CN202351175U - Infrared ultraviolet double-pulse laser induced impact breakdown spectrum online in-situ detecting device - Google Patents
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Abstract
The utility model discloses an infrared ultraviolet double-pulse laser induced impact breakdown spectrum online in-situ detecting device, which is based on the double-pulse laser induced impact breakdown spectrum (DP-LIBS) technology and mainly formed by a double-pulse laser transmitting system, a spot sampling detecting system, an optical radiation collection system, a data collection processing system and the like. The infrared ultraviolet DP-LIBS online in-situ detecting device can achieve spot sampling detecting on a sample to be detected, finishes in-situ analysis, real-time analysis and precision detecting of trace elements of the sample, is simple and fast in analysis, free of pretreatment for the sample and capable of conducting determination of multiple elements simultaneously, and can be widely applied to a plurality of technical fields of analysis, detecting, measurement, diagnosis and the like.
Description
Technical field
The present invention can satisfy the strict demand of online in situ detection, adaptable across a plurality of technical fields such as analysis, detection, metering and diagnosis, is specifically related to a kind of infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device.
Background technology
Online in situ detection technology is the new important component part of modern detecting; Can detect the performance of material in labour equipment fast, conveniently, effectively; Finding the damage of existing structure and fragile part, is the effective means of preventing accident and taking place and guaranteeing equipment operation safety.The technological difficulties of in situ detection mainly show as: detect on the one hand the field condition harshness, can't with ideal conditions analogy such as laboratory; Structure to be detected on the other hand or material etc. are in confined state, allow the time and the space of detection limited.Compare with the detection of offing normal, online in situ detection requires higher, and difficulty is bigger.
In situ detection generally comprises contents such as defect detection, fault diagnosis, condition monitoring and measured performance parameter; Wherein defect detection and measured performance parameter are used the most extensive; Both all are to be prerequisite to obtain sample composition information; Its result directly influences its detectivity and mensuration level, thereby it is most important accurately to measure the composition information of detected sample.
Traditional composition detection technology mainly contains X-ray fluorescence method, atomic absorption spectrum (AAS) method, inductively coupled plasma atomic emission (ICP-AES) method and inductively coupled plasma emission mass spectroscopy (ICP-MS) method.Wherein X-ray fluorescence method can be realized fast detecting, but its sensitivity is lower; Though and AAS method and ICP-AES method accuracy of detection are high, good stability, both all need the sample pretreatment process, are difficult to guarantee the not contaminated or loss of sample to be checked; And the ICP-MS method can remedy above-mentioned deficiency, but since checkout equipment cost an arm and a leg, bulky, testing process is consuming time longer, is difficult to satisfy the room and time requirement of in situ detection, can't realize widely applying.
LIBS technology (Laser Induced Breakdown Spectroscopy); Be called for short LIBS; As a kind of in real time, original position, continuous, contactless novel detection technique remedied the deficiency of above detection method, can satisfy the technical need of online in situ detection.This technology need not loaded down with trivial details sample pretreatment process; Solid (conductor or nonconductor), liquid or gaseous sample dimensional requirement to various forms are all not strict, and the sample consumption is extremely low, can carry out measuring simultaneously fast of multielement; Wide accommodation is convenient to remote control.
With the traditional detection compared with techniques, the LIBS technology has incomparable technical advantage for online in situ detection, but because the sensitivity of monopulse LIBS analysis of technology is not high, thereby restricted its application in the trace element detection range.LIBS is based on high power laser light and matter interaction, produces the transient state plasma, and the emission spectrum of article on plasma body (the continuous background spectra and the characteristic spectrum of element to be measured) is studied, thereby realizes qualitative analysis and quantitative test to sample composition.Plasma temperature that monopulse LIBS excites and density are all lower, and the intensity of emission spectra of formation is limited, thereby sensitivity for analysis is relatively low, and detection limit is higher relatively.
Dipulse LIBS technology; Utilize the first bundle laser pulses irradiate sample surfaces to produce plasma; The second bundle laser pulses irradiate plasma is launched with enhanced line after a while; Realized distribution optimization, more can realize flexible optimization laser parameter (like energy, time etc.) if use two laser instruments to export two bundle laser respectively to two stages of material ablation and excitation of plasma.
Deficiency in view of the traditional detection technology; Based on the DP-LIBS technology; The invention provides a kind of infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device; This device sample consumption is low to moderate about 0.1ug-0.1mg, and the in-situ micro area spatial resolution can reach 1-100um, and its sensitivity for analysis exceeds the 1-2 one magnitude than monopulse LIBS technology.
