Have the increasing material system of processing and method of environment composition on-line checking function
Technical field
The present invention relates to the material increasing fields of metal material, more particularly to a kind of tool environment composition on-line checking function
Increasing material system of processing and method.
Background technique
Increases material manufacturing technology is that the technology of Quick-forming is realized using discrete dynamics models principle according to three-dimensional entity model,
The labyrinth components that a variety of materials can directly be manufactured, are with a wide range of applications.But metal increasing material manufacturing is related to
Complicated metal molten solidifies metallurgical process, high to processing environment purity requirements, and environment composition control is improper easily to be generated
Defect, if the hydrogen in protective gas may cause hydrogen blistering, oxygen may cause metal oxidation, and Solid micro may pollute
Optical devices simultaneously interfere light beam to relay.Therefore, the real-time detection of environment composition is particularly important.Ambiance mainly includes protecting
Microparticle material internal release gas in shield gas, process and generated with laser gasification metal.Accurate on-line checking ring
Border atmosphere constituent and content are of great significance to control forming quality.
Time of-flight mass spectrometer has as a kind of high-precision substance component detection device to be widely applied, and measurement range can
Up to 10-6At%~100at%.It is mentioned in the patent of Patent No. CN201480023610.1, mass spectrum is applied in increasing material manufacturing
The concept of pollutant is detected, but the technology lacks the specific detection means for distinguishing particulate matter and gas.
Summary of the invention
The present invention is compound by laser individual particle mass spectrum and electron bombardment ionization source mass spectrum, provides a kind of tool environment composition and examines online
The increasing material system of processing and method of brake.
The present invention has the increasing material system of processing of environment composition on-line checking function, including increase material processing subsystem and environment at
Divide on-line checking subsystem;
The increasing material processing subsystem is used to carry out metal and increases material processing, and increasing material processing subsystem includes being used to carry out metal
Increase the control unit of material process control;
The environment composition on-line checking subsystem includes laser individual particle mass spectrograph, electron bombardment source mass spectrometer, substance
Separative unit, mass spectrograph gas circuit unit, mass spectrum collection head and collection head motion control mechanism;Laser individual particle mass spectrograph, electronics
Bombardment source mass spectrometer, collection head motion control mechanism are all connected with control unit;
Collection head motion control mechanism is used under the control of the control unit, drive mass spectrum collection head tracking molten bath movement;
Mass spectrum collection head is used to collect the mixture of microparticle and gas in the ambient enviroment of molten bath;Mass spectrograph gas circuit unit is used to mix
It closes object and is transmitted to substance separative unit, substance separative unit is used to microparticle and gas in separating mixture, microparticle is led to
It crosses a gas circuit and is transmitted to laser individual particle mass spectrograph, gas is transmitted to electron bombardment source mass spectrometer by another gas circuit;
Laser individual particle mass spectrograph is used to detect the ingredient and content of microparticle, and electron bombardment source mass spectrometer is used to detect gas
The ingredient and content of body, and will test data feedback to control unit.
Further, the increasing material processing subsystem using selective laser fusing forming device, laser only nearly forming device,
Electron beam selective melting forming device, electron beam direct-forming device or electric arc forming device.
Further, the increasing material processing subsystem further comprises control unit, high energy beam generating unit, high energy beam biography
Defeated unit, processing head kinematical control mechanism, processing head and objective table;
High energy beam generating unit and processing head kinematical control mechanism are all connected with control unit;
High energy beam generating unit is used to generate energy beam, and high energy beam transmission unit is used to energy beam being transmitted to processing head,
Processing head is used to using energy beam fusing raw metal and forms molten bath on objective table;
Processing head kinematical control mechanism is used to that processing head is driven to move by preset path.
Further, the collection head motion control mechanism and the processing head kinematical control mechanism be mechanical arm or mostly from
By degree motion platform.
Further, the collection head motion control mechanism is used under the control of the control unit, drive mass spectrum collection head
Molten bath movement is tracked, is specifically realized with the following method:
It is pre-designed the motion path for increasing processing head and mass spectrum collection head in material processing subsystem, adopts processing head and mass spectrum
The motion path of market-head is identical, but there is delay.
Further, the collection head motion control mechanism is used under the control of the control unit, drive mass spectrum collection head
Molten bath movement is tracked, is specifically realized with the following method:
Layer surface is deposited using laser scanning, receives reflected light using laser detector, molten bath is judged according to light variation
Position, control mass spectrum collection head are tracked to molten bath.
Further, the substance separative unit includes difference vacuum sample cone and quartz capillary, difference vacuum sample
Cone passes through another air circuit connection electron bombardment source mass spectrometer by an air circuit connection laser individual particle mass spectrograph, quartz capillary.
