WO2019176749A1

WO2019176749A1 - Scanning device and measuring device

Info

Publication number: WO2019176749A1
Application number: PCT/JP2019/009219
Authority: WO
Inventors: 山口　淳
Original assignee: パイオニア株式会社
Priority date: 2018-03-15
Filing date: 2019-03-08
Publication date: 2019-09-19
Also published as: JPWO2019176749A1; JP6920538B2; EP3754365A1; US20210025986A1; JP2021170033A; EP3754365A4

Abstract

The present invention addresses the problem of providing a scanning device capable of obtaining accurate optical information from various target objects. This scanning device comprises a light source unit (21) which emits pulsed light, a deflecting unit (22) which deflects the pulsed light in a variable direction and emits the same as scanned light (L2), and an optical system (23) which is provided on an optical path of the scanned light (L2) to project the scanned light (L2) toward a prescribed region, wherein the optical system (23) includes a telecentric lens (23A) into which the scanned light (L2) enters, and which is configured to adjust the projection direction of the scanned light (L2) that has passed through the telecentric lens (23A).

Description

Scanning device and measuring device

The present invention relates to a scanning device that performs optical scanning, and a measuring device that optically detects an object and measures its characteristics.

2. Description of the Related Art Conventionally, there is known a scanning device that scans an object or a region as an object to be scanned with light. There is also known a measuring device that measures various characteristics related to the scanning target using optical information obtained by the scanning device. For example, Patent Document 1 discloses an optical radar device that measures a distance to a measurement object based on an elapsed time from when light is emitted from a light projecting unit to when reflected light is received by a light receiving unit. Has been.

JP 2007-85832 A

The scanning device, for example, projects pulsed light toward a predetermined area and scans optical information of the target object by receiving light reflected by the target object existing in the predetermined area. Obtain as information. Therefore, in consideration of obtaining accurate scanning information, it is preferable that the light reflected by the object can be reliably received.

For example, when the scanning device is mounted on a vehicle as an on-vehicle radar, the target object may have various shapes and sizes, or may move. It is preferable that the scanning device can project light that can be reliably received even for such various objects.

The present invention has been made in view of the above points, and an object of the present invention is to provide a scanning device and a measuring device capable of obtaining accurate optical information from various objects.

According to a first aspect of the present invention, a light source unit that emits pulsed light, a deflection unit that deflects pulsed light in a variable direction and emits it as scanning light, and an optical path of the scanning light are provided. An optical system that projects light toward the region, the optical system including a telecentric lens on which the scanning light is incident, and configured to adjust a light projecting direction of the scanning light that has passed through the telecentric lens It is characterized by that.

According to an eighth aspect of the present invention, there is provided a scanning device according to the first aspect of the present invention, a light receiving unit that receives the reflected light that has passed through the optical system after the scanning light is reflected by an object in a predetermined region, And a measuring unit that measures the characteristics of the object based on the result of receiving the reflected light by the unit.

1 is a diagram illustrating a configuration of a measurement apparatus according to Example 1. FIG. 3 is a diagram illustrating a configuration of an optical system of a scanning device in the measurement apparatus according to Embodiment 1. FIG. 3 is a diagram illustrating a configuration of an optical system of a scanning device in the measurement apparatus according to Embodiment 1. FIG. 6 is a diagram illustrating a configuration of an optical system of a scanning device in a measurement apparatus according to Embodiment 2. FIG. 6 is a diagram illustrating a configuration of an optical system of a scanning device in a measurement apparatus according to Embodiment 2. FIG. FIG. 10 is a diagram illustrating a configuration of an optical system of a scanning device in a measurement apparatus according to Example 3.

Hereinafter, embodiments of the present invention will be described in detail.

FIG. 1 is a diagram schematically illustrating a configuration of an optical measuring device (hereinafter simply referred to as a measuring device) 10 according to a first embodiment. The overall configuration of the measuring apparatus 10 will be described with reference to FIG. In the present embodiment, the measuring apparatus 10 performs optical scanning of a predetermined region (hereinafter referred to as a scanning region) R0, detects an object OB existing in the scanning region R0, and also measures the distance to the object OB. And an optical device that measures and analyzes the shape and the like of the object OB.

