CN112964454A

CN112964454A - Detection system and detection method

Info

Publication number: CN112964454A
Application number: CN202110177805.3A
Authority: CN
Inventors: 陈鲁; 方一; 陈超龙; 魏林鹏; 黄有为
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Skyverse Ltd; Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2021-02-05
Filing date: 2021-02-09
Publication date: 2021-06-15

Abstract

The application provides a detecting system for detect the imaging quality of the camera lens that awaits measuring, detecting system includes: a light source for emitting illumination light; the pinhole device comprises a body and a through hole arranged on the body, the through hole is positioned on the light path of the illuminating light, so that the illuminating light at least partially passes through the through hole to form detection light, and the pinhole device can generate relative motion relative to the light source so that the detection light is incident to the lens to be detected at different angles relative to the surface of the pinhole device body; and the detector is used for receiving the detection light emitted from the lens to be detected and detecting the imaging quality of the lens to be detected according to the received detection light. The application also provides a detection method.

Description

Detection system and detection method

Technical Field

The application relates to the field of optical lens imaging quality detection, in particular to a detection system and a detection method applied to the detection system.

Background

The lens is an important optical element in an optical system, and is mainly used for imaging an object to be measured to a Charge Coupled Device (CCD), so that the CCD can clearly acquire information of the object to be measured. The imaging quality is an important index of the lens, and is usually evaluated by the size (spot size) of an image point when light emitted from a point light source is focused onto a CCD image plane through the lens. The smaller the size of the imaging image point, the higher the imaging quality of the lens. By evaluating the size and shape of the image point, the light field distribution of the lens output image, namely the Point Spread Function (PSF), can be known, and the imaging quality of the lens can be further evaluated.

In one evaluation method in the prior art, a standard particle is excited by laser to generate fluorescence or generate scattered light, the fluorescence or the scattered light is used for imaging, the standard particle is used as a point light source, and the size of an image point on a phase surface after imaging is evaluated. Wherein the standard particles are particles (typically ten or hundred nanometer size) having a size much smaller than the optical resolution of the lens.

However, the above-mentioned evaluation method requires the construction of a relatively complex and costly evaluation system. Therefore, how to reduce the complexity and cost of the evaluation system on the basis of accurately evaluating the imaging quality of the lens is an urgent problem to be solved.

Disclosure of Invention

One aspect of the present application provides a detection system for detecting an imaging quality of a lens to be detected, the detection system includes:

a light source for emitting illumination light;

the pinhole device comprises a body and a through hole arranged on the body, the through hole is positioned on the light path of the illuminating light, so that the illuminating light at least partially passes through the through hole to form detection light, and the pinhole device can generate relative motion relative to the light source so that the detection light is incident to the lens to be detected at different angles relative to the surface of the pinhole device body; and

and the detector is used for receiving the detection light emitted from the lens to be detected and detecting the imaging quality of the lens to be detected according to the received detection light.

The application on the other hand provides a detection method, which is applied to a detection system, wherein the detection system comprises a light source, a pinhole device and a detector, the pinhole device comprises a body and a through hole arranged on the body, and the detection method comprises the following steps:

arranging the pinhole device on a focal plane of a lens to be detected;

causing the light source to emit illumination light so that the illumination light at least partially passes through the through hole to form detection light; and

the pinhole device and the light source are controlled to generate relative motion, so that the detection light is guided to the lens to be detected at different angles, and the detector is controlled to receive the detection light emitted from the lens to be detected so as to detect the imaging quality of the lens to be detected.

According to the detection system and the detection method, the point light source can be simulated through the combination of the light source and the pinhole device, the imaging quality of the lens to be detected can be detected by the detector receiving the detection light emitted by the point light source, and compared with the mode of detecting the imaging quality of the lens to be detected by using laser as exciting light to excite fluorescence or generate scattered light, the cost of the detection system is saved, and the structural complexity of the detection system is reduced; on the basis, the pinhole device and the light source can generate relative motion so that the detection light is guided to the lens to be detected at different angles, and therefore the condition that the detection light is incident at different angles can be simulated, and the imaging quality of the lens to be detected under the conditions can be detected respectively.

