CN108007365B - Three-dimensional measurement system and use method - Google Patents
Three-dimensional measurement system and use method Download PDFInfo
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- CN108007365B CN108007365B CN201711165594.1A CN201711165594A CN108007365B CN 108007365 B CN108007365 B CN 108007365B CN 201711165594 A CN201711165594 A CN 201711165594A CN 108007365 B CN108007365 B CN 108007365B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
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Abstract
The invention relates to a three-dimensional measurement system which is used for carrying out 3D measurement on a sample and comprises an installation frame, an X-Y galvanometer system, a laser range finder, an industrial camera and a reflection light path system, wherein the X-Y galvanometer system, the laser range finder, the industrial camera and the reflection light path system are arranged on the installation frame, the X-Y galvanometer system and the reflection light path system are arranged adjacently, laser emitted by the laser range finder enters the X-Y galvanometer system through the reflection light path system, and the X-Y galvanometer system is used for adjusting the light path of the laser so that the laser sequentially scans different positions of the surface of the sample to measure the heights of different positions of the surface of the sample to realize the 3D measurement; the industrial camera is matched with the X-Y galvanometer system to obtain a plurality of local photos of the sample, and then the local photos are spliced to obtain a complete sample photo, so that large-format 2D measurement is realized. The three-dimensional measurement system can carry out 3D measurement and large-format 2D measurement on the sample, and is economical and strong in practicability.
Description
Technical Field
The invention relates to the technical field of measuring equipment, in particular to a three-dimensional measuring system and a using method thereof.
Background
With the rapid upgrade development of the manufacturing industry, the requirements on the product quality are continuously improved, the requirements on the appearance and the dimensional accuracy of the product are more and more strict, and accordingly, a microscopic measurement system required by the product quality control also faces huge challenges and opportunities for upgrading and updating. Traditional microscopic measurement systems include mechanical, such as micrometers and vernier calipers; common optical microscopy, such as projectors and tool microscopes; the visual image measuring type, such as a machine vision image dimension measuring instrument, performs detection calculation according to a gray image processing algorithm. However, there are few practical and economical microscopic measurement systems that can perform 3D measurement and large-format 2D measurement simultaneously.
Disclosure of Invention
In view of this, it is necessary to provide a three-dimensional measurement system in order to solve the problem of low economical utility of the conventional microscopic measurement system capable of simultaneously performing 3D measurement and large-format 2D measurement.
A three-dimensional measurement system is used for carrying out 3D measurement and large-format 2D measurement on a sample and comprises an installation rack, an X-Y galvanometer system, a laser range finder, an industrial camera and a reflection light path system, wherein the X-Y galvanometer system, the laser range finder, the industrial camera and the reflection light path system are arranged on the installation rack, the X-Y galvanometer system and the reflection light path system are arranged adjacently, laser emitted by the laser range finder enters the X-Y galvanometer system through the reflection light path system, and the X-Y galvanometer system is used for adjusting the light path of the laser so that the laser sequentially scans different positions on the surface of the sample to measure the heights of different positions on the surface of the sample and realize 3D measurement; the industrial camera is matched with the X-Y galvanometer system to obtain a plurality of local photos of the sample, and then the local photos are spliced to obtain a complete sample photo, so that large-format 2D measurement is realized.
The laser emitted by the laser range finder of the three-dimensional measuring system is reflected by the reflection optical path system to change the propagation direction, enters the X-Y galvanometer system, is reflected to any point on the surface of the sample placed in the measuring area, then propagates along the reverse direction and is received by the laser range finder, and the height of the corresponding point on the surface of the sample can be measured; the method comprises the steps that an X-Y galvanometer system is controlled, laser is enabled to scan the surface of a sample in sequence, height data of any point on the surface of the sample are measured, and 3D data reconstruction is carried out according to the height data and coordinates of the corresponding X-Y galvanometer system, so that 3D measurement is achieved; the method comprises the following steps that external light is reflected by the surface of a sample and enters an X-Y galvanometer system, enters an industrial camera through a reflection light path system, is adjusted through the X-Y galvanometer system, the industrial camera obtains a plurality of local photos of the sample, and then is spliced to obtain a complete sample photo, so that large-format 2D measurement is realized; the three-dimensional measurement system can be applied to appearance or feature detection, quality control and the like of miniature products, and is high in economical efficiency and practicability and convenient to popularize.
