CN104101485A - Device and method for detecting concave grating resolution and diffraction efficiency - Google Patents
Device and method for detecting concave grating resolution and diffraction efficiency Download PDFInfo
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- CN104101485A CN104101485A CN201410318029.4A CN201410318029A CN104101485A CN 104101485 A CN104101485 A CN 104101485A CN 201410318029 A CN201410318029 A CN 201410318029A CN 104101485 A CN104101485 A CN 104101485A
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Abstract
The present invention provides a device and method for detecting concave grating resolution and diffraction efficiency. The device comprises a monochromatic light emitting unit, an imaging unit which is arranged on a monochrome light path, a detection unit, a processing unit and a control unit; the monochromatic light emitting unit, the imaging unit, the detection unit, the processing unit and the control unit are connected sequentially; the monochromatic light emitting unit leads test-used monochromatic light into the imaging unit through an optical fiber; spectral intensity is received by a detector in the detection unit; and finally data in the detector are recorded, analyzed and processed by the processing unit, so that data about concave grating resolution and diffraction efficiency can be obtained. The device for detecting the concave grating resolution and diffraction efficiency of the invention is advantageous in simplicity, few required professional devices and simple operation, and can realize simultaneous detection of the resolutions and diffraction efficiencies of various types of concave gratings and can also realize fast detection of the resolutions and diffraction efficiencies of concave gratings of different types and different sizes in a wide band range.
Description
Technical field
The invention belongs to spectral technique field, be specifically related to a kind of device and method of testing that detects concave grating resolution and diffraction efficiency.
Background technology
Grating is a kind of extremely important and application high-resolution dispersing optics element extremely widely, is widely used in the scientific domains such as monochromator, spectral analysis, optical communication technique and light measurement technology.After grating is succeeded in developing and is widely applied, its prism before almost having replaced and as the dispersion element of spectral instrument of new generation, the impact of the factor such as precision and diffraction wavelength thereof of grating on science and technology field own profounds such as astronomy, space flight, medicine, geology.Resolution and diffraction efficiency are the very important technical performance indexs of grating, and the height of grating resolution and diffraction efficiency will directly affect the performance of instrument.Concave grating collects collimation, dispersion simultaneously and focuses on one, not only makes optical energy loss greatly reduce, and has greatly simplified the device of spectrometer, makes whole spectrometer become small volume and less weight.
Grating resolution is an important indicator weighing the minimum spectral line interval delta λ that grating can separate.Generally the measurement of grating resolution is had to following three kinds of methods: known spectral line is to mensuration, artificial two-wire mensuration, halfwidth of line determination method, first two method device therefor is more complicated, financial cost is higher, and all can not assess the resolving power of monoblock grating completely, widespread use at present be halfwidth of line determination method.
Halfwidth of line determination method is a kind of method of testing using Rayleigh criterion as basis for estimation.By Rayleigh criterion, resolution is embodied in the time that the first minimal value of the principal maximum of the diffraction pattern of a certain spectral line and the diffraction pattern of another spectral line overlaps, and just illustrates that these two adjacent spectral lines can be resolved.Half width determination method is exactly to utilize optoelectronic scanning method survey record to go out to test the profile of gained spectral line, the resolving limit using the corresponding line width of spectral line peak value half eminence as grating.This measuring method is fairly simple, be easy to carry out quantitative measurement, and can obtain data and curve pattern simultaneously, this method can obtain a complete curve of spectrum pattern of grating in addition, thereby the quality that can judge by observing the power of curve secondary maximum peak value satellite line grating, this is also the information that other measuring method cannot obtain.
Concave grating diffraction efficiency comprises the detection of absolute diffraction efficiency and relative diffraction, the former is defined as the diffraction light flux of monochromatic incident light in given spectral order time and the ratio of same monochromatic light incident flux, and the latter is defined as monochromatic diffraction light flux and the ratio of same monochromatic light through the luminous flux of the standard reflection mirror of identical composite coating properties in given spectral order is inferior.What the present invention realized is the detection of concave grating relative diffraction.
