CN205301136U - Polymer irradiation damage testing arrangement - Google Patents
Polymer irradiation damage testing arrangement Download PDFInfo
- Publication number
- CN205301136U CN205301136U CN201520877033.4U CN201520877033U CN205301136U CN 205301136 U CN205301136 U CN 205301136U CN 201520877033 U CN201520877033 U CN 201520877033U CN 205301136 U CN205301136 U CN 205301136U
- Authority
- CN
- China
- Prior art keywords
- sample
- irradiation
- room
- light path
- specimen holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a polymer irradiation damage's testing arrangement, the device is including mutually independent light source room, light path room and sample room, indoor light path transfer component and the optical detection part of being provided with of light path, light path transfer component includes: beam attenuator, even ware, shutter, focusing lens, first beam splitter and the second beam splitter restrainted, the optical detection parts are including ability gauge and optical quality assay appearance for the light beam energy and the light spot area of test position are in order to obtain the energy density of irradiation to the sample, specimen holder, sample and mass spectrometer have been placed to the sample room, and wherein the specimen holder has three -dimensional adjusting device, and it is right to be used for the specimen holder carries out the three -dimensional regulation of x, y and z axle, mass spectrometer online test the gas composition of sample room to whether irradiation damage takes place with judging the sample for real -time supervision, and the sample of analysis simultaneously takes place the piece gas composition that irradiation damage produced.
Description
Technical field
This utility model relates to a kind of material radiation damage test device and method of testing, is specifically related to a kind of excimer laser irradiation damage to polymeric material and tests device and method of testing, belongs to the technical field of measurement and test of material property.
Background technology
Laser application system (such as litho machine) can use various types of material, laser direct projection or scatter to material surface, it is possible to material can be produced irradiation damage, so that material generating function lost efficacy. The peak power of the laser (such as excimer laser) of some short wavelengths is high, photon energy is high and material is also high to its absorbance, the chemical bond of some polymer directly can be interrupted, some the gas fragment produced can pollute optical system, affects lithography performance. Therefore, it is necessary to accurately obtain the irradiation damage threshold value of polymer, analyzing the gas fragment component that damage produces, calculating the total amount of pollutant (such as Hydrocarbon) in damage component, thus instructing the type selecting of litho machine material.
Fig. 1 is typical optical thin film damage from laser test apparatus structure schematic diagram in prior art, it is the optical thin film damage from laser test device of a kind of optically-based micro-imaging and polarization fading, but this device can not detect the irradiation damage of sample in real time, and the damage threshold therefore obtained has certain error; And this device can not real-time qualitative and analyze quantitatively polymer irradiation damage produce gas fragment component.
Utility model content
In view of this, the utility model proposes the test apparatus and method of a kind of polymer irradiation damage. This utility model first accurately tests the irradiation excimer laser energy density to polymer, is accurately obtained the irradiation damage threshold value of polymer; Secondly, the material composition of qualitative analysis polymer generation irradiation damage, the chemical bond of fracture is analyzed further in conjunction with its structure of chemical composition; Finally, the total amount of pollutant obtaining irradiation damage generation is calculated.
For solving the problems referred to above, the utility model proposes the test device of a kind of polymer irradiation damage, including separate light source chamber, light path room and sample room, described light path room and sample room are vacuum chamber, and described light source chamber, are cut off by flange window between light path room and sample room;
Being provided with the excimer laser source of excimer laser for producing predetermined wavelength in described light source chamber, produced excimer laser incides in light path room;
Described light path indoor are provided with optic path parts and optical detection component; Described optic path parts include: beam attenuator, even bundle device, shutter, condenser lens, the first beam splitter and the second beam splitter, for the excimer laser inciding described light path room become that energy is adjustable, energy density is uniform and the controllable focal beam spot of exposure time and go out to be shot out; Described optical detection component includes energy meter and beam quality analysis instrument, for testing beam energy and the facula area of position, to obtain the irradiation energy density to sample;
Described sample room be placed with specimen holder, sample, mass spectrograph and and vacuum pump group, wherein specimen holder has three-dimensional regulating mechanism, for described specimen holder is carried out x, y and z axes three-dimensional regulation, the gas component of sample room described in described mass spectrograph on-line testing, to monitor with whether judgement sample irradiation damage occurs in real time, analyzing the fragment gas component that sample generation irradiation damage produces, described vacuum pump group is for carrying out evacuation to sample room simultaneously.
