CN108362225A - The measuring device and measuring method of conical mirror cylinder mirror surface-shaped - Google Patents
The measuring device and measuring method of conical mirror cylinder mirror surface-shaped Download PDFInfo
- Publication number
- CN108362225A CN108362225A CN201810140014.1A CN201810140014A CN108362225A CN 108362225 A CN108362225 A CN 108362225A CN 201810140014 A CN201810140014 A CN 201810140014A CN 108362225 A CN108362225 A CN 108362225A
- Authority
- CN
- China
- Prior art keywords
- error
- interferometer
- rotation
- measurement
- subsidiary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
A kind of conical mirror cylindrical mirror surface shape measurement device and measurement method, measuring device include wavefront measuring interferometer, interferometer support, precision rotation platform and turntable real-time measurement system, and the wavefront measuring interferometer is mounted in interferometer support；The turntable real-time measurement system includes subsidiary cylinder and 5 accurate displacement measurement sensors.The present invention has high-precision, low cost, high universalizable and can measure element under test face shape information and precision rotation platform spindle rotation error simultaneously, while the characteristics of remove synchronous error and asynchronous error.
Description
Technical field
The present invention relates to interferometry field, especially a kind of conical mirror, cylindrical mirror surface shape measurement device and measurement method.
Background technology
Conical mirror is a kind of special rotational symmetric aspheric, and a point light source on axis will form one along its axis
The picture point of series, additionally it is possible to collimated light beam is changed into annular beam, these characteristics have been applied to high resolution optics coherence layer
Analysis, cold atom capture, the generation of litho machine ring illumination etc..Cylindrical mirror is also a kind of rotational symmetric aspheric, can will be accurate
Collimated optical beam is focused to a line.But the certainty optical manufacturing of conical mirror, cylindrical mirror has been limited to its surface testing technology, shadow
Its application range and cost are rung.Conical mirror busbar of conical mirror unlike cylindrical mirror, which rotates symmetry axis, a clamp
Angle, and the busbar of cylindrical mirror rotates that symmetry axis is parallel, i.e., angle is 0.
First technology [1] (Jun Ma, Christof Pruss, Rihong Zhu, Zhishan Gao, Caojin Yuan,
and Wolfgang Osten,"An absolute test for axicon surfaces,"Opt.Lett.36,2005-
2007 (2011)) and first technology 2 (Jun Ma, Christof Pruss, MatthiasRihong Zhu,
Zhishan Gao,Caojin Yuan,Wolfgang Osten,"Axicon metrology using high line
density computer-generated holograms,"Proc.SPIE 8082,Optical Measurement
Systems for Industrial Inspection VII, 80821I (2011)) computed hologram is all made of as compensation
Mirror detects the face shape of conical mirror；This method has higher measurement accuracy, but needs to be tested the mating making of conical mirror to each
Mirror element is compensated, increases measurement cost and measurement period, versatility is poor.In addition, when measuring heavy caliber conical mirror, need more
Bigbore compensation mirror element and interferometer, also increase measurement cost and compensating glass manufacture difficulty.
First technology [2] (detection method of Yuan Qiao, Zeng Aijun, Zhang Shanhua, Huang Huijie, axicon surface shape and cone angle, China
Patent of invention 201310180723.X) disclose a kind of conical mirror surface shape measurement method.This method really transmits conical mirror
The measurement of wavefront, optical system for testing have passed through conical mirror difference test zone during the test, although measurement result can be assessed
The face form quality amount of tested conical mirror, but measurement result cannot be used as the foundation of feedback processing；And this method cannot be used for
Measure concave mirror surface shape.
First technology [3] (Xu Jiajun, Jia Xin, Xu Fuchao, Xing Tingwen, a kind of on-line checking processing unit (plant) of convex cone mirror and
Method, Chinese invention patent 201510351236.4) in such a way that laser displacement sensor is by spot scan detect conical mirror
Face shape proposes the precision of displacement sensor and rotary system very high requirement, increases system cost；And this method
It cannot be used for measuring concave cone mirror surface-shaped.
First technology [4] (axicon lens cylindrical mirror surface shape measurement device and measurement method, Chinese invention patent) is surveyed using corrugated
Amount interferometer exports collimated light beam vertical irradiation to a busbar of the measured optical unit, to measure the face shape letter of the busbar
Breath.This method depends on the accuracy of precision rotation platform, needs the spindle rotation error of calibrating precise turntable in advance and only
Synchronous error can be removed.
The face shape test method of cylindrical mirror is similar with cone mirror surface-shaped test method, U.S. Diffraction
International companies, Arizona Optical Metrology LLC etc. are all made of computed hologram compensating glass to carry out
It measures, different F numbers and bore need different compensating glass.
There is presently no the axicon lens surface shape measurement device and method of general high-precision, low cost.
Invention content
It is an object of the invention to overcome above-mentioned the deficiencies in the prior art, a kind of conical mirror and cylindrical mirror surface shape measurement are provided
Device and measurement method, measuring device have versatility, can measure different bores, the convex cone mirror and concave cone minute surface of different apex angles
Shape can also measure different-diameter, and the cylindrical mirror of different rotary angular region, measuring system is simple, and cost is relatively low, measures member to be measured
Precision rotation platform spindle rotation error can be measured while the shape information of part face, while removing synchronous error and asynchronous error, surveyed
Accuracy of measurement higher.