Accurately the debuging of optical system of majority all needs to add multiple optics auxiliary element both at home and abroad at present, debugs program comparision loaded down with trivial details, and each impact of debuging link is larger, has increased resetting difficulty, larger to the experiment person's of debuging experience dependency degree.In addition, in the detection method of concave grating resolution, object space distance and image space distance cannot freely be adjusted, and be substantially all that the specific system of the grating of special parameter is detected, and the kind of concave grating are more, causes testing heavy at present.
Summary of the invention
For addressing the above problem, the present invention has adopted following technical scheme:
The invention provides a kind of device that detects concave grating resolution and diffraction efficiency, there is such feature, comprising:
Monochromatic light transmitter unit, for launching monochromatic light, comprise the light source and the monochromator that are linked in sequence, image-generating unit, be arranged in monochromatic light path, the first turntable that comprises lens, slit, concave grating, standard reflection mirror, concave grating fixture, grating rotary table, carrying grating rotary table, concave grating fixture is positioned on grating rotary table, grating rotary table is arranged on the base of the first turntable, lens, slit and concave grating center line are positioned on same level line, and keep each other certain distance, probe unit, comprises for receiving diffraction spectrum that monochromatic light forms after image-generating unit or the detector of reflectance spectrum, the detector fixture of clamping detector, the second turntable of carrying detector fixture and cover the camera bellows of image-generating unit and probe unit, processing unit, for obtaining the data of probe unit and recording, analyze and process, control module, for controlling monochromatic light transmitter unit, image-generating unit, probe unit and processing unit, wherein, concave grating and standard reflective mirror are arranged in the same position of device, in the time of detection resolution, adopt described concave grating, in the time of detection of diffracted efficiency, detecting after complete concave grating diffraction light flux, select standard of replacement catoptron, concave grating fixture and grating rotary table are independently separately, the first turntable and the second turntable are separate, use respectively Electric Machine Control, be used for according to the position of concave grating described in different object space distances and image space distance adjustment and described detector, detector comprises the CCD camera detecting for resolution and the light power meter detecting for diffraction efficiency.
In the device of detection concave grating resolution provided by the invention and diffraction efficiency, can also there is such feature: light source and monochromator all adopt optical fiber output.
In the device of detection concave grating resolution provided by the invention and diffraction efficiency, can also have such feature: monochromatic light ray spectral limit is 350nm-700nm, measurement wavelength accuracy is 1nm.
A method that detects concave grating resolution and diffraction efficiency, is characterized in that, comprises the following step:
Step 1. connects monochromatic light transmitter unit, image-generating unit, probe unit, processing unit and control in order, and the initial position of grating rotary table and detector turntable is recalled to zero-bit;
Step 2. is opened light source, initialization monochromator, adjusts concave grating position and makes its zero order spectrum and slit center superposition;
Step 3. is rotated concave grating initial adjustment light beam, makes it by the incident angle incident of design, and the center of detector light-sensitive surface position and concave grating of adjusting is in same level;
Position and angle that step 4. is adjusted concave grating are imaged on detector light-sensitive surface its positive primary spectrum;
Step 5. selects labview grating resolution to detect software, observes the curve on computer department, regulates width and the position of slit simultaneously, makes system works in optimum condition;
Step 6. covers image-generating unit and probe unit with camera bellows, complete debuging of concave grating detection system, according to the curve of the diffraction spectrum image of detected concave grating, get half-peak breadth corresponding to 50% peak value place as Δ λ, according to incident wavelength λ, and formula λ/Δ λ assesses the resolution of monoblock grating, complete the detection of concave grating resolution;
The CCD camera in detector is replaced by light power meter by step 7., and select diffraction efficiency to detect software, and the diffraction spectrum of acquisition and recording concave grating is worth by force;
Step 8. is changed standard reflection mirror in the same size with concave grating, radius-of-curvature is identical, holding position is constant, the 350nm-700nm reflectance spectrum intensity level of acquisition and recording standard reflection mirror, calculate the ratio of diffraction spectrum intensity level and reflectance spectrum intensity level, obtain the data of the relative diffraction of concave grating, Data Comparison is drawn out the relative diffraction curve of concave grating after processing, complete the detection of concave grating diffraction efficiency.
