CN211553759U - Raman-fluorescence-laser induced breakdown spectroscopy combined system - Google Patents

Abstract

The utility model relates to a raman-fluorescence-laser induced breakdown spectroscopy combined system. It includes: the laser comprises a first laser, a second laser, a third laser, a reflecting mirror, a dichroic mirror, a spectroscope, an achromatic objective lens, a first lens and a second lens; the laser light path, the Raman light path and the fluorescence light path are formed, the laser light path, the Raman light path and the fluorescence light path act on a detection sample, and reflected light of the detection sample sequentially passes through the achromatic objective lens, the spectroscope, the dichroic mirror, the first lens and the filter plate to reach a spectrometer for spectrum collection; the reflected light of the detection sample sequentially passes through the achromatic objective lens, the spectroscope and the second lens to be imaged on a charge-coupled device image sensor (CCD). The limitation of independent detection of the replacement equipment is overcome through the laser light path, the Raman light path and the fluorescence light path, multiple kinds of spectral information are collected simultaneously through the combined system, comprehensive characterization analysis of components of a detection sample is completed, and the detection efficiency is improved.

Description

A Raman-Fluorescence-Laser-Induced Breakdown Spectroscopy System

technical field

The utility model relates to a Raman-fluorescence-laser-induced breakdown spectroscopy combined system.

Background technique

Laser Induced Breakdown Spectroscopy (LIBS) is an emission spectrum produced by vaporization and ionization of sample atoms at high temperature, and is a spectroscopic technique for analyzing the elemental composition and content of materials. LIBS has the advantages of fast, real-time online monitoring, high sensitivity, can detect all kinds of elements, and less damage to samples, so LIBS is widely used in many fields such as biomedicine, online detection of material components, space exploration, military explosives detection, Identification of cultural relics, etc. However, when the sample detection position is slightly damaged, only the material element information can be detected.

Raman spectroscopy (Raman) is a kind of scattering spectroscopy, which is a spectroscopic technique used for the study of molecular structure by analyzing the scattered light with different frequencies from the incident light to obtain information on molecular vibration and rotation. Raman spectroscopy has a wide range of applications in the fields of chemistry, materials, physics, polymers, biology, medicine, and geology due to its unique advantages such as rich information, simple sample preparation, and little water interference. However, the Raman signal is weak and can only be used for molecular component detection.

Fluorescence spectroscopy is a spectroscopic technique that generates long-wave radiation (fluorescence) by short-wave excitation of substances. It can obtain the internal organic components of substances through wave packet or wave peak analysis in the fluorescence spectrum, with high sensitivity. However, fluorescence spectroscopy can only detect biological components and organic matter.

At present, it is necessary to replace different equipment to complete the full analysis of complex substances, which reduces the work efficiency and is not conducive to long-term development.

Utility model content

The embodiments of the present application provide a Raman-fluorescence-laser-induced breakdown spectroscopy combined system to solve the above problems. In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended to be an extensive review, nor is it intended to identify key/critical elements or delineate the scope of protection of these embodiments. Its sole purpose is to present some concepts in a simplified form as a prelude to the detailed description that follows.

A Raman-fluorescence-laser-induced breakdown spectroscopy combined system, comprising: a first laser, a second laser, a third laser, a mirror, a dichroic mirror, a beam splitter and an achromatic objective lens, a first lens and a third Two lenses; wherein, the first laser, mirror, dichroic mirror, beam splitter and achromatic objective lens form a laser light path; the second laser, first lens, dichroic mirror, beam splitter and achromatic objective lens form a Raman light path The third laser, the first lens, the dichroic mirror, the beam splitter and the achromatic objective lens constitute a fluorescent light path; the laser light path, the Raman light path and the fluorescent light path act on the detection sample, and the reflected light of the detection sample passes through the The chromatic aberration objective lens, the beam splitter, the dichroic mirror, the first lens and the filter are collected by the spectrometer; the reflected light of the detection sample is sequentially passed through the achromatic objective lens, the beam splitter and the second lens to the charge-coupled device image sensor (CCD) ) imaging.

Optionally, it also includes a shutter control box, a first shutter, a second shutter and a third shutter; the shutter control box controls the actions of the first shutter, the second shutter and the third shutter respectively; the first shutter is set in the optical path between the first laser and the mirror; the second shutter is arranged in the optical path between the second laser and the first lens; the third shutter is arranged between the third laser and the first lens in the light path.

