CN206440616U - A kind of light path system for laser microprobe analytical instrument - Google Patents
A kind of light path system for laser microprobe analytical instrument Download PDFInfo
- Publication number
- CN206440616U CN206440616U CN201621484708.XU CN201621484708U CN206440616U CN 206440616 U CN206440616 U CN 206440616U CN 201621484708 U CN201621484708 U CN 201621484708U CN 206440616 U CN206440616 U CN 206440616U
- Authority
- CN
- China
- Prior art keywords
- laser
- module
- beam splitter
- image
- light path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The utility model belongs to laser accurate detection correlative technology field, and it discloses a kind of light path system for laser microprobe analytical instrument, the light path system includes spectra collection module and image-forming module.The light path system also includes laser control module, laser monitoring module and lighting module, and the spectra collection module, the laser control module, the laser monitoring module, the lighting module and the image-forming module are coaxially disposed.The laser control module is used to control laser energy and hot spot；The laser monitoring module is used to monitor laser energy in real time；The spectra collection module is used to gather plasma spectrum in real time；The lighting module is used to be illuminated testing sample surface, to ensure that the surface of the testing sample is high-visible；The image-forming module is used to be imaged the testing sample surface.The light path system realizes that stable spectral information collection is imaged with clearly surface simultaneously.
Description
Technical field
The utility model belongs to laser accurate detection correlative technology field, is used for laser microprobe more particularly, to one kind
The light path system of analytical instrument.
Background technology
Laser microprobe, also known as LIBS (Laser-induced breakdown spectroscopy,
Abbreviation LIBS), it is a kind of elemental analysis method.Laser microprobe produces plasma using laser in testing sample ablated surface
Body, then by analyzing measurement of the plasma emission spectroscopy realization to material element composition.The mistake moved towards the industrialization from scientific research
Cheng Zhong, laser microprobe needs a kind of ripe light path system, while stable spectra collection is ensured, obtains sample surfaces imaging
Information, allows users to be acquired the information in situ of sample surfaces ad-hoc location, it is ensured that visible i.e. gained.
At present, relevant technical staff in the field has done some and studied, such as Publication No. CN103267746B patent,
Publication No. CN101587074B patent, Authorization Notice No. individually disclose different laser for CN101587074B patent
Probe analyzer, laser microprobe analysis instrument disclosed above be integrated with laser microprobe spectrum analysis and coaxial sample surfaces into
The function of picture, is the representative instance of laser microprobe light path system.But all there is some following deficiency in examples detailed above：
1. the in-line illumination device without sample surfaces, for the sample that surface is smooth or color is dark, particularly exists
When microscopic analysis high power is imaged, it is difficult to ensure that sample surfaces are high-visible；
2. in imaging system, not accounting for filtering out laser, the laser of coaxial imaging process sample surfaces reflection holds very much
Easily image camera is damaged；
3. being adjusted in real time and monitoring system without laser energy, shaping acquisition can not be both carried out to laser facula and be more suitable for swashing
The light beam that light probe is used, can not also carry out real time correction, regulation and monitor to Laser Energy Change and attenuation effect；
4. not filtering out laser before spectral collector, the laser of sample surfaces reflection easily damages collecting fiber head.
Utility model content
For the disadvantages described above or Improvement requirement of prior art, the utility model provides a kind of for laser microprobe composition
The light path system of analyzer, its be integrated with laser control module, laser monitoring module, spectra collection module, lighting module and into
As five modules of module, laser energy and hot spot control can be realized simultaneously, laser energy is monitored in real time, plasma spectrometry is adopted
Collection, sample surfaces illumination, sample surfaces imaging function, are obtained while spectral information and the sample image information of realizing stabilization,
Meet modern industry application demand；Wherein laser control module, laser monitoring module, spectra collection module, lighting module and into
As five modules of module are coaxial, compact conformation in the optical path, multiple parts can realize multi-functional use.In addition, institute
State light path system and each parts have been carried out with lasing safety, improve the service life of parts.