This utility model also proposed a kind of method of testing utilizing said apparatus to carry out polymer irradiation damage, comprising:
Polymer samples is placed on the specimen holder in sample room, three-dimensional regulation specimen holder, records x, y and z axes coordinate, the distance in the face that is illuminated Yu condenser lens center to calculate sample;
To light path room and sample room evacuation, open gas component in mass spectrograph continuance test sample room;
Close shutter, open quasi-molecule laser source and be transferred to a predetermined irradiation energy density;
When the vacuum of sample room enters 10-7After Pa, open shutter and control exposure time, first exposure spots of sample being carried out irradiation, observes the spectral peak of mass spectrograph simultaneously; If without substantially sudden change, the z-axis coordinate keeping specimen holder is constant, regulates its x-axis and y-axis coordinate, makes irradiation hot spot move to next exposure spots of sample, regulates beam attenuator and increases irradiation energy density, observes mass spectra peak change simultaneously; By that analogy, until finding the obvious sudden change of mass spectra peak, then judging that polymer there occurs irradiation damage, now irradiation is the irradiation damage threshold value of sample to the laser energy density on sample.
Compared with prior art, the excimer laser of the said apparatus that the utility model proposes is transmitted in a vacuum, reduce the energy attenuation in optic path process and test error, be conducive to test irradiation energy density more accurately, in conjunction with the real-time monitoring component of highly sensitive irradiation damage, and then obtain the irradiation damage threshold value of polymer more accurately. The gas fragment component that the said apparatus that the utility model proposes and method energy analyzing polymers generation irradiation damage produce, and then the dirt total amount that the chemical bond of analyzing polymers fracture and calculating irradiation damage produce. Test result can instruct practical engineering application.
Accompanying drawing explanation
Fig. 1 is the typical optical thin film damage from laser test apparatus structure schematic diagram of existing one.
Fig. 2 is the structural representation of material radiation damage test device in this utility model.
Wherein: 1-light source chamber, 2-light path room, 3-sample room, 4-flange window, 5-beam attenuator, the even bundle device of 6-, 7-the first beam splitter, 8-condenser lens, 9-the second beam splitter, 10-shutter, 11-energy meter, 12-beam quality analysis instrument, 13-sample, 14-specimen holder, 15-mass spectrograph, 16-vacuum pump group.
Detailed description of the invention
For making the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
As shown in Figure 2, the test device of a kind of polymer irradiation damage that the utility model proposes, including 3 relatively independent chambers, it is light source chamber 1, light path room 2 and sample room 3 respectively, wherein said light path room 2 and sample room 3 are vacuum chamber, adopting flange window 4 to cut off between above three chamber, window is CaF2Material, can pass through excimer laser, and its absorbance is T4, T4Generally more than 99.9%.
Accommodating the quasi-molecule laser source of irradiation in described light source chamber 1, it, for producing the excimer laser of predetermined wavelength, is preferably the ArF excimer laser of 193nm, naturally it is also possible to select other excimer laser according to actual needs in the present embodiment.
