CN108919472A - A kind of more light splitting mirror high sensitivity axis optical lens barrels - Google Patents
A kind of more light splitting mirror high sensitivity axis optical lens barrels Download PDFInfo
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- CN108919472A CN108919472A CN201811055454.3A CN201811055454A CN108919472A CN 108919472 A CN108919472 A CN 108919472A CN 201811055454 A CN201811055454 A CN 201811055454A CN 108919472 A CN108919472 A CN 108919472A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 254
- 230000035945 sensitivity Effects 0.000 title claims abstract description 39
- 230000003595 spectral effect Effects 0.000 claims abstract description 105
- 238000001228 spectrum Methods 0.000 claims abstract description 53
- 238000005286 illumination Methods 0.000 claims abstract description 35
- 238000003384 imaging method Methods 0.000 claims description 25
- 238000009434 installation Methods 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 17
- 239000013307 optical fiber Substances 0.000 claims description 17
- 239000000835 fiber Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000009738 saturating Methods 0.000 claims description 4
- 239000000571 coke Substances 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000011664 signaling Effects 0.000 claims description 2
- 230000004446 light reflex Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000001392 ultraviolet--visible--near infrared spectroscopy Methods 0.000 abstract description 31
- 238000010183 spectrum analysis Methods 0.000 abstract description 30
- 238000004458 analytical method Methods 0.000 description 22
- 239000000523 sample Substances 0.000 description 22
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 description 20
- 238000013461 design Methods 0.000 description 19
- 238000000926 separation method Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 239000004411 aluminium Substances 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 230000002708 enhancing effect Effects 0.000 description 7
- 230000000644 propagated effect Effects 0.000 description 7
- 241000931526 Acer campestre Species 0.000 description 5
- 238000002679 ablation Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005520 electrodynamics Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001634 microspectroscopy Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000000985 reflectance spectrum Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 108010074506 Transfer Factor Proteins 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 238000002211 ultraviolet spectrum Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
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- Optics & Photonics (AREA)
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Abstract
The present invention provides one kind and is divided mirror high sensitivity axis optical lens barrel, including more than first beam splitter cube more（1）, catoptric lens（2）, more than second beam splitter cube（3）, off axis reflector mirror module（4）, band illumination functions image-forming module；More than first beam splitter cube（1）For reflection laser and transmitted spectrum；More than second beam splitter cube（3）Connecting band illumination functions image-forming module is for observing and laser focusing, connection off axis reflector mirror module（4）For acquiring spectral signal.The present invention collects optical path by reflective spectrum, and the full spectrum analysis of UV-VIS-NIR is realized in eyeglass switching by several times, and spectral signal loses small, spatial resolution with higher, and almost shielding environment light and stray light.The present invention solves the prior art, it is difficult to take into account the full spectrum analysis of UV-VIS-NIR and high spatial resolution and spectrum analysis sensitivity, system light path are focused the technical issues of difficult, vulnerable to ambient light interference.
Description
Technical field
The present invention relates to laser spectral analysis technical fields, and in particular to a kind of more light splitting mirror high sensitivity axis opticals
Lens barrel.
Background technique
Microcell laser induced breakdown spectroscopy（Micro laser-induced breakdown spectroscopy, referred to as
Microcell LIBS）Technology is based on Atomic Emission Spectral Analysis principle, and pulse laser beam is focused to sample surfaces, ablation microcell substance
Generate light-emitting plasma, by analyze plasma resonance atom, ion and molecular spectrum know substance microregion element at
Point and content.Microcell LIBS technology has and can analyze whole elements including hydrogen, can analyze non-conductive and refractory material, without true
The advantages that sky, fast analysis speed, spatial resolution can be to 1 ~ 5 micron, and depth resolution can be that one kind has to sub-micron rank
The novel surface component analyzing method of particular advantages.
Optical system is the main body and core of microcell LIBS system, it generally by microcell optical imagery, laser microcell focus,
Microscopic spectrum analyzes three zones module composition.Microcell optical imagery module is practical be a kind of unlimited tube length optical microscopy,
Function is observation sample surfaces, finds and is directed at microcell to be analyzed.Laser microcell focus module function is ablation microcell to be analyzed
Substance simultaneously inspires plasma.Microscopic spectrum analysis module function is to collect the spectral signal of plasma resonance, passes through light
Fibre is sent into spectrometer analysis.The Integrated design of above-mentioned three big module is the key that microcell LIBS Optical System Design.
In the Integrated design of three big modules, microcell optical imagery is integrated general using same with laser microcell focus module
Axis design, the two share objective lens optical axis, at object lens rear using both 45 degree of spectroscope separation optical path.Microscopic spectrum analysis module
It is integrated, there are coaxial design and paraxonics to design two kinds.In paraxonic design, microscopic spectrum analysis module and microcell optics at
Picture, laser microcell focus module mutually separate, and have independent oblique incidence formula optical path.Paraxonic design advantage be spectral collection optical path not
It is easily designed by spectroscopical light passing scope limitation in microcell optical imagery, laser microcell focus module, and it is operable with UV-
The full spectral region of VIS-NIR；The disadvantage is that with laser microcell focus module, there are competition for space, are difficult to the two numerical aperture
It does greatly, to influence the spatial resolution and spectral collection efficiency of microcell LIBS, and paraxonic optical path, to vibration sensing, system is steady
It is qualitative general.In coaxial design, microscopic spectrum analysis module is integrated with microcell optical imagery, laser microcell focus module,
Three shares objective lens optical axis, separates three's optical path one by one using two pieces of 45 degree of spectroscopes at object lens rear.Compared with paraxonic design,
More large-numerical aperture object lens can be used in coaxial design, and spatial resolution is high, and collection luminous power is strong, and system stability is good, but microscopic spectrum point
The light passing range of analysis module is limited by two pieces of 45 degree of spectroscopes and other optical mirror slips, it is difficult to accomplish the full spectrum of UV-VIS-NIR
Analysis.Therefore, it finds scheme and improves disadvantages mentioned above, may advantageously facilitate the functionization of coaxial-type microcell LIBS.
Chinese patent literature《A kind of component analyzer for laser probe micro-area based on double laser light source》（Publication No. is
CN101782517A, date of publication are on July 21st, 2010）Disclose a kind of laser microprobe micro-area composition based on double laser light source
Analyzer, structure are：Laser with fixed wavelength, attenuator, beam expanding lens, aperture, the first semi-transparent semi-reflecting lens are sequentially located at
In same level optical path, Wavelength tunable laser is reflected on the first semi-transparent semi-reflecting lens rear and fixed wave by the second total reflective mirror
The laser beam same light path of long laser.Laser with fixed wavelength and Wavelength tunable laser can be upper and lower or be placed in parallel, and logical
It crosses digital delay generator and controls its opening sequence and delay.It is received by fibre-optical probe and passes through optical fiber and be transferred to grating spectrograph
It is also controlled afterwards to the plasma spectrometry acquisition time of enhanced CCD by digital delay generator.This double laser light source excitation
Laser microprobe instrument detection limit it is low, elemental analysis precision is high, and element is selectively good, more reliable and more stable.It can be used for various objects
Micro, trace element the accurate qualitative and accurate quantification of matter microcell is analyzed.But still Shortcomings.The design is using activity peace
The monolithic total reflective mirror separation optical imagery optical path and spectral collection optical path of dress, although UV-VIS-NIR whole spectrum can be reflected,
Because using imaging, spectral collection optical path and the latter focal position can not be corrected using the former simultaneously, cause system light path focusing tired
It is difficult；Using the semi-transparent semi-reflecting lens separation laser optical path and spectrum optical path of fixed installation, transmission laser, reflectance spectrum signal, because by
The limitation of optical coating principle, single semi-transparent semi-reflecting lens can only reflective portion band spectrum, it is difficult to realize the full spectrum of UV-VIS-NIR
Analysis, and spectral signal loss up to 50%, influence the sensitivity for analysis of microcell LIBS.
Chinese patent literature《A kind of macroscopical and microcell integrated laser probe analytical instrument》（Publication No.
CN103267746A, date of publication are on August 28th, 2013）Disclose a kind of macroscopical and microcell integrated laser probe constituent analysis
Instrument, including laser, times frequency module, two cages cube, two optical maser wavelength reflecting mirrors, industrial camera, spectral collector, objects
Mirror converter, focusing objective len, spectrometer and computer.Laser light-emitting window front end is equipped with a times frequency module, laser and calculating
Dynamoelectric signal is connected.The invention can carry out quantitative point of accurate qualitative analysis and degree of precision to the macroscopic view and micro-area composition of substance
Analysis, and quick seamless handoff can be realized between macroscopic view and Microanalysis；Secondly, the equipment is modularized design, structure
It is compact, enhance the integrated level of equipment.In addition, functional independence between each module, easily operated and maintenance；Finally, the mould of optical path
Blockization design can be convenient user efficiently saved the time, while analysis precision is higher using preceding calibration to optical path.