Invention effect and effect
According to device and the detection method that detects concave grating resolution and diffraction efficiency provided by the invention simultaneously, monochromatic light transmitter unit, image-generating unit, probe unit, processing unit and control module are linked in sequence, monochromatic light transmitter unit will be tested with the imaging of monochromatic light importing image-generating unit by optical fiber, the detector that spectral intensity is detected in unit receives, finally by the data in processing unit record, analysis and processing detector, draw the data of concave grating resolution and diffraction efficiency, light source of the present invention and monochromator are all modularizations and adopt optical fiber output, the light paths such as reflection and optically focused are avoided oneself building, required optics auxiliary element is few, debug program simple, in addition, in the present invention, the first turntable and the second turntable are separate, use respectively Electric Machine Control, can realize the robotization control of measuring system, the angle of the incident angle of accurate adjustment concave grating and operating distance and detector and position, concave grating fixture and grating rotary table are independently separately, convenient different size or the difform concave grating installed, can realize resolution and the diffraction efficiency that on a cover system, can detect various types of concave gratings simultaneously, also can realize dissimilar, different size concave grating resolution and diffraction efficiency be the fast detecting to resolution and diffraction efficiency in broadband scope.
Brief description of the drawings
Fig. 1 is the device schematic diagram that detects concave grating resolution and diffraction efficiency in embodiments of the invention;
Fig. 2 is the structural representation of the first turntable in embodiments of the invention; And
Fig. 3 is the structural representation of the second turntable in embodiments of the invention.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is elaborated.
Fig. 1 is the device schematic diagram that detects concave grating resolution and diffraction efficiency in embodiments of the invention.
As shown in Figure 1, the device 100 of detection concave grating resolution and diffraction efficiency comprises monochromatic light transmitter unit, image-generating unit, probe unit, processing unit and control module; Wherein, monochromatic light transmitter unit comprises light source 11, monochromator 12, optical fiber 13, optical fiber light inlet port 14 and optical fiber bright dipping port one 5; Image-generating unit comprises lens 21, slit 22, concave grating 23, standard reflection mirror 24, concave grating fixture 25, grating rotary table 26, the first turntable 27 and slit and goes out optical port 28, the center line of lens 21, slit 22, concave grating 23 or standard reflection mirror 24 is positioned on same level line, and maintain a certain distance each other, concave grating fixture 25 is positioned on grating rotary table 26, the two is separate, in dismountable state, grating rotary table 26 is arranged on the base of the first turntable 27; Probe unit comprises detector 31, detector fixture 32, detector turntable 33, the second turntable 34 and covers the camera bellows 35 of image-generating unit and probe unit, detector fixture 32 fixed detectors 31, detector turntable 33 carries detector fixture 32, detector turntable 33 is arranged on the second turntable 34, and detector 33 comprises the CCD camera detecting for resolution and the light power meter detecting for diffraction efficiency; Processing unit comprises computing machine 41 and is arranged on labview grating resolution Characteristics Detection software and the diffraction properties detection software on computing machine 41; Control module comprises computing machine 41 equally, by the corresponding parameters of program panel input system on it, guarantees that system normally moves.
Fig. 2 is the structural representation of the first turntable in the present embodiment.
As shown in Figure 2, the first turntable 27 is one dimension turntable, on it, remove concave grating 23 is set, standard reflection mirror 24, concave grating fixture and standard reflection mirror fixture 25, outside grating rotary table 26, also comprise the first motor 271 on grating rotary table motor 261 and the first turntable 27, grating fixture and reflective mirror fixture 25 be arranged on can the grating rotary table 26 of 360 ° of rotations on, grating rotary table motor 261 on grating rotary table 26 is controlled the anglec of rotation of grating rotary table 26, the first motor 271 on the first turntable 27 is controlled the position of grating rotary table 26, can regulate according to different concave grating 23 distance of grating rotary table 26 upper recess surface grating 23 centers and light source center, it is 0-170mm that the first motor 271 motors can regulate and control range.
