CN108961234A - A kind of transmissive elements defect detecting device and method based on multi-wavelength iterative algorithm - Google Patents
A kind of transmissive elements defect detecting device and method based on multi-wavelength iterative algorithm Download PDFInfo
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- CN108961234A CN108961234A CN201810694749.9A CN201810694749A CN108961234A CN 108961234 A CN108961234 A CN 108961234A CN 201810694749 A CN201810694749 A CN 201810694749A CN 108961234 A CN108961234 A CN 108961234A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
Abstract
The invention discloses a kind of transmissive elements defect detecting devices and method based on multi-wavelength iterative algorithm.The present invention passes through in multi-wavelength gradient advanced iterative phase recovery algorithms experimental provision, 150nm or more is reached using adjustable band range and solid state laser of good performance forms seven kinds of different wave length incident lights, several scattered light intensity figures after defect transmission are acquired by detector；Incident optical input surface Wave-front phase face information is carried out using plot of light intensity of the multi-wavelength gradient advanced phase recovery iterative algorithm Phase Retrieve Algorithm to acquisition to restore；It obtains incident optical input surface Wave-front phase face information and then calculates to obtain width, the elevation information of defect.Algorithm resume speed is fast in the present invention, and detection accuracy is high, and fixed station acquisition diffraction pattern avoids mobile optical path, the defects detection suitable for transmissive elements.
Description
Technical field
The invention belongs to technical field of optical detection, especially a kind of transmissive elements based on multi-wavelength iterative algorithm are lacked
Fall into detection device and method.
Background technique
As integrated circuit technique rapidly develops with rapid changepl. never-ending changes and improvementsly, the U.S., Europe, Japan, South Korea and Taiwan
There are increasingly higher demands Deng to integrated circuit board groove minimum widith precision.In the manufacture production of integrated circuit board, i.e.,
The dust pollution of nm magnitude, impurity particle, bulge, pit is set to appear in substrate surface or be imbedded in inside multilayer film or mask table
Face can all cause photoetching sample serious defect occur, generate waste product.The powder injection molding of integrated circuit board has been next-generation
One of the bottleneck of photoetching technique development needs effective efficiently detection method.Therefore, road is commercialized in industries such as photoetching at present
On, have detection and the imaging system of the defect of high speed, high resolution to guarantee that flawless mask is essential, institute
It is also become more and more important with the research for defect detecting technique.
The phase recovery theory of non-interfering method refers to the diffraction theory using light, carries out Diffraction Calculation to input face light field,
Output face optical field distribution is obtained, its intensity data is compared with actual measurement output face distribution of light intensity data, is converted and is imitated with energy
Rate maximum, the minimum criterion of error are calculated by algorithm and find the phase distribution for being best suitable for input light field.Compared to conventional interference
Detection method, non-interfering detection method have the advantage that (1) based entirely on intensity signal measurement；(2) only need to measure single light path without
The superposition of multichannel space optical path need to be detected；(3) the resulting field information of non-interfering method is more smooth than interference fringe, therefore can reduce
Instrumental resolution requires to belong to succinct, stable, feasible, effective method without losing relevant information.Iterative method is to apply at present
Widest non-interfering phase recovery method, essence are constantly to convert between airspace and frequency domain, and utilize data measured (more
For intensity signal) airspace, frequency domain are limited, control algolithm error is constantly decreased to phase information and moves closer to right value.
The present invention proposes a kind of kind of a transmissive elements defect detecting device and method based on multi-wavelength iterative algorithm, uses
The mode of non-contact measurement avoids the damage to spherical mirror surface to be measured under conditions of guaranteeing measurement accuracy.It is installed on
Fixed station acquisition diffraction pattern avoids mobile optical path in measurement process.On the basis of conventional multi-wavelength iterative algorithm, angular spectrum is introduced
Diffraction transmission theory and gradient advanced function propose the phase recovery that can carry out quick high accuracy to complex light field, realize accurate
Detection.
