CN106597461A - Two-dimensional scanning range-finding device - Google Patents
Two-dimensional scanning range-finding device Download PDFInfo
- Publication number
- CN106597461A CN106597461A CN201611168861.6A CN201611168861A CN106597461A CN 106597461 A CN106597461 A CN 106597461A CN 201611168861 A CN201611168861 A CN 201611168861A CN 106597461 A CN106597461 A CN 106597461A
- Authority
- CN
- China
- Prior art keywords
- laser
- scanning
- dimensional scan
- laser beam
- galvanometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
Abstract
The invention discloses a two-dimensional scanning range-finding device. The device includes a laser emission unit used for generating a beam of continuous laser; a scanning unit, the laser beam being irradiated on an MEMS galvanometer, the galvanometer reflecting the laser beam, at the same time, scanning action being performed, so that the path of emitting the laser beam is a fan-shaped area with a certain field angle; an optical element used for focusing laser returned by a measured object through diffuse reflection, and filtering the light noise existing in the environment; a receiving unit which obtains a light spot position, and outputs the light spot position to be used for calculating the distance; and a central processing unit used for coordinating the work of the rest of units, and calculating the distance of the measured object in real time. The two-dimensional scanning range-finding device provided by the invention uses the controllable MEMS galvanometer as the scanning structure of the scanning unit, the characteristics of the high frequency and small size of the galvanometer can realize the miniaturized design requirement of the whole ranging-finding device, and the device is low in cost and easy to popularize.
Description
Technical field
The present invention relates to laser application and real-time online measuring technical field, more particularly to one kind is based on laser and MEMS sweeps
Retouch the two-dimensional scan range unit of galvanometer, it is possible to achieve the function of live real-time range measurement.
Background technology
Laser due to monochromaticity is good, high directivity, high brightness the features such as be widely used to social life each
Aspect, and laser ranging technique is even more an importance in laser application technique field.
The device of traditional online range measurement can only typically realize the function of spot measurement, it is impossible to the system that satisfaction is showing improvement or progress day by day
Make the requirement of system or detection measuring system.
In recent years, with the progress of science and technology, scanning type laser ranging technology is also gradually ripe.At present it is known that two dimension sweep
Retouch range-measurement system to be made up of laser instrument, optical system, photoelectric cell, counting circuit and rotating mechanism.Laser instrument transmitting light beam shines
It is mapped on testee, the reflected beams form hot spot on photoelectric cell Jing after optical system process, according to hot spot in photo elements
The distance of the just measurable current testee of the position on part, while rotating mechanism drives each part mentioned above rotation, is just capable of achieving
The function of two-dimensional scan range finding.Rotating mechanism in the system for realizing two-dimensional scan distance measurement function generally described above is motor, and this is just
Lead to not further miniaturization.Simultaneously as motor control itself exist high-speed rotation working condition under rotating speed control
Problem cannot realize high speed ranging.
The content of the invention
In order to overcome existing two-dimentional range-measurement system to be unable to miniaturization, measurement and online real time distance are only capable of single-point range finding at a high speed
Deficiency, the present invention devises a kind of online two-dimentional range unit, and the device is based on MEMS scanning galvanometers, can not only realize two
Tie up and measure at a high speed, while the function of acceptable computed range output in real time, and it is advantageously implemented the miniaturization of range-measurement system.
The device includes：
CPU, for coordinating each unit work, ranging data process；
Laser emission element, for launching laser beam, and is irradiated on MEMS scanning galvanometers；
Scanning element, the laser beam for laser emission element is launched are reflected away and to form sector scanning face；
Optical unit, the light for will reflect from barrier carry out shaping convergence, and the optical noise such as filtering environmental light；
Receiving unit, for receiving the laser that measured object is reflected, and the positional information of hot spot is exported.
Described CPU includes：Central processing unit and peripheral circuit, responsible real-time control laser emission element,
The work of scanning element and receiving unit, and computation and measurement data, output range information in real time.
