CN106248351B - Optical system ghost image measurement method based on optical system ghost image measuring device - Google Patents
Optical system ghost image measurement method based on optical system ghost image measuring device Download PDFInfo
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- CN106248351B CN106248351B CN201610717298.7A CN201610717298A CN106248351B CN 106248351 B CN106248351 B CN 106248351B CN 201610717298 A CN201610717298 A CN 201610717298A CN 106248351 B CN106248351 B CN 106248351B
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- 230000003287 optical Effects 0.000 title claims abstract description 155
- 238000000691 measurement method Methods 0.000 title claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 238000001228 spectrum Methods 0.000 claims description 35
- 241000287181 Sturnus vulgaris Species 0.000 claims description 27
- 210000001747 Pupil Anatomy 0.000 claims description 20
- 238000003384 imaging method Methods 0.000 claims description 16
- 230000000875 corresponding Effects 0.000 claims description 9
- 150000002367 halogens Chemical class 0.000 claims description 7
- 229910052736 halogens Inorganic materials 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound 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[W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
The present invention provides the optical system ghost image measurement method based on optical system ghost image measuring device, a branch of collimator and extender light beam is divided into two-way, and the direction for transmiting collimated light beam is constant, it is directed toward adjustable light splitting system by two-way rotation type axial, light splitting optical path can be achieved to rotate around the transmission optical axis angle conical surface, it is tested by ghost image, the distribution of the three dimensions ghost image position of optical system to be measured can be obtained, in addition, also ghost image distribution can be measured in the optical lens design phase, optical lens is adjusted in time, avoids the appearance of later stage optical system ghost image；Can be by the adjustment of master control system, incident light position and energy automatic, that quickly obtain optical system formation ghost image, test process is stable, reliable, and can greatly improve testing efficiency, is highly suitable for applying in engineering test.
Description
Technical field
The invention belongs to field of optical detection, it is related to a kind of optical system ghost image measuring device and its measurement method.
Background technology
In order to improve photoelectric detecting system to remote and weak signal target detectivity it is necessary to increasing optical system mouth as possible
Diameter tries the suppression level for improving optical system to stray light, to improve the signal-to-noise ratio of whole system；In order to realize in target range
To the measurement of objective contour and posture it is necessary to realizing electro-optical system using the spectral characteristics of radiation of different target under complex environment
Multispectral survey will improve electro-optical system performance by inhibiting the spuious light energy of each spectral coverage in this process.
Stray light is the light energy for referring to reach the non-targeted imaging of electro-optical system detector target surface, its presence can be led
Cause the increase of the output noise of optical system to make the reduction of image planes contrast when serious the target of system output can believe
It number is buried in noise completely, influences the EFFECTIVE RANGE and resolution capability of optical system.
Stray light can be divided into according to the source of stray light：External non-imaged stray light, imaging stray light and inside heat
Radiation dispersion light.When imaging stray light refers to optical system imaging, since the residual reflectivity of optical element surface leads to part
It is imaged light and image planes is reached with improper light path inside optical system, form the stray light of optical noise, be mainly shown as ghost image
With cold emission phenomenon.
Cold emission phenomenon is primarily present in the infrared optical system with refrigeration mode detector, refers to the picture of detector itself
It is reflected to the phenomenon that target surface forms new noise image.And ghost image refers to that the residual reflectivity due to optical element surface causes
Part imaging light converges the picture of formation in optical system light path.For the research and development of optical system, the test of ghost image is
Very necessary, especially to heavy caliber, multispectral, zoom photoelectricity test equipment, test, analysis, the positioning work of ghost image
By the image quality of direct relation optical system, so it is very to establish a efficient measuring device for measuring optical system ghost image
It is necessary.
Invention content
Technical problem to be solved by the invention is to provide a kind of measurements that can quick and precisely measure optical system ghost image
Device and measurement method.
