CN114660047B - Full spectrum coaxial optical lens cone - Google Patents
Full spectrum coaxial optical lens cone Download PDFInfo
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- CN114660047B CN114660047B CN202210250278.9A CN202210250278A CN114660047B CN 114660047 B CN114660047 B CN 114660047B CN 202210250278 A CN202210250278 A CN 202210250278A CN 114660047 B CN114660047 B CN 114660047B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
Abstract
The invention relates to a full spectrum coaxial optical lens barrel, comprising: the device comprises an objective lens, a first spectroscope cube, a second spectroscope cube, an imaging module, an illumination light source module and a spectrum focusing module; the objective lens, the first spectroscope cube and the second spectroscope cube are sequentially arranged along the same optical axis to form a light path channel; the laser is cubic incident through the second beam splitter; 45-degree spectroscopes are arranged in the second spectroscope cube and the first spectroscope cube; the spectrum focusing module is arranged on a spectrum output light path of the first spectroscope cube; the illumination light source module is one or more of a first illumination light source module, a second illumination light source module or a third illumination light source module; the imaging module is arranged on the image light output light path of the second beam splitter cube; the imaging module comprises an imaging lens, a lens barrel and a camera which are sequentially arranged. The invention can solve the problems of high accuracy requirement and frequent switching of the spectroscope switching mechanism while maintaining the advantages of full spectrum and high sensitivity of the existing coaxial design.
Description
Technical Field
The invention relates to the technical field of laser spectrum analysis, in particular to a full-spectrum coaxial optical lens barrel.
Background
The laser-induced breakdown spectroscopy (LIBS) technology is based on an atomic emission spectroscopy analysis principle, focuses a pulse laser beam on the surface of a sample, ablates substances to generate luminous plasmas, and obtains the element components and the content of the substances by analyzing the atomic, ionic and molecular spectrums emitted by the plasmas. The LIBS technology has the advantages of capability of analyzing all elements including hydrogen, capability of analyzing non-conductive and refractory materials, high analysis speed, no need of vacuum and the like, and is a novel analysis technology with important application value. Micro-area laser-induced breakdown spectroscopy (micro laser-induced breakdown spectroscopy, abbreviated as micro-area LIBS) focuses laser by adopting a micro-objective lens, and besides the advantages, the spatial resolution is improved to 3-50 mu m, and the depth resolution is of submicron level, so that the method is a novel surface component analysis method with unique advantages.
The optical system is the main body and the core of the micro-area LIBS system and generally consists of three functional modules of optical imaging, laser focusing and spectrum collection. The optical imaging module is actually an optical microscope, and has the functions of observing the surface image of the sample, and searching and aiming at the area to be analyzed; the laser focusing module is used for ablating substances in a region to be analyzed and generating luminous plasmas; the spectrum collection module is used for collecting plasma emission spectrum signals and sending the signals to the spectrometer for analysis through the optical fiber. The integrated design of the three modules is the key of the design of the micro-area LIBS optical system.
In the integrated design of the three modules, the optical imaging and the laser focusing module are generally in a coaxial design, the two modules share the optical axis of the objective lens, and a 45-degree spectroscope is adopted behind the objective lens to separate the two optical paths. The spectrum collection module is integrated by a paraxial design and a coaxial design. Most of the existing micro-area LIBS systems adopt a simple paraxial design, namely, a spectrum collection module has an independent oblique incidence light path. The paraxial design has the advantages that the spectrum range is not limited, and the paraxial design is simple and easy to realize full spectrum work; but the disadvantages are vibration sensitivity, occupation of sample space below the objective lens, small depth of field, and general system stability. In the coaxial design, a spectrum collection module is integrated with an optical imaging and laser focusing module, and the three share an objective optical axis; two 45-degree spectroscopes are adopted behind the objective lens to separate the three light paths one by one. The coaxial design has the advantages of better stability, no shielding below the objective lens, capability of using an objective lens with larger numerical aperture, and the like; however, the disadvantage is that there is wavelength competition among the three optical paths, and it is difficult to realize full spectrum analysis. Thus, the search solution improves the coaxial design shortcomings, which is beneficial to promote the performance improvement of the micro-area LIBS.