To achieve the above object, the utility model provides a kind of light path system for laser microprobe analytical instrument,
It includes spectra collection module and image-forming module, it is characterised in that：
The light path system also includes laser control module, laser monitoring module and lighting module, the spectra collection mould
Block, the laser control module, the laser monitoring module, the lighting module and the image-forming module are coaxially disposed；
The laser control module is used to control laser energy and hot spot；The laser monitoring module, which is used to monitor in real time, to swash
Light energy, so that the laser control module carries out real time correction to Laser Energy Change and attenuation effect；The spectra collection
Module is used to gather plasma spectrum in real time；The lighting module is used to be illuminated testing sample surface, described to ensure
The surface of testing sample is high-visible；The image-forming module is used to be imaged the testing sample surface.
Further, the laser control module, the spectra collection module, the lighting module and the image-forming module
There are object lens jointly；The laser control module, the laser monitoring module, the lighting module and the image-forming module are common
With beam splitter；The laser control module and the image-forming module have laser mirror jointly；The lighting module and institute
State image-forming module has spectroscope jointly.
Further, the laser control module also includes laser, laser beam expanding lens, harmonic wave beam splitter, first laser
Window, first laser absorber, half-wave plate, polarizing beam splitter mirror, second laser window, second laser absorber, optical gate and diaphragm；
The first laser window is located between the harmonic wave beam splitter and the first laser absorber；The half-wave plate is located at described
In front of harmonic wave beam splitter；The second laser window is located between the polarizing beam splitter mirror and the second laser absorber；Institute
Laser mirror is stated to be located between the diaphragm and the beam splitter；The object lens are located at the beam splitter and the testing sample
Between.
Further, the half-wave plate is rotatable.
Further, the laser monitoring module also includes the first linear polarizer and laser energy meter, and the First Line is inclined
The piece that shakes is located between the beam splitter and the laser energy meter.
Further, the spectra collection module also includes the second linear polarizer, fibre-coupled mirrors, fibre-optical splice, optical fiber
And spectrometer, second linear polarizer is positioned between the beam splitter and the fibre-coupled mirrors；The fibre-coupled mirrors connect
It is connected to the fibre-optical splice；The optical fiber connects the fibre-optical splice and the spectrometer.
Further, the lighting module also includes LED/light source and illumination collimating mirror, and the illumination collimating mirror is located at described
The front of LED/light source.
Further, the image-forming module also includes eyepiece, the 3rd linear polarizer and camera, the 3rd linear polarizer position
In the front of the camera.
Further, the laser control module, the spectra collection module, the lighting module and the image-forming module
There are object lens jointly；The laser control module, the laser monitoring module, the lighting module and the image-forming module are common
With beam splitter；The laser control module and the image-forming module have laser mirror jointly；The lighting module and institute
State image-forming module has spectroscope jointly；The laser control module, the lighting module and the image-forming module have jointly
Broadband mirrors.
Further, the laser control module also includes laser, laser beam expanding lens, harmonic wave beam splitter, first laser
Window, first laser absorber, half-wave plate, polarizing beam splitter mirror, second laser window, second laser absorber, optical gate and diaphragm；
The first laser window is located between the first laser absorber and the harmonic wave beam splitter；The half-wave plate is located at described
In front of polarizing beam splitter mirror；The second laser window is located between the polarizing beam splitter mirror and the second laser absorber；Institute
Object lens are stated to be located between the beam splitter and the testing sample.
In general, by the contemplated above technical scheme of the utility model compared with prior art, the utility model
The light path system for laser microprobe analytical instrument provided, it is integrated with laser control module, laser monitoring module, spectrum
Acquisition module, five modules of lighting module and image-forming module, laser energy and hot spot control, laser energy reality can be realized simultaneously
When monitoring, plasma spectrometry collection, sample surfaces illumination, sample surfaces imaging function, realize stable spectral information and sample
Obtained while product image information, meet modern industry application demand；Wherein laser control module, laser monitoring module, spectrum
Acquisition module, five modules of lighting module and image-forming module are coaxial, compact conformation in the optical path, and multiple parts can be real
It is now multi-functional to use.In addition, the light path system has carried out lasing safety to each parts, the use longevity of parts is improved
Life.
Brief description of the drawings
Fig. 1 is making for the light path system for laser microprobe analytical instrument that the utility model first embodiment is provided
Use view.
Fig. 2 is the use shape for the light path system for laser analytical instrument that the utility model second embodiment is provided
State schematic diagram.
In all of the figs, identical reference is used for representing identical element or structure, wherein：1. laser；2.
