CN107179052B - Online calibration device and method for spectrum confocal measurement system - Google Patents

Online calibration device and method for spectrum confocal measurement system Download PDF

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CN107179052B
CN107179052B CN201710242017.1A CN201710242017A CN107179052B CN 107179052 B CN107179052 B CN 107179052B CN 201710242017 A CN201710242017 A CN 201710242017A CN 107179052 B CN107179052 B CN 107179052B
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filter
monochromatic
spectrum
lambda
monochromatic filter
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CN107179052A (en
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齐月静
卢增雄
杨光华
齐威
苏佳妮
张清洋
李兵
王宇
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Academy of Opto Electronics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
    • G01B21/02Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups for measuring length, width, or thickness

Abstract

The invention discloses an on-line calibration device and method for a spectral confocal measurement systemThe method comprises rotating the filter wheel of the filter, allowing the wide-spectrum white light beam emitted by the white light wide-spectrum light source to pass through each monochromatic filter, and calculating to obtain the relationship d between the displacement d and the wavelength lambda of the object to be measuredλAnd (5) finishing the online calibration of the spectral confocal measuring system. The device and the method realize the rapid on-line calibration of the spectral confocal measurement system in different use environments.

Description

Online calibration device and method for spectrum confocal measurement system
Technical Field
The invention relates to the technical field of optical measurement, in particular to on-line calibration of a spectral confocal measurement system.
Background
The spectrum confocal method is a non-contact micro-displacement measurement method based on wavelength displacement modulation, has the advantages of high measurement precision, high speed, insensitivity to factors such as texture, inclination and the like of the measured surface, no special requirements on materials and the like, and has important application in aspects of micro-displacement measurement, object surface three-dimensional morphology measurement and the like.
The spectral confocal measurement system is usually precisely calibrated when being shipped from a factory, however, in different use environments, due to the change of environmental parameters such as temperature and humidity, the structure of the dispersive objective lens in the spectral confocal measurement system is changed, so that the dispersive relation of the dispersive objective lens is changed, and therefore, the online calibration of the spectral confocal measurement system in a working environment is an important guarantee for realizing the high-precision measurement of the spectral confocal measurement system.
The invention provides an online calibration device and method for a spectral confocal measurement system, which are characterized in that a plurality of monochromatic lights are obtained through a rotary optical filter, the displacement of a measured object under different monochromatic lights is obtained through a displacement sensor, linear fitting of the relationship between the wavelength and the displacement is carried out through a least square method, and the linear relationship between the wavelength and the displacement of the spectral confocal measurement system under the current environment is obtained, so that the rapid online calibration of the spectral confocal measurement system under different use environments is realized.
Disclosure of Invention
The purpose of the invention is realized by the following technical scheme.
An online calibration device of a spectrum confocal measurement system is characterized by comprising a white light wide spectrum light source (10), a rotatable optical filter (20), a double-branch optical fiber (30), an optical fiber emergent light beam (301), a dispersion objective (40), a dispersion objective emergent light beam (401), an object to be measured (50), a displacement sensor (60), a spectrometer (70) and a computer (80); the wide-spectrum white light beam emitted by the white light wide-spectrum light source (10) enters a first branch end of a double-branch optical fiber (30) to be coupled into the double-branch optical fiber (30) after passing through an optical filter (20), an optical fiber emergent beam (301) is obtained after being transmitted by a total end of the double-branch optical fiber (30), an optical fiber emergent beam (301) obtains a dispersion objective emergent beam (401) after passing through a dispersion objective (40), the total end of the double-branch optical fiber (30) and a second branch end of the double-branch optical fiber (30) after being reflected by an object to be measured (50), and the dispersion objective emergent beam (401) enters a spectrometer (70) after passing through the dispersion objective (40), the total end.
Preferably, the optical filter (20) comprises a first monochromatic filter (201), a second monochromatic filter (202), a third monochromatic filter (203), a fourth monochromatic filter (204), a fifth monochromatic filter (205), a sixth monochromatic filter (206), a seventh monochromatic filter (207) and a band-pass filter (208), and the first monochromatic filter (201), the second monochromatic filter (202), the third monochromatic filter (203), the fourth monochromatic filter (204), the fifth monochromatic filter (205), the sixth monochromatic filter (206), the seventh monochromatic filter (207) and the band-pass filter (208) are fixed through a filter wheel (209) and can rotate for 360 degrees around a central axis (200) of the filter wheel (209).