In one embodiment, the X-Y galvanometer system comprises a main body and a flat field lens detachably connected with the main body, and the flat field lens is exposed out of the mounting frame.
In one embodiment, the main body comprises an X motor, an X lens, a Y motor and a Y lens, wherein the X motor and the Y motor are arranged on the mounting frame; the X lens with the X motor links to each other, the Y lens with the Y motor links to each other, X motor drive the X lens swing, Y motor drive the Y lens swing to the messenger passes through the X lens with the laser of Y lens reflection scans the different positions on sample surface in proper order.
In one embodiment, the reflection optical path system comprises a housing and a first lens accommodated in the housing, the first lens and the bottom wall of the housing are arranged at an included angle of 45 degrees, the housing is provided with a first optical path channel and a second optical path channel which are perpendicular to each other, the laser range finder is arranged right opposite to the first optical path channel, and the X-Y galvanometer system is adjacent to the second optical path channel.
In one embodiment, the housing defines a light exit, the industrial camera faces the light exit, and the reflective optical path system further includes a second lens received in the housing, wherein the second lens is configured to: the light is reflected by the X-Y galvanometer system to enter the second light path channel, is transmitted out by the first lens and then is reflected by the second lens to enter the industrial camera.
In one embodiment, the reflective optical path system further includes a dust-proof sheet, and the dust-proof sheet shields the light outlet.
A method of using the three-dimensional measurement system, comprising the steps of:
placing a sample in a measurement area, presetting photographing position coordinates of M multiplied by N X-Y galvanometer systems, swinging the X-Y galvanometer systems to the preset photographing position coordinates, triggering a camera to photograph, and obtaining a local picture of the sample corresponding to the preset photographing position coordinates;
repeating the process to obtain a plurality of sample local photos corresponding to each preset photographing position coordinate, wherein the sample local photos corresponding to each two adjacent preset photographing position coordinates are partially overlapped;
and calibrating and splicing the plurality of local photos of the sample into a complete photo of the sample after distortion correction treatment.
In one embodiment, the calibrating and splicing the plurality of partial sample photographs into a complete sample photograph is completed by the following steps:
placing a calibration plate in a measurement area, presetting photographing position coordinates of M multiplied by N X-Y galvanometer systems, triggering a camera to photograph after the X-Y galvanometer systems swing to the preset photographing position coordinates, and obtaining a local picture of the calibration plate corresponding to the preset photographing position coordinates;
repeating the process to obtain a plurality of calibration plate local pictures corresponding to each preset photographing position coordinate, wherein the calibration plate local pictures corresponding to each two adjacent preset photographing position coordinates are partially overlapped;
carrying out distortion correction processing on the plurality of calibration plate local pictures, splicing a complete calibration plate picture, and establishing a mapping relation between the plurality of calibration plate local pictures and the calibration plate picture;
and calibrating the plurality of sample local photos according to the mapping relation between the plurality of calibration plate local photos and the calibration plate photos, and then combining the plurality of sample local photos into a complete sample photo.
A method of using the three-dimensional measurement system, comprising the steps of:
placing a sample in a measuring area, and irradiating a laser beam emitted by a laser range finder to any appointed point on the sample through a first lens and an X-Y galvanometer system;
the laser beam is reflected by the sample, sequentially passes through the X-Y galvanometer system and the first lens, is received by the laser range finder, measures the height of the specified point, and reads the coordinate value of the X-Y galvanometer system at the moment;
correcting the height according to a calibration data correction set to obtain coordinates (X, Y, Z) of the specified point;
the laser beam scans the area where the sample is located in sequence, and the measuring process is repeated to obtain a plurality of coordinates (X, Y, Z);
generating a 3D image of the sample from the several coordinates (X, Y, Z).