The existing multi-spectroscope full-spectrum high-sensitivity coaxial optical lens barrel comprises a first multi-spectroscope cube, a reflective objective lens, a second multi-spectroscope cube, an off-axis reflector module and an imaging module with an illumination function; the reflective objective lens, the first multi-spectroscope cube and the second multi-spectroscope cube are sequentially connected along a vertical upward optical axis, and a light path channel penetrating the three is formed; the first multi-spectroscope cube comprises at least two switchable spectroscopes, and is used for reflecting incident laser to the reflective objective lens and transmitting light rays from the reflective objective lens to the second multi-spectroscope cube; the sum of the transmission bands of at least two spectroscopes in the first multi-spectroscope cube can completely cover the full spectrum range of UV-VIS-NIR; the second multi-spectroscope cube is used for separating a spectrum signal light path and an image signal light path; the off-axis reflector module is connected with the second multi-spectroscope cube and is positioned on a spectrum signal light path of the second multi-spectroscope cube and used for focusing spectrum signals and coupling the spectrum signals into an external optical fiber; the imaging module with the illumination function is connected with the second multi-spectroscope and is positioned on an image signal light path of the imaging module and used for illuminating and observing the surface of a sample. The coaxial design scheme enables one set of light path to completely cover the full spectral range of UV-VIS-NIR by switching the first multi-spectroscope cube and the second multi-spectroscope cube. The coaxial scheme preliminarily realizes the combination of full spectrum, high luminous flux and high spatial resolution, but still has the defects.
The coaxial optical lens barrel scheme adopts a time division multiplexing mode to separate the spectrum and the image light path at the second multi-spectroscope cube, and the second multi-spectroscope cube is required to be frequently switched in operation although the two can reach the optimal transmittance. The first multi-spectroscope cube adopts a light splitting mode of reflecting laser, transmitting spectrum and images, and because the laser is positioned on a reflecting light path and the direction of the reflecting laser is very sensitive to the angle error of the spectroscope, the spectroscope switching mechanism of the first spectroscope cube is required to have high repetition precision. Further, since it is difficult to manufacture a dichroic mirror that reflects infrared light and transmits ultraviolet light at present, the coaxial optical barrel is preferably used with ultraviolet wavelength laser light. Although the diffraction limit of the ultraviolet laser is lower and the ablation performance is better, the existing ultraviolet laser is generally obtained by frequency doubling of the infrared fundamental frequency laser for multiple times, and has the disadvantages of light beam quality, energy and stability and higher cost.
Disclosure of Invention
The invention aims to provide a full-spectrum coaxial optical lens barrel, which solves the problems of high accuracy requirement and frequent switching of a spectroscope switching mechanism while maintaining the advantages of full spectrum and high sensitivity of the existing coaxial design.
In order to achieve the above object, the present invention provides the following solutions:
a full spectrum coaxial optical barrel comprising: the device comprises an objective lens, a first spectroscope cube, a second spectroscope cube, an imaging module, an illumination light source module and a spectrum focusing module; the objective lens, the first spectroscope cube and the second spectroscope cube are sequentially arranged along the same optical axis to form a light path channel;
the laser light is cubic incident through the second beam splitter; the second beam splitter cube is internally provided with a 45-degree beam splitter, and the 45-degree beam splitter in the second beam splitter cube is used for reflecting laser and transmitting image light or transmitting laser and reflecting image light; a 45-degree spectroscope is arranged in the first spectroscope cube, and the 45-degree spectroscope in the first spectroscope cube is used for transmitting laser and reflecting spectrum light; the spectrum focusing module is arranged on a spectrum output light path of the first spectroscope cube and is used for focusing spectrum light and coupling the spectrum light into an external optical fiber or an external spectrometer;
the illumination light source module is one or more of a first illumination light source module, a second illumination light source module or a third illumination light source module; the illumination light source module is used for providing an illumination light source;
the imaging module is arranged on an image light output light path of the second beam splitter cube; the imaging module comprises an imaging lens, a lens barrel and a camera which are sequentially arranged; the imaging lens is used for receiving the image light rays; at least one of the imaging lens and the lens barrel has a focusing function; the imaging module is used for generating a sample surface topography image.
Optionally, a 45 degree beam splitter within the first beam splitter cube is mounted on a sliding rail; the sliding guide rail is used for taking out and replacing the 45-degree spectroscope from the light-blocking side face of the first spectroscope cube; the 45-degree spectroscope in the first spectroscope cube is provided with a plurality of pieces, and the optical thickness and the coating surface position of the 45-degree spectroscope in each first spectroscope cube are the same; the first spectroscope cube realizes total spectral reflection in times by replacing the 45-degree spectroscope in the first spectroscope cube.