Technical solution of the invention is as follows：
The measuring device of a kind of conical mirror and cylinder mirror surface-shaped, feature are to include wavefront measuring interferometer, interferometer
Holder, precision rotation platform and turntable real-time measurement system；The wavefront measuring interferometer is mounted in interferometer support；It is described
Turntable real-time measurement system include subsidiary cylinder and 5 accurate displacement measurement sensors,
The subsidiary cylinder is mounted on the precision rotation platform, in the subsidiary cylinder
Mandrel is coaxial with the rotary shaft of precision rotation platform；5 accurate displacement measurement sensors are placed in described respectively
Subsidiary cylinder except z-axis direction, x-axis direction, y-axis direction the displacement of the channels Z accurate displacement measurement sensor,
The accurate displacement measurement sensor of the accurate displacement measurement sensor and lower section X passage displacement of upper section X passage displacement, it is upper to cut
The accurate displacement measurement sensor of the accurate displacement measurement sensor and lower section Y channel displacements of the face channels Y displacement, described is upper
Section and lower section are two there are the horizontal plane of a distance, and vertical range is denoted as l；The subsidiary cylinder it is upper
It is placed for optical element conical mirror to be measured or cylindrical mirror on surface.
The conical mirror is the concave cone mirror that convex cone mirror or apex angle are more than or equal to 90 degree；
The wavefront measuring interferometer is the Fizeau interferometers with flat normal mirror, or safe graceful Green interferometer,
Or the point-diffraction interferometer or single width interference pattern stellar interferometer of Mach Zehnder interferometer or output plane light wave, or dynamic survey
Measure interferometer or high speed dynamic stellar interferometer.
The interferometer support is multidimensional adjustment frame.
Using the measurement method of above-mentioned conical mirror and cylindrical mirror surface shape measurement device, this method includes the following steps：
1. establishing the coordinate system of detecting system, using the rotary axis direction of precision rotation platform as Z-direction, precision rotation platform is radial
Two orthogonal directions are respectively X-direction, Y-direction, between the busbar of the measured optical unit and the rotation axes of symmetry of the measured optical unit
Angle be denoted as α, the busbar vertical with wavefront measuring interferometer emergent light is overlapped in the projection of X/Y plane with X-axis；Precision rotation
The range of the rotation angle of platform is identical as the range of the rotation angle of the measured optical unit；By the rotation angle N etc. of precision rotation platform
Point, it is denoted as θi, wherein i=1,2,3 ..., N, N is positive integer, θ1For initial angle, originated with the measured surface of the measured optical unit
Position corresponds to；
2. demarcating the deviation from circular from h (θ in the subsidiary face of subsidiary cylinderi) and deviations from planarity z0(θi)；
3. adjusting measuring device, wavefront measuring interferometer is made to observe that one busbar of the measured optical unit is corresponding linear dry
Figure is related to, interference fringe quantity is minimum and interference fringe is most wide, and what interference fringe regional center position measured is the measured optical unit
Busbar, interference fringe regional center position is vertical with wavefront measuring interferometer emergent light at this time；
4. rotating the rotation angle θ of the precision rotation platform to θ1, that is, originate Angle Position；
5. being measured using wavefront measuring interferometer, the surface shape measurement knot of interference pattern effective coverage centerline pixels is preserved
Fruit S (θi,w)；The turntable real-time measurement system measures the axial runout error delta z of each rotation position of precision rotation platform
(θi), run-out error δ x (θi), X-direction rotates the error T that inclinesx(θi)；W is busbar coordinate, and w=0,1,2 ..., W-1, W is
Positive integer indicates the pixel coordinate along the measured optical unit bus length direction；
6. rotating the precision rotation platform to θi5. next spin angular position of corner repeats step, until complete
At the measurement of all N number of spin angular positions；Respectively with the S (θ of different w1, w) and it is starting point, w=0,1,2 ..., W-1, to W groups
Surface shape measurement data S (θi, w) and (i=1,2,3 ..., N) carry out the Phase- un- wrapping of corresponding phase, make W group surface shape measurement numbers
According to S (θi, w) and it is continuous data；
7. (1) is from S (θ according to the following formulai, w) in removal calibration precision rotation platform axial rotary runout error δ z (θi),
Rotate run-out error δ x (θi), rotation heeling error Tx(θi) influence to measurement result,
F`(θi, w) and=S (θi,w)-δz(θi)·sin(α)-δx(θi)·cos(α)-Tx(θi) wPW, (1)
Wherein PW is the width of each coordinate pixel corresponding with busbar coordinate；
8. from F` (θi, w) in, the surface shape measurement data F` (θ after the K groups removal error for arbitrarily taking busbar coordinate w differenti,
wk), wherein i=1,2,3 ..., N, k=1,2,3 ..., K, according to rotation be clamped eccentric error separation method, therefrom isolate by
F` (θ caused by setting-up eccentricity error when photometry element is installed to precision rotation platformi,wk) detection error E (θi,wk)；K groups E
(θi,wk) average value E (θi) be：
E(θi)=(E (θi,w1)+E(θi,w2)+…+E(θi,wK))/K,
From F` (θi, w) in removal the measured optical unit setting-up eccentricity caused by detection error E (θi), it obtains by photometry member
Part surface surface testing result F (θi, w),
F(θi, w) and=F` (θi,w)-E(θi)。
Roundness deviation h (the θ in the subsidiary face of the calibration subsidiary cylinderi) method use multistep processes,
Multipoint method or reverse method.
