CN103017664A - Method and system for calibrating laser beam analyzer - Google Patents
Method and system for calibrating laser beam analyzer Download PDFInfo
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- CN103017664A CN103017664A CN2012104974615A CN201210497461A CN103017664A CN 103017664 A CN103017664 A CN 103017664A CN 2012104974615 A CN2012104974615 A CN 2012104974615A CN 201210497461 A CN201210497461 A CN 201210497461A CN 103017664 A CN103017664 A CN 103017664A
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Abstract
The invention belongs to the technical field of calibrating of an apparatus, and discloses a method and a system for calibrating a laser beam analyzer. The structured parallel light field forms a flat top beam with a standard beam width through a diaphragm with a standard aperture; and the calibrated laser beam analyzer measures the beam width of the flat top beam, and compares the measured value with the light beam width standard value to achieve calibrating of the laser beam analyzer. The method and the system are effective and feasible, accurate and stable, and simple and convenient to operate; and the traceability issues of the measured beam width value of the laser beam analyzer are solved, and the calibrating accuracy is greatly improved.
Description
Technical field
The present invention relates to the instrument calibration technical field, particularly relate to a kind of laser beam analyser calibration steps and system.
Background technology
In the new and high technologies such as the laser fine processing of nearly emerging development of more than ten years, the diagnoses and treatment of medical laser source, laser radar, inertial confinement fusion, for the laser beam focusing degree, the beam qualities such as beam mode have proposed more strict requirement, need to have through the transport property of atmosphere or optical element laser beam simultaneously and describe more accurately and control.This is for being used for weighing laser beam quality, and the accurate and effective measurement that characterizes the laser spatial domain parameter of Laser beam propagation characteristic has proposed requirements at the higher level.Laser beam width is the most basic laser spatial domain parameter, also is to determine other important spatial domain parameter such as beam divergence angles, Laser beam propagation specific factor, the necessary measured value of laser beam focusing characteristic ginseng value etc.
The laser beam analyser is the common instrument of measuring beam width, and the calibration requirements of laser beam analyser increases day by day, but for the calibration of laser beam analyser still without effectively, accurately, reliably calibration steps and system.
Summary of the invention
The technical matters that (one) will solve
The invention provides a kind of calibration steps and system of laser beam analyser, in order to solve the laser beam analyser, the magnitude tracing problem of laser beam analyser standard set-up especially guarantees the accurate and effective property of laser beam analyser measuring beam width.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of calibration steps of laser beam analyser, may further comprise the steps:
The laser beam that laser instrument is sent is shaped to parallel light field through a parallel light field generation device;
Described parallel light field is through a flat top beam that obtains the standard beamwidth after having the diaphragm in standard aperture, and wherein, the direction of propagation of described parallel beam is parallel to the normal direction of described diaphragm, and described parallel beam field radius is greater than the radius of described diaphragm;
Described diaphragm should be close to the detector receiving plane, and the standard value of its aperture for having calibrated.
The flat top beam of described standard beamwidth impinges perpendicularly on by on the detector sensitive face of school laser beam analyser, measures the width of light beam d of the flat top beam of 6 the above standard beamwidths
DUT, get d
DUTMean value
According to formula
Calculate the width of light beam modifying factor C of laser beam analyser, finish the calibration to laser beam analyser width of light beam value, wherein, d
sBe aperture of the diaphragm value, k is constant.
The calibration steps of aforesaid laser beam analyser measuring beam width, preferably, described diaphragm is close on the detector sensitive face.
The calibration steps of aforesaid laser beam analyser measuring beam width preferably, is measured the width of light beam d of the flat top beam of 6 the above standard beamwidths
DUT
The present invention also provides a kind of calibration system of laser beam analyser, comprises laser instrument, parallel light field generation device, attenuator, has the diaphragm in standard aperture and by school laser beam analyser;
The laser beam reshaping that described parallel light field generation device is used for described laser instrument is sent becomes parallel light field;
Described attenuator is close on the end face that described diaphragm is positioned at incident light one side, is used for regulating the intensity that incides the parallel beam on the described diaphragm, and reduces background radiation to the impact of measurement result;
Described diaphragm with standard aperture is close to described by on the sensitive face of school laser beam analyzer detector, is used for the parallel beam of incident is shaped to the flat top beam of standard beamwidth;
The described flat top beam that is used for measuring described standard beamwidth by school laser beam analyser.