In one embodiment, the calibration data correction set is obtained by:
placing a calibration block at a first position within a measurement area, the calibration block comprising a first step surface and a second step surface of different heights;
opening the laser range finder and the X-Y galvanometer system, adjusting the X-Y galvanometer system to enable laser beams emitted by the laser range finder to be incident on the first step surface, and reading the coordinates of the X-Y galvanometer system and the measurement result h1 of the laser range finder;
adjusting the X-Y galvanometer system to enable laser beams emitted by the laser range finder to enter a second step surface, and reading the coordinate of the X-Y galvanometer system and the measurement result h2 of the laser range finder;
moving the calibration block to other positions on the measurement panel, and repeating the measurement process;
and the height difference between the first step surface and the second step surface is A, and the difference value delta h between h1 and h2 is calculated, and the calibration data correction set of the laser range finder is generated by combining the coordinates of the X-Y galvanometer system.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional measurement system according to an embodiment;
FIG. 2 is a schematic view of the three-dimensional measurement system of FIG. 1 with the housing removed;
FIG. 3 is a schematic structural diagram of a reflective optical path system according to an embodiment;
fig. 4 is an exploded view of the reflection optical path system of fig. 3.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "inner", "outer", "left", "right" and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
Referring to fig. 1 and 2, in a first embodiment, a three-dimensional measurement system 100 includes a mounting frame 10, an X-Y galvanometer system 20, a laser range finder 30, and a reflective optical path system 40. The X-Y galvanometer system 20 and the reflection optical path system 40 are arranged on the mounting frame 10, the X-Y galvanometer system 20 and the reflection optical path system 40 are arranged adjacently, the laser range finder 30 is arranged on the mounting frame 10 and faces to one side, far away from the X-Y galvanometer system 20, of the reflection optical path system 40, laser emitted by the laser range finder 30 is reflected by the reflection optical path system 40 to change the propagation direction, enters the X-Y galvanometer system 20, is reflected to any point on the surface of a sample placed in a measurement area, then is propagated along the reverse direction and is received by the laser range finder 30, and the height of the corresponding point on the surface of the sample can be measured; the three-dimensional measurement system 100 can be applied to appearance or feature detection, quality control and the like of micro-miniature products.
The three-dimensional measurement system 100 further comprises a housing 50, the housing 50 is covered on the mounting rack 10, the housing 50 and the mounting rack 10 are jointly surrounded to form a containing space, the X-Y galvanometer system 20, the laser range finder 30 and the reflection optical path system 40 are all contained in the containing space, and the X-Y galvanometer system 20, the laser range finder 30 and the reflection optical path system 40 are protected and can be protected from dust by the arrangement of the housing 50.
Referring to fig. 3 and 4, the reflective optical path system 40 includes a housing 41 and a first mirror 42 accommodated in the housing 41, specifically, a first mounting groove 413 is formed on an inner wall of the housing 41, the first mirror 42 is disposed in the first mounting groove 413 and fixed to the housing 41, the first mirror 42 is disposed at an angle of 45 ° with respect to a bottom wall of the housing 41, the housing 41 forms a first optical path channel 411 and a second optical path channel 412 perpendicular to each other, referring to fig. 2, the first optical path channel 411 faces the laser range finder 30, the second optical path channel 412 is adjacent to the X-Y galvanometer system 20, the first mirror 42 is located at a junction of the first optical path channel 411 and the second optical path channel 412, and the laser emitted by the laser range finder 30 enters the first optical path channel 411, irradiates the first mirror 42, is reflected into the X-Y galvanometer system 20, and is reflected to a surface of a sample.
Referring to fig. 2, the X-Y galvanometer system 20 includes a main body 21 and a field flattener 22 detachably connected to the main body 21, and since the field flattener 22 is detachably connected to the main body 21, different types of field flattener 22 can be selected to be suitable for different scanning ranges, so as to increase the applicability of the three-dimensional measurement system 100, when a standard 100 type field flattener is used, the scanning range can reach 55X40 mm; the scanning range can reach 110x80mm by using a standard 170 type flat-field lens; using a standard 210 flat-field lens, the scanning range can reach 140x100mm, and the measurement process can be performed within a large breadth range. Further, the main body 21 includes an X motor 211, an X mirror 212 connected to a rotation shaft of the X motor 211, a Y motor 213, and a Y mirror 214 connected to a rotation shaft of the Y motor 213, the X motor 211 and the Y motor 213 are disposed on the mounting frame 10, the X motor 211 and the Y motor 213 are both in communication connection with a control system of the three-dimensional measurement system 100, and the X motor 211 and the Y motor 213 are controlled to drive the X mirror 212 and the Y mirror 214 to rotate, so that the laser reflected by the X mirror 212 and the Y mirror 214 moves in a measurement area, thereby realizing two-dimensional scanning.