Fig. 3 is the structural representation of the second turntable in the present embodiment.
As shown in Figure 3, the second turntable 34 is two-dimentional turntable, comprise orthogonal parallel arms 341 and upright arm 342, parallel arms motor 343 and upright arm motor 344, on upright arm 342, install can 360 ° of rotations detector turntable 33, detector fixture 32 is set on detector turntable 33, detector fixture 32 fixed detectors 31, parallel arms 341 is controlled the position of upright arm 342 by parallel arms motor 343, upright arm motor 344 on upright arm 342 is controlled the position of detector turntable 33, detector turntable motor 331 is controlled the anglec of rotation of detector turntable 33, realize the staying at random location that detector 31 can be on the second turntable 34, parallel arms motor 343 and upright arm motor 344 can regulate and control range and be 0-170mm.
According to practical application, light source 11 comprises Halogen lamp LED and deuterium lamp, the wavelength coverage of Halogen lamp LED is 400nm～1600nm, the wavelength coverage of deuterium lamp is 200nm～400nm, the wavelength coverage of monochromator 12 is 350～700nm, bandwidth is 2nm, minimum step is 1nm, the fine footpath of optical fiber 13 is 400um, lens 21 are quartzy balsaming lens, advantage is can be because of absorbing ultraviolet light a little less than not causing light intensity too at ultraviolet region yet, the minimum division value of slit 22 is 0.001mm, camera bellows 29 is aviation aluminiums of blackening process, advantage is to greatly reduce in the impact on testing process of extraneous parasitic light and noise and testing process because incident beam reflects the impact on testing result.
Control module is the control interface of computing machine 41, by controlling the corresponding parameters of interface input system, guarantee the normal operation of system, need the parameter arranging to comprise the Rowland circle diameter of pixel interval, system object space focal length, system image space focal length, detection wavelength value, slit width and grating; Processing unit is the processing interface of computing machine 41, time shutter and gain that the light intensity regulating CCD camera of the diffraction spectrum picture obtaining according to institute's input wavelength or light power meter are suitable, the system that obtains is optimized hot spot and data and curves figure under this wavelength, saved system detects data, comprises largest light intensity value, half band-width value and resolution value.
The present invention also provides a kind of method that can simultaneously detect concave grating resolution and diffraction efficiency, comprises the following steps:
Step 1. connects monochromatic light transmitter unit, image-generating unit, probe unit and processing unit in order, and the initial position of grating rotary table 26 and detector turntable 33 is recalled to zero-bit;
Step 2. is opened light source 11 and monochromator 12, select the initial output wavelength of monochromator 12, the bright dipping of light source 11 is coupled together with the optical fiber inlet end 14 of optical fiber 13 and monochromator 12, through the optical fiber endpiece 15 of monochromator 2, test monochromatic light imports in the whole pore diameter range of lens 21, focus on the center of slit 22, the stationary installation of fine setting optical fiber 13, ensure that the light of deriving from optical fiber 14 is just evenly full of whole lens 21, the position of fixed fiber bright dipping port one 5, now thinks pointolite at the hot spot at slit 22 centers;
Step 3. is adjusted the angle of grating rotary table 26, make to be full of from the light beam of slit 22 center outgoing the surface of whole concave grating 23, regulate the operating distance of concave grating 23 and slit 22, make the optical fiber at zero order spectrum imaging aligning slit 22 places of concave grating 23 go out optical port 28, the angle of pitch of the fiber port 28 of fine setting concave grating 23 and slit 22, coexists on the surface level of raster center incident ray and emergent ray; Height and the horizontal level of fine setting grating rotary table 26, ensure no matter concave grating 23 rotates how many angles, can evenly be full of whole grating aperture from the light beam of slit 22 incidents, can guarantee like this lens 21, slit 22 and grating 23 threes' center in the same horizontal line, and guarantee the homogeneity of the light beam that incides concave grating 23 to reduce to greatest extent the impact that beam stability is brought testing result simultaneously;