The measuring apparatus 10 includes a scanning unit 20 that scans the scanning region R0 using light, a measuring unit 30 that performs various measurements on the object OB using the scanning information obtained by the scanning unit 20, a scanning unit 20, And a control unit 40 that controls the measurement unit 30.

The scanning unit 20 includes a light source unit 21 that generates and emits pulsed light (hereinafter referred to as emission light) L1. In the present embodiment, the light source unit 21 forms a light emitting element 21A that generates pulsed laser light having a peak wavelength in the infrared region, shapes the laser light, and outputs the shaped laser light as emitted light L1. And a shaping lens 21B that emits as follows.

The scanning unit 20 includes a deflecting unit 22 that emits the emitted light L1 from the light source unit 21 as scanning light (projection signal) L2 while deflecting the emitted light L1 in a variable direction. The deflecting unit 22 continuously and periodically changes the deflection direction of the emitted light L1.

In this embodiment, the deflecting unit 22 has a movable light reflecting surface 22A for reflecting the emitted light L1 from the light source unit 21. For example, the deflection unit 22 is a MEMS (Micro Electro Mechanical Systems) mirror configured such that the light reflecting surface 22A swings around at least one axis.

The scanning unit 20 includes an optical system 23 that projects the scanning light L2 toward the scanning region R0. The optical system 23 is configured to adjust the light projection direction of the scanning light L2. The scanning light L2 adjusted by the optical system 23 is projected onto the scanning region R0.

The scanning region R0 is a virtual three-dimensional space having an angle range corresponding to the range in which the scanning light L2 can be projected by the optical system 23, and a depth corresponding to a distance at which the scanning light L2 can maintain a distance that can be measured. It is. In FIG. 1, a part of the outer edge of the scanning region R0 is indicated by a broken line.

For example, as shown in FIG. 1, when the object OB exists on the optical path of the scanning light L2 in the scanning region R0, the surface of the object OB on the scanning unit 20 side (hereinafter referred to as the object surface) S1 is scanned. Light L2 is irradiated. When the object OB is an object having reflectivity with respect to the scanning light L2, the scanning light L2 is reflected by the object OB.

The scanning unit 20 includes a light receiving unit 24 that receives light (light reception signal, hereinafter referred to as reflected light) L3 that is reflected by the object OB and passes through the optical system 23. In the present embodiment, the light receiving unit 24 includes a condenser lens 24A that receives and collects the reflected light L3, and a detection element 24B that detects the reflected light L3. The detection element 24B performs photoelectric conversion on the reflected light L3, and generates an electrical signal corresponding to the reflected light L3 as a detection signal SR.

In this embodiment, the scanning unit 20 includes a beam splitter BS that is provided between the deflection unit 22 and the light source unit 21 and separates the emitted light L1 and the reflected light L3 and guides the reflected light L3 to the light receiving unit 24. Have. The emitted light L1 passes through the beam splitter BS and travels toward the deflecting unit 22.

In other words, in the present embodiment, the scanning unit 20 functions as a light projecting unit that projects the scanning light L2 and functions as a light receiving unit that receives the reflected light L3. The optical system 23 functions as a light projecting / receiving optical system that projects the scanning light L2 and receives the reflected light L3. Further, the scanning unit 20 generates and outputs a detection signal SR, which is a result of receiving the reflected light L3, as scanning information of the scanning region R0.

The measuring unit 30 measures the distance to the target object OB, the shape of the target surface S1 of the target object OB, and the like based on the detection signal SR generated by the scanning unit 20. For example, in the present embodiment, the measuring unit 30 is a distance measuring unit that measures the distance from the scanning unit 20 to the target surface S1 of the object OB.

For example, the measurement unit 30 detects a pulse corresponding to the reflected light L3 in the detection signal SR. Further, for example, the measurement unit 30 measures the distance to the target surface S1 of the object OB by the time-of-flight method based on the time difference from the emission of the emitted light L1 to the reception of the reflected light L3. The measuring unit 30 generates distance data indicating the distance to the object OB.

