CN107402193B - A kind of selective laser fusing forming process online detection instrument based on LIBS - Google Patents
A kind of selective laser fusing forming process online detection instrument based on LIBS Download PDFInfo
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- CN107402193B CN107402193B CN201710611570.8A CN201710611570A CN107402193B CN 107402193 B CN107402193 B CN 107402193B CN 201710611570 A CN201710611570 A CN 201710611570A CN 107402193 B CN107402193 B CN 107402193B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The invention discloses a kind of, and forming process online detection instrument is melted in the selective laser based on LIBS, for realizing the on-line monitoring to SLM forming process physical mechanism and composition transfer, the big technical problem of metal increasing material manufacturing material composition information on-line checking difficulty is solved.The present invention includes pulse laser, indication laser, sub-ray spectrometer and its matching detector, optical transmission system and computer.The present invention can be used with selective laser fusing forming coordinative composition of equipments, and the ingredient of forming platform is measured in real time during shaping to selective laser fusing, and is passed through composition transfer and analyzed process physical mechanism；Moreover, the present invention realizes the on-line checking of multiple spot and reconnaissance using one point of multichannel energy-transmission optic fibre, under the premise of realizing that forming platform full width face is detected, testing cost is saved.
Description
Technical field
The invention belongs to laser gain material detection of course of manufacture on line field, the LIBS ingredient of specially a kind of multiple spot and reconnaissance
On-line detecting system is mainly used for on-line checking selective laser fusing (Selective LaserMelting, abbreviation SLM) and increases material
The composition information of manufacturing process.
Background technique
Laser gain material manufacturing technology is commonly called as laser 3D printing technology, is based on discrete dynamics models principle, gradually by material
The technology of accumulation and realization manufacture.The 3D model of formation of parts is cut into a series of a degree of " thin by it using computer
Piece " produces each layer " thin slice " from top to down, and final superposition forming goes out three-dimensional entity component.Laser gain material manufactures skill
Art merges material science, machining and laser technology, goes out complex-shaped entity component using mathematical model direct forming,
And process is few, the time is short, before there is huge development potentiality and application in the fields such as aerospace, nuclear power, petrochemical industry, ship
Scape.
Selective laser fusing (Selective Laser Melting, abbreviation SLM) is one kind typically using powdering as feeding
The increases material manufacturing technology of mode, compares other increases material manufacturing technologies, and SLM is more suitable for the essence that shaped structure is complicated, has excellent performance
Close part.With the development of SLM technology, the part of manufacture Preliminary Applications in bio-medical, electronic field, aerospace etc.
Field, but SLM forming process is there are the coupling of multiple physical field causes its forming process there are various unstable factors, and existing
The method of offline inspection be difficult to ensure formed parts quality completely, be unable to satisfy the key areas such as aerospace to key member
Quality requirement.Therefore quality need to be controlled during being advanced to increasing material manufacturing, is realized to ingredient, defect in SLM forming process
Integration and whole process monitoring.
(notification number is Chinese patent literature " method of the online non-destructive testing increasing material manufacturing part of laser-ultrasound "
CN106018288A, the day for announcing are on October 12nd, 2016) supersonic detection device and the high energy beam of increasing material manufacturing equipment are occurred
Device combines, and realizes during increasing material manufacturing to the real-time detection of part defect, avoids part manufacturing after the completion because of shape
Shape complexity bring check frequency, improves the reliability and working efficiency of increasing material manufacturing.Chinese patent literature " is selected based on laser
Area's sintering technology it is contactless in line defect automatic checkout system " (notification number CN106290375A, the day for announcing 2017 1
Months 4 days) disclosed in contactless defect automatic checkout system, the principle based on Computer Image Processing, to selected manufacturing district
Domain carries out Image Acquisition, and the image of acquisition is compared with the zero defect reference picture generated for selected fabrication region to identify
Defect.
However, the studies above is only monitored the part defect during increasing material manufacturing, it is not directed into sorting
It surveys, and the real time information of elemental composition can be used in identification processing indoor elements scaling loss in SLM forming process, reflect process
Stability, be realize real time discriminating and closed loop feedback control important information source.It therefore, is overall monitor SLM forming process,
Processing technology is improved, realizes popularization and application of the metal increasing material manufacturing in the manufacture of crucial and important component, need to be developed a kind of new
Detection technique carries out quickly real-time detection and analysis to its composition information under the premise of not interfering SLM forming process.
