CN109444111A - A kind of optical fiber LIBS detection system and method for optional double pulse modes - Google Patents
A kind of optical fiber LIBS detection system and method for optional double pulse modes Download PDFInfo
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- CN109444111A CN109444111A CN201811502564.XA CN201811502564A CN109444111A CN 109444111 A CN109444111 A CN 109444111A CN 201811502564 A CN201811502564 A CN 201811502564A CN 109444111 A CN109444111 A CN 109444111A
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
This application involves laser-diagnose technology field more particularly to a kind of optical fiber LIBS detection system and method for optional double pulse modes, which includes integrated fiber lasers, optical fiber LIBS probe, control detection module and optical fiber transmission module；The application obtains the plasma emission spectroscopy signal of different degrees of dipulse enhancing with the system by the method, and the output laser timing of main pulse laser and slave pulses laser can be changed by the secondary position popped one's head on guide rail in position and adjusting for changing barn door to switch four kinds of dipulse optical fiber LIBS detection modes to multi-faceted and detect to sample to be tested, the characteristic spectral line that may be significantly is to accurately analyze the element species and content of sample to be tested.Influence of the matrix effect to detection can be reduced, repeatability is high, and spectral signal-noise ratio is high, and analysis speed is fast, and measurement process is safe and reliable, and Element detection limit for height is able to carry out remote online monitoring.
Description
Technical field
This application involves laser-diagnose technology field more particularly to a kind of optical fiber LIBS detection systems of optional double pulse modes
System and method.
Background technique
LIBS is the abbreviation of (Laser-Induced Breakdown Spectroscopy) laser induced breakdown spectroscopy,
The technology by ultra-short pulse laser focus sample surfaces formed plasma, using spectrometer plasma emission spectrum into
Row analysis identifies the element constituent in sample with this, and then can carry out the identification of material, classification, qualitative and fixed
Amount analysis.Since LIBS technology comes out, which is just acknowledged as a kind of new technology having a extensive future, and will be analysis neck
Bring numerous innovation and applications in domain.LIBS both can be used for laboratory as a kind of new material identification and quantitative analysis tech,
Also it can be applied to the on-line checking of industry spot.It is mainly characterized in that: quickly directly analysis, hardly needs sample preparation；
It can detecte nearly all element；Multiple element can be analyzed simultaneously；Matrix Morphological Diversity-can detecte nearly all solid-state
Sample.LIBS compensates for the deficiency of traditional element analysis method, especially tiny area material analysis, coating/film analysis, lack
It is with the obvious advantage to fall into the application fields such as detection, gemstone testing, forensic evidence identification, dusty material analysis, alloy analysis, meanwhile,
LIBS can also be widely used in the application of the different fields such as geology, coal, metallurgy, pharmacy, environment, scientific research.In addition to traditional
The application in laboratory, LIBS or the element analysis technology that can be made handheld portable device few in number are even more at present
Only it is considered uniquely doing the element analysis technology of on-line analysis.This will be such that analytical technology greatly expands from laboratory field
Into outdoor, scene, even production process.
Sample to be tested carries out the type and content in line element in the prior art to detect multi-purpose double-pulse laser breakdown
Spectral analysis device and method, the principle of double-pulse laser induced breakdown spectrum are to carry out in advance in the first bundle of pulsed laser to sample
On the basis of ablation, optimization excitation environment, the second bundle of pulsed laser carries out chain induction excitation to sample, to obtain intensity more
High plasma emission spectroscopy signal.Sample different zones are carried out using double-pulse laser breakdown spectral measuring system
Measurement obtains spectrum, and collected spectrum is transmitted in computer by spectrometer；Software on computer is by collected spectrum
Data are analysed and compared with the LIBS component spectrum information in NIST database, obtain element species contained in sample to be tested
With corresponding spectral line information, we pass through the characteristic spectral line and its intensity for analyzing wherein coherent element, finally obtain sample to be tested
In contained element species and content detection result.
However, the detection of double-pulse laser breakdown spectral analytical equipment and method has deviation, mainly due to carrying out
Laser pulse stability is poor when detection, and detector can generate noise, and signal signal in transmission process is lossy, ablation process
Not reproducible, safety in utilization is low, and can be protected from environmental, and results in that finally obtained characteristic spectral line is unobvious to be difficult to it
Carry out quantitative analysis.It is traditional double-pulse laser induced to hit as the application range of laser induced breakdown spectroscopy increasingly extends
It wears spectral technique and has been unable to meet needs instantly.
Summary of the invention
This application provides a kind of optical fiber LIBS detection system and methods of optional double pulse modes, to solve traditional fiber
LIBS is easy to be influenced by sample substrate effect, and there is poor laser pulse stability, poor repeatability, ablation process can not weigh
Multiple, detector generates noise jamming, detection limit for height, nonmetalloid characteristic spectral line unobvious the disadvantages of being difficult to quantitative analysis and asks
Topic.
The first aspect of the application provides a kind of optical fiber LIBS detection system of optional double pulse modes, the system packet
Include: a kind of optical fiber LIBS detection system of optional double pulse modes, the system comprises: integrated optical fiber device, optical fiber LIBS probe,
Detection module and optical fiber transmission module are controlled,
Programmable pulse delay generator in the control detection module respectively with first in the integrated optical fiber device
The control terminal of the control terminal of nanosecond laser and second nanosecond laser is electrically connected；
Computer in the control detection module prison with the first laser energy meter in the integrated optical fiber device respectively
The signal control terminal for controlling end, the monitoring client of second laser energy meter and barn door is electrically connected；
Oscillograph in the control detection module prison with the first photodetector in the integrated optical fiber device respectively
The monitoring client for controlling end and the second photodetector is electrically connected；
Main probe in optical fiber LIBS probe respectively with the main pulse laser output of the integrated optical fiber device, described
The spectrometer controlled in detection module is connected by the first transmission fiber, the third transmission fiber in the optical fiber transmission module,
The slave pulses laser output of secondary probe and the integrated optical fiber device in the optical fiber LIBS probe is transmitted by the optical fiber
The second transmission fiber connection in module.
Optionally, the in the center of the main pulse laser output of the integrated optical fiber device and optical fiber LIBS probe
One optic fibre switching part, third plano-convex lens, the 4th plano-convex lens, dichroscope center on the same line.
Optionally, the in the center of the slave pulses laser output of the integrated optical fiber device and optical fiber LIBS probe
Three optic fibre switching parts, the 7th plano-convex lens, the 8th plano-convex lens center on the same line.
Optionally, the second optic fibre switching in the output end center of the third transmission fiber and optical fiber LIBS probe
Part, the 5th plano-convex lens, the 6th plano-convex lens, reflecting mirror center on the same line, the 5th plano-convex lens and described
6th plano-convex lens surface is coated with anti-reflection film.
Optionally, the position setting of the optoelectronic switch transmitting terminal and optoelectronic switch receiving end in the optical fiber LIBS probe exists
The sustained height of bracket.
Optionally, the main probe is fixedly connected with the guide rail, and the secondary probe is slidably connected with the guide rail.
Optionally, the angular range between the main probe and the laser beam axis of the secondary probe output 45 ° -90 ° it
Between any value.
Optionally, the available detection pattern of the system includes conllinear type dipulse LIBS mode, chiasma type dipulse
LIBS mode reheats orthogonal type dipulse LIBS mode and pre-ablation orthogonal type dipulse LIBS four kinds of modes of mode.