In the present embodiment, the measurement unit 30 divides the scanning region R0 into a plurality of pixel regions based on the direction in which the scanning light L2 is projected, and displays a map-like image (distance) indicating distance data for each pixel region. Image).

In addition, the measurement unit 30 uses the change cycle of the deflection direction of the emitted light L1 by the deflection unit 22 or the change cycle of the projection direction of the scanning light L2 by the optical system 23 as a generation cycle of the distance image, and periodically displays the distance image. It may be generated. Moreover, the measurement part 30 may have a display part (not shown) which displays the said distance image as a moving image along a time series.

Further, the control unit 40 controls the operation of the scanning unit 20 (the light source unit 21, the deflection unit 22, the optical system 23, and the light receiving unit 24) and the measurement unit 30. For example, in this embodiment, the control unit 40 supplies a drive signal to the light source unit 21 to drive and control the light source unit 21. The control unit 40 also supplies a drive signal to the deflecting unit 22 and controls the displacement operation of the light reflecting surface 22A of the deflecting unit 22. Further, the control unit 40 controls the operation of the optical system 23 and controls the direction in which the scanning light L2 is projected.

FIG. 2 is a diagram schematically showing the configuration of the optical system 23 and the control unit 40. In the present embodiment, the optical system 23 includes a telecentric lens 23A on which the scanning light L2 is incident. In this embodiment, the telecentric lens 23A is a telecentric fθ lens.

Further, the telecentric lens 23A has a configuration capable of moving on the optical path of the scanning light L2 so that the distance D between the deflecting portion 22 (light reflecting surface 22A in the present embodiment) and the telecentric lens 23A changes. . Specifically, the telecentric lens 23A is configured to be movable between the first position P0 and the second position P1 in the direction along the main optical axis of the scanning light L2. In the present embodiment, the control unit 40 includes an optical system control unit 41 that controls the position of the telecentric lens 23A.

FIG. 2 is a diagram schematically showing each optical path of the scanning light L2 when the telecentric lens 23A is disposed at the first position P0. The light source unit 21 emits the emitted light L2 at a predetermined cycle, for example. Further, the scanning light L <b> 2 is generated every time the emitted light L <b> 1 enters the deflecting unit 22. Therefore, in practice, not all scanning light L2 enters the telecentric lens 23A at the same time. Accordingly, the five solid lines shown in FIG. 2 schematically show the principal rays (for example, straight lines connecting the centers of the light beams) of the five scanning lights L2 generated within a predetermined period.

Further, in the actual measuring apparatus 10, the emitted light L1 from the light source 21 has a predetermined beam diameter. Further, the scanning light L2 generated by the deflecting unit 22 is projected toward the scanning region R0 while changing the beam diameter. In FIG. 2, the optical path range in consideration of the change of the beam diameter in each of the scanning lights L2 is indicated by a broken line.

For example, each broken line in FIG. 2 indicates the path of light having a predetermined intensity smaller than the principal ray of the scanning light L2 (for example, an intensity of 1/2), and is hereinafter referred to as a sub-ray. Also in FIGS. 3, 4, 5 and 6, which will be described later, each principal ray of the scanning light L2 is indicated by a solid line, and sub-rays are indicated by a broken line. Further, the scanning light L2 is projected toward the scanning region R0 while being condensed by the telecentric lens 23A.

In the following, unless otherwise described, the optical axis of the scanning light L2 refers to the principal ray of the scanning light L2. The light projecting direction of the scanning light L2 refers to a direction along the optical axis or principal ray of the scanning light L2.

As shown in FIG. 2, when the telecentric lens 23A is disposed at the first position P0 (the position where the distance D between the deflecting unit 22 and the first distance D0), the scanning light L2 is a telecentric lens. Regardless of the incident angle to 23A, the light is collimated by the telecentric lens 23A. Specifically, the scanning light L2 is incident on various regions on the incident surface of the telecentric lens 23A at various timings and at various angles. On the other hand, when the telecentric lens 23A is disposed at the first position P0, when the scanning light L2 is projected toward the scanning region R0, the light projecting directions are parallel to each other. .

