum advantage of rope type interferometer by partial destruction so as to cause phase measurement error.Latter configuration
The orthogonal light wave of two beam polarization states is generated by preposition accessory part and illuminates main interferometer simultaneously, forms 6 groups of interference fringes altogether.Make
With the broadband illumination light source of short time coherence length, when prebox can be made to be matched with interferometer temporal coherence, the plane of reference with
Test surfaces interfere the tested intetference-fit strengthening to be formed to reach maximum, while remaining 5 groups additional stripeds completely disappear, to real
Now coaxial striking rope simultaneous phase-shifting interferometry.However it polarizes the making relative difficulty of phase shift acquisition module and of high cost.In addition,
Since preposition interference component matches with main interferometer temporal coherence the absolute compensation of optical path difference to be realized, in preposition accessory part
Adjustable mirror moving range it is equal at a distance from reference mirror to measured lens, this makes regulating reflection in preposition accessory part
The moving range of mirror is very big, huge so as to cause apparatus structure, it is difficult to minimize.
Invention content
The purpose of the present invention is to provide a kind of precision, and high, at low cost, convenient and practical, Miniaturizable space light splitting is coaxial
Striking rope type synchronous phase shift interferometer and its measurement method.
Realize that the object of the invention technical solution is：A kind of coaxial striking rope type synchronous phase shift interferometer of space light splitting,
It is characterized in that, including：Point light source and its spectrum groupware, main interferometer and spectroscopic imaging component, the spherical wave sent out by point light source
Enter main interferometer after spectrum groupware is divided into four beams, four width are obtained simultaneously on a CCD finally by spectroscopic imaging component
Phase shifting interference, wherein：
The point light source and its spectrum groupware are for generating four diverging sphericals that complex amplitude is identical but spatial position is different
Wave；
The main interferometer is striking rope type interferometer, the survey for making the reference light and test surfaces that are reflected back from the plane of reference be reflected back
It tries light and forms interference field；
The spectroscopic imaging component is used to exist the interference field that four light sources are generated through the plane of reference and test surfaces reflection respectively
It is separated on CCD target surfaces, and CCD target surfaces is conjugated with test surfaces.
Further, the spectrum groupware includes convergence object lens, chessboard grating and the first aperture of sequentially common optical axis setting
Diaphragm, first aperture diaphragm filter out the four beam diffraction light of (± 1, ± 1) grade of chessboard grating, and filter out other level diffraction
Four beam diffraction light complex amplitudes of light, gained are identical, and are located at four vertex of square, and the center of the square does not exist
On the optical axis of main interferometer, the transversion malposition distance of length of side d, that is, adjacent divergent spherical wave of the square, d is by adjusting chessboard
The distance between grating and the first aperture diaphragm lgTo determine：
D=2 λ lg/Λ
Wherein, λ is lambda1-wavelength, and Λ is the screen periods of chessboard grating.
Further, the main interferometer includes spectro-film, collimator objective, the plane of reference and the test of sequentially common optical axis setting
Face, the spherical wave sent out by point light source enters main interferometer after spectrum groupware is divided into four beams, into the four bundles light of main interferometer
Sequence is by reference to face and test surfaces after being expanded respectively by collimator objective, wherein being referenced face and test surfaces reflection respectively per beam light
It forms reference light and test light, reference light and test light is reflected into spectroscopic imaging component along backtracking and by spectro-film.
Further, the spectroscopic imaging component include sequentially common optical axis setting the second aperture diaphragm, lens array, at
As object lens, CCD, the lens array is close to the second aperture diaphragm, and the two is located at reference light and survey caused by main interferometer
Try the focal plane of light；
Second aperture diaphragm is filtered out through the plane of reference and the reflected four groups of reference lights of test surfaces and test light, and is filtered out
Interfere light, four groups of reference lights and test light pass through the object space principal point of each lens in lens array respectively, and image-forming objective lens will be through
The four groups of reference lights and test light for crossing lens array are collimated into directional light, which forms four on the target surface of CCD and separate
Hot spot.
Further, the lens array is 2 × 2 negative lens arrays, the focal length f of each negative lens1Meet f1=-dF#,
Wherein d is the transversion malposition distance of adjacent divergent spherical wave, F#For the F numbers of collimator objective in main interferometer.
