CN101788344B - Instantaneous phase-shift transverse shear interferometer - Google Patents
Instantaneous phase-shift transverse shear interferometer Download PDFInfo
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- CN101788344B CN101788344B CN2010101307540A CN201010130754A CN101788344B CN 101788344 B CN101788344 B CN 101788344B CN 2010101307540 A CN2010101307540 A CN 2010101307540A CN 201010130754 A CN201010130754 A CN 201010130754A CN 101788344 B CN101788344 B CN 101788344B
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Abstract
The invention relates to an instantaneous phase-shift transverse shear interferometer, which aims to solve the problems of troublesome operation, high requirements of systems for environment, large influence of environment on acquisition results in the prior art. The instantaneous phase-shift transverse shear interferometer provided by the invention comprises a parallel polarization beam splitter2, a one-quarter wave plate 3, a two-dimensional rectangular grating 4, a first convex lens 5, a spatial filter 6, a second convex lens 7, a Polaroid array 8 and a CCD 9 which are concentrically arranged in turn on a main optical axis, wherein the CCD 9 is connected with a computer 1; the direction of an optical axis of a crystal of the parallel polarization beam splitter 2 and an incident surface are at an included angle of 45 degrees; the direction of a fast axis of the one-quarter wave plate 3 is positioned on a plane at an angle of 45 degrees to the plane consisting of the direction of the optical axis of the crystal of the parallel polarization beam splitter 2 and the main optical axis; and the spatial filter 6 is arranged on a back focal plane of the first convex lens 5 and a front focal plane of the second convex lens 7. The interferometer has the advantages of reducing the requirements of the systems for environment and increasing measurement accuracy, along with easy operation.
Description
Technical field:
The present invention relates to the optical interferometry Instrument technology field, be specifically related to a kind of phase-shift transverse shear interferometer, particularly a kind of instantaneous phase-shift transverse shear interferometer.
Background technology:
The lateral shearing interference method is by certain optical-mechanical system, and wavefront to be measured is divided into identical two bundles wavefront to be measured, and the two bundles wavefront to be measured of formation spatially produces certain displacement.The lateral shear The Application of Technology, the systematic error of having been introduced when having avoided in optical interference adopting before the standard wave.Lateral shearing interference is the structure of simplified measurement system to a certain extent, reduces the accuracy requirement of optical element in the test macro, also improves the measuring accuracy of system to a certain extent.In the lateral shear instrument, introduce phase-shifting technique and form phase-shift transverse shear interferometer and can further improve performance, can realize the robotization of processing procedure of interferogram and the reconstruct of wavefront distributed in three dimensions etc.
In existing phase-shift transverse shear interferometer, often adopt the optical path difference between the PZT change interference light, realize the phase shift of measuring system.But in the implementation procedure of phase shift, PZT needs some mechanical motions to guarantee, and the realization of phase shift be according to the regular hour in sequence.Because the phase shift process realizes that in time domain measurement result must be subjected to the influence of external environment.Simultaneously, because forming the two-beam of interfering is by beam splitter prism or the beam splitting of spectroscope shape, shear history and phase shift process realize that by optical-mechanical system therefore, the otherness of the optical element that two-beam passes through after the beam splitting will influence the measuring accuracy of system to a certain extent respectively in two-beam.Prior art has provided some following phase-shift transverse shear interferometers that differ from one another, and is described below respectively:
A kind of phase-shift transverse shear interferometer (Devon W.Griffin. " Phase-shifting interferometer " .Optics Letter that adopts simple shear to cut element, Vol.26, No.3,140-141,2001), it as phase-shifting element, realizes different phase-shift phase by changing control voltage with liquid crystal.This kind apparatus structure is simple, but obtaining in time domain of its multi-frame interferometry figure carry out, and the influence of environment is relatively more responsive to external world.
A kind of single wedge is as phase-shift transverse shear interferometer (the Jae Bong Song of shearing elements, etc, " Simple phase-shifting method in a wedge-plate lateral-shearing interferometer " .Applied Optics, Vol.43, No.20,3989-3992,2004), move wedge by translation in surface level and produce phase shift, phase shifting accuracy is higher.But the realization of its phase shift needs mechanical moving element, and is very high to the accuracy requirement of moving component, and obtaining in time domain of multi-frame interferometry figure carry out, and the influence of environment is relatively more responsive to external world.