FIG. 3 is a diagram schematically showing an optical path of the scanning light L2 when the telecentric lens 23A is disposed at the second position P1, which is a position different from the first position P0. In the example shown in FIG. 3, the telecentric lens 23A is arranged at a position where the distance D between the telecentric lens 23A and the deflecting unit 22 is larger than the distance D0 as the second position P1. That is, in the example shown in FIG. 3, the telecentric lens 23A is disposed at a position farther from the deflection unit 22 than the first position P0.

As shown in FIG. 3, when the telecentric lens 23A is disposed at the second position P1, each of the scanning lights L2 is projected from the telecentric lens 23A in different directions. For example, the scanning light L2 incident on the telecentric lens 23A is emitted from the telecentric lens 23A so that its optical axes intersect within the scanning region R0.

That is, in the present embodiment, when the telecentric lens 23A is disposed at the first position P0, the optical system 23 constitutes a telecentric optical system. On the other hand, when the telecentric lens 23A is disposed at the second position P2, the telecentricity of the optical system 23 is lost.

In other words, in the present embodiment, the telecentric lens 23A as the optical system 23 adjusts the projection direction of the scanning light L2 so that the optical axes of the scanning light L2 are parallel to each other within a predetermined period. The first light projection mode (for example, an operation mode corresponding to the state where the first position P0 is arranged) and the scanning light L2 so that the optical axis of the scanning light L2 intersects within the scanning region R0 within a predetermined period. And a second light projecting mode for adjusting the light projecting direction (for example, an operation mode corresponding to the state of being disposed at the second position P1).

As shown in FIG. 3, when the telecentric lens 23A is arranged at the second position P1, the object OB1 having the object surface S1A that is convex toward the scanning unit 20 is present on the optical path of the scanning light L2. Consider the case. In this case, as shown in FIG. 3, the scanning light L2 is incident on the wide range of the target surface S1A of the object OB1 while being condensed at an angle close to vertical (while the principal ray and the sub-ray approach each other). Is likely.

Of the reflected light L3 to be reflected by the target surface S1A, the light corresponding to the scanning light L2 incident on the target surface S1A at an angle close to the vertical follows an optical path close to the scanning light L2. It will come back to 23. Therefore, the light incident on the wide range of the target surface S1A can be received by the light receiving unit 24.

For example, as shown in FIG. 2, when the scanning light L2 is irradiated on the target surface S1A when the telecentric lens 23A is disposed at the first position P0, a part of the reflected light L3 is the scanning light L2. It may go in a different direction. Therefore, a part of the reflected light L3 reflected by the target surface S1A may not be received by the light receiving unit 24, and there may be a region where the scanning result on the target surface S1A cannot be obtained.

Thus, in the present embodiment, by adjusting the position of the telecentric lens 23A, for example, even when the convex target surface S1A exists in the scanning region R0, the reflected light L3 is emitted from a wide range of the target surface S1A. It can receive light. Accordingly, a wide range of scanning information of the target surface S1A (target object OB1) can be obtained, and the target object OB1 can be accurately measured.

Note that the telecentric lens 23A may be configured to move continuously and periodically in consideration of obtaining scanning information accurately from the target surface S1 having various shapes, for example. Further, for example, by acquiring other information related to the scanning region R0, for example, an image captured by an external imaging device, the optical system control unit 41 of the control unit 40 calculates a position where the telecentric lens 23A should be disposed. Thereby, the position of the telecentric lens 23A may be adjusted.

Further, in the present embodiment, the telecentric lens 23A is projected within the first state in which the optical axes of the scanning lights L2 projected within a predetermined period are parallel to each other and within the predetermined period. In the above description, the scanning light L2 has the second state in which the optical axes of the scanning light L2 intersect within the scanning region R0. This simplifies the processing of the detection signal SR when the direction in which the scanning light L2 is projected changes. However, the telecentric lens 23A only needs to be configured to adjust the direction in which the scanning light L2 is projected. For example, the telecentric lens 23A is movable so that the distance D between the deflecting unit 22 and the deflection unit 22 changes. I just need it.

