CN114152195B - Dual-wavelength common-path laser interferometry device and method - Google Patents
Dual-wavelength common-path laser interferometry device and method Download PDFInfo
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- CN114152195B CN114152195B CN202111438277.9A CN202111438277A CN114152195B CN 114152195 B CN114152195 B CN 114152195B CN 202111438277 A CN202111438277 A CN 202111438277A CN 114152195 B CN114152195 B CN 114152195B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
Aiming at the problems that when the line expansion and deformation measurement is carried out by the existing measuring devices such as a Michelson interferometer, a Fizeau interferometer and the like, the error is large due to the fact that the measuring arm beam and the reference arm beam are distributed in a staggered manner in space and are influenced by the air refractive index, and the dual-wavelength common-path laser interferometry cannot be carried out, the invention provides a dual-wavelength laser interferometry device and a dual-wavelength laser interferometry method for resisting the interference of an air environment. According to the testing device and the testing method, through scientific light path design, the measuring arm light beam and the reference arm light beam are symmetrically arranged, and the dual-wavelength common-light-path laser interferometry is realized by optical components, so that the influence of the refractive index of an air environment is greatly reduced, and the accuracy of linear expansion and deformation measurement is improved.
Description
Technical Field
The invention belongs to the technical field of laser measurement, and particularly relates to a dual-wavelength common-path laser interferometry device and a dual-wavelength common-path laser interferometry method.
Background
The laser interferometry technology has been widely used for measuring linear expansion and deformation of objects or materials due to the characteristics of high measurement accuracy, traceability to laser wavelength, high resolution and the like. The linear expansion coefficient measuring device of many institutions at home and abroad uses the laser interferometry technology, such as China national institute of metrology, german Federal physical technology institute and the like. In the case of laser interferometry, the laser wavelength is affected by the refractive index of air and errors occur. The refractive index of air at the laser wavelength is mainly affected by parameters such as air temperature, humidity, atmospheric pressure, carbon dioxide concentration, etc. Since uniformity and consistency of the air parameters on the laser propagation path cannot be ensured, accurate measurement of the air refractive index during laser interference is difficult to achieve. In the technical field of laser interferometry, how to reduce or even overcome the influence of the refractive index of air is always a very important problem for researchers at home and abroad.
The dual-wavelength laser interferometry technology is a method for correcting the influence of the air refractive index on the laser interferometry result in real time. The method simultaneously uses two lasers with different wavelengths lambda 1 and lambda 2 for interferometry to obtain real-time displacement measurement values L1 and L2, and obtains real-time compensation of air refractive index by introducing an Abbe's number A, wherein the displacement L to be measured has the following relation with the displacement measurement values of the two wavelengths:
L＝L1-A(L2-L1) (1)
The dispersion coefficient a in the formula (1) is related to the wavelengths λ1 and λ2 and is mainly affected by humidity, but this effect is not significant under normal measurement conditions, so that it can be assumed to be a constant during measurement. By means of the dual-wavelength laser interferometry technique, the influence of the air refractive index on the laser interferometry result can be reduced under the condition that the dispersion coefficient A is known.
The existing laser interferometry devices, such as michelson interferometers, fizeau interferometers and the like, have the following defects when measuring linear expansion and deformation of objects or materials: 1. the measuring arm beam and the reference arm beam are distributed and misplaced in space, and the two are greatly influenced by air turbulence, so that the laser interferometry error introduced by the air refractive index is obvious, and the device has poor anti-interference performance; 2. the method is not suitable for simultaneous interferometry of dual-wavelength lasers, i.e. the measurement accuracy cannot be improved by using the dual-wavelength laser interferometry technology.
In order to solve the defects, the invention provides a dual-wavelength laser interferometry device and a dual-wavelength laser interferometry method for resisting air environment interference. The measuring device and the method are applicable to simultaneous interferometry of two different wavelengths, have a quasi-common optical path and a symmetrical distributed system structure, and enable the measuring arm beam and the reference arm beam to be basically consistent under the influence of air turbulence, thereby reducing air environment interference and improving interferometry precision.