Optionally, a control terminal is also included, which is connected with the spectrometer, the CCD and the shutter control box.

Optionally, a beam expander is also included, which is arranged in the optical path between the first laser and the reflection mirror.

Optionally, the first laser is a pulsed laser, which emits a light beam with a wavelength of 1064 nm.

Optionally, the second laser is a continuous laser, which emits a light beam with a wavelength of 532 nm.

Optionally, the third laser is a continuous laser, which emits a light beam with a wavelength of 405 nm.

The beneficial effects of the utility model are as follows: through the laser light path, the Raman light path and the fluorescence light path, the limitation of individual detection by replacing the equipment is overcome, the simultaneous collection of various spectral information is completed by the combined system, the comprehensive characterization analysis of the detected sample components is completed, and the detection efficiency.

Description of drawings

One or more embodiments are exemplified by the accompanying drawings, which are not intended to limit the embodiments, and elements with the same reference numerals in the drawings are shown as similar elements, The drawings do not constitute a limitation of scale, and in which:

FIG. 1 is a schematic diagram of a structure provided by an embodiment of the present disclosure.

Detailed ways

In order to have a more detailed understanding of the features and technical contents of the embodiments of the present disclosure, the implementation of the embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. In the following technical description, for the convenience of explanation, numerous details are provided to provide a thorough understanding of the disclosed embodiments. However, one or more embodiments may be practiced without these details. In other instances, well-known structures and devices may be shown simplified in order to simplify the drawings.

Below in conjunction with accompanying drawing and embodiment, the utility model is further described:

As shown in FIG. 1, a Raman-fluorescence-laser-induced breakdown spectroscopy combined system in this embodiment includes: a first laser 13, a second laser 15, a third laser 16, a mirror 2, a dichroic Mirror 3, beam splitter 4 and achromatic objective lens 5, first lens 6 and second lens 7; wherein, the first laser, reflecting mirror, dichroic mirror, beam splitter and achromatic objective lens constitute a laser light path; the second laser, The first lens, the dichroic mirror, the beam splitter and the achromatic objective lens constitute a Raman optical path; the third laser, the first lens, the dichroic mirror, the beam splitter and the achromatic objective lens constitute a fluorescent optical path; the laser optical path, the Raman optical path The optical path and the fluorescence optical path act on the detection sample, and the reflected light of the detection sample passes through the achromatic objective lens, the spectroscope, the dichroic mirror, the first lens and the filter 8 to the spectrometer 14 to collect spectra in turn; the reflected light of the detection sample It is sequentially imaged by an achromatic objective lens, a beam splitter and a second lens to a charge-coupled device image sensor (CCD) 17 . The test sample is placed on the stage 9 .

The embodiment of the present disclosure overcomes the limitation of individual detection by replacing equipment through the laser light path, Raman light path and fluorescence light path, and completes the simultaneous acquisition of various spectral information through the combined system, completes the comprehensive characterization and analysis of the detected sample components, and improves the detection efficiency.

Optionally, it also includes a shutter control box 18, a first shutter 10, a second shutter 11 and a third shutter 12; the shutter control box controls the actions of the first shutter, the second shutter and the third shutter respectively; the The first shutter is arranged in the optical path between the first laser and the mirror; the second shutter is arranged in the optical path between the second laser and the first lens; the third shutter is arranged between the third laser and the first lens in the light path between the lenses. In this way, the firing time and firing order of the first laser, the second laser and the third laser can be automatically and effectively controlled. Helps to help the user control the acquisition of either spectrum.

Optionally, a control terminal 19 is also included, which is connected to the spectrometer, the CCD and the shutter control box. In this way, the information of the spectrometer and CCD can be transmitted to the control terminal, which is convenient for users to observe and record. Wherein, the control terminal may be a computer.

Optionally, a beam expander 1 is also included, which is arranged in the optical path between the first laser and the mirror.

Optionally, the first laser is a pulsed laser, which emits a light beam with a wavelength of 1064 nm.

Optionally, the second laser is a continuous laser, which emits a light beam with a wavelength of 532 nm.

