CN109945805A - A kind of high-precision angle sensor - Google Patents
A kind of high-precision angle sensor Download PDFInfo
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- CN109945805A CN109945805A CN201910281897.2A CN201910281897A CN109945805A CN 109945805 A CN109945805 A CN 109945805A CN 201910281897 A CN201910281897 A CN 201910281897A CN 109945805 A CN109945805 A CN 109945805A
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- photodetector
- convex lens
- laser
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- lens
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Abstract
The present invention relates to a kind of high-precision angle sensor, including laser, for emitting laser beams, the laser beam is incident to reflection component to the laser；The reflection component, for fixing testee, the reflection component is rotatable and circumferentially arranged with several reflectings surface, and each reflecting surface is for reflecting the laser beam；Concavees lens for receiving the laser beam of the reflective surface, and reflect laser beam；Photodetector for receiving the light beam after concavees lens reflect, and measures its incoming position；Processing system, specifically for the incoming position changing value according to light beam received on the photodetector, processing obtains the rotation angle value of testee.Laser beam is reflected by concavees lens, small angle variation can be enlarged into wide-angle variations, realizes being further amplified for rotation angle, therefore above-mentioned angular transducer can further increase amplification factor, then improve measurement accuracy.
Description
Technical field
The present invention relates to field of measuring technique, in particular to a kind of high-precision angle sensor.
Background technique
Angular transducer is a kind of common geometry quantity sensor, in aerospace, industrial production, machine-building and army
Thing science etc. has extensive use in many fields.However that there are amplification factors is still limited for existing angular transducer, it is right
In the not high problem of the poor for applicability or measurement accuracy of particular application.Such as application No. is 201510276408.6, name
The angular transducer referred to as provided in " the novel smooth arm amplifying type high-precision angle sensor of one kind and measurement method ", amplification factor
Lower, measurement accuracy needs to be further increased.
Summary of the invention
It is an object of the invention to improve the deficiency in the presence of the prior art, a kind of high-precision angle sensor is provided.
In order to achieve the above-mentioned object of the invention, the embodiment of the invention provides following technical schemes:
A kind of high-precision angle sensor, including laser, for emitting laser beams, the laser beam enters the laser
It is incident upon reflection component；
The reflection component, for fixing testee, the reflection component is rotatable and circumferentially arranged with several
Reflecting surface, each reflecting surface is for reflecting the laser beam；
Concavees lens for receiving the laser beam of the reflective surface, and reflect laser beam；
Photodetector for receiving the light beam after concavees lens reflect, and measures its incoming position；
Processing system, specifically for the incoming position changing value according to light beam received on the photodetector,
Processing obtains the rotation angle value of testee.Laser beam is reflected by concavees lens, small angle variation can be amplified
For wide-angle variations, being further amplified for rotation angle is realized, therefore above-mentioned angular transducer can further increase times magnification
Number, then improves measurement accuracy.
It further include convex lens two in further embodiment, the convex lens two is set to the concavees lens and photoelectricity is visited
It surveys between device, is incident to the photodetector from less parallel after the light beam planoconvex lens two that concavees lens project.Convex lens is added
Mirror two reduces the incidence angle variation range of laser light incident photodetector during angle measurement, improves measurement accuracy.
In further embodiment, the concavees lens are replaced with convex lens one, and between photodetector and convex lens one
Distance be greater than twice of convex lens one focal distance.Using the refraction of convex lens, being further amplified for rotation angle is realized, because
This above-mentioned angular transducer can further increase amplification factor, then improve measurement accuracy.
In further embodiment, the laser, concavees lens and photodetector form detecting head, the detecting head
Quantity is multiple, and the positional relationship of multiple detecting heads meets: the photodetector at least one detecting head can receive
Rotate the light beam of front and back.
In further embodiment, the laser, convex lens two, concavees lens and photodetector form detecting head, institute
It is multiple for stating the quantity of detecting head, and the positional relationship of multiple detecting heads meets: the photodetection at least one detecting head
Device can receive the light beam of rotation front and back.
It further include convex lens two in further embodiment, the convex lens two is set to the convex lens one and photoelectricity
Between detector, it is incident to the photodetector from less parallel after the light beam planoconvex lens two that convex lens one projects, and convex
The distance between lens two and convex lens one are greater than the focal distance of twice of convex lens one.