Optionally, the system further comprises a bandpass filter, wherein the bandpass filter is arranged between the second beam-splitting cube and the imaging module and is used for filtering the image light transmitted by the second beam-splitting cube; the 45-degree spectroscope in the first spectroscope cube is mutually perpendicular to the 45-degree spectroscope in the second spectroscope cube so as to eliminate the offset of the first spectroscope cube and the second spectroscope cube to the transmitted light.
Optionally, the spectral focusing module comprises an off-axis reflector and an optical fiber interface; the optical fiber interface is arranged at the focus of the off-axis reflector; the off-axis reflector is used for focusing the spectrum light rays reflected by the first spectroscope cube.
Optionally, the first illumination light source module comprises a light source, a light source focusing mirror and a third spectroscope cube which are sequentially connected;
the third spectroscope cube is arranged between the first spectroscope cube and the spectrum focusing module; or the third spectroscope cube is arranged between the second spectroscope cube and the imaging module;
the light source is used for providing an illumination light source for the sample.
Optionally, the second illumination light source module includes a plurality of first light source assemblies; the plurality of first light source assemblies are arranged on the focal plane of the spectrum focusing module, and the plurality of first light source assemblies are arranged around the focal point of the spectrum focusing module; the first light source assembly is configured to provide an illumination source for the sample.
Optionally, the third illumination light source module includes a plurality of second light source assemblies; a plurality of the second light source modules are arranged around the objective lens; the second light source assembly is configured to provide an illumination light source for the sample.
Optionally, the air collecting hood is also included; the gas collecting hood comprises a circular pipe and a hollow circular table; the circular tube is connected with the optical lens cone; the optical lens barrel is a lens barrel provided with the objective lens; the lower bottom surface of the hollow round table is connected with the round tube; the diameter of the upper bottom surface of the hollow round table is smaller than that of the lower bottom surface; the height of the gas-collecting hood is smaller than the focal length of the objective lens.
Optionally, the laser is an infrared wavelength fundamental laser.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
according to the invention, an objective lens, a first spectroscope cube and a second spectroscope cube are sequentially arranged along the same optical axis to form a light path channel; the laser is cubic incident through the second beam splitter; a 45-degree spectroscope is arranged in the second spectroscope cube, and the 45-degree spectroscope in the second spectroscope cube is used for reflecting laser and transmitting image light or transmitting laser and reflecting image light; a 45-degree spectroscope is arranged in the first spectroscope cube, and the 45-degree spectroscope in the first spectroscope cube is used for transmitting laser and reflecting spectrum light; the spectrum focusing module is arranged on a spectrum output light path of the first spectroscope cube and is used for focusing spectrum light and coupling the spectrum light into an external optical fiber or an external spectrometer; the illumination light source module is one or more of a first illumination light source module, a second illumination light source module or a third illumination light source module; the illumination light source module is used for providing an illumination light source; the imaging module is arranged on the image light output light path of the second beam splitter cube; the imaging module comprises an imaging lens, a lens barrel and a camera which are sequentially arranged; the imaging lens is used for receiving image light; at least one of the imaging lens and the lens barrel has a focusing function; the imaging module is used for generating a sample surface topography image. The invention solves the problems of high accuracy requirement and frequent switching of the spectroscope switching mechanism while maintaining the advantages of full spectrum and high sensitivity of the existing coaxial design.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a full spectrum coaxial optical lens barrel according to embodiment 1 of the present invention;
fig. 2 is a schematic structural diagram of a full spectrum coaxial optical lens barrel according to embodiment 2 of the present invention;
fig. 3 is a schematic structural diagram of a full spectrum coaxial optical lens barrel according to embodiment 3 of the present invention;
fig. 4 is a schematic structural diagram of a full spectrum coaxial optical lens barrel according to embodiment 4 of the present invention;
fig. 5 shows an implementation effect of an imaging module of the full spectrum coaxial optical lens barrel according to embodiment 1 of the present invention;
fig. 6 shows an implementation effect of an imaging module of the full spectrum coaxial optical barrel according to embodiment 4 of the present invention.