Step 4. is adjusted after the position relationship of lens 21, slit 22 and concave grating 23, the position of fixed lens 21 and slit 22, motor regulates and controls the distance between concave grating 23 and slit 22 again, rotating shutter turntable 26 simultaneously, make incident ray with 43.2 ° of incidents of the theoretical incident angle of grating, the second turntable 34 that regulates the CCD camera place of detector 31, is imaged on the light-sensitive surface of CCD camera of detector 21 the positive primary spectrum of grating 23;
Step 5. is selected labview grating resolution Characteristics Detection software, gather the original pattern of spectrum picture, the CCD camera of fine setting detector 31 is in the position of vertical direction and horizontal direction, ensure the centre of spectrum picture at CCD camera light-sensitive surface, observe the curve on computing machine 41, the diffracted beam that makes concave grating 23 without pitching incide in CCD camera light-sensitive surface in the heart;
Step 6., by observing the resolution curve on software, regulates the width of slit 22, the optimal slit width of selective system, now the device of system is adjusted complete, the relative position of fixing locked each several part, covers camera bellows 29, reduces the impact on detection system of extraneous parasitic light and noise;
Step 7. acquisition resolution data are also preserved, according to the curve of detected concave grating diffraction spectrum picture, get half-peak breadth corresponding to 50% peak value place as Δ λ, according to incident wavelength λ, and formula λ/Δ λ assesses the resolution of monoblock grating, complete the detection of concave grating resolution;
Step 8. is changed detector 31, replace CCD camera with light power meter, select diffraction efficiency of grating Characteristics Detection software, the detecting location of fine setting light power meter, make spectrum picture at test surface center, gather and record 350nm～700nm grating diffration spectral intensity values;
Step 9. is replaced concave grating 23 with the standard reflection mirror 24 of same shape and same curvature radius, keep beam incident angle degree constant, the detecting location of Electric Machine Control light power meter, the reflectance spectrum intensity level of 350nm～700nm standard reflection mirror under acquisition and recording, calculate the ratio of diffraction spectrum intensity level and reflectance spectrum intensity level, obtain the data of the relative diffraction of concave grating, Data Comparison is drawn out the relative diffraction curve of concave grating 23 after processing, complete the detection of concave grating 23 diffraction efficiencies;
System regulates and finishes at device, after determining the beam incident angle degree of grating 23 and covering camera bellows 29, do not need the relative position of manual adjustment system each several part again, only need automatically control the collection picture position of detector 31 by the motor of the second turntable shown in Fig. 3, ensure, in testing process, extraneous parasitic light and noise are dropped to minimum to the impact of system.
Embodiment effect and effect
Device and the detection method of concave grating resolution and diffraction efficiency are provided when providing according to the present embodiment, monochromatic light transmitter unit, image-generating unit, probe unit, processing unit and control module are linked in sequence, monochromatic light transmitter unit will be tested with the imaging of monochromatic light importing image-generating unit by optical fiber, the detector that spectral intensity is detected in unit receives, finally by the data in processing unit record, analysis and processing detector, draw the data of concave grating resolution and diffraction efficiency, the light source of the present embodiment and monochromator are all modularizations and adopt optical fiber output, the light paths such as reflection and optically focused are avoided oneself building, required optics auxiliary element is few, debug program simple, in addition, in the present embodiment, the first turntable and the second turntable are separate, use respectively Electric Machine Control, can realize the robotization control of measuring system, the angle of the incident angle of accurate adjustment concave grating and operating distance and detector and position, concave grating fixture and grating rotary table are independently separately, convenient different size or the difform concave grating installed, can realize resolution and the diffraction efficiency that on a cover system, can detect various types of concave gratings simultaneously, also can realize dissimilar, different size concave grating resolution and diffraction efficiency be the fast detecting to resolution and diffraction efficiency in broadband scope.