In the present embodiment, the case where the deflection unit 22 is a MEMS mirror has been described. However, the deflecting unit 22 only needs to be configured to emit the light L1 emitted from the light source unit 21 while deflecting the light in a variable direction. For example, the deflecting unit 22 may be a movable polygon mirror, a galvanometer mirror, or a lens.

In the present embodiment, the case where the telecentric lens 23A moves under the control of the control unit 40 has been described. That is, in this embodiment, for example, the scanning unit 20 includes a moving mechanism (not shown) that forms a moving path of the telecentric lens 23A and generates a moving force that moves the telecentric lens 23A.

However, the telecentric lens 23A may be configured to be manually moved by an operator who operates the scanning unit 20. For example, a plurality of housing cases configured to detachably accommodate the telecentric lens 23A in the scanning unit 20 may be provided. For example, a plurality of detachable telecentric lenses 23A may be provided in the optical path of the scanning light L2. In other words, the optical system 23 only has to have a telecentric lens 23A on which the scanning light L2 is incident, and can be configured to adjust the light projection direction of the scanning light L2 that has passed through the telecentric lens 23A.

Thus, in this embodiment, the measuring apparatus 10 includes the light source unit 21 that emits the emitted light L1, the deflecting unit 22 that emits the emitted light L1 as the scanning light L2 while deflecting the emitted light L1 in a variable direction, and the scanning light L2. System 23 that projects light toward the scanning region (predetermined region) R0, and a light receiving unit that receives the reflected light L3 that the scanning light L2 reflects from the object OB in the scanning region R0 and passes through the optical system 23 24. The optical system 23 may have a telecentric lens on which the scanning light L2 is incident, and may be configured to adjust the light projection direction of the scanning light L2 that has passed through the telecentric lens 23A. Therefore, it is possible to provide the measuring apparatus 10 that can measure accurate characteristics by obtaining accurate optical information from various objects OB.

In the present embodiment, the case where the measuring apparatus 10 includes the light receiving unit 24 that receives the reflected light L3 that has passed through the optical system 23 has been described. However, the measuring apparatus 10 may not have the light receiving unit 24. For example, a light receiving unit that directly receives the reflected light L3 that has not passed through the optical system 23 may be provided outside the scanning unit 20 and received by the light receiving unit.

In the present embodiment, the case where the reflected light L3 is used for measuring purposes such as distance measurement has been described. However, the reflected light L3 can be used for other purposes. That is, the measuring device 10 does not have to include the measuring unit 30. In this case, for example, the scanning unit 20 and the control unit 40 function as a scanning device. Further, the scanning unit 20 may operate independently without depending on the control unit 40. Therefore, the scanning unit 20 includes, for example, the light source unit 21, the deflecting unit 22, and the optical system 23, so that the scanning unit 20 can obtain accurate optical information from various objects OB.

The use of the measuring device 10 includes, for example, a distance measuring device that is mounted on a moving body such as a vehicle and detects an object near the vehicle and measures a distance to the object. In this case, it can be considered that the detection accuracy and distance measurement accuracy of a cylindrical object such as a utility pole are improved. Further, since the light reflecting surface 22A of the deflecting unit 22 is configured to swing around two axes, the scanning region R0 can be scanned two-dimensionally. Therefore, it can be considered that the detection accuracy of objects having various surface shapes such as a spherical object is improved.

However, the measurement apparatus 10 uses, for example, a terahertz wave as the scanning light L2 (emitted light L1), and irradiates various objects as the object OB with the terahertz wave, thereby the internal structure and material of the object OB. It can be used as an analysis device for analyzing. In this case, the measurement unit 30 may be configured to measure a terahertz wave by time domain spectroscopy, for example. Even in this case, even if the object OB has various surface shapes, it is possible to accurately obtain scanning information and perform an accurate analysis.

FIG. 4 is a diagram schematically illustrating the configuration of the scanning unit 20A and the control unit 40A in the measurement apparatus 10A according to the second embodiment. The measurement apparatus 10A has the same configuration as the measurement apparatus 10 except for the configuration of the scanning unit 20A and the control unit 40A. The scanning unit 10 </ b> A has the same configuration as the scanning unit 20 except for the configuration of the optical system 25. The control unit 40A has the same configuration as the control unit 40 except that the control unit 40A includes the optical system control unit 42.