But this kind of light path design still has deficiency.A kind of scheme that the document is announced is provided with the broadband mirrors of light hole using center
Laser optical path and spectrum optical path are separated, laser is transmitted through broadband mirrors center light hole, and spectral signal is anti-through broadband mirrors
It is incident upon spectral collector.Though this scheme can realize the full spectrum analysis of UV-VIS-NIR, since object lens clear aperature is typically small,
A light hole is shared by illumination path, spectrum optical path again, causes spectral signal loss of strength big, makes microcell LIBS spatial discrimination
Rate is poor, spectral collection low efficiency.Another scheme that the document is announced separates laser optical path using the dichroscope being fixedly mounted
With spectrum optical path, only there is high reflectivity to a certain wavelength laser beam, and other wavelength lasers or spectral signal are all had
Through characteristic, but since optical coating principle limits, the bandwidth of dichroscope reflection band is generally higher than 50 nm, also difficult in addition to this
To penetrate UV-VIS-NIR whole spectrum, therefore it cannot achieve the full spectrum analysis of UV-VIS-NIR.
To sum up, the shortcoming of existing microcell LIBS coaxial optical system is mainly manifested in, it is difficult to take into account UV-VIS-NIR
Full spectrum analysis and high spatial resolution and spectrum analysis sensitivity, system light path focusing difficulty.In addition, existing microcell LIBS light
System design mostly uses greatly open optical path, and environment light easily enters imaging detector and spectrometer, influence the dim light of system at
Picture and Dim light measurement ability.
Summary of the invention
Exist for the existing microcell LIBS coaxial optical system of solution and is difficult to take into account the full spectrum analysis of UV-VIS-NIR and high-altitude
Between resolution ratio and spectrum analysis sensitivity, the technical issues of system light path focusing is difficult, vulnerable to ambient light interference, the present invention provides
It is a kind of to be divided mirror high sensitivity axis optical lens barrels more.
A kind of more light splitting mirror high sensitivity axis optical lens barrels, it is characterised in that：It is vertical including more than first spectroscope
Side, catoptric lens, more than second beam splitter cube, off axis reflector mirror module, band illumination functions image-forming module；The reflective object
Mirror, more than first beam splitter cube, more than second beam splitter cube are sequentially connected along optical axis straight up, and form the light for running through three
Paths；More than first beam splitter cube includes at least two pieces of changeable spectroscopes, and the laser reflection for will inject into is extremely
Catoptric lens, and the light of self-reflection type object lens in future is transmitted through more than second beam splitter cube；More than first spectroscope is vertical
At least the sum of two pieces of spectroscopical transmission bands in side, can completely cover the full spectral region of UV-VIS-NIR；Described more than second point
Light microscopic cube is for separating spectral signal optical path and picture signal optical path；The off axis reflector mirror module and more than second spectroscope are vertical
Side's connection, is located in more than second spectroscope spectral signal optical path, for focusing spectrum signal and being coupled into external fiber；The band shines
Bright functional imaging module is connect with more than second spectroscope, is located at more than second spectroscopic image signal light road, for passing through illumination
And observe sample surfaces.
Spectral signal of the present invention refers to laser ablation substance microcell to be analyzed and the plasma inspired is issued
Spectral signal, the signified spectral signal optical path of the present invention refers to the optical path that the spectral signal is propagated, which arises from reflective
Object lens, successively through more than first beam splitter cube, more than second beam splitter cube, into off axis reflector mirror module after be connected to exterior light
It is fine.Described image signal optical path refers to illuminating ray and its light that the inverse video signal that is formed after body surface emits is propagated
Road, the optical path arise from catoptric lens, successively through more than first beam splitter cube, more than second beam splitter cube, illuminate function into band
It can image-forming module.Described at least the sum of two pieces of spectroscopical transmission bands can completely cover the full spectral region of UV-VIS-NIR, meaning
By several times using at least two pieces of spectroscopes, whole spectral signals within the scope of UV-VIS-NIR can be made by more than first point
Light microscopic cube is transmitted through more than second beam splitter cube, and then realizes the acquisition and analysis of the full spectral region of UV-VIS-NIR.It is described
Changeable at least two pieces of spectroscopes, at least two pieces of spectroscopes can quickly be switched by referring to, make one of be in
Optical element in optical path, as separation optical path.
Further, in more than first beam splitter cube, first piece of spectroscope is laser dichroscope, second piece of spectroscope
For laser beam splitter mirror；The laser dichroscope and laser beam splitter mirror, which have, waits optical thicknesses, and the plated film of effective reflection laser is equal
One side positioned at eyeglass towards laser light incident direction.
Signified laser dichroscope of the invention has high reflectance in optical maser wavelength and environs, in its commplementary wave length
With the characteristic of high-transmission rate in range, used as main spectroscope.Laser beam splitter mirror of the invention signified, in optical maser wavelength and
There is both partially reflective and partially transmissive characteristic as secondary spectroscope in environs and generally needing to analyze main spectroscope not
It can be used when the spectrum of transmission region.The sum of the laser beam splitter mirror and the dichroic transmission bands of laser, can completely cover UV-
The full spectral region of VIS-NIR.As described above, laser is injected more than first piece after beam splitter cube, through laser beam splitter mirror or laser two
To after Look mirror reflection, into catoptric lens；And illuminating ray and picture signal are then through laser beam splitter mirror or laser dichroscope
It is propagated after transmission.And laser beam splitter mirror or laser dichroscope are in alternative one in optical path by being switched fast, then
It can realize by several times that the full spectral signal of UV-VIS-NIR is transmitted through more than second beam splitter cube with timesharing, and then carry out spectral signal
Acquisition and analysis.Simultaneously compared with existing axis optical technology, such a configuration obviates subband spectrum, especially ultraviolet light
Spectrum signal transmitance is poor, the low problem of sensitivity for analysis.
Further, more than second beam splitter cube includes at least two pieces of changeable optical mirror slips, wherein first block of light
Eyeglass is visible light beam splitter, is coated with visible light light-splitting film on one side towards more than first beam splitter cube, another side is coated with
Visible light anti-reflection film；Second piece of optical mirror slip is total reflective mirror.
Signified visible light beam splitter of the invention has part reflective portion transmissison characteristic in visible light region；Institute of the present invention
Refer to-total reflective mirror is in UV-VIS-NIR SPECTRAL REGION characteristic with high reflectivity.Two pieces of optical mirror slips can carry out quickly
Switching is carrying out microoptic imaging, when observing sample surface morphology or optical path adjusting, uses visible light beam splitter, image letter
Direction is projected after visible light beam splitter from more than second beam splitter cube straight up for number edge；When carrying out spectrum analysis,
Using total reflective mirror, spectral signal projects after total reflective mirror reflects.At this point, the transmitted light path of more than second beam splitter cube is image letter
Number optical path, reflected light path are spectral signal optical path, i.e., off axis reflector mirror module and are located at the with illumination functions image-forming module
On the reflected light path and transmitted light path of more than two beam splitter cubes.
Further, the total reflective mirror in more than second beam splitter cube can be replaced with full impregnated window mirror, the visible light
Beam splitter is equal with the optical thickness of full impregnated window mirror.
Signified full impregnated window mirror of the invention is with the spy in 190-1000 nm SPECTRAL REGION with EO-1 hyperion percent of pass
Property.Two pieces of optical mirror slips can quickly be switched, and carried out microoptic imaging, observed sample surface morphology or optical path tune
When section, using visible light beam splitter, picture signal enters band from more than second beam splitter cube after the reflection of visible light beam splitter
Illumination functions image-forming module；When carrying out spectrum analysis, using full impregnated window mirror, spectral signal is transmitted through full impregnated window mirror
Afterwards, into off axis reflector mirror module.At this point, the reflected light path of more than second beam splitter cube is picture signal optical path, transmitted light path
For spectral signal optical path, i.e., off axis reflector mirror module and more than second beam splitter cube is located at illumination functions image-forming module
On transmitted light path and reflected light path.