Summary of the invention
Goal of the invention:The object of the present invention is to provide a kind of infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device, can treat the sample article and realize that spot sampling detects, and accomplishes the accurate detection of original position analysis, real-time analysis and trace element.
Technical scheme of the present invention is following: a kind of infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device is provided, it is characterized in that: comprise double-pulse laser emission coefficient, spot sampling detection system, optical radiation collection system and data acquisition processing system.
Said double-pulse laser emission coefficient is made up of the infrared band laser device that is connected with Computer signal, ultraviolet band laser device and pulse delay controller, is used to produce the double-pulse laser bundle of specific output frequency and power density; The pulse delay controller is connected with infrared band laser device and ultraviolet band laser device signal respectively, is used to regulate the recurrent interval that two of infrared band laser device and ultraviolet band laser device restrainted laser.
Said spot sampling detection system converges regulating device and the long-range regulating device that converges of second light beam constitutes by first light beam is long-range; Said infrared band laser device and ultraviolet band laser device converge regulating device and the long-range regulating device light path that converges of second light beam is connected with first light beam is long-range respectively; Said infrared band laser device and ultraviolet band laser device output laser are respectively through long-range regulating device and the long-range regulating device that converges of second light beam of converging of first light beam; Focus on the same position on detected sample surface; Ablate and excitation of plasma in order to accomplish sample, form transient high temperature degree high-density plasma.
Said first light beam is long-range to converge regulating device and the long-range regulating device that converges of second light beam is made up of condenser lens and special catoptron; Be used to realize that laser far-distance focuses on; Prolong and detect distance; Realize freely selecting of detection angles and detection faces,, realize that spot sampling detects to overcome special-shaped device and to detect the narrow and small constraint in space.
Said optical radiation collection system is made up of the long-range receiving trap of spectrum, and the long-range receiving trap of said spectrum inside forms telescopic system by one group of lens to be formed, and the focus of said telescopic system overlaps with the position of laser focusing in sample.
Said data acquisition processing system connects all band induced with laser attenuate light spectrometer by seven passage high resolution micro optical fiber and corollary apparatus is formed; The coupling of the long-range receiving trap coupling of seven passage high resolution micro optical fiber one ends and spectrum; All band induced with laser attenuate light spectrometer inserts computing machine; Accomplish spectra collection, and deposit all band spectral information that obtains in computing machine.
Said lens form first lens that telescopic system is connected by light path successively, second lens, and the 3rd lens are formed.
Said special mirror surface is through coating film treatment, and reflection efficiency is more than 95%; The center of condenser lens and special catoptron is in same level height, and special catoptron can freely rotate around central shaft, in order to change itself and the formed reflection angle of condenser lens.
Beneficial effect: in sum, a kind of infrared and ultraviolet double-pulse laser induced breakdown of the present invention spectrum on line in situ detection device can effectively strengthen the spectral radiance of laser plasma, and prolong the relaxation time of radiation, improves the sensitivity of spectral detection.Simultaneously; This installation optimization LIBS self-technique characteristics; Analyze and easyly fast need not sample pretreatment, realize treating the detection of sample article spot sampling; Realize the accurate detection of original position analysis, real-time analysis and the trace element of sample, adaptable across a plurality of technical fields such as analysis, detection, metering and diagnosis.
Description of drawings
Fig. 1. be pick-up unit synoptic diagram of the present invention.
Fig. 2. be among Fig. 1, the long-range regulating device synoptic diagram that converges of light beam.
Fig. 3. be among Fig. 1, optical radiation gathering-device synoptic diagram.
Reference numeral and explanation: 1. infrared band laser device (is example with 1064nm Nd:YAG ps pulsed laser and ns pulsed laser device); 2. ultraviolet band laser device (is example with 193nm ArF quasi-molecule ps pulsed laser and ns pulsed laser device); 3. pulse delay controller; 4. the long-range regulating device that converges of first light beam; 5. the long-range regulating device that converges of second light beam; 6. the long-range receiving trap of spectrum; 7. seven passage high resolution micro optical fiber; 8. all band induced with laser attenuate light spectrometer; 9. computing machine; 10. condenser lens; 11. special catoptron; 12. first lens; 13. second lens; 14. the 3rd lens.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is elaborated.