Disclosure of Invention
To achieve the purpose, the invention adopts the following technical scheme:
the dual-wavelength common-path laser interferometry device comprises a broadband plane reflector, a first broadband polarization beam splitter, a first broadband right-angle prism, a broadband 1/2 wave plate, a second broadband polarization beam splitter, a second broadband right-angle prism, a first broadband 1/4 wave plate, a second broadband 1/4 wave plate, a third broadband right-angle prism, a third broadband polarization beam splitter, a broadband pyramid prism, a fourth broadband polarization beam splitter, a fourth broadband right-angle prism, a third broadband 1/4 wave plate, a fourth broadband 1/4 wave plate, a fifth broadband right-angle prism, a fifth broadband polarization beam splitter, a first photoelectric detector, a first polarizing plate, a first filter plate, a second photoelectric detector, a second polarizing plate, a second filter plate, a dichroic mirror and a laser;
the position relationship of each part is described by taking a cuboid to-be-tested sample as the center: a third broadband 1/4 wave plate and a second broadband 1/4 wave plate are arranged up and down in parallel with the right end face of the cuboid to-be-tested sample, a fourth broadband right-angle prism, a fourth broadband polarization beam splitter, a third broadband polarization beam splitter and a third broadband right-angle prism are arranged on the right sides of the third broadband 1/4 wave plate and the second broadband 1/4 wave plate and in parallel with the right sides of the third broadband 1/4 wave plate and the second broadband 1/4 wave plate from top to bottom in parallel, and the right sides of the fourth broadband right-angle prism are parallel to the upper side of the fourth broadband polarization beam splitter, the lower side of the fourth broadband polarization beam splitter and the right sides of the third broadband right-angle prism; a broadband pyramid prism is arranged on the right side of the fourth broadband polarization beam splitter and the right side of the third broadband polarization beam splitter side by side, and the hypotenuse of the broadband pyramid prism is parallel to the right side surfaces of the fourth broadband polarization beam splitter and the third broadband polarization beam splitter;
A fourth broadband 1/4 wave plate and a first broadband 1/4 wave plate are arranged up and down in parallel with the left end face of the cuboid to-be-tested sample, a fifth broadband right-angle prism, a fifth broadband polarization beam splitter, a second broadband polarization beam splitter and a second broadband right-angle prism are arranged on the left sides of the fourth broadband 1/4 wave plate and the first broadband 1/4 wave plate and in parallel with the left sides of the fourth broadband 1/4 wave plate and the first broadband 1/4 wave plate from top to bottom in parallel, and the right-angle sides of the fifth broadband right-angle prism are parallel to the upper side of the fifth broadband polarization beam splitter, the lower side of the second broadband polarization beam splitter and the right-angle side of the second broadband right-angle prism; a broadband 1/2 wave plate is arranged on the left side of the second broadband polarization beam splitter, the left side of the second broadband polarization beam splitter is parallel to the right side of the broadband 1/2 wave plate, a first broadband polarization beam splitter and a first broadband right-angle prism are arranged on the left side of the broadband 1/2 wave plate side by side from top to bottom, a right-angle side of the first broadband right-angle prism is parallel to the left side of the broadband 1/2 wave plate, and the other right-angle side of the first broadband right-angle prism is parallel to the lower side of the first broadband polarization beam splitter;
The fifth broadband right-angle prism and the fourth broadband right-angle prism are arranged side by side left and right and are in mirror image arrangement, and the first broadband polarization beam splitter, the fifth broadband polarization beam splitter, the fourth broadband 1/4 wave plate, the third broadband 1/4 wave plate and the fourth broadband polarization beam splitter are arranged side by side left and right, wherein the fifth broadband polarization beam splitter, the fourth broadband 1/4 wave plate, the third broadband 1/4 wave plate and the fourth broadband polarization beam splitter are arranged in mirror image arrangement left and right; the first broadband right-angle prism, the broadband 1/2 wave plate, the second broadband polarization beam splitter, the first broadband 1/4 wave plate, the second broadband 1/4 wave plate and the third broadband polarization beam splitter are arranged side by side left and right, wherein the second broadband polarization beam splitter, the first broadband 1/4 wave plate, the second broadband 1/4 wave plate and the third broadband polarization beam splitter are arranged in a left-right mirror image manner; the second broadband right-angle prism and the third broadband right-angle prism are arranged side by side and in mirror image; a broadband plane reflecting mirror is arranged on the left side of the first broadband polarization beam splitter, a dichroic mirror, a second filter, a second polaroid and a second photoelectric detector are sequentially arranged on the upper side of the broadband plane reflecting mirror, and a first filter, a first polaroid and a first photoelectric detector are sequentially arranged on the right side of the dichroic mirror;
The broadband plane mirror, the first broadband polarization beam splitter, the first broadband right-angle prism, the broadband 1/2 wave plate, the second broadband polarization beam splitter, the second broadband right-angle prism, the first broadband 1/4 wave plate, the second broadband 1/4 wave plate, the third broadband right-angle prism, the third broadband polarization beam splitter, the broadband pyramid prism, the fourth broadband polarization beam splitter, the fourth broadband right-angle prism, the third broadband 1/4 wave plate, the fourth broadband 1/4 wave plate, the fifth broadband right-angle prism and the fifth broadband polarization beam splitter can simultaneously meet the transmission of two laser components of lambda 1 and lambda 2;
The specific optical path connection is as follows:
The common optical path of the laser emits laser beams with wavelengths lambda 1 and lambda 2, the laser beams are divided into two beams by a first broadband polarization beam splitter, the beams passing through the first broadband polarization beam splitter are measuring beams, and the beams reflected by the first broadband polarization beam splitter are reference beams;