In further embodiment, the laser, convex lens one and photodetector form detecting head, the detecting head
Quantity be multiple, and the positional relationship of multiple detecting heads meets: photodetector at least one detecting head can receive
To the light beam of rotation front and back.
In further embodiment, the laser, convex lens one, two photodetector of convex lens form detecting head, institute
It is multiple for stating the quantity of detecting head, and the positional relationship of multiple detecting heads meets: the photodetection at least one detecting head
Device can receive the light beam of rotation front and back.
In further embodiment, the whole reflector shape size on the reflection component is identical.
In further embodiment, the reflection component is regular polygon column, each side of the regular polygon column
Face is the reflecting surface.
Compared with prior art, beneficial effects of the present invention:
1, laser beam is reflected by concavees lens, small angle variation can be enlarged into wide-angle variations, realize rotation
Gyration is further amplified, therefore above-mentioned angular transducer can further increase amplification factor, then improve measurement accuracy.
2, by convex lens two, so that laser beam is incident to photodetector in a manner of approximately parallel, reduces angle and survey
The incidence angle variation range of laser light incident photodetector during amount improves measurement accuracy.
3, continuous measurement is realized by multiple groups detecting head.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is a kind of structural schematic diagram of high-precision angle sensor provided in an embodiment of the present invention.
Fig. 2 is the structural schematic diagram of another high-precision angle sensor provided in an embodiment of the present invention.
Fig. 3 is the structural schematic diagram of another high-precision angle sensor provided in an embodiment of the present invention.
Fig. 4 is the structural schematic diagram of another high-precision angle sensor provided in an embodiment of the present invention.
Description of symbols in figure
Laser 1, laser beam 2, reflection component 3, reflecting surface 4, photodetector 5, concavees lens 6, convex lens 1, convex lens
Mirror 28.
Specific embodiment
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Usually exist
The component of the embodiment of the present invention described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.Cause
This, is not intended to limit claimed invention to the detailed description of the embodiment of the present invention provided in the accompanying drawings below
Range, but it is merely representative of selected embodiment of the invention.Based on the embodiment of the present invention, those skilled in the art are not doing
Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.
It (is specifically referred to compared to institute in background technique referring to Fig. 1, the present embodiment schematically discloses a kind of high-precision
The measurement accuracy of the angular transducer of description is higher) angular transducer, including laser 1, concavees lens 6, photodetector 5, instead
Penetrate component 3, reflection component 3 is for fixing testee, and reflection component 3 is rotatable and circumferentially arranged with several reflectings surface
4.In this high-precision angle sensor: laser 1 emits laser beam 2, and laser beam 2 is incident to any anti-in reflection component 3
Face 4 is penetrated, reflecting surface 4 reflects laser beam 2.Concavees lens 6 receive the laser beam 2 that reflecting surface 4 reflects, and make laser beam 2
It reflects.Photodetector 5 receives the light beam after the refraction of concavees lens 6, and measures its incoming position.Processing system is according to institute
The incoming position changing value of light beam received on photodetector 5 is stated, processing obtains the rotation angle value of testee.
As shown in Figure 1, reflection component 3, reflecting surface 4, the laser beam 2 before rotating operation are indicated by the solid line, after rotating operation
Reflection component 3, reflecting surface 4, laser beam 2 be represented by dashed line, the transmission path and reflection component 3 of laser beam 2, reflecting surface 4
Motion path is as follows:
Before rotation action, laser 1 emits laser beam 2, and laser beam 2 is incident to one of reflecting surface 4 of reflection component,
Laser beam 2 is reflexed to concavees lens 6 by reflecting surface 4, and concavees lens 6 reflect laser beam 2, and the light beam after refraction is incident to light
Electric explorer 5, photodetector 5 receives the laser beam 2 transmitted after the refraction of concavees lens 6, and measures its incoming position.At this time
It is denoted as the first incoming position herein.