In patent " phase shifting lateral direction shearing interferometer (200710045147.2) ", in " polarization phase shift double-shear interference wave surface measuring instrument and detection method (200710047254.9) thereof " and " the polarization phase shift double-shear interference wave surface measuring instrument (200720075604.8) " a kind of polarization phase shift double-shear interference wave surface measuring instrument and detection method thereof have been described, it forms Phase Shifting System by the analyzer of fixing wave plate and rotation, realizes shearing by two parallel flats.This instrument is very high for the positioning accuracy request of parallel flat, and realizes phase shift by certain mechanical motion mechanism, and therefore, obtaining in time domain of multi-frame interferometry figure finished, and is relatively more responsive to the variation of system environments.
A kind of shearing wave planar survey system has been described in patent " Mach-Zender shearing wave planar survey system and shearing wave planar survey method (200810039115.6) thereof " and " Mach-Zender shearing wave planar survey system (200820059890.3) ", be mainly used in the measurement heavy caliber, the corrugated under the diffraction limit.In this system, adopt PZT to realize phase shift, need certain motion to support, simultaneously, because the PZT motion needs to move according to certain mode in time, therefore, need carry out in time domain for obtaining of phase shifting interference, the variation of environment will exert an influence to measurement result.Under certain spatial attitude, the reflecting surface face shape error of reflector plate and space orientation error will reduce the measuring accuracy of system by four reflector plates in the realization of shearing in the system.
A kind of phase shift shearing interferometer (Liu Xiaojun work, " development of road phase shift shear interference measuring instrument altogether ", HUST's journal, vol.27, No.316-18,1999), comprise polaroid P, parallel polarization beam splitter, quarter-wave plate, CCD and computing machine, it utilizes the birefringence effect of crystal to realize shearing, adopt the polarization phase-shifting principle to realize phase shift, the concrete course of work is: the light that laser instrument sends forms linearly polarized light through polaroid P, passes through spatial filter SF and lens L again
1Beam-expanding collimation becomes plane light wave, and this plane light wave is through spectroscope BS
1With lens L
2Incide tested optical surface O, the light wave that reflects promptly has the information of measured surface face shape.This light wave turns to 90 ° to enter parallel polarization beam splitter lateral shear and become two bunch polarized lights through spectroscope, forms left circularly polarized light and right-circularly polarized light through quarter wave plate P again, through polaroid P
1Just can form interference, obtain interferogram by CCD.In this system, the realization of phase shift is by rotatory polarization sheet P
1Realize.The problem that prior art exists is: (1) troublesome poeration: need mechanical motion mechanism constantly to change the position of polaroid in test process, to obtain the interferogram under the different phase shifts, need polaroid P of rotational positioning when practical application
1Could gather a width of cloth interferogram, (2) system is bigger to the collection result influence to the higher environment of environment requirement: in interferometry, measuring process environmental change to external world is very sensitive, because several phase shifting interferences that test obtains obtain constantly in difference, and external environment is different to the influence of every width of cloth interferogram, also can't eliminate the effects of the act in follow-up algorithm, so environment is bigger to the collection result influence, system is higher to environment requirement.
Summary of the invention:
The present invention will provide a kind of instantaneous phase-shift transverse shear interferometer, to overcome troublesome poeration that prior art exists and system to the environmental requirement problem of higher.
In order to overcome the problem that prior art exists, technical scheme provided by the invention is as follows: a kind of instantaneous phase-shift transverse shear interferometer, be included in the parallel polarization beam splitter 2 that is provided with one heart successively on the primary optical axis, quarter-wave plate 3 and CCD9, CCD9 and computing machine 1 join, it is characterized in that: also be included in the two-dimensional rectangle grating 4 that is provided with one heart successively between the quarter-wave plate 3 and CCD9 on the primary optical axis, first convex lens 5, spatial filter 6, second convex lens 7, polaroid array 8, wherein the angle between parallel polarization beam splitter 2 optical axis of crystal directions and the incidence surface is 45 °, and the quick shaft direction of quarter-wave plate 3 is positioned on the plane at the angle at 45, plane that constitutes with the optical axis of crystal direction of parallel polarization beam splitter 2 and primary optical axis; Spatial filter 6 is arranged on the front focal plane of the back focal plane of first convex lens 5 and second convex lens 7,4 pin holes according to rectangular distribution are arranged on the spatial filter 6, realization is in the two-dimensional rectangle optical grating diffraction light (1,-1), (1,1), (1,-1), the selectivity of (1,1) order diffraction light is passed through; Described polaroid array 8 is provided with four polaroids, and the angle between the light transmission shaft of four polaroids differs 45 ° successively.
Directional light beam splitter 2 in the such scheme adopts birefringece crystal.