Laser induced breakdown spectroscopy (laser-induced breakdown spectroscopy, abbreviation LIBS) technology is
A kind of quick component detection method, principle are using High Power Laser Pulses excitation analyte, generate plasma, together
When plasma radiation characteristic spectrum analyzed, obtain the element species and content of analyte.Due to LIBS technology
It is a kind of lossless detection method of light contact, what acquired plasma spectrometry included contains much information, and is applied to SLM forming
It in the process, can be under the premise of not interfering increasing material manufacturing process, to the element species, temperature, particle density of SLM forming and sintering layer
It is analyzed with process stability etc., and by the real-time analysis to spectroscopic data, to processing by way of software and hardware combining
Process carries out feedback control, and Optimizing Process Parameters improve process.LIBS has fast response time, high sensitivity, anti-interference
The advantages that ability is strong, non-invasi, is the promising approach that on-line checking is carried out to SLM process.
However, laser is driven by scanning galvanometer in SLM forming process, shaped region powder is static, the size in molten bath is small,
Movement speed is fast, the plasma unstable generated in forming process, it is difficult to directly laser sintered during acquisition increasing material manufacturing
The plasma emission spectroscopy of powder；And SLM device Processing Room internal volume is small, places detection device without redundant space.
Therefore, being detected using LIBS technology to SLM forming process can have that equipment difficulty integrates, spectrum difficulty acquires.
Summary of the invention
It is an object of that present invention to provide a kind of, and forming process online detection instrument is melted in the selective laser based on LIBS, passes through
To the on-line checking of the composition transfer on SLM forming process sinter layer, the melting loss of elements being likely to occur in Processing Room is differentiated, thus
Realize the quick real-time overall monitor to metal increasing material manufacturing process；Further, by the real-time analysis to spectroscopic data, have
Conducive to the adaptive feedback and regulation realized to SLM working process parameter, and then passes through Optimizing Process Parameters and maintain best
State, to improve the quality of increasing material manufacturing processing part.
During SLM increasing material manufacturing, molten bath high-speed mobile is nearly free from stable plasma, it is difficult to directly adopt
Collection spectrum is for detecting ingredient.The present invention is using currently sedimentary is research object, in the premise for not influencing SLM process
Under, external excitation light source generates stable plasma, and the full width of forming platform is realized by multiple spot and reconnaissance detection technique
Face monitoring.It is specific as follows:
Melt forming process on-line checking in selective laser provided by the invention based on LIBS (laser induced breakdown spectroscopy)
Equipment, including pulse laser, sub-ray spectrometer and its matched detector, optical transmission system, indication laser and computer；
Wherein:
The pulse laser is the excitation light source separately added except material processing laser, is swashed for generating high energy pulse
Light excites sinter layer in the gap of powdering layer by layer；
The indication laser carries out guidance lighting for generating instruction light, to tested point；
The sub-ray spectrometer is used to acquire the signal light that stable plasma issues, and it is spatially decomposed into
The characteristic spectral line of representative element content information is converted to electric signal by matched detector, is sent into computer disposal；
The optical transmission system includes signal optical channel, excitation optical channel and illumination optical channel；Signal optical channel is for connecing
The signal light that the plasma resonance of tested point goes out is received, the sub-ray spectrometer is sent into；Excitation optical channel swashs for receiving pulse
Light device issues laser, transmits and focus on tested point, and sample at tested point is excited to generate plasma；Illumination optical channel is for connecing
The laser that indication laser issues is received, projects tested point as illumination light；
The computer is for handling and showing signal spectrum；The computer is also used for control pulse laser, instruction
The working sequence of laser and detector successively controls pulse according to the sequence of pulse laser, indication laser and detector
Laser, instruction light generate the moment and the input time of signal light (is spaced in musec order, specific delay is according to plasma lifetime
To determine)；
When work, by the illumination optical channel of optical transmission system and optical channel output window alignment SLM former is excited
Sample tested point in forming platform, the input window of signal optical channel are also directed at the tested point；Under control of the computer, pulse
Laser issues the tested point that laser excitation is chosen and generates plasma, under the illumination of subsequent instruction light, the signal of tested point
Light is sent into sub-ray spectrometer through signal optical channel, after realizing photoelectric conversion by detector, is passed to computer and carries out signal processing, real
Now to the real-time analysis of material composition and the control to processing technology.