Described light path room 2 is used for transmitting and detecting excimer laser, including optic path parts and optical detection component. Wherein optic path parts include: beam attenuator 5, even bundle device the 6, first beam splitter 7, condenser lens the 8, second beam splitter 9 and the shutter 10 being sequentially placed along optical path direction. In described beam attenuator 5 along light path successively and symmetrically placed have plated film decay eyeglass and compensate eyeglass, regulated the angle of inclination of two eyeglasses by gear coupling simultaneously, control the described quasi-molecule laser source irradiation energy to sample; When angle is 0 ��, absorbance is 100%, when angle is 45 ��, and absorbance < 5%. Even bundle device 6 is incided so that become the uniform excimer laser of energy density from the light beam of even bundle device 6 outgoing from the excimer laser of beam attenuator 5 outgoing. First beam splitter 7 and light path are that 45�� angle is placed, and light beam is divided into two parts, and a part reflexes to energy meter 11 from the first beam splitter 7, and another part incides on condenser lens 8 through the first beam splitter 7, and the absorbance of the first beam splitter 7 is T7, it ranges for 50%��80%. Light beam can be converged by condenser lens 8, and its focal length is fixed as the 100��500mm that preferably ranges from, the absorbance T of condenser lens 8 of F, focal length F8Generally more than 99%. Second beam splitter 9 is placed between condenser lens 8 and shutter 10, and in the second beam splitter 9 and condenser lens 8, distance in the heart is fixed as L, and itself and light path are also placed in 45�� angle, and this distance L is relevant with the concrete size of described device; Light beam is also divided into two parts, a part to be reflected on beam quality analysis instrument 12 by the second beam splitter 9, and another part incides shutter 10 through the second beam splitter 9, and the absorbance of the second beam splitter 9 is T9, it ranges for 50%��80%. Shutter 10 is for controlling the rapid break-make of light path, thus controlling the laser irradiation time to sample, absorbance 100% when it is opened, absorbance 0 during closedown. Optical detection component includes energy meter 11 and beam quality analysis instrument 12, for directly measuring the ENERGY E of position place light beam11With facula area A12��
Described sample room 3 is placed with polymer samples 13, specimen holder 14, mass spectrograph 15 and vacuum pump group 16. Specimen holder 14 can carry out x, y and z axes three-dimensional regulation, regulates and certainty of measurement is 0.01mm. Described sample 13 is placed on specimen holder 14, and it is vertical with light path to be illuminated face. Assume that the vertical dimension at specimen holder 14 left side and condenser lens 8 center is fixed and is known as L0, when z coordinate is zero, the focus of condenser lens 8 is just on the left side of specimen holder 14; Regulating z-axis coordinate, can change specimen holder 14 left side and the distance at condenser lens 8 center, thus changing the irradiation facula area to sample 13, when regulating z-axis near condenser lens 8, z coordinate is just;Regulate x-axis and the y-axis coordinate of specimen holder 14, the exposure spots of sample 13 can be selected. Measuring the thickness obtaining sample 13 is d. Vacuum pump group 16 is for carrying out evacuation to sample room 3, and its effective pumping speed is known as S. Mass spectrograph 15 can gas component in real-time testing sample room 3.
Described material radiation damage test device also includes a set of control unit, and it is for Electronic control quasi-molecule laser source 1, beam attenuator 5, shutter 10, energy meter 11, beam quality analysis instrument 12, specimen holder 14 and vacuum pump group 16. Operated by software, the inflation/deflation of quasi-molecule laser source 1 can be controlled, regulate its discharge voltage and repetition rate; The angle of inclination of beam attenuator 5 eyeglass can be controlled, thus controlling the decay of energy; Manipulation shutter 10 can control exposure time and irradiance pulse number; Manipulation energy meter 11 and the startup of beam quality analysis instrument 12, collection and stopping; The triaxial coordinate of regulation and control specimen holder 14, can make the vertical irradiation of excimer laser be illuminated each position in face to sample 13; Control the start and stop of vacuum pump group 16, make the vacuum of the front sample room 3 of irradiation experiment be better than 1 �� 10-6Pa��
The test device of material radiation damage also includes a set of data acquisition unit, and for the signal that Real-time Collection energy meter 11, beam quality analysis instrument 12 and mass spectrograph 15 detect, it can carry out simply calculating, showing and preserve data.