Aforesaid laser beam analyser calibration system, preferably, described parallel light field generation device comprises and is successively set on the calibration system light path and optical fiber collimator, single-mode fiber and optical convergence's module described laser wavelength coupling;
Described optical fiber collimator is used for laser beam is coupled to described single-mode fiber;
Described single-mode fiber is used to form pointolite;
Described optical convergence module is used for pointolite is converted into the parallel beam field.
Aforesaid laser beam analyser Measurement and calibration system, preferably, described diaphragm adopts the indium Steel material.
Aforesaid laser beam analyser Measurement and calibration system, preferably, described laser instrument is helium-neon laser.
(3) beneficial effect
Laser beam analyser calibration steps provided by the present invention and system, parallel light field by structure, and form the known flat top beam of width of light beam through a diaphragm with standard aperture, measured the beamwidth of this flat top beam by school laser beam analyser, and compare and measure value and width of light beam standard value, so that laser beam analyser width of light beam measured value can directly be traced to the source to the very high length value of the accuracy of measuring, realize the calibration of laser beam analyser.The method and system are effective and feasible, and accurate stable is easy and simple to handle, and realization is good, have solved the problem of tracing to the source of laser beam analyser width of light beam value, and have greatly improved calibration accuracy.
Description of drawings
Fig. 1 is the composition synoptic diagram of laser beam analyser calibration system in the embodiment of the invention one;
Fig. 2 is the composition synoptic diagram of parallel light field generation device in the embodiment of the invention one.
Wherein, 1: laser instrument; 2: parallel light field generation device; 3: attenuator; 4: diaphragm; 5: by school laser beam analyser; 6: image acquisition and data analysis system; 7: optical fiber collimator; 8: single-mode fiber; 9: optical convergence's device; 10: laser beam; 11: the parallel beam field; 12: pointolite.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
Embodiment one
Figure 1 shows that the composition synoptic diagram of laser beam analyser calibration system in the embodiment of the invention.As shown in Figure 1, the laser beam analyser calibration system in the embodiment of the invention comprises laser instrument 1, parallel light field generation device 2, attenuator 3, has the diaphragm 4 in standard aperture and by school laser beam analyser 5.In order to reduce the diffraction impact, diaphragm 4 must be close to by on the sensitive face of school laser beam analyser 5 detectors; The laser beam 10 that parallel light field generation device 2 is used for laser instrument 1 is sent is shaped to parallel beam field 11, obtains the calibration parallel beam; For so that the power density of incident laser be no more than by damage threshold or the working range of school laser beam analyser 5 detectors, the parallel beam that obtains need to be through the decay of an attenuator 3, and then the diaphragm through having the standard aperture 4 obtains the flat top beam of standard beamwidth, wherein, the width of light beam of flat top beam equals the aperture of diaphragm 4.Simultaneously, in order to reduce background radiation to the impact of measurement result, attenuator 3 need be close on the end face that diaphragm 4 is positioned at incident light one side.Then by the beamwidth of the known flat top beam of school laser beam analyser 5 measuring beam width, because diaphragm 4 provides degree of accuracy very high normal width value for flat top beam, so that the uncertainty of calibration significantly reduces.
Laser instrument 1 can adopt the good and stable helium-neon laser of beam quality in the present embodiment, and the laser beam 10 of output enters parallel light field generation device 2, to form parallel beam field 11.
4 of diaphragms adopt the little material of thermal expansivity, such as the indium Steel material, guarantee the stability of the aperture standard value that it had been calibrated.
In actual application, need to guarantee enough large by the sensitive face of school laser beam analyser 5 detectors, can receive the whole xsect of flat top beam, wherein, the power that does not receive should not surpass 1% of flat top beam general power, as: when adopting 4sigma width of light beam algorithm, the sensitive face diameter of detector should be greater than 2 times of flat top beam breadth extreme.
For forming parallel beam field 11, preferred parallel light field generation device 2 comprises optical fiber collimator 7, single-mode fiber 8 and the optical convergence module 9 Wavelength matched with laser instrument 1 that is successively set on the calibration system light path, as shown in Figure 2, light collimating apparatus 7 is used for laser beam 10 is coupled to single-mode fiber 8, form pointolite 12 with the other end at single-mode fiber 8, form width much larger than the collimated beam light field 11 in diaphragm 4 apertures through optical convergence's module 9 again.Wherein, optical convergence's module 9 can be convex lens, and an end of single-mode fiber 8 is positioned at the focus place of convex lens one side, then is shaped as parallel beam field 11 through the laser beam 10 after optical convergence's module 9.
