CN102818542A - Method for measuring cone angle of cone mirror - Google Patents
Method for measuring cone angle of cone mirror Download PDFInfo
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- CN102818542A CN102818542A CN2012102922457A CN201210292245A CN102818542A CN 102818542 A CN102818542 A CN 102818542A CN 2012102922457 A CN2012102922457 A CN 2012102922457A CN 201210292245 A CN201210292245 A CN 201210292245A CN 102818542 A CN102818542 A CN 102818542A
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Abstract
The invention relates to a method for measuring the cone angle of a cone mirror, which utilizes a device comprising an interferometer, a standard plane mirror, the measured cone mirror, a rotating platform, a cube and an optical platform. Firstly, the rotating platform is vertical to an optical axis; then the measured cone mirror is placed at the center of the rotating platform; one generating line or one conical surface of the cone mirror is regulated to be vertical to the optical axis; by utilizing the auto-collimation reflection of the generating line and the surrounding region thereof or the conical surface, zero-interference strips are formed by reference light inside the interferometer; the rotating platform is rotated so that the other generating line or the other conical surface at the side corresponding to the rotating platform is vertical the optical axis, and the zero-interference strips are formed in the same way; and at the time, the rotating angle of the rotating platform and the cone angle are supplementary angles, so that the accurate value of the cone angle can be calculated. The detection method provides an effective method for measuring the cone angle under the high accuracy, has a simple structure and has high application value.
Description
Technical field
The invention belongs to field of optical measuring technologies, what be specifically related to is a kind of measuring method to the axicon lens cone angle.
Background technology
Along with the development of contemporary optics process technology, the high Precision Detection of the cone angle of axicon lens is required to improve constantly.The cone angle parameter of axicon lens all has the important engineering meaning to its processing and use accurately.Cone angle to the axicon lens that machines carries out high-acruracy survey, and its prerequisite is will guarantee can not cause damage to the conical surface of axicon lens in the measuring process.At present, seldom report high-precision detecting method to the cone angle of axicon lens.What the measuring method of common cone angle generally was directed against is the cone of metal species, and this is not suitable fully concerning the axicon lens of glass material.And these measuring methods are difficult to satisfy high-precision requirement.The method of traditional measurement cone angle mainly comprises the direct method of measurement (like the three-dimensional detection method) and the indirect method of measurement (sine gauge detection method, employing horizontal metroscope etc.).
The three-dimensional coordinates measurement method can be used in the cone angle measuring of axicon lens.Its principle is the spatial discrete points of obtaining on the conical surface, calculates through certain mathematical then, restores the conical surface.Then, in software, generate the CAD figure of tested axicon lens, from the CAD figure, obtain the parameter of cone angle.But its limitation is that the measuring accuracy of three-dimensional is limited, is preferably the micron order precision, so measuring error can not ignore.And when in CAD, carrying out the face shape reconstruct of axicon lens, error of fitting is also inevitable.These factors all can influence last measuring accuracy.
Sine gauge detects measures the main method that cone angle is factory's measuring room, the on-the-spot precision measurement in workshop.Its measuring principle is the angle that makes a standard of sine gauge formation, obtains the actual value (actual deviation) of the cone angle of tested axicon lens through measurement and mathematical operation.But the combination of gauge block size is very big to the influence of measurement result, the angle error that also has the parallelism error of sine gauge work top and two cylinder Down Highways public affairs tangent plane to cause; The angle error that the dull and stereotyped parallelism error of measurement causes etc.And this kind measuring method belongs to contact type measurement, can cause damage to the surface of axicon lens.
Zhao Jun etc. propose in the Chinese patent " CN 200968848, the cone angle measuring appearance " is converted into measurement of length with measurement of angle and achieves the goal.Adopt slide block that tested cone is fixed, use the vernier pawl to stick into capable reading, obtaining cone angle through simple computation.This method also belongs to contact type measurement, is not suitable for the cone angle measuring of axicon lens.