Irradiation calculates such as formula (1) to the facula area A on sample. Wherein, F is the focal length of condenser lens 8; L0Vertical dimension for fixing and known specimen holder 14 left side with condenser lens 8 center; D is that measurement obtains thickness of sample; When z is irradiation experiment specimen holder 14 be conditioned after z-axis coordinate; L is the distance of fixing and known second beam splitter 9 and condenser lens 8 center; A12For beam quality analysis instrument 12 position facula area measured directly.
Irradiation calculates such as formula (2) to the ENERGY E on sample. Wherein T4��T7��T8And T9Respectively the absorbance of flange window the 4, first beam splitter 7, condenser lens 8 and the second beam splitter 9, by measuring emergent light and the ratio of incident illumination energy respectively, can obtain; E11For energy meter 11 position beam energy measured directly.
Irradiation is irradiation to the ratio of the ENERGY E on sample with facula area A, i.e. e=E/A to the energy density e on sample. The irradiation damage threshold value of material is material generation irradiation damage moment, and irradiation is to the laser energy density on sample.
Mass spectrograph 15 has high sensitivity, mass number ranges for 1-200amu, through accurate calibration, it both can detect the ion stream (or dividing potential drop) of certain moment each mass number, can detect again extra fine quality number ion stream (or dividing potential drop) over time.
This utility model also proposed a kind of polymer irradiation damage method of testing, and it utilizes the above-mentioned polymer irradiation damage put up test device to realize, and specifically includes:
First, polymer samples 13 is placed on the specimen holder 14 in sample room 3, three-dimensional regulation specimen holder 14, records x, y and z axes coordinate, in order to calculate the face that is illuminated of sample 13 and the distance (L at condenser lens 8 center0-d-z); Then to light path room 2 and sample room 3 evacuation; Under suitable vacuum condition, open gas component (sweeping spectrum) in mass spectrograph 15 continuance test sample room, close shutter 10, open quasi-molecule laser source 1 and be transferred to a relatively low irradiation energy density; When the vacuum of sample room 3 enters 10-7After Pa, carry out irradiation damage test.Open shutter 10 and control exposure time, first point of sample 13 is carried out irradiation, observing the spectral peak of mass spectrograph 15 simultaneously; If without substantially sudden change, the z coordinate keeping specimen holder 14 is constant, regulates its x and y-coordinate, makes irradiation hot spot move to next exposure spots of sample 13, regulates beam attenuator 5 and increases irradiation energy density, observes mass spectra peak change simultaneously; By that analogy, until the substantially sudden change of discovery mass spectra peak (as: Hydrocarbon increases suddenly), then may determine that polymer there occurs irradiation damage, now irradiation is the irradiation damage threshold value of sample 13 to the laser energy density on sample.
Described method also includes the mass spectrum before and after the damage of comparative polymer sample irradiation, sudden change mass number corresponding to spectral peak is the gas fragment component of the raw damage of excimer laser irradiation polymerization produce, the component structure of conjugated polymer, can analyze the chemical bond of fracture further.
Mass spectrum before and after the damage of comparative polymer sample irradiation, gas fragment sports �� P in the dividing potential drop of mass number ii(Pa), exposure time is t (s), nytron dirt (more than the 44amu's) total amount N (mol/cm that sample unit are is produced by irradiation damage2) formula (3) can be adopted to calculate. Wherein, S is the effective pumping speed (m of sample vacuum chamber pump3/ s); NAFor Avogadro's number; T is the temperature (K) during irradiation experiment; R is gas constant (Pa m3��K-1��mol-1); A is irradiation facula area (cm2), formula (1) is shown in its calculating.
There is the polymer samples of irradiation damage, surface topography and the micro structure of irradiation damage after taking-up, can be further looked at by 3D surface profiler or scanning electron microscope, analyze irradiation damage mechamism.