The second aspect of the application provides a kind of optical fiber LIBS detection method of optional double pulse modes, and the method is answered
For the described in any item systems of claim 1-8, which is characterized in that the described method includes:
Dodge gate in S1, opening optical fiber LIBS probe, is placed in the loading liter in optical fiber LIBS probe for sample to be tested
On drop platform and it is closed the dodge gate；
S2, the rising loading lifting platform drive the sample to be tested slowly to rise, until the upper table of the sample to be tested
Face shelters from the light beam that the optoelectronic switch transmitting terminal in optical fiber LIBS probe issues, and just stops rising；
S3, the instruction light for opening the first nanosecond laser and the second nanosecond laser in integrated optical fiber device, described in adjustment
Sample to be tested falls within the area to be tested on the sample to be tested and swashs first nanosecond in the position of the loading lifting platform
The centre position of light device (11) and the instruction light focal beam spot of second nanosecond laser；
S4, the first nanosecond laser shoot laser parameter, the delay of ICCD (35) gate-width signal and the load are adjusted
The position of object lifting platform；
The ordinate of S5, the signal-to-background ratio of observational characteristic beta radiation spectrum and spectrogram, if signal-to-background ratio is high and spectrogram is indulged and sat
Mark numerical value maximum the step of then carrying out S6, if the step of signal-to-background ratio low returns S4, until observing that signal-to-background ratio is high and spectrogram is indulged
The step of maximum characteristic curve radiation spectrum of coordinate values executes S6 again；
Simultaneously dipulse target practice accumulative frequency is arranged in four kinds of S6, switching dipulse optical fiber LIBS modes；
S7, bias light is sampled using the spectrometer in control detection module, obtains the cumulative spectral information of the sample to be tested；
Spectroscopic data in S8, comparison database obtains the corresponding characteristic spectral line of element species in the sample to be tested；
The dipulse optical fiber LIBS experiment of S9, further progress standard sample, are quantitatively examined by LIBS element calibration curve
Survey the constituent content in sample to be tested；
S10, loading lifting platform is dropped into bottommost.
Optionally, the control precision of the loading lifting platform is 10 μm.
The technical scheme provided by the application includes following advantageous effects:
This application provides a kind of multimode fibre LIBS detection system of optional double pulse modes, the system comprises: collection
Pass through above-mentioned side with the system at optical fiber device, optical fiber LIBS probe, control detection module and optical fiber transmission module, the application
Method passes through the delay and setting between programmable pulse delay generator setting main pulse, slave pulses pulse according to actual needs
ICCD collects the delay of spectrum, and whether the delay for observing each road signal by oscillograph is accurate, after waiting ICCD to start to work, spectrum
Instrument collects spectrum and carries out light-splitting processing to it；The accumulative frequency that dipulse is practiced shooting is set in the software of computer；It beats every time
Spectrometer will carry out the sampling of environmental background spectrum before target；After dipulse optical-fiber laser is practiced shooting, spectrometer will be collected
Multiple spectrum is cumulative to be transmitted in computer；Software on computer will be in collected spectroscopic data and NIST database
LIBS component spectrum information is analysed and compared, and element species contained in sample to be tested and corresponding spectral line information are obtained, and
And LIBS element calibration curve quantitative detection can be passed through with the dipulse optical-fiber laser Targeting of further progress standard sample
Constituent content in sample to be tested simultaneously can change master by changing the position of barn door, adjusting position of the secondary probe on guide rail
The output laser timing of pulse laser and slave pulses laser switches four kinds of dipulse optical fiber LIBS detection modes from multi-faceted
Sample to be tested is detected, the characteristic spectral line that may be significantly is to the element species of sample to be tested and the content of element
Accurately analyzed.Influence of the matrix effect to detection can be reduced, repeatability is high, and spectral signal-noise ratio is high, and analysis speed is fast,
Measurement process is safe and reliable, and Element detection limit for height is able to carry out remote online monitoring.Solve traditional fiber LIBS be easy by
The influence of sample substrate effect, has that laser pulse stability is poor, poor repeatability, ablation process are not reproducible, detector generation
Noise jamming, detection limit for height, nonmetalloid characteristic spectral line unobvious the disadvantages of being difficult to quantitative analysis and problem.
Detailed description of the invention
In order to illustrate more clearly of the technical solution of the application, letter will be made to attached drawing needed in the embodiment below
Singly introduce, it should be apparent that, for those of ordinary skills, without any creative labor,
It is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of optical fiber LIBS detection system structure signal of optional double pulse modes provided by the embodiments of the present application
Figure.
Fig. 2 is optical fiber LIBS sonde configuration schematic diagram provided by the embodiments of the present application.
Fig. 3 is the switching flow figure of four kinds of dipulses optical fiber LIBS detection mode provided by the embodiments of the present application.
Fig. 4 is conllinear type dipulse optical fiber LIBS enhanced spectrum provided by the embodiments of the present application and pulse optical fiber LIBS light
The comparison diagram of spectrum.
Fig. 5 is a kind of optical fiber LIBS detection method flow diagram of optional double pulse modes provided by the embodiments of the present application.
Description of symbols:
11, the first nanosecond laser；12, the first photodetector；13, the first spectroscope；14, the second spectroscope；15,
One laser energy meter；16, third spectroscope；17, the first reflective mirror；18, the first plano-convex lens；19, the second nanosecond laser；
110, the second photodetector；111, second laser energy meter；112, the 4th spectroscope；113, the 5th spectroscope；114, the 6th
Spectroscope；115, the second reflective mirror；116, the second plano-convex lens；117, barn door；21, bracket；22, main probe；23, guide rail；
24, secondary probe；25, loading lifting platform；26, optoelectronic switch transmitting terminal；27, dodge gate；28, optoelectronic switch receiving end；221,
One optic fibre switching part；222, the second optic fibre switching part；223, first sleeve；224, third plano-convex lens；225, Siping City's convex lens
Mirror；226, dichroscope；227, the 5th plano-convex lens；228, the 6th plano-convex lens；229, reflecting mirror；241, third optic fibre switching
Part；242, the 7th plano-convex lens；243, the 8th plano-convex lens；244, second sleeve；31, computer；32, oscillograph；33, it can compile
Journey pulse daley generator；34, spectrometer；35,ICCD；41, the first transmission fiber；42, the second transmission fiber；43, third passes
Lose fibre.
Specific embodiment
This application provides a kind of optical fiber LIBS detection system and methods of optional double pulse modes, to solve traditional fiber
LIBS is easy to be influenced by sample substrate effect, and there is poor laser pulse stability, poor repeatability, ablation process can not weigh
Multiple, detector generates noise jamming, detection limit for height, nonmetalloid characteristic spectral line unobvious the disadvantages of being difficult to quantitative analysis and asks
Topic.
Illustratively, a kind of optical fiber LIBS of the optional double pulse modes provided as shown in Figure 1 for the application first aspect
Detection system, the system comprises: integrated optical fiber device, optical fiber LIBS probe, control detection module and optical fiber transmission module.