Further, more than first beam splitter cube and more than second beam splitter cube are cube structure, upper and lower,
The center of left and right side is provided with light hole, is additionally provided with optics guide-rail plate along its forward and backward side diagonal line；The optics guide rail
Plate is equipped with optics mounting surface；The optics mounting surface and the level of cube structure, vertical axis all have 45 degree of angles；It is described
Optics mounting surface includes at least two optics installation positions, is used at least two eyeglasses of one-to-one installation；The optics guide-rail plate is also
For making any of optics mounting surface optics installation position switch to horizontal, the vertical axial intersection point of cube structure.
The present invention can construct path channels by light hole, and more specifically, the downside of more than first beam splitter cube is logical
Unthreaded hole is connected to catoptric lens, and upper side is connected to the upper side light hole of more than second beam splitter cube, a spectroscopical left side more than first
Side or right side light hole can have as laser light incident hole, inject for laser.When two pieces in more than second beam splitter cube
Optical mirror slip is metal film total reflective mirror and visible light beam splitter, and the upper side light hole of more than second beam splitter cube is believed as image
Number outlet, for band illumination functions image-forming module be connected to, the light hole of left or right side is then used as spectral signal to export, use
It is connected in off axis reflector mirror module；When two pieces of optical mirror slips in more than second beam splitter cube are full impregnated window mirror and visible light
The left or right side face light hole of beam splitter, more than second beam splitter cube is exported as picture signal, is used for and band illumination functions
Image-forming module connection, the light hole of upper side are then used as spectral signal to export, for being connected to off axis reflector mirror module.Finally
It is formed, the laser light incident optical path including more than first beam splitter cube, catoptric lens；More than catoptric lens, first
Beam splitter cube, more than second beam splitter cube, off axis reflector mirror module spectral signal optical path；Including catoptric lens, first
More beam splitter cubes, more than second beam splitter cube, the picture signal optical path with illumination functions image-forming module, and three optical paths share
Objective lens optical axis.The optics peace on horizontal, vertical axial intersection point in the present invention, in the optics mounting surface in cube structure
Dress position may be defined as working position, remaining optics installation position is idle position, and the movement by operating optics guide-rail plate can rapid interchangeable
Working position and idle position.Eyeglass in the optics installation position, refers specifically to light splitting therein in more than first beam splitter cube
Mirror refers specifically to optical mirror slip therein in more than second beam splitter cube.In more than first beam splitter cube, optics guide-rail plate is operated
Movement, can make first piece of spectroscope or second piece of spectroscope be in working position, the spectroscope on working position is in laser beam incident
The intersection point on road and picture signal optical path, for separating optical path；In more than second beam splitter cube, operation optics guide-rail plate movement can
First piece of optical mirror slip or second piece of optical mirror slip is set to be in working position, the optical mirror slip on working position is in spectral signal optical path
With the intersection point of picture signal optical path, for separating optical path.
In above scheme, the horizontal side light hole of the first beam splitter cube is interior that laser is housed such as left side light hole
Enhanced window mirror, at this point, external laser can cross laser enhanced window from the left side light hole incidence of more than first beam splitter cube
After mirror, enter catoptric lens straight down after the spectroscope reflection in more than first beam splitter cube；The spectral signal of generation
Straight up, become directional light after catoptric lens, more than first beam splitter cube of entrance enters after wherein spectroscope
More than second beam splitter cube；After spectral signal enters more than second beam splitter cube along direction straight up, a part is through beam splitter
It is emitted in the horizontal direction after reflection, another part is emitted after beam splitter transmits along direction straight up.It being divided described first more
Mirror cube, more than second beam splitter cube basic structure can be identical.
Further, the off axis reflector mirror module, for focusing to incident spectral signal perpendicular to incident direction
Focal point, incident light direction, the two sides panel for being emitted light direction are equipped with light hole；The outgoing light direction light hole is for connecting
It connects and external fiber is made to be located at focal point, incident light direction light hole is for being connected to more than second beam splitter cube；
The band illumination functions image-forming module includes fixed beam splitter cube, lighting device and imaging device；It is described fixed
Beam splitter cube is cube structure, and upper and lower, left and right side center is provided with light hole, is fixed between forward and backward side
Visible light beam splitter is installed；The upper and lower, left and right side of the visible light beam splitter and fixed beam splitter cube all has 45
Angle is spent, there is part reflective portion transmissison characteristic in visible light region；The visible light beam splitter is divided towards more than second
The one side of mirror cube plates visible light beam splitting coating, and another side plates visible light anti-reflection film；It is the transmitted light path of fixed beam splitter cube, anti-
It penetrates and lighting device is housed in optical path one of both, imaging device is housed in another optical path；The fixed beam splitter cube its
In light hole for the connection with more than second beam splitter cube；The lighting device is for providing lighting source；It is described at
As device is for observing sample surfaces.
Further, the off axis reflector mirror inside modules are equipped with one piece of off axis reflector mirror for plating the film that is all-trans, and are used for light
Spectrum signal focuses to the focal point perpendicular to incident direction, and light hole is set to face plate center；Affiliated off axis reflector mirror back has 2
To 3 vernier knobs, for focusing；Closed metal is bolted at the outgoing light direction light hole of the off axis reflector mirror module
Casing, metal sleeve distal center are provided with the optical fiber mounting hole of standard；The center of optical fiber mounting hole is located at off axis reflector mirror foci
Place, for connecting external fiber；
The lighting device is made of the optically focused mirror tube installed along same axis, light source mounting rack, lighting source, lighting source peace
Loaded on light source mounting rack center；The imaging device by installed along same axis optical filter, sleeve lens, camera mounting bracket,
Camera composition；The optical filter has high optical density (OD) to laser, high for visible light saturating；The camera mounting bracket is located at sleeve
It at lens focus, and can be displaced along sleeve lens axis, tail portion has rotatable camera interface, and camera is installed on the interface
On.
Further, the off axis reflector mirror and catoptric lens have pinpointed focus ratio, and numerical value is equal to catoptric lens
Numerical aperture and external spectrometer the ratio between numerical aperture.
Further, the catoptric lens to lighting source, camera, optical fiber mounting hole whole optical paths be in it is opaque
Enclosed environment in.Specifically, catoptric lens of the present invention, more than first beam splitter cube, more than second beam splitter cube,
The end face close proximity of fixed beam splitter cube, off axis reflector mirror module, and more than first beam splitter cube, more than second spectroscope
Cube, the unused light hole of fixed beam splitter cube blocks with standard thread shading cover completely；The sleeve lens with
Between camera mounting bracket, it is cased with the first scalable shading casing；Between the optically focused mirror tube and light source mounting rack, being cased with second can
Flexible shading casing.
Whole optical path of the present invention is in lighttight enclosed environment, on the one hand can prevent environment light, stray light into
Enter camera, optical fiber mounting hole, provides dark background environment for microoptic imaging, microspectroscopy, improve microcell LIBS
Dim light imaging and the Dim light measurement ability of system, on the other hand can block dust, prevent dust from entering internal optical path, pollute,
Damage optical device.
Further, the optics guide-rail plate of the optics guide-rail plate of more than second beam splitter cube and more than first beam splitter cube
With 90 degree of angles；Installation in the visible light beam splitter and more than first beam splitter cube installed in more than second beam splitter cube
Laser dichroscope, laser beam splitter mirror have equal optical thickness.
Further, that installs in the visible light beam splitter of the fixed beam splitter cube and more than first beam splitter cube swashs
Light dichroscope, laser beam splitter mirror have equal optical thickness；The visible light beam splitter of the fixed beam splitter cube with
The optics guide-rail plate of more than first beam splitter cube has 90 degree of angles.
Further, the optics guide-rail plate is that rail structure can be by any light splitting by the one-dimensional sliding of optics guide-rail plate
Mirror is adjusted to working position.
Further, the optics guide-rail plate is that rotaring wheel structure can be by any spectroscope tune by the rotation of optics guide-rail plate
It is whole to working position.
