CN104034257A - Synchronous phase shift interference measurement device and method of Fizeau quasi-common optical path structure - Google Patents
Synchronous phase shift interference measurement device and method of Fizeau quasi-common optical path structure Download PDFInfo
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Abstract
The invention relates to a synchronous phase shift interferometry method and a synchronous phase shift interferometry device of a Fizeau quasi-common-path structure, which comprise a laser, a half-wave plate, a focusing lens, a spatial filter, a circular polarization beam splitter (an optical rotation crystal), a beam splitter, a collimating lens, a reference mirror, an aperture diaphragm, an imaging lens, a beam splitting phase shift system, a computer control system and a CCD camera. The invention combines the synchronous phase shift technology and the Fizeau interference method, solves the technical problems that the traditional interferometer has poor stability and can not realize dynamic measurement, and is characterized in that the orthogonal polarization separation of reference light and test light in a common light path is realized by utilizing the optical rotation effect of crystals and adding a circular polarized light beam splitter with a small beam splitting angle into a Fizeau interference structure. The invention not only avoids the use of high-quality quarter wave plates in the synchronous phase shift interference system, but also greatly reduces the phase measurement error caused by the stress birefringence effect of the optical elements in the system.
Description
Technical field
The invention belongs to optical detection field, relate to a kind of interferometric measuring means and method, particularly the synchronous phase shift interferometric measuring means of a kind of Feisuo type and method.
Background technology
Interfere measurement technique is a kind of generally acknowledged non-contact type high-precision measurement means, and the face shape that is widely used in optical element is detected, a series of measurements that include optical path difference concept such as microdeformation, refractive index homogeneity of material.Phase shift interference PSI (Phase-Shifting Interferometry) measuring technique is proposed by people such as Burning the earliest, adopt digital corrugated phase-detection technology, high precision, automatic test are real-time realized, greatly expand the measurement function of interferometer, improve testing efficiency, promoted the raising of contemporary optics manufacture level.But the maximum drawback that phase shift interference is measured is very responsive to vibration, and extraneous vibration and air turbulence all can cause very large error to measurement result, and this has also limited the range of application of phase shift interference.And synchronous phase shift interfere measurement technique (Simultaneous Phase-Shifting Interferometry), can fundamentally avoid the impact of vibration on interferometry, this makes the online detection of Large optical system become possibility, has now become one of optical detection field heat subject.
Synchronous phase shift interfere measurement technique is based on spatial Phase-shifting Method, gather the interferogram more than three frames with constant phase shift step-length (being generally 90 °) at synchronization, vibration is identical on the impact of all interferograms like this, can avoid the impact of vibration on testing result through subtracting each other of algorithm and phase division operation.
The synchronous phase shift interference technique research of path-splitting based on the graceful Green's type of Thailand is now more, and the synchronous phase shift interfere measurement technique research of the common light path of Feisuo type seldom relates to, main cause is that the cross polarization that the synchronous Phase Shifting System based on polarization interference principle is difficult to realize in light path altogether in Feisuo type object light and reference light separates, and safe graceful Green's type path-splitting system can realize easily by polarization splitting prism together.But at present, interferometer on market is mainly Feisuo type structure, with respect to Thailand's graceful type path-splitting structure, due to object light and reference light light path altogether, vibrate to external world with air turbulence and have the little assembling that is easy to that takes up space of certain antijamming capability and institute so they have passed through identical optical element Feisuo type structure.The synchronous phase shift interferometric measuring means that development is total to light path based on Feisuo type is trend of the times.
Chinese patent " the synchronous phase shift Feisuo interference device that can measure in real time " publication number is CN102580414A, publication date is in August, 2012, this patent utilization a slice quarter-wave plate replaces standard optic plane glass crystal, make object light and reference light by producing and interfere after co-route, can realize real-time measures, but the method needs the high-quality quarter-wave plate of a slice, and cost is higher, and be difficult for realizing the measurement of heavy caliber sphere or aspheric mirror.
United States Patent (USP) " Interferometric system with reduced vibration sensitivity and related method " publication number is: US00265017A1, publication date is in February, 2012, the cross polarization that the Wollaston prism that this patent utilization a slice has a birefringence function is realized object light and reference light in Feisuo type light path separates, but in order to realize polarization movable phase interfere, this patented method also needs to add a slice quarter-wave plate again, this has increased system cost, has strengthened the operation easier of system.