Optionally, the third laser is a continuous laser, which emits a light beam with a wavelength of 405 nm.

During operation, the first laser 13 emits light of 1064 nm after beam expansion by the beam expander 1 and then reaches the reflector 2. The reflected light passes through the dichroic mirror 3 and the beam splitter 4, reaches the achromatic objective lens 5 and then focuses on the surface of the detection sample. , interacts with the detection sample, and the emission spectrum generated by the detection sample passes through the spectroscope 4, the dichroic mirror 3 and then the first lens 6 and the 532nm notch filter 8 to reach the spectrometer 14 for spectrum collection, and the spectrometer passes through the control terminal. 19 is controlled. In addition, the emission spectrum generated by the detection sample is focused by the beam splitter 4, the dichroic mirror 3, and then focused by the second lens 7, and then reaches the CCD17 for imaging. The CCD imaging is controlled by the control terminal 19.

The second laser 15 emits light with a wavelength of 532 nm through the first lens 6 , the dichroic mirror 3 , the beam splitter 4 and the achromatic objective lens 5 to reach the surface of the sample and interact with the sample. The generated light passes through the beam splitter 4 and the dichroic mirror After 3, it reaches the first lens 6 and is then received by the spectrometer 14.

The third laser 16 emits light with a wavelength of 405 nm through the first lens 6, the dichroic mirror 3, the beam splitter 4 and the achromatic objective lens 5 to reach the surface of the sample and interact with the sample. The light generated after the beam splitter 4 and the dichroic mirror After 3, it reaches the first lens 6 and is then received by the spectrometer 14.

The foregoing description and drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The examples are only representative of possible variations. Unless expressly required, individual components and functions are optional and the order of operations may vary. Portions and features of some embodiments may be included in or substituted for those of other embodiments. Embodiments of the present disclosure are not limited to the structures that have been described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims (7)

1. a Raman-fluorescence-laser-induced breakdown spectroscopy combined system, is characterized in that, comprising: the first laser, the second laser, the third laser, reflecting mirror, dichroic mirror, beam splitter and achromatic objective lens , a first lens and a second lens; Wherein, the first laser, reflecting mirror, dichroic mirror, beam splitter and achromatic objective lens constitute the laser light path; The second laser, the first lens, the dichroic mirror, the beam splitter and the achromatic objective lens form a Raman optical path; The third laser, the first lens, the dichroic mirror, the beam splitter and the achromatic objective lens form a fluorescent light path; The laser light path, the Raman light path and the fluorescence light path act on the detection sample, and the reflected light of the detection sample passes through the achromatic objective lens, the spectroscope, the dichroic mirror, the first lens and the filter in sequence to the spectrometer for spectrum collection; the The reflected light of the detection sample is sequentially imaged by an achromatic objective lens, a beam splitter and a second lens to a charge-coupled device image sensor (CCD). 2. a kind of Raman-fluorescence-laser-induced breakdown spectroscopy combined system according to claim 1, is characterized in that: also comprises shutter control box, first shutter, second shutter and third shutter; The shutter control box controls the actions of the first shutter, the second shutter and the third shutter respectively; the first shutter is arranged in the optical path between the first laser and the mirror; the second shutter is arranged in the optical path between the second laser and the first lens; The third shutter is arranged in the optical path between the third laser and the first lens. 3 . The Raman-fluorescence-laser-induced breakdown spectroscopy combined system according to claim 2 , further comprising a control terminal, which is connected with the spectrometer, the CCD and the shutter control box. 4 . 4. A Raman-fluorescence-laser-induced breakdown spectroscopy combined system according to claim 1, characterized in that: further comprising a beam expander, which is arranged in the optical path between the first laser and the reflection mirror middle. 5 . The Raman-fluorescence-laser-induced breakdown spectroscopy combined system according to claim 1 , wherein the first laser is a pulsed laser that emits a light beam with a wavelength of 1064 nm. 6 . 6 . The Raman-fluorescence-laser-induced breakdown spectroscopy combined system according to claim 1 , wherein the second laser is a continuous laser, which emits a light beam with a wavelength of 532 nm. 7 . 7 . The Raman-fluorescence-laser-induced breakdown spectroscopy combined system according to claim 1 , wherein the third laser is a continuous laser, which emits a light beam with a wavelength of 405 nm. 8 .

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