Symbol description:
1-an objective lens; 2-a first spectroscope cube; 3-a second beam splitter cube; a 4-imaging module; a 5-spectral focusing module; 6-an illumination source; 7-an optical filter module; 8-an imaging lens; 9-camera; 10-optical fiber interface; 11-a gas collecting hood; 12-an objective lens mount; 13-third spectroscopic cube.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Example 1
The invention provides a full-spectrum coaxial optical lens barrel which is convenient to use infrared fundamental frequency laser, has low requirements on accuracy of a spectroscope switching mechanism, does not need frequent switching, integrates an atmosphere protection device and is convenient to analyze oversized special-shaped pieces, and the defects that the coaxial optical design for the existing micro-area LIBS is suitable for using ultraviolet laser, has high requirements on spectroscope switching accuracy, is frequent to switch, can provide specific analysis atmosphere and the like.
As shown in fig. 1, the full spectrum coaxial optical lens barrel provided by the present invention includes: an objective lens 1, a first beam splitter cube 2, a second beam splitter cube 3, an imaging module 4, a spectrum focusing module 5 and an illumination light source module. The objective lens 1 is mounted on an objective lens mount 12. The objective lens 1, the first spectroscope cube 2 and the second spectroscope cube 3 are sequentially arranged on the same optical axis to form an optical path channel. Laser light is incident through the second beam splitter cube 3; the second beam splitter cube 3 is internally provided with a 45-degree beam splitter, and the 45-degree beam splitter in the second beam splitter cube 3 is used for reflecting laser and transmitting image light or transmitting laser and reflecting image light. The first spectroscope cube 2 is internally provided with a 45-degree spectroscope, and the 45-degree spectroscope in the first spectroscope cube 2 is used for transmitting laser and reflecting spectrum light. The spectrum focusing module 5 is arranged on a spectrum output light path of the first spectroscope cube 2, and is used for focusing spectrum light and coupling the spectrum light into an external optical fiber or an external spectrometer. The imaging module 4 is arranged on an image light output light path of the second beam splitter cube 3; the imaging module 4 comprises an imaging lens 8, a lens barrel and a camera 9 which are sequentially arranged; the imaging lens 8 is used for receiving the image light rays; at least one of the imaging lens 8 and the lens barrel has a focusing function; the imaging module 4 is used for generating a sample surface topography image. The illumination light source module is one or more of a first illumination light source module, a second illumination light source module or a third illumination light source module; the illumination light source module is used for providing an illumination light source.
In practical application, the 45-degree spectroscope in the first spectroscope cube 2 is arranged on the sliding guide rail; the sliding guide rail is used for taking out and replacing the 45-degree spectroscope from the light-blocking side surface of the first spectroscope cube 2; the 45-degree spectroscope in the first spectroscope cube 2 is provided with a plurality of pieces, and the optical thickness and the coating surface position of the 45-degree spectroscope in each first spectroscope cube 2 are the same; the first spectroscope cube 2 realizes total spectral reflection in times by replacing the 45-degree spectroscope in the first spectroscope cube 2. More specifically, the first spectroscope cube 2 needs to configure different specification 45 degree spectroscopes for different wavelength ranges. In general, to analyze the laser wavelength and its neighbor wavelength range spectrum, a partial mirror is configured; configuring a laser line dichroic mirror or a long-wave-pass dichroic mirror for analyzing a spectrum shorter than the laser wavelength; for analysis of the longer-than-laser wavelength spectrum, a laser line dichroic mirror or a short-pass dichroic mirror is provided.
The spectrum focusing module 5 comprises an off-axis reflector and an optical fiber interface; the optical fiber interface is arranged at the focus of the off-axis reflector; the off-axis reflector is used for focusing the spectrum light rays reflected by the first spectroscope cube. The spectrum focusing module 5 comprises a broadband focusing mirror, and a standard optical fiber interface 10 is arranged at the focus of the broadband focusing mirror and is used for installing an external optical fiber; the spectrum focusing module 5 functions to focus the spectrum light to its focal point, couple into an external optical fiber and output a spectrum signal. When the off-axis reflector with the surface plated with the ultraviolet enhancement aluminum film is used as a broadband focusing mirror, one reflecting surface can finish reflection focusing of the UV-VIS-NIR full spectrum, the reflectivity is as high as 85% -90%, and the reflection is not influenced by chromatic aberration.