Summary of the invention
The technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, provide a kind of Feisuo type accurate synchronous phase shift interferometric measuring means and the method for light channel structure altogether, solved the difficult problem of synchronous phase shift interference for interference with common path system; Simultaneously, can obtain strict left-handed right-circularly polarized light with isotropic gyrotropi crystal, so not only avoid the use of high-quality quarter-wave plate in synchronous phase shift interference system, also made the phase measurement error that in system, the existing residual birefringence of optical element causes greatly reduce.
The technology of the present invention solution: the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of a kind of Feisuo type, comprising: laser instrument, half-wave plate, condenser lens, spatial filter, circularly polarized light beam splitter, spectroscope, collimation lens, reference mirror, aperture, imaging len, light splitting phase-shift system, computer control system and CCD, the front focal plane of described condenser lens back focal plane and collimation lens overlaps, described spatial filter is positioned at the back focal plane place of condenser lens, is positioned at the front focal plane place of collimation lens simultaneously, described aperture is positioned at the front focal plane place of imaging len, and with the front focal plane conjugation of collimation lens, laser instrument sends a branch of linearly polarized light beam, becomes the adjustable linearly polarized light in a branch of polarization direction after half-wave plate, after focusing on, condenser lens becomes two bundles and has left circularly polarized light and the right-circularly polarized light of certain splitting angle by a circularly polarized light beam splitter after spatial filter filtering, the two regards the cross polarization pointolite p in two conjugation in the front focal plane place of collimation lens as, the light that s sends, wherein p light source sends left circularly polarized light, s light source sends right-circularly polarized light, after a spectroscope transmission and collimation lens, light beam is by beam-expanding collimation, then left-handed right-circularly polarized light is all reflexed to aperture place by spectroscope again via reference mirror reflection and measured lens reflection after collimation lens, to form four hot spot Rp, Rs, Tp, Ts, Rp is the hot spot that left circularly polarized light forms after reference mirror reflection is again via collimation lens focusing and spectroscope reflection, Rs is the hot spot that right-circularly polarized light forms after reference mirror reflection is again via collimation lens focusing and spectroscope reflection, Tp is the hot spot that left circularly polarized light forms after measured lens reflection is again via collimation lens focusing and spectroscope reflection, Ts is the hot spot that right-circularly polarized light forms after measured lens reflection is again via collimation lens focusing and spectroscope reflection, can make hot spot Rp by the relative position that regulates reference mirror and measured lens, Ts or Rs, Tp overlaps, and other hot spot is filtered, and has so just obtained reference light and the test light of pair of orthogonal polarization, then after imaging len, enter light splitting phase-shift system and realize light splitting phase shift, by computer control system control CCD synchronous acquisition be greater than the phase shifting interference of three width and with phase shift algorithm recover measured lens 3 d shape distribute, realize synchronous phase shift interferometry.
Described circularly polarized light beam splitter is one, and by two rotation directions, contrary and isotropic right-angle prism type gyrotropi crystal glues together the rectangular parallelepiped forming.Form by certain geometric shape gummed.
Described splitting angle is that 14-16 divides.
Described condenser lens, collimation lens and imaging len are aplanat.
Described light splitting phase-shift system adopts the phase shift of prismatic decomposition polaroid, or the phase shift of grating beam splitting polaroid, or micro-polarization spectro array light splitting phase shift.
The initial quick shaft direction of described half-wave plate is horizontal direction, changes the polarization direction of polarization light output by rotation half-wave plate, and then changes left circularly polarized light that circular polarization optical splitter sends and the light intensity of right-circularly polarized light.
Described cross polarization pointolite p, s regards two light sources in traditional Feisuo optical interference circuit as, and they are positioned at the front focal plane place of collimation lens and are symmetrically distributed taking optical axis as axle; Distance d between the two is determined by the splitting angle θ of circularly polarized light beam splitter and the focal distance f of collimation lens: d ≈ tan (θ) f.
The front surface of described reference mirror should have the 4-6 ° of angle of wedge, does not enter light path with the light that ensures front surface reflection.