The measuring beam sequentially penetrates through a fifth broadband polarization beam splitter and a fourth broadband 1/4 wave plate, is reflected by the left end face of a cuboid sample to be measured, then penetrates through the fourth broadband 1/4 wave plate again, the polarization direction of the measuring beam is rotated by 90 degrees, the measuring beam is reflected by the fifth broadband polarization beam splitter, then is reflected by the fifth broadband right-angle prism, the fourth broadband right-angle prism and the fourth broadband polarization beam splitter in sequence, then penetrates through the third broadband 1/4 wave plate, is reflected by the right end face of the cuboid sample to be measured, then penetrates through the third broadband 1/4 wave plate again, the polarization direction of the measuring beam is rotated by 90 degrees, the measuring beam enters the broadband pyramid prism and then is reflected by a turning corner, sequentially penetrates through the third broadband polarization beam splitter and the second broadband 1/4 wave plate, is reflected by the right end face of the cuboid sample to be measured, and then penetrates through the second broadband 1/4 wave plate again, the polarization direction of the measuring beam is rotated by 90 degrees, and the measuring beam is reflected by the third broadband polarization beam splitter; then the measuring light beam is reflected by a third broadband right-angle prism, a second broadband right-angle prism and a second broadband polarization beam splitter in sequence, then passes through a first broadband 1/4 wave plate, is reflected by the left end face of a cuboid sample to be measured, passes through the first broadband 1/4 wave plate again, rotates 90 degrees in polarization direction, passes through the second broadband polarization beam splitter and the broadband 1/2 wave plate in sequence, rotates 90 degrees again in polarization direction, and then is reflected to a dichroic mirror by the first broadband right-angle prism, the first broadband polarization beam splitter and the broadband plane reflector in sequence; at the dichroic mirror, laser with the wavelength component of λ1 in the measuring beam is reflected and then sequentially passes through the first filter and the first polarizer to enter the first photodetector; at the dichroic mirror, laser with wavelength component lambda 2 in the measuring beam passes through the dichroic mirror and then sequentially passes through the second filter and the second polaroid to enter the second photoelectric detector;
The reference beam is reflected by the first broadband right angle prism and then passes through the broadband 1/2 wave plate, the reference beam polarization direction is rotated by 90 degrees, then sequentially passes through the second broadband polarization beam splitter, the first broadband 1/4 wave plate and the second broadband 1/4 wave plate, the reference beam polarization direction is rotated by 90 degrees, the reference beam is reflected by the third broadband polarization beam splitter, then sequentially passes through the first broadband 1/4 wave plate and the second broadband 1/4 wave plate after being reflected by the third broadband right angle prism, the reference beam polarization direction is rotated by 90 degrees, the reference beam enters the prism through the third broadband polarization beam splitter and then is reflected by a turning pyramid, then sequentially passes through the fourth broadband polarization beam splitter, the third broadband 1/4 wave plate and the fourth broadband 1/4 wave plate, and the reference beam polarization direction is rotated by 90 degrees and is reflected by the fifth broadband polarization beam splitter; then the reference beam is reflected by a fifth broadband right-angle prism, a fourth broadband right-angle prism and a fourth broadband polarization beam splitter in sequence, then the reference beam is transmitted through a third broadband 1/4 wave plate and a fourth broadband 1/4 wave plate again, the polarization direction is rotated by 90 degrees, and the reference beam is transmitted through the fifth broadband polarization beam splitter and the first broadband polarization beam splitter in sequence; the reference beam is then reflected by a broadband planar mirror to a dichroic mirror; at the dichroic mirror, laser with the wavelength component of lambda 1 in the reference beam is reflected and then sequentially passes through the first filter plate and the first polaroid to enter the first photoelectric detector; at the dichroic mirror, laser with wavelength component lambda 2 in the reference beam passes through the dichroic mirror and then sequentially passes through the second filter and the second polaroid to enter the second photoelectric detector;
The laser with the wavelength component of lambda 1 in the measuring beam and the laser with the wavelength component of lambda 1 in the reference beam meet at the first broadband polarization beam splitter, interference occurs after passing through the first polaroid, and an interference signal is received by the first photoelectric detector.
The laser with the wavelength component lambda 2 in the measuring beam and the laser with the wavelength component lambda 2 in the reference beam meet at the first broadband polarization beam splitter and interfere after passing through the second polaroid, and an interference signal is received by the second photoelectric detector.
Preferably, the broadband pyramid prism can be replaced by a broadband hollow retroreflector or two broadband plane mirrors placed vertically.
Preferably, the first broadband right-angle prism, the second broadband right-angle prism, the third broadband right-angle prism, the fourth broadband right-angle prism and the fifth broadband right-angle prism can be replaced by broadband plane reflectors.
Preferably, the broadband 1/2 wave plate can be replaced by a multi-order 1/2 wave plate meeting the transmission of two laser components of lambda 1 and lambda 2.
Preferably, the first broadband 1/4 wave plate, the second broadband 1/4 wave plate, the third broadband 1/4 wave plate and the fourth broadband 1/4 wave plate can be replaced by multi-order 1/4 wave plates meeting the transmission of two laser components of lambda 1 and lambda 2.
The invention also provides a dual-wavelength common-path-based laser interferometry method, which comprises the following steps:
step (1): opening the laser to make the laser common light path emit laser beams with wavelengths lambda 1 and lambda 2;
Step (2): the method comprises the steps that a first photoelectric detector receives a laser interference signal with the wavelength of lambda 1, calculates the length change L 1 of a cuboid to-be-detected sample measured by lambda L laser under air environment interference, and a second photoelectric detector receives a lambda 2 interference signal, and calculates the length change L 2 of the cuboid to-be-detected sample measured by lambda 2 laser under air environment interference;
Step (3): substituting L 1 and L 2 into the formula l=l 1-A(L2-L1) to calculate the length change amount L of the rectangular parallelepiped test sample.
The invention has the beneficial effects that: according to the measuring device and the measuring method, through optimizing the design of the optical path, the common optical path emission of the lambda 1 and lambda 2 lasers with two different wavelengths and the symmetrical arrangement of the measuring light beams and the reference light beams relative to the cuboid to-be-measured sample are realized, wherein the measuring light beams are reflected 4 times on two end faces of the cuboid to-be-measured sample respectively, and the reference light beams pass 6 times beside the to-be-measured sample, so that the two light beams are basically consistent under the influence of air turbulence, the influence of the test environment is eliminated to a certain extent, and therefore, the air environment interference resistance of the device is good.