One, system survey
This infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device mainly is made up of four major parts such as double-pulse laser emission coefficient, spot sampling detection system, optical radiation collection system and data acquisition processing systems based on double-pulse laser induced breakdown spectrum (Double Pulse Laser Induced Breakdown Spectroscopy is called for short DP-LIBS) technology.Core component comprises infrared band laser device (is example with 1064nm Nd:YAG ps pulsed laser and ns pulsed laser device), ultraviolet band laser device (is example with 193nm ArF quasi-molecule ps pulsed laser and ns pulsed laser device), pulse delay controller, long-range regulating device, the long-range receiving trap of spectrum, seven passage high resolution micro optical fiber, all band induced with laser attenuate light spectrometer and the computing machine etc. of converging of light beam.
Said double-pulse laser emission coefficient is made up of infrared band laser device (is example with 1064nm Nd:YAG ps pulsed laser and ns pulsed laser device), ultraviolet band laser device (is example with 193nm ArF quasi-molecule ps pulsed laser and ns pulsed laser device) and pulse delay controller; And be connected to computing machine, produce the specific output frequency and the double-pulse laser bundle of power density in order to control it.The pulse delay controller can be regulated the recurrent interval of two bundle laser.
Said spot sampling detection system is made up of the long-range regulating device that converges of light beam.Two laser instruments output laser through respectively through light beam is long-range converge regulating device after, focus on the same position on detected sample surface, ablate and excitation of plasma in order to accomplish sample, form transient high temperature degree high-density plasma.
The long-range regulating device that converges of light beam is made up of condenser lens and special catoptron; Can realize that not only laser far-distance focuses on; Prolong and detect distance; And can realize freely selecting of detection angles and detection faces, thus overcome special-shaped device and detect the narrow and small constraint in space, realize that spot sampling detects.
Said optical radiation collection system is made up of the long-range receiving trap of spectrum; Inside forms telescopic system by one group of lens, in the receiving spectrum signal process, guarantees that as far as possible the focus of telescopic system overlaps with the position of laser focusing in sample; In the hope of receiving more emission spectrum, improve signal to noise ratio (S/N ratio).
Said data acquisition processing system is made up of corollary apparatus such as seven passage high resolution micro optical fiber connection all band induced with laser attenuate light spectrometers; The coupling of the long-range receiving trap coupling of optical fiber end and spectrum; The spectrometer section inserts computing machine; Accomplish spectra collection through corresponding software kit, and deposit all band spectral information that obtains in computing machine.Late time data can obtain desirable analysis conclusion through analyzing and processing.
Two, embodiment
Please referring to figs. 1 through Fig. 3, this infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device, core component comprise infrared band laser device 1 (is example with 1064nm Nd:YAG ps pulsed laser and ns pulsed laser device); Ultraviolet band laser device 2 (is example with 193nm ArF quasi-molecule ps pulsed laser and ns pulsed laser device); Pulse delay controller 3; The long-range regulating device 4 that converges of first light beam; The long-range regulating device 5 that converges of second light beam; The long-range receiving trap 6 of spectrum; Seven passage high resolution micro optical fiber 7; All band induced with laser attenuate light spectrometer 8 and computing machine 9 etc.
When adopting pick-up unit of the present invention to carry out online in site measurement, according to the exciting characteristic of detected sample, preestablish the time delay of pulse delay controller 3, in order to control the time interval of two laser.
Infrared band pulsed laser 1 and ultraviolet band ps pulsed laser and ns pulsed laser device 2; Under pulse delay controller 3 triggered, the ps pulsed laser and ns pulsed laser of output high-power density successively was via long-range regulating device 4, the long-range regulating device 5 that converges of second light beam of converging of first light beam; Focus on the sample surfaces same position; The excitation of plasma process is accomplished in ablation sample position to be detected, produces the emission spectrum signal.
The focus (promptly installing the remote probe point) of the long-range receiving trap 6 of spectrum is positioned the sample surfaces Stimulated Light excites the position; Receive emission spectrum; The terminal coupling with seven passage high resolution micro optical fiber 7, be coupled, and reduces fiber loss, the optimization system signal to noise ratio (S/N ratio) as far as possible.
Seven passage high resolution micro optical fiber 7 transfer to all band induced with laser attenuate light spectrometer 8 with the plasma light spectrum signal that receives, all band spectral information that can obtain through corresponding software kit, and be saved in the computing machine 9.
According to gathering all band spectroscopic data information that obtains; The physical parameter of line strength and plasma such as the energy of atomic transition, the mathematical relation between the plasma temperature are set up Quantitative Analysis Model, utilize and freely calibrate correction analysis method (calibration-free) and can draw detection constituent analysis conclusion.