Further, the online detection instrument has multiple optical transmission systems, for more to what is chosen in sinter layer
A tested point is excited, illuminated and is acquired, and realizes the analysis of multichannel spectral signal；
Further, the optical transmission system includes a condenser lens (17), the first dichroscope (15) and the two or two
To Look mirror (16), in which: the first dichroscope (15) and the second dichroscope (16) are placed in parallel, and mirror surface is and convergent lens
(17) at 45 degree of angles；Condenser lens (17) is located at the underface of the first dichroscope (15)；Condenser lens (17) is used as exciting light
The input window of the shared output window and signal optical channel of channel and instruction optical channel；First dichroscope (15) and condenser lens
(17) signal optical channel is constituted, for transmiting condenser lens (17) derived signals light point, sub-ray spectrometer is sent into and is divided
Analysis；Second dichroscope (16), the first dichroscope (15) and condenser lens (17) collectively form instruction light and excitation optical channel；
Wherein, the second dichroscope (16) is passed through for the instruction light (9) that indication laser transmits to be transmitted through the first dichroscope (15)
It projects condenser lens (17) after reflecting, and is converged on tested point by it for illuminating；Second dichroscope (16) is also used to
The exciting light (7) that pulse laser generates is reflexed to the first dichroscope (15), it is saturating that focusing is projected after Jing Qizai secondary reflection
Mirror (17), is converged on tested point by it.
Further, the multiple optical transmission system is connected by one point of multichannel energy-transmission optic fibre with laser simultaneously, is realized
The multi-path laser of separate unit laser transmits.
Further, the online detection instrument, which is characterized in that further include digital delay generator, for substituting
Computer completes the working sequence of control pulse laser, indication laser and detector, to realize more accurate timing control
System.
It, will it is suitable in SLM forming platform based on the online detection instrument.
SLM former of the present invention is integrated by Processing Room, laser, air cleaning system etc., complete equipment body
Product is big, at high cost, and processing environment is harsh, is difficult to move, and Processing Room small volume, be built-in with scanning galvanometer, forming platform and
Power spreading device.Power spreading device tiles metal powder onto the forming platform of Processing Room, and then laser beam passes through scanning galvanometer
Control selections melt the powder on platform.Processing Room need to vacuumize or lead to protective gas, avoid metal at high temperature with other
Gas reacts.
The top of the Processing Room of the SLM former is light window；The to be measured of the online detection instrument is processed in SLM
In indoor forming platform；The optical transmission system focal position of the online detection instrument is identical with tested point position.
For the LIBS on-line checking for realizing SLM forming process, under the premise of not influencing SLM process, the present invention will
The integrated optical transmission system of multiple optical mirror slips is placed in above the Processing Room of SLM, other LIBS detecting instruments such as laser, spectrum
Instrument, computer etc. are then placed in outside SLM device, and pass through optical fiber and the multiple optical transport systems for being fixed on surface outside Processing Room
System is connected.Using the sealing covering of broadband transparent glass material above Processing Room, there is high transmittance to broadband optical signal.Swash
The pulse laser that light device issues directly excites corresponding tested point, plasma resonance by transparent glass after optical transmission system
Signal light by being acquired through optical transmission system after transparent glass and being transferred to sub-ray spectrometer.The focal position of optical transmission system
Identical as the position of tested point in SLM forming platform, tested point being uniformly distributed in forming platform makes multiple spot and reconnaissance LIBS
It detects more representative, it can be achieved that the full width face in SLM process is precisely detected.
By detecting the element composition and content of sedimentary, it can determine whether the stability of process, timely feedback defect
Information carries out feedback control to the working process parameter of SLM, such as laser power, scanning speed, sweep span, improves SLM's
Processing technology.
Specifically, the present invention have the advantages that following technical characterstic and:
(1) by LIBS, this spectrum analysis means is introduced into the on-line checking of SLM forming process the present invention for the first time.It utilizes
LIBS technology acquires the spectral information of SLM sinter layer, the characteristic parameter of photic plumage brightness in available laser ablation process, analysis
Powder melting loss of elements that may be present is processed, and combines obtained spectroscopic data Real-time Feedback machining information, SLM is improved and processes work
Skill.LIBS technology is applied in SLM forming process, compensates for the blank that on-line checking is carried out to SLM ingredient, and technically
Have many advantages, such as that spectral information amount is abundant, detection sensitivity is high, fast response time, is a kind of nothing for not interfering SLM process
Damage detection technique.LIBS spectrum detection technique is applied in SLM forming platform by the present invention, to realize the complete of SLM process
Face monitoring and closed loop feedback control are laid a good foundation.