Drawings
FIG. 1 is a wavelength common-path laser interferometry apparatus;
FIG. 2 is a measurement beam path design;
FIG. 3 is a reference beam path design;
In the figure: 1. broadband plane mirrors; 2. a first broadband polarization beam splitter; 3. a first broadband right angle prism; 4. broadband 1/2 wave plate; 5. a second broadband polarization beam splitter; 6. a second broadband right angle prism; 7. a first broadband 1/4 wave plate; 8. a cuboid sample to be tested; 9. a second broadband 1/4 wave plate; 10. a third broadband right angle prism; 11. a third broadband polarization beam splitter; 12. broadband pyramid prisms; 13. a fourth broadband polarization beam splitter; 14. a fourth broadband right angle prism; 15. a third broadband 1/4 wave plate; 16. a fourth broadband 1/4 wave plate; 17. a fifth broadband right angle prism; 18. a fifth broadband polarization beam splitter; 19. a first photodetector; 20. a first polarizing plate; 21. a first filter; 22. a second photodetector; 23. a second polarizing plate; 24. a second filter; 25. a dichroic mirror; 26. a laser.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings. It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the invention.
Examples
The test environment of the embodiment is as follows: general experimental environment at 20+/-3 ℃ and test objects are: a second-class stainless steel gauge block of 100 mm. The lasers used are lasers capable of common-path emission λ 1 =1064nm and λ 2 =532 nm.
The dual-wavelength common-path laser interferometry device in the embodiment comprises a broadband plane reflector 1, a first broadband polarization beam splitter 2, a first broadband rectangular prism 3, a broadband 1/2 wave plate 4, a second broadband polarization beam splitter 5, a second broadband rectangular prism 6, a first broadband 1/4 wave plate 7, a second broadband 1/4 wave plate 9, a third broadband rectangular prism 10, a third broadband polarization beam splitter 11, a broadband pyramid prism 12, a fourth broadband polarization beam splitter 13, a fourth broadband rectangular prism 14, a third broadband 1/4 wave plate 15, a fourth broadband 1/4 wave plate 16, a fifth broadband rectangular prism 17, a fifth broadband polarization beam splitter 18, a first photoelectric detector 19, a first polarizing plate 20, a first filter 21, a second photoelectric detector 22, a second polarizing plate 23, a second filter 24, a dichroic mirror 25 and a laser 26;
A second-class stainless steel gauge block of 100mm is used as a cuboid sample 8 to be tested. The positional relationship of each part is described centering on the rectangular parallelepiped sample 8: the right end face of a cuboid sample to be tested 8 is provided with a third broadband 1/4 wave plate 15 and a second broadband 1/4 wave plate 9 which are parallel up and down, a fourth broadband right-angle prism 14, a fourth broadband polarization beam splitter 13, a third broadband polarization beam splitter 11 and a third broadband right-angle prism 10 are arranged on the right sides of the third broadband 1/4 wave plate 15 and the second broadband 1/4 wave plate 9 and are parallel from top to bottom and are parallel to the right sides of the third broadband 1/4 wave plate 15 and the second broadband 1/4 wave plate 9, and the right-angle edges of the fourth broadband right-angle prism 14 are parallel to the upper side of the fourth broadband polarization beam splitter 13, the lower side of the fourth broadband polarization beam splitter 13 and the right-angle edges of the third broadband right-angle prism 10; a broadband pyramid prism 12 is arranged on the right side of the fourth broadband polarization beam splitter 13 and the right side of the third broadband polarization beam splitter 11 side by side, and the hypotenuse of the broadband pyramid prism 12 is parallel to the right side of the fourth broadband polarization beam splitter 13 and the right side of the third broadband polarization beam splitter 11;
A fourth broadband 1/4 wave plate 16 and a first broadband 1/4 wave plate 7 are arranged up and down in parallel with the left end face of the cuboid sample 8 to be tested, a fifth broadband right-angle prism 17, a fifth broadband polarization beam splitter 18, a second broadband polarization beam splitter 5 and a second broadband right-angle prism 6 are arranged on the left sides of the fourth broadband 1/4 wave plate 16 and the first broadband 1/4 wave plate 7 in parallel with the left sides of the fourth broadband 1/4 wave plate 16 and the first broadband 1/4 wave plate 7 from top to bottom in parallel, and the right-angle edges of the fifth broadband right-angle prism 17 are parallel to the upper side of the fifth broadband polarization beam splitter 18, the lower side of the second broadband polarization beam splitter 5 and the right-angle edge of the second broadband right-angle prism 6; a broadband 1/2 wave plate 4 is arranged on the left side of a second broadband polarization beam splitter 5, the left side surface of the second broadband polarization beam splitter 5 is parallel to the right side surface of the broadband 1/2 wave plate 4, a first broadband polarization beam splitter 2 and a first broadband right-angle prism 3 are arranged side by side from top to bottom on the left side of the broadband 1/2 wave plate 4, a right-angle side of the first broadband right-angle prism 3 is parallel to the left side surface of the broadband 1/2 wave plate 4, and the other right-angle side of the first broadband right-angle prism 3 is parallel to the lower side surface of the first broadband polarization beam splitter 2;
The fifth broadband right-angle prism 17 is arranged side by side and in mirror image with the fourth broadband right-angle prism 14, the first broadband polarization beam splitter 2, the fifth broadband polarization beam splitter 18, the fourth broadband 1/4 wave plate 16, the third broadband 1/4 wave plate 15 and the fourth broadband polarization beam splitter 13 are arranged side by side, wherein the fifth broadband polarization beam splitter 18, the fourth broadband 1/4 wave plate 16, the third broadband l/4 wave plate 15 and the fourth broadband polarization beam splitter 13 are arranged in mirror image; the first broadband right-angle prism 3, the broadband 1/2 wave plate 4, the second broadband polarization beam splitter 5, the first broadband 1/4 wave plate 7, the second broadband 1/4 wave plate 9 and the third broadband polarization beam splitter 11 are arranged side by side left and right, wherein the second broadband polarization beam splitter 5, the first broadband 1/4 wave plate 7, the second broadband 1/4 wave plate 9 and the third broadband polarization beam splitter 11 are arranged in a left-right mirror image; the second broadband right-angle prism 6 and the third broadband right-angle prism 10 are arranged side by side left and right and are arranged in a mirror image mode;
