JP2014085646A - Optical scanner and measuring system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner that realizes accurate scanning with less distortion even in the case of wide-rage scanning, and to provide a measuring system using the same.SOLUTION: A first optical element 73 to be arranged on a light emission side of a first polygon mirror 71 reduces an angle range of a light ray entering a reflection surface 72a of a second polygon mirror 72, and a second optical element 74 to be arranged on the light emission side of the second polygon mirror 72 proportionally returns an angle of the light ray before entering the first optical element 73. Therefore, an optical scanner can perform scanning at an accurate angle by reducing distortion in an emission direction even if each angle range of scanning by the first and second polygon mirrors 71 and 72 becomes comparatively large.

Description

  The present invention relates to an optical scanning device that irradiates an object while scanning light for measurement, and a measurement system including the optical scanning device.

  As an optical scanning device that two-dimensionally irradiates an object with a laser, there is an optical scanning device that, for example, combines a polygon mirror and a galvanometer mirror to scan laser light in the horizontal direction and the vertical direction on the fundus (Patent Document 1). .

  As a multi-beam scanning device for a projection device, there is one that deflects a light beam from a multi-beam light source unit by a first polygon mirror and deflects a light beam from a first polygon mirror in an orthogonal direction by a second polygon mirror. (Patent Document 2).

  However, in the scanning device of Patent Document 1, since the galvanometer mirror does not rotate at a constant speed and deflects by repeatedly accelerating and decelerating, in principle, stable high-speed scanning is not easy. For this reason, it is not easy to synchronize the galvanometer mirror and the polygon mirror, and it is not possible to sufficiently meet the demands for higher speed and higher accuracy.

  Further, in the case of the scanning device of Patent Document 2, the above-described problem caused by the galvanometer mirror does not occur, but the angle of the light beam incident on the mirror surface of the second polygon mirror is different from the mirror surface of the first polygon mirror and the light beam. There is a geometrical optical problem that the effect of changing depending on the angle formed by the angle becomes negligible as the angle becomes larger.

JP 2006-239196 A JP 2004-209480 A

  The present invention has been made in view of the above background, and an object of the present invention is to provide an optical scanning device that enables accurate scanning with little distortion even in a wide range of scanning, and a measurement system using the same. .

  To achieve the above object, an optical scanning device according to the present invention includes a first polygon mirror that rotates around a first rotation axis, and a second rotation axis that is substantially parallel to a line perpendicular to the first rotation axis. A second polygon mirror that rotates around, a first optical element that is disposed on the light exit side of the first polygon mirror, and is disposed on the light exit side of the second polygon mirror; A second optical element for adjusting the state of the light beam; a first drive unit that rotates the first polygon mirror; and a second drive unit that rotates the second polygon mirror. The angle range of the light beam incident on the reflection surface of the polygon mirror is reduced, and the second optical element proportionally restores the angle of the light beam before entering the first optical element.

  According to the optical scanning device, the first optical element disposed on the light exit side of the first polygon mirror reduces the angle range of the light beam incident on the reflecting surface of the second polygon mirror, and the light exit of the second polygon mirror is achieved. Since the second optical element disposed on the side proportionally restores the angle of the light beam before entering the first optical element, even if the angle range of scanning by the first and second polygon mirrors is relatively large, Scanning can be performed at an accurate angle by reducing distortion in the injection direction.

  According to a specific aspect of the present invention, in the optical scanning device, the first optical element substantially matches the angle of light incident on the reflecting surface of the second polygon mirror. In this case, distortion in the injection direction can be reliably reduced.

  According to another aspect of the present invention, the first optical element substantially matches the incident angles along a predetermined plane parallel to the second rotation axis of the light incident on the reflecting surface of the second polygon mirror, The two optical elements have an emission angle along another predetermined plane parallel to the second rotation axis of the light beam reflected by the reflection surface of the second polygon mirror, and the first light beam reflected by the reflection surface of the first polygon mirror. It is made to substantially coincide with the injection angle along the predetermined plane parallel to the two rotation axes. Thereby, the deflection angle of the reflection by the first polygon mirror is maintained, and simple two-dimensional scanning in which the first polygon mirror and the second polygon mirror are controlled by the same method becomes possible.

  According to still another aspect of the present invention, the first optical element is a cylindrical lens. In this case, the angles of the light rays incident on the reflecting surface of the second polygon mirror can be easily matched.