The second beam splitter cube 3 has two modes of operation. The second beam splitter cube 3 can work in a beam splitting mode of reflecting laser and transmitting image light, and a 45-degree beam splitter in the second beam splitter cube 3 selects a laser line reflecting mirror or a 45-degree dichroic mirror; the second dichroic cube 3 may also operate in the form of transmitted laser, reflected image light, where a 45 degree dichroic mirror is selected for the 45 degree dichroic mirror within the second dichroic cube 3. In this embodiment, the second dichroic cube 3 operates in a reflective laser, transmissive image light splitting mode. When the laser wavelength notch dichroic mirror is used, the reflectivity of the laser wavelength is up to 98 percent, and the transmissivity of the image light is up to 90-95 percent. To further optimize the function of the second dichroic cube 3, the 45 degree dichroic mirrors within the second dichroic cube 3, the first dichroic cube 2 are designed to be of equal optical thickness and are arranged in a mutually perpendicular manner such that the two offset to the transmitted light cancel each other.
The imaging module 4 is positioned on the image light emergent light path of the second beam splitter cube 3 and is tightly connected with the image light emergent light path; the imaging module 4 mainly comprises an imaging lens, a lens barrel and a camera 9; the imaging lens focuses the image light to the focal plane of the camera 9 to generate a sample surface morphology image; the lens cone is a focusing lens cone, and the focusing lens cone is used for accurate focusing. Two further improvements are made in order to optimize the function of the imaging module 4. The adjustable lens cone in the imaging module 4 is in a right-angle structure, and a 45-degree reflecting mirror with a plurality of adjusting knobs at the back is arranged at the right angle, so that the functions of accurately translating the image position in the focal plane of the camera 9 and folding the lens cone length to enable the structure to be more compact are realized; between the imaging module 4 and the second dichroic cube 3, a filter module 7 is inserted, and a bandpass filter is provided in the filter module 7, and functions to allow only image light of a specified wavelength range to pass through and enter the imaging module 4, so as to improve image quality. The implementation effect of the imaging module in this embodiment is shown in fig. 5.
In practical application, the full spectrum coaxial optical lens barrel further comprises a gas collecting hood 11; the gas-collecting hood 11 comprises a circular tube and a hollow circular truncated cone; the circular tube is connected with the optical lens cone; the optical barrel is a barrel in which the objective lens 1 is provided; the lower bottom surface of the hollow round table is connected with the round tube; the diameter of the upper bottom surface of the hollow round table is smaller than that of the lower bottom surface; the height of the gas-collecting hood 11 is smaller than the focal length of the objective 1. The periphery of the objective lens 1 is provided with a detachable gas collecting hood 11; the main body of the gas collecting hood 11 is of a semi-closed tubular structure, and an objective lens 1 can be accommodated in the gas collecting hood; the upper part is connected with the optical lens cone main body through threads, the lower part is a conical structure with an opening at the top, the opening height is above the focal point of the objective lens 1, and the diameter of the opening is larger than the light-transmitting caliber of the objective lens 1 at the height; after the external air source is connected, the air collecting hood 11 can purge specific air flows to the focal point of the objective lens 1 from top to bottom, and the functions of the air collecting hood include providing local protective atmosphere for LIBS analysis and preventing dust generated in LIBS analysis from back sputtering and polluting the objective lens 1.
The invention has the best implementation effect when using infrared fundamental frequency laser, such as typical 1064nm laser. Since the infrared fundamental frequency laser wavelength is located at the edge or periphery of the UV-VIS-NIR region, it is rarely used in LIBS analysis, so the 45-degree spectroscope combination of the first spectroscope cube 2 can be flexibly designed according to application requirements, so that one spectroscope can meet main and common analysis requirements, and therefore the 45-degree spectroscope of the first spectroscope cube 2 does not need to be frequently switched. In addition, compared with ultraviolet laser, the infrared fundamental frequency laser has simple structure and better beam quality and stability. For example, when using 1064nm infrared fundamental frequency laser, the first spectroscope cube 2 is configured with 2 long-wave-pass dichroic mirrors, so that the sum of reflection bands covers the full spectrum range, the reflection band reflectivity is >90%, the transmission band transmissivity is >90%, and the common spectrum analysis requirement can be met by easily realizing 1 long-wave-pass dichroic mirror.