Summary of the invention
The purpose of this invention is to provide a kind of measuring method to the axicon lens cone angle, this method can realize the high-acruracy survey to the cone angle of the axicon lens that machines.
A kind of measuring method of the present invention to the axicon lens cone angle, solution is: utilize the measurement mechanism realization following to the step of the measurement of axicon lens cone angle:
Step S1: be provided with and contain interferometer, plane camera lens, tested axicon lens, rotation platform, optical table and cubical measurement mechanism; Between interferometer and tested axicon lens or cube, be provided with the plane camera lens, the sagittal plane of tested axicon lens is fixed on the position at rotation platform center;
Step S2: the plane camera lens is installed in above the interferometer; The adjustment interferometer makes through plane camera lens outgoing standard directional light, and cube is installed on the rotation platform; Rotation platform is placed on the optical table; The pitch position of the obliquity of the horizontal direction of adjustment rotation platform and optical table and the vertical direction of optical table makes the optical axis with the directional light plane camera lens cubical reflecting surface orthogonal, utilizes the autocollimation reflection of the directional light of plane camera lens; With the striped of setting to zero of the interference fringe in the interferometer, this moment, turning axle and the optical axis of directional light of rotation platform were in mutually perpendicular position;
Step S3: remove cube,, and tested axicon lens is fixed on the last plane of rotation platform with the last plane vertical placement each other of the sagittal plane of tested axicon lens and rotation platform; Rotate rotation platform; Make first bus of tested axicon lens vertical, utilize the autocollimation reflected light of light in the first bus peripheral region and the inner reference light of interferometer to form interference fringe, according to interference fringe with the first directional light optical axis; Rotation platform is adjusted; Make the crooked zero interference fringe of interference fringe formation band, select the angle value readings on the rotation platform, record rotation platform angle value readings at this moment is first angle value readings;
Step S4: rotation rotation platform; Make second bus of tested axicon lens vertical with the second directional light optical axis, utilize the autocollimation reflected light of light in the second bus peripheral region, the reference light inner with interferometer forms interference fringe; According to interference fringe; Rotation platform is adjusted, made interference fringe form the crooked zero interference fringe of band, record rotation platform second angular readings at this moment;
Step S5: the first angular readings B1 and the second angular readings B2 to rotation platform calculate, and obtain the anglec of rotation B of rotation platform, B=|B2-B1|, and wherein B1 is that first angular readings, B2 do
Second angular readings;
Step S6: utilize anglec of rotation B and cone angle to be the relation at supplementary angle each other, calculate the cone angle A of tested axicon lens, A=π-B.
The present invention's advantage compared with prior art is the measuring method of cone angle proposed by the invention, is based on the measuring method of optics, can the face shape of axicon lens not exerted an influence.The present invention utilizes the high precision rotation platform as direct continuous data, and its precision can reach a second level, and the interference fringe picture that adopts simultaneously can reach nano level aligning, thereby guarantees final accuracy of detection.The principle of this invention is simple, and is easy to operate, is easy to realize.
1) the present invention can reach nano-precision through the verticality of interference fringe monitoring directional light optical axis and conscope bus.
2) the present invention utilizes complementary relationship to calculate the size of cone angle through the supplementary angle of the cone angle of high precision rotation platform measurement measured circle axicon lens, can reach a second class precision.
3) the used experimental apparatus of the present invention is few, and regulating step is simple, and can realize the high-acruracy survey of cone angle.
The zone that the triangle axicon lens is used for the autocollimation reflection is the plane, because the zone of the triangle axicon lens conical surface is bigger, the shape of formed interference fringe is more prone to differentiate.
Description of drawings
Fig. 1 is a synoptic diagram of adjusting rotation platform and directional light optical axis verticality among the present invention.
Fig. 2 is the instrumentation plan of cone angle among the present invention.
Fig. 3 A is a concrete distribution plan of describing the remainder error size.
Fig. 3 B is the inclination figure that describes remainder error.
Fig. 3 C describes the synoptic diagram that interference fringe distributes.It is interference fringe picture that the bus autocollimation reflects to form on the tested axicon lens.