Further, to solve prior art problem, the present invention provides another more light splitting mirror high sensitivity axis opticals
Lens barrel, it is characterised in that：Including more than first beam splitter cube, catoptric lens, more than second beam splitter cube, off axis reflector mirror mould
Block, band illumination functions image-forming module；The catoptric lens, more than first beam splitter cube, more than second beam splitter cube are along vertical
Upward optical axis is sequentially connected, and forms the path channels for running through three；More than first beam splitter cube includes laser beam splitter
Mirror, laser reflection for will inject into catoptric lens, and the light of self-reflection type object lens in future are transmitted through second more and are divided
Mirror cube；More than second beam splitter cube is for separating spectral signal optical path and picture signal optical path；The off axis reflector mirror
Module is connect with more than second beam splitter cube, is located in more than second spectroscope spectral signal optical path, for focusing spectrum signal and coupling
It is incorporated into external fiber；The band illumination functions image-forming module is connect with more than second spectroscope, is located at more than second spectroscopic image and is believed
In number optical path, for by illuminating and observing sample surfaces；More than second beam splitter cube includes at least two pieces changeable
Optical mirror slip, wherein first piece of optical mirror slip is visible light beam splitter, it can towards being coated on one side for more than first beam splitter cube
Light-exposed spectro-film, another side are coated with visible light anti-reflection film；Second piece of optical mirror slip is total reflective mirror；In the off axis reflector mirror module
Portion is equipped with one piece of off axis reflector mirror for plating the film that is all-trans, for spectral signal to be focused to the focal point perpendicular to incident direction.
It is divided the full spectrum high sensitivity axis optical lens barrel of mirror more this kind provided by the invention, there is point without light modulation
Light microscopic quick replacement device realizes the full spectral region of UV-VIS-NIR with two pieces of spectroscopical combinations and covers, and each
Wave band all has EO-1 hyperion transmitance；Optical path, optics circle are collected at reflective spectrum using catoptric lens, off axis reflector microscope group
Face is few, all has hyper spectral reflectance in the full spectral region of UV-VIS-NIR, can carry out spectral transmissions with larger light passing rate,
And it is not influenced by color difference；By optimizing the focal distance ratio of off axis reflector mirror and catoptric lens, the numerical aperture of external spectrometer is matched
Diameter is optimal spectral signal transmission rate；It being divided this kind at the optical path of the full spectrum high sensitivity axis optical lens barrel of mirror more
Under totally-enclosed environment, the interference of environment light and stray light to optical imagery and spectrum analysis is almost shielded, thus into
One step improves spectrum analysis sensitivity.The combination of above-mentioned measure, so as to be divided the full spectrum of mirror this kind highly sensitive coaxial more
Optical tubes has been provided simultaneously with the full spectral analysis capabilities of UV-VIS-NIR and hyperspectral analysis sensitivity.Meanwhile it being divided this kind more
The full spectrum high sensitivity axis optical lens barrel of mirror is when being equipped with large-numerical aperture object lens, it may have high spatial resolution.
To sum up, for the present invention compared to existing microcell LIBS coaxial optical system, UV-VIS- can be taken into account by least having
The full spectrum analysis of NIR and high spatial resolution and spectrum analysis sensitivity, system light path focusing is convenient, it is dry by environment light to can avoid
The beneficial effect disturbed.
Detailed description of the invention
Specific embodiments of the present invention are described in further detail with reference to the accompanying drawing.
Fig. 1 is a kind of structural schematic diagram of more light splitting mirror high sensitivity axis optical lens barrels of the invention；
Fig. 2 is a kind of skid rail structure diagram of optics guide-rail plate of the present invention；
Fig. 3 is a kind of rotaring wheel structure schematic diagram of optics guide-rail plate of the present invention；
Fig. 4 is the structural schematic diagram of another more light splitting mirror high sensitivity axis optical lens barrels of the invention；
In figure：1. more than first beam splitter cube, 2. catoptric lens, more than 3. second beam splitter cubes, 4. off axis reflector mirrors
Module, 5. fixed beam splitter cubes, 6. optically focused mirror tubes, 7. light source mounting racks, 8. lighting sources, 9. optical filters, 10.
Sleeve lens, 11. camera mounting brackets, 12. cameras, 13. first scalable shading casings, 14. second scalable shading sleeves
Pipe.
Specific embodiment
A specific embodiment of the invention is further illustrated with reference to the accompanying drawing, it should be noted that for this
The explanation of a little embodiments is used to help understand the present invention, but and does not constitute a limitation of the invention.In addition, described below
Inventing technical characteristic involved in each embodiment can be combined with each other as long as they do not conflict with each other.
Embodiment 1：
As shown in Figure 1 and Figure 2, one kind described in the present embodiment is divided mirror high sensitivity axis optical lens barrel, including more than first
Beam splitter cube 1, catoptric lens 2, more than second beam splitter cube 3, off axis reflector mirror module 4, band illumination functions image-forming module；
The catoptric lens 2, more than first beam splitter cube 1, more than second beam splitter cube 3 are sequentially connected along optical axis straight up, and
Form the path channels for running through three；More than first beam splitter cube 1 includes changeable at least two pieces of spectroscopes, and being used for will
The laser reflection of injection is to catoptric lens 2, and the light of self-reflection type object lens in future 2 is transmitted through more than second beam splitter cube 3；
At least the sum of two pieces of spectroscopical transmission bands in more than first beam splitter cube 1, can completely cover the full light of UV-VIS-NIR
Spectral limit；More than second beam splitter cube 3 is for separating spectral signal optical path and picture signal optical path；The off axis reflector mirror
Module 4 is connect with more than second beam splitter cube 3, is located in its spectral signal optical path, for focusing spectrum signal and being coupled into outside
Optical fiber；The band illumination functions image-forming module is connect with more than second beam splitter cube 3, is located in its picture signal optical path, is used for
It illuminates and observes sample surfaces.
Spectral signal described in the present embodiment refers to laser ablation substance microcell to be analyzed and the plasma inspired is sent out
Spectral signal out, the signified spectral signal optical path of the present invention refer to that the optical path that the spectral signal is propagated, the optical path arise from reflection
Formula object lens 2, successively through more than first beam splitter cube 1, more than second beam splitter cube 3, into off axis reflector mirror module 4 after be connected to
External fiber.Described image signal optical path refers to that illuminating ray and its picture signal formed after body surface emits are propagated
Optical path, which arises from catoptric lens 2, successively through more than first beam splitter cube 1, more than second beam splitter cube 3, into band
Illumination functions image-forming module.Described at least the sum of two pieces of spectroscopical transmission bands can completely cover the full spectrum model of UV-VIS-NIR
It encloses, it is meant that by several times using at least two pieces of spectroscopes, whole spectral signals within the scope of UV-VIS-NIR can be made to pass through
More than first beam splitter cube 1 is transmitted through more than second beam splitter cube 3, and then realizes the acquisition of the full spectral region of UV-VIS-NIR
And analysis.Changeable at least two pieces of spectroscopes, at least two pieces of spectroscopes can quickly be switched by referring to, make it
In one piece of optical element in the optical path, as separation optical path.
In the present embodiment, laser can be reflected from the horizontal direction incidence of more than first beam splitter cube 1 through wherein spectroscope
Afterwards, entrance catoptric lens 2 straight down, ablation substance microcell generate plasma, the spectrum letter of the plasma resonance
It number collects, is propagated in the form of directional light along direction straight up, more than first beam splitter cube 1 of entrance through catoptric lens 2, transmission
Spectroscope, the vertical optical path of more than first beam splitter cube 1 of process, more than second beam splitter cube 3 of entrance；In more than second beam splitter cube
After carrying out optical path separation in 3, spectral signal is conducted to 4 place optical path of off axis reflector mirror module, and then spectral signal is carried out
It collects, is sent into external spectrometer and is analyzed.Due at least the sum of two pieces of spectroscopical transmission bands in more than first beam splitter cube 1
The complete covering full spectrum of UV-VIS-NIR, the i.e. spectroscope by adjusting more than first beam splitter cube 1 can complete UV-VIS-
The full spectrum analysis of NIR, while full spectrum analysis is realized using timesharing switching spectroscope, cooperate coaxial design, spatial resolution, light
Spectrum signal intensity will not substantially be lost, and luminous flux is big, and spectral coupling effi is high, and spatial resolution and spectrum can be effectively ensured
Sensitivity for analysis.The present embodiment, may be implemented the big functions of modules of required three of microcell LIBS optical system, and take into account UV-
The full spectrum analysis of VIS-NIR and spatial resolution and spectrum analysis sensitivity.
Implementation column 2：
On the basis of the above embodiments, embodiment 2 is proposed, as shown in Figure 1 and Figure 2,
In more than first beam splitter cube 1, first piece of spectroscope is laser dichroscope, and second piece of spectroscope is laser beam splitter
Mirror；The laser dichroscope and laser beam splitter mirror, which have, waits optical thicknesses, and the plated film of effective reflection laser is respectively positioned on eyeglass face
To the one side in laser light incident direction.