Laser beam expanding lens；3. harmonic wave beam splitter；4. first laser window；5. first laser absorber；6. half-wave plate；7. polarization beam splitting
Mirror；8. second laser window；9. second laser absorber；10. optical gate；11. diaphragm；12. laser mirror；13. beam splitter；
14. object lens；15. testing sample；16. the first linear polarizer；17. laser energy meter；18. the second linear polarizer；19. fiber coupling
Mirror；20. fibre-optical splice；21. optical fiber；22. spectrometer；23. spectroscope；24. illuminate collimating mirror；25.LED light sources；It 26. is all-trans
Mirror；27. eyepiece；28. the 3rd linear polarizer；29. camera；30. broadband mirrors.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only to explain
The utility model, is not used to limit the utility model.In addition, institute in each embodiment of the utility model disclosed below
As long as the technical characteristic being related to does not constitute conflict and can be just mutually combined each other.
Referring to Fig. 1, the light path system for laser microprobe analytical instrument that the utility model first embodiment is provided
System, it includes laser 1, laser beam expanding lens 2, harmonic wave beam splitter 3, first laser window 4, first laser absorber 5, half-wave plate
6th, polarizing beam splitter mirror 7, second laser window 8, second laser absorber 9, optical gate 10, diaphragm 11, laser mirror 12, beam splitter
13rd, object lens 14, testing sample 15, the first linear polarizer 16, laser energy meter 17, the second linear polarizer 18, fibre-coupled mirrors 19,
Fibre-optical splice 20, optical fiber 21, spectrometer 22, spectroscope 23, illumination collimating mirror 24, LED/light source 25, total reflective mirror 26, eyepiece 27, the
Three linear polarizers 28 and camera 29, above-described parts have separately constituted laser control module, laser monitoring module, spectrum
Acquisition module, lighting module and image-forming module.In present embodiment, the laser control module, the laser monitoring module, institute
Spectra collection module, the lighting module and the image-forming module is stated to be coaxially disposed；The object lens 14 are the laser control
Molding block, the spectra collection module, the lighting module and the image-forming module have jointly；The beam splitter 13 is described
Laser control module, the laser monitoring module, the lighting module and the image-forming module have jointly；The laser reflection
Mirror 12 is that the laser control module and the image-forming module have jointly；The spectroscope 23 is the lighting module and described
Image-forming module has jointly.
The laser control module also includes the laser 1, the laser beam expanding lens 2, the harmonic wave beam splitter 3, institute
State first laser window 4, the first laser absorber 5, the half-wave plate 6, the polarizing beam splitter mirror 7, the second laser
Window 8, the second laser absorber 9, the optical gate 10 and the diaphragm 11.The laser beam expanding lens 2 are located at the laser
Between device 1 and the harmonic wave beam splitter 3；The first laser window 4 is located at the harmonic wave beam splitter 3 and the first laser is inhaled
Between acceptor 5；The half-wave plate 6 is located between the harmonic wave beam splitter 3 and the polarizing beam splitter mirror 7；The second laser window
Mouth 8 is located between the polarizing beam splitter mirror 7 and the second laser absorber 9；The optical gate 10 is located at the polarizing beam splitter mirror 7
And between the diaphragm 11；The laser mirror 12 is located between the diaphragm 11 and the beam splitter 13；The object lens 14
Between the beam splitter 13 and testing sample 15.In present embodiment, the laser 1 is Nd:YAG 2 subharmonic
The laser of 532nm wavelength.
The laser 1 is used to launch laser beam.The laser beam is after the laser 1 output, and the laser expands
Beam mirror 2 is used to expand the laser beam.The harmonic wave beam splitter 3 is used to make after expanding through the laser beam expanding lens 2
Laser light to enter in light path system, meanwhile, wavelength is through institute after 1064nm laser reflection by the harmonic wave beam splitter 3
State first laser window 4 and absorbed by the first laser absorber 5.Lead to through the 532nm laser beams of the harmonic wave beam splitter 3
The rotatable regulation of the half-wave plate 6 polarization direction is crossed, that is, adjusts the ratio of vertical polarization and horizontal polarisation component.Through described half
The vertical polarisation component of the laser beam after the regulation polarization of wave plate 6 passes through from the polarizing beam splitter mirror 7, and horizontal polarisation component is anti-
Penetrate and pass through the second laser window 8 and absorbed by the second laser absorber 9.The optical gate 10 is arranged at the polarization
The rear of beam splitter 7, the optical gate 10 is used for the break-make for controlling laser beam.The diaphragm 11 is arranged on after the optical gate 10
Side, the diaphragm 11 is used for the larger partial filtration of the hot spot periphery fluctuation of the laser beam.Place is filtered out through the diaphragm 11
After laser beam after reason reflects through the laser mirror 12 and the beam splitter 13 successively, institute is focused on by the object lens 14
State on the surface of testing sample 15, inspire plasma.