Drawings

Fig. 1 is a schematic block structure diagram of a detection system according to an embodiment of the present disclosure.

Fig. 2 is a schematic structural diagram of a detection system according to an embodiment of the present application.

Fig. 3A is a schematic view of a configuration of the pinhole device of fig. 2.

Fig. 3B is a schematic structural view of the pinhole device of fig. 2.

Fig. 4 is a schematic view of the translation and rotation of the pinhole device of fig. 2.

Fig. 5 is a schematic flowchart of a detection method according to an embodiment of the present application.

Fig. 6A is a schematic diagram of an image of a detector when the pinhole device is perpendicular to the optical axis of the lens to be measured. .

Fig. 6B is a schematic view of the detector imaging when the pinhole device is rotated 45 degrees.

Fig. 7 is a schematic structural diagram of a detection system according to a second embodiment of the present application.

Description of the main elements

Detection system

100, 300

Light source

10, 310

Pinhole device

20, 320

Body

21, 321

Through-

holes

22, 322

Depth d1

Diameter d2

Probe

30, 330

Neutral gray scale mirror 40

Light directing assembly 50

First reflector 51

Second reflecting mirror 52

Field of view plane P1

Plane of rotation P2

Detection plane P3

Illumination light L1

Detection light L2

Lens 200 to be tested

Steps S1, S2, S3

The following detailed description will further illustrate the invention in conjunction with the above-described figures.

Detailed Description

The application provides a detection system and a detection method applied to the detection system, which are used for detecting the imaging quality of a lens to be detected. The type, the structural parameters and the like of the lens to be measured are not limited in the application. When the imaging quality of the lens to be detected is detected, the lens to be detected is placed in a light path of the detection system, and the imaging quality of the lens to be detected is detected by detecting light emitted by the lens to be detected.

Example one

Referring to fig. 1, in the present embodiment, a detection system 100 is used for detecting the imaging quality of a lens 200 to be detected. The detection system 100 includes a light source 10, a pinhole device 20, and a detector 30.

The light source 10 is used to emit illumination light L1. The pinhole device 20 is located in the optical path of the illumination light L1, and the illumination light L1 can pass through the pinhole device 20. The light emitted from the pinhole device 20 is defined as detection light L2. The lens 200 to be measured is located on the optical path between the pinhole device 20 and the detector 30, and the lens 200 to be measured is used for focusing and imaging the detection light L2 to the detector 30. The detector 30 is used for evaluating the imaging quality of the lens 200 to be tested according to the received detection light L2 and the detection result. In this embodiment, the detector 30 is configured to detect the imaging quality of the lens 200 to be measured according to the size of the image point of the received detection light L2 on the detector 30. The larger the image point is, the worse the imaging quality of the lens 200 to be measured is; the smaller the image point is, the better the imaging quality of the lens 200 to be measured is.

Referring to fig. 2, the light source 10 may be a narrow band or broad spectrum light source. The illumination light L1 emitted by the light source 10 may be infrared light, ultraviolet light, or visible light. The wavelength or wavelength range of the illumination light L1 depends on the wavelength band in which the lens 200 to be measured operates. That is, the wavelength or wavelength range of the illumination light L1 is within the wavelength range in which the lens 200 to be measured operates. For example, when the lens 200 to be tested operates in the wavelength range of infrared light, the light source 10 is an infrared light source, and the illumination light L1 is infrared light, so as to detect the imaging quality of the lens 200 to be tested in the operating band thereof.