The laser dichroscope of the present embodiment meaning, with there is high reflectance in optical maser wavelength and environs, at it
With the characteristic of high-transmission rate within the scope of commplementary wave length, used as main spectroscope.Signified laser beam splitter mirror of the invention, has
There is both partially reflective and partially transmissive characteristic in optical maser wavelength and environs, as secondary spectroscope, needing to analyze main point
Light microscopic is unable to use when the spectrum of transmission region.The sum of the laser beam splitter mirror and the dichroic transmission bands of laser, can completely cover
Cover the full spectral region of UV-VIS-NIR.As described above, laser is injected more than first piece after beam splitter cube, through laser beam splitter mirror or swash
After the reflection of light dichroscope, into catoptric lens 2, sample surfaces are focused to by catoptric lens 2, ablation substance generates etc. from
Daughter.The reflectance spectrum of sample surfaces（Picture signal）, plasma issue spectral signal collected through catoptric lens 2, with
Directional light form enters more than first beam splitter cube 1, through laser dichroscope or laser beam splitter mirror, more than second spectroscope of entrance
Cubes 3.Laser beam splitter mirror or laser dichroscope can be such that one of both is in optical path by being switched fast, then can be with timesharing point
The full spectral signal of secondary realization UV-VIS-NIR is transmitted through more than second beam splitter cube 3, and then carries out the acquisition of spectral signal and divide
Analysis.Simultaneously compared with existing axis optical technology, such a configuration obviates subband spectrum, especially ultraviolet spectra signal is saturating
Cross that rate is poor, the low problem of sensitivity for analysis.
In the present embodiment, first piece of spectroscope and second piece of spectroscopical optical thickness are equal, the effective reflection laser of the two
Plated film be respectively positioned on one side of the eyeglass towards laser light incident direction, reflection of the exchange to more than first beam splitter cube 1 between the two
Optical path, transmitted light path do not have an impact.Under normal circumstances, using first piece of spectroscope；When needing to analyze laser dichroic
The low area light time spectrum of mirror, uses second piece of spectroscope.
The ultraviolet wavelength laser that more than first beam splitter cube 1 in the present embodiment can be shorter than 400 nm for wavelength is set
Meter.
Embodiment 3：
On the basis of the above embodiments, embodiment 3 is proposed, as shown in Figure 1,
More than second beam splitter cube 3 includes changeable at least two pieces of optical mirror slips, wherein first piece of optical mirror slip is can
Light-exposed beam splitter is coated with visible light light-splitting film towards more than first beam splitter cube 1 on one side, and it is anti-reflection that another side is coated with visible light
Film；Second piece of optical mirror slip is ultraviolet enhancing aluminium film total reflective mirror.
The visible light beam splitter of the present embodiment meaning has part reflective portion transmissison characteristic in visible light region；The present invention
Signified ultraviolet enhancing aluminium film total reflective mirror has and has the characteristic of high reflectance in UV-VIS-NIR SPECTRAL REGION.Two pieces of optical mirror slips
It can quickly be switched, carry out microoptic imaging, when observing sample surface morphology, use visible light beam splitter, figure
As direction is projected after visible light beam splitter from more than second beam splitter cube 3 straight up on signal edge；Carrying out spectrum point
When analysis, using metal film total reflective mirror, spectral signal projects after total reflective mirror reflects.At this point, the transmission of more than second beam splitter cube 3
Optical path be picture signal optical path, reflected light path be spectral signal optical path, i.e., off axis reflector mirror module 4 and with illumination functions be imaged mould
Block is located on the reflected light path and transmitted light path of more than second beam splitter cube 3.
In the present embodiment, second piece of optical mirror slip is ultraviolet enhancing aluminium film total reflective mirror, makes the coaxial LIBS with the present apparatus
Optical system can operate at ultraviolet spectral range.When using other total reflective mirrors, it is also able to achieve UV-VIS-NIR SPECTRAL REGION
Optical path separation.
Embodiment 4：
On the basis of the above embodiments, embodiment 4 is proposed, as shown in Fig. 2,
Ultraviolet enhancing aluminium film total reflective mirror in more than second beam splitter cube 3 can be replaced with full impregnated window mirror, described visible
Light beam splitter is equal with the optical thickness of full impregnated window mirror.
The full impregnated window mirror of the present embodiment meaning is with the spy in 190-1000 nm SPECTRAL REGION with EO-1 hyperion percent of pass
Property.Two pieces of optical mirror slips can quickly be switched, and microoptic imaging is being carried out, and when observing sample surface morphology, be used
Visible light beam splitter, picture signal enter band illumination functions from more than second beam splitter cube 3 after the reflection of visible light beam splitter
Image-forming module；When carrying out spectrum analysis, using full impregnated window mirror, after spectral signal is through the transmission of full impregnated window mirror, into from
Axis magnifier module 4.At this point, the reflected light path of more than second beam splitter cube 3 is picture signal optical path, transmitted light path is spectrum letter
Number optical path off axis reflector mirror module 4 and is located at the transmitted light of more than second beam splitter cube 3 with illumination functions image-forming module
On road and reflected light path.
Embodiment 5：
On the basis of the above embodiments, embodiment 5 is proposed, as shown in Figure 1 and Figure 2, more than first beam splitter cube 1 and the
More than two beam splitter cubes 3 are cube structure, and upper and lower, left and right side center is provided with light hole, along its forward and backward side
Face diagonal is additionally provided with optics guide-rail plate；The optics guide-rail plate is equipped with optics mounting surface；The optics mounting surface and cube
The level of structure, vertical axis all have 45 degree of angles；The optics mounting surface includes at least two optics installation positions, is used for one
To at least two eyeglasses of installation；The optics guide-rail plate is also used to switch to any of optics mounting surface optics installation position
On horizontal, the vertical axial intersection point of cube structure.
The implementation of the optics guide-rail plate includes but is not limited to rail structure as shown in Figure 3, passes through optics guide rail
Any spectroscope can be adjusted working position and be not necessarily to optical path adjusting by the one-dimensional sliding of plate；The slide construction can be hand, can also be
Electrodynamic type.Rail structure has simple, compact advantage.
The present embodiment constructs path channels by light hole, and more specifically, the downside of more than first beam splitter cube 1 is logical
Unthreaded hole is connected to catoptric lens 2, and upper side is connected to the upper side light hole of more than second beam splitter cube 3, spectroscopical more than first
Left side or right side light hole can have as laser light incident hole, inject for laser.Two in more than second beam splitter cube 3
Block optical mirror slip is metal film total reflective mirror and visible light beam splitter, and the upper side light hole of more than second beam splitter cube 3 is as figure
As signal outlet, for being connected to band illumination functions image-forming module, the light hole of left or right side then goes out as spectral signal
Mouthful, for being connected to off axis reflector mirror module 4；When two pieces of optical mirror slips in more than second beam splitter cube 3 are full impregnated window mirror
It exports, is used for and band as picture signal with the left or right side face light hole of visible light beam splitter, more than second beam splitter cube 3
The connection of illumination functions image-forming module, the light hole of upper side are then used as spectral signal to export, and are used for and off axis reflector mirror module 4
Connection.It ultimately forms, the laser light incident optical path including more than first beam splitter cube 1, catoptric lens 2；Including reflective
Object lens 2, more than first beam splitter cube 1, more than second beam splitter cube 3, off axis reflector mirror module 4 spectral signal optical path；Including
Catoptric lens 2, more than first beam splitter cube 1, more than second beam splitter cube 3, the picture signal with illumination functions image-forming module
Optical path, and three optical paths share objective lens optical axis.In the present embodiment, the interior level in cube structure of the optics mounting surface,
Optics installation position on vertical axial direction intersection point may be defined as working position, remaining optics installation position is idle position, by operating optics
The movement of guide-rail plate can rapid interchangeable working position and idle position.Eyeglass in the optics installation position, in more than first spectroscope
Spectroscope therein is referred specifically in cube 1, refers specifically to optical mirror slip therein in more than second beam splitter cube 3.More than first point
In light microscopic cube 1, operation optics guide-rail plate movement can make first piece of spectroscope or second piece of spectroscope be in working position, work
Spectroscope on position is in the intersection point of laser light incident optical path and picture signal optical path, for separating optical path；More than second spectroscope is vertical
In side 3, operation optics guide-rail plate movement can make first piece of optical mirror slip or second piece of optical mirror slip be in working position, working position
On optical mirror slip be in the intersection point of spectral signal optical path and picture signal optical path, for separating optical path.