Further, the front focal plane of the image-forming objective lens is overlapped with the image space interarea of lens array, the focal length of image-forming objective lens
f2Meet f2≤LF#/ 2, wherein L are the width of CCD target surfaces.
Further, test surfaces are conjugated in the target surface and main interferometer of the CCD, target surface and the image-forming objective lens image space of CCD
The distance between interarea l is l=f2+f2 2/dF#。
A kind of measurement method based on light splitting coaxial striking rope type synchronous phase shift interferometer in space described in claim 1, it is special
Sign is, includes the following steps：
Step 1, point light source generates four divergent spherical waves that complex amplitude is identical but spatial position is different by spectrum groupware,
Four divergent spherical waves be located at square four vertex, the center of the square not on the optical axis of main interferometer,
Measured piece is placed in main interferometer and is used as test surfaces, adjustment test surfaces keep it parallel with the plane of reference so that CCD is upper to be obtained simultaneously
Four width phase shifting interferences；
Step 2, enable x, y be respectively between the square center and main interferometer optical axis distance in horizontal, vertical direction
On projected length, and meet y=2x=π f3 2/ 2Dk x=2y=π f3 2/ 2Dk is adjusted between test surfaces and the plane of reference
Distance D is D=π f3 2/ 4xk D=π f3 2/ 4yk obtains four width interference patterns of phase-shift phase pi/2 incremented by successively, wherein f3Subject to
The focal length of straight object lens, k=2 π/λ are wave vector, and λ is lambda1-wavelength；
Step 3, four width interference patterns are extracted from a frame ccd image, at four width interference pattern of Phase-shifting algorithm pair
Reason, recovers the face shape or wave aberration of test surfaces.
Further, four width phase shifting interferences are obtained on CCD described in step 1 simultaneously, ignore constant phase shift factor -2Dk, often
The phase-shift phase δ (r) of width interference pattern meets：
δ (r)=Dk (r/f3)2
Wherein, D is the distance between the plane of reference and test surfaces, and k=2 π/λ are wave vector,For divergent spherical wave
Dislocation distance between main interferometer optical axis, f3For the focal length of collimator objective in main interferometer.
Further, Phase-shifting algorithm described in step 3 is random Phase-shifting algorithm or four step Phase-shifting algorithms.
Compared with prior art, the present invention its remarkable advantage is：(1) coaxial striking rope simultaneous phase-shifting interference can be achieved to survey
Amount；(2) phase shift only can be realized with a common point light source, cost is relatively low；(3) other polarizers are not necessarily to, it is compact-sized；
(4) test process is simple, easy to adjust, and the requirement to environment is relatively low, and test is made to be easier to realize.
Description of the drawings
Fig. 1 is the structural schematic diagram of light splitting coaxial striking rope type synchronous phase shift interferometer in space of the present invention.
Fig. 2 is that there are lateral shifts, and collimated light to be caused to generate inclined light path schematic diagram for point light source.
Fig. 3 is the schematic diagram that oblique light is incident on introducing phase shift between interference optical field.
Fig. 4 is the relative position schematic diagram of four point light sources and collimator objective focus.
In figure：1, point light source；2, spectrum groupware；3, object lens are assembled；4, chessboard grating；5, the first aperture diaphragm；6, it is divided
Film；7, collimator objective；8, the plane of reference；9, test surfaces；10, spectroscopic imaging component；11, the second aperture diaphragm；12, lens array；
13, image-forming objective lens；14,CCD.
Specific implementation mode
In conjunction with Fig. 1, light splitting coaxial striking rope type synchronous phase shift interferometer in space of the present invention, which is characterized in that including：Point light source
1 and its spectrum groupware 2, main interferometer and spectroscopic imaging component 10, the spherical wave sent out by point light source 1 be divided into four through spectrum groupware
Shu Houjin enters main interferometer, and four width phase shifting interferences are obtained simultaneously on a CCD14 finally by spectroscopic imaging component 10,
In：
(1) point light source 1 and its spectrum groupware 2 are for generating four divergings that complex amplitude is identical but spatial position is different
Spherical wave；
The spectrum groupware 2 includes convergence object lens 3, chessboard grating 4 and the first aperture diaphragm 5 of sequentially common optical axis setting,
First aperture diaphragm 5 filters out the four beam diffraction light of (± 1, ± 1) grade of chessboard grating 4, and filters out other level diffraction lights,
Four beam diffraction light complex amplitudes of gained are identical, and are located at four vertex of square, and the center of the square is not in master
On the optical axis of interferometer, the transversion malposition distance of length of side d, that is, adjacent divergent spherical wave of the square, d is by adjusting chessboard light
The distance between grid 4 and the first aperture diaphragm 5 lgTo determine：
D=2 λ lg/Λ
Wherein, λ is lambda1-wavelength, and Λ is the screen periods of chessboard grating 4.