Integrated optical fiber device includes mainboard and the first nanosecond laser being arranged on mainboard, the first spectroscope, the first light
Electric explorer, the second spectroscope, first laser energy meter, third spectroscope, the first reflective mirror, the first plano-convex lens, second receive
Second laser, the 4th spectroscope, the second photodetector, the 5th spectroscope, second laser energy meter, the 6th spectroscope, second
Reflective mirror, the second plano-convex lens and barn door.
Integrated fiber lasers have 9 interfaces, respectively the first nanosecond laser output end, the output of the second nanosecond laser
It holds, control terminal, the first photodetector monitoring client, first laser energy of shading partitioned signal control terminal and the first nanosecond laser
The control terminal of meter monitoring client and the second nanosecond laser, the second photodetector monitoring client, second laser energy meter monitoring client；
The first nanosecond laser and the second nanosecond laser that the first side of mainboard is set are respectively corresponded, the of mainboard second side is set
One photodetector and first laser energy meter, be arranged in the second photodetector of mainboard third side, second laser energy meter,
Barn door, the first plano-convex lens and the second plano-convex lens.
First spectroscope, the second spectroscope, third spectroscope, the first reflective mirror and the setting of the first plano-convex lens are received first
On the laser optical path of second laser output, the spectroscopical position of the first spectroscope, third respectively with the first photodetector, first
The position of laser energy meter is corresponding, and the second spectroscope is arranged between the first spectroscope and third spectroscope, the first reflective mirror
The third spectroscope being arranged between the second spectroscope.
4th spectroscope, the 5th spectroscope, the 6th spectroscope, the second reflective mirror and the setting of the second plano-convex lens are received second
On the laser optical path of second laser output, the 4th spectroscope, the 5th spectroscopical position respectively with the second photodetector, second
The position of laser energy meter is corresponding, is provided with the 6th spectroscope between the 5th spectroscope and the second reflective mirror.
Barn door is mounted on the mainboard of integration laser, and the position of barn door can be controlled by computer, is arranged
Between the second spectroscope and the 6th spectroscope or between the 6th spectroscope and the second reflective mirror.
First nanosecond laser and the second nanosecond laser are the device that can emit nanosecond laser, the first nanosecond laser
Device and the laser of the second nanosecond laser transmitting focus breakdown sample to be tested, can be obtained by acquiring luminescence of plasma spectrum
The radiation characteristic spectral line of sample to be tested analyzes according to the spectral line of acquisition and obtains in sample to be tested contained element species and each
The content of element.Transmitting terminal of first nanosecond laser as main pulse laser in this application, the second nanosecond laser conduct
The transmitting terminal of slave pulses can adjust the output laser energy of the first nanosecond laser and the second nanosecond laser according to actual needs
The timing and time interval between main pulse laser and slave pulses laser is arranged by programmable pulse delay generator in amount, can
To obtain the plasma emission spectroscopy signal of different degrees of dipulse enhancing, by two laser device laser pulse sequences and
The setting of time interval, so that the reinforcing effect of the luminescence of plasma spectral signal obtained is stronger, the characteristic spectral line observed
Also more obvious, it is also more accurate by the result of algorithm qualitative and quantitative analysis constituent content.
Spectroscope is the Optical devices that light beam can be divided into multi beam, the laser one of the first nanosecond laser output
The first spectroscope is crossed by Reuter, and all the way by the light splitting of the first spectroscope into the first photodetector, the second spectroscope will transmit through first
Spectroscopical light-receiving is further continued for through third spectroscope, and laser is divided into two-way by third spectroscope, is divided all the way through third
Mirror reaches the first reflecting mirror, is split all the way into first laser energy meter, and the first reflecting mirror is by after laser reflection, through first
Plano-convex lens focus in the first transmission fiber.
The laser of second nanosecond laser output penetrates the 4th spectroscope all the way, is divided all the way by the 4th spectroscope to second
In photodetector, the 5th spectroscope will transmit through the 4th spectroscopical light-receiving and laser be divided into two-way, penetrate the 6th all the way
Spectroscope reaches the second reflecting mirror, is split all the way into second laser energy meter, and the second reflecting mirror is penetrated after laser reflection
Second plano-convex lens focus in the second transmission fiber.
The output laser beam axis of spectroscope and nanosecond laser angle at 45 ° can make spectroscope that will receive in this way and receive
The laser beam of second laser is divided into two-way, wherein the light beam being assigned in photodetector and laser energy meter just with nanosecond
The laser beam of laser output is vertical.
Photodetector is a kind of device that optical signal can be converted into electric signal, its principle is to be caused to be shone by radiation
Penetrate material electric conductivity to change, information entrained by the radiation signal that detector is collected into has: light distribution, Temperature Distribution,
Spectral power distribution, radiation flux etc., radiation signal is after electronic circuit is handled for analysis, record, storage and display.
The laser of first nanosecond laser output penetrates the first spectroscope all the way, is divided all the way by the first spectroscope to first
In photodetector, the first photodetector connects oscillograph, for monitoring the timing of main pulse laser output signal.
The laser of second nanosecond laser output penetrates the 4th spectroscope all the way, is divided all the way by the 4th spectroscope to second
In photodetector, the second photodetector connects oscillograph, for monitoring the timing of slave pulses laser output signal.
Laser energy meter is the amplifier for being successively arranged detector in a tubular metal shell, being electrically connected with the detector
And signal output unit, and between the laser light incident mouth and detector of shell, it is equipped with a ceramic hollow chamber, the ceramics are empty
The chambers of the heart is closed hollow cylinder, and it is parallel that the axial direction of cylinder with laser enters housing direction.Common energy measuring method is divided into light
Thermal method and broadcasting and TV method.Photo-thermal method with thermoelectric pile or heat release a material be sensing during absorption-type detector, that is, allow laser with suction
Acceptor pollination, reusable heat electric transducer tests the temperature rise of absorber, thus the calorie value for the body that is absorbed, i.e. laser energy
Value.Photoelectric method is using photo-electric detector or semiconductor photo diode as the photo-electric detector of senser element, optical signal conversion
After electric signal, electric signal obtains the voltage signal directly proportional to input optical pulse energy through charge integrator, to complete energy
The measurement of amount.Since the dynamic range of photodiode is big, measuring speed is fast, can reflect the envelope variation of signal, and price is just
Preferably, so the application selects photoelectric method to complete the first nanosecond laser and the second nanosecond laser and issue the survey of laser energy
Amount.
The laser of first nanosecond laser output penetrates the first spectroscope all the way, is divided all the way by the first spectroscope to first
In photodetector, the second spectroscope will transmit through first spectroscopical light-receiving and be further continued for through third spectroscope, third light splitting
Laser is divided into two-way by mirror, is reached the first reflecting mirror through third spectroscope all the way, is split all the way to first laser energy meter
In, first laser energy meter is connect with computer, by test measure in advance laser energy into the first energy laser meter with
The ratio of the laser energy of first nanosecond laser output, setting is corresponding in a computer is divided coefficient, so as to monitor
The actual energy of first nanosecond laser output laser.
The laser of second nanosecond laser output penetrates the 4th spectroscope all the way, is divided all the way by the 4th spectroscope to second
In photodetector, the 5th spectroscope will transmit through the 4th spectroscopical light-receiving and laser be divided into two-way, penetrate the 6th all the way
Spectroscope reaches the second reflecting mirror, is split all the way into second laser energy meter, and second laser energy meter is connect with computer,
The laser energy exported into the laser energy of the second energy laser meter and the second nanosecond laser is measured in advance by testing
Ratio, setting is corresponding in a computer is divided coefficient, so as to monitor the practical energy of the second nanosecond laser output laser
Amount.