Claims (4)
1. a device that detects concave grating resolution and diffraction efficiency, comprising:
Monochromatic light transmitter unit, for launching monochromatic light, comprise the light source and the monochromator that are linked in sequence;
Image-generating unit, be arranged in described monochromatic light path, comprise lens, slit, concave grating, standard reflection mirror, concave grating fixture, grating rotary table and carry the first turntable of described grating rotary table, described concave grating fixture is positioned on described grating rotary table, described grating rotary table is arranged on the base of described the first turntable, described lens, described slit and described concave grating or described standard reflection mirror center line are positioned on same level line, and keep each other certain distance, described standard reflection mirror is identical with the position of described concave grating in described light path, incident angle is identical, in the time of detection resolution, adopt described concave grating, in the time of standard mirror incident flux in detection of diffracted efficiency, adopt described standard reflection mirror,
Probe unit, comprise for receiving diffraction spectrum that described monochromatic light forms after described image-generating unit or the detector of reflectance spectrum, clamp the detector fixture of described detector, carry the second turntable of described detector fixture and cover the camera bellows of described image-generating unit and described probe unit, described detector comprises the CCD camera detecting for resolution and the light power meter detecting for diffraction efficiency;
Processing unit, for obtaining the data of described probe unit and recording, analyze and process;
Control module, for controlling described monochromatic light transmitter unit, described image-generating unit, described probe unit and described processing unit;
Described the first turntable and described the second turntable are separate, use respectively Electric Machine Control, for according to the position of concave grating described in different object space distances and image space distance adjustment and described detector;
Described concave grating fixture and described grating rotary table are independently separately.
2. the device of detection concave grating resolution according to claim 1 and diffraction efficiency, is characterized in that:
Wherein, described light source and described monochromator all adopt optical fiber output.
3. the device of detection concave grating resolution according to claim 1 and diffraction efficiency, is characterized in that:
Wherein, described monochromatic light ray spectral limit is 350nm-700nm, and measurement wavelength accuracy is 1nm.
4. a method that detects concave grating resolution and diffraction efficiency, is characterized in that, comprises the following step:
Step 1, connects monochromatic light transmitter unit, image-generating unit, probe unit, processing unit and control module in order, and the initial position of grating rotary table and detector turntable is recalled to zero-bit;
Step 2, opens light source, initialization monochromator, adjusts concave grating position and makes its zero order spectrum and slit center superposition;
Step 3, rotates concave grating initial adjustment light beam, makes it by the incident angle incident of design, and the center of detector light-sensitive surface position and concave grating of adjusting is in same level;
Step 4, position and the angle of adjusting concave grating are imaged on detector light-sensitive surface its positive primary spectrum;
Step 5, selects labview grating resolution to detect software, observes the curve on computing machine, regulates width and the position of slit simultaneously, makes system works in optimum condition;
Step 6, image-generating unit and probe unit are covered with camera bellows, complete debuging of concave grating detection system, according to the curve of the diffraction spectrum image of detected concave grating, get half-peak breadth corresponding to 50% peak value place as Δ λ, according to incident wavelength λ, and formula λ/Δ λ assesses the resolution of monoblock grating, completes the detection of concave grating resolution;
Step 7, is replaced by light power meter by the described CCD camera in detector, and selects diffraction efficiency to detect software, and the diffraction spectrum of acquisition and recording concave grating is worth by force;
Step 8, change standard reflection mirror in the same size with concave grating, radius-of-curvature is identical, holding position is constant, the 350nm-700nm reflectance spectrum intensity level of acquisition and recording standard reflection mirror, calculate the ratio of diffraction spectrum intensity level and reflectance spectrum intensity level, obtain the data of the relative diffraction of concave grating, Data Comparison is drawn out the relative diffraction curve of concave grating after processing, complete the detection of concave grating diffraction efficiency.
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