The illumination light source module of the embodiment is a first illumination light source module, and the first illumination light source module comprises an illumination light source 6, a light source focusing mirror and a third spectroscope cube 13 which are sequentially connected; the third spectroscopic cube 13 is arranged between the first spectroscopic cube 2 and the spectral focusing module 5. The third spectroscope cube 13 transmits the spectrum light and reflects the illumination light, has a high-precision spectroscope quick replacement or switching mechanism, is provided with a plurality of 45-degree spectroscopes with equal optical thickness and consistent specification, and the sum of the high-transmission wavelength ranges of the spectroscopes covers the UV-VIS-NIR full spectrum range and has partial reflectivity at least to a certain wavelength in the working wavelength range of the camera 9. The illumination source 6 is used to provide an illumination source for the sample. The illumination light emitted by the illumination light source 6 is converged by the light source focusing lens, reflected by the third spectroscope cube 13, reflected by the first multi-spectroscope and focused by the objective lens 1 to illuminate the surface of the sample; the spectrum light rays emitted by the first spectroscope cube 2 are transmitted by the third spectroscope cube 13 and then enter the spectrum focusing module 5.
The invention is characterized in that a light splitting mode of transmission laser and reflection spectrum is adopted, and the combination of the conventional long-wave-pass dichroic mirror and infrared fundamental frequency laser is easy to realize. Common fundamental laser wavelengths, such as 1064nm, are outside the boundaries of the UV-VIS-NIR spectral region and LIBS analysis is rarely used; with a long-pass dichroic mirror having a high reflectivity for short wavelengths and a high transmissivity for long wavelengths, 2 sheets can cover the UV-VIS-NIR region. Because the laser is positioned on the transmission light path of the switchable spectroscope and is insensitive to switching errors, the precision requirement of the spectroscope switching mechanism is reduced. The imaging function can be realized by utilizing the residual transmittance of the reflection band of the long-wave-path dichroic mirror, and the imaging optical path and the spectrum optical path have no wavelength competition. The above measures make the design of the spectroscope very flexible, and can design the spectroscope combination according to the analysis requirement, so that one spectroscope in the combination can meet the main and common analysis requirements, thereby greatly reducing the switching frequency of the spectroscope. For example, the first spectroscopic cube 2 may include two long-wavelength dichroic mirrors having reflection bands covering 190 to 590nm and 580 to 1000nm, respectively, the former covering almost all the metal element analysis lines and the latter covering the element analysis lines such as H, O, N.
The second main characteristic of the invention is that the illumination light path and the imaging light path are separated, the illumination light source is flexibly arranged, and the imaging function can be realized by utilizing the residual transmittance of the high transmission band and the high reflection band of the long-pass dichroic mirror. Therefore, wavelength competition between an imaging light path and a spectrum light path is eliminated, and the complexity and the flexibility of the system design are greatly reduced. Thanks to the characteristics, the invention does not need to set spectrum region division points in the UV-VIS region with high analysis frequency; the movable spectroscope combination is flexibly designed, so that one working area can meet the main and common analysis requirements. Therefore, the movable spectroscope does not need to be frequently switched.
The third characteristic of the invention is that the invention has monochromatic light imaging capability, allows the objective lens 1 to have chromatic aberration and has loose requirements on the wavelength of the illumination light source. The monochromatic light imaging is specifically implemented by inserting a narrow-band filter in the filter module 7, allowing only light rays in a small range around a specified wavelength to pass through, and generating a morphological image. In the monochromatic light imaging mode, even if there is chromatic aberration of the objective lens 1, clear imaging is possible, and thus the transmissive objective lens 1 can be used. The transmission type objective lens 1 has chromatic aberration, and cannot work in a UV-VIS-NIR full spectrum, but has smaller aberration and higher transmittance in the working band. The UV-VIS-NIR full spectrum high-sensitivity analysis can be realized by using an objective lens 1 group consisting of 2-3 transmission objective lenses 1.
The fourth feature of the present invention is to provide a gas-collecting hood 11 that can purge a specific kind of gas flow from the objective lens 1 to the focal point, so that a local protective atmosphere can be provided near the focal point without a separate sample chamber. According to the design, on one hand, the invention can analyze elements such as H, O in a sample without an independent sample chamber, so that oversized special-shaped pieces which are difficult to put into the sample chamber can be analyzed; on the other hand, dust generated by LIBS analysis is also prevented from being sputtered backward and contaminating the objective lens 1.