(2) present invention is directed to molten bath high-speed mobile in SLM forming process, is nearly free from the discomforts such as stable plasma
The characteristics of the characteristics of answering spectrum analysis and SLM device Processing Room internal volume small, without redundant space placement detection device.
It under the premise of not interfering SLM process, proposes to utilize additional excitation light source, devises more eyeglass assemblings and realize light excitation
With the integrated optic path system of light collection, which penetrates the broadband transparent glass of SLM Processing Room top layer installation,
In the gap of powdering layer by layer, multiple spot is carried out to current sedimentary and is detected simultaneously.
(3) present invention is divided the output beam of separate unit laser using one point of multichannel energy-transmission optic fibre, one point of multichannel
Energy-transmission optic fibre, " one " end are connected with laser, and " more " ends are connected with multiple optical transmission systems, and the multi-path laser of separate unit laser is defeated
More tested points can be excited simultaneously out, while indication laser, sub-ray spectrometer are also connect with multiple optical transmission systems simultaneously, it is real
To more tested points, on-line checking, the detection efficiency of raising LIBS technology are applied to SLM to existing a set of LIBS testing equipment simultaneously
The cost of SLM forming process on-line checking is significantly reduced on former.Meanwhile the number of heretofore described optical transmission system
It measures flexibly configurable and has widened applicable model of the invention significantly to meet the specific requirements of SLM increasing material manufacturing different application
It encloses.
Detailed description of the invention
Fig. 1 is the specific embodiment for the SLM forming process online detection instrument based on LIBS that present example provides
Structural schematic diagram；
Fig. 2 is the structural schematic diagram of the specific embodiment for the optical transmission system that present example provides；
Wherein, 1. Processing Room；2. power spreading device；3. tested point；4. forming platform；5. scanning galvanometer；6. optical transmission system；
7. one point of multichannel energy-transmission optic fibre；8. pulse laser；9. one point of multichannel energy-transmission optic fibre；10. indication laser；11. All-in-One passes
Guiding fiber；12. spectrometer and detector；13. computer；14. digital delay generator；15. dichroscope；16. dichroscope；
17. condenser lens；18. cage cube.
Specific embodiment
Specific embodiments of the present invention will be further explained with reference to the accompanying drawing.It should be noted that for
The explanation of these embodiments is used to help understand the present invention, but and does not constitute a limitation of the invention.In addition, disclosed below
The each embodiment of the present invention in involved technical characteristic can be combined with each other as long as they do not conflict with each other.
The problem high for SLM forming process quality control requirement, detection difficulty is big, the present invention devise one kind and are based on
The SLM forming process multiple spot while on-line detecting system of LIBS technology.As shown in Figure 1, the detection system includes SLM forming
Room 1, power spreading device 2, tested point 3, forming platform 4, scanning galvanometer 5, optical transmission system 6, one points of multichannel energy-transmission optic fibres 7 and 9, arteries and veins
Rush laser 8, illumination indication laser 10, All-in-One conduction optical fiber 11, sub-ray spectrometer and matching detector 12, computer
13, digital delay generator 14.