In the present embodiment, the horizontal side light hole of more than first beam splitter cube 1, as left side light hole can be equipped with laser
Enhanced window mirror, for stopping ambient dust to enter lens barrel；At this point, external laser can be from the left side of more than first beam splitter cube 1
Face light hole is incident, after crossing laser enhanced window mirror, after the spectroscope reflection in more than first beam splitter cube 1 straight down into
Enter catoptric lens 2；The spectral signal of generation straight up, becomes directional light after catoptric lens 2, into more than first light splitting
Mirror cube 1, after wherein spectroscope, more than second beam splitter cube 3 of entrance；Spectral signal enters second along direction straight up
After more beam splitter cubes 3, optical path separation is carried out.The basic knot of more than first beam splitter cube 1, more than second beam splitter cube 3
Structure can be identical.
Embodiment 6
On the basis of the above embodiments, embodiment 6 is proposed, as shown in Figure 1 and Figure 2,
The off axis reflector mirror module 4 enters for incident spectral signal to be focused to the focal point perpendicular to incident direction
It penetrates light direction, be emitted the two sides panel of light direction equipped with light hole；The outgoing light direction light hole is for connecting and making outside
Optical fiber is located at focal point, and incident light direction light hole is for being connected to more than second beam splitter cube 3；
The band illumination functions image-forming module includes fixed beam splitter cube 5, lighting device and imaging device；It is described fixed
Beam splitter cube 5 is cube structure, and upper and lower, left and right side center is provided with light hole, fixes between forward and backward side
Visible light beam splitter is installed；The upper and lower, left and right side of the visible light beam splitter and fixed beam splitter cube 5 all has
45 degree of angles have part reflective portion transmissison characteristic in visible light region；The visible light beam splitter is towards more than second point
The one side of light microscopic cube 3 plates visible light beam splitting coating, and another side plates visible light anti-reflection film；The transmitted light of fixed beam splitter cube 5
Lighting device is housed on road, reflected light path one of both, imaging device is housed in another optical path；The fixed beam splitter cube
5 one of light hole is for the connection with more than second beam splitter cube 3；The lighting device is for providing lighting source 8；
The imaging device is for observing sample surfaces.
In the present embodiment, can be by being equipped with one piece of replaceable off axis reflector mirror inside off axis reflector mirror module 4, it will
Parallel incident spectral signal focuses to the focal point in direction normal thereto, then passes through the horizontal and perpendicular of its internal light hole formation
Spectral signal is transferred to external fiber by straight light path, into external spectroanalysis instrument.When in use, this axis optical lens barrel needs
Want external optical fiber and spectrometer.Plasma light spectrum signal passes through the after the collection of catoptric lens 2 respectively in the form of directional light
After more than one beam splitter cube 1, more than second beam splitter cube 3, into off axis reflector mirror module 4, reflects and gather through off axis reflector mirror
Coke is coupled into external optical fiber, is sent into spectrometer analysis to its focal point.Pass through its internal optical path with illumination functions image-forming module
With visible light beam splitter, the coaxial design of illumination and observation is realized.
Embodiment 7：
On the basis of the above embodiments, embodiment 7 is proposed, as shown in Figure 1 and Figure 2,
The off axis reflector mirror of the ultraviolet enhancing aluminium film of one piece of plating is installed, for believing spectrum inside the off axis reflector mirror module 4
The focal point perpendicular to incident direction number is focused to, light hole is set to face plate center；Affiliated off axis reflector mirror back has 2 to 3
A vernier knob, for focusing；Closed metal set is bolted at the outgoing light direction light hole of the off axis reflector mirror module 4
Pipe, metal sleeve distal center are provided with the optical fiber mounting hole of standard；The center of optical fiber mounting hole is located at off axis reflector mirror foci,
For connecting external fiber；
The lighting device is made of the optically focused mirror tube 6 installed along same axis, light source mounting rack 7, lighting source 8, illumination light
Source 8 is installed on 7 center of light source mounting rack；The imaging device is by optical filter 9, the sleeve lens 10, phase installed along same axis
Machine mounting rack 11, camera 12 form；The optical filter 9 has high optical density (OD) to laser, high for visible light saturating；The camera
Mounting rack 11 is located at 10 focal point of sleeve lens, and can be displaced along 10 optical axis of sleeve lens, and tail portion connects with rotatable camera
Mouthful, camera 12 is installed on the interface.
In the present embodiment, the light that lighting source 8 issues passes through fixed spectroscope after the focusing of optically focused mirror tube 6 respectively
Cube 5, more than second beam splitter cube 3, more than first beam splitter cube 1, catoptric lens 2, finally focus to sample surfaces, are formed
Visible light spot；The visible light spot can also indicate that focal position while illuminating sample surfaces.In imaging device, the phase
Machine mounting rack 11 is located at 10 focal point of sleeve lens, and can make sample surfaces figure along the optical axis accurate displacement of sleeve lens 10
As being accurately imaged to 12 photosurface of camera.The light of sample surfaces reflection, after the collection of catoptric lens 2, with directional light shape
Formula after more than first beam splitter cube 1, more than second beam splitter cube 3, fixed beam splitter cube 5, optical filter 9, passes through respectively
Sleeve lens 10 focus at camera 12.Lighting device, imaging device can be respectively arranged in fixed beam splitter cube 5 at this time
On reflected light path, transmitted light path.
The vernier knob at off axis reflector mirror rear portion in the present embodiment is used for fine adjustment off axis reflector mirror inclination angle, and realizes
The fine adjustment of focal position.
Catoptric lens 2 in the present embodiment preferably with ultraviolet enhancing aluminium film plated film.
In the present embodiment, described one kind is divided the highly sensitive axis optical lens barrel of the full spectrum of mirror, can divide by function
It is focused for laser microcell, spectral collection analysis, microoptic imaging three zones module.Laser microcell focus module includes first
More beam splitter cubes 1, catoptric lens 2；Spectral collection analysis module is vertical comprising more than second beam splitter cube 3, off axis reflector mirror
Side 4；Microoptic image-forming module includes fixed beam splitter cube 5, optically focused mirror tube 6, light source mounting rack 7, lighting source 8, filter
Mating plate 9, sleeve lens 10, camera mounting bracket 11, camera 12.Catoptric lens 2 is shared by three big modules.Laser microcell focus with
The optical axis of remaining two big module separates at the spectroscope of more than first 1 center of beam splitter cube, 45 degree of installations, and laser is located at reflection
Optical path, spectral signal and picture signal are located at transmitted light path.Spectral collection analysis and the optical axis of microoptic image-forming module are the
More than two beam splitter cubes（3）It is separated at the optical mirror slip of the 45 degree of installations in center.
In the present embodiment, optical path, optical interface are collected at reflective spectrum using catoptric lens 2, off axis reflector microscope group
It is few, hyper spectral reflectance is all had in the full spectral region of UV-VIS-NIR, and do not influenced by color difference；The ultraviolet increasing of plating is selected simultaneously
The off axis reflector mirror of strong aluminium film, has high reflectance, in addition more than second beam splitter cube 3 in the range of being greater than 190-1100nm
Two pieces spectroscopical group of piecemeal in interior ultraviolet enhancing aluminium film total reflective mirror or full impregnated window mirror and more than first beam splitter cube 1
It closes, the optical path of formation can transmit the spectrum greater than 190-1100 nm range, coaxial LIBS system of the invention is enable to work in
Ultraviolet region, and there is larger throughput.
Embodiment 8：
On the basis of the above embodiments, embodiment 8 is proposed, as shown in Figure 1 and Figure 2,
The off axis reflector mirror and catoptric lens 2 have pinpointed focus ratio, and numerical value is equal to the numerical aperture of catoptric lens 2
The ratio between with the numerical aperture of external spectrometer.
The full spectrum high sensitivity axis optical lens barrel of more light splitting mirrors that the present invention announces needs external optical fiber and connects spectrum
Instrument uses.In general, the numerical aperture NAo of catoptric lens 2 is greater than the receivable numerical aperture NAs of spectrometer.If not into
The matching of row numerical aperture, then the partial spectrum signal that catoptric lens 2 is collected may be excessive without for external spectrum because of incidence angle
Instrument is received, and transmission loss is generated.The pinpointed focus ratio of off axis reflector mirror of the present invention and catoptric lens 2 is equal to reflection
The ratio between the numerical aperture of the numerical aperture of formula object lens 2 and external spectrometer, the at this time maximum of off axis reflector mirror output spectrum signal
Angular aperture be exactly equal to external spectrometer maximum can receive angular aperture, off axis reflector mirror module 4 export spectral signal, almost
Completely external spectrometer effectively receives, and spectra transfer factor is best.