Need to prove that the implementation that can form the parallel light field generation device 2 of parallel light field has a variety of, be not limited to above-mentioned a kind ofly that it all belongs to protection scope of the present invention.
The specific works process of laser beam analyser calibration system is in the present embodiment:
The laser beam 10 that laser instrument 1 sends forms parallel beam field 11 through parallel light field generation device 2, then through attenuator 3 decay to be fit to by the dynamic range of school laser beam analyser 5 explorer responses in, again by diaphragm 4, produce the flat top beam that width of light beam equals diaphragm 4 apertures, detector receives flat top beam, and records width of light beam (the width of light beam algorithm of employing has 4sigma, mobile knife-edge method, travelling slit method usually) by image acquisition and data analysis system 6.The width of light beam that records and diaphragm 4 aperture standard values are relatively determined by the modifying factor of school laser beam analyser 5 width of light beam.
Embodiment two
Survey at embodiment one laser beam analyser on the basis of calibration system, the embodiment of the invention also provides a kind of laser beam analyser calibration steps, may further comprise the steps:
S1, the laser beam that laser instrument is sent are shaped to the parallel beam field through a parallel light field generation device;
Be specially, open laser instrument, preheating makes laser instrument enter steady-working state.The laser beam that laser instrument sends is carried out shaping through a parallel light field generation device, structure parallel beam field.
S2, described parallel beam are after the decay of an attenuator, form again the flat top beam of standard beamwidth through a diaphragm with standard aperture, wherein, the direction of propagation of described parallel beam is parallel to the normal direction of described diaphragm, and the field radius of described parallel beam is greater than the radius of described diaphragm;
For the power that makes incident laser is no more than detector damage threshold or working range, parallel beam needs elder generation through the decay of an attenuator, guarantee that the power density of incident laser is fit to the dynamic range of laser beam analyzer detector response, and then form the flat top beam of standard beamwidth through a diaphragm with standard aperture.
In order to reduce diffraction to the impact of measurement result, above-mentioned diaphragm should be close on the sensitive face of detector.
S3, described standard laser bundle impinge perpendicularly on the detector sensitive face of laser beam analyser, measure the width of light beam d of a plurality of flat top beams
DUT, and get the width of light beam d of described a plurality of flat top beams
DUTMean value
When the laser beam analyser is measured the width of light beam of flat top beam, at first need to block incident laser with baffle plate, gather background image.Then remove baffle plate, whether continuous acquisition image, observation image signal excessively weak (signal peak should be not less than detector dynamic range 50%) or saturated, and by adjusting attenuator damping capacity or parameter detector, suitable to the incident laser signal intensity.
Then gather a frame or multiple image, selective light beam width algorithm, the width d of calculating standard laser bundle
DUTWhen using 4sigma width of light beam algorithm, should choose suitable integral domain.Repeat this step and measure repeatedly, record measurement result d each time
DUT, get the mean value of a plurality of measurement results
Generally get the measurement result d more than 6
DUT
S4, according to formula
Calculate the width of light beam modifying factor C of laser beam analyser, finish the calibration to laser beam analyser width of light beam measured value, wherein, d
sBe the aperture value of described diaphragm, k is constant.
Because flat top beam is the cylindricality flat top beam, when adopting different laser beam width algorithm, need introduce modifying factor k, namely k is constant: when adopting 4sigma laser beam width algorithm, k gets 1.000; When adopting 84%-16% to move edge of a knife laser linewidth degree algorithm, k gets 1.132; When adopting 90%-10% to move edge of a knife laser linewidth degree algorithm, k gets 1.070; When adopting travelling slit laser beam width algorithm, k gets 0.9909.
As can be seen from the above embodiments, laser beam analyser calibration steps provided by the present invention and system, parallel beam field by the structure laser beam, and form the flat top beam of standard beamwidth through a diaphragm with standard aperture, measured the beamwidth of this flat top beam by school laser beam analyser, and compare and measure value and width of light beam standard value, so that laser beam analyser width of light beam measured value can directly be traced to the source to the very high length value of the accuracy of measuring, realize the calibration of laser beam analyser.The method and system are effective and feasible, and accurate stable is easy and simple to handle, and realization is good, have solved the problem of tracing to the source of laser beam analyser width of light beam value, and have greatly improved calibration accuracy.
The above only is preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the technology of the present invention principle; can also make some improvement and replacement, these improvement and replacement also should be considered as protection scope of the present invention.