Described laser emission element includes：Laser tube and collimating components, after the collimated part of laser of laser tube emissions
The preferable laser beam of collimation is formed, is irradiated on MEMS scanning galvanometers.
Described scanning element includes：MEMS scanning galvanometers and drive circuit, work of the MEMS scanning galvanometers in drive circuit
Move reciprocatingly around rotary shaft with, the laser beam being emitted onto thereon reflects away to form sector region, while will rotate
Angle information export to CPU.
Described optical unit includes：Lens and optical filter, measured object do diffuse-reflectance to the laser beam being irradiated to thereon,
Lens are responsible for collecting diffuse-reflectance light, and are focused into hot spot on receiving unit surface.Optical filter be responsible for filtering except irradiating laser with
Outer ambient light noise.
Described receiving unit includes：Linear array CMOS and peripheral circuit, linear array CMOS is in the presence of peripheral circuit by light
Signal is converted into the signal of telecommunication, and the positional information of output facula to CPU.
The beam optical axis of described laser emission element transmitting and the center superposition of MEMS scanning galvanometers.
The optical axis coincidence of described optical unit and receiving unit.
Described light beam, optical unit and receiving unit are in same optical flat.
The technical solution adopted for the present invention to solve the technical problems is：Central processing unit controls laser instrument launches laser
Light beam, light beam are irradiated on MEMS scanning galvanometers, and MEMS scanning galvanometers do scanning motion, quilt under the control of the central processing unit
The laser beam path of MEMS scanning galvanometers reflection forms the subtended angle sector region related to MEMS galvanometer mechanical angles, and certain is for the moment
Carve, on laser beam irradiation to testee, the reflected beams form hot spot, central authorities on linear array CMOS surface Jing after optics into focus
Processing unit just can in real time calculate the distance of current testee in the position on linear array CMOS surface according to hot spot, and MEMS scannings are shaken
The scanning motion of mirror can ensure that the two-dimensional scan distance measurement function realized in sector region.
It is an advantage of the invention that miniaturization can be realized, the online two-dimentional distance measurement function of high speed.Suitable for installation dimension
And the application scenarios that high speed ranging or real-time have higher requirements.
Description of the drawings
Fig. 1 is the apparatus system pie graph of the present invention；
Fig. 2 is the fundamental diagram of the present invention；
Fig. 3 is the entity structure figure of the present invention.
Description of reference numerals：
In figure, 1. laser instrument, 2.MEMS galvanometers, 3. linear array CMOS, 4. lens, 5. tested barrier, 6. optical filter, 7. accurate
Straight member.
Specific embodiment
In FIG, two-dimensional scan range unit is by CPU, laser emission element, scanning element, receiving unit
Constitute with optical unit, central location controls laser beam transmitting, the rate of scanning of scanning element and the width of laser emission element
Value, meanwhile, the real-time angular of MEMS scanning galvanometers is fed back to CPU by scanning element, and receiving unit receives Jing optics
Laser beam after unit shaping, and facula position is exported to CPU, by CPU calculate in real time away from
From information.
In fig. 2, the distance between galvanometer (2) center and lens (4) center are h, benchmark (galvanometer center and lens centre
Line) and be L with reference to the distance between (being determined by apparatus structure size), the distance between lens (4) and linear array CMOS (3) are
l′.A certain moment, the light beam that laser instrument (1) sends are irradiated on MES galvanometers (2), the laser beam that MEMS galvanometers (2) reflect with
Angle between benchmark (line of galvanometer center and lens centre) is α, the light Jing lens launched after laser beam irradiation to measured object
(4), and after optical filter (6) effect, the hot spot formed in linear array CMOS (3) is d apart from the distance of origin, then according to triangle
Principle and sine can calculate distance of the testee away from benchmark：
In figure 3, equipment mechanism figure, collimated part (7) collimation of laser instrument (1) lase form light beam, are radiated at
On MEMS scanning galvanometers (2), collimating components (7) are placed in the middle of laser instrument (1) and MEMS scanning galvanometers (2), laser beam light
Axle is conllinear with MEMS scanning galvanometers (2) center.Light beam, is diffused by MEMS scanning galvanometers (2) reflected illumination on measured object
Sequentially pass through lens (4), optical filter (6) and hot spot is formed in linear array CMOS, according to the position calculation measured object (5) of this hot spot
Distance, it is middle with optical filter (6) that optical filter (6) is placed in lens (4).Wherein, MEMS scanning galvanometers (2) center, lens (4) light
Axle, optical filter (6) optical axis, linear array CMOS working region are in same optical flat.