Embodiment 9：
On the basis of the above embodiments, embodiment 9 is proposed, as shown in Figure 1 and Figure 2,
Whole optical paths of the catoptric lens 2 to lighting source 8, camera 12, optical fiber mounting hole are in lighttight closing
In environment.
Specifically, catoptric lens 2, more than first beam splitter cube 1 described in the present embodiment, more than second beam splitter cube 3,
The end face close proximity of fixed beam splitter cube 5, off axis reflector mirror module 4, and more than first beam splitter cube 1, more than second point
Light microscopic cube 3, fixed beam splitter cube 5 unused light hole blocked completely with standard thread shading cover；The sleeve
Between lens 10 and camera mounting bracket 11, it is cased with the first scalable shading casing 13；The optically focused mirror tube 6 and light source mounting rack 7
Between, it is cased with the second scalable shading casing 14.
In the present embodiment, the catoptric lens 2 to lighting source 8, camera 12, off axis reflector mirror module 4 whole light
Road is in lighttight enclosed environment.The catoptric lens 2, more than first beam splitter cube 1, more than second beam splitter cube
3, fixed beam splitter cube 5, off axis reflector mirror module 4 end face close proximity, and more than first beam splitter cube more than 1, second
Beam splitter cube 3, fixed beam splitter cube 5 unused light hole blocked completely with standard thread shading cover.Whole optical paths
It is in lighttight enclosed environment, environment light, stray light on the one hand can be prevented to enter camera 12, optical fiber mounting hole, be
Microoptic imaging, microspectroscopy provide dark background environment, improve dim light imaging and the dim light of microcell LIBS system
On the other hand detectability can block dust, prevent dust from entering internal optical path, pollution, damage optical mirror slip.
Embodiment 10：
On the basis of the above embodiments, embodiment 10 is proposed, as shown in Figure 1 and Figure 2,
The optics guide-rail plate of more than second beam splitter cube 3 and the optics guide-rail plate of more than first beam splitter cube 1 have 90 degree
Angle；The laser installed in the visible light beam splitter and more than first beam splitter cube 1 installed in more than second beam splitter cube 3
Dichroscope, laser beam splitter mirror have equal optical thickness.
The structure of the present embodiment can make more than first beam splitter cube 1, more than second beam splitter cube 3 to transmitted light optical axis
Offset is cancelled out each other.
Embodiment 11：
On the basis of the above embodiments, embodiment 11 is proposed, as shown in Figure 1 and Figure 2,
The laser dichroic installed in the visible light beam splitter and more than first beam splitter cube 1 of the fixed beam splitter cube 5
Mirror, laser beam splitter mirror have equal optical thickness；The visible light beam splitter of the fixed beam splitter cube 5 and more than first point
The optics guide-rail plate of light microscopic cube 1 has 90 degree of angles.
The structure of the present embodiment can make more than first beam splitter cube 1, fixed beam splitter cube 5 to transmitted light optical axis
Offset is cancelled out each other.
Embodiment 12：
On the basis of the above embodiments, it proposes embodiment 12, as shown in figure 4, the optics guide-rail plate is rotaring wheel structure, passes through
The rotation of optics guide-rail plate can adjust any spectroscope to working position.
In the present embodiment, the optics guide-rail plate is rotaring wheel structure, and feature is that at least two pieces of eyeglasses are equally spaced in a circle
Can rotate on week and around the center of circle, by rotating wheel, it can be achieved that at working position eyeglass quick replacement, and be not necessarily to optical path adjusting；
Rotaring wheel structure has higher replacement speed；The rotaring wheel structure can be hand, can also be electrodynamic type.
Embodiment 13：
As shown in Figure 1, one kind described in the present embodiment is divided mirror high sensitivity axis optical lens barrel, including being divided first more
Mirror cube 1, catoptric lens 2, more than second beam splitter cube 3, off axis reflector mirror module 4, band illumination functions image-forming module；It is described
Catoptric lens 2, more than first beam splitter cube 1, more than second beam splitter cube 3 are sequentially connected along optical axis straight up, and are formed
Through the path channels of three；More than first beam splitter cube 1 includes that at least one piece of spectroscope, the laser for will inject into is anti-
It is incident upon catoptric lens 2, and the light of self-reflection type object lens in future 2 is transmitted through more than second beam splitter cube 3；Described more than second point
Light microscopic cube 3 is for separating spectral signal optical path and picture signal optical path；The off axis reflector mirror module 4 and more than second spectroscope
Cubes 3 connections, are located in more than second spectroscope spectral signal optical path, for focusing spectrum signal and being coupled into external fiber；It is described
Band illumination functions image-forming module is connect with more than second spectroscope, is located at more than second spectroscopic image signal light road, for passing through
It illuminates and observes sample surfaces；More than second beam splitter cube 3 includes at least two pieces of changeable optical mirror slips, wherein first
Block optical mirror slip is visible light beam splitter, is coated with visible light light-splitting film, another side on one side towards more than first beam splitter cube 1
It is coated with visible light anti-reflection film；Second piece of optical mirror slip is total reflective mirror；One piece of plating is installed complete inside the off axis reflector mirror module 4
The off axis reflector mirror of anti-film, for spectral signal to be focused to the focal point perpendicular to incident direction.
At least one piece of spectroscope that more than first beam splitter cube 1 includes in this implementation, can choose is at least one piece of laser
Beam splitter.Its working principle is that：When laser can be from the horizontal direction incidence of more than first beam splitter cube 1, through wherein laser beam splitter
Mirror reflection after, straight down enter catoptric lens 2, ablation substance microcell generate plasma, the plasma resonance
Spectral signal is collected through catoptric lens 2, is propagated in the form of directional light along direction straight up, more than first beam splitter cube of entrance
1, through laser beam splitter mirror, the vertical optical path of more than first beam splitter cube 1 of process, more than second beam splitter cube 3 of entrance；More than second
After carrying out optical path separation in beam splitter cube 3, spectral signal is conducted to 4 place optical path of off axis reflector mirror module, and then by light
Spectrum signal is collected, and is sent into external spectrometer and is analyzed.When the ultraviolet wavelength laser light incident for being shorter than 400 nm using wavelength
When, the laser beam splitter mirror in more than first beam splitter cube 1 can be through close to all band signal spectrum.More than second light splitting of cooperation
The design of mirror cube 3, catoptric lens and off axis reflector mirror, entire optical path can transmit the spectrum close to UV-VIS-NIR range
Signal, and spatial resolution is unrestricted, spectral signal intensity will not substantially be lost, luminous flux is big, and spectral coupling effi is high,
Spatial resolution and spectrum analysis sensitivity can be effectively ensured, while being separated using the optical path of more than second beam splitter cube 3, energy
Enough timesharing are using spectral signal optical path and picture signal optical path, easily to realize that spectral collection and optical path are focused.The present embodiment,
The big functions of modules of required three of microcell LIBS optical system may be implemented, and taken into account the full spectrum analysis of UV-VIS-NIR and sky
Between resolution ratio and spectrum analysis sensitivity.
All parts being not exactly defined in the present embodiment can refer to embodiment 1, the related definition one in embodiment 2
It causes.
Claims (11)
1. a kind of more light splitting mirror high sensitivity axis optical lens barrels, it is characterised in that：Including more than first beam splitter cube（1）,
Catoptric lens（2）, more than second beam splitter cube（3）, off axis reflector mirror module (4), band illumination functions image-forming module；It is described anti-
Penetrate formula object lens（2）, more than first beam splitter cube（1）, more than second beam splitter cube（3）It is sequentially connected along optical axis straight up, and
Form the path channels for running through three；More than first beam splitter cube（1）Comprising at least two pieces of changeable spectroscopes, it is used for
The laser reflection that will inject into is to catoptric lens（2）, and self-reflection type object lens in future（2）Light be transmitted through more than second spectroscope
Cube（3）；More than first beam splitter cube（1）Interior at least the sum of two pieces of spectroscopical transmission bands, can completely cover UV-
The full spectral region of VIS-NIR；More than second beam splitter cube（3）For separating spectral signal optical path and picture signal optical path；
The off axis reflector mirror module (4) and more than second beam splitter cube（3）It connects and is located in its spectral signal optical path, for focusing
Spectrum signal is simultaneously coupled into external fiber；The band illumination functions image-forming module and more than second beam splitter cube（3）It connects and is located at
In its picture signal optical path, for illuminating and observing sample surfaces.