Reflective mirror is the mirror for being specifically used to reflection light, makes light ray parallel or increases the brightness on one side of mirror.First
After the fraction of laser light reflection that reflecting mirror emits the first nanosecond device, focused in the first transmission fiber through the first plano-convex lens；
After second reflecting mirror reflects the fraction of laser light of the second nanosecond laser, the second transmission fiber is focused on through the second plano-convex lens
In.Since the laser facula that the first nanosecond laser and the second nanosecond laser emit is circle, in order to obtain better focusing
Effect, optical quality and fibre-coupling efficiency, so in the center of the application the first reflecting mirror of setting, the first plano-convex lens
The heart, the first transmission fiber input terminal be centrally disposed on same straight line and the center of the second reflecting mirror, the second plano-convex lens
Center, the second transmission fiber input terminal is centrally disposed on same straight line.
The position with nanosecond laser output laser beam axis angle at 45 ° is arranged in reflective mirror, and effect is exactly to change to receive
The optical path of second laser output laser, to keep laser beam axis interior through plano-convex lens and focus into transmission fiber.
The position apart from optic fibre input end 2-3mm is arranged in the focusing focus of laser beam axis by the application, is arranged in this way
Purpose be it is excessively high to avoid focusing on the laser energy in plano-convex lens, optical fiber is broken.
The effect of barn door is exactly to cover in light beam, does not allow it by a certain section of optical path, can pass through calculating in this application
Machine controls shading Board position, is disposed between the second spectroscope and the 6th spectroscope or the 6th spectroscope and second reflective
Between mirror；Illustratively, as shown in Figure 1, the position of barn door can from the position a to the position b, can also from b position to a position
It sets, the contained of sample to be tested is analyzed using main pulse and the mutually matched dipulse LIBS detection mode of slave pulses in the application
The type of element and the content of each element adjust the output of the second nanosecond laser in the application by changing the position of barn door
Slave pulses output light path.Illustratively, it is illustrated in figure 3 four kinds of dipulses optical fiber LIBS detection mode provided by the present application
Switching flow figure, barn door is placed in the position b, detection mode is just conllinear type dipulse LIBS mode；Barn door is placed in a
Position, detection mode is just non-colinear type dipulse LIBS mode.
Optionally, the nanosecond laser that the first nanosecond laser that the application selects is Nd:YAG, Output of laser wavelength are
1064nm, frequency 1-10Hz, pulse width FWHM be 10ns, maximum impulse energy be 150mJ, laser beam spot sizes 6mm,
Second nanosecond laser is to adjust the Nd:YAG nanosecond laser of Q, and wavelength 1064nm, working frequency is 1~20Hz, pulse width
For 10ns, pulse energy is that 0~120mJ is adjustable, for different usage scenarios replaceable different model according to actual needs
Nanosecond laser.
Illustratively, it is illustrated in figure 2 the structural schematic diagram of optical fiber LIBS probe, is the quadrant of inner hollow
Structure, including bracket, main probe, guide rail, secondary probe, loading lifting platform, optoelectronic switch transmitting terminal, dodge gate and optoelectronic switch connect
Receiving end, main probe are fixedly connected with guide rail, and pair probe is slidably connected with guide rail, and dodge gate is bolted on the first side of bracket
Outer wall on, loading lifting platform is mounted on the inside of dodge gate, and optoelectronic switch transmitting terminal and optoelectronic switch receiving end are arranged in work
On sustained height in dynamic door, luminous optical axis, the loading lifting platform of optoelectronic switch transmitting terminal are parallel with the surface of sample to be tested.
Main probe is fixedly connected with guide rail for receiving the laser of the first nanosecond laser, is fixed on the position m of bracket
It sets, main probe includes the first optic fibre switching part, the second optic fibre switching part and first sleeve, the first optic fibre switching part and the second light
Fine adapter is horizontally set on the top of first sleeve, and the inside of first sleeve is uniformly divided into two parts, first part
It is fixed in first sleeve with snap ring including third plano-convex lens, the 4th plano-convex lens and dichroscope, three, third plano-convex
Lens, the 4th plano-convex lens are successively vertically arranged with first sleeve side wall, and dichroscope is set with first sleeve side wall in 45° angle
It sets；Second part includes the 5th plano-convex lens, the 6th plano-convex lens, reflecting mirror and snap ring, and three is fixed on first with snap ring
In sleeve, the 5th plano-convex lens, the 6th plano-convex lens are successively vertically arranged with first sleeve side wall, reflecting mirror and first sleeve side
Wall is arranged in 45° angle, and parallel with dichroscope.
First optic fibre switching part, third plano-convex lens, the 4th plano-convex lens and dichroscope are in same optical path, and
The output end of one output optical fibre, the center of the first optic fibre switching part, the center of third plano-convex lens, the 4th plano-convex lens center
On the same line with the center of dichroscope.The divergencing laser of first transmission fiber output becomes flat by third plano-convex lens
Then row light focuses on the surface of sample to be tested using the 4th plano-convex lens through dichroscope, generate plasma plume.
Second optic fibre switching part, the 5th plano-convex lens, the 6th plano-convex lens and reflecting mirror are in same optical path, third output
The input terminal center of optical fiber, the center of the second optic fibre switching part, the center of the 5th plano-convex lens, the center of the 6th plano-convex lens and
On the same line, the plasma plume luminous beam that double-pulse laser generates after practicing shooting is anti-by dichroscope at the center of reflecting mirror
It is transmitted to reflecting mirror after penetrating, then is reflected by a reflector to the 6th plano-convex lens, plasma plume luminous beam is saturating by the 6th plano-convex
Mirror becomes directional light, then is focused in third transmission fiber by the 5th plano-convex lens, and third transmission fiber is connect with spectrometer, light
The LIBS spectrum of the available plasma plume of spectrometer, can institute in qualitative and quantitative analysis sample to be tested according to characteristic spectral line
Content containing element species and each element.
The dichroscope that the application selects is that long wave leads to dichroscope, diameter 25.4mm, cutoff wavelength 900nm.It is
Because the reflectivity of dichroscope 42 can achieve 90% or more for the light of 400-872nm wavelength；It is 932- for wavelength
The light of 1300nm wavelength, light passing rate can also reach 90% or more.
The diameter for the third plano-convex lens that the application selects is 25.4mm, focal length 35.1mm；4th plano-convex lens it is straight
Diameter is 25.4mm, focal length 16mm.Since the laser beam converged down by the 4th plano-convex lens passes through dichroscope again, it is situated between
The refractive index of matter can change, and extend the light path transmitted when laser focuses, therefore the laser beam focusing hot spot of main probe
The distance between 4th plano-convex lens center is greater than Siping City's focal length of convex lens 16mm.
The diameter for the 5th plano-convex lens that the application selects is 25.4mm, focal length 35mm；The diameter of 6th plano-convex lens
For 25.4mm, focal length 40mm.5th plano-convex lens and the 6th plano-convex lens surface are coated with anti-reflection film, enhance the range of wavelength
Between 350-700nm.