The deviations from planarity z in the subsidiary face of the calibration subsidiary cylinder0(θi) method it is flat using laser
Face instrument method, level meter method or three-dimensional coordinates measurement method.
The rotation heeling error T of the calibrating precise turntablex(θi), Ty(θi) method adopted using multi-channel data
The spindle rotation error partition method of collection；Heeling error Tx(θi), Ty(θi) be calculate by the following formula：
y1(θi) it is that upper section is individually subtracted is auxiliary for the displacement that measures of accurate displacement measurement sensor in the channels Y in upper section
Help the deviation from circular from h in the subsidiary face for measuring cylinder1(θi) result；y2(θi) be the channels Y in lower section accurate displacement
The deviation from circular from h in the subsidiary face of lower section subsidiary cylinder is individually subtracted in the displacement that measurement sensor measures2(θi)
Result.
The axial rotary runout error δ z (θ of the calibrating precise turntablei) method use the channels Z essence
Displacement z (the θ that dense bit measurement sensor measuresi) subtract subsidiary cylinder subsidiary face deviations from planarity z0
(θi)；Rotate run-out error δ x (θi) method use multi-channel data acquisition spindle rotation error partition method, upper channel
Least square center with lower channel is O respectively1(a1,b1) and O2(a2,b2), rotation run-out error δ x (θi) pass through following formula
It calculates：
δx(θi)=- lTy(θi)+(a2-a1)·cos(θ)+(b2-b1)·sin(θ)
The rotation clamping eccentric error separation method is best sine curve fitting method or the filter of frequency domain Fourier transformation
Wave method.
The principle of the present invention is only to measure the face shape of one, surface of the measured optical unit busbar every time, pass through precision rotation
The scanning of platform measures different busbares；Precise rotating platform is eliminated from different busbar measurement results axially and radially to beat, and is tilted, and
Error caused by rotating eccentricity is to get to the surface shape measurement result of the measured optical unit.
The advantage of the invention is that measuring system has versatility, different bores, the convex cone mirror of different apex angles can be measured
With concave cone mirror surface-shaped, different-diameter can be also measured, the cylindrical mirror of different rotary angular region, measuring system is simple, and cost is relatively low,
Precision rotation platform spindle rotation error can be measured while measuring element under test face shape information, while removing synchronous error and different
Walk error, measurement accuracy higher.
Description of the drawings
Fig. 1 is the structural schematic diagram of the improvement measuring device of conical mirror cylinder mirror surface-shaped of the present invention；
Fig. 2 is coordinate relationship and accurate displacement measurement sensor position relationship schematic diagram in measurement process of the present invention；
Fig. 3 is the structural schematic diagram of one embodiment of improvement measuring device of conical mirror cylinder mirror surface-shaped of the present invention；
Fig. 4 is the structural schematic diagram of one embodiment of improvement measuring device of conical mirror cylinder mirror surface-shaped of the present invention；
Specific implementation mode
The present invention will be further described with embodiment below in conjunction with the accompanying drawings, but not with the guarantor of this embodiment limitation present invention
Protect range.
Fig. 1 is the structural schematic diagram of the improvement measuring device of conical mirror cylinder mirror surface-shaped of the present invention, as seen from the figure, the present invention
The measuring device of conical mirror and cylinder mirror surface-shaped, including wavefront measuring interferometer 1, interferometer support 2, precision rotation platform 12 and turn
Platform real-time measurement system；The wavefront measuring interferometer 1 is mounted in interferometer support 2；The turntable measures in real time is
System includes subsidiary cylinder 3 and 5 accurate displacement measurement sensors,
The subsidiary cylinder 3 is mounted on the precision rotation platform 12, the subsidiary cylinder 3
Central shaft it is coaxial with the rotary shaft of precision rotation platform 12；5 accurate displacement measurement sensors, set respectively
The accurate displacement of the channels the Z displacement in z-axis direction, x-axis direction, y-axis direction except the subsidiary cylinder 3 measures
Sensor 5, the accurate displacement measurement sensor 6 of upper section X passage displacement and the accurate displacement of lower section X passage displacement, which measure, to be passed
Sensor 8, the accurate displacement measurement sensor 7 of upper section Y channel displacements and the accurate displacement of lower section Y channel displacements measure sensing
Device 9, the upper section 10 and lower section 11 are two there are the horizontal plane of a distance, and vertical range is denoted as l；Described is auxiliary
The upper surface for measuring cylinder 3 is helped to be placed for 4 conical mirror of optical element to be measured or cylindrical mirror.