The accurate synchronous phase shift interferometric method for light channel structure altogether of Feisuo type, performing step is as follows:
(1) adjust the relative position of reference mirror and measured lens, make a pair of Rp in four hot spots at aperture place, Ts or Rs, Tp overlaps, and a pair of hot spot is filtered in addition;
At this moment obtain test light and the reference light of pair of orthogonal polarization, can be expressed as with Jones matrix:
Wherein E
rrepresent reference light Jones vector,
be reference light amplitude, it is a left circularly polarized light; E
trepresent the Jones vector of test light,
be test light amplitude, it is a right-circularly polarized light; φ is the phase differential between reference light and test light;
(2) be greater than the phase shifting interference of three width by computer control system control CCD synchronous acquisition, and record;
Beam splitting system is compound light wave
(wherein E represents compound light wave Jones vector) is divided into and is greater than the sub-complex light that 3 bundles (such as 4 bundles) equate completely, then be followed successively by θ=0 ° via four polarization directions and horizontal direction angle respectively, 45 °, 90 °, the polaroid of 135 °, its Jones vector:
(wherein θ represents the angle of thoroughly shake direction and the horizontal direction of polaroid, A (θ) represent thoroughly to shake the Jones vector of the polaroid that the angle of direction and horizontal direction is θ)
Interfere, interference light vector can be expressed as:
(wherein E' represents the Jones vector after reference light and test light interfere)
This emergent light is a linearly polarized light consistent with polarization direction, and its light intensity is:
(wherein I represents the light intensity value after reference light and test light interfere)
Control CCD (14) synchronous acquisition four width phase shifting interferences by computer control system (13), light intensity is respectively:
(wherein I
1represent the light intensity of the first width interferogram of CCD collection, I
2represent the light intensity of the second width interferogram (90 ° of phase shifts) of CCD collection, I
3represent the light intensity of the 3rd width interferogram (180 ° of phase shifts) of CCD collection, I
4represent the light intensity of the 4th width interferogram (270 ° of phase shifts) of CCD collection)
Use four-step phase-shifting algorithm, recover phase place:
(wherein
represent the wrapped phase of the measured piece being recovered by four-step phase-shifting algorithm)
After separating parcel, obtain real PHASE DISTRIBUTION, recycling formula:
Can recover actual shape of measured lens.(wherein φ (x, y) represents to separate the true phase place of the rear measured piece of parcel, and h (x, y) represents that the face shape of measured piece distributes)
Principle of the present invention: utilize the rotation effect of crystal, linearly polarized light is divided into left circularly polarized light and the right-circularly polarized light that two bundle angles are very little with a circularly polarized light beam splitter.Such two bundles have certain walk-off angle and the orthogonal light beam of polarization state just can be all by reference to part and measured piece, just can obtain a pair of crossed polarized light that contains reference mirror information and measured lens information by the relative position of adjusting reference mirror and measured lens, also the cross polarization that has just realized object light and reference light separates, finally, by realizing the four width interferogram synchronous acquisitions with fixed phase drift after synchronous light splitting phase-shift system, adopt phase shift algorithm to recover tested mirror surface-shaped information.
Traditional synchronous phase shift interferometer measuration system generally all needs to adopt quarter-wave plate that the linearly polarized light of cross polarization is converted into left-handed and right-circularly polarized light to realize phase shift interference, the present invention has avoided the use of quarter-wave plate, not only simplify system architecture and also reduced cost, the more effective difficult problem of synchronous phase shift interference for the common light channel structure of Feisuo type that solved.
The present invention's advantage is compared with prior art:
(1), for interferometry: the present invention combines synchronous phase-shifting technique and Feisuo interference technique, solved conventional interference instrument poor stability, can not realize the technical barrier of kinetic measurement.
(2) for the synchronous phase shift interferometry of the graceful type of Thailand: the present invention adopts Feisuo type structure not only can simplify system, more can reduce the impact of vibrating in measuring process, has improved measuring accuracy.
(3) for the synchronous phase shift interferometer measuration system of other Feisuo types: 1. the present invention does not need high-quality quarter-wave plate just can realize polarization interference, provides cost savings, and has improved system compact type.2. in system, arbitrary crystal element exists stress birefrin all can cause between the reference light of different polarization states in common light path and test light and produces phase error, and this can have a huge impact measurement result.Research shows: for linearly polarized light, measuring result error and stress birefrin error are linear, and for circularly polarized light exponent function relation.Like this, the orhtogonal linear polarizaiton light that the left-right rotary circularly polarized light that generates of circularly polarized light beam splitter that the present invention adopts generates with respect to Wollaston prism as object light and reference light respectively for interference system, the error that stress birefrin in light path is brought measurement result significantly reduces, and the phase error of bringing when stress birefrin it even can be ignored the impact of measurement result while not being very large.This is the main innovate point of difference of the present invention and prior art.