Pair probe is same as receiving the laser of the second nanosecond laser, is slidably connected with guide rail, if secondary probe output laser
Angle between optical axis and main probe output laser beam axis is θ, and the range of θ is between 45 ° -90 °.It is being led by changing secondary probe
Position on rail, pulse mode can be divided into orthogonal type dipulse LIBS mode or chiasma type dipulse LIBS mode.Pair probe
Including third optic fibre switching part, the 7th plano-convex lens and the 8th plano-convex lens and second sleeve, the setting of third optic fibre switching part exists
The top of second sleeve, the 7th plano-convex lens and the 8th plano-convex lens are successively vertically arranged with second sleeve side wall.
Third optic fibre switching part, the 7th plano-convex lens and the 8th plano-convex lens in pair probe are in same optical path, and second
The output end center of output optical fibre, the center of third optic fibre switching part, the center of the 7th plano-concave lens and the 8th plano-concave lens
On the same line, the divergencing laser exported from the second transmission fiber becomes directional light by the 7th plano-convex lens, then at center
Sample to be tested surface, focal beam spot position and the laser beam focusing light by main probe are focused on using the 8th plano-convex lens
Spot is overlapped the same position on sample to be tested surface.
The diameter for the 7th plano-convex lens selected in the application is 25.4mm, focal length 35.1mm；8th plano-convex lens are straight
Diameter is 25.4mm, focal length 30mm.
The third plano-convex lens and the 7th plano-convex lens of the larger focal length of selection of the application, it is therefore an objective to make defeated from transmission fiber
The laser beam of outlet output becomes the hot spot for possessing larger area when directional light through plano-convex lens；And select focal length smaller
The 4th plano-convex lens and the 8th plano-convex lens, in order to enable parallel laser light beam by plano-convex lens convergence when focus
To the focal beam spot of more small area, reinforce the effect of laser target shooting.
Optoelectronic switch sensor is made of optoelectronic switch transmitting terminal and optoelectronic switch receiving end.In optoelectronic switch transmitting terminal
Light-Emitting Diode constantly emits optical signal to optoelectronic switch receiving end, and the phototriode handle in optoelectronic switch receiving end receives
Luminous signal switch to electric signal and be transmitted in computer.Optoelectronic switch transmitting terminal and optoelectronic switch receiving end are mounted on same height
On degree, the luminous optical axis of photodetector is parallel with loading lifting platform and sample to be tested surface, so that by the laser of main probe
Light beam focusing focus and the laser beam focusing focus popped one's head in by pair coincidence fall within luminous optical axis center.
Control detection module includes computer, programmable pulse delay generator, oscillograph, spectrometer and ICCD, is calculated
Machine is electrically connected with the signal control terminal of first laser energy meter, second laser energy meter and barn door respectively, may be programmed arteries and veins
It rushes delay generator to be electrically connected with spectrometer, ICCD, the first nanosecond laser and the second nanosecond laser respectively, oscillograph point
It is not electrically connected with ICCD, the first photodetector and the second photodetector.
Computer is the position for going out light energy, controlling barn door for monitoring two-laser, setting pair in the effect of the application
It is accumulative frequency that pulse is practiced shooting, the spectrogram that lifting, the display for controlling loading lifting platform obtain, the gate-width that ICCD is set, automatic
Control LIBS testing process, automatic comparison database obtain elemental characteristic spectral line and qualitative and quantitative analysis element species and contain
Amount.
Programmable pulse delay generator is the delay being arranged between main pulse and slave pulses pulse in the effect of the application
The delay of spectrum is collected with setting ICCD, the application proposes to be detected element species and content in sample to be tested with dipulse,
Here the time of the main pulse being arranged and slave pulses output laser is different, the purpose for the arrangement is that in order to enhance plasma
The signal of body emission spectrum, convenient for being collected into apparent characteristic spectral line for analysis；The delay of another aspect programmable pulse occurs
Device can also by setting ICCD external trigger signal and slave pulses export laser between delay come adjust spectrometer collect etc. from
The detection of daughter luminescent spectrum is delayed.
Oscillograph is in the delay that the effect of the application is each road signal of observation, wherein oscillography after main pulse Laser emission
Device can observe a signal, and oscillograph can observe a signal after slave pulses Laser emission, when ICCD starts to collect spectrum
Oscillograph can observe a signal, since the transmission delay of equipment inherent delay and electric signal is also to need the time, i.e.,
Us are made on the time of transmitting laser to be set with programmable pulse delay generator the time to main pulse and slave pulses, in order to
Observation main pulse and slave pulses whether we be arranged time difference on successively issue laser, it is necessary to seen by oscillograph
It surveys, is adjusted so as to subsequent；The observation that the reason of signal is observed when to ICCD work issues with main pulse and slave pulses laser
Reason is identical.On the other hand, we have ignored the aerial propagation delay of laser, but due to laser in the first transmission fiber and
Propagation time between second transmission fiber is the several times for propagating the time used in same distance in air, for entire microsecond amount
It can not ignore for the detection process of grade；We measure laser by oscillograph in advance and pass in the first transmission fiber and second herein
The propagation delay lost between fibre is recorded as t, and the delay that final actual ICCD collects spectrum is the ICCD shown on oscillograph
The delay of action signal and slave pulses output laser signal subtracts t.
Spectrometer is with the device of the optical detectors such as photomultiplier tube measurement spectral line different wave length position intensity, it can be incited somebody to action
Polychromatic light is separated into spectrum, be exactly in this application generated after dipulse can be focused to breakdown sample to be tested surface it is equal from
Daughter light-emitting line by wave band be divided, and combine the face ICCD battle array photosensitive intensity, by Computer display go out sample to be tested etc.
Gas ions self-luminous spectrum, we pass through the characteristic spectral line and its intensity for analyzing wherein coherent element, available sample to be tested
In contained element type and content.
ICCD (Intensified CCD) enhances charge-coupled device, is coupled to form by image intensifier and Visible-light CCD,
Be used to control in this application slave pulses laser get on sample to be tested how long after, we start to collect the light generated again
Spectrum.Only it just will do it door opening action after ICCD receives outer touch-control signal, at this time the light after spectrometer is split
Can just it start by the photosurface battle array perception in ICCD.Corresponding door can be arranged in ICCD according to detection demand on computers
Width, gate-width are that ICCD opened the door to the period between shutdown, i.e. plasma after ICCD perception is divided by spectrometer is spontaneous
The period of light.
The accumulative frequency that dipulse is practiced shooting is set in the software of computer；Spectrometer will carry out environment back before practicing shooting every time
The sampling of scape spectrum；After dipulse optical-fiber laser is practiced shooting, collected multiple spectrum is added up and is transmitted to calculating by spectrometer
In machine；Software on computer analyzes collected spectroscopic data and the LIBS component spectrum information in NIST database
It compares, obtains element species contained in sample to be tested and corresponding spectral line information, and can be with further progress standard sample
Dipulse optical-fiber laser Targeting, pass through the constituent content in LIBS element calibration curve quantitative detection sample to be tested；Often
After secondary detection, loading lifting platform is controlled by computer and drops to bottommost again.
Main probe is connect with the main pulse laser output of the optical fiber transmission module by the first transmission fiber, pair probe
It is connect with the slave pulses laser output of the optical fiber transmission module by the second transmission fiber, main probe and the spectrometer are logical
Cross the connection of third transmission fiber.For optic fibre input end, the big optical fiber of numerical aperture is conducive to laser focusing and is coupled into；And
In output end, the optical fiber of small value aperture focuses target practice after being conducive to the beam propagation exported again, this is because light beam is more
The diversity and off-axis property transmitted in mode fiber makes the laser beam of output be difficult to focus target practice, and the optical fiber of low numerical aperture provides
Lower luminous exitance and uniform spot size.