Preferably, when the white light is emitted from the wide-spectrum light source (10)The spectrum white light beam passes through a band-pass filter (208) of the filter (20) to obtain a wavelength range of lambdaminTo lambdamaxThe spectral range is the operating wavelength range of the dispersive objective lens (40).
Preferably, when a broad-spectrum white light beam emitted by the white light broad-spectrum light source (10) passes through a first monochromatic filter (201), a second monochromatic filter (202), a third monochromatic filter (203), a fourth monochromatic filter (204), a fifth monochromatic filter (205), a sixth monochromatic filter (206) and a seventh monochromatic filter (207) of the filter (20), wavelengths respectively λ are obtained1、λ2、λ3、λ4、λ5、λ6And λ7Each wavelength of the monochromatic light satisfies the following relationship
λmin<λ1<λ2<λ3<λ4<λ5<λ6<λ7<λmax(1)
Preferably, when the wavelengths are respectively λ1、λ2、λ3、λ4、λ5、λ6And λ7After passing through the dispersive objective lens (40), the monochromatic light is focused at different positions of the image space of the dispersive objective lens (40), and the wavelength lambda is measured by a displacement sensor (60)1、λ2、λ3、λ4、λ5、λ6And λ7The displacement of the measured object (50) is d1、d2、d3、d4、d5、d6And d7The relationship between them is
The values of a and b are obtained by a least square method, and the relationship between the displacement d and the wavelength lambda of the measured object (50) is established
d=a+bλ (3)
An online calibration method of a spectral confocal measurement system is realized by adopting the online calibration device of the spectral confocal measurement system, and is characterized by comprising the following steps:
s1, rotating the filter wheel (209) of the filter (20) to make the wide spectrum white light beam emitted by the white light wide spectrum light source (10) pass through the first monochromatic filter (201) to obtain the wavelength lambda1The monochromatic light of (1);
s2, obtaining the wavelength lambda through the displacement sensor (60)1Displacement d of the lower object (50)1
S3, repeating the steps S1-S2, and respectively obtaining monochromatic light lambda through the second monochromatic filter (202), the third monochromatic filter (203), the fourth monochromatic filter (204), the fifth monochromatic filter (205), the sixth monochromatic filter (206) and the seventh monochromatic filter (207)2、λ3、λ4、λ5、λ6And λ7Each wavelength satisfies the following relationship
λmin<λ1<λ2<λ3<λ4<λ5<λ6<λ7<λmax(1)
When the wavelengths are respectively lambda1、λ2、λ3、λ4、λ5、λ6And λ7After passing through the dispersive objective lens (40), the monochromatic light is focused at different positions of the image space of the dispersive objective lens (40), and the wavelength lambda is measured by a displacement sensor (60)1、λ2、λ3、λ4、λ5、λ6And λ7The shift d of the measured object (50) at these wavelengths2、d3、d4、d5、d6And d7
S4, according to (lambda)1,d1)、(λ2,d2)、(λ3,d3)、(λ4,d4)、(λ5,d5)、(λ6,d6) And (lambda)7,d7) Seven groups of data, the relationship between them is
Performing linear fitting by a least square method to obtain values of fitting coefficients a and b, thereby obtaining a linear relation d of the wavelength and the displacement of the spectral confocal measurement systemλ=a+bλ;
S5, completing the on-line calibration of the spectrum confocal measurement system, rotating the filter wheel (209) of the filter (20), and enabling the wide-spectrum white light beam emitted by the white light wide-spectrum light source (10) to pass through the band-pass filter (208) to obtain the wide-spectrum white light beam with the wavelength range of lambdaminTo lambdamaxThe spectrum confocal measuring system works normally.
