CN116447988B - Triangular laser measurement method adopting wide-spectrum light source - Google Patents
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Abstract
The invention discloses a triangular laser measurement method adopting a wide spectrum light source, which comprises the following steps: firstly, arranging a triangular laser measurement model; then placing the calibration object instead of the measured object into a triangular laser measurement model, measuring object plane coordinates (x, z) of the calibration object by means of a measuring instrument, establishing a complete relation between the object plane coordinates and image plane coordinates by moving the calibration object in a dispersion area, and obtaining object plane coordinates and corresponding image plane coordinates of a plurality of groups of calibration objects by moving the calibration object for a plurality of times to obtain a binary one-time function relation with definite coefficients; and finally, placing the object to be measured into a triangular laser measurement model, acquiring the image plane coordinates (u, v) of the object to be measured by an imaging detector, and calculating the z coordinate of the object to be measured, namely the height of the object to be measured by a binary linear function relation. The invention combines the advantages of spectral confocal and triangular laser, overcomes the defects of the spectral confocal and the triangular laser, and can expand the application scene and the range of a measuring system.
Description
Technical Field
The invention belongs to the technical field of light measurement, and particularly relates to a triangular laser measurement method adopting a wide-spectrum light source.
Background
The triangular laser measurement method is a common 3D optical measurement mode and has the advantages of low cost, high efficiency and the like. However, triangular laser measurement has high requirements for a light source, and uses collimated laser (narrow spectrum, spectrum width is less than 10 nm) as the light source, and the divergence angle of the light beam is very small, which causes a problem of poor imaging of a specular reflection object. Because of the small beam divergence angle, the reflected light energy is very sensitive to angular changes, which is detrimental to imaging quality and energy detection.
The spectral confocal imaging measurement method is a novel 3D optical measurement mode and has the advantages of good imaging quality and high measurement precision. Moreover, because the spectral confocal uses a focused light beam instead of a collimated light beam, the angle compatibility and the imaging quality are better. The receiving lens and the transmitting lens of the spectral confocal sensor are the same, the dispersion of the transmitting lens can be compensated, and then the spectrum of the reflected light is analyzed by a spectrometer, so that the height of the reflecting object is calculated. However, the spectral confocal model adopts a scheme of dispersive confocal and spectral measurement, the optical path is quite complex, and the arrangement of the spectrometer also leads to larger volume and higher cost. The product with common spectrum confocal has selling price more than three times of that of triangular laser.
Broad spectrum, generally a spectrum with a spectrum width greater than 10nm, is distinguished from a narrow spectrum with a spectrum width less than 10nm, and the acquisition condition of the broad spectrum is relatively easier, so that the inventor proposes a triangular laser measurement method based on the broad spectrum according to the defects.
Disclosure of Invention
The invention aims to provide a triangular laser measuring method adopting a wide-spectrum light source, which has the characteristics of large tolerance angle, high compatibility and high measuring precision, and greatly reduces volume and cost.
To achieve the above object, the solution of the present invention is: a method of triangulation using a broad spectrum light source, comprising the steps of:
s1: arranging a triangular laser measurement model: a triangular laser measurement model is arranged in the dispersion region, the model comprising:
a broad spectrum light source emitting a divergent light beam;
a dispersion lens for focusing the color lights of different colors of the divergent light beams to different heights of the object plane to be measured to form focused light beams;
the object plane to be measured reflects the focused light beam to the high-resolution imaging lens at an angle;
a high resolution imaging lens that focuses the reflected beam onto an imaging detector and a data processing system for imaging;
the dispersion lens carries out dispersion treatment on light emitted by the wide-spectrum light source, and the high-resolution imaging lens is a common imaging lens without dispersion;
s2: the calibration material is used: firstly placing a calibration object instead of a measured object into a triangular laser measurement model, then measuring object plane coordinates (x, z) of the calibration object by a measuring instrument, wherein the x coordinates represent coordinates in the direction of a focused light beam, the z coordinates represent vertical coordinates, and then obtaining image plane coordinates (u, v) of an imaging detector, wherein u is a element corresponding to the x coordinates, and v is a element corresponding to z;
the mapping relation between the object plane coordinates and the image plane coordinates can be established by moving the calibration object in the dispersion area, and a binary linear function relation is generated for calculation:
x=au+bv+δ 1 （1）
z=cu+dv+δ 2 （2）
wherein a, b, c, d, delta 1 、δ 2 Are all the coefficients of the two-dimensional model,
the object plane coordinates and the corresponding image plane coordinates of a plurality of groups of calibration objects are obtained by moving the calibration objects for a plurality of times, so that the object plane coordinates and the image plane coordinates of the plurality of groups of calibration objects are substituted into formulas (1) and (2) to obtain a, b, c, d and delta 1 、δ 2 Finally obtaining a binary linear function relation with the determined coefficients;
s3: measuring the object plane to be measured: the measured object is placed in a triangular laser measurement model, the imaging detector acquires the image plane coordinates (u, v) of the measured object plane, and the z coordinate of the measured object plane, namely the height of the measured object plane, is calculated through a binary linear function relation.