The laser monitoring module also includes the first linear polarizer 16 and laser energy meter 17, first linear polarizer 16
Between the beam splitter 13 and the laser energy meter 17.The laser beam portion passed through through the beam splitter 13 passes through institute
State the range of laser energy that the first linear polarizer 16 controlled and reached the laser energy meter 17.By monitoring laser energy in real time
Amount, can obtain the laser energy information corresponding to spectral signal each time, spectrum letter is made by computer spectral analysis software
Number fluctuation amendment, and energy adjustment is realized to eliminate laser energy attenuation effect by adjusting the half-wave plate 6.
The spectra collection module also include the second linear polarizer 18, fibre-coupled mirrors 19, fibre-optical splice 20, optical fiber 21 and
Spectrometer 22.The beam splitting is passed through after the collimation that the light of the surface plasma of testing sample 15 transmitting passes through the object lens 14
Mirror 13 and reach second linear polarizer 18, the laser of the surface of testing sample 15 reflection is in second linear polarizer
Filtered out at 18；Plasma optical signal can pass through second linear polarizer 18, and be coupled by the fibre-coupled mirrors 19
Enter at the fibre-optical splice 20；The plasma optical signal for being coupled to the fibre-optical splice 20 is conducted to enter by the optical fiber 21
Enter the spectrometer 22.
The lighting module also includes the LED/light source 25 and the illumination collimating mirror 24, the illumination collimating mirror 24
Between the LED/light source 25 and the spectroscope 23.The light that the LED/light source 25 is sent passes sequentially through the illumination collimating mirror
Enter after 24 collimations and the reflection of the spectroscope 23 in coaxial optical path, then pass sequentially through the beam splitter 13 and reflect and the object lens
14 focus on back lighting on the region to be measured on the surface of testing sample 15.
The image-forming module also includes the total reflective mirror 26, the eyepiece 27, the 3rd linear polarizer 28 and the phase
Machine 29, the total reflective mirror 26 is located between the eyepiece 27 and the spectroscope 23, and the 3rd linear polarizer 28 is located at described
Between eyepiece 27 and the camera 29.The light of the surface of testing sample 15 reflection passes sequentially through the object lens 14 and collimated and described
After beam splitter 13 reflects, the laser that most of wavelength is 532nm is filtered out through the laser mirror 12.Through the laser mirror
12 filter out processing after light pass through the spectroscope 23 after reflexed to by the total reflective mirror 26 up to the eyepiece 27, the eyepiece 27
Optical signal is imaged at the camera 29.3rd linear polarizer 28 is located between the eyepiece 27 and the camera 29,
For remaining laser is filtered out.
Referring to Fig. 2, the light path system for laser microprobe analytical instrument that the utility model second embodiment is provided
System, it includes laser 1, laser beam expanding lens 2, harmonic wave beam splitter 3, first laser window 4, first laser absorber 5, half-wave plate
6th, polarizing beam splitter mirror 7, second laser window 8, second laser absorber 9, optical gate 10, diaphragm 11, laser mirror 12, beam splitter
13rd, object lens 14, testing sample 15, the first linear polarizer 16, laser energy meter 17, the second linear polarizer 18, fibre-coupled mirrors 19,
Fibre-optical splice 20, optical fiber 21, spectrometer 22, spectroscope 23, illumination collimating mirror 24, LED/light source 25, total reflective mirror 26, eyepiece 27, the
Three linear polarizers 28, camera 29 and broadband mirrors 30.Above-described parts have separately constituted laser control module, laser
Monitoring modular, spectra collection module, lighting module and image-forming module.
It is the laser control module, the laser monitoring module, the spectra collection module, described in present embodiment
Lighting module and the image-forming module are coaxially disposed；The object lens 14 are the laser control module, the spectra collection
Module, the lighting module and the image-forming module have jointly；The beam splitter 13 be the laser control module, it is described swash
Light detection module, the lighting module and the image-forming module have jointly；The laser mirror 12 is the laser controlling
Module and the image-forming module have jointly；The spectroscope 23 is that the lighting module and the image-forming module have jointly；
The broadband mirrors 30 are that the laser control module, the lighting module and the image-forming module have jointly.