(2) main interferometer is striking rope type interferometer, and the reference light and test surfaces that are reflected back from the plane of reference is made to be reflected back
Test light formed interference field；
The main interferometer includes spectro-film 6, collimator objective 7, the plane of reference 8 and the test surfaces 9 of sequentially common optical axis setting, by
The spherical wave that point light source 1 is sent out enters main interferometer after spectrum groupware is divided into four beams, and the four bundles light into main interferometer is distinguished
Sequence is by reference to face 8 and test surfaces 9 after being expanded by collimator objective 7, wherein being referenced face 8 and test surfaces 9 respectively per beam light instead
It penetrates to form reference light and test light, reference light and test light are reflected into spectroscopic imaging component along backtracking and by spectro-film 6
10。
(3) interference that the spectroscopic imaging component 10 is used to respectively generate four light sources through the plane of reference and test surfaces reflection
Field separates on CCD target surfaces, and CCD target surfaces are conjugated with test surfaces.
The spectroscopic imaging component 10 includes the second aperture diaphragm 11, lens array 12 of sequentially common optical axis setting, imaging
Object lens 13, CCD14, the lens array 12 is close to the second aperture diaphragm 11, and the two is located at reference caused by main interferometer
The focal plane of light and test light；Second aperture diaphragm 11 is filtered out through the plane of reference and the reflected four groups of reference lights of test surfaces and test
Light, and interference light is filtered out, which passes through the object space principal point of each lens in lens array 12 with test light respectively,
Image-forming objective lens 13 will be collimated into directional light by four groups of reference lights of lens array 12 with test light, and the directional light is CCD14's
Four separated hot spots are formed on target surface.
The lens array 12 is 2 × 2 negative lens arrays, the focal length f of each negative lens1Meet f1=-dF#, wherein d is
The transversion malposition distance of adjacent divergent spherical wave, F#For the F numbers of collimator objective in main interferometer 7.
The front focal plane of the image-forming objective lens 13 is overlapped with the image space interarea of lens array 12, the focal length f of image-forming objective lens 132It is full
Sufficient f2≤LF#/ 2, wherein L are the width of CCD14 target surfaces.
Test surfaces 9 are conjugated in the target surface and main interferometer of the CCD14, target surface and the 13 image space master of image-forming objective lens of CCD14
The distance between face l is l=f2+f2 2/dF#。
The present invention is based on the measurement methods that space is divided coaxial striking rope type synchronous phase shift interferometer, include the following steps：
Step 1, point light source generates four divergent spherical waves that complex amplitude is identical but spatial position is different by spectrum groupware,
Four divergent spherical waves be located at square four vertex, the center of the square not on the optical axis of main interferometer,
Measured piece is placed in main interferometer and is used as test surfaces, adjustment test surfaces keep it parallel with the plane of reference so that CCD is upper to be obtained simultaneously
Four width phase shifting interferences；Four width phase shifting interferences are obtained on the CCD simultaneously, ignore constant phase shift factor -2Dk, every width interference
The phase-shift phase δ (r) of figure meets：
δ (r)=Dk (r/f3)2
Wherein, D is the distance between the plane of reference and test surfaces, and k=2 π/λ are wave vector,For divergent spherical wave
Dislocation distance between main interferometer optical axis, f3For the focal length of collimator objective in main interferometer.
Step 2, enable x, y be respectively between the square center and main interferometer optical axis distance in horizontal, vertical direction
On projected length, and meet y=2x=π f3 2/ 2Dk x=2y=π f3 2/ 2Dk is adjusted between test surfaces and the plane of reference
Distance D is D=π f3 2/ 4xk D=π f3 2/ 4yk obtains four width interference patterns of phase-shift phase pi/2 incremented by successively, wherein f3Subject to
The focal length of straight object lens, k=2 π/λ are wave vector, and λ is lambda1-wavelength；
Step 3, four width interference patterns are extracted from a frame ccd image, at four width interference pattern of Phase-shifting algorithm pair
Reason, recovers the face shape or wave aberration of test surfaces；The Phase-shifting algorithm is random Phase-shifting algorithm or four step Phase-shifting algorithms.