In the scanning unit 20A, the optical system 25 includes a telecentric lens 25A on which the scanning light L2 is incident and a convex lens 25B on which the scanning light L2 that has passed through the telecentric lens 25A is incident. In this embodiment, the optical system 25 is configured such that the distance DA between the convex lens 25B and the telecentric lens 25A can be changed by moving the convex lens 25B on the optical path of the scanning light L2. . In the present embodiment, the control unit 40A includes an optical system control unit 42 that controls the position of the convex lens 25B.

In the present embodiment, the convex lens 25B is configured to be movable between the first position P2 and the second position P3 on the optical path of the scanning light L2 by the optical system control unit 42. As a result, the distance DA between the convex lens 25B and the telecentric lens 25A changes.

In this embodiment, the telecentric lens 25A has the same configuration as the telecentric lens 23A disposed at the first position P0. Accordingly, each of the scanning lights L2 enters the convex lens 25B along directions parallel to each other. Each of the scanning lights L2 passes through the telecentric lens 25A, and then enters the convex lens 25B while being condensed (the beam diameter is gradually narrowed). On the other hand, after passing through the convex lens 25B, the scanning light L2 is projected toward the scanning region R0 so as to pass through the focal point of the convex lens 25B corresponding to the position of the convex lens 25B.

FIG. 4 is a diagram schematically showing an optical path of the scanning light L2 when the convex lens 25B is disposed at the first position P2. As shown in FIG. 4, when the convex lens 25B is arranged at the first position P2, the scanning light L2 has its respective optical axes intersecting in the scanning region R0 as in the case shown in FIG. Lighted. Therefore, for example, even when the target surface OB1 having the convex target surface S1A exists on the optical path of the scanning light L2, the reflected light L3 can be received from a wide range of the target surface S1A.

FIG. 5 is a diagram schematically showing an optical path of the scanning light L2 when the convex lens 25B is disposed at the second position P3. In the present embodiment, the larger the distance DA between the convex lens 25B and the telecentric lens 25A, the smaller the beam diameter of the scanning light L2 incident on the convex lens 25B. Therefore, when the convex lens 25B is arranged at the second position P3, which is a position farther from the telecentric lens 25A than the first position P2, the difference in the condensing distance from the convex lens 25B in each of the scanning lights L2 is closer. It will be.

Therefore, as shown in FIG. 5, when an object OB2 having a convex object surface S1B having a curvature smaller than that of the object OB1 is present on the optical path of the scanning light L2, the object surface S1B has a wide range. Thus, the scanning light L2 can be incident while being condensed in a direction close to vertical. Therefore, the reflected light L3 from the wide range can be received. That is, by adjusting the position of the convex lens 25B, it is possible to accurately obtain the scanning information even for the convex target surface S1 having a different curvature, for example.

In the present embodiment, the position of the telecentric lens 25A is fixed. This suppresses the generation of the scanning light L2 that does not enter the telecentric lens 25A due to the position of the telecentric lens 25A. Accordingly, the scanning light L2 having a stable light quantity passes through the telecentric lens 25A and the convex lens 25B, and is projected toward the object OB. Accordingly, it is possible to suppress a decrease in the light amount of the scanning light L2.

In the present embodiment, the case where the distance DA to the telecentric lens 25A is changed by moving the convex lens 25B has been described. However, the optical system 25 only needs to be configured to adjust the light projection direction of the scanning light L2. Therefore, the convex lens 25B may be fixed, and the telecentric lens 25A may be configured to move. Further, both the telecentric lens 25A and the convex lens 25B may move.

As described above, in this embodiment, the optical system 25 includes the convex lens 25B on which the scanning light L2 having passed through the telecentric lens 25A is incident. The optical system 25 is configured so that the distance between the telecentric lens 25A and the convex lens 25B can be changed. Therefore, it is possible to provide a scanning device (scanning unit 20A) and a measuring device 10A that can obtain accurate optical information from various objects OB.