Technical solution of the invention is to provide a kind of optical system ghost image measuring device, is particular in that：Edge
Light path is disposed with light source, beam-expanding collimation system, two-way rotation type axial and is directed toward adjustable light splitting system and optical system to be measured；
Larger Dynamic range brightness meter is provided on above-mentioned light source, for when measuring optical system normal imaging to be measured in real time
Light-source brightness and light-source brightness when there is ghost image；The exit end of the light source is provided with adjustable target mechanism, and outgoing light source passes through
Adjustable target mechanism forms target beam；
Above-mentioned two-way rotation type axial be directed toward adjustable light splitting system include spectrum groupware, rotary components, axial stretching component,
It rolls over axis mirror, be directed toward adjustment component and support component；
Above-mentioned spectrum groupware is set to one end of axial stretching component, and center is located at beam-expanding collimation system outgoing beam
On optical axis；
Above-mentioned direction adjustment component is set to the other end of axial stretching component；
Above-mentioned folding axis mirror is installed on direction adjustment component；The transmission optical axis of the reflection optical axis and spectrum groupware of the folding axis mirror
Between included angle pass through direction adjust component adjustment；Folding the distance between axis mirror and spectrum groupware pass through axial stretching component
Adjustment；It is located at by the reflected beams apart from regulating guarantee folding axis mirror during being directed toward adjustment assembly angle adjustment and waits for photometry
The entrance pupil position of system；
The side of above-mentioned rotary components and axial stretching component are connected, and the other side is connected by shaft with support component；Rotation
Turn the optical axis coincidence of the shaft of component and the outgoing beam of beam-expanding collimation system；Rotary components can drive axial stretching component,
The optical axis rotation of spectrum groupware, folding axis mirror and direction adjustment component around the outgoing beam of beam-expanding collimation system.
Optical system ghost image measuring device of the present invention further includes master control system, and above-mentioned master control system includes connecting light with light source
What source control module was connected with adjustable target mechanism connects rotary components control module with rotary components and is directed toward adjustment component
The axial stretching component control module that the direction adjustment component control module of connection is connected with axial stretching component；Light source control
Module exports spoke brightness to control light source assembly；Adjustable target mechanism controls module is controlling adjustable target institution aim plate
Movement；Rotary components control module rotates to control rotary components；Adjustment component control module is directed toward to be directed toward to control
Adjust assembly angle variation；Axial stretching component control module moves to control axial telescopic component.
Pose adjustment is carried out in order to treat photometry system and beam-expanding collimation system, optical system ghost image of the present invention measures dress
It further includes the first pose adjustment instrument and the second pose adjustment instrument to set, and above-mentioned first pose adjustment instrument is located at beam-expanding collimation system outgoing
Outside the optical axis of light beam, above-mentioned second pose adjustment instrument carries optical system to be measured, and above-mentioned master control system further includes the first posture tune
The control module of whole instrument and the second pose adjustment instrument, for controlling the first pose adjustment instrument and the second pose adjustment instrument, it can be achieved that
Orientation, pitching, roll, beat and elevating movement.
Above-mentioned first pose adjustment instrument and the second pose adjustment instrument are multi-dimensional adjusting mechanisms, can be according to optical system to be measured
Actual conditions realize rapid alignment adjustment in the test starting stage.
In order to adapt to different examining systems, above-mentioned adjustable target mechanism include multiple target replace automatically turntable with
And the plurality of target plate replaced automatically in multiple target on turntable is set；The plurality of target plate is star tester；A variety of star testers
Star bore dia it is different, can be according to the star tester of the suitable star bore dia of parameter selection of actual examining system.
In order to provide uniform light source, above-mentioned light source is integrating sphere light source, the integrating sphere light source xenon lamp and halogen tungsten lamp
The emitting light path of mixing light source, xenon lamp and halogen tungsten lamp is equipped with iris diaphgram, it can be achieved that the tune of integrating sphere light source light-emitting window brightness
Section, the dynamic range of integrating sphere light source is up to 120dB.
In order in alignment procedure, not introduce stray light as possible, above-mentioned beam-expanding collimation system is off-axis using bimirror form
Reflective optics, wherein primary mirror are spherical mirror.
Above-mentioned spectrum groupware is Amici prism, and the surface figure accuracy of the Amici prism and folding axis mirror reaches λ/50, wherein λ=
632.8nm hardly introduces aberration after being divided in this way.