Fig. 4 is the cone angle and the complementary synoptic diagram of the anglec of rotation of tested axicon lens.
Fig. 5 is the high-precision measuring method process flow diagram of cone angle of the present invention.
Tested axicon lens 3, rotation platform 4,
Cube 5, optical table 7
The bus and the peripheral region 6 thereof that are used for the autocollimation reflection,
Article one bus a of tested axicon lens 3,
The second bus b of tested axicon lens 3,
The first directional light optical axis c of plane camera lens 2,
The second directional light optical axis d of plane camera lens 2.
Embodiment
For making the object of the invention, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to further explain of the present invention.
Embodiment combines Fig. 1 and Fig. 2 to explain; The synoptic diagram of adjustment rotation platform and directional light optical axis verticality; Utilize measurement mechanism to realize the high-acruracy survey of cone angle, comprising interferometer 1, plane camera lens 2, tested axicon lens 3, rotation platform 4, cube 5, zone 6 and optical table 7.
Below in conjunction with Fig. 5 the set-up procedure of the high-acruracy survey of measurement mechanism realization axicon lens cone angle is done following description:
Step S1: between interferometer 1 and tested axicon lens 3 or cube 5, be provided with plane camera lens 2, the sagittal plane of tested axicon lens 3 is fixed on the position of last planar central of rotation platform 4.Tested axicon lens 3 be conscope, triangle axicon lens, polygonal pyramid mirror, frustum mirror one of them, or the wherein combination of several axicon lens.
Step S2: plane camera lens 2 is installed in above the interferometer 1, adjustment interferometer 1, making the directional light through 2 outgoing of plane camera lens is the standard directional light.Cube 5 is installed on the last plane of rotation platform 4; Rotation platform 4 is placed on the optical table 7 among the present invention as depicted in figs. 1 and 2; The pitch position of the obliquity of the horizontal direction of adjustment rotation platform 4 and optical table 7 and the vertical direction of optical table 7; Make the optical axis x of directional light of reflecting surface and plane camera lens 2 of cube 7 orthogonal; Utilize the autocollimation reflection of the directional light of plane camera lens 2, with the striped of setting to zero of the interference fringe in the interferometer 1, this moment, the optical axis x of directional light of turning axle y and plane camera lens 2 of rotation platform 4 was in mutually perpendicular position;
Step S3: remove cube 5, with the sagittal plane and the mutual vertical placement in the last plane of rotation platform 4 of tested axicon lens 3, tested axicon lens 3 is fixed on the last plane of rotation platform 4, and is as shown in Figure 2.Rotation rotation platform 4 makes the first bus a of tested axicon lens 3 or the conical surface vertical with the first directional light optical axis c, and the autocollimation reflected light of light will form interference fringe with interferometer 1 inner reference light in the first bus a peripheral region 6 or the conical surface.According to interference fringe, rotation platform 4 is adjusted, make interference fringe form the crooked zero interference fringe of band as shown in Figure 3.Select the angle value readings on the rotation platform 4.At this moment, record rotation platform 4 angle value readings at this moment is the first angular readings B1;
Step S4: rotation rotation platform 4, make the second bus b or the conical surface of tested axicon lens 3 vertical with the directional light optical axis, the autocollimation reflected light of light will form interference fringe with the reference light in the interferometer 1 in the second bus b peripheral region 6 or the conical surface.According to interference fringe, rotation platform 4 is carried out small adjustment, make interference fringe form the crooked zero interference fringe of band as shown in Figure 3.At this moment, the record high precision rotation platform 4 second angular readings B2 at this moment; When the interference fringe in the interferometer 1 is zero striped, will in the interference fringe distribution plan among Fig. 3 C (Intensity Map), be shown as zero striped.In the inclination figure of Fig. 3 B (Oblique Plot), be shown as height column comparatively uniformly, the root-mean-square value of Fig. 3 A is in a small amount simultaneously, i.e. tens nanometers.