Optionally, the optical fiber that the application selects is the multimode fibre of silica covering.First transmission fiber and second passes
Losing fine length is 3m, and optical fiber core diameter is 800 μm, numerical aperture 0.37, maximum power density 1GW/cm2；Third
The length of transmission fiber is 3m, and optical fiber core diameter is 400 μm, numerical aperture 0.22.For different usage scenarios according to reality
Need the first transmission light of replaceable different clad materials, different model, different length, different-diameter and different numerical apertures
Fine, the second transmission fiber and third transmission fiber.
Illustratively, as shown in figure 3, being the flow chart of four kinds of detection modes of dipulse optical fiber LIBS detection Systematic selection,
The frequency that the first nanosecond laser is arranged is 1Hz, and output laser energy is 40mJ；The frequency of second nanosecond laser is 1Hz, defeated
Laser energy is 35mJ out；The laser pulse interval of two-laser output is set as 9 μ s, then passes through control computer choosing
It selects and barn door is placed in the position a or the position b, that is, select conllinear type dipulse LIBS mode or non-colinear type dipulse LIBS mould
Formula；If barn door is placed in the position a by selection, then position of the adjustable secondary probe on guide rail, is fixed in screw and is led
Remaining position at the position rail lowermost end n or on guide rail, i.e. selection orthogonal type dipulse LIBS mode or chiasma type dipulse LIBS
Mode；If selecting orthogonal type dipulse LIBS mode, by the way that the parameter of programmable pulse delay generator is arranged, two laser are changed
The laser pulse moment sequencing of device output；It is then reheating orthogonal type if main pulse laser is exported prior to slave pulses laser
Dipulse LIBS mode；It is then pre-ablation orthogonal type dipulse LIBS mode if slave pulses laser is exported prior to main pulse laser.
1. conllinear type dipulse LIBS mode
Linear structure refers to main pulse laser and slave pulses laser after the same optical focusing system altogether, by laser energy
Amount focuses on same point and by certain successive vertical incidence breakdown sample surfaces of delay.Barn door is located at the position b, stops
6th spectroscopical optical path, therefore without laser beam focusing into the second transmission fiber, secondary probe does not play a role at this time.From
The main pulse laser of first nanosecond laser output, successively by the first spectroscope, the second spectroscope and third spectroscope, then by
It is focused in the first transmission fiber after first mirror reflection by the first plano-convex lens, focuses on sample to be tested by main probe
Surface；The slave pulses laser exported from the second nanosecond laser, successively by the 4th spectroscope and the 5th spectroscope, then by the
Six spectroscopes are reflected into the second spectroscope, are continued to transmit along the optical path of main pulse laser by the light beam that the second spectroscope reflects,
It is finally focused in the first transmission fiber by the first plano-convex lens, focuses on sample to be tested surface same position by main probe.
The output laser energy of the first nanosecond laser, the second nanosecond laser can be adjusted according to demand, adjust main pulse laser and pair
Timing and time interval between pulse laser, to obtain the plasma emissioning light of conllinear type dipulse enhancing in various degree
Spectrum signal.
2. chiasma type dipulse LIBS mode
Interference type arrangement is main pulse laser and slave pulses laser after two different optical focusing systems, and two beams swash
The angled focusing of light punctures sample surfaces.Barn door 3 is located at the position a, blocks the optical path reflected by the 6th spectroscope, secondary
Probe is fixed on guide rail at remaining position of the non-position n, i.e. 45 ° of θ≤90 ° <.At this point, exported from the second nanosecond laser
Laser successively passes through the 4th spectroscope, the 5th spectroscope, the 6th spectroscope, then passes through the second plano-convex by the second mirror reflection
Lens focus finally focuses on sample to be tested surface by secondary probe into the second transmission fiber；Main pulse laser is still along first
The output light path of nanosecond laser focuses on 13 surface same position of sample to be tested via main probe.Two can be adjusted according to demand to receive
Output laser energy, timing and the delay of second laser, adjust the value at the angle θ, increase to obtain different degrees of chiasma type dipulse
Strong plasma emission spectroscopy signal.
3. reheating orthogonal type dipulse LIBS mode
Orthogonal type structure refers to that main pulse laser and slave pulses laser are mutually orthogonal, a branch of to be parallel to sample surfaces, a branch of
Perpendicular to sample surfaces, respectively successively reaches after two different optical focusing systems respectively and puncture sample surfaces.Again
Heating refers to that the laser perpendicular to sample surfaces first reaches simultaneously ablation sample excitation plasma, and what is reached afterwards is parallel to sample table
The laser in face heats the plasma of generation.Barn door is located at the position a, blocks the light reflected by the 6th spectroscope
Road, pair probe 34 are fixed on guide rail at the position n, i.e. θ=90 °, and the first nanosecond laser output laser timing is received prior to second
Second laser exports laser.At this point, main pulse laser is poly- via main probe vertical along the output light path of the first nanosecond laser
Coke is in sample to be tested surface；Slave pulses laser is parallel to sample to be tested via pair probe along the output light path of the second nanosecond laser
Surface focuses on same position.Output laser energy and the delay of two nanosecond lasers can be adjusted according to demand, to obtain not
The plasma emission spectroscopy signal of orthogonal type dipulse enhancing is reheated with degree.
4. pre-ablation orthogonal type dipulse LIBS mode
Pre-ablation refer to the laser for being parallel to sample surfaces first reach and puncture near sample surface air generate etc. from
Daughter, the laser perpendicular to sample surfaces then reached focus ablation sample surfaces.Barn door 3 is located at the position a, block by
The optical path of 6th spectroscope reflection, pair probe are fixed on guide rail at the position n, i.e. θ=90 °, and the output of the second nanosecond laser swashs
Light sequential exports laser prior to the first nanosecond laser.Main pulse laser is orthogonal with reheating with the transmission optical path of slave pulses laser
Type dipulse LIBS mode is identical.Output laser energy and the delay that two nanosecond lasers can be adjusted according to demand, to obtain
The plasma emission spectroscopy signal of different degrees of pre-ablation orthogonal type dipulse enhancing.