Compared with prior art, advantage of the present invention is:
(1) easy and simple to handle: just can be among the present invention at the interferogram that obtains under the CCD collection situation once under the different phase-shift phases of four width of cloth without any need for mechanical motion, this is because adopt the two-dimensional rectangle grating among the present invention, lens and wave filter are realized the beam splitting once more of light beam, simultaneously can obtain several phase shift lateral shear interferograms, four polaroids are set on the polaroid array, simultaneously respectively to (1,-1), (1,1), (1 ,-1), (1,1) order diffraction light obtains 0 °, 45 °, the phase-shift phase of 90 ° and 135 ° has been avoided obtaining different phase-shift phases by the method for rotatory polarization sheet, and is therefore simple to operate;
(2) system reduces environmental requirement: multi-frame interferometry figure obtains at synchronization in the method for testing that proposes among the present invention, and external environment is identical to the influence of every width of cloth interferogram, can eliminate in follow-up algorithm, therefore greatly reduces environment requirement;
(3) improved measuring accuracy: the present invention is provided with four polaroids on the polaroid array, has avoided employing rotatory polarization sheet to realize affect positioning in the phase shift process, thereby has improved measuring accuracy.
Description of drawings:
Fig. 1 is the system architecture synoptic diagram;
Fig. 2 is the synoptic diagram of wave filter;
Fig. 3 is the synoptic diagram of polaroid array 8.
Embodiment:
Below in conjunction with drawings and Examples the present invention is described in detail.
A kind of instantaneous phase-shift transverse shear interferometer, be included in the parallel polarization beam splitter 2, quarter-wave plate 3, two-dimensional rectangle grating 4, first convex lens 5, spatial filter 6, second convex lens 7, polaroid array 8 and the CCD9 that are provided with one heart successively on the primary optical axis, CCD9 and computing machine 1 join.Wherein the angle between parallel polarization beam splitter 2 (employing birefringece crystal) optical axis of crystal direction and the incidence surface is 45 °, and the quick shaft direction of quarter-wave plate 3 is positioned on the plane at the angle at 45, plane that constitutes with the optical axis of crystal direction of parallel polarization beam splitter 2 and primary optical axis.Said spatial filter 6 is arranged on the front focal plane of the back focal plane of first convex lens 5 and second convex lens 7,4 pin holes according to rectangular distribution are arranged on the spatial filter 6, realization is in the two-dimensional rectangle optical grating diffraction light (1,-1), (1,1), (1,-1), the selectivity of (1,1) order diffraction light is passed through.Said polaroid array 8 is provided with four polaroids, and the angle between the light transmission shaft of four polaroids differs 45 ° successively.
The process of this equipment work is as follows:
The test wavefront of returning by the measuring optical surface, impinge perpendicularly on the parallel polarization beam splitter 2, because parallel polarization beam splitter 2 has birefringent characteristic, and can make ordinary light and extraordinary ray laterally produce certain relative displacement, therefore through behind the parallel polarization beam splitter 2, the test corrugated is divided into two bundles, a branch of corrugated for ordinary light formation, the corrugated that another bundle forms for extraordinary ray, and two-beam is linearly polarized light, direction of vibration is vertical, and there is certain lateral shear on two corrugateds simultaneously, and the big I of lateral shear distance realizes by the dip-parallel polarization beam apparatus.Two-beam is through λ/4 wave plates, and the angle of this λ/quick shaft direction of 4 wave plates and the polarization direction of two-beam all is 45 °, and therefore, two bunch polarized lights of incident become respectively and are left-handed and right-circularly polarized light.This circularly polarized light vertical irradiation is to two-dimensional grating 4, and (wherein m, n are respectively nonnegative integer for ± m, the ± n) diffraction light of level time through having produced behind the two-dimensional grating 4.Diffraction light is through filtering system (comprising first convex lens 5, wave filter 6 and second convex lens 7), only allow (± 1, ± 1) order diffraction light pass through, realize the beam splitting once more on test corrugated, form four parts, every part all comprises ordinary light corrugated and extraordinary ray corrugated.Test corrugated after the beam splitting is by a polaroid array 8.On the polaroid array 8 in four polaroids the angle between the light transmission shaft of per two adjacent polaroids be 45 °, when realizing zones of different by polaroid array 8 of left-handed and right-circularly polarized light different optical path differences is arranged, thereby produces different phase-shift phases.Enter among the CCD9 through polaroid array 8 dephased polarized lights, from CCD9, can obtain to have the ordinary light test corrugated of different optical path differences and four width of cloth interference images that extraordinary ray is tested the corrugated simultaneously.Use a computer by adopting four step phase shift algorithm and Ze Nike fitting techniques, extract the PHASE DISTRIBUTION of test wavefront by interference image.