The overall structure of SLM former includes laser and ancillary equipment, stomata purification system, powdering system, control
System etc. four is most of.Wherein forming platform 4, power spreading device 2, scanning galvanometer 5 are placed in Processing Room 1, tested point 3 be located at
On the sample of shape platform.Forming platform carrying processing powder, power spreading device powdering feeding in forming platform, scanning galvanometer are then used
In control laser beam to powder selective melting.It is cover using the sealing covering of broadband transparent glass above closed Processing Room 1 more
Optical transmission system 6 is placed in above transparent glass, and multiple tested points correspond in focus and forming platform.In present example
Optical transmission system has two sets；
The pulse laser 8 is generally nanosecond laser, can also use picosecond or femtosecond laser, swash
Light output wavelength is from ultraviolet near infrared range, such as 1064,532,355 or 266nm.According to different test objects, laser
Single pulse energy can carry out flexible modulation, laser output port and one point of 7 phase of multichannel energy-transmission optic fibre in 0~800mJ range
Even, the other end of energy-transmission optic fibre 7 is separately connected two sets of optical transmission systems；The illumination laser 10 is generally low power solid
Laser, wave-length coverage covering visible light, output end are connected with one point of multichannel energy-transmission optic fibre 9, and the other end of energy-transmission optic fibre 9 is divided to two
Road is separately connected two sets of optical transmission systems 6；Spectrometer is connected with detector 12 with conduction optical fiber 11, conducts the other end of optical fiber 11
Two-way is separately connected two sets of optical transmission systems 6；
One point of multi-channel optical fibre 7 is the energy-transmission optic fibre of custom-made, port number and optical transmission system quantity Matching,
Joint performance is matched with laser, and effect is that the pulse signal for issuing separate unit pulse laser 8 is transmitted according to energy branch, and one
The quantity at point multi-channel optical fibre beam splitting end is identical as the quantity of optical transmission system, energy-transmission optic fibre beam splitting end per all the way respectively with one
Optical transmission system is connected, and laser energy exports by optical transmission system and focus on corresponding sensing point 3, realizes separate unit laser
Excitation of the beam of laser of 8 outputs to multiple tested points 3；
One point of multi-channel optical fibre 9 is the energy-transmission optic fibre of custom-made, and effect is to send out separate unit indication laser 10
Instruction light out is transmitted according to energy branch, and the quantity at one point of multi-channel optical fibre beam splitting end is identical as the quantity of optical transmission system 6, often
Road laser illuminator focuses on corresponding tested point 3 after optical transmission system 6 and is illuminated, and realizes that illumination indication laser 9 exports
Positioning and instruction of the beam of laser to multiple tested points 3；
(" energy-transmission optic fibre ", the optical fiber for transmitting signal light is known as the optical fiber of transmission laser the All-in-One optical fiber 11
" All-in-One optical fiber ") be custom-made conduction optical fiber, port number and optical transmission system quantity Matching, effect is acquisition arteries and veins
The plasma light spectrum signal that impulse light inspires.Pulse laser excites tested point to generate plasma, the radiation of plasma
Light closes beam to sub-ray spectrometer 12 after optical transmission system 6, through All-in-One optical fiber 11, realizes a spectrometer to multiple to be measured
The spectral signal analysis that point issues；
After the sub-ray spectrometer is divided the plasma optical signal of tested point, matching detector is successively to light splitting
Signal afterwards is detected, and after photoelectric conversion, each test point spectral information is exported and shown by computer 13；
The computer 13 is connected with laser processing chamber 1, spectrometer 12, to the processing of SLM molding equipment and LIBS spectrum
It detects both dynamic processes and carries out timing control, and receive the spectroscopic data from detector；Spectrum analysis built in it is soft
Part is multi-window interface, the plasma light spectrum signal of sensing point at the corresponding display one of each window, for spectroscopic data into
Row analysis and processing；
The digital delay generator 14 is usually DG5353, for generating plasma in laser excitation tested point
Afterwards, triggering spectrometer collection spectrum is able to achieve being precisely controlled for delay time its main feature is that temporal resolution is high；
The optical transmission system 6, the three tunnel optical signal transmission channels including pulse laser, laser illuminator, spectra collection are main
Have two large ports: towards detection device to external port and towards SLM forming platform to inner port.To external port and pulse
Laser fiber 7, illumination indexed optical fiber 9, spectroscopic acquisition optical fiber 11 are connected, to the inner port then transparent glass above Processing Room
Glass, it is corresponding with tested point 3.The internal structure of optical transmission system 6 as shown in Fig. 2, specific equipment include a condenser lens (17),
First dichroscope 15 and the second dichroscope 16, wherein the first dichroscope 15 and the second dichroscope 16 are placed in parallel；The
One dichroscope 15 is used for the signal light transmission that will be transmitted from condenser lens 17, is sent into sub-ray spectrometer 12 and is analyzed；Second
The instruction light transmission that dichroscope 16 is used to transmit indication laser projects poly- to the first dichroscope 15 after its reflection
Focus lens 17 are converged on tested point 3 by it for illuminating；What the second dichroscope 16 was also used to generate pulse laser swashs
It shines and reflexes to the first dichroscope 15, project condenser lens 17 after Jing Qizai secondary reflection, converged on tested point by it.Arteries and veins
Impulse light, illumination instruction laser and three tunnel of signal light are coaxial.
