CN112630983A - Laser system, laser-induced damage testing system and method - Google Patents
Laser system, laser-induced damage testing system and method Download PDFInfo
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- G—PHYSICS
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
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Abstract
The invention discloses a laser system, wherein a laser generating device is used for generating laser beams and transmitting the laser beams to a beam control device, the beam control device is used for shaping the laser beams to control the size of a light spot formed by output laser, and a converging device is used for converging the laser beams emitted by the beam control device and emitting the laser beams. The laser system can adjust the size of the focusing spot of the output laser, can be applied to the laser-induced damage test of optical elements, and is beneficial to improving the test efficiency and the test accuracy. The invention also discloses a laser-induced damage testing system and a laser-induced damage testing method.
Description
Technical Field
The invention relates to the technical field of optical systems, in particular to a laser system. The invention also relates to a laser-induced damage testing system and method.
Background
With the development of laser technology, laser devices have been widely used in medical, industrial, and scientific industries, and meanwhile, the demand for output energy of laser devices has been increasing, however, with the increasing output energy of laser devices, laser-induced damage of various optical elements therein has become one of the most important factors restricting the increasing output energy of laser devices.
The method for evaluating the damage threshold of the optical element mainly comprises ISO21254, wherein the damage threshold of the element is obtained by performing small-spot multi-point multi-energy irradiation test on the surface of the element to be tested and statistically analyzing a damage probability curve. However, the test method has a large test error, and the damage characteristic of the element cannot be accurately characterized.
Therefore, the damage density of the optical element under irradiation of certain laser energy is adopted to represent when the damage characteristic of the optical element is evaluated at present, the method obtains the damage point density of the test area by scanning and irradiating the test area point by point, the damage point density can more intuitively reflect the damage condition of a damage precursor, and further can more accurately represent the damage characteristic of the element.
Disclosure of Invention
The invention aims to provide a laser system which can be applied to the damage characteristic test of an optical element, can adjust the spot size of output laser and is beneficial to improving the test efficiency and the test accuracy. The invention also provides a laser-induced damage testing system and method.
In order to achieve the purpose, the invention provides the following technical scheme:
a laser system comprises a laser generating device, a beam control device and a converging device, wherein the laser generating device is used for generating laser beams and enabling the laser beams to be incident to the beam control device, the beam control device is used for shaping the laser beams to control the size of a light spot formed by output laser, and the converging device is used for converging the laser beams emitted by the beam control device and emitting the laser beams.
Preferably, the beam control device comprises a convex lens and a concave lens, and the beam control device is specifically used for shaping the laser beam by changing the distance between two adjacent lenses or the distance between a lens and the converging device.
Preferably, the laser device further comprises an energy control device for regulating and controlling the energy of the laser beam.
Preferably, the laser device further comprises a first light splitting device and a beam quality monitoring device, the first light splitting device is used for splitting the laser beam emitted by the converging device into sub-beams, and the beam quality monitoring device is used for acquiring the energy distribution of the sub-beams.
Preferably, the laser device further comprises a second light splitting device and an energy measuring device, the second light splitting device is used for splitting the laser beam emitted by the converging device into the sub-beams, and the energy measuring device is used for measuring the energy of the sub-beams.
Preferably, the energy distribution data of the laser beam is obtained according to the following formula:
Where M denotes a relative energy distribution of the measured laser beam, E denotes a total energy of the measured laser beam, and M' denotes actual energy distribution data of the obtained laser beam.
A laser-induced damage test system comprises a laser system for projecting laser to the surface of a test element, wherein the laser system is adopted.
A laser induced damage testing method using the laser system described above, the method comprising:
when the laser generating device outputs laser, acquiring surface information of a test point on a test element, and triggering and starting a first timer;
when the set time of the first timer is over, moving the next test point of the test element to the target position, and triggering to start a second timer;
and when the set time of the second timer is over, if the next test point of the test element reaches the target position, acquiring the surface information of the next test point on the test element, and triggering and starting a third timer.
Preferably, when the time set by the second timer is over, if the next test point of the test element does not reach the target position, the laser beam generated by the laser system is blocked from being projected to the next test point of the test element.