A broadband reflector 1 is arranged on the left side of the first broadband polarization beam splitter 2, a dichroic mirror 25, a second filter 24, a second polaroid 23 and a second photoelectric detector 22 are sequentially arranged on the upper side of the broadband reflector 1, and a first filter 21, a first polaroid 20 and a first photoelectric detector 19 are sequentially arranged on the right side of the dichroic mirror 25;
The broadband reflection mirror 1, the first broadband polarization beam splitter 2, the first broadband rectangular prism 3, the broadband 1/2 wave plate 4, the second broadband polarization beam splitter 5, the second broadband rectangular prism 6, the first broadband 1/4 wave plate 7, the second broadband 1/4 wave plate 9, the third broadband rectangular prism 10, the third broadband polarization beam splitter 11, the broadband pyramid prism 12, the fourth broadband polarization beam splitter 13, the fourth broadband rectangular prism 14, the third broadband 1/4 wave plate 15, the fourth broadband 1/4 wave plate 16, the fifth broadband rectangular prism 17 and the fifth broadband polarization beam splitter 18 can simultaneously meet the transmission of two laser components of lambda 1 and lambda 2;
The specific optical path connection is as follows:
The laser 26 emits a laser beam with wavelengths lambda 1 and lambda 2 in a common optical path, the laser beam is divided into two beams by the first broadband polarization beam splitter 2, wherein the beam transmitted through the first broadband polarization beam splitter 2 is a measuring beam, and the beam reflected by the first broadband polarization beam splitter 2 is a reference beam;
The measuring beam sequentially passes through a fifth broadband polarization beam splitter 18 and a fourth broadband 1/4 wave plate 16, is reflected by the left end face of a cuboid sample 8 to be measured, then passes through the fourth broadband 1/4 wave plate 16 again, the polarization direction of the measuring beam rotates by 90 degrees, the measuring beam is reflected by the fifth broadband polarization beam splitter 18, then passes through a third broadband 1/4 wave plate 15 after being sequentially reflected by a fifth broadband right angle prism 17, a fourth broadband right angle prism 14 and a fourth broadband polarization beam splitter 13, passes through the third broadband 1/4 wave plate 15 again after being reflected by the right end face of the cuboid sample 8 to be measured, the polarization direction of the measuring beam rotates by 90 degrees, the measuring beam passes through the fourth broadband polarization beam splitter 13, passes through the broadband pyramid prism 12 and is reflected by turning back, and sequentially passes through the third broadband polarization beam splitter 11 and the second broadband 1/4 wave plate 9 again after being reflected by the right end face of the cuboid sample 8 to be measured, the polarization direction of the measuring beam rotates by 90 degrees, and the measuring beam is reflected by the third broadband polarization beam splitter 11; then the light is reflected by a third broadband right angle prism 10, a second broadband right angle prism 6 and a second broadband polarization beam splitter 5 in sequence, then passes through a first broadband 1/4 wave plate 7, is reflected by the left end face of a cuboid sample 8 to be measured, passes through the first broadband 1/4 wave plate 7 again, rotates 90 degrees in the polarization direction of a measuring beam, passes through the second broadband polarization beam splitter 5 and the broadband 1/2 wave plate 4 in sequence, rotates 90 degrees again in the polarization direction of the measuring beam, and then is reflected to a dichroic mirror 25 by the first broadband right angle prism 3, the first broadband polarization beam splitter 2 and the broadband plane reflector 1 in sequence; at the dichroic mirror 25, the laser light having a wavelength component λ1 in the measurement beam is reflected, and then sequentially passes through the first filter 21, the first polarizing plate 20, and enters the first photodetector 19; at the dichroic mirror 25, the laser light with the wavelength component λ2 in the measuring beam passes through the dichroic mirror 25, then sequentially passes through the second filter 24 and the second polarizer 23, and enters the second photodetector 22;
the reference beam is reflected by the first broadband right angle prism 3 and then passes through the broadband l/2 wave plate 4, the reference beam polarization direction rotates 90 degrees, then sequentially passes through the second broadband polarization beam splitter 5, the first broadband 1/4 wave plate 7 and the second broadband 1/4 wave plate 9, the reference beam polarization direction rotates 90 degrees, the reference beam is reflected by the third broadband polarization beam splitter 11, then sequentially passes through the third broadband right angle prism 10, the second broadband right angle prism 6 and the second broadband polarization beam splitter 5 and then sequentially passes through the first broadband 1/4 wave plate 7 and the second broadband 1/4 wave plate 9, the reference beam polarization direction rotates 90 degrees, the reference beam enters the broadband prism 12 through the third broadband polarization beam splitter 11 and then is reflected by a turning pyramid, then sequentially passes through the fourth broadband polarization beam splitter 13, the third broadband 1/4 wave plate 15 and the fourth broadband 1/4 wave plate 16, and the reference beam polarization direction rotates 90 degrees, and then the reference beam is reflected by the fifth broadband polarization beam splitter 18; then the reference beam is reflected by a fifth broadband right angle prism 17, a fourth broadband right angle prism 14 and a fourth broadband polarization beam splitter 13 in sequence, then the reference beam is transmitted through a third broadband 1/4 wave plate 15 and a fourth broadband 1/4 wave plate 16 again, the polarization direction is rotated by 90 degrees, and the reference beam is transmitted through a fifth broadband polarization beam splitter 18 and a first broadband polarization beam splitter 2 in sequence; the reference beam is then reflected by the broadband planar mirror 1 to the dichroic mirror 25; at the dichroic mirror 25, laser light having a wavelength component λ1 in the reference beam is reflected, and then sequentially passes through the first filter 21, the first polarizing plate 20, and enters the first photodetector 19; at the dichroic mirror 25, the laser light with the wavelength component lambda 2 in the reference beam passes through the dichroic mirror 25, then sequentially passes through the second filter 24 and the second polarizer 23, and enters the second photodetector 22;
The laser light with the wavelength component of λ1 in the measuring beam and the laser light with the wavelength component of λ1 in the reference beam meet at the first broadband polarization beam splitter 2, interfere after passing through the first polarizer 20, and the interference signal is received by the first photodetector 19.