The present invention also provides a kind of optical system ghost image measurement methods, include the following steps：
Step 1：Point bright light source, waits for its stabilization；
Step 2：According to the design parameter of optical system to be measured, according to optical system diffraction formula, specific formula such as formula
(1), the star bore dia for needing selection when test is calculated, and selects suitable star hole to move into integrating sphere light from adjustable target mechanism
At the light-emitting window in source；
Wherein：D is star bore dia, unit mm；
λ is operating central wavelength, unit mm；
F is the focal length of beam-expanding collimation system, unit mm；
D is the Entry pupil diameters of optical system to be measured, unit mm；
Step 3：The transmitted light beam of spectrum groupware is imaged after optical system booting to be measured；It need not roll in this process
The reflected beams of axis mirror are imaged, and therefore, can roll over going out for axis mirror by adjusting direction adjustment component and the adjustment of axial stretching component
Irradiating light beam is not at the entrance pupil of optical system to be measured；Master control system adjusts the appearance of the first pose adjustment instrument and the second pose adjustment instrument
State so that the optical axis or the optical axis of optical system to be measured are parallel with the optical axis of beam-expanding collimation system；
Step 4：Light-source brightness L is adjusted by master control system；In the case where keeping light-source brightness constant, pass through master control
System call interception is directed toward adjustment component, controls axial telescopic component, ensures that the outgoing beam of folding axis mirror covers optical system to be measured
Entrance pupil；Rotary components rotation is adjusted by master control system simultaneously；Often adjustment is primary to be directed toward adjustment component and rotary components, records phase
The reflection optical axis for the folding axis mirror answered is directed toward angle theta and rotary components rotational angle between spectrum groupware transmission optical axis direction
ω；Collection optical system image to be measured is checked whether there is or not ghost image in acquired image, corresponding L, θ and ω when screening is with ghost image；
Step 5：Change light-source brightness L, repeats step 4, record the corresponding ghost image information of different θ and different ω.
When after obtaining ghost image information optical system normal imaging to be measured can also be calculated according to formula (2) and formula (3)
Pupil luminance and Pupil luminance when there is ghost image；
Wherein：D is star bore dia, unit mm；
F is the focal length of beam-expanding collimation system, unit mm；
LNormallyFor the light-source brightness for measuring when optical system normal imaging, unit W/m2·sr；
LGhost imageFor the light-source brightness for measuring when ghost image occurs in optical system, unit W/m2·sr；
τThoroughlyFor spectrum groupware transmitted light path transmitance；
τPointFor spectrum groupware light splitting optical path transmitance；
τ is the transmitance of beam-expanding collimation system.
By the ghost image information of acquisition and optical system normal imaging to be measured with form ghost image entrance pupil at illumination relationship,
The structure of optical system can be improved by theoretical calculation, avoid generating ghost image.
The beneficial effects of the invention are as follows：
1, present invention uses the characteristics of Amici prism, a branch of collimator and extender light beam are divided into two-way, and transmit collimation
The direction of light beam is constant, is directed toward adjustable light splitting system by two-way rotation type axial, it can be achieved that light splitting optical path is around transmitted light axle clamp
Pyramidal plane rotates, and is tested by ghost image, the distribution of the three dimensions ghost image position of optical system to be measured can be obtained, be optical system
The especially essential practical tool of high sensitivity detection class optical system ghost image genetic analysis；In addition, also can be in optics
The lens design stage measures ghost image distribution, is adjusted in time to optical lens, avoids later stage optical system ghost image
Occur；
2, two-way rotation type axial of the invention be directed toward folding axis mirror the reflected beams pointing direction in adjustable light splitting system with
Relationship is established between spectrum groupware transmitted light beam axial direction, it in this way can be right to forming ghost image institute in ghost image measurement process
One-to-one relationship is established in the incident ray direction answered with system optical axis or the optical axis；
3, optical system ghost image measuring device of the invention can be by the adjustment of master control system, automatic, quickly acquisition
Optical system forms the incident light position and energy of ghost image, and test process is stable, reliable, and can greatly improve test effect
Rate is highly suitable for applying in engineering test.
4, a kind of optical system ghost image measuring device of the invention, integrating sphere light source are made of halogen tungsten lamp and xenon source,
For stability up to 1%, light-emitting window brightness has very big dynamic range, it is ensured that ghost image tests the needs to light-source brightness；
Spectral region is up to 300nm~2500nm, it can be achieved that the test of visible near-infrared optical system ghost image；
5, a kind of optical system ghost image measuring device of the invention, adjustable target mechanism select multiple target to replace rotation automatically
Platform can quickly be replaced target target plate, be greatly saved the testing time；
6, a kind of optical system ghost image measuring device of the invention, pose adjustment instrument use the adjustment of six degree of freedom
Platform is carrying out spectrum groupware transmission optical axis with system optical axis to be measured or optical axis alignment procedures, can greatly improve alignment
Efficiency.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of optical system ghost image measuring device provided by the present invention；
Fig. 2 is the structural schematic diagram that two-way rotation type axial is directed toward adjustable light splitting system in the present invention；
Fig. 3 is incident ray and optical axis angle schematic diagram.
