CN108020179A - A kind of High-precision angle measuring device and method - Google Patents
A kind of High-precision angle measuring device and method Download PDFInfo
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- CN108020179A CN108020179A CN201711452067.9A CN201711452067A CN108020179A CN 108020179 A CN108020179 A CN 108020179A CN 201711452067 A CN201711452067 A CN 201711452067A CN 108020179 A CN108020179 A CN 108020179A
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- beam splitter
- measured
- speculum
- laser
- angle
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The present invention proposes a kind of High-precision angle measuring device and method, and laser light source becomes after beam expanding lens and attenuator expands parallel laser；Parallel laser is expanded by the first beam splitter, speculum, the 3rd beam splitter, the 4th beam splitter, forms the first reference beam；Parallel laser is expanded by the first beam splitter, the second beam splitter, the 3rd beam splitter, the 4th beam splitter, forms the second reference beam；Parallel laser is expanded by the first beam splitter, the second beam splitter, speculum to be measured, the 4th beam splitter, forms light beam to be measured；First reference beam, the second reference beam, the light beam to be measured coherent superposition in CCD camera image planes produce interference pattern, and input picture processing system.Positional information is carried out linear fit by the present invention by measuring the positional information of laser interference hot spot, by calculating the variable quantity of air line distance, calculates the angle change of incident laser.Under identical measurement accuracy, this method avoid the rigors adjusted the distance, and a kind of method is provided for the miniaturization of High-precision angle measuring apparatus.
Description
Technical field
The invention belongs to optical metrology field, the High-precision angle measuring device and method of small angle variation are related generally to.
Background technology
With the development of technology, the measurement of sub-micro arc angles, it is in the urgent need to address to have become many high-quality precision and sophisticated technologies
Major issue.Now to use collimator method or four-quadrant method, using collimator method high certainty of measurement, but equipment is heavy more,
Environmental requirement is high, adjusts difficult.Such as measurement sub-micro arc angles objective focal length must reach 2m, it is necessary to take big quantity space.Four
The high sensitivity of quadrant method position, it is assumed that it is 2.5m to reach 4 quadrant detector distance from speculum, and the sensitivity of this method reaches
To 1 μ rad.But since laser facula is not equally distributed rectangular light spot, the differential amplification output valve of four-quadrant and laser
Facula position is in non-linear, and since non-gaussian veiling glare exists, four-quadrant method is not suitable for high-precision fixed measurement, and
And the very difficult tune of initial position of the laser reflection to 4 quadrant detector surface, it is inconvenient to use.
Foreign countries delivered in optical＆Laser Technology in 2012《Application of the Fourier
analysis methods to the three beam interferometry》It is proposed utilizes three interference of light of fourier analysis
Method measures low-angle amount, is made of laser polarizer beam splitter camera.Fu Li is carried out to the coherent image of formation
Leaf analysis and angle change is further calculated in result to analysis.Minimum 10um of camera pixel or so at this stage,
Due to camera pixel can not accomplish it is infinitely small, so the space sampling frequency of image is than the relatively low space for causing Fourier Tranform to obtain
Frequency accuracy is relatively low, so that the angular error calculated is big.
The content of the invention
Existing in the prior art to solve the problems, such as, the present invention proposes a kind of High-precision angle measuring device and method, in reality
Meet the measurement accuracy of sub-micro arc angles while miniaturization measuring device now, be suitable for on-the-spot test.
The technical scheme is that：
A kind of High-precision angle measuring device, it is characterised in that：Including laser light source, beam expanding lens, attenuator, beam splitting
Mirror, speculum, speculum to be measured, CCD camera and image processing system；
Laser light source becomes after beam expanding lens and attenuator expands parallel laser；
Parallel laser is expanded by the first beam splitter 1, speculum, the 3rd beam splitter 3, the 4th beam splitter 4, the shape on camera
Into the first reference beam 1；
Parallel laser is expanded by the first beam splitter 1, the second beam splitter 2, the 3rd beam splitter 3, the 4th beam splitter 4, in phase
The second reference beam 2 is formed on machine；
Parallel laser is expanded by the first beam splitter 1, the second beam splitter 2, speculum to be measured, the 4th beam splitter 4, in camera
It is upper to form light beam to be measured；
First reference beam 1, the second reference beam 2, the light beam to be measured coherent superposition in CCD camera image planes produce interference
Figure, and input picture processing system.