Brief description of the drawings
Fig. 1 is that pick-up unit forms schematic diagram;
Fig. 2 is that the imaginary light source of pairwise orthogonal polarization state generates schematic diagram;
Fig. 3 is the light splitting phase-shift system schematic diagram of a kind of prismatic decomposition polaroid phase shift;
Fig. 4 is the polarization direction schematic diagram of four polaroids.
Embodiment
Introduce in detail the present invention below in conjunction with the drawings and the specific embodiments.
As shown in Figure 1, the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of a kind of Feisuo type of the embodiment of the present invention comprises: laser instrument 1, half-wave plate 2, condenser lens 3, spatial filter 4, circularly polarized light beam splitter 5, unpolarized Amici prism 6, collimation lens 7, reference mirror 8, measured lens 9 apertures 10, imaging len 11, light splitting phase-shift system 12, computer control system 13, CCD camera 14.
The component function that the present invention comprises is as follows:
1, laser instrument 1, wavelength, at visible-range, is exported a branch of linearly polarized light and power stability.
2, condenser lens 3, collimation lens 7, imaging len 11 requires as aplanat.And the front focal plane of condenser lens 3 back focal planes and collimation lens 7 overlaps.The front focal plane of imaging len 11 is positioned at aperture 10 places, and is the conjugate position of collimation lens 7 front focal planes.
3, spatial filter 4, diameter, at 10um-50um, is used for illumination light to carry out spatial filtering.Be positioned at the front focal plane place of back focal plane and the collimation lens 7 of condenser lens 3.
4, by rotation direction, contrary and isotropic gyrotropi crystal gummed forms circularly polarized light beam splitter 5, and as NaBrO3 crystal and NaClO3 crystal, structure as shown in Figure 2.It can realize separating of left circularly polarized light and approximately 15 points of right-circularly polarized lights.
5, Amici prism 6, is non-polarization splitting prism, for reflection and the transmission of light beam.
6, aperture 10, can adjusting size, can see through object light and the reference light with orthogonal polarisation state, and remaining hot spot is blocked.Be positioned at the front focal plane place of imaging len 11, and with the front focal plane conjugation of collimation lens 7.
7, light splitting phase-shift system 12 adopts prismatic decomposition, polaroid phase-shift system, as shown in Figure 3: beam splitting system is made up of 3 consistent unpolarized Amici prism (NPBS) gummeds of performance, phase-shift system is to be followed successively by 0 ゜ by four polarization directions, 45 ゜, 90 ゜, the polaroid composition of 135 ゜, control CCD14 synchronous working by computer control system 13, realize four width and have the interferogram synchronous acquisition of fixed skew by single exposure.
8, light path proposed by the invention as shown in Figure 1: laser instrument 1 sends a branch of linearly polarized light beam, after half-wave plate 2, become the adjustable linearly polarized light in a branch of polarization direction, after condenser lens 3 focuses on by spatial filter 4 filtering, by a circularly polarized light beam splitter 5, become two bundles and have left circularly polarized light and the right-circularly polarized light of certain angle.The two can regard the cross polarization pointolite p in two conjugation in the front focal plane place of collimation lens 7, the light that s sends as.After a unpolarized Amici prism 6 and collimation lens 7, light beam is by beam-expanding collimation, then left-handed right-circularly polarized light all reflects and measured lens front surface reflection via the rear surface of reference mirror 8, again after collimation lens 7, reflexed to aperture 10 places by unpolarized Amici prism 6, form four hot spot Rp, Rs, Tp, Ts.Can make hot spot Rp by the relative position that regulates reference mirror 8 and measured lens 9, Ts or Rs, Tp overlaps, and other hot spot is filtered.Then after imaging len 12, enter light splitting phase-shift system 12 and realize synchronous light splitting phase shift.Finally control by computer control system 13 the 3 d shape distribution that CCD14 synchronous acquisition is greater than the phase shifting interference of three width and recovers measured lens by phase shift algorithm, realize synchronous phase shift interferometry.
