CN105223126A - A kind of polymkeric substance irradiation damage proving installation and method of testing - Google Patents
A kind of polymkeric substance irradiation damage proving installation and method of testing Download PDFInfo
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- CN105223126A CN105223126A CN201510745208.0A CN201510745208A CN105223126A CN 105223126 A CN105223126 A CN 105223126A CN 201510745208 A CN201510745208 A CN 201510745208A CN 105223126 A CN105223126 A CN 105223126A
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Abstract
The invention discloses a kind of proving installation and method of testing of polymkeric substance irradiation damage, described device comprises separate light source chamber, light path room and sample chamber; Described light path indoor are provided with optic path parts and optical detection component; Described optic path parts comprise: beam attenuator, even bundle device, shutter, condenser lens, the first beam splitter and the second beam splitter; Described optical detection component comprises energy meter and beam quality analysis instrument, for testing beam energy and the facula area of position, to obtain irradiation to the energy density on sample; Described sample chamber is placed with specimen holder, sample and mass spectrograph, wherein specimen holder has three-dimensional regulating mechanism, for carrying out x, y and z axes three-dimensional regulation to described specimen holder, the gas composition of sample chamber described in described mass spectrograph on-line testing, whether there is irradiation damage with Real-Time Monitoring and judgement sample, analyze the fragment gas composition that sample generation irradiation damage produces simultaneously.
Description
Technical field
The present invention relates to a kind of material radiation damage proving installation and method of testing, be specifically related to a kind of excimer laser to the irradiation damage proving installation of polymeric material and method of testing, belong to the technical field of measurement and test of material property.
Background technology
Laser application system (as litho machine) can use various types of material, laser direct projection or scatter to material surface, may produce irradiation damage, thus material generating function was lost efficacy to material.The peak power of the laser (as excimer laser) of some short wavelengths is high, photon energy is high and material is also high to its absorptivity, the chemical bond of some polymkeric substance directly can be interrupted, some the gas fragment produced can pollute optical system, affects lithography performance.Therefore, accurately must obtain the irradiation damage threshold value of polymkeric substance, analyze the gas fragment component that damage produces, calculate the total amount of pollutant (as hydrocarbon) in damage component, thus instruct the type selecting of litho machine material.
Fig. 1 is typical optical thin-film laser injure proving installation structural representation in prior art, it is a kind of optical thin-film laser injure proving installation based on optical microphotograph imaging and polarization fading, but this device can not detect the irradiation damage of sample in real time, and the damage threshold therefore obtained has certain error; And this device can not real-time qualitative and analyze quantitatively polymkeric substance irradiation damage produce gas fragment component.
Summary of the invention
In view of this, the present invention proposes a kind of proving installation and method of polymkeric substance irradiation damage.The present invention first accurately tests irradiation to the excimer laser energy density on polymkeric substance, accurately obtains the irradiation damage threshold value of polymkeric substance; Secondly, the material composition of qualitative analysis polymkeric substance generation irradiation damage, analyzes the chemical bond of fracture further in conjunction with its structure of chemical composition; Finally, the total amount of pollutant that irradiation damage produces is calculated.
For solving the problem, the present invention proposes a kind of proving installation of polymkeric substance irradiation damage, comprise separate light source chamber, light path room and sample chamber, described light path room and sample chamber are vacuum chamber, and described light source chamber, are cut off by flange window between light path room and sample chamber;
Be provided with the excimer laser source of the excimer laser for generation of predetermined wavelength in described light source chamber, the excimer laser produced incides in light path room;
Described light path indoor are provided with optic path parts and optical detection component; Described optic path parts comprise: beam attenuator, even bundle device, shutter, condenser lens, the first beam splitter and the second beam splitter, for the excimer laser inciding described light path room being become energy is adjustable, energy density is uniform and the controllable focal beam spot of exposure time and go out to be shot out; Described optical detection component comprises energy meter and beam quality analysis instrument, for testing beam energy and the facula area of position, to obtain irradiation to the energy density on sample;
Described sample chamber is placed with specimen holder, sample, mass spectrograph and vacuum pump group, wherein specimen holder has three-dimensional regulating mechanism, for carrying out x, y and z axes three-dimensional regulation to described specimen holder, the gas composition of sample chamber described in described mass spectrograph on-line testing, whether irradiation damage is there is with Real-Time Monitoring and judgement sample, analyze the fragment gas composition that sample generation irradiation damage produces, described vacuum pump group is used for vacuumizing sample chamber simultaneously.