The three-dimensional measurement system 100 further includes a measurement panel 60 disposed opposite the flat-field lens 22, and the upper surface of the measurement panel 60 is a measurement area.
Referring to fig. 2, the laser range finder 30 includes a laser transmitter 31 and a receiver (not shown), wherein the laser emitted from the laser transmitter 31 is transmitted to the surface of the sample, then reflected back by the sample and finally received by the receiver, and the height of the sample surface corresponding to the incident point of the laser is measured according to the principle of triangulation. The laser range finder 30 can be used for focusing the flat-field lens 22, light rays are focused to a fixed plane, namely a focusing plane, after passing through the flat-field lens 22, the distance from the flat-field lens 22 to the focusing plane is called as a focal length f, flat-field lenses of different models have different focal lengths f, the distance d from the flat-field lens 22 to a measuring area is measured through the laser range finder 30, if the distance d is equal to the focal length f, the measuring area can be judged to be located on the focusing plane, and if the distance d is not equal to the focal length f, the control system can control the driving system to adjust the height of the measuring panel 60, so that automatic focusing is realized.
The use method of the three-dimensional measurement system 100 comprises the following steps:
s11: a calibration block is placed at a first position in the measurement area, the calibration block including a first step surface and a second step surface which are different in height;
s12: opening the laser range finder and the X-Y galvanometer system, adjusting the X-Y galvanometer system to enable laser beams emitted by the laser range finder to be incident on the first step surface, and reading the coordinates of the X-Y galvanometer system and the measurement result h1 of the laser range finder;
s13: adjusting the X-Y galvanometer system to enable laser beams emitted by the laser range finder to enter a second step surface, and reading the coordinate of the X-Y galvanometer system and the measurement result h2 of the laser range finder;
s14: moving the calibration block to other positions on the measurement panel, and repeating the measurement process;
s15: and the height difference between the first step surface and the second step surface is A, and the difference value delta h between h1 and h2 is calculated, and the calibration data correction set of the laser range finder is generated by combining the coordinates of the X-Y galvanometer system.
S16: placing a sample in a measuring area, and irradiating a laser beam emitted by a laser range finder to any appointed point on the sample through a first lens and an X-Y galvanometer system;
s17: the laser beam is reflected by the sample, sequentially passes through the X-Y galvanometer system and the first lens, is received by the laser range finder, measures the height of the specified point, and reads the coordinate value of the X-Y galvanometer system at the moment;
s18: correcting the height according to a calibration data correction set to obtain coordinates (X, Y, Z) of the specified point;
s19: the laser beam scans the area where the sample is located in sequence, and the measuring process is repeated to obtain a plurality of coordinates (X, Y, Z);
s20: generating a 3D image of the sample from the several coordinates (X, Y, Z).
Wherein, S11-S15 are the calibration process of the laser range finder 30, and S16-S20 are the actual measurement process. The calibration process can effectively reduce the measurement error caused by optical path distortion.
Referring to fig. 2 and 4, in the second embodiment, the three-dimensional measurement system 100 further includes an industrial camera 70, the housing 41 is provided with a light outlet 414, the industrial camera 70 is disposed opposite to the light outlet 414, and a dust-proof sheet 416 made of a transparent material is mounted on the light outlet 414 (see fig. 3) for achieving a dust-proof effect. The reflective optical path system 40 further includes a second mirror 43 accommodated in the housing 41, the second mirror 43 is disposed at an angle of 45 ° with the bottom wall of the housing 41, a second mounting groove 415 is formed on the inner wall of the housing 41, and the second mirror 43 is disposed in the second mounting groove 415 and fixed to the housing 41. Ambient light is reflected into the X-Y galvanometer system 20 via the sample surface, partially transmitted through the first mirror 42 via the second optical path 412, and reflected by the second mirror 43 into the industrial camera 70.