  According to still another aspect of the present invention, the second optical element is a toric lens. In this case, the angle of the light beam before entering the first optical element can be easily and proportionally restored by passing the second optical element.

  According to still another aspect of the present invention, a first sensor provided along with the first polygon mirror and capable of detecting information related to the rotation posture of the first polygon mirror, and provided along with the second polygon mirror. And a second sensor that enables detection of information related to the rotational posture of the second polygon mirror. In this case, the rotation postures of the first and second polygon mirrors can be directly monitored, and the light emission direction can be precisely controlled.

  According to still another aspect of the present invention, there is provided a laser generator that causes a light beam to enter the first polygon mirror, and a scan controller that operates the laser generator in synchronization with the rotation postures of the first and second polygon mirrors. Further prepare. In this case, pulsed laser light can be incident on discrete desired positions.

  In order to achieve the above object, a measurement system according to the present invention includes the above-described optical scanning device that makes an object incident while scanning illumination, an imaging device that detects an event from the target as an image, an optical scanning device, and an imaging device. And an imaging control unit that operates in synchronization with each other.

  According to the above measurement system, even when the scanning angle range becomes large, the optical scanning device capable of reducing the distortion in the emission direction and performing accurate scanning is used. It is possible to measure with high accuracy.

It is the schematic explaining the measurement system incorporating the optical scanning device of an embodiment. It is a perspective view explaining the optical part of a scanning device main body. It is a figure explaining the scanning or optical path regarding the X-axis direction by an optical system part. It is a figure explaining an example of the scanning pattern of the laser beam by an optical system part.

  Hereinafter, with reference to FIG. 1 etc., the measurement system incorporating the optical scanning device which concerns on one Embodiment of this invention is demonstrated.

  The measurement system 100 includes a light source device 10 that emits laser light, a scanning device main body 20 that scans laser light from the light source device 10, and an imaging device 30 that detects light and other electromagnetic waves from a measurement target as an image. And a main control unit 40 which is a scanning control unit and an imaging control unit that comprehensively controls the operation of each unit constituting the measurement system 100. Among these, the light source device 10, the scanning device main body 20, and the main control unit 40 function as an optical scanning device 60 for causing pulsed laser light to enter discrete desired positions.

  The light source device 10 operates under the control of the main control unit 40 and includes a laser generator 11 and an oscillation drive device 12. The laser generator 11 is a pulse-type laser oscillator, and for example, a diode-excited solid laser incorporating an electro-optical Q switch can be used. The oscillation driver 12 is a Q switch trigger circuit, and causes the laser generator 11 to oscillate at a desired timing. That is, the oscillation driving device 12 receives the trigger pulse from the main control unit 40, operates the Q switch of the laser generator 11, and emits, for example, periodic laser light RA as a light beam from the laser generator 11.

  The scanning device main body 20 includes an optical unit 21 including a first polygon mirror 71 and a second polygon mirror 72, a first motor drive unit 23 for the first polygon mirror 71, and a second motor for the second polygon mirror 72. Pulse generation for synchronizing and operating the drive unit 24, the mirror rotation control unit 25 for controlling the operation of the first and second motor drive units 23, 24, the mirror rotation control unit 25, the light source device 10 and the like Device 27.

  As shown in FIG. 2, the optical unit 21 includes a first polygon mirror 71 that rotates around the first rotation axis AX1, a second polygon mirror 72 that rotates around the second rotation axis AX2, and a first polygon mirror. The first optical element 73 for adjusting the state of the laser light RA1 that is a light beam emitted from the first polygon mirror 71 and the light emission side of the second polygon mirror 72 are arranged on the light emission side of the first polygon mirror 71. The second optical element 74 for adjusting the state of the laser beam RA2 that is a light beam emitted from the second polygon mirror 72, the first driving unit 75 that rotates the first polygon mirror 71, and the second polygon And a second drive unit 76 that rotates the mirror 72. As shown in FIG. 1, the optical unit 21 is provided with one or more first sensors 77 that are mirror surface detectors attached to the first polygon mirror 71. Along with this, one or more second sensors 78 which are mirror surface detectors are provided.