Embodiment 1
The coaxial striking rope type synchronous phase shift interferometer light channel structure of space of the present invention light splitting as shown in Figure 1, include,
1) point light source 1 and its spectrum groupware 2 are for generating four diverging sphericals that complex amplitude is identical but spatial position is different
Wave.Spectrum groupware includes assembling object lens 3, chessboard grating 4, the first aperture diaphragm 5.Point light source 1 is through overconvergence object lens 3 and chessboard light
Multiple diffraction times are generated after grid 4, the first aperture diaphragm 5 is used to filter out four light of (± 1, ± 1) grade of chessboard grating 4, and
Filter out other level diffraction lights.This four point light sources be located at square four vertex, and its constituted square
Center is not on the optical axis of main interferometer.The length of side d of square can by adjusting chessboard grating 4 and the first aperture diaphragm 5 it
Between distance lgTo change.Meet d=2 λ lg/ Λ, wherein λ are lambda1-wavelength, and Λ is screen periods.
2) main interferometer, the main interferometer are striking rope type interferometer, make to be reflected back from the plane of reference and test surfaces respectively
Two-beam wave forms interference field, and the main interferometer includes spectro-film 6, collimator objective 7, the plane of reference 8 and test surfaces 9, into master
Four light of interferometer by the collimator objective 7 after being expanded sequentially by reference to face 8 and the survey for being placed in plane of reference rear respectively
Examination face 9, the reflection of face 9 after tested returns, then is reflected into spectroscopic imaging component 10 by spectro-film 6.
3) spectroscopic imaging component 10, the interference field for generating four light sources through the plane of reference 8 and the reflection of test surfaces 9 respectively
It is separated on CCD14 target surfaces, and CCD14 target surfaces is conjugated with test surfaces 9.Spectroscopic imaging component 10 includes the second aperture light
Door screen 11, lens array 12, image-forming objective lens 13, CCD14.Wherein the second aperture diaphragm 11 is for filtering out through the plane of reference 8 and test surfaces 9
Reflected four groups of reference lights and test light, and filter out other interference light.Lens array 12 is close to the second aperture diaphragm 11,
And positioned at the focal plane of the reflected beams.Four groups of reflected reference lights pass through the object space principal point of each lens with test light respectively.Lens array
Row 12 are 2 × 2 negative lens arrays, each of which lens functions as field lens.Focal length f1Meet f1≈-dF#.Wherein F#For
The F numbers of collimator objective 7.Four group reference lights of the image-forming objective lens 13 for that will pass through lens array 12 are collimated into parallel with test light
Light, and so that four groups of hot spots on CCD14 target surfaces are separated.The picture of the front focal plane and lens array 12 of image-forming objective lens 13
Square interarea overlaps.The focal length of image-forming objective lens 13 meets f2≤LF#/ 2, wherein L are the width of CCD14 target surfaces.The target surface of CCD14 with
Test surfaces 9 are conjugated, and the distance between 13 image space interarea of image-forming objective lens is approximately l=f+f2/dF#。
The coaxial striking rope type synchronous phase shift interferometer principle of space light splitting is as follows：
As shown in Fig. 2, when there are a transversion malposition distance r with its focus for the point light source positioned at 7 front focal plane of collimator objective
When, there are an angle, θ=r/f with optical axis for the light beam after collimator objective 73, wherein f3For the focal length of collimator objective 7.To
A constant phase-shift phase is introduced in interference field caused by being reflected in the face that is referenced 8 and test surfaces 9.As shown in figure 3, according to geometry
Its phase-shift phase of optical property is δ (r)=k (AD-AB-BC)=- 2Dcos θ can obtain δ due to θ very littles in small angle approximation
(r)=Dk (r/f3)2, having ignored a constant phase shift factor -2Dk here, wherein D is the distance between the plane of reference and test surfaces,
K=2 π/λ are wave vector.