FIG. 6 is a schematic diagram illustrating the configuration of the scanning unit 20B and the control unit 40B of the measurement apparatus 10B according to the third embodiment. The measurement apparatus 10B has the same configuration as the measurement apparatus 10A except for the configuration of the scanning unit 20B and the control unit 40B. The scanning unit 10B has the same configuration as the scanning unit 20A except for the configuration of the optical system 26. The control unit 40B has the same configuration as the control unit 40A except that the control unit 40B includes the optical system control unit 43.

In the scanning unit 20B, the optical system 26 includes a concave lens 26A on which the scanning light L2 that has passed through the telecentric lens 25A is incident instead of the convex lens 25B. In the present embodiment, the concave lens 26A is configured to be movable between the first position P4 and the second position P5 on the optical path of the scanning light L2. As a result, the distance DB between the concave lens 26A and the telecentric lens 25A changes. In the present embodiment, the control unit 40B includes an optical system control unit 43 that controls the position of the concave lens 26A.

Further, in the present embodiment, the scanning light L2 is transmitted toward the scanning region R0 while passing through the concave lens 26A and proceeding in the direction of diverging from the optical system 26. In the present embodiment, for example, when the target surface OB3 having the target surface S1C that is concave toward the scanning unit 20B exists on the optical path of the scanning light L2, it is nearly perpendicular to the wide range of the target surface S1C. The scanning light L2 can be incident while being condensed in the direction. Therefore, the reflected light L3 can be received from a wide range of the target surface S1C.

Also in this embodiment, since the telecentric lens 25A is fixed, most of the scanning light L2 passes through the telecentric lens 25A and the concave lens 26A and is projected toward the object OB. Therefore, stable and accurate scanning information can be obtained over a wide range of the target surface S1C.

Also in this embodiment, the optical system 26 only needs to have a configuration in which the distance DB between the telecentric lens 25A and the concave lens 26A can be changed. Accordingly, the present invention is not limited to the case where the concave lens 26A moves, and the telecentric lens 25A may move, or both the concave lens 26A and the telecentric lens 25A may move.

Thus, in the present embodiment, the optical system 26 has a concave lens on which the scanning light L2 that has passed through the telecentric lens 25A is incident, and the distance DB between the telecentric lens 25A and the concave lens 26A can be changed. Have. Therefore, it is possible to provide a scanning device (scanning unit 20B) and a measuring device 10B that can obtain accurate optical information from various objects OB.

10, 10A,

10B Measuring device

20, 20A, 20B Scanning unit (scanning device)
21 Light source part 22

Deflection part

23, 25, 26 Optical system

Claims

A light source that emits pulsed light;
Deflecting the pulsed light in a variable direction and emitting it as scanning light;
An optical system that is provided on an optical path of the scanning light and projects the scanning light toward a predetermined region;
The optical system includes a telecentric lens on which the scanning light is incident, and is configured to adjust a light projection direction of the scanning light that has passed through the telecentric lens.
2. The scanning device according to claim 1, wherein the telecentric lens is movable on an optical path of the scanning light.
The optical system includes a convex lens on which the scanning light that has passed through the telecentric lens is incident,
The scanning device according to claim 1, wherein the optical system is configured to change a distance between the telecentric lens and the convex lens.
4. The scanning device according to claim 3, wherein the convex lens is movable on an optical path of the scanning light.
The optical system includes a first light projection mode for adjusting a light projection direction of the scanning light so that the optical axes of the scanning light projected within a predetermined period are parallel to each other, and a predetermined period And a second light projection mode for adjusting a light projection direction of the scanning light so that the optical axes of the scanning light projected within the predetermined region intersect each other. 5. The scanning device according to any one of 1 to 4.
The optical system includes a concave lens on which the scanning light that has passed through the telecentric lens is incident,
The scanning device according to claim 1, wherein the optical system is configured to be able to change a distance between the telecentric lens and the concave lens.
The scanning device according to claim 6, wherein the concave lens is movable on an optical path of the scanning light.
A scanning device according to any one of claims 1 to 7,
A light receiving unit that receives the reflected light that is reflected by the object in the predetermined region and passes through the optical system;
A measuring unit that measures a characteristic of the object based on a result of receiving the reflected light by the light receiving unit.