The use method of the three-dimensional measurement system 100 comprises the following steps:
s21: placing a calibration plate in a measurement area, presetting photographing position coordinates of M multiplied by N X-Y galvanometer systems, triggering a camera to photograph after the X-Y galvanometer systems swing to the preset photographing position coordinates, and obtaining a local picture of the calibration plate corresponding to the preset photographing position coordinates;
s22: repeating the process to obtain a plurality of calibration plate local pictures corresponding to each preset photographing position coordinate, wherein the calibration pictures corresponding to each two adjacent preset photographing position coordinates are partially overlapped;
s23: carrying out distortion correction processing on the plurality of calibration plate local pictures, splicing a complete calibration plate picture, and establishing a mapping relation between the plurality of calibration plate local pictures and the calibration plate picture;
s24: placing a sample in a measurement area, presetting photographing position coordinates of M multiplied by N X-Y galvanometer systems, swinging the X-Y galvanometer systems to the preset photographing position coordinates, triggering a camera to photograph, and obtaining a local picture of the sample corresponding to the preset photographing position coordinates;
s25: repeating the process to obtain a plurality of sample local photos corresponding to each preset photographing position coordinate, wherein the sample local photos corresponding to each two adjacent preset photographing position coordinates are partially overlapped;
s26: carrying out distortion correction processing on the plurality of sample photos;
s27: and calibrating the plurality of sample local photos according to the mapping relation between the plurality of calibration plate local photos and the calibration plate photos, and then combining the plurality of sample local photos into a complete sample photo.
Wherein, S21-S23 are calibration processes, S24-S27 are concrete measurement processes, and the three-dimensional measurement system 100 is matched with the industrial camera 70 through the X-Y galvanometer system 20 to finish large-format image splicing and high-precision calibration work. The sample is placed on the measurement panel 60, and the light reflected on the surface of the sample is refracted by the flat-field lens 22, reaches the X lens 212 and the Y lens 214 of the X-Y galvanometer system 20, is reflected to the reflection optical path system 40 by the X lens 212 and the Y lens 214 in sequence, and finally reaches the industrial camera 70, thereby completing the picture acquisition task. Photographing position coordinates of the M × N X lenses 212 and the Y lenses 214 are preset, the X motor 211 and the Y motor 213 sequentially swing according to the photographing position coordinates, and after the photographing position coordinates are in place, the industrial camera 70 executes a photographing task to obtain M × N pictures. The preset photographing position coordinates are determined according to the field range of the industrial camera 70, so that each picture is closely connected, and adjacent pictures have an overlapping area. And after the calibration and image splicing algorithm is executed on the M multiplied by N images, a 2D large image of a sample is obtained, the measurement of the sample is realized, and the method can be used for detection, positioning and the like.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (9)
1. A method of using a three-dimensional measurement system, comprising the steps of:
placing a sample in a measurement area, presetting photographing position coordinates of M multiplied by N X-Y galvanometer systems, swinging the X-Y galvanometer systems to the preset photographing position coordinates, triggering a camera to photograph, and obtaining a local picture of the sample corresponding to the preset photographing position coordinates;
repeating the process to obtain a plurality of sample local photos corresponding to each preset photographing position coordinate, wherein the sample local photos corresponding to each two adjacent preset photographing position coordinates are partially overlapped;
after distortion correction processing is carried out on the local photos of the samples, the local photos are calibrated and spliced into a complete sample photo;
wherein the calibration and splicing into a complete sample photo is accomplished by the following steps:
placing a calibration plate in a measurement area, presetting photographing position coordinates of M multiplied by N X-Y galvanometer systems, triggering a camera to photograph after the X-Y galvanometer systems swing to the preset photographing position coordinates, and obtaining a local picture of the calibration plate corresponding to the preset photographing position coordinates;
repeating the process to obtain a plurality of calibration plate local pictures corresponding to each preset photographing position coordinate, wherein the calibration plate local pictures corresponding to each two adjacent preset photographing position coordinates are partially overlapped;
carrying out distortion correction processing on the plurality of calibration plate local pictures, splicing a complete calibration plate picture, and establishing a mapping relation between the plurality of calibration plate local pictures and the calibration plate picture;
and calibrating the plurality of sample local photos according to the mapping relation between the plurality of calibration plate local photos and the calibration plate photos, and then combining the plurality of sample local photos into a complete sample photo.