Claims (5)
1. a kind of two-dimensional scan range unit, by laser instrument, MEMS scanning galvanometers, linear array CMOS, lens, optical filter according to certain
Angle and distance are installed, it is characterised in that：Laser instrument launches light beam, and its beam motion path forms sector region, and irradiation is fan-shaped
Testee in region, testee the reflected beams are acted on, and are counted further according to the position of hot spot
Calculate the distance of testee.
2. a kind of two-dimensional scan range unit according to claim 1, it is characterised in that：Laser beam motion path is formed
The step of sector region is：The MEMS scanning galvanometers center of laser beam irradiation, is made instead by the scanning motion of MEMS scanning galvanometers
Irradiating light beam path forms sector region.
3. a kind of two-dimensional scan range unit according to claim 1, its feature are characterised by：Testee the reflected beams
Acting on the step of formed in linear array CMOS hot spot includes：Reflection is Jing after lens convergence effect and the denoising of optical filter in linear array
CMOS surfaces form hot spot.
4. a kind of two-dimensional scan range unit according to claim 2, it is characterised in that：Laser instrument transmitting light beam, collimation
Central coaxial of the part with optical axis with galvanometer is installed.
5. a kind of two-dimensional scan range unit according to claim 3, it is characterised in that：Lens, optical filter and linear array
CMOS is coaxial and parallel installation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611168861.6A CN106597461A (en) | 2016-12-16 | 2016-12-16 | Two-dimensional scanning range-finding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611168861.6A CN106597461A (en) | 2016-12-16 | 2016-12-16 | Two-dimensional scanning range-finding device |
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| Publication Number | Publication Date |
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| CN106597461A true CN106597461A (en) | 2017-04-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201611168861.6A Pending CN106597461A (en) | 2016-12-16 | 2016-12-16 | Two-dimensional scanning range-finding device |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107356930A (en) * | 2017-08-28 | 2017-11-17 | 广州市杜格数控设备有限公司 | A kind of galvanometer panoramic scanning device and its scan method |
| CN108426560A (en) * | 2018-04-17 | 2018-08-21 | 广州大学 | A kind of high-supported formwork settlement monitoring device and monitoring method |
| CN109465773A (en) * | 2017-09-07 | 2019-03-15 | 南宁市富久信息技术有限公司 | A kind of electronic F spanner for restricted clearance operation |
| CN108007365B (en) * | 2017-11-21 | 2020-02-11 | 大族激光科技产业集团股份有限公司 | Three-dimensional measurement system and use method |
| WO2020087376A1 (en) * | 2018-10-31 | 2020-05-07 | 深圳市大疆创新科技有限公司 | Light detection method, light detection device, and mobile platform |
| CN111998812A (en) * | 2019-05-27 | 2020-11-27 | 发那科株式会社 | Actual measurement device and recording medium having program recorded thereon |
| CN112269186A (en) * | 2020-10-09 | 2021-01-26 | 华中科技大学鄂州工业技术研究院 | Laser triangular distance measuring device with adjustable measuring range and method |
| CN112504126A (en) * | 2020-12-14 | 2021-03-16 | 国科光芯(海宁)科技股份有限公司 | Three-dimensional scanning distance measuring device and method |