For the coaxial striking rope type synchronous phase shift interferometer of space light splitting, point light source 1 is produced by spectrum groupware 2
The identical point light source of four complex amplitudes of life, as shown in figure 4, using the center of four point light sources as coordinate origin, before collimator objective 7
The coordinate of focus be (x, y), without loss of generality, it will be assumed that 0 < x≤y, at this time each point light source correspond to the phase-shift phase of interference pattern
Difference is followed successively by from small to large between its minimum phase shift amount：0,2dDk/f3 2x、2dDk/f3 2y、2dDk/f3 2(x+y), using with
Machine Phase-shifting algorithm reconstructed phase.Particularly, when (x, y) meets y=2x=π f3 2When/2Dk, the phase-shift phase of every width interference pattern and its
Difference is followed successively by 0, pi/2, π, 3 pi/2s from small to large between minimum phase shift amount, using four step Phase-shifting algorithm reconstructed phases.
Being divided the step of coaxial striking rope type synchronous phase shift interferometer measures using above-mentioned space is：
1) it opens point light source 1 and waits for its stabilization；
2) it presses fizeau interferometer light path and places measured piece, open computer and interference pattern data processing software, recall in real time
Collected interference fringe；
3) it is about π f to adjust the distance between test surfaces 9 and the plane of reference 83 2/ 4xk so that between four width interference patterns from it is small to
It is sequentially generated about pi/2 phase shift amount greatly；
4) position of adjustment test surfaces 9 and heeling condition, keep visual field intra-striate minimum；
5) center for choosing four width interference patterns, extracts four width interference patterns on a frame ccd image；
6) by random Phase-shifting algorithm or four step Phase-shifting algorithms, four width interference patterns is calculated, test surfaces are recovered
Face shape or wave aberration.
In conclusion light splitting coaxial striking rope type synchronous phase shift interferometer in space of the present invention, utilizes four point light sources and optical axis
Lateral shift introduce phase shift in reference light and the interference field of test light, by a frame image restore phase, realize dynamic
It measures.It is at low cost due to there is no the introducing of the phase shifting components such as polarizer and PZT, it is compact-sized, it is easy to accomplish small-sized
Change.In addition, test process is simple, easy to adjust, the requirement to environment is relatively low, and test is made to be easier to realize.
Claims (10)
1. a kind of coaxial striking rope type synchronous phase shift interferometer of space light splitting, which is characterized in that including：Point light source (1) and its light splitting
Component (2), main interferometer and spectroscopic imaging component (10), the spherical wave sent out by point light source (1) are divided into four beams through spectrum groupware
Enter main interferometer afterwards, four width phase shifting interferences obtained simultaneously on a CCD (14) finally by spectroscopic imaging component (10),
Wherein：
The point light source (1) and its spectrum groupware (2) are for generating four diverging balls that complex amplitude is identical but spatial position is different
Surface wave；
The main interferometer is striking rope type interferometer, the test light for making the reference light and test surfaces that are reflected back from the plane of reference be reflected back
Form interference field；
The spectroscopic imaging component (10) is used to exist the interference field that four light sources are generated through the plane of reference and test surfaces reflection respectively
It is separated on CCD target surfaces, and CCD target surfaces is conjugated with test surfaces.
2. light splitting coaxial striking rope type synchronous phase shift interferometer in space according to claim 1, which is characterized in that the light splitting
Component (2) include sequentially common optical axis setting convergence object lens (3), chessboard grating (4) and the first aperture diaphragm (5), described first
Aperture diaphragm (5) filters out the four beam diffraction light of (± 1, ± 1) grade of chessboard grating (4), and filters out other level diffraction lights, gained
Four beam diffraction light complex amplitudes it is identical, and be located at square four vertex, the center of the square is not in main interference
On the optical axis of instrument, the transversion malposition distance of length of side d, that is, adjacent divergent spherical wave of the square, d is by adjusting chessboard grating (4)
The distance between first aperture diaphragm (5) lgTo determine：
D=2 λ lg/Λ
Wherein, λ is lambda1-wavelength, and Λ is the screen periods of chessboard grating (4).
3. light splitting coaxial striking rope type synchronous phase shift interferometer in space according to claim 1, which is characterized in that the trunk
Interferometer includes spectro-film (6), collimator objective (7), the plane of reference (8) and the test surfaces (9) of sequentially common optical axis setting, by point light source
(1) spherical wave sent out after spectrum groupware is divided into four beams enter main interferometer, into main interferometer four bundles light respectively by standard
Sequence is by reference to face (8) and test surfaces (9) after straight object lens (7) expand, wherein being referenced face (8) and test surfaces respectively per beam light
(9) reference light and test light are reflected to form, reference light and test light are along backtracking and are reflected into and are divided by spectro-film (6)
As component (10).