2. A method of using a three-dimensional measurement system, comprising the steps of:
placing a sample in a measuring area, and irradiating a laser beam emitted by a laser range finder to any appointed point on the sample through a first lens and an X-Y galvanometer system;
the laser beam is reflected by the sample, sequentially passes through the X-Y galvanometer system and the first lens, is received by the laser range finder, measures the height of the specified point, and reads the coordinate value of the X-Y galvanometer system at the moment;
correcting the height according to a calibration data correction set to obtain coordinates (X, Y, Z) of the specified point;
the laser beam scans the area where the sample is located in sequence, and the measuring process is repeated to obtain a plurality of coordinates (X, Y, Z);
generating a 3D image of the sample from the several coordinates (X, Y, Z).
3. The method of using the three-dimensional measurement system according to claim 2, wherein the calibration data correction set is obtained by:
placing a calibration block at a first position within a measurement area, the calibration block comprising a first step surface and a second step surface of different heights;
opening the laser range finder and the X-Y galvanometer system, adjusting the X-Y galvanometer system to enable laser beams emitted by the laser range finder to be incident on the first step surface, and reading the coordinates of the X-Y galvanometer system and the measurement result h1 of the laser range finder;
adjusting the X-Y galvanometer system to enable laser beams emitted by the laser range finder to enter a second step surface, and reading the coordinate of the X-Y galvanometer system and the measurement result h2 of the laser range finder;
moving the calibration block to other positions on the measurement panel, and repeating the measurement process;
and the height difference between the first step surface and the second step surface is A, and the difference value delta h between h1 and h2 is calculated, and the calibration data correction set of the laser range finder is generated by combining the coordinates of the X-Y galvanometer system.
4. The three-dimensional measurement system for realizing the use method of any one of claims 1 to 3, is characterized by comprising a mounting frame, an X-Y galvanometer system, a laser range finder, an industrial camera and a reflection optical path system, wherein the X-Y galvanometer system, the laser range finder, the industrial camera and the reflection optical path system are arranged on the mounting frame, the X-Y galvanometer system and the reflection optical path system are arranged adjacently, laser emitted by the laser range finder enters the X-Y galvanometer system through the reflection optical path system, and the X-Y galvanometer system is used for adjusting the optical path of the laser, so that the laser sequentially scans different positions of the surface of a sample to measure the heights of the different positions of the surface of the sample, thereby realizing 3D measurement; the industrial camera is matched with the X-Y galvanometer system to obtain a plurality of local photos of the sample, and then the local photos are spliced to obtain a complete sample photo, so that large-format 2D measurement is realized.
5. The three-dimensional measurement system of claim 4, wherein the X-Y galvanometer system includes a body and a field flattener lens removably coupled to the body, the field flattener lens being exposed from the mounting bracket.
6. The three-dimensional measurement system of claim 5, wherein the body comprises an X motor, an X mirror, a Y motor, and a Y mirror, the X motor and the Y motor being disposed on the mounting bracket; the X lens with the X motor links to each other, the Y lens with the Y motor links to each other, X motor drive the X lens swing, Y motor drive the Y lens swing to the messenger passes through the X lens with the laser of Y lens reflection scans the different positions on sample surface in proper order.
7. The three-dimensional measurement system according to claim 4, wherein the reflection optical path system comprises a housing and a first lens accommodated in the housing, the first lens is disposed at an angle of 45 ° with respect to the bottom wall of the housing, the housing is formed with a first optical path channel and a second optical path channel perpendicular to each other, the laser range finder is disposed opposite to the first optical path channel, and the X-Y galvanometer system is adjacent to the second optical path channel.
8. The three-dimensional measurement system of claim 7, wherein the housing defines a light exit opening, the industrial camera faces the light exit opening, the reflected light path system further comprises a second lens received in the housing,
wherein the second lens is configured to: the light is reflected by the X-Y galvanometer system to enter the second light path channel, is transmitted out by the first lens and then is reflected by the second lens to enter the industrial camera.
9. The three-dimensional measurement system according to claim 8, wherein the reflection optical path system further comprises a dust-proof sheet that shields the light exit port.
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