The laser with the wavelength component lambda 2 in the measuring beam and the laser with the wavelength component lambda 2 in the reference beam meet at the first broadband polarization beam splitter 2, interfere after passing through the second polarizer 23, and the interference signal is received by the second photodetector 22.
Wherein the broadband corner cube 12 is replaced with a broadband hollow retroreflector or two vertically placed broadband planar mirrors. The first broadband right angle prism 3, the second broadband right angle prism 6, the third broadband right angle prism 10, the fourth broadband right angle prism 14, and the fifth broadband right angle prism 17 may be replaced by broadband plane mirrors. The broadband 1/2 wave plate 4 may be replaced by a multi-order 1/2 wave plate satisfying the transmission of both laser components of λ1 and λ 2. The first broadband 1/4 wave plate 7, the second broadband 1/4 wave plate 9, the third broadband 1/4 wave plate 15 and the fourth broadband 1/4 wave plate 16 can be replaced by a multi-order 1/4 wave plate meeting the transmission of two laser components of lambda 1 and lambda 2.
The measurement method based on the dual-wavelength common-path laser interferometry device comprises the following steps:
Step (1): opening the laser 26 to make the laser 26 co-light path emit laser beams with wavelengths lambda 1 and lambda 2;
Step (2): the first photoelectric detector 19 receives a laser interference signal with the wavelength of lambda 1, calculates the length change L1 of the cuboid to-be-measured sample 8 measured by lambda 1 laser under air environment interference, and the second photoelectric detector 22 receives a lambda 2 interference signal, and calculates the length change L 2 of the cuboid to-be-measured sample 8 measured by lambda 2 laser under air environment interference;
Step (3): substituting L 1 and L 2 into the formula l=l 1-A(L2-L1) to calculate the length change amount L of the rectangular parallelepiped test sample 8.
The 100mm second degree stainless steel gauge was measured using a conventional Michelson laser interferometer (KEYSIGHT 5517B) and the measurement results from the test varied to 8.5 μm within 1 hour under the influence of air turbulence. The invention adopts the laser common-path measurement of two wavelengths: the method has the advantages that the lambda 1 is 1064nm, the lambda 2 is 532nm, the measurement result of the lambda 1 laser is changed to 5.4 mu m in 1 hour, the measurement result of the lambda 2 laser is changed to 5.2 mu m in 1 hour, the measurement result after real-time processing by using the dual-wavelength laser interference technology described by the formula (1) is changed to 1.1 mu m in 1 hour, and the result shows that the method can effectively reduce the interference of the air environment when the laser interference is used for measuring the linear expansion and the deformation of an object.
Claims (7)
1. The dual-wavelength common-path laser interferometry device is characterized by comprising a broadband plane reflector (1), a first broadband polarization beam splitter (2), a first broadband right-angle prism (3), a broadband 1/2 wave plate (4), a second broadband polarization beam splitter (5), a second broadband right-angle prism (6), a first broadband 1/4 wave plate (7), a second broadband 1/4 wave plate (9), a third broadband right-angle prism (10), a third broadband polarization beam splitter (11), a broadband pyramid prism (12), a fourth broadband polarization beam splitter (13), a fourth broadband right-angle prism (14), a third broadband 1/4 wave plate (15), a fourth broadband 1/4 wave plate (16), a fifth broadband right-angle prism (17), a fifth broadband polarization beam splitter (18), a first photoelectric detector (19), a first polarizer (20), a first filter (21), a second photoelectric detector (22), a second polarizer (23), a second filter (24), a dichroic mirror (25) and a laser (26);
The positional relationship of each part is described centering on a cuboid sample (8) to be measured: a third broadband 1/4 wave plate (15) and a second broadband 1/4 wave plate (9) are arranged in parallel up and down with the right end face of the cuboid sample to be tested (8), a fourth broadband right-angle prism (14), a fourth broadband polarization beam splitter (13), a third broadband polarization beam splitter (11) and a third broadband right-angle prism (10) are arranged on the right sides of the third broadband 1/4 wave plate (15) and the second broadband 1/4 wave plate (9) and are parallel to the right sides of the third broadband 1/4 wave plate (15) and the second broadband 1/4 wave plate (9) from top to bottom, and the right sides of the fourth broadband right-angle prism (14) are parallel to the upper sides of the fourth broadband polarization beam splitter (13), the lower sides of the fourth broadband polarization beam splitter (13) and the right sides of the third broadband right-angle prism (10); a broadband pyramid prism (12) is arranged on the right side of the fourth broadband polarization beam splitter (13) and the right side of the third broadband polarization beam splitter (11) in parallel, and the hypotenuse of the broadband pyramid prism (12) is parallel to the right side surfaces of the fourth broadband polarization beam splitter (13) and the third broadband polarization beam splitter (11);