The laser control module also includes the laser 1, the laser beam expanding lens 2, the harmonic wave beam splitter 3, institute
State first laser window 4, the first laser absorber 5, the half-wave plate 6, the polarizing beam splitter mirror 7, the second laser
Window 8, the second laser absorber 9, the optical gate 10 and the diaphragm 11.In present embodiment, the laser 1 is
Nd:The laser of YAG 3 subharmonic 355nm wavelength.
The laser beam expanding lens 2 are located between the laser 1 and the diaphragm 11, and the optical gate 10 is located at the diaphragm
Between 11 and the harmonic wave beam splitter 3.The first laser window 4 is located at the first laser absorber 5 and the harmonic wave point
Between beam mirror 3.The half-wave plate 6 is located between the harmonic wave beam splitter 3 and the polarizing beam splitter mirror 7.The second laser window
Mouth 8 is located between the polarizing beam splitter mirror 7 and the second laser absorber 9.The laser mirror 12 is located at the polarization
Between beam splitter 7 and the broadband mirrors 30.The beam splitter 13 be located at the broadband mirrors 30 and the object lens 14 it
Between.The object lens 14 are located between the beam splitter 13 and testing sample 15.
The laser 1 is used to launch laser beam.The laser beam is after the laser 1 output, and the laser expands
Beam mirror 2 is used to expand the laser beam.The diaphragm 11 is used for the laser beam after being expanded through the laser beam expanding lens 2
The larger partial filtration of hot spot periphery fluctuation.The optical gate 10 is used to control leading to for the laser beam for passing through the laser beam expanding lens 2
It is disconnected.The harmonic wave beam splitter 3 is used to make by a length of 355nm of laser beam medium wave of the optical gate 10 laser light to enter light
In the system of road, meanwhile, the harmonic wave beam splitter 3 by wavelength for 1064nm and 532nm laser reflection after swash through described first
Light window 4 and absorbed by the first laser absorber 5.Through the harmonic wave beam splitter 3 355nm laser beams pass through it is rotatable
The regulation of the half-wave plate 6 polarization direction, that is, adjust the ratio of vertical polarization and horizontal polarisation component.Adjusted through the half-wave plate 6
The vertical polarisation component of the laser beam after section polarization passes through from the polarizing beam splitter mirror 7, and horizontal polarisation component reflection is simultaneously saturating
Cross the second laser window 8 and absorbed by the second laser absorber 9.Through the laser beam of the polarizing beam splitter mirror 7
It is poly- by the object lens 14 after being reflected successively through the laser mirror 12, the broadband mirrors 30 and the beam splitter 13
Jiao is on the surface of the testing sample 15 to inspire plasma.
The laser monitoring module also includes the first linear polarizer 16 and laser energy meter 17, first linear polarizer 16
Between the beam splitter 13 and the laser energy meter 17.The laser beam portion passed through through the beam splitter 13 passes through institute
State the range of laser energy that the first linear polarizer 16 controlled and reached the laser energy meter 17.By monitoring laser energy in real time
Amount, can obtain the laser energy information corresponding to spectral signal each time, spectrum letter is made by computer spectral analysis software
Number fluctuation amendment, and energy adjustment is realized to eliminate laser energy attenuation effect by adjusting the half-wave plate 6.
The spectra collection module also include the second linear polarizer 18, fibre-coupled mirrors 19, fibre-optical splice 20, optical fiber 21 and
Spectrometer 22.Second linear polarizer 18 is located between the beam splitter 13 and the fibre-coupled mirrors 19, and the optical fiber connects
First 20 are located between the fibre-coupled mirrors 19 and the optical fiber 21, and the optical fiber 21 connects the spectrometer 22 and the optical fiber
Joint 20.The beam splitter is passed through after the collimation that the light of the surface plasma of testing sample 15 transmitting passes through the object lens 14
13 and reach second linear polarizer 18, the laser of the surface of testing sample 15 reflection is in second linear polarizer 18
Place is filtered out；Plasma optical signal can pass through second linear polarizer 18, and be coupled into by the fibre-coupled mirrors 19
At the fibre-optical splice 20；The plasma optical signal for being coupled to the fibre-optical splice 20 is conducted to enter by the optical fiber 21
The spectrometer 22.