Summary of the invention
The purpose of the present invention is to provide a kind of transmissive elements defect detecting device based on multi-wavelength iterative algorithm and
It is defeated to carry out incident light using plot of light intensity of the multi-wavelength gradient advanced phase recovery iterative algorithm Phase Retrieve Algorithm to acquisition for method
Phase face information is restored before entering surface wave；It obtains incident optical input surface Wave-front phase face information and then calculates to obtain the width of defect
Degree, elevation information.Algorithm resume speed is fast in the present invention, and detection accuracy is high, and fixed station acquisition diffraction pattern avoids mobile light
Road, the defects detection suitable for transmissive elements.
Realize the technical solution of the object of the invention are as follows:
A kind of transmissive elements defect detecting device based on multi-wavelength iterative algorithm, comprising: tunable solid laser,
Laser alignment mirror, diaphragm, transmissive element to be measured, detector；All optical elements are coaxially contour relative to substrate, i.e., relatively
It is coaxially contour in optical platform or instrument base；The fixed wave length light beam that tunable solid laser issues, through laser quasi direct expansion
Shu Jing is extended to the collimation directional light of angle pencil of ray, after diaphragm limits, on the surface that projects transmissive element to be measured, through transmission member
A distance is transmitted after part surface defect diffraction to be irradiated on detector, collects the intensity image of diffraction transmission.
The transmissive elements defect detecting device based on multi-wavelength iterative algorithm, wherein tunable solid laser
Tunable formation different wave length incident light, the distribution of light intensity image that acquisition different wave length is detected in same position.
A kind of multi-wavelength gradient advanced iterative phase recovery algorithms introduce angle on the basis of conventional multi-wavelength iterative algorithm
Diffraction transmission theory and gradient advanced function are composed, the phase recovery of quick high accuracy, implementation step can be carried out to complex light field
It is as follows:
Step (1), known n wavelength are in same position output face optical field amplitude information A1, A2……An；
Step (2) takes λ1Under the conditions of output light field amplitude known quantity A1, and initial phase φ is given at random1, exported
Light field U1；
Step (3), by λ1Under the conditions of output light field U1It is transmitted back to input face using angular spectrum transmission inverse operation, obtains λ1Condition
Lower input light field Uo1；
Step (4) updates phase in input faceo2, obtain λ2Under the conditions of input light field Uo2；
Step (5) is transferred to output face using angular spectrum transmission operation, obtains λ2Under the conditions of output light field U2, and replace its vibration
Width amount is known quantity A2, it is constant to retain phase mass；
Step (6) is successively transmitted to λnUnder the conditions of output light field Un；
Step (7), by λnUnder the conditions of output light field UnIt is transmitted back to input face using angular spectrum transmission inverse operation, obtains λnCondition
Lower input light field Uon；Phase is updated in input faceo(n-1), obtain λn_1Under the conditions of input light field Uo(n-1)；
Step (8) is transferred to output face using angular spectrum transmission operation, obtains λn_1Under the conditions of output light field Un-1, and replace
Its amplitude amount is known quantity An-1, it is constant to retain phase mass；
Step (9) is successively transmitted back to λ1, obtain the output light field U' after one cycle1, obtain its phaseReplacement
Amplitude is known quantity A1；
Step (10) will work as secondary phase iterative valueWith last iteration valueDifference hkAs gradient direction, by αkMake
For iteration added value, λ after being updated1Under the conditions of output light field phaseAlgorithm gradient step is increased, to accelerate to restrain
Speed；
Step (11) repeats step (2)-step (10), until the error of amplitude reaches design accuracy or reaches setting
Maximum number of iterations when terminate iteration, the output light field U that will be finally obtainedk+1 1Being transmitted back to input face iteration terminates；It obtains defeated
Enter its phase value of face, and use and it is calculated by the PhaseUnwrapQMG phase unwrapping function of matlab software programming,
Finally obtain the phase distribution information of input face.
Transmissive elements defect inspection method based on multi-wavelength iterative algorithm is calculated using described based on multi-wavelength iteration
The transmissive elements defect detecting device of method, transmissive elements defect detection procedure are as follows:
Step (A1), tunable solid laser difference generation wavelength are λ1, λ2……λ7Seven kinds of incident lights, by test
Optical path obtains the 7 width diffraction intensity figures by object under test.