It includes wavefront measuring interferometer 1, interferometer branch that Fig. 1, which is apparatus of the present invention for measuring the structural schematic diagram of convex cone mirror,
Frame 2, subsidiary cylinder 3, precision rotation platform 12, turntable real-time measurement system include the channels Z accurate displacement measurement sensor
5, the X passage accurate displacement measurement sensor 6 of upper section 10, the channels the Y accurate displacement measurement sensor 7 of upper section 10, lower section
The X passage accurate displacement measurement sensor 8 in face 11 and the channels the Y accurate displacement measurement sensor 9 of lower section 11 and auxiliary are surveyed
Measure cylinder 3；The wavefront measuring interferometer 1 is installed in interferometer support 2；The wavefront measuring interferometer 1 exports
Collimated light beam, and there is Plane reference light path；The measured optical unit 4 is convex cone mirror；The wavefront measuring interferometer 1
Emergent light is incident to 4 surface of the measured optical unit, also, one of 1 emergent light of wavefront measuring interferometer and the measured optical unit 4
Busbar is vertical, to make the light for being incident to the busbar along backtracking, is received by wavefront measuring interferometer 1 and is produced with reference light
Raw interference signal；The measured optical unit 4 is mounted on precision rotation platform 12, the rotation axes of symmetry of the measured optical unit 4
It is aligned with the rotary shaft of precision rotation platform 12；The X passage accurate displacement measurement sensor 6 of the upper section 10, lower section 11
X passage accurate displacement measurement sensor 8 and upper section 10 the channels Y accurate displacement measurement sensor 7, the Y of lower section 11 is logical
Road accurate displacement measurement sensor 9 is individually positioned in same perpendicular and two planes are mutually perpendicular to, the upper section 10
X passage accurate displacement measurement sensor 6, the channels the Y accurate displacement measurement sensor 7 of upper section 10 and the X of lower section 11 are logical
Road accurate displacement measurement sensor 8, the channels the Y accurate displacement measurement sensor 9 of lower section 11 are individually positioned in same level and put down
In face, the detection direction of the accurate displacement measurement sensor 5 is perpendicular to precision rotation platform 12；
The wavefront measuring interferometer 1 is the Fizeau interferometers with flat normal mirror, or safe graceful Green interferometer,
Or Mach Zehnder interferometer, or output plane light wave point-diffraction interferometer；
The wavefront measuring interferometer 1 is phase-shift measurement interferometer or single width interference pattern stellar interferometer, or dynamic survey
Measure interferometer or high speed dynamic stellar interferometer；
The conical mirror and cylindrical mirror surface shape measurement device, the turntable real-time measurement system are justified comprising subsidiary
Cylinder 3 and 5 accurate displacement measurement sensors, the subsidiary cylinder 3 are mounted on the precision rotation platform 12,
Central shaft is aligned with the rotary shaft of precision rotation platform；5 accurate displacement measurement sensors include a channel detection Z
The accurate displacement measurement sensor of displacement, the accurate displacement measurement sensor of two detection X passage displacements, two channels detection Y
The accurate displacement measurement sensor of displacement, two X passage accurate displacement measurement sensors and two channels Y accurate displacements are measured and are passed
Sensor place respectively with it is upper, in lower two sections；The distance between upper section and lower section are denoted as l；
The interferometer support 2 can adjust the installation direction of wavefront measuring interferometer, dry to adjust wavefront measurement
The exit direction of interferometer collimated light beam；
The interferometer support 2 can drive wavefront measurement interference along the rotary axis direction for being parallel to precision rotation platform 12
Instrument 1 carries out translational motion, to measure the different zones on the measured optical unit surface；
Utilize the measurement method of the improvement measuring device of above-mentioned conical mirror cylinder mirror surface-shaped, it is characterised in that this method packet
Include the following steps：
1. establishing the coordinate system of detecting system, Fig. 2 is the coordinate relation schematic diagram in measurement process of the present invention, accurate displacement
The detection direction of measurement sensor 5 places accurate displacement measurement sensor 6,8 along Z-direction, along X-direction, is put along Y direction
Set accurate displacement measurement sensor 7,9；Using the rotary axis direction of precision rotation platform 12 as Z-direction, precision rotation platform 12 radial two
Orthogonal direction is respectively X-direction, Y-direction, between the busbar and the rotation axes of symmetry of the measured optical unit 4 of the measured optical unit 4
Angle be denoted as α, the busbar vertical with 1 emergent light of wavefront measuring interferometer is overlapped in the projection of X/Y plane with X-axis；Precision rotation
The rotation angle of platform 12 is identical as the rotation angle of the measured optical unit 4；By the rotation angle N etc. of precision rotation platform 12
Point, it is denoted as θi, wherein i=1,2,3 ..., N, N is positive integer, θ1For initial angle, with 4 measured surface start bit of the measured optical unit
Set correspondence；
2. demarcating the roundness deviation h (θ in the subsidiary face of subsidiary cylinder 3i) and deviations from planarity z0(θi)；
3. adjusting measuring device, wavefront measuring interferometer observes the corresponding linear interference of one busbar of the measured optical unit