The increasing material processing method of tool environment composition on-line checking function provided by the invention, processes system using above-mentioned increasing material
System, comprising steps of
(1) control unit control increases material processing subsystem and forms molten bath on objective table;
(2) control unit controls collection head motion control mechanism, and collection head motion control mechanism drives mass spectrum collection head real
When track molten bath, acquire the surrounding material around molten bath;
(3) surrounding material enters substance separative unit by mass spectrum collection head and mass spectrograph gas circuit unit, separates through substance
Unit is separated into microparticle and gas, respectively enters laser individual particle mass spectrograph and electron bombardment source mass spectrometer;
(4) ingredient and size of laser individual particle mass spectrograph detection microparticle, and will test data and be sent to control unit;
(5) ingredient and content of electron bombardment source mass spectrometer detection gas, and will test data and be sent to control unit;
(6) control unit detection data based on the received, judge it is exceeded with the presence or absence of impurity component in surrounding material, once
There is impurity component super, control unit sounds an alarm, and shuts down;After staff excludes reason for Exceeding, it is further continued for carrying out increasing material
Processing;
(7) step (1)~(6) are repeated until completing to increase material processing.
Compared to the prior art, the present invention have following features and the utility model has the advantages that
The present invention, which increases material system of processing, has the function of environment composition on-line checking, can be in increasing material process, to molten bath
Ambient enviroment substance carries out high-precision on-line checking, more specifically, using laser individual particle mass spectrograph and electron bombardment ionization source mass spectrum
Instrument respectively in surrounding material microparticle and gas detect, and will test data feedback to control unit.Control unit
Once then stopping and excluding reason for Exceeding it was found that impurity component is exceeded, until the exceeded situation of impurity component is eliminated.
The present invention is compound by laser individual particle mass spectrum and electron bombardment ionization source mass spectrum, for realizing environment in material process is increased
The full object Mass Spectrometer Method of substance can provide technical support to increase to control quality in material process and provide environment cleanliness.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that the present invention increases material system of processing in embodiment.
In figure, 1- control unit, 2- high energy beam generating unit, 3- processing head kinematical control mechanism, 4- high energy beam transmission list
Member, 5- processing head, 6- substance separative unit, 7- laser individual particle mass spectrograph, 8- electron bombardment source mass spectrometer, 9- mass spectrograph gas circuit
Unit, 10- collection head motion control mechanism, 11- mass spectrum collection head, 12- sedimentary, 13- objective table, the molten bath 14-.
Specific embodiment
In order to illustrate more clearly of the present invention and/or technical solution in the prior art, Detailed description of the invention sheet will be compareed below
The specific embodiment of invention.It should be evident that drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill of field, without creative efforts, it can also be obtained according to these attached drawings others
Attached drawing, and obtain other embodiments.
The present invention increases material system of processing and has environment composition on-line checking function, in increasing material process, utilizes laser list
The ingredient and content of particle mass spectrograph and electron bombardment source mass spectrometer detection molten bath ambient enviroment substance, and sentence according to testing result
Whether abscission ring border material impurities ingredient is exceeded.Once it was found that having, impurity component is exceeded, then shutdown adjustment.The present invention is by increasing material
The on-line checking of surrounding material impurity component is carried out in process, to realize the quality and powder injection molding that increase material process.
Referring to Fig. 1, it is shown the structural schematic diagram for increasing material system of processing in the present embodiment, the increasing material system of processing is main
Including increasing material processing subsystem and environment composition on-line checking subsystem.The increasing material processing subsystem further comprises that control is single
Member 1, high energy beam generating unit 2, high energy beam transmission unit 4, processing head kinematical control mechanism 3, processing head 5 and objective table 13;It is high
Beam generating unit 2 and processing head kinematical control mechanism 3 are all connected with control unit 1, and control unit 1 is used to control high energy beam
Unit 2 and processing head kinematical control mechanism 3, high energy beam generating unit 2 are used to generate the energy beam of fusing raw metal, high energy beam
Transmission unit 4 is used to for energy beam being transmitted to processing head 5, and processing head 5 is used to the energy transmitted using high energy beam transmission unit 4
It measures beam and melts raw metal, and form molten bath 14 in objective table 13.Processing head kinematical control mechanism 3 is used to that processing head 5 is driven to press
The movement of the preset path of control unit 1.
In present embodiment, when the high energy beam that high energy beam generating unit 2 generates is laser beam, high energy beam transmission is single
Optical fiber or reflecting mirror for transmitting laser then can be used in member 4;When high energy beam generating unit 2 generate high energy beam be electric arc, etc.
Whens gas ions, electron beam etc., the cable for transmitting electric energy is then can be used in high energy beam transmission unit 4.