A fourth broadband 1/4 wave plate (16) and a first broadband 1/4 wave plate (7) are arranged in parallel with the left end face of the cuboid sample to be tested (8) up and down, a fifth broadband right-angle prism (17), a fifth broadband polarization beam splitter (18), a second broadband polarization beam splitter (5) and a second broadband right-angle prism (6) are arranged on the left side of the fourth broadband 1/4 wave plate (16) and the left side of the first broadband 1/4 wave plate (7) in parallel from top to bottom, and the right-angle edges of the fifth broadband right-angle prism (17) are parallel to the upper side of the fifth broadband polarization beam splitter (18), the lower side of the second broadband polarization beam splitter (5) and the right-angle edges of the second broadband right-angle prism (6); a broadband 1/2 wave plate (4) is arranged on the left side of a second broadband polarization beam splitter (5), the left side surface of the second broadband polarization beam splitter (5) is parallel to the right side surface of the broadband 1/2 wave plate (4), a first broadband polarization beam splitter (2) and a first broadband right-angle prism (3) are arranged side by side from top to bottom on the left side of the broadband 1/2 wave plate (4), a right-angle edge of the first broadband right-angle prism (3) is parallel to the left side surface of the broadband 1/2 wave plate (4), and the other right-angle edge of the first broadband right-angle prism (3) is parallel to the lower side surface of the first broadband polarization beam splitter (2);
The fifth broadband right-angle prism (17) is arranged side by side and in mirror image with the fourth broadband right-angle prism (14), the first broadband polarization beam splitter (2), the fifth broadband polarization beam splitter (18), the fourth broadband 1/4 wave plate (16), the third broadband 1/4 wave plate (15) and the fourth broadband polarization beam splitter (13) are arranged side by side left and right, wherein the fifth broadband polarization beam splitter (18), the fourth broadband 1/4 wave plate (16), the third broadband 1/4 wave plate (15) and the fourth broadband polarization beam splitter (13) are arranged in mirror image left and right; the first broadband right-angle prism (3), the broadband 1/2 wave plate (4), the second broadband polarization beam splitter (5), the first broadband 1/4 wave plate (7), the second broadband 1/4 wave plate (9) and the third broadband polarization beam splitter (11) are arranged side by side left and right, wherein the second broadband polarization beam splitter (5), the first broadband 1/4 wave plate (7), the second broadband 1/4 wave plate (9) and the third broadband polarization beam splitter (11) are arranged in a left-right mirror image mode; the second broadband right-angle prism (6) and the third broadband right-angle prism (10) are arranged side by side and in mirror image;
A broadband plane reflecting mirror (1) is arranged on the left side of the first broadband polarization beam splitter (2), a dichroic mirror (25), a second filter (24), a second polaroid (23) and a second photoelectric detector (22) are sequentially arranged on the upper side of the broadband plane reflecting mirror (1), and a first filter (21), a first polaroid (20) and a first photoelectric detector (19) are sequentially arranged on the right side of the dichroic mirror (25);
The broadband plane mirror (1), the first broadband polarization beam splitter (2), the first broadband right-angle prism (3), the broadband 1/2 wave plate (4), the second broadband polarization beam splitter (5), the second broadband right-angle prism (6), the first broadband 1/4 wave plate (7), the second broadband 1/4 wave plate (9), the third broadband right-angle prism (10), the third broadband polarization beam splitter (11), the broadband pyramid prism (12), the fourth broadband polarization beam splitter (13), the fourth broadband right-angle prism (14), the third broadband 1/4 wave plate (15), the fourth broadband 1/4 wave plate (16), the fifth broadband right-angle prism (17) and the fifth broadband polarization beam splitter (18) can simultaneously meet the transmission of two laser components of lambda 1 and lambda 2.