Preferably, the method comprises the following steps:
for each test point of a test area on a test element, obtaining a damage morphology image corresponding to the test point according to images of the test point before and after being irradiated by laser;
splicing the damage morphology images corresponding to the test points of the test area;
and obtaining a damage test result of the test area according to the spliced image.
According to the technical scheme, the laser system comprises a laser generating device, a beam control device and a converging device, wherein the laser generating device is used for generating laser beams and enabling the laser beams to be incident to the beam control device, the beam control device is used for shaping the laser beams to control the size of a light spot formed by output laser, and the converging device is used for converging the laser beams emitted by the beam control device and emitting the laser beams. The laser system can adjust the size of the light spot of the output laser, can be applied to the damage characteristic test of the optical element, and is beneficial to improving the test efficiency.
The laser-induced damage testing system provided by the invention can achieve the beneficial effects.
The laser-induced damage testing method provided by the invention can achieve the beneficial effects.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic diagram of a laser system according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a laser system according to yet another embodiment of the present invention;
FIGS. 3(a) and 3(b) are schematic views of the arrangement of the convex lens, the concave lens and the converging means in two arrangements, respectively;
fig. 4 is a flowchart of a laser-induced damage testing method according to an embodiment of the present invention;
FIG. 5 is a flowchart of a laser-induced damage testing method according to another embodiment of the present invention;
FIG. 6 is a flowchart of a method for obtaining a damage test result of a test area on a test device according to an embodiment of the present invention;
fig. 7 is a schematic diagram of a path for scanning a test point on a test area according to an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a schematic diagram of a laser system provided in this embodiment, as can be seen from the figure, the laser system includes a laser generating device 100, a beam control device 101 and a converging device 102, the laser generating device 100 is configured to generate a laser beam and make the laser beam incident to the beam control device 101, the beam control device 101 is configured to shape the laser beam to control a spot size formed by output laser, and the converging device 102 is configured to converge and emit the laser beam emitted by the beam control device 101.
The beam control device 101 is used for shaping the laser beam, so that the size of a light spot formed by the laser output by the laser system can be controlled, and the size of the light spot formed by the laser output by the laser system can be adjusted. The laser system of this embodiment can adjust output laser facula size, can be applied to the damage characteristic test to optical element, can adjust output laser facula size according to the test demand, helps improving efficiency of software testing and test accuracy.
The laser generating apparatus 100 may employ various lasers that meet the application requirements.
Alternatively, the beam control device 101 may employ a convex lens and a concave lens, and the beam control device 101 is specifically configured to shape the laser beam by changing the distance between two adjacent lenses or the distance between a lens and the converging device 102. In practical applications, the light beam control device 101 may comprise a plurality of convex lenses, or the light beam control device 101 comprises a plurality of concave lenses, or the light beam control device 101 comprises at least one convex lens and at least one concave lens.
Referring to fig. 2 exemplarily, fig. 2 is a schematic diagram of a laser system according to another embodiment, where a beam control device 101 used in the laser system shown in fig. 2 includes a convex lens 103 and a concave lens 104, and the radial size of the laser beam is adjusted by controlling a distance between the convex lens 103 and the concave lens 104, a distance between the convex lens 103 and the converging device 102, or a distance between the concave lens 104 and the converging device 102. Referring to fig. 3(a) and 3(b), fig. 3(a) and 3(b) are schematic layout views of the convex lens, the concave lens and the converging device in two arrangements, respectively, in which the distances between the convex lens 103 and the concave lens 104 are different, and the sizes of the light spots projected onto the surface of the test element by the corresponding laser systems are different.
Preferably, the laser system may further include a linear displacement stage for carrying the convex lens or the concave lens, and the convex lens or the concave lens is moved by the linear displacement stage. Referring to fig. 2, the convex lens 103 and the concave lens 104 are respectively disposed on the linear displacement stage 105, and preferably, the linear displacement stage 105 may be a high-precision electric linear displacement stage to ensure relative precision of the lens position movement.
Further referring to fig. 2, the laser system further includes a filtering optical element 107 and a filtering aperture 108 disposed on a light path between the laser generating device 100 and the beam control device 101, wherein the filtering optical element 107 is configured to converge the laser beam to the filtering aperture 108, and the filtering aperture 108 is configured to block high-frequency waves in the laser beam from passing through. The beam quality of the laser beam is improved by the filter optics 107 and the filter aperture 108.