Said infrared band ps pulsed laser and ns pulsed laser device 1; Ultraviolet band ps pulsed laser and ns pulsed laser device 2; With pulse delay controller 3, link to each other and connect into computing machine 9, produce the specific output frequency and the double-pulse laser bundle of power density in order to control it;, pulse delay controller 3 can be regulated the recurrent interval of two bundle laser.
Said first light beam is long-range to converge regulating device 4, the long-range regulating device 5 that converges of second light beam is made up of condenser lens 10 and special catoptron 11.Condenser lens 10 focuses in order to realize laser far-distance, prolongs detection range, and special catoptron 11 surfaces can provide the reflection efficiency more than 95% through coating film treatment.The center of condenser lens 10 and special catoptron 11 is in same level height; And special catoptron 11 can freely rotate around central shaft; In order to change itself and condenser lens 10 formed reflection angles; Thereby realize freely selecting of detection angles and detection faces, overcome special-shaped device and detect the narrow and small constraint in space, realize that spot sampling detects.
The long-range receiving trap of said spectrum 6 inside form telescopic system by one group (more than two and two) first lens 12, second lens 13 and the 3rd lens 14; In the receiving spectrum signal process; The focus that as far as possible guarantees telescopic system overlaps with the position of laser focusing in sample; In the hope of receiving more emission spectrum, improve signal to noise ratio (S/N ratio).
After adopting pick-up unit of the present invention, used detection method comprises the steps:
A. according to the exciting characteristic of detected sample, set the time delay of pulse delay controller, in order to control the time interval of two laser.
B. infrared band laser device (is example with 1064nm Nd:YAG ps pulsed laser and ns pulsed laser device) and ultraviolet band laser device (is example with 193nm ArF quasi-molecule ps pulsed laser and ns pulsed laser device); Under the pulse delay controller triggered, the ps pulsed laser and ns pulsed laser of output high-power density successively was via the long-range regulating device that converges of light beam; Focus on the sample surfaces same position; The excitation of plasma process is accomplished in ablation sample position to be detected, produces the emission spectrum signal.
C. the focus (promptly installing the remote probe point) of spectrum long range acquisition device is positioned the sample surfaces Stimulated Light and excites the position; Receive emission spectrum; The terminal coupling with seven passage high resolution micro optical fiber, be coupled, and reduces fiber loss, the optimization system signal to noise ratio (S/N ratio) as far as possible.
D. optical fiber transfers to all band induced with laser attenuate light spectrometer with the plasma light spectrum signal that receives, all band spectral information that can obtain through corresponding software kit.
According to gathering all band spectroscopic data information that obtains; The physical parameter of line strength and plasma such as the energy of atomic transition, the mathematical relation between the plasma temperature are set up Quantitative Analysis Model, utilize and freely calibrate correction analysis method (calibration-free) and can draw detection constituent analysis conclusion.
The said correction analysis method (calibration-free) of freely calibrating must be based on following three reasonable assumptions:
A. the element composition that each element is formed and sample is ablated preceding in the plasma is identical.
B. in the time and space observation gate of reality, plasma is in hot plasma and is in the heat power balance.
C. transmitting illuminant is enough little.
According to above-mentioned hypothesis, the transition measured line integral intensity of a certain atomic species s between two different energy level Ek and Ei can be expressed as in (1) formula,
---transition wavelength;
---to the transition probability of particular spectral lines;
F
--Constant, relevant with the efficient of light collecting device, with Wavelength-independent, in testing process, remain unchanged;
Equation (1) is taken the logarithm, and makes following hypothesis:
Can about the linear equation of parameter y and x according to
and the known spectra parameter
in the spectra database that record,
and; Can draw the straight line (Boltzmann curve) of y about x; Obtain slope m and intercept
, can get (
) through slope.Concentration normalization to all species compositions can draw F, i.e.
and the concentration
of species composition can be passed through formula
Definite the preferred embodiments of the present invention that all belong to of above-mentioned embodiment and optical maser wavelength; Can not limit claim of the present invention; Other any change or other equivalent substitute modes that does not deviate from technical scheme of the present invention and made is included within protection scope of the present invention.