The on-line calibration device and method for the spectral confocal measurement system can realize the rapid on-line calibration of the spectral confocal measurement system in different use environments. The method comprises the steps of obtaining a plurality of monochromatic lights through a rotary optical filter, obtaining the displacement of a measured object under different monochromatic lights through a displacement sensor, and carrying out linear fitting on the relationship between the wavelength and the displacement through a least square method to obtain a linear relationship formula of the wavelength and the displacement of the spectral confocal measuring system under the current environment, so that the influence of environmental parameter changes on the measuring precision of the spectral confocal measuring system is avoided.
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Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a schematic diagram of an on-line calibration device of a spectral confocal measurement system according to an embodiment of the invention;
FIG. 2 is a composition and structure diagram of an optical filter according to an embodiment of the present invention;
FIG. 3 is a flow chart of an online calibration method of a spectral confocal measurement system according to an embodiment of the invention;
wherein, little displacement device includes: 10. the device comprises a white light broad spectrum light source, 20, a filter, 30, a double-branch optical fiber, 301, an optical fiber emergent beam, 40, a dispersion objective, 401, a dispersion objective emergent beam, 50, an object to be measured, 60, a displacement sensor, 70, a spectrometer, 80 and a computer.
The optical filter 20 includes: 200. a filter wheel rotating shaft, 201, a first monochromatic filter, 202, a second monochromatic filter, 203, a third monochromatic filter, 204, a fourth monochromatic filter, 205, a fifth monochromatic filter, 206, a sixth monochromatic filter, 207, a seventh monochromatic filter, 208, a band-pass filter, 209 and a filter wheel.
Detailed Description
Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
As shown in fig. 1, the online calibration device for the spectral confocal measurement system includes a white light broad spectrum light source (10), a filter (20), a dual-branch optical fiber (30), an optical fiber emergent beam (301), a dispersive objective lens (40), a dispersive objective lens emergent beam (401), an object to be measured (50), a displacement sensor (60), a spectrometer (70) and a computer (80).
A broad spectrum white light beam emitted by a white light broad spectrum light source (10) enters a first branch end of a double-branch optical fiber (30) to be coupled into the double-branch optical fiber (30) after passing through an optical filter (20), an optical fiber emergent beam (301) is obtained after transmission of the total end of the double-branch optical fiber (30), the optical fiber emergent beam (301) obtains a dispersion objective emergent beam (401) after passing through a dispersion objective (40), the dispersion objective emergent beam (401) is reflected by an object to be measured (50) and then enters a spectrometer (70) through the dispersion objective (40), the total end of the double-branch optical fiber (30) and a second branch end of the double-branch optical fiber (30). A plurality of wavelengths are obtained through the rotating optical filter (20), the displacement of the measured object (50) under the wavelengths is measured through the displacement sensor (60), and the corresponding relation between the wavelengths and the displacement of the spectral confocal measurement system is obtained through linear fitting of the relation between the displacement and the wavelengths of the measured object (50) through the least square method.
As shown in fig. 2, for the composition and structure of the optical filter, the optical filter (20) includes a first monochromatic filter (201), a second monochromatic filter (202), a third monochromatic filter (203), a fourth monochromatic filter (204), a fifth monochromatic filter (205), a sixth monochromatic filter (206), a seventh monochromatic filter (207), and a band-pass filter (208), and the first monochromatic filter (201), the second monochromatic filter (202), the third monochromatic filter (203), the fourth monochromatic filter (204), the fifth monochromatic filter (205), the sixth monochromatic filter (206), the seventh monochromatic filter (207), and the band-pass filter (208) are fixed by a filter wheel (209) and can rotate 360 degrees around a central axis (200) of the filter wheel (209).
When the wide-spectrum white light beam emitted by the white light wide-spectrum light source (10) passes through the band-pass filter (208) of the filter (20), the wavelength range of lambda is obtainedminTo lambdamaxThe spectral range is the operating wavelength range of the dispersive objective lens (40).