Preferably, the wide spectrum light source is a point spectrum, and the imaging detector is a linear array detector.
Preferably, the wide spectrum light source is a multi-point spectrum, and the imaging detector is a multi-linear array detector.
Preferably, the wide spectrum light source is a linear light source, and the imaging detector is an area array detector.
Preferably, the object plane is located between the dispersive lens and the high-resolution imaging lens.
Preferably, the imaging detector and the data processing system are located at the focal plane of the high-resolution imaging lens.
After the scheme is adopted, the gain effect of the invention is as follows:
since the light from the broad spectrum source is a dispersed converging light beam, the light of different wavelengths is converged at different heights, so that each height has a converging wavelength of light, the main wavelength reflected by the object is this converging wavelength. Since the light beams of different wavelengths all have convergence, the beam width of the light beam does not vary much at different heights. Therefore, the problem that the converging light beam is widened in the defocusing state is solved, and the measuring method can keep good measuring precision in a large height range.
In the prior art, the receiving lens and the transmitting lens of the spectral confocal sensor are the same, so that the dispersion of the transmitting lens can be compensated, and then the spectrum of the reflected light is analyzed by a spectrometer, so that the height of a reflecting object is calculated. The receiving end of the invention adopts the receiving lens of the triangular laser instead of the spectrum measurement mode, and the receiving end adopts the common lens, so that the dispersion does not need to be compensated, the imaging is directly carried out, and the rear end does not need a spectrometer, thereby realizing the simplification of the light path. The structure of the system is relatively simple, and the volume and the cost can be greatly reduced. The dispersion lens can focus light with different wavelengths of the wide-spectrum light source to different heights of an object plane. For the focused light beam, the reflected light has a certain divergence angle, the tolerance of the model to the inclination degree of the object surface is improved, and the measurement accuracy is also improved. Thus, the model of the invention is capable of measuring specular reflecting objects such as metal, glass, and also objects with radians or steps on the surface, such as 3D glass, grooves, welds, etc.
Compared with the prior art, the invention has the advantages that:
the wide-spectrum light beam has a certain divergence angle, so that even if specular reflection occurs on the surface of a measured object, the reflected light beam also has a certain divergence angle, the angle sensitivity of the measuring method is reduced, and the detection capability of the measuring method on the specular reflection object is improved. For diffuse reflection targets, this broad spectrum illumination still has the advantage of improving the detection capabilities of the measurement method for curved and inclined surfaces. Compared with a line laser system, the system tolerates a larger angle and has higher measurement precision. The system can be significantly reduced in volume and cost compared to a spectral confocal system. The structure combines the advantages of spectral confocal and triangular laser, overcomes the defects of the spectral confocal and the triangular laser, and can expand the application scene and the range of a measuring system.
Drawings
FIG. 1 is a schematic diagram of a prior spectral confocal model;
FIG. 2 is a schematic diagram of a triangular laser measurement model employing a broad spectrum light source in accordance with the present invention;
FIG. 3 is a schematic diagram of a triangular laser measurement model employing a broad spectrum light source of the present invention (imaging variation);
fig. 4 is a schematic diagram of a triangular laser measurement model employing a broad spectrum light source in accordance with the present invention.
Description of the reference numerals: a spectrum light source 1, a dispersion lens 2, a measured object plane 3, a high resolution imaging lens 4 and an imaging detector 5.
Detailed Description
Hereinafter, embodiments of the present invention will be described more fully. The invention is capable of various embodiments and of modifications and variations therein. However, it should be understood that: there is no intention to limit the scope of the invention to the specific embodiments disclosed herein, but rather the invention is to be understood to cover all modifications, equivalents, and/or alternatives falling within the spirit and scope of the various embodiments of the invention.
The invention provides a triangular laser measurement method adopting a wide-spectrum light source, as shown in fig. 4, and relates to a triangular laser measurement model, which comprises a wide-spectrum light source 1, a dispersion lens 2, a measured object plane 3, a high-resolution imaging lens 4, an imaging detector 5 and a data processing system.