Referring to fig. 2, fig. 3A and fig. 3B, the pinhole device 20 includes a body 21 and a through hole 22 formed on the body 21. In this embodiment, the body 21 is a sheet structure with uniform thickness and has two parallel surfaces. The through hole 22 vertically penetrates the two surfaces of the body 21, that is, the depth direction of the through hole 22 is parallel to the thickness direction of the body 21. Then, the depth d1 of the through hole 22 is the same as the thickness of the body 21. The smaller the depth of the through hole 22 is, the more advantageous it is to cause the illumination light L1 to pass through the through hole 22, and the smaller the difference in the detection light size when the pinhole device 20 is at different rotation angles when the depth of the through hole 22 is smaller. The body 21 is made of opaque material, and the illuminating light L1 can at least partially pass through the through hole 22 (part of the illuminating light L1 can be reflected or absorbed by the body 21).

The light source 10 and the pinhole device 20 are used to simulate a point light source together, and in order to improve the simulation effect, in this embodiment, the through hole 22 is a cylindrical through hole with a roundness greater than 90%. The closer the roundness of the through hole is to 1 (i.e., the closer to an ideal circle), the better the point light source simulation effect is. The diameter d2 of the through-hole 22 is constant (or equal) in the depth direction of the through-hole 22 (i.e., the thickness direction of the body 21), which is advantageous for preventing the illumination light L1 from hitting on the hole wall and being reflected by the hole wall, and thus is advantageous for allowing the illumination light L1 to pass through the through-hole 22. In this embodiment, the body 21 is configured to be a disk shape with uniform thickness, and the through hole 22 is concentric with the body 21, which is beneficial to simplifying the manufacturing process and improving the aesthetic property. In order to improve the detection precision of the imaging quality, the diameter of the through hole 22 should be much smaller than the optical resolution of the lens 200 to be detected. In this embodiment, the diameter of the through hole 22 is smaller than 1/10 of the optical resolution of the lens 200 to be measured.

Referring to FIG. 4, X, Y and Z axes are defined, which are perpendicular to each other. The X-axis and the Y-axis define a field of view plane P1. The field plane P1 is a plane perpendicular to the optical axis of the lens 200 to be measured. The Z-axis is perpendicular to the viewing plane P1 and parallel to the optical axis of the lens 200 under test.

In this embodiment, the pinhole device 20 can move relative to the lens 200 to be measured and the light source 10. So that the detection light L2 emitted from the pinhole device 20 can be incident to the lens 200 to be measured at different angles, and the point light source is thereby simulated to be incident to the lens 200 to be measured at different angles, so that the imaging quality of the lens 200 to be measured under the condition of the above different angles is detected by the detector 30, which is beneficial to improving the detection precision of the imaging quality of the lens 200 to be measured. In an alternative embodiment, the pinhole device 20 may be configured to move only relative to the light source 10.

In this embodiment, the pinhole device 20 can be translated along the Z-axis (i.e. along the optical axis of the lens 200 to be measured) for focusing. The lens 200 has a focal plane, and the pinhole device 20 is disposed on the focal plane of the lens 200 by translating the pinhole device 20 along the Z-axis. That is, the pinhole device 20 is disposed at the focus of the lens 200 to be measured. That is, the distance between the pinhole device 20 and the lens 200 is the focal length of the lens 200, and the distance between the pinhole device 20 and the lens 200 is the perpendicular distance between the geometric center of the pinhole device 20 and the lens 200.

In this embodiment, the pinhole device 20 may also be translated in the field of view plane P1, so that the pinhole device 20 and the light source 10 may simulate point light sources at different positions in the field of view of the lens 200 to be measured, and thus the detector 30 may detect the detection light L2 emitted from point light sources at different positions in the field of view of the lens 200 to be measured. Due to off-axis aberration of the lens 200 to be measured, the size and shape of the image point will change with the distance of the vertical axis. Typically, the further off-axis the image point becomes larger in size and non-gaussian in shape. Therefore, by controlling the pinhole device 20 to translate in the field plane P1, it is beneficial to detect the detection light L2 incident from the point light sources at a plurality of different positions in the field of view of the lens 200 under test.