Figure so that interference fringe quantity is minimum and interference fringe is most wide, and what interference fringe regional center position measured is by photometry member
Part busbar, interference fringe regional center position is vertical with wavefront measuring interferometer emergent light at this time；
4. rotating the rotation angle θ of precision rotation platform 12 to θ1Originate Angle Position；
5. being measured using wavefront measuring interferometer 1, the surface shape measurement of interference pattern effective coverage centerline pixels is preserved
As a result S (θi,w)；The turntable real-time measurement system measures the axial runout error delta z of each rotation position of precision rotation platform
(θi), run-out error δ x (θi), X-direction rotates the error T that inclinesx(θi)；W is busbar coordinate, and w=0,1,2 ..., W-1, W is
Positive integer indicates the pixel coordinate along 4 bus length direction of the measured optical unit；
6. by the rotation of precision rotation platform 12 to θi5. next spin angular position in corner repeats step, until completing complete
The measurement of the N number of spin angular position in portion；Respectively with the S (θ of different w1, w) and it is starting point, w=0,1,2 ..., W-1, to W groups face shape
Measurement data S (θi, w) and (i=1,2,3 ..., N) carry out the Phase- un- wrapping of corresponding phase, make W group surface shape measurement data S
(θi, w) and it is continuous data；
7. according to formula (1) from S (θi, w) in removal calibration precision rotation platform 12 axial rotary runout error δ z (θi),
Rotate run-out error δ x (θi), rotation heeling error Tx(θi) influence F` (θ to measurement resulti, w) and=S (θi,w)-δz
(θi)·sin(α)-δx(θi)·cos(α)-Tx(θi)·w·PW-h(θi), (1)
Wherein PW is the width of each coordinate pixel corresponding with busbar coordinate；
8. from F` (θi, w) in, the surface shape measurement data F` (θ after the K groups removal error for arbitrarily taking busbar coordinate w differenti,
wk), wherein i=1,2,3 ..., N, k=1,2,3 ..., K, according to rotation be clamped eccentric error separation method, therefrom isolate by
F` (θ caused by setting-up eccentricity error when the installation of photometry element 4 is to precision rotation platform 12i,wk) detection error E (θi,wk)；K
Group E (θi,wk) average value E (θi) be
E(θi)=(E (θi,w1)+E(θi,w2)+…+E(θi,wK))/K,
From F` (θi, w) in removal the measured optical unit setting-up eccentricity caused by detection error E (θi), it obtains by photometry member
4 surface surface testing result F (θ of parti, w),
F(θi, w) and=F` (θi,w)-E(θi)；
Roundness deviation h (the θ in the subsidiary face of the calibration subsidiary cylinder 3i) method use multistep processes
(see first technology 5, Ye Jingsheng, measurement accuracy [J] that Gu Qitai, Zhang Yanshen discuss Multi-Step Error Separation Technique measures journal,
1990,11(2):119-123.), multipoint method (see first technology 6, Su Heng, Hong Maisheng, Wei Yuanlei, waits machine tool chief axis radially to miss
Difference movement on-line checking and signal processing [J] mechanical engineering journals, 2002,38 (6):56-60.) or reverse method is (see first skill
Art 7, Donaldson R R.A Simple Method for Separating Spindle Error from Test Ball
Roundness Error [J] .CIRP Annals-Manufacturing Technology, 1971,21.)；
The deviations from planarity z in the subsidiary face of the calibration subsidiary cylinder 30(θi) method use laser
Planimeter method (http://www.hamarlaser.com/) or three-dimensional coordinates measurement method (see first technology 8, what literary man of virtue and ability's glancing incidence knot
Structure light measurement mechanical lapping facial plane degree technical research [D] Photoelectric Technology Inst., Chinese Academy of Sciences)；
The rotation heeling error T of the calibrating precise turntable 12x(θi), Ty(θi) method use multi-channel data
The spindle rotation error partition method of acquisition；Synchronous heeling error Tx(θi), Ty(θi) be calculate by the following formula：
y1(θi) it is that upper section is individually subtracted is auxiliary for the displacement that measures of accurate displacement measurement sensor in the channels Y in upper section
Help the deviation from circular from h in the subsidiary face for measuring cylinder1(θi) result；y2(θi) be the channels Y in lower section accurate displacement
The deviation from circular from h in the subsidiary face of lower section subsidiary cylinder is individually subtracted in the displacement that measurement sensor measures2(θi)
Result.
The 12 axial rotary runout error δ z (θ of calibrating precise turntablei) method use the channels Z essence
Displacement z (the θ that dense bit measurement sensor measuresi) subtract subsidiary cylinder subsidiary face deviations from planarity z0
(θi)；The calibration rotation run-out error δ x (θi) method using multi-channel data acquisition spindle rotation error point
From method, the least square center in upper section channel and lower section channel is O respectively1(a1,b1) and O2(a2,b2), rotate synchronous diameter
To runout error δ x (θi) be calculate by the following formula：
δx(θi)=- lTy(θi)+(a2-a1)·cos(θ)+(b2-b1)·sin(θ)
The rotation clamping eccentric error separation method is best sine curve fitting method (see first technology 10, Zhou Ji
Elder brother, Zhang Rong, Ling Mingxiang, firm high-precision machine tools spindle rotation error Online Transaction Processing [J] China test, 2016,42
(07):64-67.) or frequency domain Fourier Transform Filtering method is (see first technology 11, Jamalian, A. (2010) .A new
method for characterizing spindle radial error motion:a two-dimensional point
of view(T).University of British Columbia.)。
Fig. 3 is the structural schematic diagram of another embodiment of improvement measuring device of conical mirror cylinder mirror surface-shaped of the present invention, with Fig. 1
Unlike embodiment, the measured optical unit 4 is concave cone mirror, and concave cone vertex angle is more than or equal to 90 degree.