Step S5: utilize the first angular readings B1 and the second angular readings B2 of the rotation platform 4 of record, calculate the anglec of rotation B=|B2-B2| of rotation platform 4, wherein B1 is that first angular readings, B2 are second angular readings.
Step S6: utilize the relation of cone angle of anglec of rotation B and tested axicon lens 3 as shown in Figure 4, they are the supplementary angle each other.So can calculate the cone angle A=π-B of tested axicon lens 3.
Fig. 2 is the measurement mechanism synoptic diagram of coning angle among the present invention; From the inner light beam of interferometer 1 through parallel the inciding on the tested axicon lens 3 in plane camera lens 2 backs; Regulating rotation platform 4 makes the optical axis of first bus a of tested axicon lens 3 and the directional light that plane camera lens 2 is exported orthogonal; Utilize the autocollimation reflected light in the first bus a and the peripheral region thereof, form with interferometer 1 inner reference light and have a little crooked zero interference fringe.So measure the zero interference fringe of the symmetric position first bus a, the second bus b; Can obtain the angle of rotation platform 4 rotations; According to the complementary relationship of the anglec of rotation shown in Fig. 4 and coning angle, can obtain the exact value of coning angle then, the precision of the measured value of the coning angle that this kind method obtains is in 5 seconds; Promptly have a second class precision, belong to high-acruracy survey; The running accuracy of the rotation platform of here using 4 at 2 seconds with interior high precision rotation platform 4.The first bus a and the second bus b lay respectively at the both sides of cone angle, are similar to two sidelines at an angle.Two conical surfaces of tested axicon lens 3 lay respectively at the both sides of cone angle too.
Embodiment 1: utilize measurement mechanism to realize the high-acruracy survey of cone angle, a tested axicon lens 3 is described for the concrete measurement and the set-up procedure of the coning angle of measured circle axicon lens as follows:
1) plane camera lens 2 is installed in above the interferometer 1, the inclination and the pitching of interferometer 1 are finely tuned, making the directional light through 2 outgoing of plane camera lens is the standard directional light; Cube 5 is fixed on the plane of rotation platform 4, rotation rotation platform 4 makes the reflection luminous energy of one of them face of cube 5 get into interferometer 1, and the reference light in reflected light and the interferometer 1 forms interference fringe, and is as shown in Figure 1; Rotation platform 4 and the inclination and the pitching of the horizontal direction of optical table are finely tuned; Simultaneously also to carry out small rotation to rotation platform 4; Make the interference fringe in the interferometer 1 adjust to zero striped, the turning axle of rotation platform 4 and the optical axis of directional light are in mutually perpendicular position at this moment;
2) remove cube 5, with the sagittal plane and the vertical placement each other of rotation platform 4 planes of measured circle axicon lens, the measured circle axicon lens is fixed on the plane of rotation platform 4, and is as shown in Figure 2; Rotation rotation platform 4 makes the first bus a of measured circle axicon lens vertical with the first directional light optical axis c, and the autocollimation reflected light of light in the first bus a peripheral region 6 will form interference fringe with interferometer 1 inner reference light.According to the shape of interference fringe, rotation platform 4 is carried out small rotation, also to carry out small adjustment simultaneously to the pitch angle and the angle of pitch of rotation platform 4, make interference fringe form the crooked zero interference fringe of band as shown in Figure 3.At this moment, the people is the first angular readings B1 that notes rotation platform 4; During crooked zero interference fringe of described formation band, will in the interference fringe distribution plan among Fig. 3 C, be shown as zero striped, be shown as height column comparatively uniformly among the inclination figure in Fig. 3 B, the while root-mean-square value of Fig. 3 A is 1/50 wavelength.