7 width diffraction intensity figures are converted to gray level image by RGB image by step (A2), are uniformly normalized to 0
To 1,7 kinds of wavelength are obtained in same position output face optical field amplitude information A1, A2……A7。
Step (A3), by output face optical field amplitude information A1, A2……A7Bring the recovery of multi-wavelength gradient advanced iterative phase into
Algorithm obtains the phase distribution information △ φ of object under testm(x)。
Step (A4), according to formula:
△φm(x)=2 π △ h (x)/λm(nobj-nair)
It can be calculated object under test dimension information △ h (x).N in formulaobjFor sample refractive index, nairFor air refraction.
Compared with prior art, the present invention its remarkable advantage:
(1) it by the way of non-contact measurement under conditions of guaranteeing measurement accuracy, avoids to spherical mirror table to be measured
The damage in face.
(2) most optical superposition are not necessarily to using non-interfering detection method, low to optical system for testing coherence requirement, it is convenient to detect.
(3) it is installed on fixed station acquisition diffraction pattern, avoids mobile optical path in measurement process.
(4) on the basis of conventional multi-wavelength iterative algorithm, angular spectrum diffraction transmission theory and gradient advanced function are introduced, is proposed
Multi-wavelength gradient advanced iterative phase recovery algorithms, compare with conventional multi-wavelength Iterative restoration algorithm, mention in convergence rate
High 2 times or more, the opposite root-mean-square value of recovery accuracy reach 10-3The order of magnitude.
Detailed description of the invention
Fig. 1 is the transmissive elements defect detecting device figure based on multi-wavelength iterative algorithm；
Fig. 2 is multi-wavelength gradient advanced phase recovery iterative algorithm algorithm flow chart；
Fig. 3 is letter e load diffraction intensity figure in the embodiment of the present invention；
Fig. 4 is letter e load phase face restoration result in the embodiment of the present invention；
Fig. 5 is revised letter e load phase recovery result in the embodiment of the present invention.
In figure: 1 is tunable solid laser, and 2 be laser alignment mirror, and 3 be diaphragm, and 4 be transmissive element to be measured, 5
For detector.
Specific embodiment
With reference to the accompanying drawing and specific embodiment present invention is further described in detail.
As shown in Figure 1, a kind of transmissive elements defect detecting device based on multi-wavelength iterative algorithm, comprising: tunable
Solid state laser 1, laser alignment mirror 2, diaphragm 3, transmissive element to be measured 4, detector 5；All optical elements are relative to base
Bottom is coaxially contour, i.e., coaxially contour relative to optical platform or instrument base；The fixed wave length that tunable solid laser 1 issues
Light beam is extended to the collimation directional light of angle pencil of ray through laser alignment mirror 2, after the limitation of diaphragm 3, projects transmission member to be measured
On the surface of part 4, a distance is transmitted after transmissive element surface defect diffraction and is irradiated on detector 5, collect diffraction biography
Defeated intensity image.
The transmissive elements defect detecting device based on multi-wavelength iterative algorithm, wherein tunable solid laser
1 tunable formation different wave length incident light, the distribution of light intensity image that acquisition different wave length is detected in same position.
A kind of multi-wavelength gradient advanced iterative phase recovery algorithms introduce angle on the basis of conventional multi-wavelength iterative algorithm
Diffraction transmission theory and gradient advanced function are composed, the phase recovery of quick high accuracy, algorithm flow can be carried out to complex light field
Figure is as shown in Figure 2, the specific steps are as follows:
Step (1), known n wavelength are in same position output face optical field amplitude information A1, A2……An；
Step (2) takes λ1Under the conditions of output light field amplitude known quantity A1, and initial phase φ is given at random1, exported
Light field U1；
Step (3), by λ1Under the conditions of output light field U1It is transmitted back to input face using angular spectrum transmission inverse operation, obtains λ1Condition
Lower input light field Uo1；
Step (4) updates phase in input faceo2, obtain λ2Under the conditions of input light field Uo2；
Step (5) is transferred to output face using angular spectrum transmission operation, obtains λ2Under the conditions of output light field U2, and replace its vibration
Width amount is known quantity A2, it is constant to retain phase mass；
Step (6) is successively transmitted to λnUnder the conditions of output light field Un；
Step (7), by λnUnder the conditions of output light field UnIt is transmitted back to input face using angular spectrum transmission inverse operation, obtains λnCondition
Lower input light field Uon；Phase is updated in input faceo(n-1), obtain λn-1Under the conditions of input light field Uo(n-1)；
Step (8) is transferred to output face using angular spectrum transmission operation, obtains λn-1Under the conditions of output light field Un-1, and replace
Its amplitude amount is known quantity An-1, it is constant to retain phase mass；
Step (9) is successively transmitted back to λ1, obtain the output light field U' after one cycle1, obtain its phaseReplacement
Amplitude is known quantity A1；
Step (10) will work as secondary phase iterative valueWith last iteration valueDifference hkAs gradient direction, by αkMake
For iteration added value, λ after being updated1Under the conditions of output light field phaseAlgorithm gradient step is increased, to accelerate to restrain
Speed；
Step (11) repeats step (2)-step (10), until the error of amplitude reaches design accuracy or reaches setting
Maximum number of iterations when terminate iteration, the output light field U that will be finally obtainedk+1 1Being transmitted back to input face iteration terminates；It obtains defeated
Enter its phase value of face, and use and it is calculated by the PhaseUnwrapQMG phase unwrapping function of matlab software programming,
Finally obtain the phase distribution information of input face.