After rotation action, laser 1 emits laser beam 2, and laser beam 2 is incident to one of reflecting surface 4 of reflection component,
Laser beam 2 is reflexed to concavees lens 6 by reflecting surface 4, and concavees lens 6 reflect laser beam 2, and the light beam after refraction is incident to light
Electric explorer 5, photodetector 5 receives the laser beam 2 transmitted after the refraction of concavees lens 6, and measures its incoming position.At this time
It is denoted as the second incoming position herein.
Processing system is handled and is obtained on the reflection component according to the variable quantity of the first incoming position and the second incoming position
The rotation angle value of testee.
And the continuous measurement in order to realize rotation angle, in the present embodiment, by laser 1, concavees lens 6, photodetection
Device 5 constitutes a detecting head, and as shown in Figure 1, quantity of the detecting head in this programme is two.Made by two detecting heads
Testee switches to another when the photodetector in one of detecting head does not receive light beam in rotary course
Detecting head receives, therefore can reliably ensure continuous angle measurement, enhances the practicability of angular transducer.In order to guarantee when it
In photodetector in a detecting head when not receiving light beam another detecting head can receive, specific embodiment
For the laser beam 2 that the laser 1 in two detecting heads projects is incident in the difference on reflection component 3.
As shown in Fig. 2, in another embodiment, in structure basis shown in Fig. 1, in this high-precision angle sensor
Detecting head further include convex lens 28, convex lens 28 is set between concavees lens 6 and photodetector 5.
Optic path process in this programme is as follows:
Before rotation action, laser 1 launches laser beam 2, and laser beam 2 is incident to the reflecting surface 4 on reflection component 3, instead
It penetrates face 4 to reflect laser beam 2, laser beam 2 is reflexed into concavees lens 6, concavees lens 6 receive the laser reflected through reflecting surface 4
Beam, and laser beam 2 is reflected.Convex lens 28 receives the laser beam after the refraction of concavees lens 6, and makes laser beam 2 again
Incident photodetector 5 after secondary refraction.It is denoted as the first incoming position herein at this time.
After rotation action, laser 1 launches laser beam 2, and laser beam 2 is incident to the reflecting surface 4 on reflecting part 3, instead
It penetrates face 4 to reflect laser beam 2, laser beam 2 is reflexed into concavees lens 6, concavees lens 6 receive the laser reflected through reflecting surface 4
Beam, and laser beam is reflected.Convex lens 28 receives the laser beam 2 after the refraction of concavees lens 6, and makes laser beam 2 again
Incident photodetector 5 after secondary refraction.It is denoted as the second incoming position herein at this time.
At this point, variable quantity of the processing system according to the first incoming position and the second incoming position, processing obtains the reflection
The rotation angle value of testee on component 3.In conjunction with Fig. 2, it is readily appreciated that, compared with scheme shown in FIG. 1, the program passes through convex
Lens 28, incidence photodetector swashs after so that rotation is taken action, the laser beam 2 of preceding incident photodetector 5 and rotation are taken action
2 less parallel of light beam avoids the laser light incident angle due to photodetector from changing the excessive influence for positional accuracy measurement, protects
The measurement accuracy of photodetector is hindered.
As shown in figure 3, in another embodiment, in structure basis shown in Fig. 1, the concavees lens 6 in Fig. 1 are replaced
For convex lens 1.The laser beam 2 that laser beam 2 is launched is incident to the reflecting surface 4 on reflection component 3, and reflecting surface 4 is by laser beam 2
Reflex to convex lens 1.Convex lens 1 reflects laser beam.In conjunction with Fig. 3, it is readily appreciated that, rotation action front and back,
The optical path of laser beam 2 and the focus intersection of convex lens 1 after the refraction of planoconvex lens 1 and the injection photodetector 5 that interlocks.For
Realize that photodetector 5 measures being further amplified for distance, i.e. realization reflection component 3 angle-measurement accuracy further mentions
Height, the distance between photodetector 5 and convex lens 1 are greater than the focal distance of twice of convex lens 1.
As shown in figure 4, in another embodiment, in structure basis shown in Fig. 3, in this high-precision angle sensor
Detecting head further include convex lens 28, convex lens 28 is set between convex lens 1 and photodetector 5.