Reference numeral is in figure：1- light sources；2- adjustable targets mechanism；3- beam-expanding collimation systems；4- two-way rotation type axials
It is directed toward adjustable light splitting system；5- the first pose adjustment instrument；6- master control systems；7- spectrum groupwares；8- rotary components；9- axial stretchings
Component；10- rolls over axis mirror；11- is directed toward adjustment component；12- support components；13- the second pose adjustment instrument.
Specific implementation mode
Below in conjunction with attached drawing, the present invention will be further described.
As shown in Figure 1, optical system ghost image measuring device of the present invention, including master control system 6, further include being set successively along light path
The integrating sphere light source 1 set, beam-expanding collimation system 3, two-way rotation type axial are directed toward adjustable light splitting system 4 and are located at the second posture tune
Optical system to be measured on whole instrument 13.Integrating sphere light source 1 and beam-expanding collimation system 3 are placed on table top；In beam-expanding collimation system 3
Outside be provided with the first pose adjustment instrument 5.For the ease of the attitude regulation of examining system, introduces six degree of freedom and can adjust posture
Instrument is adjusted, facilitates between the incident direction of light and optical system to be measured quickly to establish and contacts, testing efficiency can be greatly improved.
The present embodiment master control system 6 includes various control module, specific to control light source 1, pose adjustment instrument and two-way rotation
Formula is axially directed to the work of each component in adjustable light splitting system 4 and completes data record and processing.
Integrating sphere light source 1 in the present embodiment is the mixing light source of xenon lamp and halogen tungsten lamp, in the outgoing of xenon lamp and halogen tungsten lamp
Light path is equipped with iris diaphgram, and the light-emitting window brightness of integrating sphere light source, the dynamic of integrating sphere light source are adjusted by the iris diaphgram
Range is up to 120dB.Since ghost image is relatively low in the response of optical system detector to be measured, only strong illumination when, ghost image
Relative response could improve, and detector can just respond.So selecting the light source of dynamic range 120dB, energy ratio is reachable
106Magnitude, it is sufficient to which the response of ghost image is increased to detector can corresponding range.Integrating sphere light source is also equipped with real-time monitoring
The Larger Dynamic range brightness meter of luminous power, can monitor integrating sphere light source brightness in real time inside integrating sphere.
The exit end of integrating sphere light source 1 is provided with adjustable target mechanism 2, adjustable target mechanism 2 is used for adjusting integrating sphere
The emergent light of light source 1 forms target beam, the adjustable target mechanism 2 of the present embodiment including multiple target replace automatically turntable and
The plurality of target plate being disposed thereon；Target Board is star tester；Star tester has multigroup；The star bore dia of every group of star tester is not
Together.Multiple target replaces what turntable can quickly be replaced target target plate automatically, saves the testing time, by driving circuit,
Target wheel rotation is driven, realizes the replacement of target target plate, there are three optoelectronic switches in each target target plate coaxial direction, for compiling
Code detection, and coding information is returned into master control system.Light source control module in master control system is according to practical optical system to be measured
The suitable star bore dia of parameter selection star tester.
The beam-expanding collimation system 3 of the present embodiment is off-axis reflection optical system, and existing off-axis reflection optical system has list
Two kinds of systems of mirror and bimirror.No matter in single mirror or bimirror system, primary mirror is the primary scattering surface of system, and stray light is main
From primary mirror, caused by the reason of generating primary scattering, is mirror surface roughness, therefore to primary mirror in Stray Light Test system
The roughness requirements on surface are harsh, usually all in nm magnitudes.Relative to aspherical, the processing technology of spherical surface is ripe, is more easy to obtain
The reflecting surface of high quality, therefore the present embodiment primary mirror uses spherical mirror, since cannot to meet the depth of parallelism excellent for single spherical mirror system
In 10 " and system wave aberration is better than the requirement of 2 λ rms, therefore the present embodiment uses bimirror system.