| CN114787658A (en) * | 2019-12-27 | 2022-07-22 | 华为技术有限公司 | Ranging system and mobile platform |
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| CN102508259A (en) * | 2011-12-12 | 2012-06-20 | 中国科学院合肥物质科学研究院 | Miniaturization lens-free laser three-dimensional imaging system based on micro-electromechanical system (MEMS) scanning micro-mirror and imaging method thereof |
| CN202793374U (en) * | 2012-10-08 | 2013-03-13 | 刘学文 | Distance meter through laser triangulation |
| WO2015074594A1 (en) * | 2013-11-21 | 2015-05-28 | 科沃斯机器人有限公司 | Laser range finding sensor and range finding method therefor |
| CN105807421A (en) * | 2016-05-10 | 2016-07-27 | 天津大学 | Parallel-light-emerging angle magnification MEMS scanning method and optical system |
-
2016
- 2016-12-16 CN CN201611168861.6A patent/CN106597461A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102508259A (en) * | 2011-12-12 | 2012-06-20 | 中国科学院合肥物质科学研究院 | Miniaturization lens-free laser three-dimensional imaging system based on micro-electromechanical system (MEMS) scanning micro-mirror and imaging method thereof |
| CN202793374U (en) * | 2012-10-08 | 2013-03-13 | 刘学文 | Distance meter through laser triangulation |
| WO2015074594A1 (en) * | 2013-11-21 | 2015-05-28 | 科沃斯机器人有限公司 | Laser range finding sensor and range finding method therefor |
| CN105807421A (en) * | 2016-05-10 | 2016-07-27 | 天津大学 | Parallel-light-emerging angle magnification MEMS scanning method and optical system |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107356930A (en) * | 2017-08-28 | 2017-11-17 | 广州市杜格数控设备有限公司 | A kind of galvanometer panoramic scanning device and its scan method |
| CN109465773A (en) * | 2017-09-07 | 2019-03-15 | 南宁市富久信息技术有限公司 | A kind of electronic F spanner for restricted clearance operation |
| CN108007365B (en) * | 2017-11-21 | 2020-02-11 | 大族激光科技产业集团股份有限公司 | Three-dimensional measurement system and use method |
| CN108426560B (en) * | 2018-04-17 | 2024-02-27 | 广州大学 | High formwork settlement monitoring device and monitoring method |
| CN108426560A (en) * | 2018-04-17 | 2018-08-21 | 广州大学 | A kind of high-supported formwork settlement monitoring device and monitoring method |
| WO2020087376A1 (en) * | 2018-10-31 | 2020-05-07 | 深圳市大疆创新科技有限公司 | Light detection method, light detection device, and mobile platform |
| CN111448475A (en) * | 2018-10-31 | 2020-07-24 | 深圳市大疆创新科技有限公司 | Optical detection method, optical detection device and mobile platform |
| CN111448475B (en) * | 2018-10-31 | 2024-04-12 | 深圳市大疆创新科技有限公司 | Optical detection method, optical detection device and mobile platform |
| CN111998812A (en) * | 2019-05-27 | 2020-11-27 | 发那科株式会社 | Actual measurement device and recording medium having program recorded thereon |
| CN114787658A (en) * | 2019-12-27 | 2022-07-22 | 华为技术有限公司 | Ranging system and mobile platform |
| CN112269186B (en) * | 2020-10-09 | 2023-05-09 | 华中科技大学鄂州工业技术研究院 | Range-adjustable laser triangular distance measuring device and method |
| CN112269186A (en) * | 2020-10-09 | 2021-01-26 | 华中科技大学鄂州工业技术研究院 | Laser triangular distance measuring device with adjustable measuring range and method |
| CN112504126A (en) * | 2020-12-14 | 2021-03-16 | 国科光芯(海宁)科技股份有限公司 | Three-dimensional scanning distance measuring device and method |
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