In the present embodiment, optic path process is as follows:
Before rotation action, laser 1 launches laser beam 2, and laser beam 2 is incident to the reflecting surface 4 on reflection component 3, instead
It penetrates face 4 to reflect laser beam 2, laser beam 2 is reflexed into convex lens 1, the reception of convex lens 1 is reflected through reflecting surface 4
Laser beam 2, and laser beam 2 is reflected.And the laser beam incidence convex lens 28 that planoconvex lens 1 transmit, convex lens
28, which make laser beam 2 occur second, reflects, and is incident to photodetector 5.It is denoted as the first incoming position herein at this time.
After rotation action, laser 1 launches laser beam 2, and laser beam 2 is incident to the reflecting surface 4 on reflection component 3, instead
It penetrates face 4 to reflect laser beam 2, laser beam 2 is reflexed into convex lens 1, the reception of convex lens 1 is reflected through reflecting surface 4
Laser beam 2, and laser beam 2 is reflected.And the laser beam incidence convex lens 28 that planoconvex lens 1 transmit, convex lens
28, which make laser beam 2 occur second, reflects, and is incident to photodetector 5.It is denoted as the second incoming position herein at this time.And
As shown in figure 4, the laser beam of rotation laser beam of incident photodetector and the preceding incident photodetector of rotation action after taking action
Less parallel.
Processing system is handled and is obtained on the reflection component according to the variable quantity of the first incoming position and the second incoming position
The rotation angle value of testee.
In the present embodiment, first time refraction is carried out by the laser beam that one 7 pairs of lasers 1 of convex lens are launched, and
As shown in figure 4, the distance between convex lens 28 and convex lens 1 are greater than the focal distance of twice of convex lens one, so that photoelectricity is visited
It surveys the measurement of device 5 distance further to be amplified, that is, realizes further increasing for 3 angle-measurement accuracy of reflection component.Convex lens
28 make the laser beam 2 of incidence photodetector 5 after the laser beam 2 of the preceding incident photodetector 5 of rotation action and rotation action
Less parallel avoids the laser light incident angle due to photodetector 5 from changing the excessive influence for angle-measurement accuracy, ensures
The measurement accuracy of photodetector.
The whole reflector shape size phase in the angular transducer of above-mentioned several different structures, on reflection component
Together.As a kind of specific embodiment, reflection component is regular polygon column, and each side of regular polygon column is anti-
Penetrate face.It is identical so that in rotary course by the whole reflector shape size on reflection component, it is surveyed on photodetector
The ratio of the light beam incidence distance and angle variable quantity that obtain remains unchanged.
And in the angular transducer of above-mentioned several different structures, continuous measurement is realized by using two detecting heads, but
It will be appreciated that, in the case where guaranteeing to realize continuous measurement, not limit the number of detecting head, be also possible to three, four
And four or more.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.
Claims (10)
1. a kind of high-precision angle sensor, which is characterized in that including laser, the laser for emitting laser beams, institute
It states laser beam and is incident to reflection component；
The reflection component, for fixing testee, the reflection component is rotatable and circumferentially arranged with several reflections
Face, each reflecting surface is for reflecting the laser beam；
Concavees lens for receiving the laser beam of the reflective surface, and reflect laser beam；
Photodetector for receiving the light beam after concavees lens reflect, and measures its incoming position；
Processing system, specifically for the incoming position changing value according to light beam received on the photodetector, processing
Obtain the rotation angle value of testee.
2. high-precision angle sensor according to claim 1, which is characterized in that further include convex lens two, the convex lens
Mirror two is set between the concavees lens and photodetector, is entered from less parallel after the light beam planoconvex lens two that concavees lens project
It is incident upon the photodetector.
3. high-precision angle sensor according to claim 1, which is characterized in that a concavees lens convex lens generation
It replaces, and the distance between photodetector and convex lens one are greater than the focal distance of twice of convex lens one.
4. high-precision angle sensor according to claim 1, which is characterized in that the laser, concavees lens and photoelectricity
Detector forms detecting head, and the quantity of the detecting head is multiple, and the positional relationship of multiple detecting heads meets: at least one
Photodetector in detecting head can receive the light beam of rotation front and back.