Fig. 4 is the structural schematic diagram of another embodiment of improvement measuring device of conical mirror cylinder mirror surface-shaped of the present invention, with Fig. 1
Unlike embodiment, the measured optical unit 4 is cylindrical mirror, and the angle α between busbar and rotation axes of symmetry is 0 °,
The rotation angle value of cylindrical mirror is between 0~360 °.
The advantages of above-described embodiment, is that measuring system has versatility, can measure different bores, different apex angles it is convex
Axicon lens and concave cone mirror surface-shaped can also measure different-diameter, and the cylindrical mirror of different rotary angular region, measuring system is simple, cost
It is relatively low.Element under test face shape information and precision rotation platform spindle rotation error can be measured simultaneously, at the same remove synchronous error and
Asynchronous error, measurement accuracy higher.
Claims (9)
1. a kind of measuring device of conical mirror cylinder mirror surface-shaped, it is characterised in that including wavefront measuring interferometer (1), interferometer branch
Frame (2), precision rotation platform (12) and turntable real-time measurement system；The wavefront measuring interferometer (1) is mounted on interferometer branch
On frame (2)；The turntable real-time measurement system includes subsidiary cylinder (3) and 5 accurate displacement measurement sensors；
The subsidiary cylinder (3) is mounted on the precision rotation platform (12), the subsidiary cylinder
(3) central shaft is coaxial with the rotary shaft of precision rotation platform (12)；5 accurate displacement measurement sensors, point
The precision of the channels the Z displacement in the z-axis direction except subsidiary cylinder (3), x-axis direction, y-axis direction described in not being placed in
Displacement measurement sensor (5), the essence of the accurate displacement measurement sensor (6) and lower section X passage displacement of upper section X passage displacement
Dense bit measurement sensor (8), the accurate displacement measurement sensors (7) of upper section Y channel displacements and lower section Y channel displacements
Accurate displacement measurement sensor (9), the upper section (10 and lower section (11) be two there are the horizontal plane of a distance,
Vertical range is denoted as l；The upper surface of the subsidiary cylinder (3) supplies optical element to be measured (4) conical mirror or cylindrical mirror
It places.
2. conical mirror according to claim 1 and cylindrical mirror surface shape measurement device, it is characterised in that the conical mirror is
Convex cone mirror or apex angle are more than or equal to 90 degree of concave cone mirror.
3. conical mirror according to claim 1 and cylindrical mirror surface shape measurement device, it is characterised in that the wavefront measurement
Interferometer is the Fizeau interferometers with flat normal mirror, or safe graceful Green interferometer or Mach Zehnder interferometer, or output
The point-diffraction interferometer or single width interference pattern stellar interferometer or dynamic stellar interferometer of plane light wave, or high speed dynamic measure
Interferometer.
4. conical mirror according to claim 1 and cylindrical mirror surface shape measurement device, it is characterised in that the interferometer branch
Frame is multidimensional adjustment frame.
5. utilizing the measurement method of conical mirror described in claim 1 and cylindrical mirror surface shape measurement device, it is characterised in that the party
Method includes the following steps：
1. establishing the coordinate system of detecting system, using the rotary axis direction of precision rotation platform (12) as Z-direction, precision rotation platform is radial
Two orthogonal directions are respectively X-direction, Y-direction, the busbar of the measured optical unit (4) and the rotation axes of symmetry of the measured optical unit it
Between angle be denoted as α, the busbar vertical with wavefront measuring interferometer emergent light is overlapped in the projection of X/Y plane with X-axis；Precision rotation
The range of the rotation angle of turntable is identical as the range of the rotation angle of the measured optical unit；By the rotation angle N of precision rotation platform
Decile is denoted as θi, wherein i=1,2,3 ..., N, N is positive integer, θ1For initial angle, risen with the measured surface of the measured optical unit
Beginning position corresponds to；
2. demarcating the deviation from circular from h (θ in the subsidiary face of subsidiary cylinder (3)i) and deviations from planarity z0(θi)；
3. adjusting measuring device, wavefront measuring interferometer (1) is made to observe (4) corresponding threadiness of busbar of the measured optical unit
Interference pattern, interference fringe quantity is minimum and interference fringe is most wide, and what interference fringe regional center position measured is by photometry member
The busbar of part, interference fringe regional center position is vertical with wavefront measuring interferometer emergent light at this time；
4. rotating the rotation angle θ of the precision rotation platform (12) to θ1, that is, originate Angle Position；
5. being measured using wavefront measuring interferometer (1), the surface shape measurement knot of interference pattern effective coverage centerline pixels is preserved
Fruit S (θi,w)；The turntable real-time measurement system measures the axial runout error delta z of each rotation position of precision rotation platform
(θi), run-out error δ x (θi), X-direction rotates the error T that inclinesx(θi)；W is busbar coordinate, and w=0,1,2 ..., W-1, W is
Positive integer indicates the pixel coordinate along the measured optical unit bus length direction；
6. by precision rotation platform (12) rotation to θi5. next spin angular position of corner repeats step, until completing
All measurements of N number of spin angular position；Respectively with the S (θ of different w1, w) and it is starting point, w=0,1,2 ..., W-1, to W groups face
Shape measurement data S (θi, w) and (i=1,2,3 ..., N) carry out the Phase- un- wrapping of corresponding phase, make W group surface shape measurement data S
(θi, w) and it is continuous data；
7. (1) is from S (θ according to the following formulai, w) in removal calibration precision rotation platform axial rotary runout error δ z (θi), rotation
Run-out error δ x (θi), rotation heeling error Tx(θi) influence to measurement result,
F`(θi, w) and=S (θi,w)-δz(θi)·sin(α)-δx(θi)·cos(α)-Tx(θi) wPW, (1)
Wherein PW is the width of each coordinate pixel corresponding with busbar coordinate；
8. from F` (θi, w) in, the surface shape measurement data F` (θ after the K groups removal error for arbitrarily taking busbar coordinate w differenti,wk),
Wherein i=1,2,3 ..., N, k=1,2,3 ..., K are clamped eccentric error separation method according to rotation, therefrom isolate tested light
Learn F` (θ caused by setting-up eccentricity error when element is installed to precision rotation platformi,wk) detection error E (θi,wk)；K group E (θi,
wk) average value E (θi) be：
E(θi)=(E (θi,w1)+E(θi,w2)+…+E(θi,wK))/K,
From F` (θi, w) in removal the measured optical unit setting-up eccentricity caused by detection error E (θi), obtain the measured optical unit table
Face surface testing result F (θi, w),
F(θi, w) and=F` (θi,w)-E(θi)。
6. conical mirror according to claim 5 and cylindrical mirror surface shape measurement method, it is characterised in that the calibration auxiliary
Measure the roundness deviation h (θ in the subsidiary face of cylinderi) method use multistep processes, multipoint method or reverse method.