When a broad-spectrum white light beam emitted by the white light broad-spectrum light source (10) passes through the first monochromatic filter (201), the second monochromatic filter (202), the third monochromatic filter (203), the fourth monochromatic filter (204), the fifth monochromatic filter (205), the sixth monochromatic filter (206) and the seventh monochromatic filter (207) of the filter (20), the wavelengths of the obtained broad-spectrum white light beam are respectively lambda1、λ2、λ3、λ4、λ5、λ6And λ7Each wavelength of the monochromatic light satisfies the following relationship
λmin<λ1<λ2<λ3<λ4<λ5<λ6<λ7<λmax(1)
When the wavelengths are respectively lambda1、λ2、λ3、λ4、λ5、λ6And λ7After passing through the dispersive objective lens (40), the monochromatic light is focused at different positions of the image space of the dispersive objective lens (40), and the wavelength lambda is measured by a displacement sensor (60)1、λ2、λ3、λ4、λ5、λ6And λ7Displacement of the measured object (50)Are respectively d1、d2、d3、d4、d5、d6And d7The relationship between them is
The values of a and b are obtained by a least square method, and the relationship between the displacement d and the wavelength lambda of the measured object (50) is established
d=a+bλ (3)
As shown in fig. 3, which is a flowchart of the online calibration method of the spectral confocal measurement system according to the present invention, when the online calibration device of the spectral confocal measurement system is used to perform the online calibration of the spectral confocal measurement system, the online calibration method of the spectral confocal measurement system includes the following steps:
s1, rotating the filter wheel (209) of the filter (20) to make the wide spectrum white light beam emitted by the white light wide spectrum light source (10) pass through the first monochromatic filter (201) to obtain the wavelength lambda1The monochromatic light of (1);
s2, obtaining the wavelength lambda through the displacement sensor (60)1Displacement d of the lower object (50)1
S3, repeating the steps S1-S2, and respectively obtaining monochromatic light lambda through the second monochromatic filter (202), the third monochromatic filter (203), the fourth monochromatic filter (204), the fifth monochromatic filter (205), the sixth monochromatic filter (206) and the seventh monochromatic filter (207)2、λ3、λ4、λ5、λ6And λ7Each wavelength satisfies the following relationship
λmin<λ1<λ2<λ3<λ4<λ5<λ6<λ7<λmax(1)
When the wavelengths are respectively lambda1、λ2、λ3、λ4、λ5、λ6And λ7After passing through the dispersive objective lens (40), the monochromatic light is focused at different positions of the image space of the dispersive objective lens (40), and the wavelength lambda is measured by a displacement sensor (60)1、λ2、λ3、λ4、λ5、λ6And λ7The shift d of the measured object (50) at these wavelengths2、d3、d4、d5、d6And d7
S4, according to (lambda)1,d1)、(λ2,d2)、(λ3,d3)、(λ4,d4)、(λ5,d5)、(λ6,d6) And (lambda)7,d7) Seven groups of data, the relationship between them is
Performing linear fitting by a least square method to obtain values of fitting coefficients a and b, thereby obtaining a linear relation d of the wavelength and the displacement of the spectral confocal measurement systemλ=a+bλ;
S5, completing the on-line calibration of the spectrum confocal measurement system, rotating the filter wheel (209) of the filter (20), and enabling the wide-spectrum white light beam emitted by the white light wide-spectrum light source (10) to pass through the band-pass filter (208) to obtain the wide-spectrum white light beam with the wavelength range of lambdaminTo lambdamaxThe spectrum confocal measuring system can work normally.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (2)

1. An online calibration device of a spectrum confocal measurement system comprises a white light wide spectrum light source (10), a rotatable optical filter (20), a double-branch optical fiber (30), an optical fiber emergent light beam (301), a dispersion objective lens (40), a dispersion objective lens emergent light beam (401), an object to be measured (50), a displacement sensor (60), a spectrometer (70) and a computer (80); the wide-spectrum white light beam emitted by the white light wide-spectrum light source (10) enters a first branch end of a double-branch optical fiber (30) to be coupled into the double-branch optical fiber (30) after passing through an optical filter (20), an optical fiber emergent beam (301) is obtained after being transmitted by a total end of the double-branch optical fiber (30), the optical fiber emergent beam (301) obtains a dispersion objective emergent beam (401) after passing through a dispersion objective (40), the total end of the double-branch optical fiber (30) and a second branch end of the double-branch optical fiber (30) after being reflected by an object to be measured (50), the dispersion objective emergent beam (401) enters a spectrometer (70),