The invention allows for a kind of method of testing utilizing said apparatus to carry out polymkeric substance irradiation damage, it comprises:
Polymer samples is placed on the specimen holder in sample chamber, three-dimensional regulation specimen holder, record x, y and z axes coordinate, with calculation sample by the distance at irradiation face and condenser lens center;
Light path room and sample chamber are vacuumized, opens gas composition in mass spectrograph continuance test sample chamber;
Close shutter, open quasi-molecule laser source and be transferred to a predetermined irradiation energy density;
Vacuum tightness when sample chamber enters 10
-7after Pa, open shutter and control exposure time, irradiation being carried out to first exposure spots of sample, observes the spectrum peak of mass spectrograph simultaneously; If without obviously sudden change, keep the z-axis coordinate of specimen holder constant, regulate its x-axis and y-axis coordinate, make irradiation hot spot move to next exposure spots of sample, regulate beam attenuator to increase irradiation energy density, observe mass spectra peak change simultaneously; By that analogy, until find the obvious sudden change of mass spectra peak, then judge that polymkeric substance there occurs irradiation damage, now irradiation is the irradiation damage threshold value of sample to the laser energy density on sample.
Compared with prior art, the excimer laser of the said apparatus that the present invention proposes is transmitted in a vacuum, reduce the energy attenuation in optic path process and test error, be conducive to testing irradiation energy density more accurately, in conjunction with highly sensitive irradiation damage Real-Time Monitoring parts, and then obtain the irradiation damage threshold value of polymkeric substance more accurately.The said apparatus that the present invention proposes and the gas fragment component that method energy analyzing polymers generation irradiation damage produces, and then the dirt total amount that the chemical bond of analyzing polymers fracture produces with calculating irradiation damage.Test result can instruct practical engineering application.
Accompanying drawing explanation
Fig. 1 is existing one typical optical thin-film laser injure proving installation structural representation.
Fig. 2 is the structural representation of polymkeric substance irradiation damage proving installation in the present invention.
Wherein: 1-light source chamber, 2-light path room, 3-sample chamber, 4-flange window, 5-beam attenuator, the even bundle device of 6-, 7-first beam splitter, 8-condenser lens, 9-second beam splitter, 10-shutter, 11-energy meter, 12-beam quality analysis instrument, 13-sample, 14-specimen holder, 15-mass spectrometer, 16-vacuum pump group.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
As shown in Figure 2, the proving installation of a kind of polymkeric substance irradiation damage that the present invention proposes, comprise 3 relatively independent chambers, light source chamber 1, light path room 2 and sample chamber 3 respectively, wherein said light path room 2 and sample chamber 3 are vacuum chamber, adopt flange window 4 to cut off between above-mentioned three chambers, window is CaF
2material, can pass through excimer laser, and its transmissivity is T
4, T
4usually more than 99.9%.
Accommodate the quasi-molecule laser source of irradiation in described light source chamber 1, it is for generation of the excimer laser of predetermined wavelength, is preferably the ArF excimer laser of 193nm, can certainly selects other excimer laser according to actual needs in the present embodiment.