Illustratively, the second aspect for being illustrated in figure 5 the application provides a kind of optical fiber of optional double pulse modes
LIBS detection method flow diagram, the method are applied to above system, which comprises
Dodge gate in S1, opening optical fiber LIBS probe, is placed in the loading liter in optical fiber LIBS probe for sample to be tested
On drop platform and it is closed the dodge gate；
S2, the rising loading lifting platform drive the sample to be tested slowly to rise, until the upper table of the sample to be tested
Face shelters from the light beam that the optoelectronic switch transmitting terminal in optical fiber LIBS probe issues, and just stops rising；
S3, the instruction light for opening the first nanosecond laser and the second nanosecond laser in integrated optical fiber device, described in adjustment
Sample to be tested falls within the area to be tested on the sample to be tested and swashs first nanosecond in the position of the loading lifting platform
The centre position of light device and the instruction light focal beam spot of second nanosecond laser；
S4, the first nanosecond laser shoot laser parameter, the delay of ICCD gate-width signal and the loading liter are adjusted
The position of platform drops；
The ordinate of S5, the signal-to-background ratio of observational characteristic beta radiation spectrum and spectrogram, if signal-to-background ratio is high and spectrogram is indulged and sat
Mark numerical value maximum the step of then carrying out S6, if the step of signal-to-background ratio low returns S4, until observing that signal-to-background ratio is high and spectrogram is indulged
The step of maximum characteristic curve radiation spectrum of coordinate values executes S6 again；
Simultaneously dipulse target practice accumulative frequency is arranged in four kinds of S6, switching dipulse optical fiber LIBS modes；
S7, bias light is sampled using the spectrometer in control detection module, obtains the cumulative spectral information of the sample to be tested；
Spectroscopic data in S8, comparison database obtains the corresponding characteristic spectral line of element species in the sample to be tested；
The dipulse optical fiber LIBS experiment of S9, further progress standard sample, are quantitatively examined by LIBS element calibration curve
Survey the constituent content in sample to be tested；
S10, loading lifting platform is dropped into bottommost.
Article carrying platform is fine-tuning electronic upgrading platform, and control precision can reach 10 μm；The material of dodge gate is
Bright plastic optical fibre.Before each laser target shooting, loading lifting platform drops to bottommost；Dodge gate is opened, sample to be tested is placed in load
On object lifting platform, it is closed dodge gate；Article carrying platform is controlled by computer to rise, and sample to be tested is driven slowly to rise；Until to
When sample upper surface shelters from the light beam of optoelectronic switch transmitting terminal sending, the electric signal that optoelectronic switch collecting terminal transmits outward is sent out
It is raw to change, the loading lifting platform stopping movement of computer control at this time；Open the first nanosecond laser and the second nanosecond laser
Indicate light, position of the mobile sample to be tested on loading lifting platform makes the area to be tested on sample to be tested fall within two-laser
Indicate the centre position of light focal beam spot；The parameter of programmable pulse delay generator is set, the first nanosecond laser is changed
Optical signals and ICCD gate-width signal delay, while the lifting of loading lifting platform is further finely tuned by computer so that
The spectrogram observed on the software of computer is the preferable linearized radiation spectrogram of effect and collected the intensity of spectral line is maximum.
Illustratively, conllinear type dipulse optical fiber LIBS enhanced spectrum and pulse optical fiber LIBS spectrum are illustrated in figure 4
Plasma radiation spectral line comparison diagram, wherein conllinear type dipulse optical-fiber laser LIBS spectrum be shown in solid, pulse optical fiber
Laser LIBS spectrum is shown in dotted line.In conllinear type dipulse optical fiber LIBS mode, main pulse and slave pulses laser energy are equal
For 12mJ, two pulse intervals are 9 μm；In pulse optical fiber LIBS mode, pulsed laser energy 24mJ.It can be seen that
Using conllinear type dipulse optical fiber LIBS mode compared with the detection system for directly using pulse optical fiber LIBS mode, in sample
LIBS spectral signal (including characteristic spectral line and background spectral line) integrally enhance, the enhancing amplitudes of different elemental characteristic lines is from 1.2
It is differed again to 3 times, to improve detectivity and detection limits.
The third aspect of the application further includes a kind of computer program product, when this computer program product is being run
When, so that computer executes such as second aspect or the described in any item methods of second aspect.Specific includes so that computer is held
The dodge gate in optical fiber LIBS probe is turned on or off in row such as S1, execution controls the up and down of loading lifting platform and temporary
The instruction stopped；Execute the instruction of the first nanosecond laser of monitoring and the second nanosecond laser output laser energy；Dipulse is set
Target practice number, setting LIBS spectrographic detection mode, the instruction that ICCD gate-width signal is set；Execute four kinds of pulse fiber LIBS of switching
The instruction of mode；Execute the instruction for turning on or off ICCD, spectrometer and computer software.Aforesaid operations pass through calculating
Machine program product controls, and has saved manpower well, and to each link and step accurately control, accomplishes method and apparatus
The optical fiber LIBS detection of optional double pulse modes is completed in cooperation well.
The fourth aspect of the application further includes a kind of computer storage medium, and the computer storage medium includes a kind of meter
Calculation machine instruction, when instruction instruction storage medium is run on computers, so that computer executes such as second aspect or second party
The described in any item methods in face.The effect of storage medium is exactly some data and instructions for being used to store in loading computer, and
Data are subjected to classified finishing, when computer is needed using a certain item or certain some data, so that it may directly from depositing
It is transferred in storage media, it is convenient, fast.Specifically storage medium is used to be stored in complete optional double arteries and veins each time in this application
All dipulse target practice numbers, the characteristic radiation spectrogram obtained each time and standard during punch die formula optical fiber LIBS detection
The spectrogram of sample each element.Described instruction include turn on or off optical fiber LIBS probe in dodge gate, execute control carry
The instruction of the up and down of object lifting platform and pause；It executes the first nanosecond laser of monitoring and the second nanosecond laser exports laser
The instruction of energy；Dipulse target practice number, setting LIBS spectrographic detection mode, the instruction that ICCD gate-width signal is arranged are set；It holds
The instruction of row four kinds of pulse fiber LIBS modes of switching；Execution turns on or off ICCD, spectrometer and computer software
Instruction.
The 5th aspect of the application further includes a kind of device, and described device includes processor, and the processor is used for and institute
Storage medium coupling is stated, and reads the instruction in the storage medium, such as second aspect or second party are executed according to described instruction
The described in any item methods in face.The processor is read including turning on or off the dodge gate in optical fiber LIBS probe, executing
Control the instruction of the up and down of loading lifting platform and pause；It executes the first nanosecond laser of monitoring and the second nanosecond laser is defeated
The instruction of laser energy out；Dipulse target practice number, setting LIBS spectrographic detection mode, the finger that ICCD gate-width signal is arranged are set
It enables；Execute the instruction of four kinds of pulse fiber LIBS modes of switching；It is soft that execution turns on or off ICCD, spectrometer and computer
The instruction of part.
This application provides a kind of optical fiber LIBS detection system of optional double pulse modes, the system comprises: Integrated Light
Fine device, optical fiber LIBS probe, control detection module and optical fiber transmission module, the application pass through above method root with the system
The delay between main pulse, slave pulses pulse is set and ICCD is set by programmable pulse delay generator according to actual demand and is received
Collect the delay of spectrum, whether the delay for observing each road signal by oscillograph is accurate, and after waiting ICCD to start to work, spectrometer is collected
Spectrum simultaneously carries out light-splitting processing to it；The accumulative frequency that dipulse is practiced shooting is set in the software of computer；Light before practicing shooting every time
Spectrometer will carry out the sampling of environmental background spectrum；After dipulse optical-fiber laser is practiced shooting, spectrometer is by collected multiple light
Spectrum is cumulative to be transmitted in computer；Software on computer is by the LIBS element in collected spectroscopic data and NIST database
Spectral information is analysed and compared, and obtains element species contained in sample to be tested and corresponding spectral line information, and can be into
One step carries out the dipulse optical-fiber laser Targeting of standard sample, passes through LIBS element calibration curve quantitative detection sample to be tested
In constituent content and can pass through and change the position of barn door, adjust position of the secondary probe on guide rail and change main pulse laser
Test sample is treated with the output laser timing of slave pulses laser to switch four kinds of dipulse optical fiber LIBS detection modes from multi-faceted
Product are detected, and the characteristic spectral line that may be significantly carries out accurately to the content of element species and element to sample to be tested
Analysis.Influence of the matrix effect to detection can be reduced, repeatability is high, and spectral signal-noise ratio is high, and analysis speed is fast, measurement process
Securely and reliably, Element detection limit for height is able to carry out remote online monitoring.It solves traditional fiber LIBS to be easy by sample substrate
The influence of effect, have laser pulse stability is poor, poor repeatability, ablation process are not reproducible, detector generation noise jamming,
Detect limit for height, nonmetalloid characteristic spectral line unobvious the disadvantages of being difficult to quantitative analysis and problem.
It should be noted that the relational terms of such as " first " and " second " or the like be used merely to an entity or
Operation is distinguished with another entity or operation, and without necessarily requiring or implying between these entities or operation, there are any
This actual relationship or sequence.Moreover, the terms "include", "comprise" or its any other variant be intended to it is non-exclusive
Property include so that including the article of a series of elements or equipment not only includes those elements, but also including not having
The other element being expressly recited, or further include for elements inherent to such a process, method, article, or device.Do not having
There is the element limited in the case where more limiting by sentence "including a ...", it is not excluded that in the mistake including the element
There is also other identical elements in journey, method, article or equipment.
The above is only the specific embodiment of the application, is made skilled artisans appreciate that or realizing this Shen
Please.Various modifications to these embodiments will be apparent to one skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the application.Therefore, the application
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
It should be understood that the application is not limited to the content for being described above and being shown in the accompanying drawings, and can
To carry out various modifications and change without departing from the scope.Scope of the present application is only limited by the accompanying claims.
Claims (10)
1. a kind of optical fiber LIBS detection system of optional double pulse modes, which is characterized in that the system comprises: integrated optical fiber
Device, optical fiber LIBS probe, control detection module and optical fiber transmission module,
Programmable pulse delay generator (33) in the control detection module respectively with first in the integrated optical fiber device
The control terminal of nanosecond laser (11) and the control terminal of the second nanosecond laser (19) are electrically connected；
Computer (31) in the control detection module respectively with the first laser energy meter (15) in the integrated optical fiber device
Monitoring client, second laser energy meter (111) monitoring client and barn door (117) signal control terminal be electrically connected；
Oscillograph (32) in the control detection module respectively with the first photodetector (12) in the integrated optical fiber device
Monitoring client and the second photodetector (110) monitoring client be electrically connected；
Main probe (22) in optical fiber LIBS probe respectively with the main pulse laser output of the integrated optical fiber device, described
The spectrometer (34) controlled in detection module transmits light by the first transmission fiber (41), the third in the optical fiber transmission module
Fine (43) connect, and the slave pulses laser output of secondary probe (24) and the integrated optical fiber device in the optical fiber LIBS probe leads to
Cross the second transmission fiber (42) connection in the optical fiber transmission module.
2. system according to claim 1, which is characterized in that in the main pulse laser output of the integrated optical fiber device
The heart and the first optic fibre switching part (221), third plano-convex lens (224), the 4th plano-convex lens in optical fiber LIBS probe
(225), the center of dichroscope (226) is on the same line.
3. system according to claim 1, which is characterized in that in the slave pulses laser output of the integrated optical fiber device
The heart and third optic fibre switching part (241), the 7th plano-convex lens (242), the 8th plano-convex lens in optical fiber LIBS probe
(243) center is on the same line.
4. system according to claim 1, which is characterized in that the output end center of the third transmission fiber (43) and institute
State the second optic fibre switching part (222) in optical fiber LIBS probe, the 5th plano-convex lens (226), the 6th plano-convex lens (227), anti-
Penetrate the center of mirror (229) on the same line, the 5th plano-convex lens (226) and the 6th plano-convex lens (227) surface
It is coated with anti-reflection film.
5. system according to claim 1, which is characterized in that the optoelectronic switch transmitting terminal in the optical fiber LIBS probe
(26) and the sustained height in bracket (21) is arranged in the position of optoelectronic switch receiving end (28).
6. system according to claim 5, which is characterized in that the main probe (22) is fixedly connected with guide rail (23), institute
Secondary probe (24) is stated to be slidably connected with guide rail (23).
7. system according to claim 6, which is characterized in that the main probe (22) and secondary probe (24) output
Any value of the angular range between 45 ° -90 ° between laser beam axis.
8. system according to claim 1, which is characterized in that the available detection pattern of system includes that conllinear type is double
Pulse LIBS mode, chiasma type dipulse LIBS mode reheat orthogonal type dipulse LIBS mode and pre-ablation orthogonal type pair
Four kinds of modes of pulse LIBS mode.
9. a kind of optical fiber LIBS detection method of optional double pulse modes, the method is applied to any one of claim 1-8 institute
The system stated, which is characterized in that the described method includes:
Dodge gate (27) in S1, opening optical fiber LIBS probe, is placed in the loading liter in optical fiber LIBS probe for sample to be tested
In drop platform (25) and it is closed the dodge gate (27)；
S2, the rising loading lifting platform (25) drive the sample to be tested slowly to rise, until the upper table of the sample to be tested
Face shelters from the light beam that the optoelectronic switch transmitting terminal (26) in optical fiber LIBS probe issues, and just stops rising；
The instruction light of S3, the first nanosecond laser (11) in opening integrated optical fiber device and the second nanosecond laser (19), adjustment
The sample to be tested makes the area to be tested on the sample to be tested fall within described in the position of the loading lifting platform (25)
The centre position of the instruction light focal beam spot of one nanosecond laser (11) and second nanosecond laser (19)；
S4, the first nanosecond laser (11) shoot laser parameter, the delay of ICCD (35) gate-width signal and the load are adjusted
The position of object lifting platform (25)；
The ordinate of S5, the signal-to-background ratio of observational characteristic beta radiation spectrum and spectrogram, if signal-to-background ratio height and spectrogram ordinate number
Value maximum the step of then carrying out S6, if the step of signal-to-background ratio low returns S4, until observing signal-to-background ratio height and spectrogram ordinate
The step of maximum characteristic curve radiation spectrum of numerical value executes S6 again；
Simultaneously dipulse target practice accumulative frequency is arranged in four kinds of S6, switching dipulse optical fiber LIBS modes；
S7, bias light is sampled using the spectrometer (34) in control detection module, obtains the cumulative spectral information of the sample to be tested；
Spectroscopic data in S8, comparison database obtains the corresponding characteristic spectral line of element species in the sample to be tested；
The dipulse optical fiber LIBS experiment of S9, further progress standard sample, are waited for by LIBS element calibration curve quantitative detection
Constituent content in sample；
S10, loading lifting platform (25) is dropped into bottommost.
10. according to the method described in claim 9, it is characterized in that, the control precision of the loading lifting platform (25) is 10 μm.
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| CN201811502564.XA CN109444111B (en) | 2018-12-10 | 2018-12-10 | Optical fiber LIBS detection system and method capable of selecting double-pulse mode |
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| CN201811502564.XA CN109444111B (en) | 2018-12-10 | 2018-12-10 | Optical fiber LIBS detection system and method capable of selecting double-pulse mode |
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