2. a kind of more light splitting mirror high sensitivity axis optical lens barrels according to claim 1, it is characterised in that：Described
More than one beam splitter cube（1）In, first piece of spectroscope is laser dichroscope, and second piece of spectroscope is laser beam splitter mirror；It is described
Laser dichroscope and laser beam splitter mirror, which have, waits optical thicknesses, and the plated film of effective reflection laser is respectively positioned on eyeglass and enters towards laser
Penetrate the one side in direction.
3. any more light splitting mirror high sensitivity axis optical lens barrels according to claim 1 or 2, it is characterised in that：
More than second beam splitter cube（It 3) include at least two pieces of changeable optical mirror slips, wherein first piece of optical mirror slip is visible
Light beam splitter, towards more than first beam splitter cube（1）Be coated with visible light light-splitting film on one side, it is anti-reflection that another side is coated with visible light
Film；Second piece of optical mirror slip is total reflective mirror or full impregnated window mirror；The optics of the visible light beam splitter and full impregnated window mirror is thick
It spends equal.
4. a kind of more light splitting mirror high sensitivity axis optical lens barrels according to claim 3, it is characterised in that：Described
More than one beam splitter cube（1）With more than second beam splitter cube（It 3) is cube structure, upper and lower, left and right side center
It is provided with light hole, is additionally provided with optics guide-rail plate along its forward and backward side diagonal line；The optics guide-rail plate is installed equipped with optics
Face；The optics mounting surface and the level of cube structure, vertical axis all have 45 degree of angles；The optics mounting surface includes
At least two optics installation positions are used at least two eyeglasses of one-to-one installation；The optics guide-rail plate is also used to install optics
Any of face optics installation position switches to the level of cube structure, on vertical axis intersection point.
5. a kind of more light splitting mirror high sensitivity axis optical lens barrels according to claim 4, it is characterised in that：Described
More than two beam splitter cubes（3) optics guide-rail plate and more than first beam splitter cube（1）Optics guide-rail plate have 90 degree of angles；Institute
State more than second beam splitter cube（3) the visible light beam splitter and more than first beam splitter cube installed in（1）The laser two of interior installation
There is equal optical thickness to Look mirror, laser beam splitter mirror.
6. any more light splitting mirror high sensitivity axis optical lens barrels according to claim 4 or 5, it is characterised in that：
The off axis reflector mirror module (4), for spectral signal to be focused to the focal point perpendicular to incident direction, incident light side
To, outgoing light direction two sides panel be equipped with light hole；The outgoing light direction light hole is for connecting and making external fiber position
In the focal point, incident light direction light hole is for being connected to more than second beam splitter cube（3)；Mould is imaged in the band illumination functions
Block includes fixed beam splitter cube（5）, lighting device and imaging device；The fixed beam splitter cube（5）For cube
Structure, upper and lower, left and right side center are provided with light hole, visible light beam splitter are fixedly installed between forward and backward side；
The visible light beam splitter and fixed beam splitter cube（5）Upper and lower, left and right side all have 45 degree of angles, in visible light
Region has part reflective portion transmissison characteristic；More than second beam splitter cube of the visible light beam splitter direction（3) one side plating
Visible light beam splitting coating, another side plate visible light anti-reflection film；Fixed beam splitter cube（5）Transmitted light path, both reflected light paths
One of it is upper lighting device is housed, imaging device is housed in another optical path；The fixed beam splitter cube（5）One of them is logical
Unthreaded hole is used for and more than second beam splitter cube（3) connection；The lighting device is for providing lighting source（8）；The imaging
Device is for observing sample surfaces.
7. a kind of more light splitting mirror high sensitivity axis optical lens barrels according to claim 6, it is characterised in that：It is described solid
Fixed pattern beam splitter cube（5）Visible light beam splitter and more than first beam splitter cube（1）Laser dichroscope, the laser of interior installation
Beam splitter has equal optical thickness；The fixed beam splitter cube（5）Visible light beam splitter and more than first spectroscope
Cube（1）Optics guide-rail plate have 90 degree of angles.
8. a kind of more light splitting mirror high sensitivity axis optical lens barrels according to claim 7, it is characterised in that：It is described from
One piece of plating is installed inside axis magnifier module (4) to be all-trans the off axis reflector mirror of film, for by spectral signal focus to perpendicular to
The focal point of incident direction, light hole are set to the center of each panel；There are 2 to 3 vernier knobs at off axis reflector mirror back,
For focusing；Closed metal casing, metallic sheath are bolted at the outgoing light direction light hole of the off axis reflector mirror module (4)
Pipe end center is provided with the optical fiber mounting hole of standard；The center of optical fiber mounting hole is located at off axis reflector mirror foci；The illumination
Device is by the optically focused mirror tube installed along same axis（6）, light source mounting rack（7）, lighting source（8）Composition, lighting source（8）Peace
Loaded on light source mounting rack（7）Center；The imaging device is by the optical filter installed along same axis（9）, sleeve lens（10）, phase
Machine mounting rack（11）, camera（12）Composition；The optical filter（9）There is high optical density (OD) to laser, it is high for visible light saturating；Institute
State camera mounting bracket（11）Positioned at sleeve lens（10）Focal point, and can be along sleeve lens（10）Optical axis displacement, tail portion has
Rotatable camera interface, camera（12）It is installed on the interface.
9. a kind of more light splitting mirror high sensitivity axis optical lens barrels according to claim 8, it is characterised in that：It is described from
Axis reflecting mirror and catoptric lens（2）With pinpointed focus ratio, numerical value is equal to catoptric lens（2）Numerical aperture with it is external
The ratio between numerical aperture of spectrometer.
10. the one kind appointed according to claim 8 or claim 9 is divided mirror high sensitivity axis optical lens barrel, it is characterised in that：
The catoptric lens（2）To lighting source（8）, camera（12）, optical fiber mounting hole whole optical paths be in lighttight envelope
Closed loop is domestic.
11. a kind of more light splitting mirror high sensitivity axis optical lens barrels, it is characterised in that：Including more than first beam splitter cube（1）,
Catoptric lens（2）, more than second beam splitter cube（3）, off axis reflector mirror module（4）, band illumination functions image-forming module；It is described anti-
Penetrate formula object lens（2）, more than first beam splitter cube（1）, more than second beam splitter cube（3）It is sequentially connected along optical axis straight up, and
Form the path channels for running through three；More than first beam splitter cube（1）Include laser beam splitter mirror, swashs for what be will inject into
Light reflexes to catoptric lens（2）, and self-reflection type object lens in future（2）Light be transmitted through more than second beam splitter cube（3）；Institute
State more than second beam splitter cube（3）For separating spectral signal optical path and picture signal optical path；The off axis reflector mirror module（4）
With more than second beam splitter cube（3）Connection is located in more than second spectroscope spectral signal optical path, for focusing spectrum signal and coupling
Enter external fiber；The band illumination functions image-forming module is connect with more than second spectroscope, is located at more than second spectroscopic image signal
In optical path, for by illuminating and observing sample surfaces；More than second beam splitter cube（3）It is changeable including at least two pieces
Optical mirror slip, wherein first piece of optical mirror slip is visible light beam splitter, towards more than first beam splitter cube（1）Be coated on one side
Visible light light-splitting film, another side are coated with visible light anti-reflection film；Second piece of optical mirror slip is total reflective mirror；The off axis reflector mirror module
（4）Inside is equipped with one piece of off axis reflector mirror for plating the film that is all-trans, for spectral signal to be focused to the coke perpendicular to incident direction
At point.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811055454.3A CN108919472A (en) | 2018-09-11 | 2018-09-11 | A kind of more light splitting mirror high sensitivity axis optical lens barrels |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201811055454.3A CN108919472A (en) | 2018-09-11 | 2018-09-11 | A kind of more light splitting mirror high sensitivity axis optical lens barrels |
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| CN108919472A true CN108919472A (en) | 2018-11-30 |
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|---|---|---|---|
| CN201811055454.3A Pending CN108919472A (en) | 2018-09-11 | 2018-09-11 | A kind of more light splitting mirror high sensitivity axis optical lens barrels |
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| CN109814226A (en) * | 2019-04-03 | 2019-05-28 | 史强 | A kind of eyeglass connection system |
| CN113640219A (en) * | 2021-07-13 | 2021-11-12 | 中国科学院半导体研究所 | Linkage switching device for excitation light, beam splitter and optical filter of spectrometer |
| CN114235696A (en) * | 2021-12-17 | 2022-03-25 | 清华大学 | Material micro-area optical property measuring device |
| CN114660047A (en) * | 2022-03-15 | 2022-06-24 | 中国工程物理研究院材料研究所 | Full-spectrum coaxial optical lens barrel |
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