The lighting module also includes the illumination collimating mirror 24, the LED/light source 25 and the total reflective mirror 26.It is described to shine
Bright collimating mirror 24 be located between the LED/light source 25 and the total reflective mirror 26, the total reflective mirror 26 be located at the spectroscope 23 and
Between the illumination collimating mirror 24.The light that the LED/light source 25 is sent collimates through the illumination collimating mirror 24, described is all-trans successively
Mirror 26 reflect and the spectroscope 23 transmit after enter coaxial optical path in, the broadband mirrors 30 and institute are then passed sequentially through again
State beam splitter 13 reflect, the object lens 14 focus on back lighting on the region to be measured on the surface of testing sample 15.
The image-forming module also includes the eyepiece 27, the 3rd linear polarizer 28 and the camera 29, the described 3rd
Linear polarizer 28 be located between the eyepiece 27 and the spectroscope 23, the eyepiece 27 be located at the 3rd linear polarizer 28 and
Between the camera 29.The light of the surface of testing sample 15 reflection pass sequentially through the object lens 14 collimate, the beam splitter 13
After reflection and the broadband mirrors 30 reflect, the laser that most of wavelength is 355nm is filtered out through the laser mirror 12.Through
The laser mirror 12 filters out the light after processing after the spectroscope 23 reflection, and the light is through the 3rd linear polarizer 28
Filter out and the eyepiece 27 is reached after remaining laser, optical signal is imaged by the eyepiece 27 at the camera 29.
In present embodiment, multiple parts can realize it is multi-functional use, such as：1. the object lens 14 are in laser control module
In effect be to focus on laser facula, the effect in spectra collection module be by the luminous parallelization of plasma, shine
Effect in bright module is that illumination light is focused on into testing sample desired zone, and effect is to assume responsibility for microscope in image-forming module
The function of middle object lens；2. effect of the laser mirror 12 in laser control module is that laser beam is expeditiously anti-
Penetrate, the effect in image-forming module be the laser for reflecting sample surfaces filter out prevent damage camera；3. the beam splitter 13 exists
Effect in laser control module is reflection laser light beam, and the effect in laser measurement module is that fetching portion laser beam is used
In measurement, the effect in lighting module be indirect illumination light to sample surfaces, the effect in image-forming module is reflected sample
Surface light is to camera.
In present embodiment, the light path system has carried out lasing safety to each parts, such as 1. laser control module
In, laser window is provided with before 2 laser absorption bodies, to prevent laser goes out particle in absorber surface ablation from flying away attachment
On the mirror；2. in spectra collection module, linear polarizer is provided with before fibre-coupled mirrors, prevents what is reflected from sample surfaces
Laser focuses on infringement fibre-optical splice by fibre-coupled mirrors；3. in image-forming module, it is anti-that the light on testing sample surface first passes through laser
Penetrate mirror and filter out most laser, then remaining laser is filtered out by linear polarizer, to protect camera.
The light path system for laser microprobe analytical instrument that the utility model is provided, it is integrated with laser controlling mould
Block, laser monitoring module, spectra collection module, five modules of lighting module and image-forming module, laser energy can be realized simultaneously
Monitored in real time with hot spot control, laser energy, plasma spectrometry is gathered, sample surfaces are illuminated, sample surfaces imaging function, real
Obtained while the spectral information and sample image information now stablized, meet modern industry application demand；Wherein laser controlling mould
Block, laser monitoring module, spectra collection module, five modules of lighting module and image-forming module are coaxial, structure in the optical path
Compact, multiple parts can realize multi-functional use.Prevent in addition, the light path system has carried out laser to each parts
Shield, improves the service life of parts.
As it will be easily appreciated by one skilled in the art that the foregoing is only preferred embodiment of the present utility model, not
To limit the utility model, all any modifications made within spirit of the present utility model and principle, equivalent substitution and change
Enter, should be included within protection domain of the present utility model.