Further preferably, the laser system further comprises an energy control device for regulating and controlling the energy of the laser beam, so that the laser system can regulate the energy of the output laser to output the laser with corresponding energy according to the test requirement on the test element, and the laser system can provide a laser energy step through the energy control device to meet the test requirement. Referring to fig. 2, the energy control device 106 may be disposed on the optical path between the laser generating device 100 and the beam control device 101.
Optionally, the energy control device 106 may include a modulation element and a beam splitting element, the modulation element is configured to decompose the laser beam into two vibration components with mutually orthogonal vibration directions, and the beam splitting element is configured to separate the two vibration components of the laser beam into two beams, so as to achieve adjustment and control of the energy of the laser beam. The modulation element may be, but is not limited to, an 1/4 wave plate, and the beam splitting element may be, but is not limited to, a polarization beam splitter prism. The energy of the emergent laser can be regulated and controlled by rotating the modulation element to change the included angle between the polarization direction of the incident laser and the optical axis of the modulation element. For example, the modulation element can be fixed on a rotary table, and the rotation angle of the modulation element can be accurately controlled through the rotary table, so that the purpose of accurately controlling energy attenuation is achieved.
Optionally, referring to fig. 2, the laser system may further include a shutter 109 for allowing or blocking the laser beam to pass through. The present laser system can control the output of laser light and control the output frequency of laser light through the shutter 109.
Preferably, the laser system of this embodiment may further include a first light splitting device and a beam quality monitoring device, where the first light splitting device is configured to split the laser beam emitted by the converging device into sub-beams, and the beam quality monitoring device is configured to obtain energy distributions of the sub-beams. Referring to fig. 2, the first light splitting device 110 is disposed on the light path exiting from the converging device 102, and the first light splitting device 110 reflects part of the laser light to the detection surface of the beam quality monitoring device 111. Preferably, the position of the detection surface of the beam quality monitoring device 111 and the position of the surface of the test element are conjugated with respect to the first light splitting device 110 to ensure that the quality of the beam detected by the beam quality monitoring device 111 is consistent with the quality of the beam actually acting on the surface of the test element.
Preferably, the laser system of this embodiment may further include a second beam splitting device and an energy measuring device, the second beam splitting device is configured to split the laser beam emitted by the converging device into sub-beams, and the energy measuring device is configured to measure an energy level of the sub-beams. Referring to fig. 2, the second beam splitter 112 is disposed on the light path exiting from the converging device 102, and the second beam splitter 112 reflects part of the laser light to the energy measuring device 113. Preferably, the second light splitting device 112 includes light splitting mirrors with a plurality of light splitting ratios, and can be switched by the electric rotating wheel 114 controlled by the computer, and the light splitting mirrors with different light splitting ratios are selected according to different test laser energy ranges of different test elements, so that the laser energy received by the energy measuring device 113 is always within the measuring range.
The calibration method of the laser system for the laser energy spatial distribution in the embodiment is as follows: the energy distribution data of the laser beam is obtained according to the following formula:
Where M denotes a relative energy distribution of the measured laser beam, E denotes a total energy of the measured laser beam, and M' denotes actual energy distribution data of the obtained laser beam.
In the actual testing process, the beam quality monitoring device 111 triggers sampling by the light-emitting signal of the laser generating device 100, and the spatial distribution map of the relative energy of the laser obtained by sampling is combined with the total energy of the laser obtained by sampling by the energy measuring device 113, so as to finally obtain the spatial distribution map of the actual energy of the laser. Preferably, the beam quality data obtained by sampling the beam quality monitoring device 111 may be first background-removed, specifically when m isij<mthSeason mij0, wherein mthRepresenting a background threshold. And then according to the formula, calculating to obtain actual energy distribution data according to the background-removed light beam quality data.
Correspondingly, the embodiment also provides a laser-induced damage testing system, which comprises a laser system for projecting laser to the surface of the testing element, wherein the laser system adopts the laser system.
The laser system that the laser-induced damage test system of this embodiment adopted can adjust output laser facula size, can adjust output laser facula size according to the test demand, helps improving efficiency of software testing and test accuracy.