The Y-axis and the Z-axis define a rotation plane P2, the rotation plane P2 being perpendicular to the field of view plane P1. In this embodiment, the pinhole device 20 may also rotate within the plane of rotation P2. That is, the pinhole device 20 can rotate around the axis X to simulate the detection light L2 emitted from a point light source to be incident on the detector 30 at different angles. So that the detector 30 can detect the detection light L2 incident from different angles.

Under actual use conditions, the optical axis of the lens 200 to be measured may not be perpendicular to the detection plane P3 of the detector 30, in which case the image point may be degraded, the size may become large, and the shape may become non-gaussian. In the present embodiment, the pinhole device 20 is controlled to rotate, so as to simulate the detection light L2 received by the detector 30 when there are different angular relationships between the optical axis of the lens 200 to be detected and the detection plane P3 of the detector 30.

In one embodiment, the inspection system 100 may include a driving device (not shown) electrically connected to the pinhole device 20 to drive the pinhole device 20 to translate along the Z-axis or translate within the field of view plane P1 or rotate within the rotation plane P2. In another embodiment, the needle hole device 20 may be fixed on a platform, and the platform is driven by a driving device to translate or rotate so as to control the translation or rotation of the needle hole device 20.

Referring to fig. 2, in the present embodiment, the detector 20 is an area-array camera. The detector 30 has a sensing plane P3. The detector 30 is configured to receive the detection light L2 and detect the spot (i.e., image point) size of the detection light L2 received by the sensing plane P3. The size of the light spot can be used for representing the imaging quality of the lens 200 to be measured: the larger the light spot is, the worse the imaging quality of the lens 200 to be measured is represented; the smaller the light spot is, the better the imaging quality of the lens 200 to be measured is represented.

In this embodiment, the detection apparatus 100 further includes a neutral gray-scale mirror 40 located on the optical path of the illumination light L1. The neutral gray-scale mirror 40 is used for modulating the light intensity of the illumination light L1 and for guiding the illumination light L1 after the light intensity is modulated to the pinhole device 20. In this embodiment, the neutral gray-scale mirror 40 is used to filter out part of the light in the illumination light L1, that is, the neutral gray-scale mirror 40 is used to reduce the light intensity of the illumination light L1, so as to avoid that the light is too strong to affect the detection accuracy.

In this embodiment, the detection apparatus 100 further comprises a light directing assembly 50 located between the light source 10 and the pinhole apparatus 20. The light directing assembly 50 is used to direct the illumination light L1 to the pinhole device 20. In this embodiment, the light guiding assembly 50 includes a first reflector 51 and a second reflector 52, and the illumination light L1 is reflected to the pinhole device 20 through the first reflector 51 and the second reflector 52 in sequence. By changing the angle of arrangement of the first reflector 51 and the second reflector 52, the angle at which the illumination light L1 is incident on the pinhole device 20 can be changed.

Referring to fig. 5, the present embodiment further provides a detection method applied to the detection apparatus 100. The detection method comprises the following steps:

step S1, arranging the pinhole device on the focal plane of the lens to be measured;

a step S2 of causing the light source to emit illumination light so that the illumination light at least partially passes through the through hole to form detection light;

and step S3, controlling the pinhole device and the light source to generate relative motion so that the detection light is guided to the lens to be detected at different angles, and controlling the detector to receive the detection light emitted from the lens to be detected so as to detect the imaging quality of the lens to be detected.

Referring to fig. 2 and 4, in step S1, the lens 200 to be tested is placed in the optical path of the inspection system 100, and specifically, the lens 200 to be tested is placed between the probe 30 and the pinhole device 20. And controlling the pinhole device 20 to move in the Z-axis direction until the pinhole device 20 is located at the focal plane of the lens 200 to be measured.