Claims (10)
1. a kind of light path system for laser microprobe analytical instrument, it includes spectra collection module and image-forming module, and it is special
Levy and be：
The light path system also includes laser control module, laser monitoring module and lighting module, the spectra collection module, institute
Laser control module, the laser monitoring module, the lighting module and the image-forming module is stated to be coaxially disposed；
The laser control module is used to control laser energy and hot spot；The laser monitoring module is used to monitor laser energy in real time
Amount, so that the laser control module carries out real time correction to Laser Energy Change and attenuation effect；The spectra collection module
For gathering plasma spectrum in real time；The lighting module is used to be illuminated testing sample surface, described to be measured to ensure
The surface of sample is high-visible；The image-forming module is used to be imaged the testing sample surface.
2. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 1, it is characterised in that：The laser control
Molding block, the spectra collection module, the lighting module and the image-forming module have object lens jointly；The laser controlling mould
Block, the laser monitoring module, the lighting module and the image-forming module have beam splitter jointly；The laser control module
And the image-forming module has laser mirror jointly；The lighting module and the image-forming module have spectroscope jointly.
3. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 2, it is characterised in that：The laser control
Molding block also include laser, laser beam expanding lens, harmonic wave beam splitter, first laser window, first laser absorber, half-wave plate,
Polarizing beam splitter mirror, second laser window, second laser absorber, optical gate and diaphragm；The first laser window is located at described humorous
Between ripple beam splitter and the first laser absorber；The half-wave plate is located in front of the polarizing beam splitter mirror；Described second swashs
Light window is located between the polarizing beam splitter mirror and the second laser absorber；The object lens are located at the beam splitter and described
Between testing sample.
4. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 3, it is characterised in that：The half-wave plate
It is rotatable.
5. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 3, it is characterised in that：The laser prison
Surveying module also includes the first linear polarizer and laser energy meter, and first linear polarizer is located at the beam splitter and the laser
Between energy meter.
6. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 3, it is characterised in that：The spectrum is adopted
Collecting module also includes the second linear polarizer, fibre-coupled mirrors, fibre-optical splice, optical fiber and spectrometer, the second linear polarizer position
Between the beam splitter and the fibre-coupled mirrors；The fibre-coupled mirrors are connected to the fibre-optical splice；The optical fiber connects
Connect the fibre-optical splice and the spectrometer.
7. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 3, it is characterised in that：The illumination mould
Block also includes LED/light source and illumination collimating mirror, and the illumination collimating mirror is located in front of the LED/light source.
8. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 3, it is characterised in that：The imaging mould
Block also includes eyepiece, the 3rd linear polarizer and camera, and the 3rd linear polarizer is located in front of the camera.
9. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 1, it is characterised in that：The laser control
Molding block, the spectra collection module, the lighting module and the image-forming module have object lens jointly；The laser controlling mould
Block, the laser monitoring module, the lighting module and the image-forming module have beam splitter jointly；The laser control module
And the image-forming module has laser mirror jointly；The lighting module and the image-forming module have spectroscope jointly；Institute
State laser control module, the lighting module and the image-forming module has broadband mirrors jointly.
10. it is used for the light path system of laser microprobe analytical instrument as claimed in claim 9, it is characterised in that：The laser
Control module also includes laser, laser beam expanding lens, harmonic wave beam splitter, first laser window, first laser absorber, half-wave
Piece, polarizing beam splitter mirror, second laser window, second laser absorber, optical gate and diaphragm；The first laser window is located at described
Between first laser absorber and the harmonic wave beam splitter；The half-wave plate is located in front of the harmonic wave beam splitter；Described second
Laser window is located between the polarizing beam splitter mirror and the second laser absorber；The laser mirror is located at the polarization
Between beam splitter and the broadband mirrors；The beam splitter is located between the broadband mirrors and the object lens；The thing