Described light path room 2 is for transmission and detect excimer laser, comprises optic path parts and optical detection component.Wherein optic path parts comprise: the beam attenuator 5 placed successively along optical path direction, even bundle device 6, the first beam splitter 7, condenser lens 8, second beam splitter 9 and shutter 10.In described beam attenuator 5 along light path successively and symmetry be placed with plated film decay eyeglass and compensate eyeglass, regulated the angle of inclination of two eyeglasses by gears simultaneously, control described quasi-molecule laser source irradiation to the energy on sample; When angle is 0 °, transmissivity is 100%, when angle is 45 °, and transmissivity < 5%.Incide even bundle device 6 from the excimer laser of beam attenuator 5 outgoing, make to become the uniform excimer laser of energy density from the light beam of even bundle device 6 outgoing.First beam splitter 7 is that 45° angle is placed with light path, and light beam is divided into two parts, and a part reflexes to energy meter 11 from the first beam splitter 7, and another part incides on condenser lens 8 through the first beam splitter 7, and the transmissivity of the first beam splitter 7 is T
7, its scope is 50% ~ 80%.Light beam can converge by condenser lens 8, and its focal length is fixed as F, and the preferable range of focal length F is the transmissivity T of 100 ~ 500mm, condenser lens 8
8usually more than 99%.Second beam splitter 9 is placed between condenser lens 8 and shutter 10, and in the second beam splitter 9 and condenser lens 8, distance is in the heart fixed as L, and its and light path are also that 45° angle is placed, and this distance L is relevant with the concrete size of described device; Light beam is also divided into two parts by the second beam splitter 9, and a part is reflected on beam quality analysis instrument 12, and another part incides shutter 10 through the second beam splitter 9, and the transmissivity of the second beam splitter 9 is T
9, its scope is 50% ~ 80%.Shutter 10 for controlling the rapid break-make of light path, thus controls laser irradiation to the time on sample, transmissivity 100% when it is opened, transmissivity 0 during closedown.Optical detection component comprises energy meter 11 and beam quality analysis instrument 12, for directly measuring the ENERGY E of position place light beam
11with facula area A
12.
Polymer samples 13, specimen holder 14, mass spectrograph 15 and vacuum pump group 16 is placed with in described sample chamber 3.Specimen holder 14 can carry out x, y and z axes three-dimensional regulation, and adjustment and measuring accuracy are 0.01mm.Described sample 13 is placed on specimen holder 14, and vertical with light path by irradiation face.The vertical range at assumes samples seat 14 left side and condenser lens 8 center is fixed and is known as L
0, when z coordinate is zero, the focus of condenser lens 8 is just in time on the left side of specimen holder 14; Regulate z-axis coordinate, can change the distance at specimen holder 14 left side and condenser lens 8 center, thus change irradiation to the facula area on sample 13, when regulating z-axis near condenser lens 8, z coordinate is just; Regulate x-axis and the y-axis coordinate of specimen holder 14, can select the exposure spots of sample 13.Measuring the thickness obtaining sample 13 is d.Vacuum pump group 16 is for vacuumizing sample chamber 3, and its effective pumping speed is known as S.Mass spectrograph 15 can gas composition in real-time testing sample chamber 3.
Described material radiation damage proving installation also comprises a set of control module, and it is for Electronic control quasi-molecule laser source 1, beam attenuator 5, shutter 10, energy meter 11, beam quality analysis instrument 12, specimen holder 14 and vacuum pump group 16.By software operation, the inflation/deflation of quasi-molecule laser source 1 can be controlled, regulate its sparking voltage and repetition frequency; The angle of inclination of beam attenuator 5 eyeglass can be controlled, thus control the decay of energy; Manipulation shutter 10 can control exposure time and irradiance pulse number; Manipulate the startup of energy meter 11 and beam quality analysis instrument 12, collection and stopping; The triaxial coordinate of regulation and control specimen holder 14, can make the vertical irradiation of excimer laser to sample 13 by each position in irradiation face; Control the start and stop of vacuum pump group 16, make the vacuum tightness of the front sample chamber 3 of irradiation experiment be better than 1 × 10
-6pa.
The proving installation of material radiation damage also comprises a set of data acquisition unit, and for the signal that Real-time Collection energy meter 11, beam quality analysis instrument 12 and mass spectrograph 15 detect, it can simply calculate, show and preserve data.
Irradiation calculates as formula (1) to the facula area A on sample.Wherein, F is the focal length of condenser lens 8; L
0for fixing and the vertical range at known specimen holder 14 left side and condenser lens 8 center; D is that measurement obtains thickness of sample; When z is irradiation experiment specimen holder 14 be conditioned after z-axis coordinate; L is the distance at fixing and known second beam splitter 9 and condenser lens 8 center; A
12for the facula area that beam quality analysis instrument 12 position is directly measured.
Irradiation calculates as formula (2) to the ENERGY E on sample.Wherein T
4, T
7, T
8and T
9being respectively the transmissivity of flange window 4, first beam splitter 7, condenser lens 8 and the second beam splitter 9, by measuring the ratio of emergent light and incident light energy respectively, can obtaining; E
11for the beam energy that energy meter 11 position is directly measured.