The wide spectrum light source 1 emits a divergent light beam, the wide spectrum light source 1 is located before the dispersion lens 2, the dispersion lens 2 carries out dispersion treatment on light of the wide spectrum light source 1, the dispersion lens 2 focuses color light of different colors of the divergent light beam to the object plane 3 to be measured to different heights so as to form a focused light beam, the object plane 3 is located between the dispersion lens and the high resolution imaging lens, the focused light beam is reflected to the high resolution imaging lens 4 by the object plane 3, the reflected light beam is focused to the imaging detector 5 for imaging, the imaging detector and the data processing system are located on the focal plane of the high resolution imaging lens, as shown in fig. 2 and 3, when defects such as pits exist on the object plane to be measured, the reflected light beam changes, the imaging on the imaging detector 5 also changes, the optical signal is converted into an electric signal to the data processing system, and the data processing system generates the height of the object plane required for 3D measurement.
The data processing system can realize measurement by the following measurement method, and specifically comprises the following steps:
s1: and (3) arranging a model: arranging the triangular laser measurement model in a dispersion area;
s2: the calibration material is used: firstly placing a calibration object instead of a measured object into a triangular laser measurement model, then measuring object plane coordinates (x, z) of the calibration object by means of a high-precision measuring instrument (which can be an infrared laser range finder, an interferometer and the like), wherein the x coordinates represent coordinates in the direction of a focused light beam, the z coordinates represent vertical coordinates, and then obtaining image plane coordinates (u, v) of an imaging detector, wherein u is a element corresponding to the x coordinates, and v is a element corresponding to z;
the mapping relation between the object plane coordinates and the image plane coordinates can be established by moving the calibration object in the dispersion area, and a uv-xz comparison table or a binary linear function relation is generated for calculation:
x=au+bv+δ 1 （1）
z=cu+dv+δ 2 （2）
wherein a, b, c, d, delta 1 、δ 2 Are all the coefficients of the two-dimensional model,
the object plane coordinates and the corresponding image plane coordinates of a plurality of groups of calibration objects are obtained by moving the calibration objects for a plurality of times, so that the object plane coordinates and the image plane coordinates of the plurality of groups of calibration objects are substituted into formulas (1) and (2) to obtain a, b, c, d and delta 1 、δ 2 The more the number of groups, the more accurate the fit, and the resulting binary linear function relation for coefficient determination；
S3: measuring the object plane to be measured: placing the measured object into a triangular laser measurement model, and calculating the z coordinate of the measured object plane, namely the height of the measured object plane by inquiring a uv-xz comparison table or by a binary primary function relation; in the uv-xz comparison table, the object plane coordinates (x, z) of the corresponding points can be found by the u and v values, and the depth or height can be measured by knowing the height of each point, whether the point is convex or concave.
The calibration object may be any shape object, such as a calibration block, a calibration plate, etc.
The broad spectrum light source can be a single-point spectrum, so that a single-point measurement model is obtained; can be a multi-point spectrum, thereby obtaining a multi-point measurement model; or a line light source, thereby obtaining a line measurement model; correspondingly, the imaging detector can be a linear array detector or a multi-linear array detector or an area array detector. Depending on the measurement requirements, scanning may result in a cross-sectional line, multi-sectional line or surface profile of the object, as well as a multi-layer structure.
The dispersion lens can focus light with different wavelengths of the wide-spectrum light source to different heights of an object plane. For the focused light beam, the reflected light has a certain divergence angle, the tolerance of the model to the inclination degree of the object surface is improved, and the measurement accuracy is also improved. Thus, the model of the invention is capable of measuring specular reflecting objects such as metal, glass, and also objects with radians or steps on the surface, such as 3D glass, grooves, welds, etc.
The high-resolution imaging lens is a common imaging lens for correcting chromatic aberration, and the high-resolution imaging lens is used for measuring the height of a focused light beam instead of the color. Since the colors do not need to be distinguished, a subsequent spectrum measurement model is omitted, so that larger cost and space are saved. Because of this, the model has higher precision than a common triangular laser measurement model and better cost performance than a spectrum confocal model.
The imaging detector and the data processing system comprise two parts, namely the imaging detector and the data processing system. Depending on the source, the imaging detector may be a single line, multiple lines or an area array, thus constituting a single point, multiple point or line measurement model. The data processing system converts the signals detected by the imaging detector into data information and stores the data information, and has high-speed signal processing and transmission functions.