  The first rotation axis AX1 of the first polygon mirror 71 shown in FIG. 2 extends parallel to the Z axis, and the second rotation axis AX2 of the second polygon mirror 72 is relative to the first rotation axis AX1, that is, the Z axis. It extends parallel to the vertical X axis. The reflection surface 71a of the first polygon mirror 71 reflects the laser beam RA0 from the light source device 10 of FIG. 1 and emits the laser beam RA1 that is the first-stage scanning beam. The reflection surface 72a of the second polygon mirror 72 reflects the laser light RA1 reflected by the reflection surface 71a of the first polygon mirror 71 and passed through the first optical element 73, and laser light RA2 that is the second stage scanning light. Inject. The laser beam RA2 from the reflecting surface 72a of the second polygon mirror 72 passes through the second optical element 74. More specifically, the original laser beam RA0 is incident on the reflecting surface 71a of the first polygon mirror 71 from a direction parallel to the XY plane and close to the X axis. The laser beam RA1 deflected by the reflection at the reflection surface 71a to become the first-stage scanning light passes through the first optical element 73 and is reflected from the second polygon mirror 72 from the direction parallel to the Y axis. 72a enters. The laser beam RA2, which is deflected by the reflection at the reflecting surface 72a and becomes the second stage scanning light, passes through the second optical element 74, thereby reproducing the first stage scanning state and scanning two-dimensionally. Will be light rays.

  Here, the laser beam RA1 that is the first-stage scanning light is scanned by the first polygon mirror 71 so as to radiate radially within a predetermined plane parallel to the XY plane. To be parallel. Therefore, the first optical element 73 is an aspherical cylindrical lens in consideration of accuracy improvement. The optical axis AXI of the first optical element 73 is assumed to be parallel to the Y axis, and the first optical element 73 has a curvature in the XY section and has no curvature in the YZ section.

  Laser light RA2, which is the second-stage scanning light, is scanned by the second polygon mirror 72 so as to radiate radially in a plane including the second rotation axis AX2, that is, a plane parallel to the YZ plane, and the second optical The element 74 restores the angle of the laser beam RA1 before entering the first optical element 73 in the non-scanning direction. Therefore, the second optical element 74 is an aspheric toric lens in consideration of accuracy improvement. The optical axis AXO of the second optical element 74 is assumed to be parallel to the YZ plane, and the second optical element 74 has a curvature in the cross section parallel to the X axis, and has a curvature in the YZ cross section. .

  As described above, the first polygon mirror 71 deflects the laser beam RA1 that is the source of the laser beam RA2, and the first and second optical elements 73 and 74 perform scanning in the X-axis direction, that is, the vertical direction. Further, the laser beam RA2 is deflected by the second polygon mirror 72, and scanning in the YZ in-plane direction, that is, the lateral direction is performed. That is, the first and second polygon mirrors 71 and 72 and the first and second optical elements 73 and 74 scan the laser light RA two-dimensionally in the vertical and horizontal directions.

  FIG. 3 is a diagram conceptually illustrating scanning in the X-axis direction, and the optical path is developed with reference to a predetermined plane parallel to the XY plane. In FIG. 3, the laser beam RA1 from the reflecting surface 71a of the first polygon mirror 71 is scanned in an angular range of ± 2θ. The laser beam RA1 passes through the first optical element 73, temporarily becomes parallel to the optical axis AX or the Y axis, and enters the reflecting surface 72a of the second polygon mirror 72. That is, the incident angle of the laser beam RA1 incident on the reflecting surface 72a of the second polygon mirror 72 is the same at any position along a predetermined plane parallel to the second rotation axis AX2. As a result, the laser beam RA2 reflected by the reflecting surface 72a of the second polygon mirror 72 is maintained parallel to the optical axis AX regardless of the rotation angle of the first polygon mirror 71, and is applied to the second optical element 74. Incident. In the second optical element 74, for example, the focal length f2 in the X-axis direction is equal to the focal length f1 in the X-axis direction of the first optical element 73, and the laser light RA2 that has passed through the second optical element 74 is rotated second. Proceeding along another predetermined plane parallel to the axis AX2, once converged and diverged, the laser beam RA1 is scanned in the same angular range as the scanned angular range ± 2θ. That is, the second optical element 74 restores the angle of the laser beam RA1 before entering the first optical element 73. More specifically, the second optical element 74 extends along another predetermined surface parallel to the second rotation axis AX2 (see FIG. 2) of the laser light RA2 reflected by the reflecting surface 72a of the second polygon mirror 72. The final emission angle is made to substantially coincide with the original emission angle along a predetermined plane (XY plane) parallel to the second rotation axis AX2 of the light beam reflected by the reflection surface 71a of the first polygon mirror 71.