Include rotary components 8, axially stretch as shown in Fig. 2, the present embodiment two-way rotation type axial is directed toward adjustable light splitting system 4
Contracting component 9, spectrum groupware 7 are directed toward adjustment component 11, folding axis mirror 10 and support component 12, and spectrum groupware 7 is Amici prism, point
Light prism is set to one end of axial stretching component 9, and center is located on the optical axis of 3 outgoing beam of beam-expanding collimation system；It is directed toward
Adjustment component 11 is set to the other end of axial stretching component 9, and folding axis mirror 10 is set on direction adjustment component 11；Roll over axis mirror 10
The transmission optical axis of reflection optical axis and spectrum groupware 7 can pass through direction and adjust the angle adjustment of component 11 and realize the change of included angle
Change；The extended distance of axial stretching component 9 is adjustable, for realizing that the distance between folding axis mirror 10 and spectrum groupware 7 are adjusted, is referring to
It is located at entering for optical system by rolling over the reflected beams of axis mirror 10 apart from regulating guarantee during to adjustment 11 angle of component adjustment
Pupil position；The side of rotary components 8 and axial stretching component 9 are connected, and the other side is connected by shaft and support component 12, rotation
Component 8 drives spectrum groupware 7, axial stretching component 9, is directed toward adjustment component 11 and 10 going out around beam-expanding collimation system 3 of folding axis mirror
The optical axis rotation of irradiating light beam；In the present embodiment spectrum groupware 7, folding axis mirror 10 surface figure accuracy reach λ/50, wherein λ=
632.8nm hardly introduces aberration after being divided in this way.
Specific test process is as follows：
Light source control module control integrating sphere in master control system 6 is lighted；It is straight according to F numbers, the entrance pupil of optical system to be measured
The focal length f of diameter D and beam-expanding collimation system 3 calculate the star bore dia d that can make optical system diffraction to be measured, master control system control
Adjustable target mechanism 2 is rotated to suitable star hole；Integrating sphere illuminates selected star hole target, is formed by beam-expanding collimation system 3
Collimated light beam simulates infinite point target；Collimated light beam is directed toward light splitting group in adjustable light splitting system 4 by two-way rotation type axial
The transmitted light path of part 7, optical system to be measured are imaged this light path target；Master control system light source control module adjusts integrating sphere
Brightness is exported, image formed by optical system to be measured is made to reach 80% quantization digit；Master control system pose adjustment instrument module controls
First pose adjustment instrument and the second pose adjustment instrument carry out pose adjustment, make optical system to be measured to transmitted light path institute at image position
In the center of photoelectronic imaging device；Master control system reads the posture information of pose adjustment instrument at this time, as process data into
Row record；Since two-way rotation type axial is directed toward the transmission optical axis and folding axis mirror 10 of the spectrum groupware 7 in adjustable light splitting system 4
There are corresponding angled relationships between reflection optical axis, and be stored among master control system；Direction in master control system adjusts component
The angle of adjustment component, corresponding adjustment 7 transmission optical axis of spectrum groupware and the reflection optical axis for rolling over axis mirror 10 are directed toward in control module adjustment
Angle theta, and simultaneously according to the needs of actual test, control axial telescopic component 9 and move so that the reflected beams of folding axis mirror 10
Cover the entrance pupil of optical system to be measured；Master control system rotary components control module controls rotary components rotation, while recording at this time
Rotational angle ω, collection optical system image to be measured；Master control system light source control module controls integrating sphere output brightness L and increases
Add, [L, θ, ω] matrix relationship corresponding when ghost image occurs in the foundation acquisition image that repeats the above steps, and be stored in master control system
In system record, and final output is to result interface.
By constantly changing the angle theta of spectrum groupware transmission optical axis and the reflection optical axis for rolling over axis mirror, optical system to be measured is established
Measurement relationship (as shown in Figure 3) under different incident rays of uniting spheric coordinate system corresponding from optical axis angle theta between different brightness.
Meanwhile according to beam-expanding collimation system light-emitting window illumination formula, as follows, can calculating optical system normal imaging when entrance pupil at
Illumination ENormallyWith illumination E at entrance pupil when there is ghost imageGhost image(beam-expanding collimation system light-emitting window illumination is multiplied by each Reuter's mistake of spectrum groupware
Rate is the illumination formula reached at optical system entrance pupil).Quick measurement in this way Jing Guo entire measuring device, can establish light
Pupil luminance when system normal imaging and Pupil luminance proportionate relationship when there is ghost image.