3) rotation rotation platform 4 makes the second bus b of measured circle axicon lens vertical with directional light optical axis d, and the autocollimation reflected light of light in the second bus b peripheral region 6 will form interference fringe with the reference light in the interferometer 1.According to the shape of interference fringe, rotation platform 4 is carried out small rotation, also to carry out small adjustment simultaneously to the inclination and the pitching of rotation platform 4, make interference fringe form the crooked zero interference fringe of band as shown in Figure 3.At this moment, the people is the first angular readings B2 that notes rotation platform 4; During crooked zero interference fringe of described formation band, will in the interference fringe distribution plan among Fig. 3 C, be shown as zero striped, be shown as height column comparatively uniformly among the inclination figure in Fig. 3 B, the while root-mean-square value of Fig. 3 A is 1/50 wavelength.
4) utilize the first angular readings B1 and the second angular readings B2 of the rotation platform 4 of record, calculate the anglec of rotation B=|B2-B1| of rotation platform 4, wherein B1 is that first angular readings, B2 are second angular readings.
5) utilize the relation of coning angle of anglec of rotation B and measured circle axicon lens as shown in Figure 4, they are the supplementary angle each other.So can calculate the coning angle A=π-B of measured circle axicon lens.
Embodiment 2: utilize measurement mechanism to realize the high-acruracy survey of cone angle; Provide tested axicon lens 3 and be the embodiment of tested triangle axicon lens, specifically describe: step 1-4 is identical with embodiment 1, and difference is: different with conscope; The zone that the triangle axicon lens is used for the autocollimation reflection is the plane; So in step 2 and step 3, need the conical surface of adjusting triangle axicon lens vertical, utilize the autocollimation reflected light of the conical surface and interferometer 1 inner reference beam to form zero interference fringe with the directional light optical axis.Because the zone of the conical surface is bigger, the shape of formed interference fringe is more prone to differentiate.The zero interference fringe of said formation will be shown as zero striped in the interference fringe distribution plan among Fig. 3 C, be nanometer scale at the root-mean-square value of Fig. 3 A.
Utilize the relation of cone angle of anglec of rotation B and tested triangle axicon lens as shown in Figure 4 again, they are the supplementary angle each other.So can calculate the cone angle A=π-B of tested triangle axicon lens.
The cone angle measuring method of other polygonal pyramid mirror, frustum mirror etc. and embodiment 1 or embodiment 2 are similar, through this measuring process, can obtain the cone angle of tested axicon lens 3.
The above; Be merely the embodiment among the present invention; But protection scope of the present invention is not limited thereto, and anyly is familiar with this local modification or the replacement of technological people in the technical scope that the present invention disclosed, and all should be encompassed in of the present invention comprising within the scope.
Claims (3)
1. measuring method to the axicon lens cone angle is characterized in that: it is following to utilize measurement mechanism to realize the step of the measurement of axicon lens cone angle:
Step S1: be provided with and contain interferometer, plane camera lens, tested axicon lens, rotation platform, optical table and cubical measurement mechanism; Between interferometer and tested axicon lens or cube, be provided with the plane camera lens, the sagittal plane of tested axicon lens is fixed on the position at rotation platform center;
Step S2: the plane camera lens is installed in above the interferometer; The adjustment interferometer makes through plane camera lens outgoing standard directional light, and cube is installed on the rotation platform; Rotation platform is placed on the optical table; The pitch position of the obliquity of the horizontal direction of adjustment rotation platform and optical table and the vertical direction of optical table makes the optical axis with the directional light plane camera lens cubical reflecting surface orthogonal, utilizes the autocollimation reflection of the directional light of plane camera lens; With the striped of setting to zero of the interference fringe in the interferometer, this moment, turning axle and the optical axis of directional light of rotation platform were in mutually perpendicular position;
Step S3: remove cube,, and tested axicon lens is fixed on the last plane of rotation platform with the last plane vertical placement each other of the sagittal plane of tested axicon lens and rotation platform; Rotate rotation platform; Make first bus of tested axicon lens vertical, utilize the autocollimation reflected light of light in the first bus peripheral region and the inner reference light of interferometer to form interference fringe, according to interference fringe with the first directional light optical axis; Rotation platform is adjusted; Make the crooked zero interference fringe of interference fringe formation band, select the angle value readings on the rotation platform, record rotation platform angle value readings at this moment is first angle value readings;
Step S4: rotation rotation platform; Make second bus of tested axicon lens vertical with the second directional light optical axis, utilize the autocollimation reflected light of light in the second bus peripheral region, the reference light inner with interferometer forms interference fringe; According to interference fringe; Rotation platform is adjusted, made interference fringe form the crooked zero interference fringe of band, record rotation platform second angular readings at this moment;
Step S5: the first angular readings B1 and the second angular readings B2 to rotation platform calculate, and obtain the anglec of rotation B of rotation platform, B=|B2-B2|, and wherein B1 is that first angular readings, B2 are second angular readings;
Step S6: utilize anglec of rotation B and cone angle to be the relation at supplementary angle each other, calculate the cone angle A of tested axicon lens, A=π-B.