Further referring to fig. 2, the laser induced damage testing system of the present embodiment further includes an obtaining device 115, configured to obtain surface information of the testing element 118, so as to obtain a testing result for the testing element 118. Alternatively, the acquiring device 115 may adopt a camera device, and the image of the test element is acquired by the camera device. The image capture device may use a telecentric lens with magnification.
Preferably, the testing system of the present embodiment may further include an illumination device 117 for illuminating the testing element 118 to ensure that the obtaining device 115 can obtain the clear and accurate surface information of the testing element 118. The illumination device 117 is preferably a surface light source, which is a white light source capable of providing uniform light intensity.
Preferably, the surface under test of the test element 118 is in the focal plane of the laser system. The test element 118 can be fixed on the displacement table 116, and the displacement table 116 drives the test element 118 to move, so that the laser projected by the laser system can scan and test the surface of the test element 118. Specifically, a two-dimensional displacement table can be used to carry the test element 118, and the two-dimensional displacement table can control the test element 118 to move in a focal plane, so that the laser focal spots sequentially irradiate the entire test area of the test element 118 according to a preset sequence.
Further, the embodiment of the invention also provides a laser-induced damage testing method, which uses the laser system. Referring to fig. 4, fig. 4 is a flowchart of a laser-induced damage testing method provided in this embodiment, and as can be seen from the diagram, the laser-induced damage testing method includes the following steps:
s200: when the laser generating device outputs laser, the surface information of the test point on the test element is obtained, and the first timer is triggered and started.
In each test, the light-emitting signal of the laser generating device is used as a synchronous signal for triggering. The first timer T1 sets the time for acquiring the surface information of the test point on the test element. When the laser generating device outputs laser, the first timer T1 is triggered to be started, and the surface information of the test point on the test element is acquired.
S201: and when the set time of the first timer is over, moving the next test point of the test element to the target position, and triggering and starting a second timer.
The time set by the second timer T2 is used for positioning the test point, and if the next test point needs to adjust the laser energy, the time set by the second timer T2 is used for positioning the test point and adjusting the energy control device.
The target position corresponds to a laser irradiation position projected by the laser system. When the time set by the first timer T1 is over, the second timer T2 is triggered to be started, and meanwhile, the next test point of the test element is moved to the target position through the motion of the displacement table for positioning, and the energy control device is adjusted.
S202: and when the set time of the second timer is over, judging whether the next test point of the test element reaches the target position. If yes, the process proceeds to step S203.
S203: and acquiring the surface information of the next test point on the test element, and triggering and starting a third timer.
The time set by the third timer T3 is used to acquire the surface information of the test point on the test element, and specifically used to acquire the surface information of the test point on the test element before the laser irradiation. If the next test point of the test element reaches the target position, a third timer T3 is triggered to be started, and the surface information of the next test point on the test element is obtained.
When the time set by the third timer T3 is over, one laser irradiation test is completed, and the next test can be immediately shifted to.
Preferably, referring to fig. 5, in the method of this embodiment, if it is determined in step S202 that the next test point of the test element does not reach the target position, the step S204 is executed.
S204: and blocking the laser beam generated by the laser system from projecting to the next test point of the test element.
When the time set by the second timer T2 is over, but the next test point of the test element does not reach the target position, the laser beam generated by the laser system is blocked from being projected onto the next test point of the test element to avoid being irradiated by the laser during the movement of the test element. In practical applications, the laser irradiation may be blocked by closing the shutter of the laser system.
S205: and if the next test point of the test element reaches the target position, allowing the laser beam generated by the laser system to be projected to the next test point of the test element when the set time of the next first timer is over, acquiring the surface information of the next test point on the test element and triggering to start a third timer.
After the shutter is closed, when the next test point of the test element reaches the target position, after the set time of the nearest next first timer T1 is over, the shutter is opened to allow the laser beam generated by the laser system to be projected to the next test point of the test element, and the surface information of the next test point on the test element is acquired, and at the same time, the third timer T3 is triggered.
Specifically, the working mode of each timer is a single mode, that is, the timer is automatically closed after the set time of the timer is over.