ここで、ＳＡＧは光軸から半径ｒの位置における面の光軸方向の高さであり、ｃは曲率であり、ｋは円錐定数であり、Ａ、Ｂ、Ｃ、及びＤは、４次、６次、８次、及び１０次の補正係数である。具体的な数値は以下のようなものとした。
第１面（入射側）
1/c=46.130921, k=-0.921269, A=-0.182691e-5, B=-0.561534e-9, C=0.741786e-12,
D=-0.216216e-15
第２面（射出側）
1/c=-46.130921, k=-0.921269, A=0.182691e-5, B=0.561534e-9, C=-0.741786e-12,
D=0.216216e-15
第１光学素子７３は、シリンドリカルレンズであり、図３に示す断面（ｘｙ断面）を光軸ＡＸに垂直なｚ方向に移動させた軌跡として３次元の外形を有する。 Hereinafter, specific examples of the first optical element 73 will be described. The cross section including the X-axis direction of the first surface and the second surface of the first optical element 73 can be expressed by the following equation.

Here, SAG is the height in the optical axis direction of the surface at the position of radius r from the optical axis, c is the curvature, k is the conic constant, A, B, C, and D are the fourth order, 6th, 8th and 10th order correction coefficients. Specific numerical values are as follows.
First surface (incident side)
1 / c = 46.130921, k = -0.921269, A = -0.182691e-5, B = -0.561534e-9, C = 0.741786e-12,
D = -0.216216e-15
Second side (exit side)
1 / c = -46.130921, k = -0.921269, A = 0.182691e-5, B = 0.561534e-9, C = -0.741786e-12,
D = 0.216216e-15
The first optical element 73 is a cylindrical lens, and has a three-dimensional outer shape as a locus obtained by moving the cross section (xy cross section) illustrated in FIG. 3 in the z direction perpendicular to the optical axis AX.

  The cross section on the optical axis including the X axis direction or the x axis direction of the first surface and the second surface of the second optical element 74 is a cross section including the X axis direction of the first surface and the second surface of the first optical element 73. And the same. However, the second optical element 74 is a toric lens, and passes through a certain reference point set on the optical axis AX through the same cross section as the first optical element 73 and is a rotation axis (not shown) parallel to the x axis. Has a three-dimensional outer shape as a trajectory rotated around. Here, the distance from the rotation reference point on the optical axis AX to the center of the second optical element 74 is 57 mm in a specific embodiment. The reference point as the rotational symmetry point of the second optical element 74 corresponds to the light source of the first optical element 73 and is arranged at the light emission position on the reflection surface 71a of the first polygon mirror 71. Has been. However, the distance from the second optical element 74 to the rotation reference point on the optical axis AX does not need to coincide with the light source of the first optical element 73, and the distance to the reflecting surface 72a of the second polygon mirror 72, etc. It can be appropriately adjusted in consideration.

  In the above description, the focal length f2 of the second optical element 74 in the X-axis direction is equal to the focal length f1 of the first optical element 73 in the X-axis direction, but the focal length f2 is different from the focal length f1. You can also. In this case, the angle range in which the laser beam RA2 is scanned is different from the angle range ± 2θ in which the laser beam RA1 is scanned, but has a proportional relationship multiplied by a coefficient. That is, also in this case, the second optical element 74 proportionally restores the angle of the laser light RA1 before entering the first optical element 73.

  Furthermore, the focal length f2 in the X-axis direction of the second optical element 74 can be negative as well as positive, and in this case, the laser beam RA2 can be scanned so as to diverge in the X direction.

  FIG. 4 is a diagram for explaining an example of a scanning pattern of the laser beam RA by the optical unit 21 in FIG. The laser beam RA is changed in the YZ plane by the second polygon mirror 72 while the angle Θ corresponding to the X-axis direction is periodically changed by a predetermined amount (unit scanning angle) by the first polygon mirror 71 in the target area AR. Irradiation is performed in an angle direction in which an angle Φ corresponding to a specific direction is periodically changed by a predetermined amount (unit scanning angle). In the illustrated example, the unit scanning angle by the first polygon mirror 71 and the unit scanning angle by the second polygon mirror 72 are substantially equal. However, the unit scanning angle by the first polygon mirror 71 and the second polygon mirror 71 are the same. Either one of the unit scanning angles by the mirror 72 can be made relatively small.