2. The dual wavelength common path laser interferometry device of claim 1, wherein the specific optical path connections are as follows: the common optical path of the laser (26) emits a laser beam with the wavelengths of lambda 1 and lambda 2, the laser beam is divided into two beams by a first broadband polarization beam splitter (2), the beam passing through the first broadband polarization beam splitter (2) is a measuring beam, and the beam reflected by the first broadband polarization beam splitter (2) is a reference beam;
The measuring beam sequentially penetrates through a fifth broadband polarization beam splitter (18) and a fourth broadband 1/4 wave plate (16), is reflected by the left end face of a cuboid to-be-measured sample (8), then penetrates through the fourth broadband 1/4 wave plate (16) again, the polarization direction of the measuring beam is rotated by 90 degrees, the measuring beam is reflected by the fifth broadband polarization beam splitter (18), then the measuring beam sequentially penetrates through a third broadband 1/4 wave plate (15) after being reflected by the fifth broadband right-angle prism (17), the fourth broadband right-angle prism (14) and the fourth broadband polarization beam splitter (13), is again transmitted through the third broadband 1/4 wave plate (15) after being reflected by the right end face of the cuboid to-be-measured sample (8), the polarization direction of the measuring beam is rotated by 90 degrees, the measuring beam penetrates through the fourth broadband polarization beam splitter (13), is reflected by turning and then returns after entering the broadband pyramid prism (12), and sequentially penetrates through the third broadband polarization beam splitter (11) and the second broadband 1/4 wave plate (9), is reflected by the right end face of the cuboid to-be-measured sample (8), and then the measuring beam is rotated by the third broadband polarization splitter (9); then the measuring light beam is reflected by a third broadband right angle prism (10), a second broadband right angle prism (6) and a second broadband polarization beam splitter (5) in sequence, then passes through a first broadband 1/4 wave plate (7), is reflected by the left end face of a cuboid to-be-measured sample (8) and passes through the first broadband 1/4 wave plate (7) again, the polarization direction of the measuring light beam is rotated by 90 degrees, the polarization direction of the measuring light beam passes through the second broadband polarization beam splitter (5) and the broadband 1/2 wave plate (4) in sequence, and then is reflected by a first broadband right angle prism (3), a first broadband polarization beam splitter (2) and a broadband plane mirror (1) to a dichroic mirror (25) in sequence; at the dichroic mirror (25), laser light with the wavelength component lambda l in the measuring beam is reflected and then sequentially transmitted through the first filter (21) and the first polarizer (20) to enter the first photodetector (19); at the dichroic mirror (25), laser with the wavelength component lambda 2 in the measuring beam passes through the dichroic mirror (25) and then sequentially passes through the second filter (24) and the second polaroid (23) to enter the second photodetector (22);
The reference beam is reflected by a first broadband right angle prism (3) and then passes through a broadband 1/2 wave plate (4), the reference beam polarization direction is rotated by 90 degrees, then passes through a second broadband polarization beam splitter (5), a first broadband 1/4 wave plate (7) and a second broadband 1/4 wave plate (9) in sequence, the reference beam polarization direction is rotated by 90 degrees, the reference beam is reflected by a third broadband polarization beam splitter (11), then the reference beam is reflected by a third broadband right angle prism (10), a second broadband right angle prism (6) and a second broadband polarization beam splitter (5), then passes through the first broadband 1/4 wave plate (7) and the second broadband 1/4 wave plate (9) again, the reference beam polarization direction is rotated by 90 degrees, the reference beam enters the broadband pyramid prism (12) through the third broadband polarization beam splitter (11) and then is turned back, then the reference beam passes through a fourth broadband polarization beam splitter (13), a third broadband 1/4 wave plate (15) and a fourth broadband 1/4 wave plate (16) in sequence, and the reference beam is rotated by a fifth broadband polarization beam splitter (18); then the reference beam is reflected by a fifth broadband right angle prism (17), a fourth broadband right angle prism (14) and a fourth broadband polarization beam splitter (13) in sequence, then the reference beam is transmitted through a third broadband 1/4 wave plate (15) and a fourth broadband 1/4 wave plate (16) again, the polarization direction is rotated by 90 degrees, and the reference beam is transmitted through a fifth broadband polarization beam splitter (18) and a first broadband polarization beam splitter (2) in sequence; the reference beam is then reflected by the broadband planar mirror (1) to the dichroic mirror (25); at the dichroic mirror (25), the laser light with the wavelength component lambda 1 in the reference beam is reflected and then sequentially transmitted through the first filter (21) and the first polaroid (20) to enter the first photodetector (19); at the dichroic mirror (25), laser with the wavelength component lambda 2 in the reference beam passes through the dichroic mirror (25) and then sequentially passes through the second filter (24) and the second polaroid (23) to enter the second photodetector (22);
The laser with the wavelength component of lambda 1 in the measuring beam and the laser with the wavelength component of lambda 1 in the reference beam meet at a first broadband polarization beam splitter (2), interfere after passing through a first polaroid (20), and an interference signal is received by a first photoelectric detector (19);
The laser with the wavelength component of lambda 2 in the measuring beam and the laser with the wavelength component of lambda 2 in the reference beam meet at the first broadband polarization beam splitter (2), interfere after passing through the second polaroid (23), and an interference signal is received by the second photoelectric detector (22).
3. The dual wavelength common path laser interferometry device of claim 2, wherein the broadband corner cube (12) is replaced with a broadband hollow retroreflector or two vertically placed broadband planar mirrors.
4. The dual wavelength common path laser interferometry device according to claim 2, wherein the first broadband right angle prism (3), the second broadband right angle prism (6), the third broadband right angle prism (10), the fourth broadband right angle prism (14), and the fifth broadband right angle prism (17) are replaced by broadband plane mirrors.
5. The dual wavelength common path laser interferometry device of claim 2 wherein the broadband 1/2 waveplate (4) is replaced by a multi-step 1/2 waveplate that satisfies both λ1 and λ2 laser component transmissions.
6. The dual wavelength common path laser interferometry device according to claim 2, wherein the first broadband 1/4 wave plate (7), the second broadband 1/4 wave plate (9), the third broadband 1/4 wave plate (15), the fourth broadband 1/4 wave plate (16) may be replaced by a multi-order 1/4 wave plate satisfying both λ1 and λ2 laser component transmission.
7. A dual wavelength common path laser interferometry method based on the apparatus of any one of claims 1 to 6, comprising the steps of:
Step (1): opening the laser (26) to enable the laser (26) to emit laser beams with wavelengths lambda 1 and lambda 2 in a common optical path;
Step (2): the first photoelectric detector (19) receives a laser interference signal with the wavelength of lambda 1, calculates the length change L 1 of the cuboid to-be-measured sample (8) measured by lambda 1 laser under air environment interference, and the second photoelectric detector (22) receives a lambda 2 interference signal, and calculates the length change L 2 of the cuboid to-be-measured sample (8) measured by lambda 2 laser under air environment interference;
Step (3): substituting L 1 and L 2 into the formula l=l 1-A(L2-L1) calculates the length variation L of the rectangular parallelepiped test sample (8).
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