5. high-precision angle sensor according to claim 2, which is characterized in that the laser, convex lens two, recessed
Mirror and photodetector form detecting head, and the quantity of the detecting head is multiple, and the positional relationship of multiple detecting heads meets: extremely
Photodetector in a rare detecting head can receive the light beam of rotation front and back.
6. high-precision angle sensor according to claim 3, which is characterized in that further include convex lens two, the convex lens
Mirror two is set between the convex lens one and photodetector, approximate flat after the light beam planoconvex lens two that convex lens one projects
Row is incident to the photodetector, and the distance between convex lens two and convex lens one greater than twice of convex lens one focal length away from
From.
7. high-precision angle sensor according to claim 3, which is characterized in that the laser, convex lens one and light
Electric explorer forms detecting head, and the quantity of the detecting head is multiple, and the positional relationship of multiple detecting heads meets: at least one
Photodetector in a detecting head can receive the light beam of rotation front and back.
8. high-precision angle sensor according to claim 6, which is characterized in that the laser, convex lens one, convex lens
Two photodetector of mirror forms detecting head, and the quantity of the detecting head is multiple, and the positional relationship of multiple detecting heads meets: extremely
Photodetector in a rare detecting head can receive the light beam of rotation front and back.
9. high-precision angle sensor according to claim 1, which is characterized in that described in the whole on the reflection component
Reflector shape size is identical.
10. high-precision angle sensor according to claim 9, which is characterized in that the reflection component is regular polygon
Column, each side of the regular polygon column are the reflecting surface.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910281897.2A CN109945805A (en) | 2019-04-09 | 2019-04-09 | A kind of high-precision angle sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910281897.2A CN109945805A (en) | 2019-04-09 | 2019-04-09 | A kind of high-precision angle sensor |
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| CN109945805A true CN109945805A (en) | 2019-06-28 |
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| CN201910281897.2A Pending CN109945805A (en) | 2019-04-09 | 2019-04-09 | A kind of high-precision angle sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114894124A (en) * | 2022-05-17 | 2022-08-12 | 北方民族大学 | Interferometric angle measuring system and measuring method |
| CN115104041A (en) * | 2020-02-12 | 2022-09-23 | 科纳普公司 | Grating system comprising at least two reflective grating arrangements |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5369066A (en) * | 1976-12-02 | 1978-06-20 | Nippon Telegr & Teleph Corp <Ntt> | Detection system for optical posture angle displacement |
| JPS60166808A (en) * | 1984-02-10 | 1985-08-30 | Toshiba Corp | Shape measuring apparatus |
| JPH02165007A (en) * | 1988-12-20 | 1990-06-26 | Rikagaku Kenkyusho | Optical detecting method for rotational angle |
| CN1979091A (en) * | 2005-12-02 | 2007-06-13 | 鸿富锦精密工业（深圳）有限公司 | Optical measuring system |
| CN204854659U (en) * | 2015-05-26 | 2015-12-09 | 张白 | Novel light arm enlargies formula high accuracy angle sensor |
-
2019
- 2019-04-09 CN CN201910281897.2A patent/CN109945805A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5369066A (en) * | 1976-12-02 | 1978-06-20 | Nippon Telegr & Teleph Corp <Ntt> | Detection system for optical posture angle displacement |
| JPS60166808A (en) * | 1984-02-10 | 1985-08-30 | Toshiba Corp | Shape measuring apparatus |
| JPH02165007A (en) * | 1988-12-20 | 1990-06-26 | Rikagaku Kenkyusho | Optical detecting method for rotational angle |
| CN1979091A (en) * | 2005-12-02 | 2007-06-13 | 鸿富锦精密工业（深圳）有限公司 | Optical measuring system |
| CN204854659U (en) * | 2015-05-26 | 2015-12-09 | 张白 | Novel light arm enlargies formula high accuracy angle sensor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115104041A (en) * | 2020-02-12 | 2022-09-23 | 科纳普公司 | Grating system comprising at least two reflective grating arrangements |
| CN114894124A (en) * | 2022-05-17 | 2022-08-12 | 北方民族大学 | Interferometric angle measuring system and measuring method |
| CN114894124B (en) * | 2022-05-17 | 2024-04-12 | 天航长鹰(江苏)科技有限公司 | Interference type angle measurement system and measurement method |
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Application publication date: 20190628 |