Irradiation is irradiation to the ratio of the ENERGY E on sample with facula area A to the energy density e on sample, i.e. e=E/A.The irradiation damage threshold value of material is material generation irradiation damage moment, and irradiation is to the laser energy density on sample.
Mass spectrograph 15 has high sensitivity, mass number scope is 1-200amu, through accurate calibration, it both can detect the ion current (or dividing potential drop) of certain moment each mass number, can detect again extra fine quality number ion current (or dividing potential drop) over time.
The invention allows for a kind of polymkeric substance irradiation damage method of testing, it utilizes the above-mentioned polymkeric substance irradiation damage proving installation put up to realize, and specifically comprises:
First, polymer samples 13 is placed on the specimen holder 14 in sample chamber 3, three-dimensional regulation specimen holder 14, record x, y and z axes coordinate, so as calculation sample 13 by the distance (L at irradiation face and condenser lens 8 center
0-d-z); Then light path room 2 and sample chamber 3 are vacuumized; Under suitable vacuum condition, open gas composition (sweeping spectrum) in mass spectrograph 15 continuance test sample chamber, close shutter 10, open quasi-molecule laser source 1 and be transferred to a lower irradiation energy density; Vacuum tightness when sample chamber 3 enters 10
-7after Pa, carry out irradiation damage test.Open shutter 10 and control exposure time, irradiation is carried out to first point of sample 13, observing the spectrum peak of mass spectrograph 15 simultaneously; If without obviously sudden change, keep the z coordinate of specimen holder 14 constant, regulate itself x and y coordinate, make irradiation hot spot move to next exposure spots of sample 13, regulate beam attenuator 5 to increase irradiation energy density, observe mass spectra peak change simultaneously; By that analogy, until find the obvious sudden change (as: hydrocarbon increases suddenly) of mass spectra peak, then can judge that polymkeric substance there occurs irradiation damage, now irradiation is the irradiation damage threshold value of sample 13 to the laser energy density on sample.
Described method also comprises the mass spectrogram before and after the damage of comparative polymer sample irradiation, the mass number that spectrum of mutation peak is corresponding is the gas fragment component of the raw damage of excimer laser irradiation polymerization produce, the component structure of conjugated polymer, can analyze the chemical bond of fracture further.
Mass spectrogram before and after the damage of comparative polymer sample irradiation, gas fragment sports Δ P in the dividing potential drop of mass number i
i(Pa), exposure time is t (s), nytron dirt (the being greater than 44amu's) total amount N (mol/cm that sample unit area produces by irradiation damage
2) formula (3) can be adopted to calculate.Wherein, S is the effective pumping speed (m of sample vacuum chamber pump
3/ s); N
afor Avogadro's number; Temperature (K) when T is irradiation experiment; R is gas law constant (Pam
3k
-1mol
-1); A is irradiation facula area (cm
2), formula (1) is shown in its calculating.
There is the polymer samples of irradiation damage, after taking-up, observe surface topography and the microstructure of irradiation damage by 3D surface profiler or scanning electron microscope further, analyze irradiation damage mechamism.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a proving installation for polymkeric substance irradiation damage, comprises separate light source chamber, light path room and sample chamber, and described light path room and sample chamber are vacuum chamber, and described light source chamber, is cut off by flange window between light path room and sample chamber;
Be provided with the excimer laser source of the excimer laser for generation of predetermined wavelength in described light source chamber, the excimer laser produced incides in light path room;
Described light path indoor are provided with optic path parts and optical detection component; Described optic path parts comprise: beam attenuator, even bundle device, shutter, condenser lens, the first beam splitter and the second beam splitter, for the excimer laser inciding described light path room being become energy is adjustable, energy density is uniform and the controllable focal beam spot of exposure time and go out to be shot out; Described optical detection component comprises energy meter and beam quality analysis instrument, for testing beam energy and the facula area of position, to obtain irradiation to the energy density on sample;
Described sample chamber is placed with specimen holder, sample, mass spectrograph and vacuum pump group, wherein specimen holder has three-dimensional regulating mechanism, for carrying out x, y and z axes three-dimensional regulation to described specimen holder, the gas composition of sample chamber described in described mass spectrograph on-line testing, whether irradiation damage is there is with Real-Time Monitoring and judgement sample, analyze the fragment gas composition that sample generation irradiation damage produces, described vacuum pump group is used for vacuumizing sample chamber simultaneously.