The full-spectrum coaxial optical lens barrel provided by the invention realizes the concept of segment optimization based on segmentation, and also has the high-sensitivity analysis capability of UV-VIS-NIR full spectrum; many improvements are achieved by optical structural innovations compared to the existing similar literature. The invention is convenient to use the infrared wavelength fundamental frequency laser, the light source is simpler, the light beam quality is better, and the precision requirement on the movable spectroscope switching mechanism is obviously reduced; the illumination device and the imaging device are arranged separately, the imaging function can be realized by utilizing the residual transmittance of a high reflection band of a conventional dichroic mirror, the wavelength competition between an imaging light path and a spectrum light path is eliminated, the design of the light splitting mechanism is greatly simplified, the comprehensive performance is obviously improved, and meanwhile, the switching frequency of the movable spectroscope is greatly reduced; the invention also integrates an atmosphere protection device, is convenient for analyzing oversized special-shaped pieces, and can prevent the objective lens 1 from being polluted by backward sputtering of dust analysis.
Example 2
As shown in fig. 2, unlike embodiment 1, the illumination light source module of this embodiment is a first illumination light source module including an illumination light source 6, a light source focusing mirror, and a third spectroscope cube 13 connected in this order; the third spectroscope cube 13 is further disposed between the second spectroscope cube 3 and the imaging module 4, specifically, the third spectroscope cube 13 is disposed between the filter module 7 and the second spectroscope cube 3. The third spectroscope cube 13 is internally provided with a part of reflection part which penetrates through the spectroscope, the camera 9 is an infrared camera, and the illumination light source 6 is an infrared light source.
Example 3
As shown in fig. 3, unlike embodiment 1, the illumination light source module of the present embodiment is a second illumination light source module, which includes a plurality of first light source modules, integrated into the spectrum focusing module 5; the plurality of first light source components are arranged on the focal plane of the spectrum focusing module 5, and the plurality of first light source components are arranged around the focal point of the spectrum focusing module 5; the first light source assembly is configured to provide an illumination source for the sample.
The second illumination light source module is composed of a plurality of micro light source modules with front ends integrated with micro lenses, and is integrated into the spectrum focusing module 5. A plurality of miniature light source modules are mounted around the focal point of the spectral focusing module 5 within the focal plane of the spectral focusing module 5. Light rays emitted by the miniature light source are focused by the miniature lens, focused by the spectrum focusing module 5, reflected by the first spectroscope cube 2 and focused by the objective lens 1, and then illumination is provided for the surface of the sample.
Since there is no additional beam splitter between the first beam splitter cube 2 and the objective lens 1, in this embodiment, the number of movable beam splitters in the coaxial optical lens barrel is reduced from 2 to 1, which is more simplified; the imaging module 4 may operate in either a monochrome mode or a color mode.
Example 4
As shown in fig. 4, unlike embodiment 1, the illumination light source module 10 of the present embodiment is a third illumination light source module that is independently installed around the objective lens 1, and that includes a plurality of second light source modules; a plurality of the second light source modules are arranged around the objective lens 1; the second light source assembly is configured to provide an illumination light source for the sample.
The third illumination light source module is composed of a plurality of micro light source modules with front ends integrated with micro lenses, and the micro light source modules are installed around the objective lens 1. The light emitted by the micro light source is focused by the micro lens and then directly illuminates the surface of the sample in an oblique incidence mode. In the embodiment, the illumination is oblique incidence illumination, and is characterized in that the flat part of the surface of the sample is dark and the uneven part is bright, and the image obtained by the imaging module 4 belongs to a dark field image; while the illumination in embodiments 1, 2 and 3 is epi-illumination, the light illuminates the surface in normal incidence mode, and is characterized in that the surface of the sample is smooth, bright, and uneven, and the image obtained by the imaging module 4 is bright field image or bright field image. The implementation effect of the imaging module in this embodiment is shown in fig. 6.
Since there is no additional beam splitter between the first multi-beam splitter and the objective lens 1, in this embodiment, the number of movable beam splitters in the coaxial optical lens barrel is reduced from 2 to 1, which is more simplified; the imaging module 4 may operate in either a monochrome mode or a color mode.
Example 5
Unlike embodiment 1, the illumination light source module of the present embodiment includes a second illumination light source module and a third illumination light source module; the second illumination light source module comprises a plurality of first light source assemblies; the plurality of first light source components are arranged on the focal plane of the spectrum focusing module 5, and the plurality of first light source components are arranged around the focal point of the spectrum focusing module 5; the third illumination light source module comprises a plurality of second light source assemblies; a plurality of the second light source modules are disposed around the objective lens 1.
In this embodiment, the illumination light source module described in embodiment 4 is additionally added to the embodiment 3. The imaging module 4 can provide bright field images of the sample surface; dark field images may also be provided; or both illumination devices work together to present more detailed information about the topography of the sample surface.