Because the light emitted by the broad spectrum light source is the convergent light beam after being dispersed by the dispersion lens, the light with different wavelengths is converged at different heights, so that each height has a convergent wavelength, and the main wavelength reflected by an object is the convergent wavelength. Since the light beams of different wavelengths all have convergence, the beam width of the light beam does not vary much at different heights. Therefore, the problem that the converging light beam is widened in the defocusing state is solved, and the system can keep good measurement accuracy in a large height range. The receiving end adopts a receiving lens of triangular laser instead of a spectrum measurement mode. The structure of the system is relatively simple, and the volume and the cost can be greatly reduced. The structure combines the advantages of spectral confocal and triangular laser, overcomes the defects of the spectral confocal and the triangular laser, and can expand the application scene and the range of a measuring system.
The foregoing has described in detail a triangulation system using a broad spectrum light source provided by the embodiments of the present patent, and specific examples have been applied herein to illustrate the principles and implementations of the present patent, the above examples being provided only to assist in understanding the methods of the present patent and the core ideas thereof; meanwhile, as those skilled in the art will have modifications in the specific embodiments and application scope in accordance with the ideas of the present patent, the present description should not be construed as limiting the present patent in view of the above.
Claims (6)
1. A triangular laser measurement method adopting a wide spectrum light source is characterized in that: the method comprises the following steps:
s1: arranging a triangular laser measurement model: a triangular laser measurement model is arranged in the dispersion region, the model comprising:
a broad spectrum light source emitting a divergent light beam;
a dispersion lens for focusing the color lights of different colors of the divergent light beams to different heights of the object plane to be measured to form focused light beams;
the object plane to be measured reflects the focused light beam to the high-resolution imaging lens at an angle;
a high resolution imaging lens that focuses the reflected beam onto an imaging detector and a data processing system for imaging;
the dispersion lens carries out dispersion treatment on light emitted by the wide-spectrum light source, and the high-resolution imaging lens is a common imaging lens without dispersion;
s2: the calibration material is used: firstly placing a calibration object instead of a measured object into a triangular laser measurement model, then measuring object plane coordinates (x, z) of the calibration object by a measuring instrument, wherein the x coordinates represent coordinates in the direction of a focused light beam, the z coordinates represent vertical coordinates, and then obtaining image plane coordinates (u, v) of an imaging detector, wherein u is a element corresponding to the x coordinates, and v is a element corresponding to z;
the mapping relation between the object plane coordinates and the image plane coordinates can be established by moving the calibration object in the dispersion area, and a uv-xz comparison table or a binary primary function relation is generated for calculation:
x=au+bv+δ 1 （1）
z=cu+dv+δ 2 （2）
wherein a, b, c, d, delta 1 、δ 2 Are all the coefficients of the two-dimensional model,
the object plane coordinates and the corresponding image plane coordinates of a plurality of groups of calibration objects are obtained by moving the calibration objects for a plurality of times, so that the object plane coordinates and the image plane coordinates of the plurality of groups of calibration objects are substituted into formulas (1) and (2) to obtain a, b, c, d and delta 1 、δ 2 Finally obtaining a binary linear function relation with the determined coefficients;
s3: measuring the object plane to be measured: placing the object to be measured into a triangular laser measurement model, acquiring image plane coordinates (u, v) of the object to be measured by an imaging detector, and calculating the z coordinate of the object to be measured, namely the height of the object to be measured by inquiring a uv-xz comparison table or by a binary linear function relation; in the uv-xz comparison table, the object plane coordinates (x, z) of the corresponding points can be found by the u and v values, and the depth or height can be measured by knowing the height of each point, whether the point is convex or concave.
2. A method of triangulation using broad spectrum light sources as claimed in claim 1 wherein: the wide spectrum light source is a point spectrum, and the imaging detector is a linear array detector.
3. A method of triangulation using broad spectrum light sources as claimed in claim 1 wherein: the wide spectrum light source is a multi-point spectrum, and the imaging detector is a multi-linear array detector.
4. A method of triangulation using broad spectrum light sources as claimed in claim 1 wherein: the wide spectrum light source is a linear light source, and the imaging detector is an area array detector.
5. A method of triangulation using broad spectrum light sources as claimed in claim 1 wherein: the object plane is positioned between the dispersion lens and the high-resolution imaging lens.
6. A method of triangulation using broad spectrum light sources as claimed in claim 1 wherein: the imaging detector and the data processing system are positioned on the focal plane of the high-resolution imaging lens.
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