Particular embodiments described above; the purpose of this utility model, technical scheme and beneficial effect have been further described; it it should be understood that; the foregoing is only specific embodiment of the utility model; it is not limited to this utility model; all within spirit of the present utility model and principle, any amendment of making, equivalent replacement, improvement etc., should be included within protection domain of the present utility model.
Claims (5)
1. a test device for polymer irradiation damage, including separate light source chamber, light path room and sample room, described light path room and sample room are vacuum chamber, and described light source chamber, are cut off by flange window between light path room and sample room;
Being provided with the excimer laser source of excimer laser for producing predetermined wavelength in described light source chamber, produced excimer laser incides in light path room;
Described light path indoor are provided with optic path parts and optical detection component; Described optic path parts include: beam attenuator, even bundle device, shutter, condenser lens, the first beam splitter and the second beam splitter, for the excimer laser inciding described light path room become that energy is adjustable, energy density is uniform and the controllable focal beam spot of exposure time and go out to be shot out; Described optical detection component includes energy meter and beam quality analysis instrument, for testing beam energy and the facula area of position, to obtain the irradiation energy density to sample;
Described sample room is placed with specimen holder, sample, mass spectrograph and vacuum pump group, wherein specimen holder has three-dimensional regulating mechanism, for described specimen holder is carried out x, y and z axes three-dimensional regulation, the gas component of sample room described in described mass spectrograph on-line testing, to monitor with whether judgement sample irradiation damage occurs in real time, analyze the fragment gas component that sample generation irradiation damage produces simultaneously;Described vacuum pump group is for carrying out evacuation to sample room.
2. the test device of polymer irradiation damage as claimed in claim 1, wherein, in described beam attenuator along light path successively and symmetrically placed have plated film decay eyeglass and compensate eyeglass, regulated the angle of inclination of two eyeglasses by gear coupling simultaneously, control the described quasi-molecule laser source irradiation energy to sample; Even bundle device is incided so that become the uniform excimer laser of energy density from the light beam of even bundle device outgoing from the excimer laser of described beam attenuator outgoing; Described first beam splitter and light path are that 45�� angle is placed, and light beam is divided into two parts, and a part reflexes to described energy meter from described first beam splitter, and another part incides on condenser lens through described first beam splitter; Light beam can be converged by described condenser lens; Described second beam splitter is placed between condenser lens and shutter, and also places in 45�� angle with light path, and for being divided into two parts, a part to be reflected on beam quality analysis instrument light beam, another part incides shutter through described second beam splitter; Described shutter is for controlling the rapid break-make of light path, thus controlling the laser irradiation time to sample.
3. the test device of polymer irradiation damage as claimed in claim 1, wherein, by regulating the z-axis coordinate of described specimen holder, change the irradiation facula area to sample, by adjusting x-axis and the y-axis coordinate of specimen holder, select the different exposure spots on described sample.
4. the test device of the polymer irradiation damage as described in any one of claim 1-3, it also includes control unit, and its effect is as follows:
Control the inflation/deflation of quasi-molecule laser source, regulate its discharge voltage and repetition rate;
Control the angle of inclination of eyeglass in beam attenuator, thus controlling the decay of energy;
Manipulation shutter is to control exposure time and irradiance pulse number;
Manipulation energy meter and the startup of beam quality analysis instrument, collection and stopping;
Control the three-dimensional regulating mechanism of specimen holder, make the vertical irradiation of excimer laser be illuminated each position in face to sample.