The invention solves the defects of the prior full spectrum high sensitivity coaxial optical lens barrel design that the ultraviolet laser is suitable to be used, the spectroscope is frequently switched, the switching precision requirement is high, the special analysis atmosphere can be provided by the method needing an additional sample chamber, and the like.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the methods of the present invention and the core ideas thereof; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (7)
1. A full spectrum coaxial optical barrel, comprising: the device comprises an objective lens, a first spectroscope cube, a second spectroscope cube, an imaging module, an illumination light source module and a spectrum focusing module; the objective lens, the first spectroscope cube and the second spectroscope cube are sequentially arranged along the same optical axis to form a light path channel;
the laser light is cubic incident through the second beam splitter; the laser is infrared wavelength fundamental frequency laser; the second beam splitter cube is internally provided with a 45-degree beam splitter, and the 45-degree beam splitter in the second beam splitter cube is used for reflecting laser and transmitting image light or transmitting laser and reflecting image light; a 45-degree spectroscope is arranged in the first spectroscope cube, and the 45-degree spectroscope in the first spectroscope cube is used for transmitting laser and reflecting spectrum light; the spectrum focusing module is arranged on a spectrum output light path of the first spectroscope cube and is used for focusing spectrum light and coupling the spectrum light into an external optical fiber or an external spectrometer;
the illumination light source module is one or more of a first illumination light source module, a second illumination light source module or a third illumination light source module; the illumination light source module is used for providing an illumination light source; the second illumination light source module comprises a plurality of first light source assemblies; the plurality of first light source assemblies are arranged on the focal plane of the spectrum focusing module, and the plurality of first light source assemblies are arranged around the focal point of the spectrum focusing module; the first light source component is used for providing an illumination light source for the sample;
the imaging module is arranged on an image light output light path of the second beam splitter cube; the imaging module comprises an imaging lens, a lens barrel and a camera which are sequentially arranged; the imaging lens is used for receiving the image light rays; at least one of the imaging lens and the lens barrel has a focusing function; the imaging module is used for generating a sample surface topography image.
2. The full spectrum coaxial optical barrel of claim 1, wherein the 45 degree beam splitter within the first beam splitter cube is mounted on a sliding rail; the sliding guide rail is used for taking out and replacing the 45-degree spectroscope from the light-blocking side face of the first spectroscope cube; the 45-degree spectroscope in the first spectroscope cube is provided with a plurality of pieces, and the optical thickness and the coating surface position of the 45-degree spectroscope in each first spectroscope cube are the same; the first spectroscope cube realizes total spectral reflection in times by replacing the 45-degree spectroscope in the first spectroscope cube.
3. The full spectrum coaxial optical barrel of claim 1, further comprising a bandpass filter disposed between the second dichroic cube and the imaging module for filtering image light transmitted by the second dichroic cube; the 45-degree spectroscope in the first spectroscope cube is mutually perpendicular to the 45-degree spectroscope in the second spectroscope cube so as to eliminate the offset of the first spectroscope cube and the second spectroscope cube to the transmitted light.
4. The full spectrum on-axis optical barrel of claim 1, wherein the spectral focusing module comprises an off-axis mirror and a fiber optic interface; the optical fiber interface is arranged at the focus of the off-axis reflector; the off-axis reflector is used for focusing the spectrum light rays reflected by the first spectroscope cube.
5. The full spectrum coaxial optical barrel of claim 1, wherein the first illumination light source module comprises a light source, a light source focusing lens and a third spectroscope cube connected in sequence;
the third spectroscope cube is arranged between the first spectroscope cube and the spectrum focusing module; or the third spectroscope cube is arranged between the second spectroscope cube and the imaging module;
the light source is used for providing an illumination light source for the sample.
6. The full spectrum coaxial optical barrel of claim 1, wherein the third illumination light source module comprises a plurality of second light source assemblies; a plurality of the second light source modules are arranged around the objective lens; the second light source assembly is configured to provide an illumination light source for the sample.
7. The full spectrum coaxial optical column of claim 1, further comprising a gas-collecting channel; the gas collecting hood comprises a circular pipe and a hollow circular table; the circular tube is connected with the optical lens cone; the optical lens barrel is a lens barrel provided with the objective lens; the lower bottom surface of the hollow round table is connected with the round tube; the diameter of the upper bottom surface of the hollow round table is smaller than that of the lower bottom surface; the height of the gas-collecting hood is smaller than the focal length of the objective lens.
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