7. conical mirror according to claim 5 and cylindrical mirror surface shape measurement method, it is characterised in that the calibration auxiliary
Measure the deviations from planarity z in the subsidiary face of cylinder0(θi) method use laser plane instrument method, level meter method or three sit
Mark mensuration.
8. conical mirror according to claim 5 and cylindrical mirror surface shape measurement method, it is characterised in that the calibrating precise
The rotation heeling error T of turntablex(θi), Ty(θi) method use multi-channel data acquisition spindle rotation error partition method；
Heeling error Tx(θi), Ty(θi) be calculate by the following formula：
y1(θi) it is that the displacement that measures of accurate displacement measurement sensor in the channels Y in upper section is individually subtracted upper section auxiliary and surveys
Measure the deviation from circular from h in the subsidiary face of cylinder1(θi) result；y2(θi) be the channels Y in lower section accurate displacement measure
The deviation from circular from h in the subsidiary face of lower section subsidiary cylinder is individually subtracted in the displacement that sensor measures2(θi) knot
Fruit.
9. according to claim 5 to 8 any one of them conical mirror and cylindrical mirror surface shape measurement method, it is characterised in that described
The axial rotary runout error δ z (θ of calibrating precise turntablei) method using the channels Z accurate displacement measure sensing
Displacement z (the θ that device measuresi) subtract subsidiary cylinder subsidiary face deviations from planarity z0(θi)；Rotation is radial to jump
Dynamic error delta x (θi) method use multi-channel data acquisition spindle rotation error partition method, the minimum of upper channel and lower channel
Least square center is O respectively1(a1,b1) and O2(a2,b2), rotation run-out error δ x (θi) be calculate by the following formula：
δx(θi)=- lTy(θi)+(a2-a1)·cos(θ)+(b2-b1)·sin(θ)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810140014.1A CN108362225B (en) | 2018-02-11 | 2018-02-11 | Measuring device and measuring method for conical mirror cylindrical surface shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810140014.1A CN108362225B (en) | 2018-02-11 | 2018-02-11 | Measuring device and measuring method for conical mirror cylindrical surface shape |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108362225A true CN108362225A (en) | 2018-08-03 |
| CN108362225B CN108362225B (en) | 2019-12-20 |
Family
ID=63005968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810140014.1A Active CN108362225B (en) | 2018-02-11 | 2018-02-11 | Measuring device and measuring method for conical mirror cylindrical surface shape |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108362225B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109955148A (en) * | 2019-03-18 | 2019-07-02 | 中国工程物理研究院激光聚变研究中心 | For aspherical optical element intermediate frequency ripple error in level detecting apparatus and method |
| CN111023992A (en) * | 2019-12-25 | 2020-04-17 | 四川大学 | Line structured light-based section curve characteristic detection method and application thereof |
| CN112683192A (en) * | 2019-10-18 | 2021-04-20 | 三赢科技（深圳）有限公司 | Non-contact measuring device for overall dimension of piece to be measured |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU953454A2 (en) * | 1980-04-04 | 1982-08-23 | Отделение Всесоюзного Электротехнического Института Им.В.И.Ленина | Device for measuring deformation of object internal cylindrical surfaces |
| US4391526A (en) * | 1981-08-24 | 1983-07-05 | Itek Corporation | Interferometric surface contour measuring arrangement |
| US5485275A (en) * | 1992-06-17 | 1996-01-16 | Canon Kabushiki Kaisha | Apparatus and method for measuring the error of an apparatus which measure a cylindrical shape using an interferometer |
| CN101377410A (en) * | 2008-10-10 | 2009-03-04 | 哈尔滨工业大学 | Large caliber aspheric surface measuring apparatus and method based on ultra-precise revolving scanning |
| CN101561349A (en) * | 2009-06-08 | 2009-10-21 | 爱佩仪中测（成都）精密仪器有限公司 | Large gear detecting method and detecting device |
| CN102818542A (en) * | 2012-08-16 | 2012-12-12 | 中国科学院光电技术研究所 | Method for measuring cone angle of cone mirror |
| CN103522127A (en) * | 2013-10-24 | 2014-01-22 | 东华大学 | On-machine measuring device and method for rotary curve contour machining |
| CN106197311A (en) * | 2016-07-01 | 2016-12-07 | 苏州大学 | A kind of cylinder and the detection method of cylinder converging lenses and device |
-
2018
- 2018-02-11 CN CN201810140014.1A patent/CN108362225B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU953454A2 (en) * | 1980-04-04 | 1982-08-23 | Отделение Всесоюзного Электротехнического Института Им.В.И.Ленина | Device for measuring deformation of object internal cylindrical surfaces |