In step S2, the light source 10 is controlled to emit illumination light L1. After the illumination light L1 at least partially passes through the pinhole device 20, detection light L2 is formed. The detection light L2 is projected onto the detection plane P3 of the detector 30 through the guidance of the lens 200 to be measured.

In step S3, the probe 30 is configured to receive the detection light L2 a plurality of times. The detector 30 is configured to evaluate the imaging quality of the lens 200 to be measured according to the size of a light spot (image point) incident on the detection plane P3 by the detection light L2.

An initial state is defined, and in the first time period, the pinhole device 20 is in the initial state and is located on the focal plane of the lens 200 to be measured. In this embodiment, the focal plane of the lens 200 to be measured is the aforementioned view plane P1. In the first time period, the light source 10 is controlled to be turned on, the detector 30 may receive the detection light L2 emitted from the pinhole device 20, and the detector 30 may obtain the imaging quality of the lens 200 to be measured according to the detection light L2 received at this time.

In the second period, the pinhole device 20 is rotated to have the first angle θ 1 with respect to the initial state, and the imaging quality of the lens 200 to be measured is acquired based on the detection light L2 received at this time.

By repeating the steps of the second period of time in this manner, the detection light L2 received by the pinhole device 20 when having the angles θ 2, θ 3, and θ 4 … … can also be acquired. The probe 30 can detect the imaging quality of the lens 200 under test in the case where the detection light L2 is incident to the detection plane P3 at different angles according to the detection light L2 received multiple times as described above.

In the third period, the pinhole device 20 is translated to the field of view coordinates (x1, y1) within the field of view plane P1, the illumination light L1 at least partially passes through the pinhole device 20, the detection light L2 is formed, the detector 30 receives the detection light L2 emitted when the pinhole position 20 is at the field of view coordinates (x1, y1), and the imaging quality of the lens 200 to be measured is acquired from the detection light L2.

The step of the third time period is repeated in this way, and the detection light L2 emitted by the pinhole device 20 at the field-of-view coordinates (x2, y2), (x3, y3), (x4, y4) … … may also be received. The probe 30 may detect the imaging quality of the lens 200 to be measured in a case where the detection light L2 is incident to the detection plane P3 at different angles according to the detection light L2 received at the above-described plurality of third periods.

During the fourth period, the angles of the first mirror 51 and the second mirror 52 may also be adjusted. The angle at which the illumination light L1 is incident on the pinhole device 20 can be adjusted by adjusting the angles of the first mirror 51 and the second mirror 52. By repeating the step of the fourth period, the detector 30 may receive and record the second detection light L2 a plurality of times according to the angle changes of the first and

second mirrors

51 and 52, respectively. The detector 30 can detect the imaging quality when the lens 200 to be detected receives the detection light L2 with different angles according to the second detection light L2 received and recorded for multiple times.

Through the above measurement process, it is possible to compare the difference in imaging quality (resolution) of the lens 200 to be measured for different scenes (position in the plane of the field of view, rotation angle from the initial state, incident angle of illumination light), and to confirm the field angle size of the lens 200 to be measured.

In this embodiment, the specific manner of acquiring the signal by the detector 30 includes: under the same scene, a plurality of detection optical signals are acquired in a short time, and the acquired detection optical signals are averaged to acquire a final signal, wherein the signal has low noise and high accuracy. Referring to fig. 6A and 6B, the detector 30 is used for imaging according to the received detection light L2. After the averaging processing, an XY coordinate system is established in the acquired image with the center of the light spot formed by the detection light L2 as the origin, and the light intensity distribution data of the light spot is captured in two dimensions of X and Y, respectively, and the light intensity distribution of the light spot conforms to the normal distribution rule in both the X and Y directions, and gaussian fitting can be performed on the light intensity distribution data by using a gaussian function.