Further preferred solution, a kind of High-precision angle measuring device, it is characterised in that：Each beam splitter is with entering
Irradiating light beam angle at 45 °, speculum and incident beam angle are not equal to 45 °, and speculum to be measured and incident beam institute are into folder
Angle is not equal to 45 °.
Further preferred solution, a kind of High-precision angle measuring device, it is characterised in that：Speculum and incident light
Beam angle is not equal to 45 ° in the range of 45 ° ± 10 '；Speculum to be measured is with incident beam angle at 45 ° ± 10 '
In the range of, and not equal to 45 °.
First reference beam 1, the second reference beam 2, the light beam to be measured coherent superposition in CCD camera image planes produce interference pattern
Shown in 2, the second reference beam 2 and light beam to be measured, or the first reference beam 1 and light beam to be measured, the interference pattern formed on CCD is such as
Shown in Fig. 3.The center-of-mass coordinate of all hot spots in interference pattern 2 is found out using centroid method, is carried out by the stripe direction of interference pattern 3 linear
Fitting, calculates the vertical range between adjacent two straight lines, and then can accurately calculate the angle change of plane mirror to be measured.
Based on above-mentioned principle, using above-mentioned measuring device, the method for carrying out High-precision angle measurement, it is characterised in that：Bag
Include following steps：
Step 1：Laser light source is lighted, opens CCD camera and image processing system；Fixed speculum to be measured, passes through adjusting
First beam splitter 1, the second beam splitter 2, the 3rd beam splitter 3, the 4th beam splitter 4, speculum join the first reference beam 1, second
Examine light beam 2, light beam to be measured and interference the first plaque-like interference pattern 1 of formation is produced on CCD；
Step 2：Low-angle offset occurs for speculum to be measured, and other elements are motionless, obtains the first reference beam 1, second ginseng
Examine light beam 2, light beam to be measured and interference the second plaque-like interference pattern 2 of formation is produced on CCD；
Step 3：Cover reference beam all the way, the speckle pattern interferometry that another way reference beam is formed with light beam to be measured on CCD
Fig. 3；
Step 4：The center-of-mass coordinate of all hot spots in the first plaque-like interference pattern 1 of step 1 generation is found out using centroid method
(x1i、y1i), and step 2 produce the second plaque-like interference pattern 2 in all hot spots center-of-mass coordinate (x2i、y2i)；
Step 5：The stripe direction of the speckle pattern interferometry Fig. 3 produced according to step 3, to corresponding in the first plaque-like interference pattern 1
The center-of-mass coordinate of same striped carries out linear fit, obtains some straight lines, and calculates being averaged for distance between adjacent two straight lines
Value Da；Linear fit is carried out to the center-of-mass coordinate for corresponding to same striped in the second plaque-like interference pattern 2, obtains some straight lines, and
Calculate the average value D of distance between adjacent two straight linesb；
Step 6：As follows in calculation procedure 2 speculum to be measured angle change：
Step 6.1：Calculate spatial frequency variation value：Wherein γ is pixel dimension；
Step 6.2：Calculation value：Δ β=Δ f λ, wherein λ is optical maser wavelength used.
Beneficial effect
Positional information is carried out linear fit by the present invention by measuring the positional information of laser interference hot spot, passes through meter
The variable quantity of air line distance is calculated, cleverly calculates the angle change of incident laser.Under identical measurement accuracy, compared to use
Light pipe method measurement angle, this method avoid the rigors adjusted the distance, and one is provided for the miniaturization of High-precision angle measuring apparatus
Kind method.
Brief description of the drawings
A kind of measuring method schematic diagrames of High-precision angle measurement of Fig. 1.
The three beams of laser interference pattern of Fig. 2 High-precision angles measurement.
Two beam laser interference figures in the measurement of Fig. 3 High-precision angles.
Embodiment
In order to further disclose the present invention, below in conjunction with the accompanying drawings and preferred embodiment the invention will be further described.