Claims (3)
1. an infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device is characterized in that: comprise double-pulse laser emission coefficient, spot sampling detection system, optical radiation collection system and data acquisition processing system;
Said double-pulse laser emission coefficient is made up of the infrared band laser device (1), ultraviolet band laser device (2) and the pulse delay controller (3) that are connected with computing machine (9) signal, is used to produce the double-pulse laser bundle of specific output frequency and power density; Pulse delay controller (3) is connected with infrared band laser device (1) and ultraviolet band laser device (2) signal respectively;
Said spot sampling detection system is by long-range regulating device (4) and long-range regulating device (5) formation that converges of second light beam of converging of first light beam; Said infrared band laser device (1) and ultraviolet band laser device (2) converge regulating device (4) and long-range regulating device (5) light path that converges of second light beam is connected with first light beam is long-range respectively; Said infrared band laser device (1) and ultraviolet band laser device (2) output laser focus on the same position on detected sample surface respectively through long-range regulating device (4) and the long-range regulating device (5) that converges of second light beam of converging of first light beam;
Said first light beam is long-range to converge regulating device (4) and the long-range regulating device (5) that converges of second light beam is made up of condenser lens (10) and special catoptron (11);
Said optical radiation collection system is made up of the long-range receiving trap of spectrum (6), and the long-range receiving trap of said spectrum (6) inside forms telescopic system by one group of lens to be formed, and the focus of said telescopic system overlaps with the position of laser focusing in sample;
Said data acquisition processing system connects all band induced with laser attenuate light spectrometer (8) by seven passage high resolution micro optical fiber (7) and corollary apparatus is formed; Seven passage high resolution micro optical fiber (7) one ends and the coupling of the long-range receiving trap of spectrum (6) coupling, all band induced with laser attenuate light spectrometer (8) inserts computing machine (9).
2. according to claim infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device; It is characterized in that: said lens form first lens (12) that telescopic system is connected by light path successively; Second lens (13), the 3rd lens (14) are formed.
3. according to claim infrared and ultraviolet double-pulse laser induced breakdown spectrum on line in situ detection device, it is characterized in that: said special catoptron (11) surface is through coating film treatment, and reflection efficiency is more than 95%; The center of condenser lens (10) and special catoptron (11) is in same level height, and special catoptron (11) can freely rotate around central shaft.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102507511A (en) * | 2011-11-07 | 2012-06-20 | 大连理工大学 | On-line in situ detecting device for infrared-ultraviolet double pulse laser induced breakdown spectroscopy |
| US9506871B1 (en) | 2014-05-25 | 2016-11-29 | Kla-Tencor Corporation | Pulsed laser induced plasma light source |
| CN106468660A (en) * | 2016-10-28 | 2017-03-01 | 河钢股份有限公司 | A kind of on-line quick detection device for steel scrap and metal |
| CN111077134A (en) * | 2020-02-11 | 2020-04-28 | 杭州谱育科技发展有限公司 | Portable LIBS system with carbon measurement function and carbon element detection method |
| CN113441834A (en) * | 2021-07-29 | 2021-09-28 | 苏州长光华芯光电技术股份有限公司 | Laser processing detection device |
| EP3505912B1 (en) * | 2016-08-24 | 2022-02-09 | Academy of Opto-Electronics Chinese Academy of Sciences | Method for detecting composition of steel sample by using multi-pulse laser-induced plasma spectrometer |
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2011
- 2011-11-07 CN CN 201120435370 patent/CN202351175U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102507511A (en) * | 2011-11-07 | 2012-06-20 | 大连理工大学 | On-line in situ detecting device for infrared-ultraviolet double pulse laser induced breakdown spectroscopy |
| US9506871B1 (en) | 2014-05-25 | 2016-11-29 | Kla-Tencor Corporation | Pulsed laser induced plasma light source |
| EP3505912B1 (en) * | 2016-08-24 | 2022-02-09 | Academy of Opto-Electronics Chinese Academy of Sciences | Method for detecting composition of steel sample by using multi-pulse laser-induced plasma spectrometer |
| CN106468660A (en) * | 2016-10-28 | 2017-03-01 | 河钢股份有限公司 | A kind of on-line quick detection device for steel scrap and metal |
| CN106468660B (en) * | 2016-10-28 | 2024-03-22 | 河钢股份有限公司 | Online rapid detection device for scrap steel and metal |
| CN111077134A (en) * | 2020-02-11 | 2020-04-28 | 杭州谱育科技发展有限公司 | Portable LIBS system with carbon measurement function and carbon element detection method |
| CN111077134B (en) * | 2020-02-11 | 2022-09-06 | 杭州谱育科技发展有限公司 | Portable LIBS system with carbon measurement function and carbon element detection method |
| CN113441834A (en) * | 2021-07-29 | 2021-09-28 | 苏州长光华芯光电技术股份有限公司 | Laser processing detection device |
| CN113441834B (en) * | 2021-07-29 | 2023-02-17 | 苏州长光华芯光电技术股份有限公司 | Laser processing detection device |
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