Wherein：D is star bore dia, and unit is：mm；
F is the focal length of beam-expanding collimation system, unit mm；
LNormallyFor the integrating sphere light source brightness for measuring when optical system normal imaging, unit W/m2·sr；
LGhost imageFor the integrating sphere light source brightness for measuring when ghost image occurs in optical system, unit W/m2·sr；
τThoroughlyFor spectrum groupware transmitted light path transmitance；
τPointFor spectrum groupware light splitting optical path transmitance；
τ is the transmitance of beam-expanding collimation system.
The optical system ghost image measuring device of the present invention can be established by the measurement to optical system ghost image and form ghost
Ghost image and illumination at entrance pupil when normal imaging are formed as corresponding space points relationship, and by measuring also establish
Relationship.By the acquisition of above two information, elimination can be looked for by theoretical calculation, software emulation or reduces what ghost image was formed
Means change the structure of optical system accordingly, in the hope of developing more excellent optical system.
The optical system ghost image measuring device of the present invention is highly suitable in the optical systems such as detection class camera, star sensor
Using, by the change of light source, apply also in the test of high power laser optical system, it is worth to be widelyd popularize.
Claims (8)
1. a kind of optical system ghost image measurement method based on optical system ghost image measuring device, measuring device include along light path according to
Light source, beam-expanding collimation system, the two-way rotation type axial of secondary setting are directed toward adjustable light splitting system and optical system to be measured；The light
Larger Dynamic range brightness meter is provided on source, the exit end of the light source is provided with adjustable target mechanism；
It includes spectrum groupware, rotary components, axial stretching component, folding axis that the two-way rotation type axial, which is directed toward adjustable light splitting system,
Mirror is directed toward adjustment component and support component；
The spectrum groupware is set to one end of axial stretching component, and the center of spectrum groupware is located at beam-expanding collimation system emergent light
On the optical axis of beam；
The other end for being directed toward adjustment component and being set to axial stretching component；
The folding axis mirror is installed on direction adjustment component；Between the reflection optical axis and the transmission optical axis of spectrum groupware of the folding axis mirror
Included angle pass through direction adjust component adjustment；Folding the distance between axis mirror and spectrum groupware pass through axial stretching component tune
It is whole；
The rotary components side and axial stretching component are connected, and the rotary components other side is connected by shaft with support component；
The optical axis coincidence of the shaft of rotary components and the outgoing beam of beam-expanding collimation system；Rotary components drive axial stretching component, divide
Optical assembly, folding axis mirror and direction adjustment component rotation；
It is characterized in that：Include the following steps：
Step 1：Point bright light source, waits for its stabilization；
Step 2：According to the parameter of optical system to be measured, star bore dia is calculated using formula (1), and from adjustable target mechanism
Star hole is selected to move at the light-emitting window of integrating sphere light source；
Wherein：D is star bore dia, unit mm；
λ is operating central wavelength, unit mm；
F is the focal length of beam-expanding collimation system, unit mm；
D is the Entry pupil diameters of optical system to be measured, unit mm；
Step 3：Start optical system to be measured, the transmitted light beam of spectrum groupware is imaged；Adjust the first pose adjustment instrument and second
The posture of pose adjustment instrument so that the optical axis or the optical axis of optical system to be measured are parallel with the optical axis of beam-expanding collimation system；
Step 4：Adjust light-source brightness L；It keeps the brightness, adjustment to be directed toward adjustment component, controls axial telescopic component, make folding axis
The outgoing beam of mirror is located at the entrance pupil of optical system to be measured；Rotary components rotation is adjusted simultaneously；Often adjustment is primary to be directed toward adjustment
The reflection optical axis of component and rotary components, record folding axis mirror is directed toward angle theta and rotation between spectrum groupware transmission optical axis direction
Turn component rotational angle ω；Collection optical system image to be measured checks that whether there is or not ghost images in acquired image, when screening has ghost image
Corresponding L, θ and ω；
Step 5：Change light-source brightness L, repeats step 4.