Mirror is located between the beam splitter and the testing sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621484708.XU CN206440616U (en) | 2016-12-31 | 2016-12-31 | A kind of light path system for laser microprobe analytical instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621484708.XU CN206440616U (en) | 2016-12-31 | 2016-12-31 | A kind of light path system for laser microprobe analytical instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206440616U true CN206440616U (en) | 2017-08-25 |
Family
ID=59642279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621484708.XU Active CN206440616U (en) | 2016-12-31 | 2016-12-31 | A kind of light path system for laser microprobe analytical instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206440616U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645097A (en) * | 2016-12-31 | 2017-05-10 | 华中科技大学 | Optical path system for laser probe component analyzer |
| CN114152195A (en) * | 2021-11-29 | 2022-03-08 | 中国工程物理研究院计量测试中心 | Dual-wavelength common-path laser interference measurement device and method |
| CN114660047A (en) * | 2022-03-15 | 2022-06-24 | 中国工程物理研究院材料研究所 | Full-spectrum coaxial optical lens barrel |
-
2016
- 2016-12-31 CN CN201621484708.XU patent/CN206440616U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645097A (en) * | 2016-12-31 | 2017-05-10 | 华中科技大学 | Optical path system for laser probe component analyzer |
| CN114152195A (en) * | 2021-11-29 | 2022-03-08 | 中国工程物理研究院计量测试中心 | Dual-wavelength common-path laser interference measurement device and method |
| CN114152195B (en) * | 2021-11-29 | 2024-04-19 | 中国工程物理研究院计量测试中心 | Dual-wavelength common-path laser interferometry device and method |
| CN114660047A (en) * | 2022-03-15 | 2022-06-24 | 中国工程物理研究院材料研究所 | Full-spectrum coaxial optical lens barrel |
| CN114660047B (en) * | 2022-03-15 | 2023-10-27 | 中国工程物理研究院材料研究所 | Full spectrum coaxial optical lens cone |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103743718B (en) | The burnt microscopic Raman of copolymerization and Laser-induced Breakdown Spectroscopy coupling laser spectral analysis instrument | |
| CN203606288U (en) | Confocal micro-raman and laser-induced breakdown spectroscopy combined laser spectrum analysis meter | |
| CN105388140B (en) | Measuring instrument for site invisible fingerprint display and contained substance thereof | |
| CN104677885B (en) | High-space resolution laser differential confocal spectrum mass spectrum micro imaging method and device | |
| CN107561059A (en) | Multi-wavelength line scans Raman spectrometer | |
| CN109765213B (en) | Coherent anti-stokes raman scattering microscope imaging device | |
| CN106441571A (en) | Light source module and line scanning multispectral imaging system using the same | |
| CN206440616U (en) | A kind of light path system for laser microprobe analytical instrument | |
| CN107192702B (en) | Spectroscopic pupil laser confocal CARS (coherent anti-Raman scattering) microspectroscopy testing method and device | |
| CN103487146A (en) | Ultra wide band stimulated raman spectroscopy microscopic imaging system simple and convenient to use | |
| CN103196879A (en) | Laser-induced fluorescence spectrum detection device | |
| CN102589684A (en) | Infrared laser measurement image surface alignment device | |
| CN106645078A (en) | LIBS (laser-induced breakdown spectroscopy)-Raman combined underwater in-situ detection device and detection method | |
| CN105628671A (en) | Apparatus and method for obtaining Raman scattering spectrum | |
| CN107782718A (en) | Portable laser induced breakdown spectroscopy analytical equipment | |
| CN104568899A (en) | Portable raman spectrometer | |
| CN106872442A (en) | A kind of MEMS Miniature Raman spectrometers | |
| CN107037031A (en) | The confocal CARS micro-spectrometers method and device of reflection type differential | |
| CN206248212U (en) | A kind of light source module and the line scanning multi-optical spectrum imaging system using it | |
| CN104697967B (en) | High-space resolution laser twin shaft confocal spectroscopic mass spectrum micro imaging method and device | |
| CN203164121U (en) | Laser-induced fluorescence spectrum detection device | |
| US11536609B2 (en) | Multi-excitation wavelength spectrometer fluorescence laser radar system | |
| CN106645097A (en) | Optical path system for laser probe component analyzer | |
| CN112798556B (en) | Non-collinear time-resolved pumping-detecting device and method for infrared and frequency spectrum | |
| CN104502067A (en) | Relative diffraction efficiency tester for Fourier transformation plane grating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Li Xiangyou Inventor after: Li Jiaming Inventor after: Xiong Foguan Inventor after: Zhu Zhihao Inventor after: Hao Zhongqi Inventor after: Shen Meng Inventor after: Guo Lianbo Inventor after: Zeng Xiaoyan Inventor before: Li Xiangyou Inventor before: Li Jiaming Inventor before: Xiong Foguan Inventor before: Zhu Zhihao Inventor before: Hao Zhongqi Inventor before: Shen Meng Inventor before: Guo Lianbo Inventor before: Zeng Xiaoyan Inventor before: Lu Yongfeng |