| US4391526A (en) * | 1981-08-24 | 1983-07-05 | Itek Corporation | Interferometric surface contour measuring arrangement |
| US5485275A (en) * | 1992-06-17 | 1996-01-16 | Canon Kabushiki Kaisha | Apparatus and method for measuring the error of an apparatus which measure a cylindrical shape using an interferometer |
| CN101377410A (en) * | 2008-10-10 | 2009-03-04 | 哈尔滨工业大学 | Large caliber aspheric surface measuring apparatus and method based on ultra-precise revolving scanning |
| CN101561349A (en) * | 2009-06-08 | 2009-10-21 | 爱佩仪中测（成都）精密仪器有限公司 | Large gear detecting method and detecting device |
| CN102818542A (en) * | 2012-08-16 | 2012-12-12 | 中国科学院光电技术研究所 | Method for measuring cone angle of cone mirror |
| CN103522127A (en) * | 2013-10-24 | 2014-01-22 | 东华大学 | On-machine measuring device and method for rotary curve contour machining |
| CN106197311A (en) * | 2016-07-01 | 2016-12-07 | 苏州大学 | A kind of cylinder and the detection method of cylinder converging lenses and device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109955148A (en) * | 2019-03-18 | 2019-07-02 | 中国工程物理研究院激光聚变研究中心 | For aspherical optical element intermediate frequency ripple error in level detecting apparatus and method |
| CN109955148B (en) * | 2019-03-18 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | In-situ detection device and method for medium-frequency ripple error of aspheric optical element |
| CN112683192A (en) * | 2019-10-18 | 2021-04-20 | 三赢科技（深圳）有限公司 | Non-contact measuring device for overall dimension of piece to be measured |
| CN111023992A (en) * | 2019-12-25 | 2020-04-17 | 四川大学 | Line structured light-based section curve characteristic detection method and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108362225B (en) | 2019-12-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI582381B (en) | Apparatus and method for geometric measurement of object | |
| CN107990838B (en) | Cone mirror and cylindrical mirror surface shape measuring device and measuring method | |
| CN103175486B (en) | A kind of stitching interferometer measurement mechanism of deviation from cylindrical form and method | |
| Gao et al. | Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors | |
| CN108362225A (en) | The measuring device and measuring method of conical mirror cylinder mirror surface-shaped | |
| CN106918301B (en) | Plane surface shape sub-aperture stitching interferometer measuring device and measurement method | |
| US4167337A (en) | Interferometric apparatus and process | |
| Anandan et al. | An LDV-based methodology for measuring axial and radial error motions when using miniature ultra-high-speed (UHS) micromachining spindles | |
| CN108020179A (en) | A kind of High-precision angle measuring device and method | |
| CN105466359A (en) | Precision surface type measuring device | |
| CN109059823A (en) | A kind of detection system measuring line size parameter | |
| Vargas et al. | Camera-projector calibration methods with compensation of geometric distortions in fringe projection profilometry: a comparative study | |
| CN114440789B (en) | Synchronous interferometry method and system for speed, distance and three-dimensional morphology of rotating body | |
| Yang et al. | A method for simultaneously measuring 6DOF geometric motion errors of a precision rotary stage based on absolute position-distance measurement | |
| US6674521B1 (en) | Optical method and system for rapidly measuring relative angular alignment of flat surfaces | |
| CN113899321B (en) | Method and system for measuring three-dimensional morphology of mirror surface object through auxiliary imaging of concave mirror | |
| Wu et al. | A synchronous measurement system for the first derivative of out-of-plane deformation of double ends | |
| CN108332686B (en) | A kind of detection device and method of conical mirror cone angle | |
| CN106802136B (en) | One kind is based on the polynomial cylinder interference joining method of Legendre's Fourier and system | |
| CN109612405B (en) | Large-caliber convex cone mirror surface shape detection system and detection method | |
| CN108036720B (en) | Precise rotating platform axial direction and radial pulsation measurement device and measurement method | |
| JP3146590B2 (en) | Shape measuring method and shape measuring system | |
| Lee et al. | An Investigation of Cosine Error for Scanning Probe Measurements of Freeform Surfaces | |
| CN110243760A (en) | Line domain domain optical coherence tomographic system and its longitudinal coordinate scaling method | |
| Takacs et al. | Large-mirror figure measurement by optical profilometry techniques |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |