CN112730383A - Optical fiber array LIBS detection system for online detection - Google Patents
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Abstract
The invention discloses an optical fiber array LIBS detection system for online detection, which comprises a laser optical fiber coupling module, a laser control module and a spectrum acquisition module; the laser fiber coupling module comprises a nanosecond laser, a dichroic mirror, a first plano-convex lens and a transmission fiber; the laser control module comprises a spectroscope I, a spectroscope II, a photodiode, a laser energy meter and a programmable pulse delay generator; the spectrum acquisition module comprises a plano-convex lens II, a collection optical fiber, a spectrometer and an ICCD; the laser beam emitted from the nanosecond laser finally enters the fiber array LIBS probe through the transmission fiber. The optical fiber array module is arranged right above the equipment to be detected, and 16 optical fiber sleeves on the optical fiber array module can realize the two-dimensional array synchronous detection of the surface of the whole equipment. The invention can realize the on-site real-time on-line detection of the running state of the special equipment.
Description
Technical Field
The invention belongs to the technical field of laser diagnosis, and relates to an optical fiber array LIBS detection system for online detection.
Background
The state monitoring, maintenance and evaluation technology of the nuclear power, chemical and metallurgical industry key equipment is an important support for evaluating safety and economy, and related regulations require nondestructive testing on nuclear power equipment key components before and after service in order to ensure that the key equipment has no harmful defects and damages after manufacture and in operation. Because the above-mentioned key special equipment often has the severe operational environment such as high radioactivity, high temperature, high pressure, conventional detection means, such as X-ray photography technique, ultrasonic technique, eddy current technique, are difficult to realize long-range on-line measurement. Recently developed remote on-line detection techniques such as acoustic emission techniques and electrochemical techniques also have their limitations: for example, acoustic emission techniques can only detect the pressure wave signals emitted by a material undergoing destruction, and cannot evaluate and predict its life; electrochemical techniques require small amplitude electrical signal perturbations to be added to the nuclear power system, which can adversely affect the system.
The Laser Induced Breakdown Spectroscopy (hereinafter referred to as LIBS) is a measurement technique for quantitatively measuring the elemental components, mechanical parameters and the like of a sample by using the emission spectrum of plasma generated on the surface of a material to be measured by Laser induction. Compared with other detection means, the LIBS technology has obvious advantages: the remote online in-situ detection has the advantages of micro-damage and even no damage to the sample, no need of sample pretreatment, realization of simultaneous analysis of various elements, and the like.
The optical fiber transmission laser induced breakdown spectroscopy technology (hereinafter referred to as the optical fiber LIBS technology) is an improvement and innovation of the prior traditional induced breakdown spectroscopy technology and is more suitable for the detection task of extreme occasions: and focusing the surface of the sample by using the optical fiber transmission laser to form plasma, collecting the emission spectrum of the plasma, and analyzing by adopting a spectrum post-processing algorithm to determine the material components and the content of the sample to be detected. The technology has great potential application value in places such as nuclear power plants, nuclear power plant overhaul and maintenance enterprises, nuclear fuel manufacturing plants, spent fuel treatment plants and the like, and places which are difficult to reach by manpower, such as equipment pipelines or steam superheated elbows in high-temperature, high-pressure and high-radiation production lines, can be detected by the optical fiber LIBS technology.
However, the currently developed optical fiber LIBS apparatus also has the following disadvantages. On one hand, the conventional portable optical fiber LIBS detection system cannot adapt to special working environments such as the main pipeline of a nuclear power station and cannot go deep into a specified area in special equipment to perform remote control detection (for example, huazhong university of science and technology, dawn goose, etc., portable laser probe component analyzer based on an optical fiber laser, [ P ], china, 2013107403189.20151104); on the other hand, the energy density of the target material bombarded by the laser transmitted by the optical fiber LIBS technology is generally lower than that of the traditional LIBS, so that the element sensitivity and the element detection limit are poor, and the detection capability of some key elements is insufficient or even fails. In order to solve the problem, a corresponding special gas medium environment needs to be manufactured according to the detection requirement of a specific element, the signal-to-back ratio of a spectral signal is improved, and the detection sensitivity of a key element is improved. In addition, in the aspect of detecting instruments and equipment, a LIBS system capable of realizing reliable operation of remote control in severe working environments such as complex radiation fields, high temperature and high humidity is still to be further developed.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides an optical fiber array LIBS detection system for online detection.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
a fiber array LIBS detection system for online detection, comprising:
the laser fiber coupling module is used for outputting laser and emitting the laser to the equipment to be tested through the fiber array LIBS probe; the laser control module is arranged;
the laser control module is arranged on an output light path of the laser fiber coupling module and used for monitoring the actual energy of the output laser and adjusting the time delay of an outgoing light signal and a gate width signal;
and the spectrum acquisition module comprises a spectrometer and an ICCD (integrated circuit compact disc), wherein the spectrometer is used for collecting a plasma spectrum generated on the surface of the equipment to be tested and transmitting the spectrum information to the computer for analysis and comparison.
The invention further improves the following steps:
the laser fiber coupling module comprises a nanosecond laser, laser output by the nanosecond laser enters the first plano-convex lens through reflection of the dichroic mirror, is focused by the first plano-convex lens and then is transmitted to the fiber array LIBS probe through the transmission fiber.
The optical fiber input end surface of the transmission optical fiber is positioned 3mm behind the focus of the first plano-convex lens; the nanosecond laser 1 is Nd: YAG nanosecond laser, output laser wavelength is 1064nm, frequency is 1-10Hz, pulse width FWHM is 10ns, maximum pulse energy is 150mJ, and laser beam diameter is 6 mm.
The fiber array LIBS probe comprises a fiber beam splitter and a fiber array module, wherein a plurality of fiber sleeves are arranged on the fiber array module; each optical fiber sleeve is internally provided with a focusing lens, and the focusing lens is arranged on the optical fiber sleeve through 2 clamping rings; the transmission optical fiber is split into a plurality of optical fibers by an optical fiber splitter, and each optical fiber enters an optical fiber sleeve.
The optical fiber array module is arranged above the equipment to be tested, and the diameter of the optical fiber array module is 5 m; the optical fiber array module is connected with the lifting platform and is controlled to lift through the lifting platform.
The optical fiber sleeve is provided with 16 optical fibers; the transmission optical fiber is split into 16 optical fibers by an optical fiber beam splitter; the focusing lens 18 has a diameter of 25.4mm and a focal length of 35 mm.
The laser control module comprises a first beam splitter and a second beam splitter which are arranged on a light path between the nanosecond laser and the dichroic mirror; one part of the output laser projects to the first spectroscope and the second spectroscope, the other part of the output laser is reflected to the photodiode by the first spectroscope, one part of the output laser projected to the second spectroscope projects to the dichroic mirror, and the other part of the output laser is reflected to the laser energy meter by the second spectroscope.
The nanosecond laser, the first spectroscope, the second spectroscope and the dichroic mirror are all located on the same optical path, and the laser optical axis center of the nanosecond laser, the center of the first spectroscope, the center of the second spectroscope and the center of the dichroic mirror are all located on the same straight line; the first spectroscope, the second spectroscope and the dichroic mirror form an included angle with an output laser optical axis of the nanosecond laser.
The spectrum acquisition module further comprises a second plano-convex lens, plasma generated on the surface of the device to be measured reversely passes back along an original light path and is converted into parallel light after passing through the fiber array LIBS probe, the transmission optical fiber and the first plano-convex lens, the parallel light is focused into the collection optical fiber through the dichroic mirror and the second plano-convex lens, and the other end of the collection optical fiber is connected with the spectrometer.
The transmission fiber is a silica-clad multimode fiber with a length of 3m, a fiber core diameter of 800 μm, a numerical aperture of 0.37, and a maximum power density of 1GW/cm2(ii) a Two ends of the optical fiber are connected by an SMA905 stainless steel optical fiber connector; the dichroic mirror is a short-wave-pass dichroic mirror, the diameter of the dichroic mirror is 50.8mm, and the cutoff wavelength of the dichroic mirror is 805 nm; the length of the collection fiber was 1m, the core diameter of the fiber was 400 μm, and the numerical aperture was 0.22.
Compared with the prior art, the invention has the following beneficial effects:
the invention realizes the LIBS detection of the optical fiber array on the online surface to be detected, and has the advantages compared with the traditional detection method that: the online to be detected is not damaged, the detection speed is high, and the detection precision is high; the LIBS spectral information of the two-dimensional array on the whole online surface can be obtained simultaneously, and the content of the chromium element on the online surface is determined quantitatively, so that the pipeline corrosion rule is predicted, and the service life is further evaluated.
Drawings
In order to more clearly explain the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a general block diagram of a fiber array LIBS detection system for on-line detection;
fig. 2 is a schematic diagram of the fiber array LIBS probe detecting the device.
In the figure: the device comprises a 1-nanosecond laser, a 2-first spectroscope, a 3-second spectroscope, a 4-second plano-convex lens, a 5-dichroic mirror, a 6-laser energy meter, a 7-first plano-convex lens, an 8-transmission optical fiber, a 9-optical fiber array LIBS probe, a 10-device to be tested, a 11-collection optical fiber, a 12-photodiode, a 13-programmable pulse delay generator, a 14-spectrometer, a 15-ICCD, a 16-optical fiber beam splitter, a 17-optical fiber array module, an 18-focusing lens, a 19-snap ring, a 20-optical fiber connector, a 21-optical fiber sleeve and a 22-lifting platform.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present invention, it should be noted that if the terms "upper", "lower", "horizontal", "inner", etc. are used for indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings or the orientation or positional relationship which is usually arranged when the product of the present invention is used, the description is merely for convenience and simplicity, and the indication or suggestion that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, cannot be understood as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
Furthermore, the term "horizontal", if present, does not mean that the component is required to be absolutely horizontal, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the embodiments of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The invention is described in further detail below with reference to the accompanying drawings:
referring to fig. 1, an embodiment of the present invention discloses an optical fiber array LIBS detection system for online detection, which includes a laser fiber coupling module, a laser control module, and a spectrum collection module. The laser fiber coupling module comprises a nanosecond laser 1, a dichroic mirror 5, a first plano-convex lens 7 and a transmission fiber 8; the laser control module comprises a first spectroscope 2, a second spectroscope 3, a photodiode 12, a laser energy meter 6 and a programmable pulse delay generator 13; the spectrum acquisition module comprises a second plano-convex lens 4, a collection optical fiber 11, a spectrometer 14 and an ICCD 15; the laser beam emitted from the nanosecond laser 1 finally enters the fiber array LIBS probe 9 through the transmission fiber 8.
The nanosecond laser 1, the first spectroscope 2, the second spectroscope 3 and the dichroic mirror 5 are all located on the same optical path, and the laser optical axis center of the nanosecond laser 1, the center of the first spectroscope 2, the center of the second spectroscope 3 and the center of the dichroic mirror 5 are all located on the same straight line; the first spectroscope 2, the second spectroscope 3 and the dichroic mirror 5 form 45-degree included angles with the optical axis of the output laser of the nanosecond laser 1.
One path of laser output by the nanosecond laser 1 penetrates through the first beam splitter 2, and the other path of laser is split by the first beam splitter into the photoelectric detector 12, wherein the photoelectric detector 12 is externally connected to the oscilloscope and used for monitoring an output signal of the main pulse laser; the laser penetrating through the first beam splitter 2 continuously penetrates through the second beam splitter 3, one laser penetrates into the laser energy meter 6 in a splitting mode, the laser energy meter 6 is externally connected to a computer, the ratio of the laser energy entering the laser energy meter 6 to the laser energy output by the nanosecond laser 1 is measured in advance through experiments, and a corresponding splitting coefficient is set in the computer, so that the actual energy of the laser output by the nanosecond laser 1 can be monitored.
Dichroic mirror 5 is a short wave pass dichroic mirror with a diameter of 50.8mm and a cut-off wavelength of 805 nm. For light with the wavelength of 830-1300nm, the reflectivity of the dichroic mirror 5 can reach more than 96 percent; the light with the wavelength of 400-792nm can reach the light transmission rate of more than 90 percent.
The parallel laser beam reflected by the dichroic mirror 5 is focused by the first plano-convex lens 7 into the transmission fiber 8 for transmission, and the fiber input end face of the transmission fiber 8 is placed about 3mm behind the focal point of the first plano-convex lens 7, so as to avoid the strong focusing energy from damaging the boundary of the cladding of the core of the multimode fiber during fiber coupling.
Fig. 2 is a schematic diagram of online detection by a fiber array LIBS probe. The fiber array LIBS probe 9 consists of a fiber beam splitter 16 and a fiber array module 17; 16 optical fiber sleeves 21 are fixedly arranged on the optical fiber array module 17; each optical fiber sleeve 21 is internally provided with a focusing lens 18, and the focusing lens 18 is arranged at a fixed position on the optical fiber sleeve 21 by 2 clamping rings 19; the transmission optical fiber 8 is split into 16 optical fibers by an optical fiber splitter 16, and each optical fiber enters an optical fiber sleeve 21; the lifting platform 22 is connected to the fiber array module 17 and can control the lifting thereof.
The fiber array module 17 is arranged right above the equipment to be tested 10, the diameter of the fiber array module is 5m, and the diameter of the fiber array module is equivalent to the diameter of an on-line cable; the distance between the focusing lens 18 and the surface of the device to be measured 10 is adjusted through the lifting platform 22 to obtain the optimal laser focusing effect; the 16 optical fiber sleeves 21 on the optical fiber array module 17 can realize the two-dimensional array synchronous detection of the whole surface of the device under test 10.
Preferably, the transmission fiber 8 used in the present invention is a silica-clad multimode fiber. The length of the transmission fiber 8 is 3m, the core diameter of the fiber is 800 μm, the numerical aperture is 0.37, and the maximum power density is 1GW/cm2(ii) a The two ends of the optical fiber are connected by using an SMA905 stainless steel optical fiber connector, the large numerical aperture is favorable for coupling light rays at the input end of the optical fiber, and the output laser is difficult to focus and target at the output end due to the divergence and off-axis property of the multimode optical fiber; the low numerical aperture provides a lower beam divergence and a uniform spot size, which can help to focus the beam after it has propagated. The multimode optical fiber with different models, lengths, diameters and numerical apertures can be replaced according to actual needs.
After laser energy output from the transmission optical fiber 8 passes through the optical fiber beam splitter 16, the laser energy is equally divided into 16 parts, and the 16 parts of laser energy enter 16 optical fibers respectively; 16 parts of laser energy output from the 16 optical fibers simultaneously passes through the 16 optical fiber sleeves 21; 16 focusing lenses 18 respectively fixed in 16 optical fiber sleeves 21 focus the 16 laser energy to punch the surface of the device to be tested 10 at the same time so as to form plasma.
The optical fiber output end faces of the 16 optical fibers are placed outside one-time focal length of the focusing lens 18 in the optical fiber sleeve 21, laser passing through the lens can form an inverted real image on the other side of the focusing lens 18 according to the imaging rule of the convex lens, and the laser is focused on the other side of the focusing lens 18 in the process; the elevation height of the elevation platform 22 is controlled by a computer so that the focal point of the focusing lens 18 is located exactly at the surface of the device under test 10.
The laser is focused by the focusing lens 18 to break down the surface of the device under test 10 to generate plasma, and the generated plasma luminous beam reversely returns along the original optical path because the optical path is reversible. Photons emitted by the plasma plume are focused into the 16 optical fibers through the focusing lens 18 in the optical fiber sleeve 21, plasma self-luminous light beams output by the 16 optical fibers are converged into the transmission optical fiber 8 after passing through the optical fiber beam splitter 16, and then the plasma self-luminous light beams start to be transmitted along the transmission optical fiber 8 in the reverse direction. At this time, the laser output end of the transmission fiber 8 becomes a photon input end, and the laser input end of the transmission fiber 8 becomes a photon output end.
The dichroic mirror 5, the first plano-convex lens 7 and the second plano-convex lens 4 are all positioned on the same optical path, and the center of the input end face of the transmission optical fiber 8, the center of the first plano-convex lens 7, the center of the dichroic mirror 5, the center of the second plano-convex lens 4 and the center of the input end face of the collection optical fiber 11 are all positioned on the same straight line; the dichroic mirror 5 forms an included angle of 45 degrees with the laser light path and the plasma self-luminous light path.
The plasma self-luminous light beam propagating backward from the transmission fiber 8 is changed into parallel light by the first plano-convex lens 7, and the parallel light is focused into the collection fiber 11 by the dichroic mirror 5 through the second plano-convex lens 4 and then input into the spectrometer 14.
Preferably, the collection fiber 11 has a length of 1m, a fiber core diameter of 400 μm, and a numerical aperture of 0.22.
Preferably, the focusing lens 18 has a diameter of 25.4mm and a focal length of 35 mm.
The nanosecond laser 1 used in the present invention is Nd: YAG nanosecond laser, output laser wavelength is 1064nm, frequency is 1-10Hz, pulse width FWHM is 10ns, maximum pulse energy is 150mJ, and laser beam diameter is 6 mm.
The preparation work before the two-dimensional fiber array LIBS synchronous detection is carried out on the surface of the equipment to be detected 10 is as follows: and setting parameters of a programmable pulse delay generator 13, changing the time delay of the light-emitting signal of the nanosecond laser 1 and an ICCD15 gate width signal, and further finely adjusting the lifting of the lifting platform 22 by a computer, so that the signal-to-back ratio of the spectral intensity of the characteristic spectral line of the relevant element and the ordinate of the spectrogram are maximum when the signal-to-back ratio is observed on the software of the computer.
The spectrometer 14 will sample the ambient background spectrum before each measurement of the surface of the device under test 10. During each measurement, the nanosecond laser emits 20 times of pulse laser at the frequency interval of 1Hz, and a plasma spectrum generated by each time of laser breakdown on the surface of the device to be measured 10 is transmitted to the spectrometer 14 through a light path; the spectrometer 14 accumulates the collected spectra generated by 20 pulses and transmits the accumulated spectra to a computer for providing to a user, and software can automatically analyze and compare the obtained spectral data with LIBS element spectral information in a database, provide the obtained spectral data with element types and corresponding spectral line intensities contained in the surface of the device to be tested 10, and further determine the content of chromium elements contained in the device to be tested 10 through a calibration curve.
The principle of the invention is as follows:
the transmission optical fiber is a high-power transmission optical fiber, in particular to a multimode optical fiber with a silicon dioxide cladding. The length of the transmission optical fiber is 3m, the core diameter of the optical fiber is 800 μm, the numerical aperture is 0.37, and the maximum power density is 1GW/cm2(ii) a The two ends of the optical fiber are connected by using an SMA905 stainless steel optical fiber connector, the large numerical aperture is favorable for coupling light rays at the input end of the optical fiber, and the output laser is difficult to focus and target at the output end due to the divergence and off-axis property of the multimode optical fiber; the low numerical aperture provides a lower beam divergence and a uniform spot size, which can help to focus the beam after it has propagated. The multimode optical fiber with different models, lengths, diameters and numerical apertures can be replaced according to actual needs.
The fiber array module is arranged right above the on-line, and the diameter of the fiber array module is 5m, which is equivalent to the diameter of the on-line; the distance between the focusing lens and the online surface is adjusted through the lifting platform to obtain the optimal laser focusing effect; the 16 optical fiber sleeves on the optical fiber array module can realize the two-dimensional array synchronous detection of the whole online surface.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A fiber array LIBS detection system for on-line detection, comprising:
the laser fiber coupling module is used for outputting laser, and the laser is incident on equipment to be tested (10) through a fiber array LIBS probe (9); the laser control module is arranged;
the laser control module is arranged on an output light path of the laser fiber coupling module and used for monitoring the actual energy of the output laser and adjusting the time delay of an outgoing light signal and a gate width signal;
the spectrum acquisition module comprises a spectrometer (14) and an ICCD (15), wherein the spectrometer (14) is used for collecting a plasma spectrum generated on the surface of the device to be tested (10) and transmitting the spectrum information to the computer for analysis and comparison.
2. The fiber array LIBS detection system for on-line detection according to claim 1, wherein the laser fiber coupling module comprises a nanosecond laser (1), and laser output by the nanosecond laser (1) enters the first plano-convex lens (7) through reflection of the dichroic mirror (5), is focused by the first plano-convex lens (7), and is transmitted to the fiber array LIBS probe (9) through the transmission fiber (8).
3. The fiber array LIBS detection system for on-line detection according to claim 2, wherein the fiber input end face of the transmission fiber (8) is located 3mm behind the focal point of the first plano-convex lens (7); the nanosecond laser 1 is Nd: YAG nanosecond laser, output laser wavelength is 1064nm, frequency is 1-10Hz, pulse width FWHM is 10ns, maximum pulse energy is 150mJ, and laser beam diameter is 6 mm.
4. The fiber array LIBS detection system for on-line detection according to claim 1, 2 or 3, wherein the fiber array LIBS probe (9) comprises a fiber splitter (16) and a fiber array module (17), and a plurality of fiber sleeves (21) are mounted on the fiber array module (17); each optical fiber sleeve (21) is internally provided with a focusing lens (18), and the focusing lens (18) is arranged on the optical fiber sleeve (21) through 2 snap rings (19); the transmission optical fiber (8) is split into a plurality of optical fibers by an optical fiber splitter (16), and each optical fiber enters an optical fiber sleeve (21).
5. The fiber array LIBS detection system for on-line detection according to claim 4, wherein the fiber array module (17) is arranged above the device under test (10) and has a diameter of 5 m; the optical fiber array module (17) is connected with the lifting platform (22) and is controlled to lift through the lifting platform (22).
6. The fiber optic array LIBS detection system for on-line detection according to claim 4, wherein the fiber optic sleeve (21) is provided with 16; the transmission optical fiber (8) is split into 16 optical fibers by an optical fiber splitter (16); the focusing lens 18 has a diameter of 25.4mm and a focal length of 35 mm.
7. The fiber array LIBS detection system for on-line detection according to claim 2 or 3, wherein the laser control module comprises a first beam splitter (2) and a second beam splitter (3) which are arranged on the optical path between the nanosecond laser (1) and the dichroic mirror (5); one part of the output laser is projected to the first beam splitter (2) to the second beam splitter (3), the other part of the output laser is reflected to the photodiode (12) by the first beam splitter (2), one part of the output laser projected to the second beam splitter (2) is projected to the dichroic mirror (5), and the other part of the output laser is reflected to the laser energy meter (6) by the second beam splitter (3).
8. The fiber array LIBS detection system for on-line detection according to claim 7, wherein the nanosecond laser (1), the first beam splitter (2), the second beam splitter (3) and the dichroic mirror (5) are all located on the same optical path, and the laser optical axis center of the nanosecond laser (1), the center of the first beam splitter (2), the center of the second beam splitter (3) and the center of the dichroic mirror (5) are all located on the same straight line; the first spectroscope (2), the second spectroscope (3) and the dichroic mirror (5) form an included angle of (45) degrees with the optical axis of output laser of the nanosecond laser (1).
9. The fiber array LIBS detection system for on-line detection according to claim 1, wherein the spectrum collection module further comprises a second plano-convex lens (4), the plasma generated on the surface of the device under test (10) is transmitted back along the original optical path, and becomes parallel light after passing through the fiber array LIBS probe (9), the transmission fiber (8) and the first plano-convex lens (7), the parallel light is focused into the collection fiber (11) through the dichroic mirror (5) and the second plano-convex lens (4), and the other end of the collection fiber (11) is connected to the spectrometer (14).
10. The fiber array LIBS detection system for on-line detection according to claim 1, wherein the transmission fiber (8) is silica clad multimode fiber with a length of 3m, a fiber core diameter of 800 μm, a numerical aperture of 0.37, and a maximum power density of 1GW/cm2(ii) a Two ends of the optical fiber are connected by an SMA905 stainless steel optical fiber connector; the dichroic mirror (5) is a short-wave-pass dichroic mirror, the diameter of the dichroic mirror is 50.8mm, and the cutoff wavelength is 805 nm; the length of the collection fiber (11) was 1m, the fiber core diameter was 400 μm, and the numerical aperture was 0.22.
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| Publication number | Priority date | Publication date | Assignee | Title |
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