As shown in Figure 1, the measuring method of the High-precision angle measurement in the present embodiment includes laser light source, beam expanding lens, declines
Subtract piece, beam splitter, speculum, speculum to be measured, CCD and image recording and processing system；Speculum to be measured is installed on angled
In the equipment of change；Three laser beams formed by each beam splitter and speculum are almost parallel, are ultimately incident upon CCD camera
On.
As shown in Figure 1,632.8nm laser light sources are positioned in front of beam expanding lens, the position of beam expanding lens and laser is adjusted
It is set to export approximate planar light.Attenuator is being placed behind light source at 10mm, each beam splitter and speculum riding position is such as
Shown in Fig. 1, each mirror is almost parallel and spaced 50cm.Adjust laser, beam expanding lens, beam splitter, speculum CCD shootings
Relative altitude between machine makes three's common optical axis.CCD camera is connected with image recording with processing system.
Carrying out High-precision angle measuring process using above device is：
Step 1：Laser light source is lighted, opens CCD camera and image processing system；Fixed speculum to be measured, passes through adjusting
First beam splitter 1, the second beam splitter 2, the 3rd beam splitter 3, the 4th beam splitter 4, speculum join the first reference beam 1, second
Examine light beam 2, light beam to be measured and interference the first plaque-like interference pattern 1 of formation is produced on CCD；
Step 2：Low-angle offset occurs for speculum to be measured, and other elements are motionless, obtains the first reference beam 1, second ginseng
Examine light beam 2, light beam to be measured and interference the second plaque-like interference pattern 2 of formation is produced on CCD；
Step 3：Cover reference beam all the way, the speckle pattern interferometry that another way reference beam is formed with light beam to be measured on CCD
Fig. 3；
Step 4：The center-of-mass coordinate of all hot spots in the first plaque-like interference pattern 1 of step 1 generation is found out using centroid method
(x1i、y1i), and step 2 produce the second plaque-like interference pattern 2 in all hot spots center-of-mass coordinate (x2i、y2i)；
Step 5：The stripe direction of the speckle pattern interferometry Fig. 3 produced according to step 3, to corresponding in the first plaque-like interference pattern 1
The center-of-mass coordinate of same striped carries out linear fit, obtains straight line la1:ya1=kxa1+ca1、la2:ya2=kxa2+ca2、la3:ya3=
kxa3+ca3... .., and calculate the average value D of distance between adjacent two straight linesa；It is same to corresponding in the second plaque-like interference pattern 2
The center-of-mass coordinate of striped carries out linear fit, obtains straight line Lb1:yb1=Kxb1+cb1、Lb2:yb2=Kxb2+cb2、Lb3:yb3=Kxb3
+cb3... .., and calculate the average value D of distance between adjacent two straight linesb；
Step 6：As follows in calculation procedure 2 speculum to be measured angle change：
Step 6.1：Calculate spatial frequency variation value：Wherein γ is pixel dimension；
Step 6.2：Calculation value：Δ β=Δ f λ, wherein λ is optical maser wavelength 632.8nm used.
The present invention obtains variable quantity to low-angle using the method for three beams of laser interference and measures, and interference is found out by calculating
Facula mass center, linear fit is carried out according to specific direction, is calculated finally by the change of the distance between adjacent two straight line to be measured
The angle change of speculum.This method has the characteristics that to occupy little space, method is simple, high certainty of measurement, application prospect are wide.
Claims (4)
- A kind of 1. High-precision angle measuring device, it is characterised in that：Including laser light source, beam expanding lens, attenuator, beam splitter, anti- Penetrate mirror, speculum to be measured, CCD camera and image processing system；Laser light source becomes after beam expanding lens and attenuator expands parallel laser；Parallel laser is expanded by the first beam splitter, speculum, the 3rd beam splitter, the 4th beam splitter, forms the first reference beam；Parallel laser is expanded by the first beam splitter, the second beam splitter, the 3rd beam splitter, the 4th beam splitter, forms the second reference Light beam；Parallel laser is expanded by the first beam splitter, the second beam splitter, speculum to be measured, the 4th beam splitter, forms light beam to be measured；First reference beam, the second reference beam, the light beam to be measured coherent superposition in CCD camera image planes produce interference pattern, and defeated Enter image processing system.