2. optical system ghost image measurement method according to claim 1, it is characterised in that：Further include
Step 6：Pupil luminance when calculating optical system normal imaging to be measured by formula (2) and formula (3) and there is ghost image
When Pupil luminance；
Wherein：D is star bore dia, unit mm；
F is the focal length of beam-expanding collimation system, unit mm；
LNormallyFor the light-source brightness for measuring when optical system normal imaging, unit W/m2·sr；
LGhost imageFor the light-source brightness for measuring when ghost image occurs in optical system, unit W/m2·sr；
τThoroughlyFor spectrum groupware transmitted light path transmitance；
τPointFor spectrum groupware light splitting optical path transmitance；
τ is the transmitance of beam-expanding collimation system.
3. optical system ghost image measurement method according to claim 1, it is characterised in that：Further include master control system, it is described
Master control system includes light source control module, adjustable target mechanism controls module, rotary components control module, is directed toward adjustment component control
Molding block and axial stretching component control module；
The output end of the light source control module is connect with light source；The output end of the adjustable target mechanism controls module with it is adjustable
Target mechanism connects；The output end of the rotary components control module is connect with rotary components；The direction adjustment component control
The output end of module is connect with adjustment component is directed toward；The output end of the axial stretching component control module and axial stretching component
Connection.
4. optical system ghost image measurement method according to claim 1, it is characterised in that：It further include the first pose adjustment instrument
With the second pose adjustment instrument, the first pose adjustment instrument is located at outside the optical axis of beam-expanding collimation system outgoing beam, and described second
Pose adjustment instrument carries optical system to be measured；
The master control system further includes the first pose adjustment instrument and the second pose adjustment instrument control module, first pose adjustment
The output end and the first pose adjustment instrument of instrument and the second pose adjustment instrument control module and the connection of the second pose adjustment instrument.
5. optical system ghost image measurement method according to claim 1, it is characterised in that：The adjustable target mechanism includes
Multiple target replaces turntable and the plurality of target plate replaced automatically in multiple target on turntable is arranged automatically；The plurality of target
Plate is star tester；The star bore dia of the star tester is different.
6. optical system ghost image measurement method according to any one of claims 1 to 5, it is characterised in that：The light source is product
Bulb separation light source, the integrating sphere light source are xenon lamp and halogen tungsten lamp mixing light source, and the emitting light path of xenon lamp and halogen tungsten lamp is equipped with can
Become diaphragm.
7. optical system ghost image measurement method according to any one of claims 1 to 5, it is characterised in that：The beam-expanding collimation
System is off-axis reflection optical system, and the off-axis reflection optical system uses bimirror form, and wherein primary mirror is spherical mirror.
8. optical system ghost image measurement method according to any one of claims 1 to 5, it is characterised in that：The spectrum groupware
For Amici prism, the surface figure accuracy of the Amici prism and the folding axis mirror reaches λ/50, wherein λ=632.8nm.
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| CN102564731A (en) * | 2010-12-16 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | Device for measuring focal length and wavefront distortion of lens |
| CN103308282A (en) * | 2013-06-09 | 2013-09-18 | 中国科学院西安光学精密机械研究所 | Efficient measuring system and method for transmittance of reflecting telescoping system |
| CN103364011A (en) * | 2013-07-11 | 2013-10-23 | 中国科学院西安光学精密机械研究所 | Super-large visual field multi-target scenery simulation system |
| CN204008076U (en) * | 2014-08-28 | 2014-12-10 | 汉口学院 | A kind of optical system general performance test |
| CN206114256U (en) * | 2016-08-24 | 2017-04-19 | 中国科学院西安光学精密机械研究所 | Optical system ghost image measuring device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016027797A1 (en) * | 2014-08-19 | 2016-02-25 | 国立大学法人徳島大学 | Device for measuring material by using ghost imaging |
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| CN102564731A (en) * | 2010-12-16 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | Device for measuring focal length and wavefront distortion of lens |
| CN103308282A (en) * | 2013-06-09 | 2013-09-18 | 中国科学院西安光学精密机械研究所 | Efficient measuring system and method for transmittance of reflecting telescoping system |
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| CN204008076U (en) * | 2014-08-28 | 2014-12-10 | 汉口学院 | A kind of optical system general performance test |
| CN206114256U (en) * | 2016-08-24 | 2017-04-19 | 中国科学院西安光学精密机械研究所 | Optical system ghost image measuring device |
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