Therefore invention has following exclusive characteristics:
(1) can obtain synchronously four width of cloth phase shifts and shear interference pattern;
(2) in the process that phase shift shearing interference pattern obtains, the realization of phase shift does not need mechanical motion mechanism; Realize by quarter-wave plate, wave filter and polarizer array, for required phase-shift phase, can realize by the light transmission shaft direction of regulating the polarizer array.
(3) in the process that phase shift shearing interference pattern obtains, the realization of shearing realizes by common path optical system;
(4) in the process that phase shift shearing interference pattern obtains, comprise several phase shifts at same collection image and shear interference pattern.
(5) the big I of lateral shear distance realizes by the parallel polarizing beam splitter mirror that tilts before test.
Claims (2)
1. instantaneous phase-shift transverse shear interferometer, be included in the parallel polarization beam splitter (2) that is provided with one heart successively on the primary optical axis, quarter-wave plate (3) and CCD (9), CCD (9) joins with computing machine (1), it is characterized in that: also be included in the two-dimensional rectangle grating (4) that is provided with one heart successively between quarter-wave plate on the primary optical axis (3) and the CCD (9), first convex lens (5), spatial filter (6), second convex lens (7), polaroid array (8), wherein the angle between parallel polarization beam splitter (2) optical axis of crystal direction and the incidence surface is 45 °, and the quick shaft direction of quarter-wave plate (3) is positioned on the plane at the angle at 45, plane that constitutes with the optical axis of crystal direction of parallel polarization beam splitter (2) and primary optical axis; Spatial filter (6) is arranged on the front focal plane of the back focal plane of first convex lens (5) and second convex lens (7), 4 pin holes according to rectangular distribution are arranged on the spatial filter (6), realization is in the two-dimensional rectangle optical grating diffraction light (1,-1), (1,1), (1,-1), the selectivity of (1,1) order diffraction light is passed through; Described polaroid array (8) is provided with four polaroids, and the angle between the light transmission shaft of four polaroids differs 45 ° successively.
2. a kind of instantaneous phase-shift transverse shear interferometer according to claim 1 is characterized in that: parallel polarization beam splitter (2) adopts birefringece crystal.
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| CN102252765B (en) * | 2011-06-24 | 2012-08-01 | 北京理工大学 | Wavefront aberration detection device and method for beam expansion and collimation system |
| CN109991702B (en) * | 2017-12-29 | 2022-06-07 | 住友电气工业株式会社 | Optical assembly with dual lens system and photodiode for monitoring |
| CN111256848B (en) * | 2019-12-10 | 2023-02-28 | 西南技术物理研究所 | Medium-caliber double-grating type wave aberration measurement laser optical system |
| CN111256582B (en) * | 2020-01-22 | 2021-09-07 | 中国计量大学 | Transient phase-shifting lateral shearing interferometer and measurement method |
| CN111307302B (en) * | 2020-03-18 | 2022-07-08 | 中国科学院上海光学精密机械研究所 | Method for complementing wavefront loss information in transverse shearing interference wavefront reconstruction process |
| CN113984346B (en) * | 2021-10-15 | 2023-09-12 | 西安工业大学 | Device and method for characterizing optical transmission matrix of polarization imaging system |
| CN114136465B (en) * | 2021-11-24 | 2023-10-31 | 西安工业大学 | Instantaneous two-step phase-shift transverse shearing interferometry system and method |
| CN114323312B (en) * | 2021-12-17 | 2024-01-26 | 西安工业大学 | Device and method for realizing synchronous four-wave transverse shearing interferometry |
| CN114323580A (en) * | 2021-12-21 | 2022-04-12 | 西安工业大学 | Multidirectional synchronous phase shift transverse shearing interference device and measurement method |
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| CN100547366C (en) * | 2007-08-22 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | Phase-shifting lateral shearing interferometer |
| CN100570296C (en) * | 2007-10-19 | 2009-12-16 | 中国科学院上海光学精密机械研究所 | Polarization phase-shifting double-shearing interference wave surface measuring instrument and detection method thereof |
| CN100585351C (en) * | 2008-06-18 | 2010-01-27 | 中国科学院上海光学精密机械研究所 | Mach-Zehnder type shear wave surface measuring system and shear wave surface measuring method thereof |
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