- A kind of 2. High-precision angle measuring device according to claim 1, it is characterised in that：Each beam splitter and incident beam Angle at 45 °, speculum are not equal to 45 ° with incident beam angle, and speculum to be measured is differed with incident beam angle In 45 °.
- A kind of 3. High-precision angle measuring device according to claim 2, it is characterised in that：Speculum and incident beam institute into Angle is not equal to 45 ° in the range of 45 ° ± 10 '；Speculum to be measured is with incident beam angle in 45 ° of ± 10 ' scope It is interior, and not equal to 45 °.
- 4. using measuring device described in claim 1, the method for carrying out High-precision angle measurement, it is characterised in that：Including following Step：Step 1：Laser light source is lighted, opens CCD camera and image processing system；Fixed speculum to be measured, by adjusting first Beam splitter, the second beam splitter, the 3rd beam splitter, the 4th beam splitter, speculum make the first reference beam, the second reference beam, treat Survey light beam and interference the first plaque-like interference pattern of formation is produced on CCD；Step 2：Low-angle offset occurs for speculum to be measured, and other elements are motionless, obtain the first reference beam, the second reference light Beam, light beam to be measured produce interference on CCD and form the second plaque-like interference pattern；Step 3：Cover reference beam all the way, the interference fringe that another way reference beam is formed with light beam to be measured on CCD；Step 4：Center-of-mass coordinate (the x of all hot spots in the first plaque-like interference pattern of step 1 generation is found out using centroid method1i、y1i), And step 2 produce the second plaque-like interference pattern in all hot spots center-of-mass coordinate (x2i、y2i)；Step 5：The stripe direction of the interference fringe produced according to step 3, to corresponding to same in the first plaque-like interference pattern The center-of-mass coordinate of line carries out linear fit, obtains some straight lines, and calculate the average value D of distance between adjacent two straight linesa；It is right Center-of-mass coordinate in second plaque-like interference pattern corresponding to same striped carries out linear fit, obtains some straight lines, and calculate adjacent The average value D of distance between two straight linesb；Step 6：As follows in calculation procedure 2 speculum to be measured angle change：Step 6.1：Calculate spatial frequency variation value：Wherein γ is pixel dimension；Step 6.2：Calculation value：Δ β=Δ f λ, wherein λ is optical maser wavelength used.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110631510A (en) * | 2019-09-12 | 2019-12-31 | 中国科学院西安光学精密机械研究所 | High-precision angle measuring device and method based on Michelson structure |
| CN110673334A (en) * | 2019-09-29 | 2020-01-10 | 中国科学院空间应用工程与技术中心 | Automatic light beam transmission stabilizing system and method |
| CN111006582A (en) * | 2019-12-06 | 2020-04-14 | 中国科学院光电技术研究所 | Interference phase shift sensitivity enhancing method based on moire fringes |
| WO2020083744A1 (en) * | 2018-10-24 | 2020-04-30 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Method and apparatus for detecting changes in the direction of a light beam |
| CN112611340A (en) * | 2020-11-19 | 2021-04-06 | 易思维（杭州）科技有限公司 | Method for adjusting laser light plane in vision sensor |
| CN113654656A (en) * | 2021-10-18 | 2021-11-16 | 之江实验室 | Light beam drift detection device and method based on three-light-beam interference |
| CN114370935A (en) * | 2022-01-10 | 2022-04-19 | 中国人民解放军63892部队 | CCD target surface laser energy distribution measuring system and method based on image fusion |
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| CN113654656A (en) * | 2021-10-18 | 2021-11-16 | 之江实验室 | Light beam drift detection device and method based on three-light-beam interference |
| CN113654656B (en) * | 2021-10-18 | 2022-02-11 | 之江实验室 | Light beam drift detection device and method based on three-light-beam interference |
| CN114370935A (en) * | 2022-01-10 | 2022-04-19 | 中国人民解放军63892部队 | CCD target surface laser energy distribution measuring system and method based on image fusion |
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