5. the test device of the polymer irradiation damage as described in any one of claim 1-3, it also includes data acquisition unit, for the signal that Real-time Collection energy meter, beam quality analysis instrument and mass spectrograph detect, and calculates accordingly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520877033.4U CN205301136U (en) | 2015-11-05 | 2015-11-05 | Polymer irradiation damage testing arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520877033.4U CN205301136U (en) | 2015-11-05 | 2015-11-05 | Polymer irradiation damage testing arrangement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205301136U true CN205301136U (en) | 2016-06-08 |
Family
ID=56463527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520877033.4U Active CN205301136U (en) | 2015-11-05 | 2015-11-05 | Polymer irradiation damage testing arrangement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205301136U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918094A (en) * | 2018-06-11 | 2018-11-30 | 同济大学 | A kind of desktop type high-energy density extreme ultraviolet irradiation damage test device |
| CN109580884A (en) * | 2018-12-18 | 2019-04-05 | 哈尔滨工业大学 | The multifactor environmental grounds simulation in space and in-situ study test cabin device |
| CN114323264A (en) * | 2022-01-04 | 2022-04-12 | 中国科学技术大学 | In-situ energy measuring device and method for measuring laser in vacuum equipment |
-
2015
- 2015-11-05 CN CN201520877033.4U patent/CN205301136U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918094A (en) * | 2018-06-11 | 2018-11-30 | 同济大学 | A kind of desktop type high-energy density extreme ultraviolet irradiation damage test device |
| CN109580884A (en) * | 2018-12-18 | 2019-04-05 | 哈尔滨工业大学 | The multifactor environmental grounds simulation in space and in-situ study test cabin device |
| CN114323264A (en) * | 2022-01-04 | 2022-04-12 | 中国科学技术大学 | In-situ energy measuring device and method for measuring laser in vacuum equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105223126A (en) | A kind of polymkeric substance irradiation damage proving installation and method of testing | |
| CN101140196B (en) | Measurement mechanism of lens focal length, measurement method and thereof and optical quality evaluation method | |
| CN205301136U (en) | Polymer irradiation damage testing arrangement | |
| CN106124166B (en) | A kind of measuring device and measurement method of heavy-caliber optical grating diffraction efficiency | |
| CN102507512A (en) | On-line in situ detecting method for infrared-ultraviolet double pulse laser induced breakdown spectroscopy | |
| KR20180000015A (en) | High accuracy real-time particle counter | |
| CN102507511A (en) | On-line in situ detecting device for infrared-ultraviolet double pulse laser induced breakdown spectroscopy | |
| CN201194005Y (en) | Multi-source chromatography laser measurement device for flue gas, particle concentration and temperature distribution | |
| CN103926173B (en) | A kind of measurement mechanism of gas medium Middle molecule coefficient of diffusion and method | |
| CN101122555A (en) | High concentration super fine granule measuring device and method based on backward photon related spectrum | |
| JPH0237536B2 (en) | ||
| CN201152808Y (en) | Lens focal length measurement mechanism | |
| CN103069265B (en) | Particle diameter measurement device, and particle diameter measurement method | |
| CN103033341A (en) | Wide test angle ArF laser polarization optics thin film element spectrum test device | |
| CN202351175U (en) | Infrared ultraviolet double-pulse laser induced impact breakdown spectrum online in-situ detecting device | |
| JP2002116133A (en) | Scattering particle diameter distribution measuring apparatus | |
| CN208076382U (en) | Water body multi-wavelength optical attenuation coefficient measuring device | |
| JP2004037439A (en) | Method and system for determining radiation damage resistance of optical material | |
| CN103017664A (en) | Method and system for calibrating laser beam analyzer | |
| CN105783743B (en) | Sheet metal print based on infrared reflection method applies wet-film thickness on-line detecting system | |
| CN202938789U (en) | Laser beam analyzer calibration system | |
| CN206057558U (en) | A kind of tracking Stabilily parameter device | |
| US5991016A (en) | Apparatus for producing variable levels of uniform light flux | |
| CN112595493A (en) | Common target surface measuring device and method for laser damage threshold and nonlinear absorption | |
| CN207515998U (en) | A kind of high frequency High Linear puts microscopy examining system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200908 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences Effective date of registration: 20200908 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |
|
| TR01 | Transfer of patent right |