Realize it is provided by the invention based on LIBS selective laser fusing forming process online detection instrument mainly include with
Lower step:
Step 1: the three-dimensional entity model of part to be processed is designed on SLM process equipment, is obtained by special-purpose software
These data are imported quickly shaping device by the outline data at each interface, and equipment controls laser beam choosing according to these outline datas
The metal powder material of selecting property fusing interlayer；
Step 2: before laser beam starts scanning, powdering equipment 2 is first the forming platform 4 of metal powder tiling to Processing Room
On, then laser beam will selectively melt powder by the profile information of current layer by scanning galvanometer 5, process current layer
Profile；
Step 3: spectral detection is carried out in the gap of powdering layer by layer.Computer 13 controls pulse laser 8 in powdering layer by layer
Gap issue laser pulse, pulse laser is transmitted by one point of multichannel energy-transmission optic fibre 7, is had respectively entered after being divided by energy pair
The optical signal transmission channel answered simultaneously reaches tested point, realizes the laser pulse issued by a pulse laser to many places test point
Excitation；
Step 4: for digital delay generator 14 after pulse laser sending, triggering indication laser 10 issues instruction light,
Branch is transmitted under the action of energy-transmission optic fibre 9, is had respectively entered different optical transmission systems and is reached tested point and carries out illumination instruction, real
Accurate illumination and positioning of the existing separate unit indication laser to multiple tested points；
Step 5: it is acquired by the spectral signal of 17 plasma of optical focus mirror.Digital delay generator 14 triggers
Spectrometer 12 acquires the spectral signal that multiple tested points issue, and under the action of All-in-One optical fiber 11, multipath light signal is transmitted
To spectrometer 12, the wave-length coverage in the different channels of multi-channel spectrometer is adjusted, is adapted the characteristic spectrum of itself and tested point；
Step 6: in the detection process, according to the superiority and inferiority of the spectrum of laser plasma signal of acquisition to the energy of pulse laser
Amount, the delay time of digital delay impulse generator and other optical parameters are adjusted, and obtain optimal experiment parameter；These
Parameter can be adjusted according to data such as the properties of collected spectrum, including the intensity of spectral line, noise size；
Step 7: each test point spectral information is exported by computer 13, and the testing result of different test points is shown simultaneously
Show, realizes to the comprehensive real time monitoring of multiple tested points of sample in SLM forming platform and analysis；
Step 8: liftable system declines the distance of a figure layer thickness, and power spreading device 2 is again in manufactured current layer
Upper berth metal powder, equipment are called in next figure layer and are processed.It so processes layer by layer, and acquires spectrum in interlayer spacings, until
Entire part completion of processing.Whole process carries out in the Processing Room for vacuumizing or being connected with gas shield, to avoid metal
It reacts at high temperature with other gases.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (5)
1. one kind melts forming process online detection instrument, feature based on the selective laser of LIBS (laser induced breakdown spectroscopy)
It is, including pulse laser, sub-ray spectrometer and its matched detector, optical transmission system, indication laser and computer；
Wherein:
The pulse laser generates plasma for generating high energy pulse laser, excitation sample；
The indication laser is for generating instruction light, to tested point guidance lighting；
The sub-ray spectrometer is used to acquire signal light and is spatially decomposed into the characteristic spectral line of representative element content information, by
Matched detector is converted to electric signal, is sent into computer disposal；
The optical transmission system includes signal optical channel, excitation optical channel and illumination optical channel；Signal optical channel for receive to
The signal light that measuring point plasma resonance goes out, is sent into the sub-ray spectrometer；Excitation optical channel is for receiving pulse laser hair
Laser out transmits and focuses on tested point, and sample at tested point is excited to generate plasma；Illumination optical channel refers to for receiving
Show the laser that laser issues, projects tested point as illumination light；
The optical transmission system includes a condenser lens (17), the first dichroscope (15) and the second dichroscope (16),
In:
First dichroscope (15) and the second dichroscope (16) are placed in parallel, and mirror surface is pressed from both sides with convergent lens (17) at 45 degree
Angle；Condenser lens (17) is located at the underface of the first dichroscope (15)；Condenser lens (17) is as excitation optical channel and instruction
The shared output window of optical channel and the input window of signal optical channel；First dichroscope (15) and condenser lens (17) constitute signal
Optical channel is sent into sub-ray spectrometer and is analyzed for transmiting condenser lens (17) derived signals light point；
Second dichroscope (16), the first dichroscope (15) and condenser lens (17) collectively form instruction light and exciting light is logical
Road；Wherein, the second dichroscope (16) is used to the instruction light (9) that indication laser transmits being transmitted through the first dichroscope
(15), condenser lens (17) are projected after its reflection, is converged on tested point by it for illuminating；Second dichroscope (16)
It is also used to reflex to the exciting light (7) that pulse laser generates the first dichroscope (15), be projected after Jing Qizai secondary reflection
Condenser lens (17), is converged on tested point by it；
The computer is for handling and showing signal spectrum；The computer is also used for control pulse laser, instruction laser
The working sequence of device and detector successively controls pulse and swashs according to the sequence of pulse laser, indication laser and detector
Light, instruction light generate the input time at moment and signal light；
When work, by the forming of the illumination optical channel of optical transmission system and excitation optical channel output window alignment SLM former
Tested point on platform, the input window of signal optical channel are also directed at the tested point；Under control of the computer, pulse laser is sent out
The tested point that laser excitation is chosen out generates plasma, and under the illumination of subsequent instruction light, the signal light of tested point is through signal
Optical channel is sent into sub-ray spectrometer, after realizing photoelectric conversion by detector, is passed to computer and carries out signal processing, realize to material
The analysis of ingredient.