2. the proving installation of polymkeric substance irradiation damage as claimed in claim 1, wherein, in described beam attenuator along light path successively and symmetry be placed with plated film decay eyeglass and compensate eyeglass, regulated the angle of inclination of two eyeglasses by gears simultaneously, control described quasi-molecule laser source irradiation to the energy on sample; Incide even bundle device from the excimer laser of described beam attenuator outgoing, make to become the uniform excimer laser of energy density from the light beam of even bundle device outgoing; Described first beam splitter and light path are that 45° angle is placed, and light beam is divided into two parts, and a part reflexes to described energy meter from described first beam splitter, and another part incides on condenser lens through described first beam splitter; Light beam can converge by described condenser lens; Described second beam splitter is placed between condenser lens and shutter, and also places in 45° angle with light path, and for light beam is divided into two parts, a part is reflected on beam quality analysis instrument, and another part incides shutter through described second beam splitter; Described shutter for controlling the rapid break-make of light path, thus controls laser irradiation to the time on sample.
3. the proving installation of polymkeric substance irradiation damage as claimed in claim 1, wherein, by regulating the z-axis coordinate of described specimen holder, change irradiation to the facula area on sample, by adjusting x-axis and the y-axis coordinate of specimen holder, select the different exposure spots on described sample.
4. the proving installation of the polymkeric substance irradiation damage as described in any one of claim 1-3, it also comprises control module, and its effect is as follows:
Control the inflation/deflation of quasi-molecule laser source, regulate its sparking voltage and repetition frequency;
Control the angle of inclination of eyeglass in beam attenuator, thus control the decay of energy;
Manipulation shutter is to control exposure time and irradiance pulse number;
Manipulate the startup of energy meter and beam quality analysis instrument, collection and stopping;
The three-dimensional regulating mechanism of Quality control seat, makes the vertical irradiation of excimer laser to sample by each position in irradiation face.
5. the proving installation of the polymkeric substance irradiation damage as described in any one of claim 1-3, it also comprises data acquisition unit, for the signal that Real-time Collection energy meter, beam quality analysis instrument and mass spectrograph detect, and calculates accordingly.
6. utilize device as claimed in claim 1 to carry out a method of testing for polymkeric substance irradiation damage, it comprises:
Polymer samples is placed on the specimen holder in sample chamber, three-dimensional regulation specimen holder, record x, y and z axes coordinate, with calculation sample by the distance at irradiation face and condenser lens center;
Light path room and sample chamber are vacuumized, opens gas composition in mass spectrograph continuance test sample chamber;
Close shutter, open quasi-molecule laser source and be transferred to a predetermined irradiation energy density;
Vacuum tightness when sample chamber enters 10
-7after Pa, open shutter and control exposure time, irradiation being carried out to first exposure spots of sample, observes the spectrum peak of mass spectrograph simultaneously; If without obviously sudden change, keep the z-axis coordinate of specimen holder constant, regulate its x-axis and y-axis coordinate, make irradiation hot spot move to next exposure spots of sample, regulate beam attenuator to increase irradiation energy density, observe mass spectra peak change simultaneously; By that analogy, until find the obvious sudden change of mass spectra peak, then judge that polymkeric substance there occurs irradiation damage, now irradiation is the irradiation damage threshold value of sample to the laser energy density on sample.
7. method as claimed in claim 6, it also comprises:
Mass spectrogram before and after the damage of comparative polymer sample irradiation, determines that the mass number that spectrum of mutation peak is corresponding is the raw gas fragment components damaged of excimer laser irradiation polymerization produce.
8. method as claimed in claim 6, wherein, in described beam attenuator along light path successively and symmetry be placed with plated film decay eyeglass and compensate eyeglass, regulated the angle of inclination of two eyeglasses by gears simultaneously, control described quasi-molecule laser source irradiation to the energy on sample.