Supposed before entering light splitting phase-shift system, test light is left circularly polarized light, and its Jones matrix is:
(wherein
for test light amplitude, E
tfor test light Jones vector, i is imaginary unit)
Reference light is right-circularly polarized light, and Jones matrix is:
(wherein E
rfor reference light Jones vector,
for the phase differential between reference light and test light)
Composite light beam Jones matrix is:
Polarization direction and the horizontal sextant angle of supposing polaroid are θ, and its Jones matrix is:
When composite light beam (θ=0) after first polaroid, its light vector is like this:
(wherein r1 is the reflection coefficient of unpolarized Amici prism 1 (NPBS1), and t2 is the transmission coefficient of unpolarized Amici prism 2 (NPBS2))
The interferogram light intensity collecting on CCD1 is like this:
In like manner, the light intensity on other three CCD is respectively:
(wherein r2 is the reflection coefficient of unpolarized Amici prism 2 (NPBS2), t1 is the transmission coefficient of unpolarized Amici prism 1 (NPBS1), r3 is the reflection coefficient of unpolarized Amici prism 3 (NPBS3), and t3 is the transmission coefficient of unpolarized Amici prism 3 (NPBS3))
Because the performance of three unpolarized Amici prisms (NPBS) is consistent, so can make: r
1r
2=r
1t
2=t
1r
3=t
1t
3
Obtaining PHASE DISTRIBUTION with four-step phase-shifting algorithm is:
After separating parcel, obtain real PHASE DISTRIBUTION, recycling formula:
Can recover actual the shape distribution h (x, y) of measured lens.
The above; it is only the embodiment in the present invention; but protection scope of the present invention is not limited to this, the part amendment of any people who is familiar with this technology in the disclosed technical scope of the present invention or replace, all should be encompassed in of the present invention comprise scope within.
Claims (9)
1. the accurate synchronous phase shift interferometric measuring means for light channel structure altogether of Feisuo type, is characterized in that comprising: laser instrument (1), half-wave plate (2), condenser lens (3), spatial filter (4), circularly polarized light beam splitter (5), spectroscope (6), collimation lens (7), reference mirror (8), aperture (10), imaging len (11), light splitting phase-shift system (12), computer control system (13) and CCD (14), the front focal plane of described condenser lens (3) back focal plane and collimation lens (7) overlaps, described spatial filter (4) is positioned at the back focal plane place of condenser lens (3), is positioned at the front focal plane place of collimation lens (7) simultaneously, described aperture (10) is positioned at the front focal plane place of imaging len (11), and with the front focal plane conjugation of collimation lens (7), laser instrument (1) sends a branch of linearly polarized light beam, becomes the adjustable linearly polarized light in a branch of polarization direction after half-wave plate (2), after focusing on, condenser lens (3) becomes two bundles and has left circularly polarized light and the right-circularly polarized light of certain splitting angle by a circularly polarized light beam splitter (5) after spatial filter (4) filtering, the two regards the cross polarization pointolite p in two conjugation in the front focal plane place of collimation lens (7) as, the light that s sends, wherein p light source sends left circularly polarized light, s light source sends right-circularly polarized light, after a spectroscope (6) transmission and collimation lens (7), light beam is by beam-expanding collimation, then left-handed right-circularly polarized light all reflects and again after collimation lens (7), is reflexed to aperture (10) by spectroscope (6) and locate via reference mirror (8) reflection and measured lens (9), to form four hot spot Rp, Rs, Tp, Ts, wherein Rp is the hot spot that left circularly polarized light forms after reference mirror (8) reflection is again via collimation lens (7) focusing and spectroscope (6) reflection, Rs is the hot spot that right-circularly polarized light forms after reference mirror (8) reflection is again via collimation lens (7) focusing and spectroscope (6) reflection, Tp is the hot spot that left circularly polarized light forms after measured lens (9) reflection is again via collimation lens (7) focusing and spectroscope (6) reflection, Ts is the hot spot that right-circularly polarized light forms after measured lens (9) reflection is again via collimation lens (7) focusing and spectroscope (6) reflection, can make hot spot Rp by the relative position that regulates reference mirror (8) and measured lens (9), Ts or Rs, Tp overlaps, and other hot spot is filtered, and has so just obtained reference light and the test light of pair of orthogonal polarization, then after imaging len (11), enter light splitting phase-shift system (12) and realize light splitting phase shift, control by computer control system (13) the 3 d shape distribution that CCD (14) synchronous acquisition is greater than the phase shifting interference of three width and recovers measured lens by phase shift algorithm, realize synchronous phase shift interferometry.