  Returning to FIG. 1, the first sensor 77 provided in association with the first polygon mirror 71 is a unit in which a light source and a light detection element are integrated, and inspection light is incident on the reflection surface 71 a to reflect light. By detecting this, it is possible to detect information related to the rotation posture of the first polygon mirror 71, and it is used to detect the rotation speed and the starting point of the rotation of the first polygon mirror 71. The second sensor 78 provided in association with the second polygon mirror 72 also has the same structure as the first sensor 77, and the second light 78 is detected by making the inspection light incident on the reflecting surface 72a and detecting the reflected light. Information relating to the rotation posture of the polygon mirror 72 can be detected, and is used to detect the rotation speed and the starting point of the rotation of the second polygon mirror 72. The detection outputs of the first and second sensors 77 and 78 are transmitted to the mirror rotation control unit 25 and the main control unit 40 via first and second motor drive units 23 and 24 described later.

  The first motor drive unit 23 operates under the control of the mirror rotation control unit 25, and rotates the motor at a constant speed by supplying a drive voltage to the motor incorporated in the first drive unit 75. The first drive unit 75 incorporates an encoder in association with the motor, and outputs an encoder signal indicating the rotation angle of the first polygon mirror 71 driven by the first drive unit 75 to the mirror rotation control unit 25. .

  The second motor drive unit 24 operates under the control of the mirror rotation control unit 25, and rotates the motor at a constant speed by supplying a drive voltage to the motor incorporated in the second drive unit 76. The second drive unit 76 incorporates an encoder in association with the motor, and outputs an encoder signal indicating the rotation angle of the second polygon mirror 72 driven by the second drive unit 76 to the mirror rotation control unit 25. .

  The mirror rotation control unit 25 incorporates a signal processing circuit such as a DSP, processes the encoder signals from the first and second motor drive units 23 and 24, and uses them for feedback. That is, the mirror rotation control unit 25 directly monitors the rotation state of the first and second polygon mirrors 71 and 72 to keep the rotation angle constant.

  The pulse generator 27 generates a reference pulse for operating the scanning device body 20 under the control of the main controller 40. The reference pulse from the pulse generator 27 is used for the operation of the mirror rotation control unit 25.

  The imaging device 30 captures a measurement target illuminated by the scanning device main body 20 or the like. Although detailed description is omitted, the imaging device 30 includes, for example, an optical system for imaging or condensing, an image intensifying device that converts an image formed by the optical system into a fluorescent image, and an image intensifying device. A signal conversion device that converts the fluorescent image output into an electrical image signal and a control unit that controls the operation of these device portions are provided. Note that the imaging device 30 may measure electromagnetic waves other than visible light. In this case, the optical characteristics such as transmittance and reflectance of the first optical element 73 and the second optical element 74 are adapted to the characteristics of the electromagnetic wave used.

  The main control unit 40 operates the pulse generator 27 and the mirror rotation control unit 25 as appropriate, and controls the rotation angles of the first and second polygon mirrors 71 and 72 via the first and second motor drive units 23 and 24. An encoder signal is received. The main control unit (scanning control unit) 40 outputs a trigger signal for generating laser pulses to the oscillation driving device 12 of the light source device 10 in synchronization with the rotation angles of the first and second polygon mirrors 71 and 72. The main control unit 40 (imaging control unit) outputs trigger signals for shooting, start, and end to the imaging device 30 in synchronization with the rotation angles of the first and second polygon mirrors 71 and 72. That is, the scanning device main body 20 can be operated to perform two-dimensional scanning with the laser light RA, and the imaging of the target by the imaging device 30 can be performed in accordance with the irradiation timing of the laser light RA.

  As described above, according to the measurement system 100 of the embodiment, the optical scanning device 60 that can perform accurate scanning by reducing distortion in the emission direction even when the scanning angle range is large is used. It is possible to perform highly accurate measurement by scanning the light beam in a wide angle range.