Transmissive elements defect inspection method based on multi-wavelength iterative algorithm, transmissive elements defect detection procedure are as follows:
It is λ that step (A1) tunable solid laser, which distinguishes generation wavelength,1, λ2……λ7Seven kinds of incident lights, by test light
Rood to pass through object under test 7 width diffraction intensity figures.
7 width diffraction intensity figures are converted to gray level image by RGB image by step (A2), are uniformly normalized to 0
To 1,7 kinds of wavelength are obtained in same position output face optical field amplitude information A1, A2……A7。
Step (A3) is by output face optical field amplitude information A1, A2……A7Bring the recovery of multi-wavelength gradient advanced iterative phase into
Algorithm obtains the phase distribution information △ φ of object under testm(x)。
Step (A4) is according to formula:
△φm(x)=2 π △ h (x)/λm(nobj-nair)
It can be calculated object under test dimension information △ h (x).N in formulaobjFor sample refractive index, nairFor air refraction.
Embodiment
To a transmissive element in the present embodiment --- alphabetical e load, which is coated with certain thickness on a glass, impermeable
The alphabetical region e penetrated.The fixed wave length light beam that tunable solid laser issues, is extended to angle pencil of ray through laser alignment mirror
Collimation directional light, after diaphragm limits, on the surface that projects letter e load to be measured, through transmissive element surface defect diffraction
Transmission 15mm is irradiated on detector afterwards.
The measurement method of the transmissive elements defect detecting device based on multi-wavelength iterative algorithm, transmissive elements
Defect detection procedure are as follows:
(1) tunable solid laser difference generation wavelength be 470nm, 500nm, 530nm, 550nm, 580nm, 600nm,
Seven kinds of incident lights of 630nm obtain the 7 width diffraction intensity figures by object under test by optical system for testing, such as scheme shown in (3).
(2) 7 width diffraction intensity figures are converted into gray level image by RGB image, are uniformly normalized to 0 to 1, obtain
To 7 kinds of wavelength in same position output face optical field amplitude information A1, A2……A7。
(3) by output face optical field amplitude information A1, A2……A7Bring multi-wavelength gradient advanced iterative phase recovery algorithms into,
Obtain the phase distribution information △ φ of object under testm(x).When for 470nm wavelength, using multi-wavelength gradient advanced phase recovery
Iterative algorithm Phase Retrieve Algorithm is to input face phase shape recovery result as shown in figure (4).It subtracts obtained by the phase information of corrugated
Revised resolving power test target phase information is as shown in figure (5).
(4) sample refractive index nobj=1.516, according to formula:
△φm(x)=2 π △ h (x)/λm(nobj-nair)
The thickness information that can be calculated alphabetical e is 0.325 μm.