2. online detection instrument according to claim 1, which is characterized in that its with multiple optical transmission systems, for pair
Multiple tested points are excited, illuminated and are acquired, and realize the analysis of multichannel spectral signal.
3. online detection instrument according to claim 2, which is characterized in that multiple optical transmission systems pass through one point of multichannel
Energy-transmission optic fibre is connected simultaneously with laser, realizes the multi-path laser transmission of separate unit laser.
4. online detection instrument according to claim 1, which is characterized in that further include digital delay generator, for replacing
The control of the more accurately working sequence to pulse laser, indication laser and detector is completed for computer.
5. online detection instrument according to claim 1, which is characterized in that further include SLM former, in which:
The top of the Processing Room of the SLM former is light window；The tested point of the online detection instrument is in SLM Processing Room
In interior forming platform；The optical transmission system focal position of the online detection instrument is identical with the tested point position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710611570.8A CN107402193B (en) | 2017-07-25 | 2017-07-25 | A kind of selective laser fusing forming process online detection instrument based on LIBS |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710611570.8A CN107402193B (en) | 2017-07-25 | 2017-07-25 | A kind of selective laser fusing forming process online detection instrument based on LIBS |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107402193A CN107402193A (en) | 2017-11-28 |
| CN107402193B true CN107402193B (en) | 2019-06-07 |
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| CN111351768B (en) * | 2018-12-20 | 2022-10-18 | 中国科学院合肥物质科学研究院 | Multi-component gas laser detection device and method using scanning galvanometer |
| CN110942150A (en) * | 2019-11-09 | 2020-03-31 | 上海航天设备制造总厂有限公司 | Intelligent diagnosis method for forming failure of parts of selective laser melting equipment |
| CN111504980B (en) * | 2020-04-26 | 2021-04-16 | 长春工业大学 | LIBS online monitoring device and method for metal additive manufacturing process |
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| CN111795977A (en) * | 2020-06-08 | 2020-10-20 | 武汉大学 | Online real-time monitoring system for multiple monitoring devices in metal additive manufacturing |
| CN111687413B (en) * | 2020-06-08 | 2022-03-11 | 岳阳珞佳智能科技有限公司 | Real-time monitoring device, forming equipment and method for laser near-net forming |
| CN112661513A (en) * | 2020-12-21 | 2021-04-16 | 福建工程学院 | Functional gradient material additive manufacturing system based on laser-induced breakdown spectroscopy |
| CN113118470A (en) * | 2021-04-21 | 2021-07-16 | 昆山盛祥新材料科技有限公司 | Multi-nozzle assembly for digital additive manufacturing based on selective laser melting forming technology |
| CN114199893A (en) * | 2021-12-10 | 2022-03-18 | 北京航空航天大学 | SLM powder laying process defect identification and molten pool state real-time monitoring device and method |
| CN114397244A (en) * | 2022-01-14 | 2022-04-26 | 长春工业大学 | Method for identifying defects of metal additive manufacturing part and related equipment |
| CN115773986A (en) * | 2022-12-05 | 2023-03-10 | 东北大学 | Device and method for detecting components through laser-induced spectroscopy for metal additive manufacturing |
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