2. according to claim 1 to the measuring method of axicon lens cone angle, it is characterized in that: said tested axicon lens be conscope, triangle axicon lens, polygonal pyramid mirror, frustum mirror one of them, or the wherein combination of several axicon lens.
3. like the said measuring method of claim 2 to the axicon lens cone angle; It is characterized in that: the zone that said triangle axicon lens is used for the autocollimation reflection is the plane; In step S2 and step S3; Need the conical surface of adjusting triangle axicon lens vertical, utilize the autocollimation reflected light of the conical surface and the inner reference beam of interferometer to form zero interference fringe with the directional light optical axis.
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| CN104501743A (en) * | 2014-12-16 | 2015-04-08 | 中国科学院上海光学精密机械研究所 | Measuring device and measuring method for taper angle of tapered lens |
| CN107990838A (en) * | 2017-11-09 | 2018-05-04 | 中国科学院上海光学精密机械研究所 | Axicon lens and cylindrical mirror surface shape measurement device and measuring method |
| CN108332686A (en) * | 2018-01-26 | 2018-07-27 | 中国科学院上海光学精密机械研究所 | A kind of detection device and method of conical mirror cone angle |
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| CN113324514A (en) * | 2021-05-21 | 2021-08-31 | 安徽创谱仪器科技有限公司 | Rotating shaft debugging method and debugging assembly |
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| CN103278109B (en) * | 2013-05-24 | 2015-08-26 | 中国科学院光电技术研究所 | A kind of star scan angle monitor angle measurement accuracy pick-up unit |
| CN104501743A (en) * | 2014-12-16 | 2015-04-08 | 中国科学院上海光学精密机械研究所 | Measuring device and measuring method for taper angle of tapered lens |
| CN104501743B (en) * | 2014-12-16 | 2017-04-05 | 中国科学院上海光学精密机械研究所 | Conical mirror cone angle measuring device and measuring method |
| CN107990838A (en) * | 2017-11-09 | 2018-05-04 | 中国科学院上海光学精密机械研究所 | Axicon lens and cylindrical mirror surface shape measurement device and measuring method |
| CN108332686A (en) * | 2018-01-26 | 2018-07-27 | 中国科学院上海光学精密机械研究所 | A kind of detection device and method of conical mirror cone angle |
| CN108362225A (en) * | 2018-02-11 | 2018-08-03 | 中国科学院上海光学精密机械研究所 | The measuring device and measuring method of conical mirror cylinder mirror surface-shaped |
| CN108362225B (en) * | 2018-02-11 | 2019-12-20 | 中国科学院上海光学精密机械研究所 | Measuring device and measuring method for conical mirror cylindrical surface shape |
| CN108507488A (en) * | 2018-03-05 | 2018-09-07 | 中国科学院上海光学精密机械研究所 | Axicon lens surface testing system based on axial scan and detection method |
| CN108507488B (en) * | 2018-03-05 | 2019-12-20 | 中国科学院上海光学精密机械研究所 | System and method for detecting surface shape of conical mirror based on axial scanning |
| CN113324514A (en) * | 2021-05-21 | 2021-08-31 | 安徽创谱仪器科技有限公司 | Rotating shaft debugging method and debugging assembly |
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Application publication date: 20121212 |