Watch I (corresponding to FIG. 6A)

Direction	Gaussian fitting sigma	Radius of
			X	1.07	35.31μm
Y	1.05	34.65μm

Watch two (corresponding to FIG. 6B)

Direction	Gaussian fitting sigma	Radius of
			X	1.29	42.57μm
Y	1.28	42.24μm

In the detection method and the detection system 100 provided by the embodiment, by arranging the light source 10 and the pinhole device 20, the illumination light L1 emitted by the light source 10 passes through the through hole 22 in the pinhole device 20 to simulate a point light source, the light emitted by the pinhole device 20 is defined as the detection light L2, and the detector 30 receives the detection light L2 to detect the imaging quality of the lens 200 to be detected, so compared with a method of detecting the imaging quality of the lens 200 to be detected by using laser as excitation light to excite fluorescence or generate scattered light, the cost of the detection system 100 is saved, and the structural complexity of the detection system 100 is reduced. On the basis, the pinhole device 20 and the light source 10 can generate relative movement (the pinhole device 20 translates in the focal plane and rotates in the rotation plane) so that the detection light L2 is guided to the lens 200 to be measured at different angles, thereby simulating the situation that the detection light L2 is incident at different angles, and respectively detecting the imaging quality of the lens 200 to be measured under the above situations.

Example two

Referring to fig. 7, the main differences between the detection system 300 of the present embodiment and the detection system of the first embodiment are: the structure of the pinhole device 320 in this embodiment is different from that in the first embodiment.

In this embodiment, the pinhole device 320 includes a body 321 and a plurality of through holes 322 disposed on the body 321. A plurality of through holes 322 are arranged in an array including a plurality of rows and a plurality of columns on the body 321. In the embodiment, the body 321 is configured to be a rectangular sheet structure to adapt to the shape of the array formed by the plurality of through holes 322.

When the illumination light L1 passes through different through holes 322 of the body 321 at different times, the detection light L2 emitted from the pinhole device 320 enters the lens 200 to be measured at different angles at different times. Then, by controlling the illumination light L1 to exit from different through holes 322 at different time intervals, the detection light L2 that enters the lens 200 to be tested at different angles at different time intervals can be obtained. That is, by controlling the illumination light L1 to exit from different through holes 322 at different time intervals, it is possible to simulate light exiting from point light sources at different positions in the field plane P1.

Therefore, in the present embodiment, when the inspection system 300 is in operation, the illumination light L1 can be controlled to be emitted from different through holes 322 at different time intervals, and the inspection light L2 emitted from point light sources at different positions in the field plane P1 can be detected, thereby reducing the number of translations of the pinhole device 320 in the field plane P1. When the area of the pinhole device 320 is equal to or larger than the area of the field of view of the lens 200 to be measured, it may not be necessary to translate the pinhole device 320 within the field of view plane P1.

By reducing the number of translations of the pinhole device 320 in the field of view plane P1, or by directly omitting the step of translating the pinhole device 320 in the field of view plane P1, on the one hand, it is beneficial to shorten the detection time; on the other hand, when the step of translating the pinhole device 320 in the field plane P1 is directly omitted, there is no need to provide a structure for driving the pinhole device 320 to translate in the field plane P1, which is beneficial to simplifying the structure of the detection system 300. On this basis, in the process of translating the pinhole device 320, there is a risk that the pinhole device 320 may deviate from the focal plane of the lens 200 to be measured due to improper operation, which affects the detection accuracy. Therefore, the number of translations of the pinhole device 320 in the field of view plane P1 is reduced, or the step of translating the pinhole device 320 in the field of view plane P1 is directly omitted, which is also beneficial to reducing the risk that the pinhole device 320 deviates from the focal plane of the lens 200 to be measured, thereby improving the accuracy of detecting the imaging quality.

In an alternative embodiment, the illumination light L1 can be controlled to pass through all the through holes 322 of the pinhole device 320 at the same time, and the detector 330 can receive multiple detection light beams L2 at the same time, which is beneficial to further shorten the detection time.