9. method as claimed in claim 6, wherein, described irradiation energy density is irradiation to the ratio of the energy on sample with facula area, and described facula area calculates as follows:
Wherein, F is the focal length of described condenser lens; L
0for the vertical range at described specimen holder left side and described condenser lens center; D is that measurement obtains thickness of sample; When z is irradiation experiment specimen holder be conditioned after z-axis coordinate; L is the distance at described second beam splitter and described condenser lens center; A12 is the facula area that described beam quality analysis instrument position is directly measured;
Described irradiation calculates as follows to the energy on sample:
Wherein, T
4, T
7, T
8and T
9be respectively the transmissivity of described flange window, the first beam splitter, condenser lens and the second beam splitter, E
11for the beam energy that described energy meter position is directly measured.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105548015A (en) * | 2016-01-13 | 2016-05-04 | 中国科学院合肥物质科学研究院 | Small-pore-diameter long-distance optical compatible vacuum sample cavity |
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| CN106814125A (en) * | 2016-12-08 | 2017-06-09 | 中国科学院光电研究院 | A kind of material radiation causes the online testing device and method of testing deflated |
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| CN112630983A (en) * | 2020-12-24 | 2021-04-09 | 中国工程物理研究院激光聚变研究中心 | Laser system, laser-induced damage testing system and method |
| CN114323264A (en) * | 2022-01-04 | 2022-04-12 | 中国科学技术大学 | In-situ energy measuring device and method for measuring laser in vacuum equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4624573A (en) * | 1984-05-14 | 1986-11-25 | Rahn John P | Total optical loss measurement device |
| JP4528075B2 (en) * | 2003-09-19 | 2010-08-18 | 独立行政法人科学技術振興機構 | Laser damage evaluation method for optical materials |
| CN102393383A (en) * | 2011-11-07 | 2012-03-28 | 中国科学院长春光学精密机械与物理研究所 | ArF laser film element irradiation damage test device with high irradiation density uniformity |
| CN203414392U (en) * | 2013-07-26 | 2014-01-29 | 中国科学院光电研究院 | Extreme ultraviolet radiation damage testing equipment |
| CN103954680A (en) * | 2014-05-13 | 2014-07-30 | 西安工业大学 | Device and method for identifying laser damages to optical film |
-
2015
- 2015-11-05 CN CN201510745208.0A patent/CN105223126A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4624573A (en) * | 1984-05-14 | 1986-11-25 | Rahn John P | Total optical loss measurement device |
| JP4528075B2 (en) * | 2003-09-19 | 2010-08-18 | 独立行政法人科学技術振興機構 | Laser damage evaluation method for optical materials |
| CN102393383A (en) * | 2011-11-07 | 2012-03-28 | 中国科学院长春光学精密机械与物理研究所 | ArF laser film element irradiation damage test device with high irradiation density uniformity |
| CN203414392U (en) * | 2013-07-26 | 2014-01-29 | 中国科学院光电研究院 | Extreme ultraviolet radiation damage testing equipment |
| CN103954680A (en) * | 2014-05-13 | 2014-07-30 | 西安工业大学 | Device and method for identifying laser damages to optical film |
Non-Patent Citations (2)
| Title |
|---|
| ANPING LIU ET AL.: ""Automatic Deteetion of Laser Damage Threshold by Seattering Light Techniqu"", 《PROCEEDINGS OF THE 6TH WORLD CONGRESSON INTELLIGENI CONTROL AND AUTOMATION》 * |
| 程春娟: ""激光薄膜损伤阈值测试控制系统研究"", 《中国优秀硕士学位论文全文数据库 基础科学辑》 * |
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| CN109827933A (en) * | 2019-03-12 | 2019-05-31 | 余姚市浙江大学机器人研究中心 | Transition detection device under a kind of high pressure |
| CN109827933B (en) * | 2019-03-12 | 2021-08-10 | 余姚市浙江大学机器人研究中心 | Phase transition state detection device under high pressure |
| CN111504889A (en) * | 2020-04-23 | 2020-08-07 | 中国科学院微电子研究所 | Extreme ultraviolet cumulative irradiation damage test system and method |
| CN112630983A (en) * | 2020-12-24 | 2021-04-09 | 中国工程物理研究院激光聚变研究中心 | Laser system, laser-induced damage testing system and method |
| CN114323264A (en) * | 2022-01-04 | 2022-04-12 | 中国科学技术大学 | In-situ energy measuring device and method for measuring laser in vacuum equipment |
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