The laser-induced damage testing method of the embodiment divides one period of laser output by the laser generating device into three time periods, and realizes that the test point of the test element is moved to a target position, the test point is irradiated by laser and surface information of the test point is obtained in one light emitting period of the laser generating device, so that the testing efficiency is improved.
In a further method of this embodiment, the surface information of the test element may be obtained by acquiring an image of the surface of the test element. Optionally, a laser damage test result of the test area on the test element may be obtained according to the following method, please refer to fig. 6, where fig. 6 is a flowchart of a method for obtaining a laser damage test result of the test area on the test element according to this embodiment, and includes the following steps:
s300: and for each test point of the test area on the test element, obtaining a damage morphology image corresponding to the test point according to the images of the test point before and after being irradiated by laser.
The damage shape image corresponding to the test point is an image capable of reflecting the change of the shape of the test point after being irradiated by laser relative to the shape before being irradiated by the laser. The images of the test points before and after being irradiated by the laser can be subjected to differential processing, and then damage morphology images corresponding to the test points are obtained. In practical application, the image can be subjected to differential binarization processing.
S301: and splicing the damage appearance images corresponding to the test points of the test area. And splicing the damage appearance images corresponding to the test points in the test area to obtain an image of the whole test area including the damage appearance images of the test points.
S302: and obtaining a damage test result of the test area according to the spliced image.
And counting the total number of the test points and the number and the appearance of the damage points according to the spliced images to further obtain a damage test result, such as damage density.
Further preferably, the scanning path of the test point on the test element may be a grid-shaped path, and the scanning is performed from bottom to top, so as to avoid the influence of a broken object generated by the damage point on the untested point. Referring to fig. 7, fig. 7 is a schematic diagram of a path for scanning test points on a test area in the present embodiment, where circles represent the test points, and arrows represent a scanning route.
The laser system, the laser induced damage testing system and the laser induced damage testing method provided by the invention are described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (10)
1. A laser system is characterized by comprising a laser generating device, a beam control device and a converging device, wherein the laser generating device is used for generating laser beams and inputting the laser beams to the beam control device, the beam control device is used for shaping the laser beams to control the spot size formed by output laser, and the converging device is used for converging the laser beams emitted by the beam control device and emitting the laser beams.
2. The laser system according to claim 1, wherein the beam control device comprises a convex lens and a concave lens, the beam control device being particularly adapted to shape the laser beam by varying the distance between two adjacent lenses or the distance between a lens and the converging device.
3. The laser system of claim 1, further comprising an energy control device for regulating the energy of the laser beam.
4. The laser system according to any one of claims 1 to 3, further comprising a first beam splitting means for splitting the laser beam emitted from the converging means into sub-beams and a beam quality monitoring means for acquiring an energy distribution of the sub-beams.
5. The laser system according to any one of claims 1-3, further comprising a second beam splitting device for splitting the laser beam emitted from the converging device into sub-beams and an energy measuring device for measuring an energy level of the sub-beams.
6. A laser system according to any of claims 1-3, characterized in that the energy distribution data of the laser beam is obtained according to the following formula:
Where M denotes a relative energy distribution of the measured laser beam, E denotes a total energy of the measured laser beam, and M' denotes actual energy distribution data of the obtained laser beam.
7. A laser induced damage test system comprising a laser system for projecting a laser onto a surface of a test element, the laser system employing the laser system of any one of claims 1-6.
8. A laser induced damage testing method using the laser system of any one of claims 1 to 6, the method comprising:
when the laser generating device outputs laser, acquiring surface information of a test point on a test element, and triggering and starting a first timer;
when the set time of the first timer is over, moving the next test point of the test element to the target position, and triggering to start a second timer;
and when the set time of the second timer is over, if the next test point of the test element reaches the target position, acquiring the surface information of the next test point on the test element, and triggering and starting a third timer.
9. The method of claim 8, wherein when the second timer is set to end, if the next test point of the test component does not reach the target position, the laser beam generated by the laser system is blocked from being projected to the next test point of the test component.
10. The laser-induced damage testing method of claim 8, comprising:
for each test point of a test area on a test element, obtaining a damage morphology image corresponding to the test point according to images of the test point before and after being irradiated by laser;
splicing the damage morphology images corresponding to the test points of the test area;
and obtaining a damage test result of the test area according to the spliced image.
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