In this modified embodiment, the detection system 300 may further include a light shaping element (not shown) disposed between the light source 310 and the pinhole device 320 and in the optical path of the illumination light L1 for adjusting the intensity distribution of the illumination light L1, so that the light spot of the illumination light L1 on the pinhole device 320 is enough to cover all the through holes 322 of the pinhole device 320 and the intensity at each through hole 322 is uniform. In this embodiment, the uniformity of the light intensity of the light spot on the pinhole device 320 by the illuminating light L1 is greater than 95% (the uniformity of the light intensity can be calculated by software).

The present embodiment further provides a detection method, which is substantially the same as the detection method in the first embodiment, and the difference is mainly that the number of the third time periods in the first embodiment can be reduced, or the step of the third time period in the first embodiment can be directly omitted.

The detection system 300 and the detection method provided by the embodiment can achieve all the advantages as described in the first embodiment. On this basis, the pinhole device 320 includes a plurality of through holes 322, and the number of times of translation of the pinhole device 320 in the field of view plane P1 can be reduced, or the step of translating the pinhole device 320 in the field of view plane P1 can be directly omitted, so that on one hand, the detection duration can be shortened, and on the other hand, the risk that the pinhole device 320 deviates from the focal plane of the lens 200 to be detected can be reduced, and the accuracy of detecting the imaging quality can be improved.

It will be appreciated by those skilled in the art that the above embodiments are illustrative only and not intended to be limiting, and that suitable modifications and variations may be made to the above embodiments without departing from the true spirit and scope of the invention.

Claims

1. A detection system for detecting the imaging quality of a lens to be detected is characterized by comprising:

a light source for emitting illumination light;

2. The inspection system of claim 1 wherein said pinhole device is further capable of relative motion with respect to said lens under test.

3. The inspection system of claim 1, wherein the through hole is circular and has a diameter less than 1/10 of the optical resolution of the lens under test.

4. The inspection system of claim 1, wherein the pinhole device is movable along an optical axis of the lens under test such that a distance between the pinhole device and the lens under test is a focal length of the lens under test.

5. The inspection system of claim 1, wherein the pinhole device is translatable in a focal plane of the lens under test.

6. The inspection system of claim 1 wherein the pinhole device is rotatable about an axis perpendicular to the optical axis of the lens under test and the axis is in the focal plane of the lens under test.

7. A test system according to any one of claims 4 to 6, further comprising drive means for driving movement of the pinhole means.

8. The detection system of claim 1, further comprising a neutral gray scale mirror positioned in an optical path of the illumination light, the neutral gray scale mirror for modulating an intensity of the illumination light.

9. A detection system according to claim 1 further comprising a light directing assembly located in the path of the illumination light, the light directing assembly being adapted to adjust the angle at which the illumination light is incident on the pinhole device.

10. The inspection system of claim 1, wherein the pinhole device comprises the body and a plurality of through holes opened in the body, the illumination light passing through the plurality of through holes to form the inspection light.

11. The detection system according to claim 10, wherein the illumination light passes through the plurality of through holes in a time-sharing manner or the illumination light passes through the plurality of through holes simultaneously.

12. A detection system according to claim 10, further comprising a light shaping element in the path of the illumination light for adjusting the intensity distribution of the illumination light.

13. A detection method is applied to a detection system and is characterized in that the detection system comprises a light source, a pinhole device and a detector, the pinhole device comprises a body and a through hole arranged on the body, and the detection method comprises the following steps:

arranging the pinhole device on a focal plane of a lens to be detected;

14. The detection method of claim 13, wherein the step of controlling the relative movement of the pinhole device and the light source comprises:

and controlling the pinhole device to translate in the focal plane of the lens to be detected.

15. The detection method of claim 13, wherein the step of controlling the relative movement of the pinhole device and the light source comprises:

and controlling the pinhole device to rotate around an axis which is perpendicular to the optical axis of the lens to be detected, and the axis is positioned in the focal plane of the lens to be detected.