4. light splitting coaxial striking rope type synchronous phase shift interferometer in space according to claim 1, which is characterized in that the light splitting
Image-forming assembly (10) include sequentially common optical axis setting the second aperture diaphragm (11), lens array (12), image-forming objective lens (13),
CCD (14), the lens array (12) is close to the second aperture diaphragm (11), and the two is located at reference light caused by main interferometer
With the focal plane of test light；
Second aperture diaphragm (11) is filtered out through the plane of reference and the reflected four groups of reference lights of test surfaces and test light, and is filtered out
Light, four groups of reference lights is interfered to pass through the object space principal point of each lens in lens array (12), image-forming objective lens respectively with test light
(13) four groups of reference lights of lens array (12) will be passed through and test light is collimated into directional light, target of the directional light in (14) CCD
Four separated hot spots are formed on face.
5. light splitting coaxial striking rope type synchronous phase shift interferometer in space according to claim 4, which is characterized in that the lens
Array (12) is 2 × 2 negative lens arrays, the focal length f of each negative lens1Meet f1=-dF#, wherein d is adjacent divergent spherical wave
Transversion malposition distance, F#For the F numbers of collimator objective in main interferometer (7).
6. light splitting coaxial striking rope type synchronous phase shift interferometer in space according to claim 5, which is characterized in that the imaging
The front focal plane of object lens (13) is overlapped with the image space interarea of lens array (12), the focal length f of image-forming objective lens (13)2Meet f2≤LF#/
2, wherein L are the width of CCD (14) target surface.
7. light splitting coaxial striking rope type synchronous phase shift interferometer in space according to claim 6, which is characterized in that the CCD
(14) test surfaces (9) are conjugated in target surface and main interferometer, between the target surface and image-forming objective lens (13) image space interarea of CCD (14)
Distance l is
8. a kind of measurement method based on light splitting coaxial striking rope type synchronous phase shift interferometer in space described in claim 1, feature
It is, includes the following steps：
Step 1, point light source generates four divergent spherical waves that complex amplitude is identical but spatial position is different by spectrum groupware, this four
A divergent spherical wave is located at four vertex of square, and the center of the square, will be by not on the optical axis of main interferometer
It surveys part to be placed in main interferometer as test surfaces, adjustment test surfaces keep it parallel with the plane of reference so that CCD is upper to obtain four width simultaneously
Phase shifting interference；
Step 2, enable x, y be respectively between the square center and main interferometer optical axis distance on horizontal, vertical direction
Projected length, and meetOrIt adjusts between test surfaces and the plane of reference
Distance D isOrObtain four width interference patterns of phase-shift phase pi/2 incremented by successively, wherein f3For
The focal length of collimator objective, k=2 π/λ are wave vector, and λ is lambda1-wavelength；
Step 3, four width interference patterns are extracted from a frame ccd image, are handled by four width interference pattern of Phase-shifting algorithm pair, it is extensive
It appears again the face shape or wave aberration of test surfaces.
9. the measurement method of light splitting coaxial striking rope type synchronous phase shift interferometer in space according to claim 8, feature exist
In, on CCD described in step 1 simultaneously obtain four width phase shifting interferences, ignore constant phase shift factor -2Dk, the phase shift of every width interference pattern
δ (r) is measured to meet：
δ (r)=Dk (r/f3)2
Wherein, D is the distance between the plane of reference and test surfaces, and k=2 π/λ are wave vector,For divergent spherical wave to master
Dislocation distance between interferometer optical axis, f3For the focal length of collimator objective in main interferometer.
10. the measurement method of light splitting coaxial striking rope type synchronous phase shift interferometer in space according to claim 8, feature exist
In Phase-shifting algorithm described in step 3 is random Phase-shifting algorithm or four step Phase-shifting algorithms.
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| CN109632112B (en) * | 2018-12-25 | 2020-11-27 | 南京理工大学 | Spatial position registration method of synchronous phase-shifting interferogram of dynamic interferometer |
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| CN112525343A (en) * | 2020-11-11 | 2021-03-19 | 中国科学院空天信息创新研究院 | Detection method and device for dispersive imaging spectrometer |
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