Claims (7)
1. the calibration steps of a laser beam analyser is characterized in that, may further comprise the steps:
The laser beam that laser instrument is sent is shaped to the parallel beam field through a parallel light field generation device;
Described parallel beam is after the decay of an attenuator, form again the flat top beam of standard beamwidth through a diaphragm with standard aperture, wherein, the direction of propagation of described parallel beam is parallel to the normal direction of described diaphragm, and the field radius of described parallel beam is greater than the radius of described diaphragm;
The flat top beam of described standard beamwidth impinges perpendicularly on by on the detector sensitive face of school laser beam analyser, measures the width of light beam d of the flat top beam of a plurality of described standard beamwidths
DUT, and get the width of light beam d of described a plurality of flat top beams
DUTMean value
According to formula
Calculate the width of light beam modifying factor C of laser beam analyser, finish the calibration to laser beam analyser width of light beam measured value, wherein, d
sBe the aperture value of described diaphragm, k is constant.
2. the calibration steps of laser beam analyser measuring beam width according to claim 1 is characterized in that described diaphragm is close on the detector sensitive face.
3. the calibration steps of laser beam analyser measuring beam width according to claim 1 is characterized in that, measures the width of light beam d of the flat top beam of 6 the above standard beamwidths
DUT
4. a laser beam analyser calibration system is characterized in that, comprises laser instrument, parallel light field generation device, attenuator, has the diaphragm in standard aperture and by school laser beam analyser;
The laser beam reshaping that described parallel light field generation device is used for described laser instrument is sent becomes the parallel beam field;
Described attenuator is close on the end face that described diaphragm is positioned at incident light one side, is used for regulating the intensity that incides the parallel beam on the described diaphragm, and reduces background radiation to the impact of measurement result;
Described diaphragm with standard aperture is close to described by on the sensitive face of school laser beam analyzer detector, is used for the parallel beam of incident is shaped to the flat top beam of standard beamwidth;
The described flat top beam that is used for measuring described standard beamwidth by school laser beam analyser.
5. laser beam analyser calibration system according to claim 4, it is characterized in that described parallel light field generation device comprises and is successively set on the described calibration system light path and optical fiber collimator, single-mode fiber and optical convergence's module described laser wavelength coupling;
Described optical fiber collimator is used for laser beam is coupled to described single-mode fiber;
Described single-mode fiber is used to form pointolite;
Described optical convergence module is used for pointolite is converted into the parallel beam field.
6. laser beam analyser calibration system according to claim 4 is characterized in that, described diaphragm adopts the indium Steel material.
7. laser beam analyser calibration system according to claim 4 is characterized in that, described laser instrument is helium-neon laser.
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| CN201210497461.5A CN103017664B (en) | 2012-11-28 | 2012-11-28 | Method and system for calibrating laser beam analyzer |
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| CN201210497461.5A CN103017664B (en) | 2012-11-28 | 2012-11-28 | Method and system for calibrating laser beam analyzer |
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Cited By (5)
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| CN103267489A (en) * | 2013-05-20 | 2013-08-28 | 中国计量科学研究院 | Calibration system and method of Hartmann wave-front sensor |
| CN107796742A (en) * | 2017-09-20 | 2018-03-13 | 中国计量科学研究院 | A kind of device for calibrating air group concentration detecting laser radar |
| CN107870081A (en) * | 2017-11-01 | 2018-04-03 | 大族激光科技产业集团股份有限公司 | Test high power UV laser M2The detection means of the factor |
| CN109946942A (en) * | 2019-03-29 | 2019-06-28 | 北京航空航天大学 | A kind of high quality Color Full holography display system of strength matching |
| CN112596253A (en) * | 2020-12-30 | 2021-04-02 | 合肥中科领谱科技有限公司 | Light beam superposition adjusting device and method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103267489A (en) * | 2013-05-20 | 2013-08-28 | 中国计量科学研究院 | Calibration system and method of Hartmann wave-front sensor |
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| CN109946942B (en) * | 2019-03-29 | 2020-04-10 | 北京航空航天大学 | High-quality full-color holographic display system with matched intensity |
| CN112596253A (en) * | 2020-12-30 | 2021-04-02 | 合肥中科领谱科技有限公司 | Light beam superposition adjusting device and method |
| CN112596253B (en) * | 2020-12-30 | 2023-10-31 | 合肥中科领谱科技有限公司 | Light beam superposition adjusting device and adjusting method |
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