  Further, according to the optical scanning device 60 of the embodiment, the first optical element 73 disposed on the light emission side of the first polygon mirror 71 reduces the angle range of light rays incident on the reflection surface 72a of the second polygon mirror 72. Since the second optical element 74 arranged on the light exit side of the second polygon mirror 72 restores the angle of the light beam before entering the first optical element 73 in proportion, the first and second polygon mirrors 71 , 72 can be scanned at an accurate angle by reducing the distortion in the emission direction even if the angle range of scanning by.

  Although the present invention has been described based on the above embodiments, the present invention is not limited to the above embodiments, and can be implemented in various modes without departing from the gist thereof. Such modifications are also possible.

  That is, in the above embodiment, the laser light RA1 reflected by the first polygon mirror 71 is made parallel to the Y axis by the first optical element 73, but the laser light RA1 reflected by the first polygon mirror 71 is the first. The optical element 73 can have a predetermined inclination with respect to the Y axis. Also in this case, since the incident angle of the laser beam RA1 to the second polygon mirror 72 is uniform, it is possible to reduce the distortion in the emission direction and perform scanning at an accurate angle.

  The first optical element 73 does not need to be a cylindrical lens having an aspherical cross section, and may be a cylindrical lens having a spherical cross section, for example. The second optical element 74 does not need to be a toric lens having an aspherical cross section, and may be a toric lens having a spherical cross section, for example.

  DESCRIPTION OF SYMBOLS 10 ... Light source device, 11 ... Laser generator, 12 ... Oscillation drive device, 20 ... Scanning device main body, 21 ... Optical part, 23, 24 ... 1st and 2nd motor drive unit, 25 ... Mirror rotation control part, 27 ... Pulse generator, 30 ... Imaging device, 40 ... Main control unit, 60 ... Optical scanning device, 71 ... First polygon mirror, 72 ... Second polygon mirror, 71a ... First reflection surface, 72a ... Second reflection surface, 73 ... 1st optical element, 74 ... 2nd optical element, 75 ... 1st drive part, 76 ... 2nd drive part, 77, 78 ... 1st and 2nd sensor, 100 ... Measurement system, AX, AXO ... Optical axis, AX1 ... 1st rotation axis, AX2 ... 2nd rotation axis, RA ... Laser beam, RA0, RA1, RA2 ... Laser beam

Claims (8)

A first polygon mirror that rotates about a first axis of rotation;
A second polygon mirror that rotates about a second rotational axis substantially parallel to a line perpendicular to the first rotational axis;
A first optical element disposed on the light exit side of the first polygon mirror for adjusting the state of the light beam;
A second optical element disposed on the light exit side of the second polygon mirror for adjusting the state of the light beam;
A first driving unit for rotating the first polygon mirror;
A second drive unit for rotating the second polygon mirror,
The first optical element reduces an angular range of light rays incident on a reflection surface of the second polygon mirror;
The second optical element is an optical scanning device that proportionally restores an angle of a light beam before entering the first optical element.   2. The optical scanning device according to claim 1, wherein the first optical element substantially matches an angle of a light beam incident on a reflection surface of the second polygon mirror. The first optical element substantially matches the incident angles along a predetermined plane parallel to the second rotation axis of the light incident on the reflecting surface of the second polygon mirror;
The second optical element reflects, on the reflecting surface of the first polygon mirror, an emission angle of a light beam reflected by the reflecting surface of the second polygon mirror along another predetermined surface parallel to the second rotation axis. 2. The optical scanning device according to claim 1, wherein the emitted light beam substantially coincides with an emission angle along the predetermined plane parallel to the second rotation axis.   The optical scanning device according to claim 3, wherein the first optical element is a cylindrical lens.   5. The optical scanning device according to claim 3, wherein the second optical element is a toric lens. 6.   A first sensor provided in association with the first polygon mirror and capable of detecting information relating to a rotation posture of the first polygon mirror; and provided in association with the second polygon mirror; The optical scanning device according to claim 1, further comprising: a second sensor that enables detection of information related to the rotation posture.   7. The laser generator according to claim 1, further comprising: a laser generator that causes light to enter the first polygon mirror; and a scanning control unit that operates the laser generator in synchronization with the rotation postures of the first and second polygon mirrors. The optical scanning device according to any one of the above. The optical scanning device according to any one of claims 1 to 7, wherein the light is incident on the object while scanning the illumination;
An imaging device for detecting an event from a target as an image;
A measurement system comprising: an imaging control unit that operates the optical scanning device and the imaging device in synchronization.

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