The environment composition on-line checking subsystem includes laser individual particle mass spectrograph 7, electron bombardment source mass spectrometer 8, object
Matter separative unit 6, mass spectrograph gas circuit unit 9, mass spectrum collection head 11 and collection head motion control mechanism 10, laser individual particle mass spectrum
Instrument 7, electron bombardment source mass spectrometer 8, collection head motion control mechanism 10 are all connected with control unit 1, the control in control unit 1
Lower work.In present embodiment, processing head kinematical control mechanism 3 and collection head motion control mechanism 13 using mechanical arm or
Multi-degree-of-freedom motion platform etc..
Collection head motion control mechanism 10, which is used to that mass spectrum collection head 11 is driven to track molten bath 14, to be moved, and mass spectrum collection head 11 is used
To collect the mixture of microparticle and gas in 14 ambient enviroment of molten bath;Mass spectrograph gas circuit unit 9 is used to mass spectrum collection head
11 mixtures collected are transmitted to substance separative unit 6, and the microparticle that substance separative unit 6 is used in separating mixture is gentle
Microparticle is transmitted to laser individual particle mass spectrograph 7 by a gas circuit, gas is transmitted to electron bombardment by another gas circuit by body
Source mass spectrometer 8.
Collection head motion control mechanism 10, which drives the tracking of mass spectrum collection head 11 molten bath 14 to move, specifically can be used following technology
Means are realized:
The first, since molten bath 14 is formed in 5 lower section of processing head, so processing head 5 and mass spectrum collection head can be pre-designed
11 motion path keeps processing head 5 identical with the motion path of mass spectrum collection head 11, but there is delay, that is, can ensure that mass spectrum is adopted
Market-head 11 is located near molten bath 14.
Second, using 12 surface of laser scanning sedimentary, reflected light is received using laser detector, is changed according to light
Judge 14 position of molten bath, then controls near the tracking to molten bath 14 of mass spectrum collection head 11.
In the present invention, substance separative unit 6 be used to by mixture microparticle and gas separate.This specific implementation
In mode, substance separative unit 6 includes difference vacuum sample cone and quartz capillary, and difference vacuum sample cone is connected by a gas circuit
Laser individual particle mass spectrograph 7 is connect, quartz capillary passes through another air circuit connection electron bombardment source mass spectrometer 8.Mixture enters object
Matter separative unit 6, only microparticle can be bored by difference vacuum sample, and then enter laser individual particle mass spectrograph 7;Quartz capillary
It may filter that microparticle, only gas passes through and enters electron bombardment ionization source mass spectrograph 8.
In the increasing material manufacturing method using system shown in Figure 1, control unit 1 is controlled according to the scan path of planning and is processed
Head motion control mechanism 3 drives processing head 5 to move, and forms the sedimentary 12 of specific shape;Meanwhile environment composition on-line checking
The mass spectrum collection head 11 of system follows molten bath 14 mobile, to monitor on-line to 14 ambient enviroment ingredient of molten bath.
The present invention increases material processing method, and specific step is as follows:
(1) control unit 1 controls high energy beam generating unit 2 and generates energy beam, and generated energy beam is passed by high energy beam
Defeated unit 4 is transferred to processing head 5, and processing head 5 melts raw metal using the energy beam that high energy beam transmission unit 4 transmits,
And molten bath 18 is formed in objective table 16.
(2) control unit 1 controls collection head motion control mechanism 10, and collection head motion control mechanism 10 drives mass spectrum acquisition
First 11 real-time tracing molten bath 14 acquires the surrounding material around molten bath 14.
(3) surrounding material enters substance separative unit 6, substance point by mass spectrum collection head 11 and mass spectrograph gas circuit unit 9
Surrounding material is separated into microparticle and gas from unit 6, respectively enters laser individual particle mass spectrograph 7 and electron bombardment ionization source mass spectrum
Instrument 8.
(4) laser individual particle mass spectrograph 7 detects the ingredient and size of microparticle, and will test data and be sent to control unit
1。
(5) ingredient and content of 8 detection gas of electron bombardment source mass spectrometer, and will test data and be sent to control unit 1.
(6) detection data based on the received of control unit 1, judge it is exceeded with the presence or absence of impurity component in surrounding material, one
Denier has that impurity component is exceeded, and control unit 1 sounds an alarm, and shuts down;After staff excludes reason for Exceeding, it is further continued for carrying out
Increase material processing.The exceeded content for both having referred to an impurity component of the impurity component is exceeded, also refers to that microparticle size is exceeded.
(7) step (1)~(6) are repeated until completing to increase material processing.
Be described in above-described embodiment to illustrate the present invention, though text in be illustrated by specific term, not
Can be limited the scope of protection of the present invention with this, be familiar with this technical field personage can understand spirit of the invention with it is right after principle
It changes or modifies and reaches equivalent purpose, and this equivalent change and modification, should all be covered by scope of the claims institute circle
Determine in scope.