2. the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of Feisuo type according to claim 1, is characterized in that: described circularly polarized light beam splitter (5) is one, and by two rotation directions, contrary and isotropic right-angle prism type gyrotropi crystal glues together the rectangular parallelepiped forming.
3. the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of Feisuo type according to claim 1, is characterized in that: described splitting angle is that 14-16 divides.
4. the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of Feisuo type according to claim 1, is characterized in that: described condenser lens (3), collimation lens (7) and imaging len (11) are aplanat.
5. the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of Feisuo type according to claim 1, it is characterized in that: described light splitting phase-shift system (12) can adopt the phase shift of prismatic decomposition polaroid, or grating beam splitting polaroid phase shift, or micro-polarization spectro array light splitting phase shift.
6. the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of Feisuo type according to claim 1, it is characterized in that: the initial quick shaft direction of described half-wave plate (2) is horizontal direction, change the polarization direction of polarization light output by rotation half-wave plate, and then change left circularly polarized light that circular polarization optical splitter sends and the light intensity of right-circularly polarized light.
7. the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of Feisuo type according to claim 1, it is characterized in that: described cross polarization pointolite p, s regards two light sources in traditional Feisuo optical interference circuit as, and they are positioned at the front focal plane place of collimation lens and are symmetrically distributed taking optical axis as axle; Distance d between the two is determined by the splitting angle θ of circularly polarized light beam splitter (5) and the focal distance f of collimation lens (7): d ≈ tan (θ) f.
8. the accurate synchronous phase shift interferometric measuring means of light channel structure altogether of Feisuo type according to claim 1, is characterized in that: the front surface of described reference mirror (8) should have the 2-4 ° of angle of wedge, does not enter light path with the light that ensures front surface reflection.
9. the accurate synchronous phase shift interferometric method for light channel structure altogether of Feisuo type, is characterized in that: adopt measurement mechanism claimed in claim 1, performing step is as follows:
(1) adjust reference mirror (8) and the relative position of measured lens (9), make a pair of Rp in four hot spots that aperture (10) locates, Ts or Rs, Tp coincidence, a pair of hot spot is filtered in addition;
At this moment obtain test light and the reference light of pair of orthogonal polarization, can be expressed as with Jones matrix:
Wherein E
rrepresent reference light Jones vector,
be reference light amplitude, it is a left circularly polarized light; E
trepresent the Jones vector of test light,
be test light amplitude, it is a right-circularly polarized light; φ is the phase differential between reference light and test light;
(2) control by computer control system (13) phase shifting interference that CCD (14) synchronous acquisition is greater than three width, and record; Beam splitting system is compound light wave:
Wherein E represent compound light wave Jones vector be divided into be greater than 3 bundles completely equate sub-complex light, be then followed successively by θ=0 ° via four polarization directions and horizontal direction angle respectively, 45 °, 90 °, the polaroid of 135 °, its Jones vector:
Wherein θ represents the angle of thoroughly shake direction and the horizontal direction of polaroid, A (θ) represent thoroughly the to shake Jones vector of the polaroid that the angle of direction and horizontal direction is θ;
Interfere, interference light vector can be expressed as:
Wherein E' represents the Jones vector after reference light and test light interfere;
This emergent light is a linearly polarized light consistent with polarization direction, and its light intensity is:
Wherein I represents the light intensity value after reference light and test light interfere;
Control CCD (14) synchronous acquisition four width phase shifting interferences by computer control system (13), light intensity is respectively:
Wherein I
1represent the light intensity of the first width interferogram of CCD collection, I
2represent the light intensity of 90 ° of the second width interferogram phase shifts that CCD gathers, I
3represent the light intensity of 180 ° of the 3rd width interferogram phase shifts that CCD gathers, I
4represent the light intensity of 270 ° of the 4th width interferogram phase shifts that CCD gathers;
Use four-step phase-shifting algorithm, recover phase place:
Wherein
represent the wrapped phase of the measured piece being recovered by four-step phase-shifting algorithm;
After separating parcel, obtain real PHASE DISTRIBUTION, recycling formula:
Can recover actual shape of measured lens, wherein φ (x, y) represents to separate the true phase place of the rear measured piece of parcel, and h (x, y) represents that the face shape of measured piece distributes.
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