the optical filter (20) comprises a first monochromatic filter (201), a second monochromatic filter (202), a third monochromatic filter (203), a fourth monochromatic filter (204), a fifth monochromatic filter (205), a sixth monochromatic filter (206), a seventh monochromatic filter (207) and a band-pass filter (208), the first monochromatic filter (201), the second monochromatic filter (202), the third monochromatic filter (203), the fourth monochromatic filter (204), the fifth monochromatic filter (205), the sixth monochromatic filter (206), the seventh monochromatic filter (207) and the band-pass filter (208) are fixed through a filter wheel (209) and can rotate 360 degrees around a central shaft (200) of the filter wheel (209), when a broad-spectrum white light beam emitted by the white light broad-spectrum light source (10) passes through the band-pass filter (208) of the optical filter (20), obtaining a wavelength range of lambdaminTo lambdamaxWhen a wide-spectrum white light beam emitted by the white light wide-spectrum light source (10) passes through a first monochromatic filter (201), a second monochromatic filter (202), a third monochromatic filter (203), a fourth monochromatic filter (204), a fifth monochromatic filter (205), a sixth monochromatic filter (206) and a seventh monochromatic filter (207) of the filter (20), the obtained wavelengths are respectively lambda1、λ2、λ3、λ4、λ5、λ6And λ7Each wavelength of the monochromatic light satisfies the following relationship
λmin1234567max(1)
When the wavelengths are respectively lambda1、λ2、λ3、λ4、λ5、λ6And λ7After passing through the dispersive objective lens (40), the monochromatic light is focused at different positions of the image space of the dispersive objective lens (40), and the wavelength lambda is measured by a displacement sensor (60)1、λ2、λ3、λ4、λ5、λ6And λ7The displacement of the measured object (50) is d1、d2、d3、d4、d5、d6And d7The relationship between them is
The values of a and b are obtained by a least square method, and the relationship between the displacement d and the wavelength lambda of the measured object (50) is established
d=a+bλ (3)
2. An on-line calibration method for a spectral confocal measurement system, which is implemented by using the on-line calibration device for a spectral confocal measurement system in claim 1, and is characterized by comprising the following steps:
s1, rotating the filter wheel (209) of the filter (20) to make the wide spectrum white light beam emitted by the white light wide spectrum light source (10) pass through the first monochromatic filter (201) to obtain the wavelength lambda1The monochromatic light of (1);
s2, obtaining the wavelength lambda through the displacement sensor (60)1Displacement d of the lower object (50)1
S3, repeating the steps S1-S2, and respectively obtaining monochromatic light lambda through the second monochromatic filter (202), the third monochromatic filter (203), the fourth monochromatic filter (204), the fifth monochromatic filter (205), the sixth monochromatic filter (206) and the seventh monochromatic filter (207)2、λ3、λ4、λ5、λ6And λ7Each wavelength satisfies the following relationship
λmin1234567max(1)
When the wavelengths are respectively lambda1、λ2、λ3、λ4、λ5、λ6And λ7After passing through the dispersive objective lens (40), the monochromatic light is focused at different positions of the image space of the dispersive objective lens (40), and the wavelength lambda is measured by a displacement sensor (60)1、λ2、λ3、λ4、λ5、λ6And λ7The shift d of the measured object (50) at these wavelengths2、d3、d4、d5、d6And d7
S4, according to (lambda)1,d1)、(λ2,d2)、(λ3,d3)、(λ4,d4)、(λ5,d5)、(λ6,d6) And (lambda)7,d7) Seven groups of data, the relationship between them is
Performing linear fitting by a least square method to obtain values of fitting coefficients a and b, thereby obtaining a linear relation d of the wavelength and the displacement of the spectral confocal measurement systemλ=a+bλ;
S5, completing the on-line calibration of the spectrum confocal measurement system, rotating the filter wheel (209) of the filter (20), and enabling the wide-spectrum white light beam emitted by the white light wide-spectrum light source (10) to pass through the band-pass filter (208) to obtain the wide-spectrum white light beam with the wavelength range of lambdaminTo lambdamaxThe spectrum confocal measuring system works normally.
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