Claims (4)
1. a kind of transmissive elements defect detecting device based on multi-wavelength iterative algorithm characterized by comprising tunable solid
Body laser (1), laser alignment mirror (2), diaphragm (3), transmissive element to be measured (4), detector (5)；Tunable solid swashs
Light device (1), laser alignment mirror (2), diaphragm (3), transmissive element to be measured (4), detector (5) are coaxial etc. relative to substrate
Height, i.e., it is coaxially contour relative to optical platform or instrument base；The fixed wave length light beam that tunable solid laser (1) issues,
It is extended to the collimation directional light of angle pencil of ray through laser alignment mirror (2), after diaphragm (3) limitation, projects transmission member to be measured
On the surface of part (4), a distance is transmitted after transmissive element surface defect diffraction and is irradiated on detector (5), collects and spreads out
Penetrate the intensity image of transmission.
2. the transmissive elements defect detecting device according to claim 1 based on multi-wavelength iterative algorithm, feature exist
In wherein the tunable formation different wave length incident light of tunable solid laser (1), acquisition different wave length are visited in same position
The distribution of light intensity image of survey.
3. a kind of multi-wavelength gradient advanced iterative phase recovery algorithms, which is characterized in that on conventional multi-wavelength iterative algorithm basis
On, angular spectrum diffraction transmission theory and gradient advanced function are introduced, the phase recovery of quick high accuracy can be carried out to complex light field,
Realize that steps are as follows:
Step (1), known n wavelength are in same position output face optical field amplitude information A1, A2……An；
Step (2) takes λ1Under the conditions of output light field amplitude known quantity A1, and initial phase φ is given at random1, obtain output light field
U1；
Step (3), by λ1Under the conditions of output light field U1It is transmitted back to input face using angular spectrum transmission inverse operation, obtains λ1Under the conditions of it is defeated
Enter light field Uo1；
Step (4) updates phase in input faceo2, obtain λ2Under the conditions of input light field Uo2；
Step (5) is transferred to output face using angular spectrum transmission operation, obtains λ2Under the conditions of output light field U2, and replace its amplitude amount
For known quantity A2, it is constant to retain phase mass；
Step (6) is successively transmitted to λnUnder the conditions of output light field Un；
Step (7), by λnUnder the conditions of output light field UnIt is transmitted back to input face using angular spectrum transmission inverse operation, obtains λnUnder the conditions of it is defeated
Enter light field Uon；Phase is updated in input faceo(n-1), obtain λn_1Under the conditions of input light field Uo(n-1)；
Step (8) is transferred to output face using angular spectrum transmission operation, obtains λn_1Under the conditions of output light field Un_1, and replace its vibration
Width amount is known quantity An_1, it is constant to retain phase mass；
Step (9) is successively transmitted back to λ1, obtain the output light field U' after one cycle1, obtain its phaseReplace amplitude
For known quantity A1；
Step (10) will work as secondary phase iterative valueWith last iteration valueDifference hkAs gradient direction, by αkAs repeatedly
For added value, λ after being updated1Under the conditions of output light field phaseAlgorithm gradient step is increased, to accelerate convergence rate；
Step (11) repeats step (2)-step (10), until the error of amplitude reaches design accuracy or reaches setting most
Terminate iteration when big the number of iterations, the output light field U that will be finally obtainedk+1 1Being transmitted back to input face iteration terminates；Obtain input face
Its phase value, and using being calculated by the PhaseUnwrapQMG phase unwrapping function of matlab software programming it, finally
Obtain the phase distribution information of input face.
4. the transmissive elements defect inspection method based on multi-wavelength iterative algorithm, using described in claim 1 or 3 based on more
The transmissive elements defect detecting device of wavelength iterative algorithm, it is characterised in that: transmissive elements defect detection procedure are as follows:
Step (A1), tunable solid laser difference generation wavelength are λ1, λ2……λ7Seven kinds of incident lights, by optical system for testing
Obtain the 7 width diffraction intensity figures by object under test；
7 width diffraction intensity figures are converted to gray level image by RGB image by step (A2), are uniformly normalized to 0 to 1,
7 kinds of wavelength are obtained in same position output face optical field amplitude information A1, A2……A7；
Step (A3), by output face optical field amplitude information A1, A2……A7Multi-wavelength gradient advanced iterative phase is brought into restore to calculate
Method obtains the phase distribution information △ φ of object under testm(x)；
Step (A4), according to formula:
△φm(x)=2 π △ h (x)/λm(nobj-nair)
It can be calculated object under test dimension information △ h (x), n in formulaobjFor sample refractive index, nairFor air refraction.
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